QCM Sensor Feedthroughs

INFICON offers a variety of Quartz Crystal Monitor (QCM) sensor feedthroughs to accommodate many QCM sensor and chamber configurations. CF40 (2.75 in. ConFlat®) and 2.54 cm (1 in.) bolt style feedthroughs are available with various combinations of electrical connections, water cooling, and air tubes. INFICON feedthroughs may also be equipped with Ultra-Torr O-ring compression fittings for easy installation and sensor length adjustment. Other feedthrough styles may be available on request (KF40, etc), so contact INFICON with your feedthrough needs.

Unless noted, a typical feedthrough electrical connection consists of a coaxial BNC connector on the atmosphere side and a Microdot® connector on the vacuum side. This style of electrical connection is meant for use with in-vacuum cable sensors such as INFICON Front Load single, Front Load dual, Sputtering, CrystalSix, and Crystal 12 sensors.

Note: Feedthrough water and air tubes are 4.8 mm (3/16 in.) OD.

The following table is a quick reference for feedthrough requirements and part numbers based on sensor type.