Oxygen Pressure Control System

Efficient, Safe Means of Controlling Oxygen in MBE Oxide Applications

With increasing interest in oxygen applications, Veeco's Oxygen Pressure Control System enables the precise control of the amount of oxygen inside the MBE growth module. Through time-saving automation, the control system works to comparatively monitor oxygen pressure feedback and operator-entered values for pressure set-point and ramp rate to derive a signal variable that directs the open/close manipulation of a piezoelectric valve to emit the desired amount of oxygen into the growth module.

The Veeco Oxygen Pressure Control System is available for all Veeco MBE systems integrated with ECS1™ Molly® Growth Control Software.