Abstract

This paper presents results from a theoretical model of the ultrasonic fields radiated by a 3x3 assembly of capacitive micromachined ultrasonic transducer (cMUT) sources on the same silicon substrate. These predictions have, for the first time, been compared directly to the fields measured experimentally using a scanned miniature detector. This work indicates that there is minimal cross-coupling between source elements, and demonstrates that it is possible to predict successfully the field characteristics of various geometries of such cMUT elements, with a view to the development of future imaging systems. (C) 2004 Elsevier B.V. All rights reserved.