G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object

G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object

G01N29/02—Analysing fluids

G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves

G—PHYSICS

G01—MEASURING; TESTING

G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object

G01N29/22—Details, e.g. general constructional or apparatus details

G01N29/24—Probes

G01N29/2437—Piezoelectric probes

G—PHYSICS

G01—MEASURING; TESTING

G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object

G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

G01N27/00—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means

G01N27/02—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means by investigating the impedance of the material

G01N27/04—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means by investigating the impedance of the material by investigating resistance

G01N27/12—Investigating or analysing materials by the use of electric, electro-chemical, or magnetic means by investigating the impedance of the material by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

G01N27/125—Composition of the body, e.g. the composition of its sensitive layer

G01N27/126—Composition of the body, e.g. the composition of its sensitive layer comprising organic polymers

G—PHYSICS

G01—MEASURING; TESTING

G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES

G01N33/00—Investigating or analysing materials by specific methods not covered by the preceding groups

Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC

Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

Y10T436/00—Chemistry: analytical and immunological testing

Y10T436/11—Automated chemical analysis

Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

Y10T436/25375—Liberation or purification of sample or separation of material from a sample [e.g., filtering, centrifuging, etc.]

Abstract

Translated from Chinese

使用生物传感器来检测样品中的生物分子之存在的系统和方法，所述生物传感器整合了谐振器，所述谐振器具有用以与靶生物分子反应的功能化表面。 Biosensor system and method for detecting the presence of a biological molecule in a sample, said biosensor integrated resonator, the resonator having a surface for reaction with a functionalized target biomolecule.在一个实施方案中，设备包括具有功能化表面的压电谐振器，配置该功能化表面用以与靶分子反应，从而改变谐振器的质量和/或电荷，这因而改变谐振器的频率响应。 In one embodiment, the device comprises a piezoelectric resonator having a functionalized surface, the configuration of the functional surface for reaction with the target molecule, thereby altering the resonator mass and / or charge, which thus changes the frequency response of the resonator.将谐振器暴露于样品之后的频率响应与基准进行比较，诸如暴露于样品之前的频率响应、储存的基线频率响应或对照谐振器的频率响应。 The frequency response of the resonator is exposed to the reference sample after comparing such prior exposure to the frequency response of a sample, stored baseline frequency response or control response frequency of the resonator.

Description

[0001] 发明背景发明领域 [0001] BACKGROUND OF THE INVENTION Field of the Invention

[0002] 本发明总体上涉及生物传感器，具体而言，涉及整合了谐振器的生物传感器，其中所述谐振器具有功能化的表面，用以结合祀生物分子(target biomolecules)或要不然与革巴生物分子反应，其以改变谐波器频率响应(frequency response)的方式结合或反应。 [0002] The biosensor relates generally to the present invention, particularly, relates to a biosensor integrated resonator, wherein the resonator has a functionalized surface, Si binding to a biomolecule (target biomolecules) or else with leather bar biomolecular reaction which is to change the manner in response to a harmonic frequency (frequency response) of the binding or reaction.

[0003] 背景信息 [0003] Background Information

[0004] 生物传感器一般用于检测生物分子的存在与否和/或生物分子的水平，典型地是在液体样品中的生物分子。 [0004] The biosensor is generally horizontal and for detecting the presence or absence of a biomolecule / or biological molecule, typically a biomolecule in the fluid sample.例如，生物传感器可用来测定生物液体，如血液中的特定化学物质的水平。 For example, a biosensor may be used to assay biological fluids, such as blood levels of particular chemicals.从而，具体的传感器可以用来测定血液样品中的葡萄糖、钾、钙、二氧化碳以及其它物质的水平。 Therefore, specific sensors may be used to determine glucose in a blood sample, potassium, calcium, carbon dioxide levels, and other substances.

[0005] 诸如此类的生物传感器常常使用电化学系统来检测感兴趣的特定物质。 [0005] the like, an electrochemical biosensor system is often used to detect specific substances of interest.所述电化学系统包括诸如酶和氧化还原中间体(redox The electrochemical system comprising an enzyme and a redox intermediate (redox such as

[0006] mediator)的物质与感兴趣的物质(靶物质)反应，并从而产生可以承载电流的离子。 Substances [0006] mediator) substance of interest (target substance) the reaction, and to generate an ion current can be carried.使用一组电极以产生电势，将离子吸引向电极，形成可以用来对所产生电流进行测量的电路。 Using a set of electrodes to generate a potential to the electrodes will attract the ions, it can be used to form the generated current measurement circuit.

[0007] 在一种类型的系统中，生物传感器包括用膜进行固定化的酶。 [0007] In one type of system, the biosensor includes an enzyme immobilized film.液体样品中的靶物质迁移通过所述的膜并与酶反应。 Target substance in a liquid sample to migrate through the membrane and react with the enzyme.这在液体样品中形成了离子。 This forms an ion in the liquid sample.然后这些离子穿过所述液体样品向系统的电极迁移。 These ions then migrate through the liquid sample to the electrode system.离子向电极的迁移产生了电流，对这个电流进行测量。 Migration of the ion generating current to the electrodes, this current is measured.由于电流依赖于样品中靶物质的浓度，测量到的电流随后被转变成靶物质的浓度。 Since the current is dependent on the concentration of the target substance in a sample, the measured current is then converted into a concentration of the target substance.

[0008] 这些传统的生物传感器存在许多问题。 [0008] The presence of many of these conventional biosensors.例如，它们相对较慢。 For example, they are relatively slow.这是由于，起码部分地，由于这个事实:电化学生物传感器中必须经过一段时间,样品中靶物质电离得到的电流才能产生出来。 This is due, at least in part, due to the fact that: an electrochemical biosensor to be generated out over time, the current ionization to the target substance in the sample obtained.只有允许该电流自己产生出来才能对其进行测量，以提供对靶物质的浓度相当准确的估计。 The current arising out only allow themselves to be measured to provide a reasonably accurate estimate of the concentration of the target substance.

[0009] 甚至在靶物质的电离所得到的电流被产生和测量之后，得到的对靶物质浓度的估计一般也不像期望的那样准确。 [0009] Even after the target substance ionization current is generated and obtained measurements, an estimate of the concentration of the target substance obtained generally also not as accurate as desired.这是因为，至少部分地，因为这样的事实:被测样品一般含有多种其它物质，其中的某些可能干扰该过程。 This is because, at least in part, due to the fact that: the test sample typically contains various other materials, some of which may interfere with the process.例如，这些其它物质中的某些可能在样品中电离，从而增加测量到的电流，导致对靶物质浓度的过高估计。 For example, certain of these other substances in the sample may be ionized, thereby increasing the measured current, resulting in an overestimation of the concentration of the target substance.或者，一些化学物质可与靶物质的离子反应，从而减小测量到的电流并引起对靶物质浓度的低估。 Alternatively, some chemicals may react with the target substance ions, thereby reducing the measured current and cause an underestimation of the concentration of the target substance.

[0010] 因此，希望提供这样的系统和方法:它们能够对样品进行检测以确定靶物质是否存在，比使用现有技术系统和方法的一般可能情况更快、更准确。 [0010] Accordingly, it is desirable to provide systems and methods: they can test the samples to determine whether the target substance is present, faster and more accurate than is generally possible using prior art systems and methods.

[0011] 附图简述 [0011] BRIEF DESCRIPTION

[0012] 在阅读下面的详细描述并参考附图之后，本发明的其它目标和优点可以变得很明确。 [0012] In the reading of the following detailed description with reference to the accompanying drawings and then Other objects and advantages of the present invention may become clear.

[0013] 图1中的图解说明了依照一个实施方案的示范性谐振器的结构。 Illustrated in [0013] FIG 1 illustrates the structure in accordance with one exemplary embodiment of the resonator.

[0014] 图2中的功能框图说明了依照一个实施方案的生物传感器系统。 A functional block diagram [0014] Figure 2 illustrates in accordance with one embodiment of the biosensor system.[0015] 图3A-3C是一组示意图，说明了依照一个实施方案的靶分子与生物传感器的功能化表面的结合作用。 [0015] Figures 3A-3C are a set of schematic view illustrating the binding of target molecules in accordance with the functionalized surface of a biosensor of the embodiment.

[0016] 图4的流程图说明了依照一个实施方案的对样品中是否存在靶分子进行检测的方法。 Flowchart [0016] FIG. 4 illustrates a method of detecting a sample in accordance with one embodiment of the presence or absence of the target molecule.

[0017] 图5的流程图说明了依照另一可替换实施方案的对样品中是否存在靶分子进行检测的方法。 Flowchart [0017] FIG. 5 illustrates a method for the presence or absence of target molecules in a sample is detected in accordance with another alternative embodiment.

