Reticle capturing and handling system
A reticle capturing system includes a reticle that defines a first recess extending into the reticle from a first edge of the reticle and a second recess extending into the reticle from a second...

603

6494670

Three chamber load lock apparatus
A functional load lock apparatus having two or more load lock chambers mounted on a central chamber which can be mounted on a single opening in a vacuum chamber such as a substrate processing...

Magnetic film forming system
A magnetic film forming system which can always apply a magnetic field to a substrate in a constant direction is disclosed. The magnetic film forming system includes a vacuum container, a...

606

6487794

Substrate changing-over mechanism in vacuum tank
A substrate changing-over mechanism in a vacuum processing apparatus which includes a substrate supporting means arranged within a vacuum tank which has at least two openings at a side wall of the...

Method and device for transferring wafers
Enhanced inserts are formed having a cylindrical grip and a protrusion extending from the grip. An ultra hard material layer is bonded on top of the protrusion. The inserts are mounted on a rock...

Foup opener
A FOUP opener opens and closes a FOUP door which closes a front opening portion of a FOUP which contains a plurality of semiconductor wafers. The FOUP opener includes a dock plate for carrying and...

Person-guided vehicle
A person-guided vehicle (PGV) is provided for transporting and manipulating at least one carrier containing items such as semiconductor wafers to be loaded or unloaded at a load port. The PGV...

Dual arm linear hand-off wafer transfer assembly
A dual-arm wafer hand-off assembly includes a pair of pickup arms for transferring wafers within a wafer processing system. The two pickup arms are adapted to move such that the wafer on one of...

Wafer transfer arm stop
A dual-arm wafer hand-off assembly includes a pair of pickup arms for transferring wafers within a wafer processing system. The two pickup arms are adapted to move such that the wafer on one of...

Mini-environment control system and method
A mini-environment control device includes an individual enclosure to contain a sample and to isolate it from the external environment. An array of micropumps attached to the individual enclosure...

630

6419438

FIMS interface without alignment pins
A front opening interface mechanical standard, or “FIMS”, system is disclosed for ensuring proper registration of a pod door against a port door on a load port assembly without the use of guide...

Ergonomic load port
A load port module is mounted adjacent a process tool for loading semiconductor wafers to the process tool and unloading them from the process tool. The module includes a mounting frame having a...

633

6410455

Wafer processing system
A wafer processing system occupies minimal floor space by using vertically mounted modules such as reactors, load locks, and cooling stations. Further saving in floor space is achieved by using a...

634

6398475

Container
A container for receiving and transporting dust free articles which is opened and closed by inserting a positioning pin and a key in an opener mechanism into a positioning hole and a key hole...

Substrate body transfer apparatus
A substrate body transfer apparatus which is capable of isolating the atmospheres of an external processing apparatus and an air conveyance apparatus and preventing the mutual contamination...

Method for controlling handling robot
A handling robot control method is disclosed for a handling robot disposed in a transfer chamber (1) having a plurality of process chamber stations (2e) arranged around it in communication...

Support frame for substrates
The present invention generally provides a system and method for supporting a substrate having a support frame that minimizes deflection encountered during thermal expansion in a processing...

Molecular contamination control system
The system and method for molecular contamination control permits purging a SMIF pod to desired levels of relative humidity, oxygen, or particulates. The SMIF pod includes an inlet port including...

645

6364592

Small footprint carrier front end loader
An apparatus for moving substrates between a loading section and a working chamber includes at least two loading locations at which the substrates may be supplied or received in stacked form...

Material transport system
A system for loading and unloading semiconductor wafers includes a frame having a charging opening, a platform mounted on the frame and movable between a deployed position and a retracted...

Rack holding device
A rack-holding device with an attachment surface (1), which device has as least two side guides (2) and at least one stop (3), the stop (3) being arranged in each case in front of the at least two...

650

6354781

Semiconductor manufacturing system
An improved manufacturing system for processing semiconductor wafers which includes a (1) plurality of processing stations, (2) a sealed transport tunnel located directly over the processing...