R&D tool

The 9s-ADE100 is a small footprint, flexible process development platform. It is built around a single ADE reactor. This reactor is similar to the one used in the industrial version of the tool, greatly facilitating the transition from laboratory development to production.

The tool can be configured as single wafer process or upgraded with a conveyor and automated loader in order to provide higher throughput. It is user friendly, and can be started very quickly, with typical texturing process time duration of less than a minute.