[0018] 尽管本发明有各种变化方案和备选形式，仍然通过在图和附带的详细描述中提供例子的方式来展示出本发明的具体实施方案。 [0018] While various variations of the present invention and alternative forms, specific embodiments still to demonstrate the present invention by providing an example of the detailed description and the accompanying FIGS manner.然而，应该理解这些图和详细描述并不意图将本发明限制于所描述的特定实施方案中。 However, it should be understood that the detailed description and drawings are not intended to be a particular embodiment of the present invention be limited to the described.相反，本公开内容意图包含所有落入本发明范围的变化方案、等价方案和备选方案，其中本发明的范围如附带的权利要求所定义。 In contrast, the present disclosure is intended to include all variations falling within the scope of the present invention, equivalents, and alternatives in which the scope of the invention as defined by the appended claims.

[0019] 优选实施方案的详细描述 [0019] Detailed description of preferred embodiments of the

[0020] 上面概述的一种或多种问题可被本发明的多种实施方案解决。 [0020] One or more of the problems outlined above may be various embodiments of the present invention address.泛泛地说，本发明包括对样品中是否存在分子(如生物分子)进行检测的系统和方法，所述系统和方法使用结合了谐振器的传感器，该谐振器具有功能化表面以结合靶分子或否则与靶分子反应，所述结合或反应的方式改变谐振器的频率响应。 Broadly speaking, the present invention includes molecules if present in the sample (e.g., biological molecules) detection systems and methods, the system and method used in conjunction with the sensor resonator, the resonator has a functionalized surface to bind target molecules or otherwise embodiment, the target molecule is reacted with the binding or reaction changes the frequency response of the resonator.

[0021] 在本发明的一个实施方案中，设备包括谐振器，该谐振器具有至少一个被配置用以与靶分子反应的功能化表面。 [0021] In one embodiment of the invention, the device includes a resonator, the resonator having at least one functional surface is configured to react with target molecules.靶分子与功能化表面的反应导致了谐振器质量和/或电荷、应力(stress)/应变(strain)、表面能/张力(tension)的改变以及类似性质的改变，这导致谐振器的振动特性上的改变。 The reaction with the functionalized surface of the target molecule results in a change of the resonator mass and / or charge, stress (Stress) / strain (Strain), changing the surface energy / tension (Tension) of a similar nature, which results in vibration characteristics of the resonator change on.谐振器振动特性的改变可以通过谐振器电学特性的相应改变显示出来。 Changing the vibration characteristics of the resonator can be displayed by varying the electrical characteristics of the resonator.

[0022] 在一个实施方案中，谐振器由压电材料层和结合到压电材料层相对侧的一对电极组成。 [0022] In one embodiment, the resonator composed of a piezoelectric material layers and a pair of electrodes coupled to opposite sides of the piezoelectric material layer.其中一个电极形成谐振器的功能化表面。 One of the electrodes is formed of the functionalized surface of the resonator.当激励信号(excitation signal)被施加经过电极，可以测定谐振器的频率响应。 When the excitation signal (excitation signal) is applied to the frequency response through the electrodes, the resonator can be measured.当靶生物分子与功能化表面接触时，靶生物分子与该功能化表面反应(如结合)并导致谐振器的质量和/或静电荷发生改变。 When the target biological molecule in contact with the functionalized surface, the target biomolecules react with the functionalized surface (e.g., binding) and lead to the mass of the resonator and / or a change in electrostatic charge.通过对暴露给可能含有靶生物分子的样品之前和之后的谐振器的频率响应进行测定，可以对与质量和/或静电荷改变相关的频率响应的改变进行确定，这对祀生物分子的检测进行了指示。 By frequency exposed to the resonator before the sample biomolecules may contain a target, and after the response is measured, can be varied to change the frequency response related to the quality and / or electrostatic charge determination, detecting which worship biomolecule is the instructions.

[0023] 在一个实施方案中，使用的是一对谐振器。 [0023] In one embodiment, the use of a pair of resonators.除了一个谐振器有功能化表面而另一个没有以外，每个谐振器都基本如上所述。 In addition to the resonators has a functionalized surface and the other is not outside, each resonator substantially as described above.没有功能化表面的谐振器用作对照，另一个谐振器可以与其进行比较。 No functionalized surface of the resonator used as a control, the other resonator can be compared.因此，当两个谐振器暴露于样品，任何靶生物分子将会对有功能化表面谐振器的频率响应造成影响，对没有功能化表面的谐振器则没有影响。 Thus, when the two resonators are exposed to a sample, any target biomolecules will affect the frequency response with a functionalized surface of the resonator, there is no effect on the resonator without the functionalized surface.任何非靶分子将会对两个谐振器以及相应的频率响应产生相等的影响，所以通过比较两个谐振器将会有效地去除非靶分子造成的任何影响。 Any non-target molecules will be on the two resonators and the corresponding frequency response to produce equal effects, therefore, will effectively target molecule to cause any effect unless by comparing the two resonators.

[0024] 本发明的一个实施方案中的方法包括这些步骤:提供谐振器，其具有以一种类型的生物分子进行功能化的表面，其中靶分子的存在使功能化表面的生物分子改变该谐振器的频率响应；将谐振器的功能化表面暴露于检测液体(test fluid);功能化表面暴露于检测液体之后，对谐振器的频率响应进行测定；以及根据谐振器的频率响应确定检测液体是否含有靶分子。 [0024] One embodiment of the present invention comprises the steps of: providing a resonator having one type of biomolecule functionalized surface, wherein the presence of target molecule biological molecules functionalized surface of the resonator changes frequency response of; the functionalized surface of the resonator exposed to the test fluid (test fluid); functionalized surface after exposure to the test fluid, the frequency response of the resonator is measured; whether and in response to determining the test fluid according to the frequency of the resonator contain the target molecule.

[0025] 在一个实施方案中，该方法包括另外的步骤:提供不具有功能化表面的第二个谐振器；将第二个谐振器暴露于检测液体；在第二个谐振器暴露于检测液体之后，对第二个谐振器的频率响应进行测定；并且将第二个谐振器的频率响应与第一个(功能化的)谐振器的频率响应进行比较，以确定靶分子对第一个谐振器的频率响应的影响。 [0025] In one embodiment, the method comprises the further steps of: providing a second resonator having no function of the surface; the second resonator is exposed to the test fluid; the second resonator is exposed to the test fluid Thereafter, the second frequency response of the resonator is measured; and the second frequency response of the resonator with a first frequency (functionalized) response of the resonator are compared to determine a first resonance of the target molecule Effect of the frequency response.

[0026] 很多其它实施方案也是可能的。 [0026] Many other embodiments are possible.

[0027] 下面描述了本发明的一个或多个实施方案。 [0027] The following describes one or more embodiments of the present invention.应该注意，下述的这些实施方案以及其它任何方案是示范性的，目的是对本发明进行说明而不是进行限制。 It should be noted that these embodiments described below and any other exemplary embodiment, object of the present invention will be described and not limiting.

[0028] 如在此描述的，本发明的多种实施方案包括使用结合了谐振器的传感器对样品中是否存在分子进行检测的系统和方法，所述谐振器具有功能化表面以结合靶分子或否则与靶分子反应，其结合或反应的方式改变谐振器的频率响应。 [0028] As described herein, various embodiments of the present invention comprises a system and method used in conjunction with a resonator sensor whether a sample is present in the molecule for detecting the resonator surface has a function to bind target molecules or otherwise react with the target molecule, which is incorporated or reacted change the frequency response of the resonator.

[0029] 在一个实施方案中，生物传感器包括具有用以与靶生物分子反应的被功能化的表面的压电谐振器(piezoelectric resonator)。 [0029] In one embodiment, the biosensor comprising a surface for reaction with the target biological molecule is functionalized piezoelectric resonator (piezoelectric resonator).一个实施方案中，该谐振器由具有一对电极的压电材料层组成，所述一对电极耦合于压电材料层的相对的两侧。 One embodiment, the resonator is made of a material having a piezoelectric layer composed of a pair of electrodes, the opposing sides of a pair of electrodes coupled to the piezoelectric material layer.一个电极形成谐振器的功能化表面。 A functionalized electrode surface of the resonator.当激励信号被施加通过电极，谐振器的频率响应可以被测定。 Can be measured when the excitation signal is applied by the electrodes, the frequency response of the resonator.当靶生物分子与功能化表面接触，该靶生物分子与所述功能化表面反应(如结合)并引起谐振器质量和/或静电荷发生改变。 When the target biological molecule in contact with the functionalized surface, the target biomolecules react with the functionalized surface (e.g., binding) and causes the resonator mass and / or electrostatic charge changes.通过对谐振器的频率响应进行测定，测定是在谐振器暴露于可能含有靶生物分子的样品之前和之后进行，可以对与改变的质量和/或静电荷相关的频率响应的改变进行确定，这对靶生物分子的检测进行了指示。 By frequency response of the resonator is measured, the measurement is exposed to and after prior to sample biomolecules may contain a target in the resonator, may be determined for changes associated with changes in mass and / or electrostatic charge of frequency response, which detection target biomolecule was indicated.

