8.
8Puurunen, ALD 2014 Kyoto, June 15, 2014, tutorial session
ALE patent granted
in 26 countries
 In prior art study, closest found
a German patent from mid-50s
 saturation was missing from
this patent
 Hearings related to the patent
were organized in several
countries, including The United
States, Japan, and The Soviet
Union

11.
11Puurunen, ALD 2014 Kyoto, June 15, 2014, tutorial session
International Conference on Vapor Growth and
Epitaxy, 5 in San Diego, California
 Suntola invited talk on Atomic Layer Epitaxy
 Little scientific information available on the ALE grown material
 Use of the term “epitaxy” for non-single-crystal thin films was
criticized
 Prof Jun-ichi Nishizawa from Japan was among the participants,
realized the significance of ALE  initiation of GaAs research in
Japan (“Molecular Layer Epitaxy”)
 Nishizawa, MLE-GaAs in the 16th, (1984 International) Conference
on Solid State Devices and Materials, in Kobe, Japan, 1984

17.
17Puurunen, ALD 2014 Kyoto, June 15, 2014, tutorial session
 1998, Suntola left behind the active role in ALE (ALD)
 2004 The European SEMI Award
“Honoring the Pioneer in
Atomic Layer Deposition Techniques ...
that paved the way for the development
of nanoscale semiconductor devices“
 2014: Suntola continues as a board member of Picosun Oy, the
chairman of the Physics Foundations Society and a board
member and a frequent lecturer in the Finnish Society for Natural
Philosophy.

30.
30Puurunen, ALD 2014 Kyoto, June 15, 2014, tutorial session
Puurunen, J. Appl. Phys 97(2005) 121301
Riikka’s ALD history activities as postdoc at IMEC
”.. Most of the publications
referred to in Table I have
been published in Soviet–
Russian journals, which
have been translated into
English. The overview of
Table I is meant to be
introductory, and it can by
no means be expected to be
complete.”

31.
31Puurunen, ALD 2014 Kyoto, June 15, 2014, tutorial session
Virtual Project on the History of ALD
(VPHA)
 VPHA set up to clarify open questions on the history of ALD
 Carried out in atmosphere of Openness, Respect, Trust
 Collect & read ALD literature until 1986.
 Common literature list collected in the publicly accessible ALD-
history-evolving-file
 VPHA open since: July 25, 2013, announced at ALD 2013
 First publication: poster at Baltic ALD, May 12-13, Helsinki
 At this AVS-ALD 2014 conference in Kyoto: two posters (#3, #4)
Work on-going
Everyone welcome to join!