SPUTTERING MAGNETRONS POWER SUPPLIES

All our magnetrons, ion sources, and bias power supplies have the same user interface as shown above

DC magnetron power supplies MPS Series produce single polarity negative pulsed output voltage. They are current sources
with voltage limitation, so any load mode is operating mode and doesn't stop power supply work.

MPS power supplies also provide ignition voltage which is two times more than its nominal voltage (1000 V power supply
provides 2000 V to an open circuit). It facilitates magnetron discharge ignition and allows better use a power supply
overall power.

Power supplies have arc suppression mode which may be disabled. If arc suppression is disabled, in case of breakdown in the load,
power supply continues supply the set current which is not increasing when arc appears. The output voltage drops to a value
determined by the load resistance. Usually it is OK to stop an arc development and get back to the normal operation mode.

If arc suppression mode is enabled, in case of breakdown in the load and voltage decreasing, power supply turns off the output current for
a few milliseconds, then turns it on again. Arc counter works in enabled arc suppression mode.

Control - local from the front panel or remote via interface RS232/RS485, Modbus RTU, SLIP, or dry contacts;

Remote parameters control via serial interface RS232/RS485;

Remote output voltage ON/OFF via external dry contacts;

Sound alarm if the unit temperature is close to a critical value and when active arc suppression acts;

OLED display with a few operation modes. Selectable interface language - English or Russian;

To increase the power a few units may be connected in parallel to power a common load (IMPORTANT: only units
with the same output voltage may be connected in parallel). Any unit of such group can be assigned as a master to control all other units);

Power supplies are designed for continues round the clock work.

The output current and voltage average values for the period and active power values are shown in the Table below for the
DC magnetron power supplies nomenclature:

AC dual magnetron power supplies MPS.....AC Series produce AC pulsed output voltage with symmetric half-waves. They are current sources
with voltage limitation, so any load mode is operating mode and doesn't stop power supply work.

Power supplies have automatic arc suppression.

Control - local from the front panel or remote via interface RS232/RS485, Modbus RTU, SLIP, or dry contacts;

Remote parameters control via serial interface RS232/RS485;

Remote output voltage ON/OFF via external dry contacts;

Sound alarm if the unit temperature is close to a critical value and when active arc suppression acts;

OLED display with a few operation modes. Selectable interface language - English or Russian;

Cooling - forced air (possible option - water cooling at big powers);

External interlock input and output of ON state indicator;

To increase the power a few units may be connected in parallel to power a common load (IMPORTANT: only units
with the same output voltage may be connected in parallel). Any unit of such group can be assigned as a master to control all other units);

Power supplies are designed for continues round the clock work.

The output current and voltage RMS values and active power values are shown in the Table below for the
DC magnetron power supplies nomenclature: