Due to the nature of the solid state flexure and parallelogram construction, these nanopositioning stages can travel without any mechanical play in the x and z-axes, and provide a much higher resolution than is possible with mechanical or electromechanical systems.

The elements PZ series piezo stages can be easily combined with XY-elements of the XYZ series or with tilting piezoelectric modules of the PSH series to give positioning with all degrees of freedom.

Additional the z-axis nanopositioning stage PZ38 can run dynamically.

The elements of the PZ series can be equipped with measurement systems (strain gauge or capacitive sensors) that compensate for hysteresis.