Agency for the Assessment and Application of TechnologyBPPT New Building 21st FloorJl. MH. Thamrin 8Jakarta 10340

Abstract
The deposition of MgF2 cladding layers of electron beam fabricated waveguide is presented. Theoretical and experimental steps had been employed to choose suitable low temperature deposition material. Characterisations proved that MgF2 could be used as cladding layer as long as appropriate thickness is achieved so that the acceptable waveguide loss might be fulfilled. Further application on electron beam waveguide as switching devices was also demonstrated.