Charge state specific extreme ultraviolet spectra from both tin ions and xenon ions have been recorded at Tokyo Metropolitan University. The Electron Cyclotron Resonance Source spectra were produced from charge exchange ...

Recent work in UCD has centred on the development of a liquid metal coating process for EUV and soft X-ray collector optics. The work involves using a room temperature liquid metal coated on a solid metal substrate of the ...

An engineering prototype high average power 13.5-nm source has been shipped to semiconductor facilities to permit the commencement of high volume production at a 100 W power level in 2011. In this source, UTA (unresolved ...

We have characterized the emission spectrum and temporal history of a pure potassium plasma in a capillary discharge. Strong broadband emission was observed around 40 nm due to 3s−3p, 3p−3d, and 3d−4f transitions in ions ...

We have demonstrated rare-earth plasma extreme ultraviolet sources at 6.7 nm to investigate the spectral behavior and the conversion efficiencies to different laser wavelength and the initial target densities. The conversion ...

Potential extreme ultraviolet and soft x-ray radiation sources have been identified, using the flexible atomic code (FAC), as emission peaks arising from the 4d–4f and 4p–4d transitions in Pd-like to Rb-like ions of hafnium ...

We have measured extreme ultraviolet (EUV) spectra from highly charged tungsten ions in low-density and high-temperature plasmas produced in the Large Helical Device at the National Institute for Fusion Science. The EUV ...

Spectra from xenon ions have been recorded at the NIST EBIT and the emission into a 2% bandwidth at 13.5 nm arising from 4d_5p transitions compared with that from 4d_4f and 4p_4d transitions in Xe XI and also with that ...