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Cavity Detector for Semiconductor Wafers

Publishing Venue

IBM

Related People

Batchelder, JS: AUTHOR

Abstract

Indentation defects, such as cracks, pits, pot holes, scratches etc., on smooth or rough surfaces can be detected with normally incident illumination and coincident detection at or near an oblique grazing angle. When a light spot is scanned across a rough surface, the surface roughness generates light scatter. At near grazing angles, the intensity of that scatter will be approximately proportional to the square of the average roughness under the spot. Asperities or features that protrude above the average level of the surface can then be identified from the coincident detection of the scattered light. However, if the light spot crosses a region that is everywhere lower than the average level of the surface, as might be the case for a pit, scratch, pothole, or crack, no scatter would be detected at the grazing angles.

Country

United States

Language

English (United States)

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Cavity Detector for Semiconductor Wafers

Indentation defects, such as cracks, pits, pot holes, scratches etc., on smooth
or rough surfaces can be detected with normally incident illumination and
coincident detection at or near an oblique grazing angle. When a light spot is
scanned across a rough surface, the surface roughness generates light scatter.
At near grazing angles, the intensity of that scatter will be approximately
proportional to the square of the average roughness under the spot. Asperities or
features that protrude above the average level of the surface can then be
identified from the coincident detection of the scattered light. However, if the light
spot crosses a region that is everywhere lower than the average level of the
surface, as might be the case for a pit, scratch, pothole, or crack, no scatter
would be detected at the grazing angles. If a number of grazing angle detectors
collect the light scattered from the surface, a pot hole would thus be indicated if
no detector saw a scatter signal when the light spot was incident on that
particular region of the surface. This technique can be implemented with any
normally incident illuminating scanner wherein coincident detection is used. The
signal from each grazing angle detector is thresholded, and then all of the
thresholded signals are logical ORed together. The complement of this signal
indicates a pot hole.