This paper visualizes the full-field permittivity distribution at the standard specimens having known electromagnetic characteristics using a scanning free space measurement (SFSM) system. First, in the two Teflon specimens with different thicknesses, the real and loss tangent of permittivity could be measured and the results agreed to the theoretical and other measurement values. Then the system has been applied to Glass/epoxy and visualized different permittivity distribution depending on the material kind. Therefore, this approach will overcome the point measurement limitation of FSM and can be used for even sub-structural full-field electromagnetic evaluation of stealth and radome structures.