From sanli at piezo.Stanford.EDU Mon Aug 14 14:04:30 2000
From: sanli at piezo.Stanford.EDU (Sanli Ergun)
Date: Mon, 14 Aug 2000 14:04:30 -0700 (PDT)
Subject: lithography on quartz
Message-ID:
Hi everybody,
I believe there are people working with quartz wafers. My question is to
those who do. How do you do the exposure? I mean how do you manage the
multiple reflections from the backside? To be more specific I have
polysilicon, silicon nitride and polysilicon deposited on the quartz wafer
in the order given. Does anyone have such an experience, or suggestions?
Sanli