[0030] 在一个实施方案中，使用的是一对谐振器。 [0030] In one embodiment, the use of a pair of resonators.除了一个谐振器具有功能化表面而另一个没有之外，每个谐振器都基本上如上面描述的。 In addition to a resonator has a functionalized surface and the other outside without each resonator are substantially as described above.没有功能化表面的谐振器是作为对照使用，另一个谐振器可以与它进行比较。 No functionalized surface of the resonator is used as a control, the other resonator can be compared with it.从而，当两个谐振器暴露于样品时，任何靶分子会对有功能性表面的谐振器产生影响，对没有功能化表面的谐振器则没有影响。 Thus, when the two resonators are exposed to a sample, a target molecule will have any impact on the functionality of the resonator surface, have no effect on the resonator without the functionalized surface.任何非靶分子将会对两个谐振器以及相应的频率响应产生相等的影响，所以通过比较两个谐振器将会有效地去除非靶分子造成的任何影响。 Any non-target molecules will be on the two resonators and the corresponding frequency response to produce equal effects, therefore, will effectively target molecule to cause any effect unless by comparing the two resonators.

[0031] 参照图1，其中所示的示意图说明的是依照一个实施方案的示范性谐振器的结构。 [0031] Referring to FIG. 1, a schematic view of the structure shown in FIG. Note that according to an exemplary embodiment of a resonator of.这个图中所说明的谐振器包括薄膜体声波谐振器谐振器(film bulk acousticresonator,FBAR)装置。 This illustrated in FIG resonator comprises a thin film bulk acoustic resonator resonator (film bulk acousticresonator, FBAR) device.装置100包括夹在电极121和电极122间的压电材料层110，这形成了谐振器元件。 Apparatus 100 includes a piezoelectric material layer 110 sandwiched between the electrode 121 and the electrode 122, which forms a resonator element.将这个谐振器元件以其边缘放置在硅/ 二氧化硅基板130 ( 二氧化硅层131置于硅层132之上)的上面，以允许该谐振器元件振动。 This resonator element with its edge placed over the silicon / silicon dioxide substrate 130 (silicon dioxide layer 131 disposed on the silicon layer 132) to allow vibration of the resonator element.电极121的暴露表面用生物学上有活性的或者衍生化材料层140进行功能化。 Electrode 121 is exposed, or derivatized active material layer 140 on the surface is functionalized with a biologically.所述生物学上有活性或衍生化的材料与靶生物分子相互作用，例如通过该生物分子与层140的结合，从而使该层的质量或静电荷发生改变，因而使谐振器元件发生改变。 There the biologically active or derivatized material interacts with a target biomolecule, e.g., by binding with the biomolecule layer 140, so that the electrostatic charge or mass layer changes, thereby making the resonator element is changed.

[0032] 可以使用本领域技术人员已知的技术制造FBAR谐振器。 [0032] may be used are known to those skilled in the art of manufacturing FBAR resonators.例如，在一个实施方案中，可以根据下面的方法制造FBAR谐振器。 For example, in one embodiment, may be manufactured FBAR resonator according to the following method.

[0033] 首先提供基板。 [0033] First, a substrate is provided.在一个实施方式中，使用硅片(silicon wafer)作为基板，尽管也可以使用用于半导体加工(如砷化镓)中的其它基板材料。 In one embodiment, using a silicon wafer (silicon wafer) as a substrate, although other substrate materials may be used for semiconductor processing (e.g., gallium arsenide) was added.然后在基板之上沉积牺牲材料层(保护材料层，layer of sacrificialmaterial) „牺牲材料层可以由各种材料组成,诸如Al、Cu、NiFe、Zn0或本领域已知的其它合适的材料。牺牲层可以使用任何合适的方法进行沉积，诸如派射(sputtering)或蒸镀(vapor deposition)。 Then depositing a sacrificial layer of material on the substrate (protective layer material, layer of sacrificialmaterial) "sacrificial material layer may be composed of various materials, such as Al, Cu, NiFe, Zn0, or other suitable materials known in the art. The sacrificial layer any suitable method may be used for deposition, such as to send outgoing (sputtering) or vapor deposition (vapor deposition).

[0034] 然后在牺牲层上面形成光致抗蚀剂层。 [0034] The sacrificial layer is then formed thereon a photoresist layer.然后使用常规方法在光致抗蚀剂上形成图案(pattern)。 Then forming a pattern using a conventional method (pattern) on the photoresist.有图案的光致抗蚀剂形成了掩模(mask)，用来选择性地蚀刻牺牲层。 The patterned photoresist mask is formed (mask), for selectively etching the sacrificial layer.更具体而言，光致抗蚀剂掩模在牺牲层上覆盖一个区域，这个区域随后会形成位于压电谐振器元件下面的气隙。 More specifically, a photoresist mask covers a region on the sacrificial layer, this region will then form an air gap is located below the piezoelectric resonator element.对牺牲层进行蚀刻以后，在基板上沉积绝缘层(insulator layer)，有效替代之前刻蚀掉的牺牲层。 After the sacrificial layer is etched, depositing an insulating layer (insulator layer) on the substrate, an effective alternative to the sacrificial layer etched away before.可以通过沉积形成绝缘层或者否则通过使用常规方法形成绝缘层。 The insulating layer may be formed by depositing or otherwise forming an insulating layer by using conventional methods.

[0035] 在沉积绝缘层之后，使用例如剥离工艺(lift-offprocess)除去光致抗蚀剂。 [0035] After the deposition of the insulating layer, for example, lift-off process (lift-offprocess) removing the photoresist.光致抗蚀剂上面的绝缘层部分也被去除。 The insulating layer above the photo-resist portion is also removed.这在基板之上得到了有图案的绝缘体和牺牲材料层。 This results in a patterned insulator layer and the sacrificial material on the substrate.换句话说，牺牲材料嵌在绝缘材料中(或反之亦然)，从而在该层中形成图案。 In other words, the sacrificial material is embedded in insulating material (or vice versa), to form a pattern in the layer.牺牲材料在后面的步骤中去除掉以后，该层会形成谐振器元件的支撑结构。 After the sacrificial material is removed in a later step, this layer may form the supporting structure of the resonator element.

[0036] 任选地,可在有图案的绝缘体/牺牲层的上面形成薄膜层(membrane layer)。 [0036] Optionally, a thin film layer (membrane layer) on top of the patterned insulator / sacrificial layer.如果使用了薄膜层，下文提及的在绝缘体/牺牲材料层的上面形成构造应该被解释成在薄膜层的上面形成构造。 If the film layer, the below-mentioned configuration is formed in the upper insulator / sacrificial material layer should be construed as being formed on top of the thin film layer configured.

[0037] 然后在绝缘体/牺牲材料的上面形成导电层(conductive layer)。 [0037] and then forming a conductive layer (conductive layer) on top of the insulator / sacrificial material.该导电层可由任何导电材料组成，诸如金属。 The conductive layer may be formed of any conductive material, such as metal.合适的金属可以包括Al、Au、W、Pt或Mo。 Suitable metals may include Al, Au, W, Pt or Mo.图案化这个导电层以形成谐振器元件的下部电极。 This conductive layer is patterned to form a lower electrode of the resonator element.然后，在导电层的上面形成压电材料层，压电材料诸如是AlN或ZnO。 Then, the piezoelectric material layer is formed on the conductive layer, a piezoelectric material such as AlN or ZnO.图案化这个压电材料层以形成压电谐振器的主体。 The piezoelectric material layer is patterned to form the body of the piezoelectric resonator.然后在压电层的上面形成第二个导电层。 The second conductive layer is then formed on top of the piezoelectric layer.图案化这个导电层以形成谐振器元件上部的电极。 This conductive layer is patterned to form an upper electrode of the resonator element.以这种方式形成谐振器元件之后，使用例如湿法刻蚀工艺(wet etchprocess)将基板上的、位于谐振器元件下面的牺牲材料去除(可能需要形成通向牺牲层的导通孔(via)，以完成该材料的去除)。 After forming the resonator element in this manner, for example using a wet etch process (wet etchprocess) on the substrate, the resonator element is located below the sacrificial material removal (may be necessary to form vias leading to the sacrificial layer (via) to complete the removal of the material).

