Received:
27
May
2016
Accepted:
11
October
2016
Published online: 18 November 2016

Abstract

Biological applications of AFM in the liquid medium make the behavior of probe in the liquid medium very important to investigate. This study analyzes the effect of hysteresis and probe mass on the dynamics of AFM rectangular and dagger micro cantilevers (MC) in the liquid medium. To this end, the MCS theory was used for modeling the MC. The model considered the changes in the cross section and a zinc oxide piezoelectric layer between two electrode layers. The beam type of elements was selected and modeling was based on the finite element method (FEM) on the basis of Euler-Bernoulli beam theory. Fluid and the effects of its forces change the vibration behavior of the system. Simplified models have been proposed and used to implement the relationships. Several types of fluid were examined to determine the effect of fluid type on the frequency and time delay. Hysteresis effect causes a phase delay in the time response and a slight increase in the vibration amplitude in the liquid and the air media. The phase difference depends on the type of the medium in which it is placed; the more viscous and dense is the medium, the less the hysteresis effect will be.