Conference Proceedings

SUSS MicroTec

SUSS MicroTec AG is a leading-edge equipment supplier of solutions for Advanced Packaging, MEMS, Compound Semiconductor, Silicon-On-Insulator, Nanotechnology and 3D Interconnect markets. SUSS manufactures a complete line of photoresist and dielectric coat/bake/develop systems, microlithography exposure systems, wafer and device bonders, probers, photomasks, cleaners and etchers used for superior production and R&D. SUSS’s advanced SupraYield and SupraBond technology delivers leading performance in 1X full field lithography systems (1XFFL) and bonding, respectively. SUSS is well known for high quality equipment backed by global service, applications and product support; and is consistently recognized by customers as one of “VLSI’s Top 10” in satisfaction.

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