[0038] 谐振器元件上部电极具有下面和上面，下面结合于压电层，上面暴露。 [0038] The resonator element having an upper electrode below and above, below bonded to the piezoelectric layer, the exposed top.然后对这个暴露的表面进行功能化，使得它可以与靶分子反应(如被结合)。 Then the exposed surfaces be functionalized so that it can be reacted with the target molecule (e.g., bound).在一个实施方案中，使用抗体或DNA分子对这个电表面(electric surface)进行功能化。 In one embodiment, a DNA molecule or an antibody to the surface of the electrically (electric surface) is functionalized.这可以通过使用化学吸附方法在电极表面形成多种硫醇类化合物或硫化物的自组装单分子层(self-assemblingmonolayers)实现。 This can form a variety of thiols or sulfides of self-assembled monolayers (self-assemblingmonolayers) implemented on the electrode surface by using a chemical adsorption process.然后，可以使用激活过程(activationprocess)将抗体或DNA分子共价结合于所述自组装的单分子层上。 Then, the activation process may be used (activationprocess) antibody or DNA molecules are covalently bound to the monolayer of the self-assembled.

[0039] 多种可替代的对谐振器表面进行功能化的手段也是可行的。 [0039] The various means of the functionalized surface of the resonator is also feasible alternative.例如，可以通过将生物分子固定在预先覆于该装置表面的有机膜上或者通过化学衍生化来实现FBAR装置的功能化，其中化学衍生化诸如是硅烷化、酯化、烷基化或本领域已知的类似方法。 For example, by immobilizing biomolecules in advance to cover the organic film surface of the device or by chemical derivatization to implement the functions of the FBAR devices, wherein the chemical derivatization, such as silanization is, esterification, alkylation, or in the art similar methods known.也可以通过直接将生物分子固定于装置表面的金属或者其它无机膜上，或者固定于装置表面的自组装生物分子层上来实现FBAR装置的功能化，其中自组装生物分子层诸如是氨基酸衍生化的脂肪酸/脂质。 It can also be directly fixed to the metal biomolecules or other inorganic film surface of the device, or the device is fixed to the surface of self-assembled molecular layer up to achieve a biological function of the FBAR devices, wherein the self-assembled layer, such as a biological molecule is an amino acid derivatized fatty acids / lipids.

[0040] 因为生物传感器可能会在“潮湿”的环境下使用，因此有可能需要对生物传感器的、除了暴露的谐振器表面以外的部分进行保护。 [0040] Since the biosensor may be used in the "wet" environment, and therefore may need to be protected, in addition to the exposed surface of the resonator portion of the biosensor.换句话说，要被检测以确定靶分子是否存在的样品可能是液态样品。 In other words, the target molecule to be detected to determine whether there may be a liquid sample of the sample.对生物传感器的某些元件来说，暴露于液体样品可能带来问题，这些问题可能使生物传感器失灵。 Certain elements of the biosensor, the sample is exposed to the liquid may cause problems that might cause failure of the biosensor.例如，液体样品可能导致谐振器元件的电极之间短路，从而阻碍对谐振器频率响应变化的测量。 For example, the liquid sample may cause a short circuit between the electrodes of the resonator element, thus preventing the measurement of changes in the frequency response of the resonator.从而，本发明的一些实施方案也可包括保护层，该保护层覆盖生物传感器的、除了谐振器元件的功能化表面(以及可能地，相应的对照生物传感器的非功能化电极表面)以外的其它元件。 Accordingly, some embodiments of the present invention may also include a protective layer, the protective layer covering the biosensor, except for the functionalized surface of the resonator element (and possibly, the corresponding non-functionalized electrode surface of the control biosensor) Other element.可以通过在需要保护的元件上形成聚合物膜来提供保护层。 The protective layer may be provided by forming a polymer film on the element to be protected.

[0041] 应该注意，前面的描述属于单个的、示范性的实施方案。 [0041] It should be noted that, belonging to a single foregoing description of exemplary embodiments.可以使用与已描述方法稍微不同的步骤来形成替代性实施方案。 The method described can be used with slightly different steps to form alternative embodiments.许多这些变更包括在前述方法中；并且，本领域技术人员在阅读本公开内容之后，容易想到另外的此类变更。 Many of these changes are included in the process; and, those skilled in the art upon reading the present disclosure, other such modifications will readily occur.例如，在一个可替代的实施方案中，可以通过在表面上覆以离子选择膜(ion-selective membrane)对谐振器元件的暴露电极表面进行功能化。 For example, in an alternative embodiment, the surface may be covered by an ion selective membrane (ion-selective membrane) exposure to the resonator element functionalized electrode surface.然后，可以用诸如葡萄糖氧化酶的酶对所述离子选择膜进行功能化。 Then, may be an enzyme such as glucose oxidase, the ion selective membrane is functionalized.可选地，离子选择膜可以用功能性膜(functional membrane)进行功能化,所述功能性膜提供运输机制，诸如从生物材料或合成的生化物质中提取的载体分子、离子孔或离子通道(ionpores or channels)。 Alternatively, the ion-selective membrane may be functionalized with a functional film (functional membrane), to provide the functional film transport mechanisms, such carrier molecules extracted from the biological material of biological or synthetic substance, the ion holes or ion channels ( ionpores or channels).

[0042] 如上所述，在此描述的FBAR生物传感器的使用是通过对谐振器的频率响应的改变进行检测，所述改变是由生物传感器在样品中的暴露以及随后的功能化表面与靶分子的反应造成的。 [0042] As described above, using FBAR biosensor described herein is by changing the frequency response of the resonator to detect a change in the biosensor exposed by the sample and subsequent functional surface with the target molecule the reaction caused.提供控制电路(control circuitry)用以对谐振器的频率响应进行测定。 Providing a control circuit (control circuitry) to the frequency response of the resonator is measured.一个包括FBAR生物传感器和相应的控制性电子设备的系统的示范性实施方案显示在图2中。 Exemplary embodiments include a FBAR biosensor system and a corresponding controlled electronic device 2 shown in FIG.

[0043] 参考图2，显示的功能框图说明了根据一个实施方案的生物传感器系统。 [0043] Referring to Figure 2, shows a functional block diagram illustrates a biosensor system according to one embodiment.在这个实施方案中，系统200包括谐振器210和控制电路220。 In this embodiment, the system 200 includes a resonator 210 and control circuit 220.在一个实施方案中，谐振器210如上文所述。 In one embodiment, resonator 210 as described above.谐振器210与控制电路220通过该谐振器的电极连接。 Resonator electrodes 210 and control circuitry 220 connected to the resonator through.所述电极与控制电路220的兀件:信号发生电路221 (signal generation circuitry221)和处理电路222 (processingcircuitry222)连接。 The control electrode member Wu circuit 220: signal generating circuit 221 (signal generation circuitry221) and a processing circuit 222 (processingcircuitry222) connection.

[0044] 配置信号发生器电路221 (signal generator circuitry221)用以产生作用于谐振器210的电极的激励信号(excitation signal)。 Excitation signal [0044] The configuration of the signal generator circuit 221 (signal generator circuitry221) applied to the electrodes for generating the resonator 210 (excitation signal).该激励信号具有引起谐振器的压电材料振动的AC(交流电)分量。 AC (alternating current) component of the excitation signal causes the piezoelectric material having a vibration resonator.由于谐振器210的物理学特征，所以该谐振器具有特征性的频率响应。 Since the physical characteristics of the resonator 210, so that the resonator has a frequency response characteristic.谐振器210的频率响应以谐振器的电学特征(如谐振器的阻抗)的差异性表明了其自身。 Frequency of the resonator 210 in response to the electrical characteristics of the resonator (e.g., the impedance of the resonator) differences indicate its own.这些电学特征可以通过处理电路222进行测量。 These electrical characteristics may be measured by a processing circuit 222.

[0045] 谐振器210的频率响应所具有的基频谐振(fundamentalresonance)的频率就是对应波长为谐振器厚度二倍的频率。 Frequency Response [0045] The resonator 210 has a frequency of the fundamental resonance (fundamentalresonance) is twice the frequency corresponding to the wavelength of the resonator thickness.波长等于压电材料的声速除以频率。 Wavelength is equal to the speed of sound divided by the frequency of a piezoelectric material.压电材料的声速取决于使用的具体材料。 Acoustic velocity of the piezoelectric material depends on the particular material used.例如，AlN的声速为每秒大约10，400米，ZnO的声速为每秒大约6，330米。 For example, AlN sound speed of about 10,400 meters per second, the speed of sound of ZnO is about 6,330 meters per second.从而，对于使用AlN的谐振器来说，如果谐振器的厚度大约是2.5微米，则共振频率约为2GHz。 Therefore, AlN is used for a resonator, if the thickness of the resonator is about 2.5 micrometers, the resonant frequency of about 2GHz.如果希望将共振频率调整为一个不同的频率，这可以通过，例如改变压电材料或者改变谐振器的厚度来实现。 If you want to adjust the resonance frequency to a different frequency, which can be, for example, altering or changing the thickness of the piezoelectric material of the resonator is achieved.

