... throughput. TERA21 system uses two different robotic systems in order to transfer the wafers from FOUP to process chambers. The MASIC (Multi Axis Synchronized Interpolation Control) Robot in EFEM module and advanced four paddle robot in transfer module that provides ...

... for one or two parallel process modules. Each process module is isolated from atmosphere by a small load lock with an integrated transferrobot. These ExpressLocks™ mate to the field-proven FabExpress™ atmospheric front end. The InLine Express is available in two levels ...