Abstract

X-ray microprobing is used to investigate buried elastic strain resulting from deep implantantion in . The implantation regions are defined lithographically and strain fields mapped with spatial- and energy-resolved x-ray microdiffraction to characterize the resulting structures. The structurally modified regions are found to retain their lateral lithographic definition, with the buried implantation being in strong compression.

Received 27 March 2007Accepted 06 August 2007Published online 13 September 2007

Acknowledgments:

The authors thank Cev Noyan for useful comments on the effects of strain on x-ray spectra. The authors wish to thank NSF (DMR-04-05 145) and the ONR (N00014-03-1-0984), in part, for support of this research; use of the National Synchrotron Light Source, Brookhaven National Laboratory, was supported by the DOE Office of Science, BES (DE-AC02-98CH10886), and the microdiffraction end station was funded by DOE LAB03-03.