Abstract

Based on the systematic studies of the growth temperature, deposition rate, and annealing effects, the control of Co nanoparticle density, size, and alignment is demonstrated to be feasible on a nanostructured template . At , a slow deposition rate promises both the linear alignment and the high particle density. 1.5 ML Co nanoparticle assembly sustains the density of even after annealing. This study also indicates the possibilities of the controlled growth for nanoparticles of different materials.