High-resolution patterns of nanoparticles and polymers are created on a variety of substrates using a template-based microfluidic process. A rigid, vapor-permeable polymer mold is created by polymerizing 4-methyl-2-pentyne and solvent casting the resulting polymer. The mold is pre-filled with solvent by pressing into a coated substrate, and then filled with nanoparticle or polymer ink by permeation pumping. This allows high resolution patterning with good control over the three-dimensional geometry in a completely additive process with no residual layer or etching required. This process has been demonstrated by patterning low-temperature metal electrodes from gold nanoparticles and zinc oxide nanoparticles for use in a UV detector.