PiezoMEMS are very attractive for industries like automotive, aerospace, medical, telecom and consumer electronics.

Piezoelectric thin films can be useful in:

Ultrasonic imaging transducers

Positioning systems

Pressure and flow sensors (e.g. disposable blood pressure sensors)

Gas sensors

Energy harvester

Accelerometers (e.g. for airbag deployment in collisions)

Micropumps

Within the field of microfluidics, PZT can be utilized for making pumps and valves. For acoustic applications, piezoelectric micromachined ultrasonic transducers (pMUT’s) can be used for both sending and receiving ultrasound. Within optics, bending mode actuators can be used for making spectrometers (Fabry‐Perot and FTIR) and mirrors as well as coherence modifying devices.

Direct effect:

Converse effect:

Converse effect:

Both effects in resonance:

sensors andenergy conversion

linear actuators

with resonantultrasound excitation

resonant transducer

Vibration sensor

Accelerometer

Microphone

Photoacoustic sensors

Energy scavenging from vibrations

Vibration damper

Optical scanner

Optical switch

Micro and nano probes

Switch/relay, RF switch

Valve

Droplet ejector, inkjet

Ultrasonic stator for micromotor

Liquid delivery

Ultrasonic imaging

RF filters

Transformers

Proximity sensors

Published April 22, 2010

The research leading to these results has received funding from the European Community's Seventh Framework Programme (FP7/2010-2013) under grant agreement n° 229196