Microfabrication Facilities & Clean Room Equipment

02/03/2014 Announcement

Re-Opening of the Microfabrication Facilities

Dear Students and Colleagues,

Following the completion of a major renovation project I am very pleased to announce the re-opening of the newly renovated MicroFabrication Facility (MFF) within the CRF, a Drexel University Core Facility.

Walking by the MFF on the third floor of LeBow Engineering, you have likely noticed construction resulting in a view into a new laboratory containing class 10,000 and class 100 cleanroom spaces and instruments dedicated for Drexel research involving micro-fabrication. Staff member Dr. Ed Basgall and others have been working to restore to operating status capabilities such as photo- and soft lithography, thin film deposition, wet chemical and plasma etching, and thin film analysis such as optical profilometry, and a press suitable for annealing co-polymer (e.g. PVDF/TrFE) films. (Please visit http://crf.coe.drexel.edu/instruments/microfabrication) In February, the CRF/MFF will take delivery of a Park Model NX10 Atomic Force Microscope/Scanning Probe Microscope (AFM/SPM) having a wide array of scanning modes are available in addition to standard imaging, including a collection of local property mapping modes. Training for and access to this instrument will be announced and made available to all users following its installation in the class 10,000 cleanroom, although this location is subject to change dependent on instrument performance.

Former and new users of the MFF are encouraged to contact the staff to request scheduled safety and instrument training and qualified access to the Facility. To encourage returning users to return and to invite new users to learn how these facilities can benefit their research, the staff and I will be offering brief Facility tours to groups of up to 6 persons at a time on Fridays Feb. 7 and 14 beginning at 12:00 noon, and to answer questions about current and planned capabilities and processes. The CRF will also waive user training and access fees to the MFF for the period of February through April. (Users/PIs will be responsible for the costs of materials and supplies and must still complete an online user subscription form to be approved by their supervisor/advisor.) Former and prospective users, including faculty, are encouraged to contact Dr. Ed Basgall regarding technical questions and training. Access for training and user qualification is handled individually and is subject to staff availability on a first-come, first-served basis. Become a Drexel Core Facilities User

We hope that the newly renovated lab provides you with convenient access to capabilities and processes you need for your research. Please don't hesitate to contact me if you have any questions and suggestions on how this facility and our team can assist you with your research.

Laser Ablation System (Resonetics RapidX 250 Workstation)

Contact: Edward Basgall

Important Features

Excimer laser based micromachining system for wide variety of applications including MEM fabrication, microfluidics, general purpose microfabrication, marking and wire stripping, as well as various medical applications

The system can laser machine polymers, glass, sapphire, ruby, silicon, ceramics and metals among others

Choice of two laser wavelengths, 248 nm and 193 nm, for best results on different materials