From sanli at stanford.edu Mon Jul 25 15:56:28 2005
From: sanli at stanford.edu (Arif Sanli Ergun)
Date: Mon, 25 Jul 2005 15:56:28 -0700
Subject: tylannitride problem
Message-ID: <6.1.2.0.2.20050725154733.03cb3b28@sanli.pobox.stanford.edu>
Hi tylannitride users,
I was wondering if there is any more comments on the latest
tylannitride problem. I used tylannitride right after the tube pull
and clean. I used LONH378 for 45 minutes. The deposition rate
was slower than usual, the process pressure was lower than
usual (~260), and the refractive index was higher than normal (2.56).
Because I got thinner than I wanted I want to deposit some more
silicon nitride, but the uniformity problem worries me. Did recent
users observe similar problems or did maintenance get a chance
to look at it?
Sanli
From sanli at stanford.edu Wed Jul 27 13:46:36 2005
From: sanli at stanford.edu (Arif Sanli Ergun)
Date: Wed, 27 Jul 2005 13:46:36 -0700
Subject: quartz wands
Message-ID: <1122497196.42e7f2ac596fc@webmail.stanford.edu>
The nonmetal quartz wand is hanging on the metal wand hanger, and
the metal wand is hanging on the non-metal wand hanger. I don't know
how long this has been the case, but it is very likely that people have
used metal wand assuming that it is non-metal. I think the non-metal wand
should be replaced immediately.
Sanli