Greenhouse Gas Reporting Program (GHGRP)

GHGRP Electronics Manufacturing

This source category includes, but is not limited to, facilities that manufacture semiconductors (including light-emitting diodes), micro-electromechanical systems (MEMS), liquid crystal displays (LCDs), and photovoltaic cells (PV). Specifically, this subsector consists of electronics manufacturing facilities with production processes that use plasma-generated fluorine atoms and other reactive fluorine-containing fragments to etch thin films, clean chambers for depositing thin films, clean wafers, or remove residual material. The source category also includes electronics manufacturing facilities with chemical vapor deposition processes or other production processes that use N2O, and with processes that use fluorinated GHGs as heat transfer fluids (HTF) to control temperature or clean surfaces.