Dear MEMS researchers,
We are facing some problems with huge pit formation and protrusions on our
silicon wafers after any high temperature processing step. We have never
seen these particular problems before, but we believe that this might be
due to contamination of either the tubes or the wafers.
Any suggestions to check whether or not contamination is a possibility, would
be appreciated. Also we're trying to locate any companies or consultants
that specialize in detecting furnace contamination and/or wafer
contamination preferrably for the MEMS industry. Any information/suggestions
would be greatly appreciated.
Regards,
Sonbol Ansari