Title (de)

Title (fr)

Publication

Application

Priority

JP 25496399 A 19990908

JP 27761799 A 19990929

Abstract (en)

A gyroscope of the invention is provided with a tuning fork (2) having three legs (9) and a support (10), a top side glass substrate (7) and a bottom side glass substrate (8) between which the tuning fork is interposed, driving movable electrodes (3) disposed on the top surface of each leg, driving fixed electrodes (4) disposed on the bottom surface of the top side glass substrate so as to face to the driving movable electrodes, six detection movable electrodes (5) connected to each other in parallel disposed on the top surface of the free end of each leg, and six detection fixed electrodes (6) connected to each other in parallel disposed on the bottom surface of the top side glass substrate so as to face to the detection movable electrodes. <IMAGE>