Abstract

Flexible integrated photonic devices based on crystalline materials on plastic substrates have a promising potential in many unconventional applications. In this Letter, we demonstrate a fully integrated photonic system including ring resonators and grating couplers, based on both crystalline silicon and silicon nitride, on flexible plastic substrate by using the stamping-transfer method. A high yield has been achieved by a simple, yet reliable transfer method without significant performance degradation.

(a) Transmission spectrum of transferred silicon micro-ring resonator with grating couplers on a PET substrate. (b) Optical resonance of the transferred silicon ring resonator with a loaded Q of 1.0×105. (c) Transmission spectrum of silicon nitride micro-ring resonator with grating couplers after the transfer process. (d) Comparison of optical resonance of the silicon nitride ring resonator before and after the transfer process.