Superconducting coatings for superconducting radio frequency (SRF) cavities is an intensively developing field that should ultimately lead to acceleration gradients better than those obtained by bulk Nb RF cavities. ASTeC has built and developed experimental systems for superconducting thin-film deposition, surface analysis and measurement of Residual Resistivity Ratio (RRR). Nb thin-films were deposited by magnetron sputtering in DC or pulsed DC mode (100 to 350 kHz with 50% duty cycle) with powers ranging from 100 to 600 W at various temperatures ranging from room temperature to 800 °C on Si (100) substrates. The first results gave RRR in the range from 2 to 22 with a critical temperature T<inf>c</inf> ≈ 9.5 K. Scanning electron microscopy (SEM), x-ray diffraction (XRD), electron back scattering diffraction (EBSD) and DC SQUID magnetometry revealed significant correlations between the film structure, morphology and superconducting properties.

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