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Method and device for synthesizing high orientationally arranged carbon nano-tube by using organic liquid

Method and device for synthesizing high orientationally arranged carbon nano-tube by using organic liquid

外国特許コード

F110005089

整理番号

A051-71US

掲載日

2011年8月19日

出願国

アメリカ合衆国

出願番号

48177102

公報番号

20040151653

公報番号

7531156

出願日

平成14年6月21日(2002.6.21)

公報発行日

平成16年8月5日(2004.8.5)

公報発行日

平成21年5月12日(2009.5.12)

国際出願番号

JP2002006235

国際公開番号

WO2003000590

国際出願日

平成14年6月21日(2002.6.21)

国際公開日

平成15年1月3日(2003.1.3)

優先権データ

特願2001-193629
(2001.6.26)
JP

2002WO-JP06235
(2002.6.21)
WO

発明の名称
（英語）

Method and device for synthesizing high orientationally arranged carbon nano-tube by using organic liquid

発明の概要（英語）

(US7531156)A method capable of synthesizing carbon nanotubes at low cost and large quantities, an apparatus usable for carrying out the method, and carbon nanotubes densely aligned on and firmly bonded to a Si substrate over, and oriented perpendicular to, an entire surface thereof are provided. Highly oriented, aligned carbon nanotubes are synthesized from an organic liquid by forming a substrate with a buildup thereon of a thin film or fine insular particles composed of at least one metallic element; exposing the substrate (3) having the buildup to a hydrogen plasma; and heating the substrate (3) exposed to the hydrogen plasma in the organic liquid (10) to a predetermined temperature. The synthesis apparatus comprises: a liquid chamber or tank (1) for an organic liquid; a water cooling means (2) for cooling the liquid tank (1) from its outside; a substrate holder (5) for holding a substrate (3), the holder having electrodes (4) for passing an electric current through the substrate (3); a condensing means (7) comprising water cooling tubes (6) for cooling and condensing vapor made from the organic liquid by its vaporization to return it to the liquid for return into the liquid tank (1); a valve (8) through which N2 gas is introduced; and a lid (9) that carries the substrate holder (5), the condensing means (7) and the valve (8). The organic liquid (10) is thus tightly sealed in the liquid tank (1) by the lid (9). This synthesis apparatus allows carbon nanotubes to be synthesized in large quantities, at low cost and in safety. Highly coaxially and densely oriented, aligned carbon nanotubes can be synthesized in the form of a bundle thereof, which when used in a variety of products brings about various excellent effects including extremely high usability.

特許請求の範囲（英語）

[claim1]1. A method of synthesizing highly oriented, aligned carbon nanotubes from an organic liquid, comprising: forming a substrate with a buildup thereon of a thin film or fine insular particles composed of at least one metallic element; exposing said substrate having said buildup to a hydrogen plasma; and heating said substrate exposed to the hydrogen plasma in an organic liquid to a predetermined temperature whereby highly oriented, aligned carbon nanotubes are synthesized,wherein said organic liquid is alcohol.[claim2]2. A method of synthesizing highly oriented, aligned carbon nanotubes from an organic liquid as set forth in claim 1, wherein said substrate is a Si substrate.[claim3]3. A method of synthesizing highly oriented, aligned carbon nanotubes from organic liquid as set forth in claim 1, wherein said at least one metallic element of which said buildup is composed is one or more elements selected from the group which consists of Fe, Co and Ni.[claim4]4. A method of synthesizing highly oriented, aligned carbon nanotubes from an organic liquid as set forth in claim 1, wherein said alcohol is methanol or ethanol.[claim5]5. A method of synthesizing highly oriented, aligned carbon nanotubes from an organic liquid as set forth in claim 1, wherein said step of heating to a predetermined temperature comprises heating by passing an electric current through said Si substrate.[claim6]6. A method of synthesizing highly oriented, aligned carbon nanotubes from an organic liquid as set forth in claim 1, wherein said organic liquid is pyrolyzed by catalytic function of said metallic element and sharp temperature gradient generated between said substrate and said organic liquid, thereby forming carbon atoms from said organic liquid to synthesize said carbon nanotubes.[claim7]7. A method of synthesizing highly oriented, aligned carbon nanotubes from an organic liquid, comprising: forming a substrate with a buildup thereon of a thin film or fine insular particles composed of a metallic element; exposing said substrate to a hydrogen plasma and heating, thereby said thin film or insular fine particles consisting of a metallic element is made liquid fine particles of uniform diameter and distribution to be distributed insularly and bonded firmly on said substrate;heating said substrate to the predetermined temperature so that said pyrolysis is generated in the organic liquid to form carbon atoms by catalytic function of said metallic element and sharp temperature gradient; and maintaining said organic liquid at a temperature lower than its boiling point at the same time, thereby carbon nanotubes are synthesized on said liquid fine particles,wherein said organic liquid is alcohol.[claim8]8. A method of synthesizing highly oriented, aligned carbon nanotubes from an organic liquid as set forth in claim 7, wherein said substrate is a Si substrate.[claim9]9. A method of synthesizing highly oriented, aligned carbon nanotubes from organic liquid as set forth in claim 7, wherein said at least one metallic element of which said buildup is composed is one or more elements selected from the group which consists of Fe, Co and Ni.[claim10]10. A method of synthesizing highly oriented, aligned carbon nanotubes from an organic liquid as set forth in claim 7, wherein said alcohol is methanol or ethanol.[claim11]11. A method of synthesizing highly oriented, aligned carbon nanotubes from an organic liquid as set forth in claim 7, wherein said step of heating to a predetermined temperature comprises heating by passing an electric current through said Si substrate.