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Abstract

A solid-state line scanner camera provides a means to control the crystal diameter in the Czochralski crystal growth in conjunction with several microcomputer based algorithms for the precise evaluation of the line scanner signal.

Country

United States

Language

English (United States)

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Application fo a Solid State Line Scanner Camera for Advanced Crystal
Diameter Control During Czochralski Crystal Growth

A solid-state line scanner camera provides a means to control the crystal
diameter in the Czochralski crystal growth in conjunction with several
microcomputer based algorithms for the precise evaluation of the line scanner
signal.

In contrast to the currently used approaches, the methods
presented here require an actual A/D (analog to digital) conversion
of the line scanner video signal. The resolution of this A/D
conversion should lie in the order of 8 bits, which is also a
convenient value for the single board computer hardware which is
advantageously used for the data processing. Data are evaluated in
order to determine the position of the meniscus 1 between the melt 2
and the crystal 3 (Fig. 1A). Algorithms feasible for this evaluation
and for an improved diameter control are based upon the following
properties of a line scanner signal derived from a radial scan 4
(Fig. 1B):
1. Maximum intensity 5.

2. Inner or outer crossing of a fixed threshold level 6.

3. Inner or outer crossing of a threshold level which is

calculated as a software specifiable fraction of the

peak intensity 5 or as a fraction of the difference

between the peak 5 and background 7 intensities.

4. Positions of the maximum (positive or negative) derivatives

of the intensity with regard to time (or position).

5. "Center of gravity" of the intensity peak caused by the

meniscus.

Investigations of an actual output signal of a line scanner
camera showed that the meniscus consists of two rings of different
brightnesses rather than of one ring, which results in the intensity
distribution shown in Fig. 1B. Additional information can therefore
be expected from the investigation of:
6. Po...