will not run O2 descum. It keeps aborting itself. It aborted itself during O2 portion of the etchback clean and aborts itself when I try to run O2 manually. The Freon-14 readout on the screen says about 11sccms are flowing even when the computer says that the freon-14 valves are closed. Wierd.
The tool may be unusable. Watchout. I did not test runing any other recipies.
-Mike