Flexure-Guided (Flextensional) Piezo Linear Actuators

Piezo Flexure-Guided Actuators (Flextensional Actuators) provide nanometer precison, fast response and travel ranges to 1000Ám and more. They are completely frictionless don't require lubricants or maintenance and have lifetimes of several billion cycles.

PI provides open-loop flextensional actuators (for applications where the absolute position is not critical) and closed-loop actuators with internal position sensors, for nanometer repeatability.
Flexure actuators are often used for microfluidics, fast (medical) pumps, microdispensing applications and as drive components in nanopositioning tables and actuators.
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These piezo flexure linear actuators were designed for cost-sensitive OEM applications. The integrated flexure guides save the cost for additional guiding systems when integrating these actuators in micro-dispensing devices, pumps or servo valves.

These high-speed nanopositioners can be used both as both linear actuators and translation tables. They are equipped with capacitive feedback sensors, frictionless, flexure guiding systems and high-performance piezo drives providing a positioning and scanning range of up to 38 Ám with very fast settling time and extremely straight motion.

These motion-amplified, flexure-guided piezo actuators provide large vertical positioning ranges to 400 Ám, fast response and high positioning accuracy in a very small package. With settling times of only a few milliseconds and a resolution in the sub-nanometer range they are well suited for both static and dynamic applications.

These flexure-guided piezo actuators integrate a frictionless high-efficiency motion amplifier to combine large positioning ranges up to 1 millimeter with high stiffness and very fast response. The integrated flexure guide saves the cost for additional guiding systems when integrating these actuators.