Abstract

We demonstrate a normal incident quantum cascade detector excited by surface plasmons resonance using an Au two-dimensional hole array integrated on top of the detector absorption region. With normal incidence, the device has a maximal responsivity value of 8.4 mA/W at 160 K and can work up to room temperature with a responsivity of 1.02 mA/W. Compared with the 45° polished edge coupling device, the two-dimensional hole array can lead to quantum efficiency enhancement at most measuredtemperatures, and at 140 K the quantum efficiency is enhanced most strongly by 69%.

Received 10 November 2011Accepted 17 April 2012Published online 01 May 2012

Acknowledgments:

This work is supported by 100 Talents Program of the Chinese Academy of Sciences under Grant No. 1731110000012, the National Natural Science Foundation of China under Grant Nos. 60736031, 60806018, 60906026, and 10990100. The authors would like to thank Ping Liang and Ying Hu for their help in device processing.