Cleanroom Ellipsometer

General Information:

System Information:

General Description:

The cleanroom Ellipsometer can measure the thickness and refractive index of thin films on reflective substrates, as well as the opitcal properties of bare substrates.

Capabilities:

~The stage can handle up to a 6 inch wafer diameter
~The ellipsometer utilizes a single laser at a wavelength of 6328Å
~Film Thickness Range: 0-60,000 Angstroms
~Spot size is approximately 1mm by 3mm
~Your substrate must be polished and must not rough to defract the laser

Notes:

Note: Please know the optical constants (refractive index and extinction coefficient) of both your film to be measure, and the substrate you are measuring upon.