The XYZ piezo systems miniTRITOR are extremely compact and offer parallel motion without play due to the mechanical design. Despite the minimal dimensions, motion of up to 38 µm in all three axes is realized. The resolution is in the sub-nanometer range.Due to its design, the piezo systems miniTRITOR offer highest stiffness and therefore they are especially suitable for dynamic applications.

The nanopositionerscan be easily combined with other mechanical or electromagnetic positioning systems resulting in positioning systems with the highest resolutions.