Abstract

The authors present experimental and numerical results relative to the polarization-resolved spectral reflectivity of one-dimensional periodic microstructures, evaluated in the near-infrared region at non-normal incidence. The tested hybrid quarter-wavelength microstructures, fabricated by electrochemical deep etching of silicon, consist of arrays of silicon walls and air gaps, with 3 and periods and aspect ratio of up to 100. A theoretical Monte Carlo analysis taking into account the presence of a Gaussian statistical distribution for the structure porosity has been carried out and the calculated wavelength dependence of the reflectivity at non-normal incidence has been confirmed by experimental data.