Future Trends for Semiconductor Materials

Future Trends for Semiconductor Materials

Hosted by CGMG, Event Explores Materials that Show Promise for Adoption in the Next 10 Years

By Lita Shon-Roy, Techcet Group

The emergence of new device structures is creating fundamental changes in the materials markets, with both challenges and opportunities for the introduction of novel materials. At SEMICON West this year, one of the TechXPOTs focused on advanced materials and processes that show promise for adoption in the next ten years. Hosted by the SEMI Chemical and Gases Manufacturers Group (CGMG), the TechXPOT provided powerful information on the “Next Generation of Electronic Materials.” Christian Wetzel of Rensselaer Polytechnic Institute (RPI) presented on LED high-efficiency technology, Paul Kirsch of SEMATECH discussed development work on next-generation semiconductor devices (sub 22nm node), and Mark Thirsk of Linx Consulting reported on the materials markets. The presenters also participated in a moderated panel discussion.

Dr. Wetzel presented new development work on higher efficiency lighting and power device technology, “Energy Efficiency and Green Technology with Wide Bandgap GaN-based Epitaxy”, explaining that most of the energy of current LEDs is lost to heat through the back of the LED and/or imparted to the phosphor needed to provide the color or shade of lighting desired. The technology RPI is working on would lessen the dependency on phosphors, optimizing the wavelength of the LED light emitted as well as the efficiency of the LED itself.

Dr. Kirsch presented SEMATECH’s development of sub 22nm device technologies, “Extending CMOS with III-V on Si: Simultaneous Low Power and High Performance” focused on germanium and III-V (i.e. InGaAs) substrates. New processes will be required for doping these substrate materials which must uniformly dope high aspect ratio (3D) structures. In addition, compatible cleaning and etching technologies will have to be developed. The road map presented showed silicon n-MOS and SiGe pMOS for 14nm CMOS, and a combination of Ge and/or III-V gates for technology nodes at 10nm and below. Several challenges to growing these materials on silicon can be solved by adjustment in trench depths and process optimization. The SEMATECH research showed plasma junction doping methods being successfully employed, as opposed to ion implant, for 11nm devices.

Mark Thirsk presented an overview of semiconductor device trends “The Development of the Semiconductor CVD and ALD Requirement.” He discussed wafer starts by technology node, indicating that metal gates will be fully employed at the 14/15nm node. Memory and Logic scenarios for device technology changes were presented. Precursors families for various technologies were also discussed.

September 18: Webinar: Semiconductor Manufacturing Industry Outlook. Lara Chamness will present on “Semiconductor Equipment and Materials Update” and Christian Gregor Diseldorff will present on “Fab Forecast of Equipment Spending and Capacity: Where are we Heading in 2012 and 2013?”

September 19: Materials Matter: Opportunities in IC Manufacturing will be held at CNSE in Albany, New York. Discussion topics include: next generation materials, supplier/customer expectations and gaps, manufacturing challenges, economic issues and constraints, and implications for 3D and 450mm.

October 9: New Materials for Semiconductor Innovation(SEMICON Europa) session covers new materials emerging in More Moore mainstream semiconductor roadmaps, and also new materials for use in More than Moore applications for energy efficient electronics, sensors, displays, light emitters and other emerging device concepts and applications.

October 23-24: The 2012 Strategic Materials Conference(SMC) takes place at SEMI Headquarters in San Jose, Calif. SMC explores the synergies, trends and business opportunities in advanced electronic materials. SMC 2012 offers presentations — from leading market analysts, academic researchers, industry consortiums, leading manufacturers, and top suppliers — with an innovative interactive and track-based format. For more information, visit www.semi.org/en/node/41386

Lita Shon-Roy is a senior managing partner of Techcet Group whichspecializes in electronic materials market research and strategy.