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Abstract

We report a comparison of laser power measurements at the
F
2-laser wavelength of
157
nm made at two facilities of the Physikalisch-Technische Bundesanstalt (PTB), the German national metrology institute. At the PTB laboratory at the electron storage ring BESSY II in Berlin, the scale for laser power was directly traced to a cryogenic radiometer operating at
157
nm, whereas at the PTB laser radiometry facility in Braunschweig the calibration of transfer detectors was performed with a newly developed standard for laser power at
157
nm, which is traceable in several steps to a cryogenic radiometer operating at
633
nm. The comparison was performed under vacuum conditions with laser pulse energies of
∼10
μJ, however with different average powers because different primary standard radiometers were used. The relative deviation for the responsivity of the transfer detector was
4.8% and thus within the combined standard uncertainty.

References

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Table 1

Uncertainty Budget for Determination of Absolute Responsivity sLM8 of the PE-10 Transfer Detector at 157 nma

Measurand

Value

Standard Uncertainty

Relative Uncertainty (%)

Degree of Freedom

Sensitivity Coefficient

Uncertainty (V∕J)

Index (%)

sLM8 meas

6810.9 V∕J

88.2 V∕J

1.3

15

9.8

860

62.3

Fs0

1.0000

0.0100

1

9

67,000

670

37.1

fR

9.7870

0.0120

0.2

1

6800

82

0.6

sLM8

66,700 V∕J

1090 V∕J

1.7

24

aaResult: sLM8 = (66,700 ± 1090) V∕J for k = 1. The expanded uncertainty for a depth of coverage of 95% is 2300 V∕J, calculated with an expansion factor of 2.1 (derived from the degree of freedom and the Student t-distribution).

Table 2

Uncertainty Budget for Determination of Absolute Responsivity sSYRES of the PE-10 Transfer Detector at 157 nma

Measurand

Value

Standard Uncertainty

Relative Uncertainty (%)

Degree of Freedom

Sensitivity Coefficient

Uncertainty (V∕J)

Index (%)

sSYRES,meas

62,400 V∕J

3000 V∕J

4.8

8

1.12

3360

37.2

κ

1.12

0.07

6.3

4

62,400

4370

62.8

sSYRES

69,890 V∕J

5510 V∕J

7.8

8

aaResult: sSYRES = (69,890 ± 5510) V∕J for k = 1. The expanded uncertainty for a depth of coverage of 95% is 13,000 V∕J, calculated with an expansion factor of 2.4 (derived from the degree of freedom and the Student t-distribution).

Tables (2)

Table 1

Uncertainty Budget for Determination of Absolute Responsivity sLM8 of the PE-10 Transfer Detector at 157 nma

Measurand

Value

Standard Uncertainty

Relative Uncertainty (%)

Degree of Freedom

Sensitivity Coefficient

Uncertainty (V∕J)

Index (%)

sLM8 meas

6810.9 V∕J

88.2 V∕J

1.3

15

9.8

860

62.3

Fs0

1.0000

0.0100

1

9

67,000

670

37.1

fR

9.7870

0.0120

0.2

1

6800

82

0.6

sLM8

66,700 V∕J

1090 V∕J

1.7

24

aaResult: sLM8 = (66,700 ± 1090) V∕J for k = 1. The expanded uncertainty for a depth of coverage of 95% is 2300 V∕J, calculated with an expansion factor of 2.1 (derived from the degree of freedom and the Student t-distribution).

Table 2

Uncertainty Budget for Determination of Absolute Responsivity sSYRES of the PE-10 Transfer Detector at 157 nma

Measurand

Value

Standard Uncertainty

Relative Uncertainty (%)

Degree of Freedom

Sensitivity Coefficient

Uncertainty (V∕J)

Index (%)

sSYRES,meas

62,400 V∕J

3000 V∕J

4.8

8

1.12

3360

37.2

κ

1.12

0.07

6.3

4

62,400

4370

62.8

sSYRES

69,890 V∕J

5510 V∕J

7.8

8

aaResult: sSYRES = (69,890 ± 5510) V∕J for k = 1. The expanded uncertainty for a depth of coverage of 95% is 13,000 V∕J, calculated with an expansion factor of 2.4 (derived from the degree of freedom and the Student t-distribution).