Gas Delivery Systems

The Critical Systems engineering and gas technician teams have built new, or reconditioned close to 3000 high purity process gas systems of many sizes and configurations for customers worldwide. Every gas system is run through CSI’s extensive certification process and comes with a 6 month comprehensive warranty. CSI has 100’s of professionally decommissioned Gas Cabinets, Valve Manifold Boxes & Panels, Process Gas Rack Units, and Gas Panels in stock from major semiconductor fabs throughout the country. These systems are from top of the line OEM’s, such as Air Products, Praxair, and others. Our extensive inventory allows us to quickly customize a system for any combination of gases, process configuration, and flow rate.

Critical Systems provides gas delivery systems for virtually all semiconductor related processes: compressed gases such as Silane (SiH4) or Carbon Tetrafluoride (CF4), or liquefied gases like Phosphine (PH3) or Ammonia (NH3). We also regularly provide gas systems for corrosives, such as Chlorine (Cl2) and Hydrogen Bromide (HBr), and flammables like Hydrogen (H2) and Methane (CH4).