I am sending this email out with regards to developing asml wafers with 955-.7 I line resist. If you see the circular ring on your wafers you may choose to develop with program 5 on the SVGdev2 which Is exact copy of program 2 without the rinse.
I have ran some wafers and still waiting for SEM result, till I get the result and be able to run more tests might be a while so I thought to share the information with you all.