Product Briefings > Critical Components

Product Briefing Outline: INFICON has introduced the
XTC/3 a thin film deposition controller for single and multiple-layer
processes. The XTC/3 utilizes INFICON's patented ModeLock technology
that provides mode hop prevention while in operation. The controller is
designed to provide accurate control of deposition rate and thickness,
for virtually any number of layers, while it is easy to install and
offers high reliability, according to the company.
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Product Briefing Outline: RASIRC has revealed its next
generation high-purity steam generation system called the ‘Steamer UHP
125.' With a reduced footprint, it can directly replace torches,
bubblers, and direct water injection systems in 6", 8", and 12"
furnaces as well as in other applications where flow rates of up to
12.5 slm of pure water vapor are needed. It has the ability to control
flow into vacuum or atmospheric pressure systems. It generates Ultra
High Purity steam from de-ionized water without hydrogen or oxygen.
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Product Briefing Outline: Aquest Systems, a
three-year-old start-up, has launched ‘FabEX,' a new type of automated
material handling system (AMHS) designed to improve fab productivity by
delivering higher speeds and greater capacity than conventional AMHS.
According to company officials, the complete FabEX product portfolio
will help deliver on Aquest's ‘No-Wait-Manufacturing' methodology by
enabling chipmakers to significantly reduce or eliminate the
unnecessary waits or delays that negatively impact both the
productivity and profitability of their fabs.
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Product Briefing Outline: GF Piping has announced the availability of a new Type ‘567/568 Butterfly Valve.' The new corrosion-resistant valve incorporates several new design features that result in long service life, high safety, excellent sealing capabilities, and modular flexibility. Waste water and electroplating applications are of particular application uses, according to the company.
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Product Briefing Outline: Entegris has introduced the
new Torrento family of high-flow liquid filters that help improve
liquid contamination control of nano-scale particles in wet etch and
clean (WEC) manufacturing processes used in advanced semiconductor
applications. Built on a combination of new membrane technology and an
advanced ATE device construction, the Torrento filters provide
high-yield, rapid bath clean-up cycles, extended filter life, and allow
for fast change-outs and increase cleanliness.
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Product Briefing Outline: Aerotech’s WaferMax T rotary
stage was originally designed for the demands of precision wafer
inspection; however, due to its low height design it can be used in a
wider range of tool applications where high-throughput production
performance with high levels of precision are required especially when
space and access are limited. The WaferMax-T rotary stage has full
360-degree rotation and a certified accuracy of +/-5arc/sec.
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Product Briefing Outline: The Swagelok CR-288
concentration monitor addresses a critical requirement in the
semiconductor industry for improved monitoring and control of liquid
chemicals employed in device manufacturing. Installed in the process
stream or at point-of-use where chemicals are delivered or blended, the
technology delivers real-time, highly accurate measurements of the
concentration and temperature of process fluids.
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