RLD10 plane mirror interferometer

Plane mirror interferometers suitable for XY stage applications.

RLD10 detector heads house the interferometer optics, a unique multi-channel fringe detection system, laser shutter and integrated beam steerer. Both 0° and 90° variants of the RLD10 detector head are available.

Features and benefits

High resolution - plane mirror systems can also be used for applications where a higher resolution is required when compared with retroreflector systems.

Sensitive environments - plane mirror interferometer detector heads are also available as a low power variant. Suitable for applications requiring a power dissipation lower than the specified < 2 W of the standard RLD10.

Non-vacuum applications require some form of refractive index compensation to maintain accuracy under fluctuating environmental conditions. Renishaw offers the RCU10 real-time quadrature compensation system to compensate for these variances.

Resolutions to 38.6 picometres can be achieved by integrating an RPI20 parallel interface into the RLE system. This interface accepts differential analogue 1 Vpp sine / cosine signals and provides a parallel format output. For more information on our accessories see RCU10 compensation system and laser encoder interfaces.

The RLE system comprises an RLU laser unit and one or two RLD detector heads. Detector heads are available in low power options for applications requiring a power dissipation lower than the specified < 2 W of the standard RLD.

The RLD10-XX (no internal interferometer) detector head is designed with no internal interferometer optics. This allows the head to be used in a sequence with specialist optics to achieve linear, angular and straightness measurements.

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