During the study of materials, some properties are considered to be dependent on the surface structure. Various techniques such as low energy ion scattering (LEIS), secondary ion mass spectroscopy (SIMS), and auger electron spectroscopy (AES) are used to study the surfaces of materials. Some of these techniques are more sensitive to the topmost layers of the surfaces than others, and we will discuss the details later. LEIS is also called Ion Scattering Spectroscopy and is a tool used for the study of the atomic composition, concentration, and structure of a surface, using low energy ions with energy ranging from 100 eV to 10 keV scattered off the surface. This technique is known to be more sensitive to the first layer, the nondestructive in-depth analysis of the near surface (0–10 nm). SIMS involves a primary ion beam with a typical energy range between 100 and 25 keV. A surface is bombarded, and due to the transferred impact energy, neutral atoms, molecules, and ions, so-called secondary ions, are emitted from the surface. They are detected and analyzed using a mass spectrometer. The measured mass spectrum then yields information of the chemical composition of the surface. This technique can be used in surface physics to study the composition of the topmost atomic layers, including the nature and properties of adsorbed layers. One can monitor the secondary-ion mass spectra, which yield information about the chemical elements present in the removed material. AES is a tool used for the standard analysis of the surface and interface physics, used predominantly to check the cleanliness of a freshly prepared surface under ultra-high vacuum conditions. The important fields of application (elemental analysis), as well as depth profiling of the concentration of particular chemical elements and other applications, involve alternate sputtering and AES stages.