The ANT130L series stages offer nanometer-level performance in travels up to 160 mm. With its low profile and outstanding performance characteristics, the ANT130L is the ultimate solution for high-accuracy alignment, inspection, positioning, and measurement stations.

Noncontact Direct-Drive

The linear motor drive also offers the advantage of higher speeds and accelerations. The compact yet powerful linear motor drives the ANT130L to a peak unloaded acceleration of 1 g and a maximum velocity of 350 mm/s. The result is a high-accuracy device with outstanding throughput that significantly outperforms comparable high-accuracy screw-driven or other stages in its class.

Outstanding Resolution

For alignment applications, outstanding step-to-step resolution is critical. The ANT130L meets this demand with an incremental step size of 1 nm when coupled with Aerotech drives and controls. The direct-drive linear motor allows the ANT130L to make precise, small resolution steps. This is particularly important in alignment applications where step accuracy is critical.

Designed for Long Life

Like all stages in the Aerotech product family, the ANT130L was designed for outstanding long-term performance. Both the linear motor and linear encoder are noncontact devices, which means they not only exhibit long-life but are totally maintenance free.

Recommended Controller

Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within 0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech for more information.

Connectors (Required)

Mounting Plate (Optional)

Option

Description

-MP

Mounting plate

Performance Grade (Required)

Option

Description

-PL1

Base Performance

-PL2

High-Accuracy Performance, PLUS

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option

Description

-TAS

Integration - Test as systemTesting, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.

-TAC

Integration - Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.