We work with customers across four major industries to develop solutions to their toughest Process and production challenges. All of our customers use sophisticated advanced technology in their processes. They rely on MKS Instruments' broad portfolio of innovative instruments, components, subsystems and software to solve their problems.

Select an industry below to learn more about how we can help you succeed:

MKS Instruments applies leading edge science, engineering and technology to solve critical challenges across a number of major markets. We will work with you to develop the right solution from our broad portfolio of innovative instruments, components, subsystems and software.

Select a market below to learn more about how we can help you succeed:

We work with customers across four major industries to develop solutions to their toughest process and production challenges. All of our customers use sophisticated advanced technology in their processes. They rely on MKS Instruments' broad portfolio of innovative instruments, components, subsystems and software to solve their problems.

Select an industry below to learn more about how we can help you succeed:

MKS Instruments applies leading edge science, engineering and technology to solve critical challenges across 15 major markets. We will work with you to develop the right solution drawing from and combining our broad portfolio of innovative instruments, components, subsystems and software.

Select a market below to learn more about how we can help you succeed:

At MKS, our technology enables the future and our innovations have helped shape the direction of industries. Our people are experienced and creative problem solvers who collaborate with customers to find solutions.

At MKS, our technology enables the future and our innovations have helped shape the direction of industries. Our people are experienced and creative problem solvers who collaborate with customers to find solutions.

Optical Gas Analyzers

MultiGas™ & AIRGARD®FTIR (Fourier Transform Infrared) and Process Sense™ NDIR (Nondispersive Infrared) real-time and in-line gas analysis Instruments from MKS are capable of ppb to ppm sensitivity for multiple gas species including NF3, NH3, H2, NO and N2O and gases with as much as 30% water.

The Precisive® TFS™ (Tunable Filter Spectroscopy) sensor platform consists of a light source, a sample cell (for gases, liquids or solids), a wavelength separating element (spectrometer) and a photo-detector. A wavelength separating element "slices" the wavelength components of the broadband light source which then interacts with the sample molecules. The resulting spectrum acts as "fingerprints" which are used to identify sample components and/or quantify the sample composition.

Product Catalog

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