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Abstract

Disclosed is a apparatus for the Ultra Violet (UV) light mask pattern exposure system suitable for Liquid crystal display alignment layer surface treatment. By using low pressure Mercury lamp array as a UV light source, a larger size object can be uniformly exposed with very low power consumption.

Country

United States

Language

English (United States)

This text was extracted from an ASCII text file.

This is the abbreviated version, containing approximately
100% of the total text.

Ultra Violet Exposure Apparatus for Liquid Crystal
Display

Disclosed is
a apparatus for the Ultra Violet (UV) light mask
pattern exposure system suitable for Liquid crystal display alignment
layer surface treatment. By using low
pressure Mercury lamp array as
a UV light source, a larger size object can be uniformly exposed with
very low power consumption.

The Figure
shows the example of this apparatus. An
array of
low pressure Mercury lamps (1) is separated by few centimeters from
the object to get uniform light intensity distribution over the
entire object surface (2).

This
apparatus can be used for various types of mask pattern
exposure of large area with medium resolution.
Various kinds of
fluorescent lamps can be used instead of low pressure Mercury lamps
for the application which requires longer wavelength such as a
vicinity of 350nm for conventional photo resist.