[0046] 应该注意的是，由于用来制造FBAR装置的技术与Si和GaAs圆片的加工技术是可相容的，将这些技术结合在一起来制造一体的(all-1n-one)生物传感器是可能的。 [0046] It should be noted that, due to manufacturing techniques and Si and GaAs wafer processing art FBAR devices are compatible, these technologies (all-1n-one) biosensor manufactured integrally together It is possible.换句话说，将谐振器和控制电路制造在单个的芯片上是可能的。 In other words, the resonator and the control circuit fabricated on a single chip is possible.相比现有技术，这可以提供另外的优点，其在于简化生物传感器各个元件的设计，改善功率效率等等。 Compared to the prior art, which may provide additional advantages, which is to simplify the design of the individual elements of the biosensor, and the like to improve the power efficiency.

[0047] 从而，在一个实施方案中，生物传感器系统200的运转是通过产生包含多个频率的激励信号(不一定是同时产生)，将该激励信号施加于谐振器210然后测量谐振器对应每个频率的电学特征。 Excitation signal [0047] Thus, in one embodiment, the operation of the biosensor system 200 by generating a plurality of frequencies comprising a (not necessarily simultaneously generated), the excitation signal is applied to the resonator 210 corresponding to each of the resonator is then measured electrical characteristic frequencies.例如，信号发生器电路221可以产生包含以时间为函数而变化的单个频率的激励信号。 For example, the signal generator circuit 221 may generate the excitation signal comprises a single frequency varies as a function of time is.换句话说，信号发生器电路221扫描一定范围的频率。 In other words, the frequency range of 221 scanning signal generator circuit.然后，处理电路222可以测量例如作为频率(其为时间的函数)的函数的、经过谐振器210的阻抗。 Then, the processing circuit 222 may measure, for example, the frequency (which is a function of time) is a function of the impedance of the resonator 210 through.可以对这个频率响应(即作为频率的函数的谐振器210的阻抗)进行数字化、存储并与基线响应(baseline response)进行比较，或者可以和以相同方式进行操作的对照谐振器的响应进行比较。 It may be (i.e., a frequency-dependent impedance of the resonator function 210) are digitized, stored and compared with the baseline response (baseline response), or may be compared and in response to control resonator operates in the same manner as for the frequency response.[0048] 应该注意，施加于谐振器的激励信号可以包含不同的分量(如单一的或混合的频率，或时间-变量分量)。 [0048] It should be noted that the excitation signal is applied to the resonators may comprise different components (e.g., single or mixed frequency, or time - variable component).相似地，可以根据多种响应分量(例如同相分量和不同相位分量(异相分量，OUt-Of-phasecomponent))或者其它响应特征对频率响应进行测量。 Similarly, according to various response component (e.g., a different phase component and a phase component (-phase components, OUt-Of-phasecomponent)) or other response characteristics and frequency response measurements.这些响应特征可以包括:由于质量或静电荷改变而导致的谐振器的稳态频移(steady-statefrequency shifts),所述的质量或静电荷改变是由于祀分子与谐振器表面的固定化生物分子发生特异的结合(如抗体-抗原、DNA杂交、分子受体结合(molecular receptorbinding)、分子构型改变(molecular configurational changes))而导致的。 These responses may include features: mass or electrostatic charge due to the change caused by the resonator frequency shift steady state (steady-statefrequency shifts), changing the mass or electrostatic charge due to the immobilization of biomolecules Si resonator surface molecule specific binding occurs (such as an antibody - antigen, the DNA hybridization, receptor binding molecules (molecular receptorbinding), change the molecular structure (molecular configurational changes)) caused.

[0049] 所述生物传感器在靶分子的检测中很有用处，这是因为在与谐振器功能化表面的反应中，靶分子改变了谐振器的质量和/或静电荷，这两者都对谐振器的共振有影响。 [0049] The biosensor useful in the detection of target molecules, because in the reaction with the functionalized surface of the resonator, the resonator changes the target molecule mass and / or electrostatic charge, both of the influence of the resonator resonance.换句话说，这些特征改变了谐振器的振动特征。 In other words, these feature change the vibration characteristics of the resonator.例如，如果靶分子与功能化表面结合并且从而有效地增加了谐振器的质量，则谐振器对所施加的激励信号所产生的力的响应将会趋向于较不迅速。 For example, if the target molecule bound to the functionalized surface and thereby increasing the effective mass of the resonator, the resonance excitation signal in response to the applied force generated would tend to be less quickly.频率响应将因此而是较低的。 Thus the frequency response but lower.从而，如果在靶分子结合于功能化表面之前，谐振器在频率f下发生共振，则结合于功能化表面的靶分子所添加的质量将会使谐振器在频率△ f下进行共振。 Thus, if the target molecule before bonded to the functionalized surface of the resonator resonates at a frequency F, the mass of the target molecule bound to the functionalized surface of the resonator will make added resonates at the frequency △ f.如果将谐振器的频率响应看作频率的函数，这与峰值响应(peakresponse)向左(较低的频率)移动相符合。 If the frequency of the resonator frequency response function considered, that the left (lower frequency) consistent with the movement of the peak response (peakresponse).[0050] 参考图3A-3C，这组图说明了靶分子与依照一个实施方式所示的生物传感器的功能化表面的结合。 [0050] with reference to FIGS. 3A-3C, which illustrate the binding of the target molecule Photos with the functionalized surface in accordance with one embodiment of the embodiment shown in biosensor.首先参考图3A，所示的图说明的是暴露于样品之前的生物传感器。 Referring first to Figure 3A, shown in FIG. Note that in the sample before exposure to the biosensor.该生物传感器的结构与图1所示的结构基本相同，包括:由基板331和绝缘层332形成的支撑结构；和谐振器元件，由压电层310夹在电极321和322之间形成。 The structure of the configuration shown in FIG. 1 of the biosensor is substantially the same, comprising: a support structure consisting of substrate 331 and an insulating layer 332 is formed; and the resonator element, formed of a piezoelectric layer 310 sandwiched between the electrodes 321 and 322.谐振器元件的电极322被抗体340功能化，所述抗体可以例如通过硫醇的自组装单分子层与电极结合。 Electrode 322 of the resonator element 340 is functionalized with an antibody, the antibody may bind, for example, self-assembled monolayer of thiol and the electrode.保护性聚合物层350 (图1中未示出)覆盖谐振器元件和支撑结构，除了谐振器元件的功能化表面以外。 Protective polymer layer 350 (not shown in FIG. 1) covering the resonator element and the supporting structure, except for the functionalized surface of the resonator element.

[0051] 接下来，参考图3B，所示的图说明了图3A中的生物传感器暴露于样品时的情况。 [0051] Next, with reference to FIG. 3B, as shown in FIG. 3A illustrates a case where the biosensor when exposed to the sample.如这个图中描述的，样品360含有多种不同的生物分子，包括抗原分子(靶分子，在图中用三角形表示)和多种其他分子(非靶分子，在图中用圆形和方形表示)。 As depicted in this figure, the sample 360 ​​comprising a plurality of different biomolecules, including antigen molecules (target molecules, represented by triangles in the figure), and a variety of other molecules (non-target molecules, represented by circles and squares in the figure ).生物分子分散在样品360中，使得一些生物分子与生物传感器的功能化表面接触。 Biomolecule dispersed in the sample 360, so that some of the functions of biomolecules and the biosensor surface contact.当生物分子与功能化表面接触，它们可能与该功能化表面结合，也可能不与该功能化表面结合。 When the function of the biomolecule into contact with the surface, they may be combined with the functionalized surface, it may not bind to the functionalized surface.更具体而言，如果与功能化表面接触的生物分子是对应于功能化表面上的抗体的抗原，它将会结合到其中一个抗体上。 More specifically, if the biological function of the molecule in contact with the surface corresponding to the antigen on the functionalized surface, it will bind to one antibody.如果生物分子不是与抗体对应的特异性抗原，它将不会结合到功能化表面的抗体上。 If the biomolecule is not corresponding to a specific antigen to an antibody, the antibody will not bind to the functionalized surface.

