Most operating systems allow the terminating process to provide a specific exit status to the system, which is made available to the parent process. Typically this is a small integer value, although some operating systems (e.g., Plan 9) allow a character string to be specified.

The exit operation typically performs clean-up operations within the process space before returning control back to the operating system. Some systems and programming languages allow user subroutines to be registered so that they are invoked at program termination before the process actually terminates for good. As the final step of termination, a primitive system exit call is invoked, informing the operating system that the process has terminated and allows it to reclaim the resources used by the process.

It is sometimes possible to bypass the usual cleanup; C99 offers the _exit() function which terminates the current process without any extra program clean-up. This may be used, for example, in a fork-exec routine when the exec call fails to replace the child process; calling atexit routines would erroneously release resources belonging to the parent.

Some operating systems handle a child process whose parent process has terminated in a special manner. Such an orphan process becomes a child of a special root process, which then waits for the child process to terminate. Likewise, a similar strategy is used to deal with a zombie process, which is a child process that has terminated but whose exit status is ignored by its parent process. Such a process becomes the child of a special parent process, which retrieves the child's exit status and allows the operating system to complete the termination of the dead process. Dealing with these special cases keeps the system process table in a consistent state.