Abstract

We have built a 1000‐μm-diameter silicon nitride deformable mirror for focus-control applications,
using micro-optoelectromechanical systems technology. We
achieved variable focal lengths from 36 to 360 mm while maintaining
zero primary spherical aberration, using a maximum control voltage of 100 V. Active
control of spherical aberration of approximately two waves at 660 nm
was demonstrated.