[0052] 接下来参考图3C，所示的图说明的是除去样品之后的图3A和图3B的生物传感器。 [0052] Referring next to Figure 3C, as shown in FIG. Note that the biosensor FIGS 3A and 3B, after the sample is removed.从这个图中可以看出，当样品(如生物液体)从生物传感器上被除去，样品中含有的非抗原生物分子也被除去。 As can be seen from this figure, when a sample (e.g. biological fluid) is removed from the biosensor, non-antigen biomolecules contained in the sample are also removed.结合于抗体上的抗原生物分子留了下来。 The antibody bound to the antigen retained biomolecules.这些抗原对谐振器元件的质量和/或静电荷产生影响，并且因此将会改变谐振器元件的频率响应。 These antigens have an impact on the quality and / or electrostatic charge of the resonator element, and thus will change the frequency response of the resonator element.因此，通过确定谐振器元件的频率响应是否被改变来对抗原生物分子的存在与否进行检测。 Thus, the presence or absence has been changed to an antigen of biological molecules is detected by determining the frequency response of the resonator element.这个目标的实现如上文所述。 To achieve this goal as described above.

[0053] 应该注意，在一些情况中，从生物传感器上除去样品并不能保证谐振器元件功能化表面上所有的非靶生物分子都被除去。 [0053] It should be noted that, in some cases, the sample is removed from the biosensor does not guarantee that all non-target biomolecules have been removed on the functionalized surface of the resonator element.这些非靶分子可能对谐振器元件的频率响应造成影响，并从而影响对样品中是否存在靶分子进行的判断。 These non-target molecules may affect the frequency response of the resonator element, and thus influence on the determination whether the sample for the presence of the target molecule.在一个实施方式中，通过在检测生物传感器(test biosensor)之外，使用增加的对照生物传感器(control biosensor)对这些非靶分子的影响进行补偿。 In one embodiment, the outside of the detection by the biosensor (test biosensor), increased use of control biosensor (control biosensor) effect on these non-target molecules to compensate.除了谐振器元件的表面没有为了与靶生物分子反应而进行功能化以外，对照生物传感器与检测生物传感器基本相同。 In addition to the surface of the resonator element does not react with the target biomolecules to be functionalized outside, and the control biosensor biosensor detects substantially the same.检测样品时，检测生物传感器和对照生物传感器都暴露于样品。 When the test sample, and the biosensor detects the biosensor is exposed to a control sample.未从检测生物传感器上去除的任何非靶分子应该也同样未从对照生物传感器上去除。 Any non-target molecules not removed from the detector biosensor should also not be removed from the control biosensor.由于对照生物传感器不与靶分子结合，对照生物传感器谐振器元件的频率响应的任何改变都应归因于这些非靶分子的存在。 Since the control biosensor does not bind to the target molecule, any change in the frequency response of the control biosensor resonator element should be attributed to the presence of these non-target molecules.既然从对照生物传感器的频率响应可以知道非靶分子的影响，就可以有效地从检测生物传感器的频率响应的改变中“扣除”这种影响。 Since the frequency change control in response biosensor can know the impact of the non-target molecule, can be effectively detected from the frequency response of the biosensors "decoupled" from the impact.

[0054] 应该注意，当前述例子描述使用两个生物传感器(一个检测生物传感器和一个对照生物传感器)时，这两个生物传感器可以看作分开的单元或同一生物传感器的不同部分。 [0054] It should be noted that the aforementioned example describes a biosensor using two (a biosensor and detecting a control biosensor), this can be seen as two different parts of the biosensor or the biosensor unit separate.这两个生物传感器的每一个可以拥有它们各自的控制电路，或者它们可以共用全部或者部分控制电路。 Each of the two biosensors can have their respective control circuitry, or they may share all or part of the control circuit.在后一种情况中，如果将术语“生物传感器”换成术语“谐振器”，这个例子将会更容易理解。 In the latter case, if the term "biosensor" replaced by the term "resonator", this example will be more readily understood.两种情况都属于本发明的范围。 Both cases are within the scope of the present invention.

[0055] 参考图4，所示的流程图说明的是依照一个实施方案的对样品中是否存在靶分子进行检测的方法。 [0055] Referring to Figure 4, a flow chart is shown in accordance with the method described in the sample the presence or absence of a detection target molecules embodiment.在这个实施方式中，使用的是具有单个谐振器的生物传感器。 In this embodiment, the biosensor is used with a single resonator.该生物传感器具有将会与样品中靶分子发生反应的功能化表面。 The biosensor surface has a function of reaction of the sample with target molecules will occur.该实施方案中的方法包括以下步骤:提供具有功能化表面的谐振器(框410)，在谐振器暴露于样品之前对其频率响应进行测定(框420)，将谐振器暴露于样品(框430)，谐振器暴露于样品之后对其频率响应进行测定(框440)，对谐振器暴露给样品之前和之后的频率响应进行比较(框450)，根据暴露于样品导致的谐振器的频率响应的改变确定是否存在靶分子(框460)。 The method of this embodiment comprises the steps of: providing a resonator (block 410) having a functionalized surface, the resonator is exposed to the sample before measuring its frequency response (block 420), the resonator is exposed to the sample (block 430 ), after the resonator frequency response thereof exposed to the sample is measured (block 440), the frequency before and after exposure to the sample and response of the resonator are compared (block 450), the frequency of the resonator is exposed to the sample resulting response determine whether there is a change in the target molecule (block 460).

[0056] 在这个方法中使用的是单个的谐振器，必须提供基线频率响应(baselinefrequency response),由基线频率响应可以确定频率响应的改变。 [0056] In this method for use in a single resonator, must provide a baseline frequency response (baselinefrequency response), it may be determined by a baseline frequency response of a frequency change in response.在一个实施方案中，通过测定谐振器暴露于样品之前的频率响应来得到这个基线。 In one embodiment, a baseline is obtained by measuring the frequency response of the resonator prior to exposure to the sample.在可替代的实施方案中，基线可以如此被提供:通过检测多个相同地制造的谐振器、建立复合频率响应，或者对于具有相同设计的谐振器，建立平均频率响应。 In an alternative embodiment, the baseline may thus be provided: by detecting a plurality of resonators manufactured in the same manner, the establishment of a composite frequency response, or for the resonators having the same design, to establish the average frequency response.在这个实施方案中，复合或平均的频率响应可以存储在连接到处理电路上的存储器中，使得它可以被检索并与谐振器暴露于样品之后测量到的频率响应进行比较。 In this embodiment, the composite or average frequency response may be stored in a processing circuit coupled to the memory, so that it can be retrieved and measured after the sample is compared to the frequency response of the resonator is exposed.获得基线的多种其它手段也是可能的。 Obtaining a baseline of a variety of other means are possible.

[0057] 参考图5，所示的流程图说明依照一个可替代的实施方案的对样品中是否存在靶分子进行检测的方法。 [0057] Referring to Figure 5, the flowchart shown in accordance with the method described in the presence or absence of target molecules in the sample for detecting an alternative embodiment.在这个实施方案中，使用的是具有一对谐振器的生物传感器。 In this embodiment, a biosensor is used having a pair of resonators.一个谐振器起到检测谐振器的作用，另一个起到对照谐振器的作用。 Detector functions as a resonator of the resonator, the other resonator functions as a control.如上面描述的，检测谐振器具有功能化表面，而对照谐振器没有。 As described above, the resonator has a function of detector surface, but does not control the resonator.对每个谐振器的频率响应进行测定的信号发生电路和处理电路可以是共用的。 Measuring a signal on the frequency response of each resonator generating circuit and a processing circuit may be shared.即，可以用一组信号发生和处理电路与两个谐振器联用。 That is, a set of signal generating and processing circuitry associated with the two resonators.或者，每个谐振器可以具有独立的信号发生和处理电路。 Alternatively, each resonator may have a separate signal generating and processing circuitry.

[0058] 这个替代性方法包括以下步骤:提供具有双(检测和对照)谐振器的生物传感器(框510)，将谐振器暴露于样品(框520)，对检测谐振器和对照谐振器暴露于样品之后的频率响应进行测定(框530)，对检测谐振器和控制谐振器的频率响应进行比较(框540)，以及根据检测谐振器和对照谐振器频率响应的不同确定是否存在靶分子。 [0058] This alternative method comprises the steps of: providing the biosensor (block 510) with bis (detection and control) of the resonator, the resonator is exposed to the sample (block 520), the detection resonator and control resonator is exposed to the after determining the different frequency response of the sample is measured (block 530), the resonant frequency detector and control response of the resonator is compared (block 540), and according to the detected frequency response of the resonator and control resonator presence or absence of target molecules.

