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Deposition of Homogeneous Films from Alloy Sources

Publishing Venue

IBM

Related People

Taylor, RC: AUTHOR

Abstract

When an alloy of two metals is evaporated, the composition of the deposited film is usually very different from that of the source, due to preferential evaporation of one of the alloy components. Therefore, the composition of the source and of the film change with time, and the resulting film is nonhomogeneous in depth. The film composition and degree of inhomogeneity is dependent not only on source composition but also on source temperature, since the vapor pressures of the alloy components change relative to each other with temperature. For component A, the rate of evaporation is given by the following equation: dn(A) over dt = 0.0583 over square root of M(A)T f(A)X(A)P(A) where M is the atomic weight, f the activity coefficient, X the atom fraction, and P the pressure of pure A at temperature T.

Country

United States

Language

English (United States)

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Deposition of Homogeneous Films from Alloy Sources

When an alloy of two metals is evaporated, the composition of the deposited
film is usually very different from that of the source, due to preferential
evaporation of one of the alloy components. Therefore, the composition of the
source and of the film change with time, and the resulting film is
nonhomogeneous in depth. The film composition and degree of inhomogeneity is
dependent not only on source composition but also on source temperature, since
the vapor pressures of the alloy components change relative to each other with
temperature. For component A, the rate of evaporation is given by the following
equation: dn(A) over dt = 0.0583 over square root of M(A)T f(A)X(A)P(A) where
M is the atomic weight, f the activity coefficient, X the atom fraction, and P the
pressure of pure A at temperature T.

The same equation is used for component B with the appropriate
substitutions.

The only condition under which congruent evaporation takes place that is the
vapor composition is the same as the source composition, is when fA over fB PA
over PB (MB over MB)/1/2/ = 1. Assuming fA/fB = 1, congruent evaporation for
Gd-Co alloys will occur with a source temperature of 1230 degrees K, Which will
give a film deposition rate of 1A/10/6/ sec.