BPN542: New Materials for MEMS Resonators

Project ID

BPN542

Website

Start Date

Thu 2010-Jan-28 23:18:40

Last Updated

Fri 2012-Feb-24 09:57:06

Abstract

New resonator structural materials will be explored to achieve GHz-frequency
MEMS resonators having ultra-high quality factors (Q's) and antenna-amenable
motional impedances. Materials having acoustic velocities greater than that
of polysilicon, such as diamond and silicon carbide (SiC), will be used to
fabricate devices having higher resonance frequencies and higher Q's than
their polysilicon counterparts. Low-loss metals, including metal alloys,
will be investigated to achieve low deposition temperatures and high
electrical conductivities while nonetheless maintaining high Q's.
Post-processing techniques such as localized annealing will be investigated
to improve Q's.