This Standard was technically approved by the Metrics
Global Technical Committee. This edition was approved for publication by the
global Audits and Reviews Subcommittee on December 23, 2013. Available at
www.semiviews.org and www.semi.org in January 2014.

The purpose of this Document is to provide the
semiconductor industry with support in the identification and elimination of
product time waste in the product life cycle within the factory. The Document
describes an approach to product time measurement which, if uniformly applied,
will support the creation of results that can be compared from one production
line to another.

This Document defines a method for organizing and
preprocessing factory data to support the detection and reduction of product
time waste for a product unit during its time in the factory.

The method takes a user-specified time period, breaks
it down into contiguous time segments and categorizes each time segment as a
type of active or wait time.

Factory events and context data are used to delineate
the time segments. The output of product time measurement is an analysis-ready
data set. Procedures for analysis of the data to identify specific product time
waste are excluded from this Document.

This Document specifies a common approach for gathering
and combining data to support the reduction of product cycle time through the
identification and elimination of product time waste in the factory life cycle
of a product unit. It is defined in a general way so that it can be applied to
different domains, including different types of factories (e.g., wafer fabs or
flat panel factories) and different aspects within a factory (e.g., production
equipment or automated material handling systems).

Product time measurement may be applied at the
individual substrate-level or the lot-level.

Subordinate Document:

SEMI E168.1-0114 - Specification for Product Time
Measurement in GEM 300 Production Equipment