[0059] 虽然这个可替代方法是根据检测谐振器的频率响应和对照谐振器的频率响应之间的不同来确定靶分子是否存在，将两个频率响应之中的一个或两个频率响应与基线进行比较也可能是有用的。 [0059] While this alternative approach is to determine whether a target molecule is present, the frequency response of one of the two or two depending on the baseline frequency response between the frequency response and the frequency response of a control resonator resonator detector Compare also may be useful.举例而言，尽管谐振器可以被设计成相同的(除了控制谐振器的非功能化表面之外)，靶分子的存在造成的频率响应的改变仍然可能不是线性的。 For example, although the resonator may be designed to be the same (except the control non-functional surface of the resonator), the frequency response change caused by the presence of the target molecule may still not be linear.因此，不但了解检测和对照频率响应之间差异的强度，而且了解非靶分子引起的频率响应改变的强度(即基线，暴露于样品之前的频率响应和对照频率响应之间的不同)，可能是有帮助的。 Accordingly, not only to understand the differences between detected intensity and the frequency response of the control, and learn strength of the frequency response changes due to non-target molecules (i.e. baseline, exposed to the difference between the frequency response and the frequency response before the control sample), may be helpful.

[0060] 如上面指出的，本发明的多种实施方案可提供相对本领域现有技术的许多优点。 [0060] As noted above, various embodiments of the present invention can provide state of the art relative to the present number of advantages.这些优点可包括相对其它类型生物传感器而言的更高的灵敏度和更快的响应时间；更高的共振频率，其可对质量改变和倒电容(stiffness)改变(由电荷改变造成)提供更高的灵敏度；比其它类型的谐振器(如单晶石英微天平(single-crystal quartz microbalance)和SAW谐振器)更简单的结构；高频下更好的功率容量特性(powerhandlingcharacteristics);响应峰更尖锐(由于寄生效应(parasitic effects)的减少)；更大的用以检测靶分子的表面面积；以及暴露于湿润环境时或暴露于湿润环境以后对靶分子进行检测的能力。 These advantages may include greater sensitivity relative to other types of biosensors and faster response time; higher resonant frequency, which may change the quality and elastance (Stiffness) change (caused by the change of charge) to provide higher sensitivity; than other types of resonators (e.g., a quartz crystal microbalance (single-crystal quartz microbalance), and SAW resonators) simpler structure; better power capacity characteristics at a high frequency (powerhandlingcharacteristics); sharper peak response (due to reduced parasitic effects (parasitic effects)); and greater surface area for the detection of target molecules; and when exposed to a humid environment or after exposure to the wet environment of the ability to detect target molecules.本发明的一些实施方案的另一个优点是它们可以利用相对成熟的技术(如涉及设计和制造FBAR装置和集成电路，或对多种表面进行功能化的方法)，因此在各个实施方案的设计、实施和/或制造中出现较少的困难。 Another advantage of some embodiments of the present invention is that they can utilize relatively mature technology (e.g., FBAR devices relates to the design and manufacture of integrated circuits and, more surface or function of the method), so the design of the various embodiments, less difficulty embodiment and / or manufacture occurred.

[0061] 上面涉及具体的实施方案，对本发明可以提供的好处和优点进行了描述。 [0061] The above embodiment relates to specific embodiments, benefits and advantages of the present invention can be provided is described.这些好处和优点，以及可以使它们出现或变得更加显著的任何要素或限制都不应被看作任何或所有权利要求的关键的、必须的或基本的特征。 These benefits and advantages, and can make them appear or become more pronounced are any elements or limitations should not be viewed as any or all the claims of the critical, required, or essential characteristics.如此处所用，“包括(comprise) ”、“包括(comprising) ”的术语或它们的任何其它变化都意图被解释成非排他性地包括跟随在这些术语之后的要素或限制。 As used herein, "comprise (of comprise)", "including (comprising,)" term or any other variation thereof, are intended to be construed to include non-exclusive elements or limitations follow after these terms.因此，包括一组要素的系统、方法或者其它实施方案并不仅限于这些要素，也可以包括其它未明确列出的或所要求保护的实施方案的非固有的要素。 Thus, the system comprises a set of features, or other embodiments, the method is not limited to those elements, and may include other non-inherent elements not expressly listed or claimed embodiment.

[0062] 尽管使用具体的实施方案对本发明进行了描述，应该理解这些实施方案是说明性的，本发明的范围不局限于这些实施方案。 [0062] Although specific embodiments of the present invention has been described, it should be understood that these embodiments are illustrative and the scope of the present invention is not limited to these embodiments.对这些实施方案进行的许多变化、修改、补充和发展都是可能的。 Many variations of these embodiments thereof, modifications, additions and development are possible.这些变化、修改、补充和发展都落入本发明的范围中，附带的权利要求对本发明的范围进行了详细描述。 These variations, modifications, additions and development are within the scope of the present invention, the scope of the appended claims of the present invention will be described in detail.

Claims (25)

Translated from Chinese

1.一种设备，其包括: 基板，在所述基板上附着一对薄膜体声波谐振器(FBARs)，其由一个检测FBAR和一个参比FBAR组成，每个FBAR包括夹在两个电极之间的一个压电材料层，其中每个FBAR的至少一个电极具有暴露表面，并且检测FBAR电极的暴露表面包括功能性膜；和控制电路，其包括信号发生电路和处理电路，所述信号发生电路施加具有多个频率的激励信号至所述一对FBAR的每一个的两个电极，所述处理电路测量并比较检测FBAR和参比FBAR对所述频率的激励信号的阻抗，这样与生物分子特异性反应的靶分子的质量或静电荷或这两者引起检测FBAR和参比FBAR之间的差异； 其中所述设备被配置以在液体样品中检测包含生物分子的所述靶分子，以及FBAR安装在基板上，所述基板包括基板材料层和位于所述基板材料层之上的第一、第二间隔开的绝缘层，所述FBAR具有与所述第 1. An apparatus, comprising: a substrate, adhered to a pair of film bulk acoustic resonators (FBARs) on the substrate, which consists of a detection and a reference FBAR FBAR, each FBAR comprising two electrodes sandwiched a piezoelectric material layer between, wherein each of the at least one electrode of the FBAR having an exposed surface, and an exposed surface of the detection electrode comprises a FBAR functional film; and a control circuit including a signal generating circuit and a processing circuit, said signal generating circuit two electrodes for applying an excitation signal to the pair of FBAR having a plurality of frequencies for each of the processing circuit and comparing the detected measuring and reference FBAR FBAR impedance of the excitation signal frequency, so that a specific biomolecule target molecule reaction mass or electrostatic charge, or both causes a difference between the detected and reference FBAR FBAR; wherein the device is configured to detect the target molecule comprises a biomolecule in the liquid sample, and mounting FBAR on a substrate, said substrate comprising a substrate and a layer of a first material, spaced apart from the second insulating layer located over the layer of the substrate material, the FBAR having the first绝缘层接触的第一边缘和与所述第二绝缘层接触的第二边缘，其中所述基板材料层、所述间隔开的绝缘层和所述FBAR在它们之间限定空区域，所述FBAR位于间隔开的绝缘层之间的区域之上并分别与两个绝缘层的上表面接触，该区域为所述限定的空区域；其中所述FBAR、所述第一和第二绝缘层以及所述基板材料层除了功能化表面之外通过由保护层覆盖不暴露于所述靶分子。 A first insulating layer in contact with the edge and the second edge in contact with the second insulating layer, wherein the material layer of the substrate, the insulating layer and spaced apart from the FBAR void region defined therebetween, the FBAR and two, respectively contact the upper surface of the insulating layer over the region between the insulating layer is spaced apart from the region of the space defined region; wherein the FBAR, the first and second insulating layers as well as said layer of material of the substrate surface in addition to the functions covered by the protective layer is not exposed to the target molecule.

10.权利要求1的设备，其中功能化表面是通过将生物分子固定化在自组装单分子层上而达到功能化。 10. The apparatus of claim 1, wherein the functionalized surface is functionalized by immobilization of biomolecules on a self-assembled monolayer to achieve functional.

11.权利要求1的设备，其中功能化表面是通过将生物分子固定化在有机膜上而达到功能化。 11. The apparatus of claim 1, wherein the functionalized surface is functionalized by immobilization of biomolecules on an organic film to achieve functionalization.

12.权利要求11的设备，其中有机膜被预先涂布在功能化表面上。 12. The apparatus of claim 11, wherein the organic film is pre-coated on the functionalized surface.

13.权利要求11的设备，其中有机膜被化学衍生在功能化表面上。 13. The apparatus of claim 11, wherein the organic membrane is chemically derivatized on the functionalized surface.

