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Abstract

Moving a semiconductor wafer from process station to process station or, for example, between process tanks such as etch, clean or rinse, etc. requires a fast and accurate movement, as well as a gentleness in handling to avoid breakage of the semiconductor wafer.

Country

United States

Language

English (United States)

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Proximity Latch and Unitary Wafer Holder and Transformer

Moving a semiconductor wafer from process station to process station or, for
example, between process tanks such as etch, clean or rinse, etc. requires a fast
and accurate movement, as well as a gentleness in handling to avoid breakage
of the semiconductor wafer.

Referring to the drawings, Fig. 1 illustrates a wafer holder or gripper 10 which
has a plastic body A with spring wire inserts B and B', the wire B' being heavier
and stiffer than wire B. The portions C of the wire which project from the body A
are preferably coated with an inert material such as TEFLON* and include a
lower TFE coated portion D with PFA molded fingers 11, which are spaced apart
and serve to grip the peripheral edge of the wafer 12 without damage to the
wafer.

The gripper 10 is normally closed and is actuated by equal forces applied at
points F. The gripper assembly 10 is located relative to a reference, in the
present instance a bifurcated nest gripper portion 13. A laterally extending
bifurcated portion 14 includes an upper arm 15 spaced apart from a lower arm
16, the upper arm 15 including a pole plate 17 thereon.

As shown in Fig. 2, the beam 18 serves as a nest for retaining the lower
bifurcation 13 about its reference point E. When it is desired to move the gripper
10 from one location to another, a transport arm 22 which is movable in the axial
direction along the arrows 19--19, and pivotable about its pivot point 20 is moved
...