Tellurite thin films have potential to be applied in optical and electronic areas, but it is difficult to prepare from tellurium(IV) alkoxides
by sol–gel processing due to the instability of tellurium(IV) alkoxides and their derivatives. The precursor of tellurium(VI) complex
is synthesized and applied to make tellurium oxide thin films without addition of any modifiers in the study. The decomposition
process of the complex is investigated, and the thin films derived from this precursor are characterized structurally, morphologically and
optically.