Substage with 30 mm travel and 50 nm repeatability

About

Our range of stages are suited for orthogonal positioning solutions in atmosphere, SEM/FIB, and UHV.

The LT12830 is primarily used in SEM/FIB to enhance the accuracy and functionality of the standard microscope stage. It is an economical and technically superior alternative to laser interferometer stages.

It is built specifically for lithography, cell counting, nanoprobing, and failure analysis applications and contains two positional encoders per axis for automatic yaw error compensation.

Optional software for three-point alignment is available.

Advantages

Compact and flexible

Small and practical

Plug-and-play system with modular components

Interfacing solutions for most microscopes

Fast setup and removal

Clear and simple

Result-oriented operation and increased throughput

Intuitive control interfaces and software

User-friendly and easy to learn

Compact, stand-alone electronics with PC interface

Pioneering cabling technology

Robust and stable

Compact construction delivers higher resonance frequencies

Excellent stability

Low drift (1 nm/min)

Reliable operation (one year endurance test)

Virtually insusceptible to vibrations

Fast pre-positioning by hand

Fast and precise

No backlash or reversal play

Sub-nanometer resolution (0.25 nm)

Integrated coarse and fine displacement in one drive

High operating velocity (up to 10 mm/sec)

Smooth motion

Specifications

Length: 128 mm

Width: 128 mm

Height: 16 mm

Weight: 520 g

Travel X and Y: 28.5 mm

Speed: up to 2 mm/s

Resolution: < 0.5 nm

Repeatability: 50 nm

Angular deviation: < 1 µrad

Load: 500 g

Temperature range: 273 K to 353 KUHV version: 273 K to 393 K

Lowest pressure: 10-7 mbarUHV version: 2 x 10-10 mbar

Substage mounting: 4 x 3.2 mm holes

Sample mounting: Clip or 2 x M3 holes

Material: Stainless steel

All technical specifications are approximate. Due to continuous development, we reserve the right to change specifications without notice.