14.权利要求13的设备，其中有机膜被通过硅烷化化学衍生在功能化表面上。 14. The apparatus of claim 13, wherein the organic film is derivatized on the functionalized surface by silane chemistry.

15.权利要求13的设备，其中有机膜被通过酰化化学衍生在功能化表面上。 15. The apparatus of claim 13, wherein the organic film is derivatized on the functionalized surface by acylation chemistry.

16.权利要求13的设备，其中有机膜被通过酯化化学衍生在功能化表面上。 16. The apparatus of claim 13, wherein the organic film is derivatized on the functionalized surface by chemical esterification.

17.权利要求13的设备，其中有机膜被通过烷基化化学衍生在功能化表面上。 17. The apparatus of claim 13, wherein the organic film is derivatized on the functionalized surface by alkylation chemistry.

18.权利要求1的设备，其中功能化表面是通过直接将生物分子固定化在金属上而达到功能化。 18. The apparatus as claimed in claim 1, wherein the functionalized surface is functionalized by direct immobilization of biomolecules on a metal to achieve functional.

19.权利要求1的设备，其中功能化表面是通过直接将生物分子固定化在非金属无机膜上而达到功能化。 19. The apparatus of claim 1, wherein the functionalized surface is functionalized by direct immobilization of biomolecules to achieve the non-metal inorganic functional film.

20.权利要求1的设备，其中功能化表面是通过功能化表面上的自组装生物分子层达到功能化。 20. The apparatus as claimed in claim 1, wherein the functionalized surface is a self-assembled biomolecular layer on the functionalized surface functionalization to achieve.

21.权利要求20的设备，其中组装生物分子层包括氨基酸衍生化的脂肪酸或脂质。 21. The apparatus as claimed in claim 20, wherein the assembly includes a layer of biomolecules derivatized amino fatty acids or lipids.

22.一种用于在溶液中检测靶分子的系统，其包括: 基板，在所述基板上附着一对薄膜体声波谐振器(FBARs),其包括一个检测FBAR和一个参比FBAR，其中每个FBAR包括: 一个压电材料层连接于压电材料层相对两侧的一对电极； 其中检测FBAR的一个电极的暴露表面用生物分子进行功能化； 进一步包括控制电路，其包括信号发生电路和处理电路，所述信号发生电路施加具有多个频率的激励信号至所述一对FBAR的每一个的两个电极，所述处理电路测量并比较检测FBAR和参比FBAR对所述频率的激励信号的阻抗，这样与生物分子特异性反应的靶分子的质量或静电荷或这两者引起检测FBAR和参比FBAR之间的差异； 其中所述系统被配置以在液体样品中检测包含生物分子的所述靶分子，以及FBAR安装在基板上，所述基板包括基板材料层和位于所述基板材料层之上的第一、第二间隔开的 22. A method for detection of target molecules in a solution system, comprising: a substrate, adhered to a pair of film bulk acoustic resonators (FBARs) on the substrate, comprising a detection and a reference FBAR FBAR, wherein each a FBAR comprising: a layer of piezoelectric material connected to the pair of electrodes on opposite sides of the piezoelectric material layer; wherein a detection electrode exposed surface of the FBAR functionalized biomolecules; further comprising a control circuit including a signal generation circuit, and a processing circuit, said signal generating circuit is applied to two electrodes each having a plurality of frequencies of the excitation signal to the pair of the FBAR, the processing circuit and comparing the detected measuring and reference FBAR of the FBAR frequency excitation signal impedance, so that the target molecule specifically reactive with a biological molecule by mass or electrostatic charge causes the detection or both the reference and the difference ratio between the FBAR of the FBAR; wherein the system is configured to detect a liquid sample comprising biomolecules the target molecule, FBAR and mounted on a substrate, said substrate comprising a substrate and a layer of a first material, a second spacer material layer located over the substrate apart绝缘层，所述FBAR具有与所述第一绝缘层接触的第一边缘和与所述第二绝缘层接触的第二边缘，其中所述基板材料层、所述间隔开的绝缘层和所述FBAR在它们之间限定空区域，所述FBAR位于间隔开的绝缘层之间的区域之上并分别与两个绝缘层的上表面接触，该区域为所述限定的空区域；其中所述FBAR、所述第一和第二绝缘层以及所述基板材料层除了功能化表面之外通过由保护层覆盖不暴露于所述靶分子。 Insulating layer, the FBAR having a first edge and a second edge in contact with the second insulating layer in contact with the first insulating layer, wherein the layer of the substrate material, the insulating layer and spaced apart from the FBAR void region defined therebetween, the FBAR and located above the surface contact area between the upper spacer insulating layers respectively two apart insulating layer, which region is the region of space defined; wherein said FBAR said first and second insulating material layer and the substrate layer in addition to the functionalized surface by not exposing the target molecule covered in a protective layer.

23.—种检测靶分子的方法，其包括: 提供第一个谐振器，其中第一个谐振器具有第一个表面，所述第一个表面用第一种生物分子进行功能化，其中靶分子的存在导致第一种生物分子改变第一个谐振器的频率响应； 将第一个谐振器的第一个表面暴露于检测流体； 对第一个谐振器在第一个表面暴露于检测流体之后的频率响应进行测定； 提供第二个谐振器，其中第二个谐振器具有第二个表面，所述第二个表面并未被第一种生物分子功能化； 将第二个谐振器的第二个表面暴露于检测流体； 对第二个谐振器在第二个表面暴露于检测流体之后的频率响应进行测定；并根据第一个谐振器的频率响应，确定检测流体中是否含有靶分子，其中谐振器安装在基板上，所述基板包括基板材料层和位于所述基板材料层之上的第一、第二间隔开的绝缘层，所述谐振器具有与 23.- kinds of detection of target molecules, comprising: providing a first resonator, which first resonator having a first surface, said first surface is functionalized with a first biological molecule, wherein the target occurring molecule leads to a first biomolecule first change in response to a frequency of the resonator; a first surface of the first resonator is exposed to the detection fluid; the first resonator is exposed to the detection fluid in the first surface after the frequency response is measured; providing a second resonator, wherein the second resonator has a second surface, said second surface is not functionalized with a first biomolecule; the second resonator the second surface is exposed to the detection fluid; a second resonator of the response measured in the second surface exposed to the fluid after the detection of frequency; and the frequency response of the first resonator, it is determined whether the detected fluid containing the target molecule wherein the resonator is mounted on a substrate, said substrate comprising a substrate and a layer of a first material, spaced apart from the second insulating layer located over the material layer of the substrate, the resonator having所述第一绝缘层接触的第一边缘和与所述第二绝缘层接触的第二边缘，其中所述基板材料层、所述间隔开的绝缘层和所述谐振器在它们之间限定空区域，所述谐振器位于间隔开的绝缘层之间的区域之上并分别与两个绝缘层的上表面接触，该区域为所述限定的空区域；其中所述谐振器、所述第一和第二绝缘层以及所述基板材料层除了功能化表面之外通过由保护层覆盖不暴露于所述靶分子。 The first insulating layer in contact with a first edge and a second edge in contact with the second insulating layer, wherein the layer of the substrate material, the insulating layer and spaced apart from the resonator space defined therebetween region, the resonator region is located above the spaced apart between the insulating layer and contact with the upper surface of the insulating layer, respectively two, the region is the region of space defined; wherein said resonator, said first and a second insulating layer and the material layer of the substrate surface in addition to the functions covered by the protective layer is not exposed to the target molecule.

24.权利要求23的方法,进一步包括,在将第一个谐振器的第一个表面和第二个谐振器的第二个表面暴露于检测流体之后，在测定第一个和第二个谐振器的频率响应之前，从第一个谐振器的第一个表面和第二个谐振器的第二个表面上除去至少一部分检测流体。 24. The method of claim 23, further comprising, after the second surface of the first surface of the first resonator and the second resonator is exposed to the fluid is detected in the first measurement and a second resonator before the frequency response of removing at least a portion of the fluid is detected from a first surface on a second surface of the first resonator and the second resonator.

25.权利要求23的方法,进一步包括,将第一个谐振器的第一个表面和第二个谐振器的第二个表面暴露于检测流体之后，在测定第一个和第二个谐振器的频率响应之前，从第一个谐振器的第一个表面`和第二个谐振器的第二个表面上除去基本上所有的检测流体。 After the method of claim 23, further comprising, a first surface of the second surface of the first resonator and the second resonator is exposed to the fluid is detected in the first measurement and second resonators frequency response before removing substantially all of the fluid is detected from a second surface of the first surface of the first resonator and the `second resonator.

Sensor arrangement and apparatus for the amperometric and / or potentiometric, pharmacological active site and / or active ingredient and methods for testing amperometric and / or potentiometric, pharmacological active site and / or drug testing