SiCN nanomechanical resonators for array-based biosensor applications

Authors:

C. Guthy, A. Singh, J. Tanha, S. Evoy

Affilation:

University of Alberta, CA

Pages:

4 - 6

Keywords:

biosensor, NEMS, nanomechanical resonator, interferometric detection

Abstract:

Rapid, sensitive and inexpensive analysis of biological molecules is of great importance to many biomedical applications, such as disease detection and monitoring, drug discovery, detection of pathogens, etc. Mechanical resonators have been demonstrated as highly sensitive transducers for the detection of molecular systems since their mass sensitivity scales favorably as the dimensions are reduced. Zeptogram level mass sensitivities have recently been demonstrated with nanowire based sensors. However, the main drawback of such bottom up approaches is the loss of precise control over device placement. We have recently developed a novel approach for the fabrication of SiCN nanomechanical resonators and have allowed the realization of arrays of suspended resonators as narrow as ~ 16 nm with a yield approaching 100%. The high yield and the small dimensions would allow for integration of such nanoresonators into large arrays for the multiplexed analysis of complex biomolecular mixtures. In order to utilize such SiCN nanoresonators for the specific detection of proteins, an analyte-specific functional layer needs to be immobilized onto their surface. Experimental results demonstrating the specific detection of protein-A using single domain antibody fragments (sdAb) will be presented.