We present a steerable, electrostatic, untethered, MEMS
micro-robot, with dimensions of 60 Ám by 250 Ám by 10 Ám. This
micro-robot is 1 to 2 orders of magnitude smaller in size than
previous micro-robotic systems. The device consists of a curved,
cantilevered steering arm, mounted on an untethered scratch drive
actuator. These two components are fabricated monolithically from the
same sheet of conductive polysilicon, and receive a common power and
control signal through a capacitive coupling with an underlying
electrical grid. All locations on the grid receive the same power and
control signal, so that the devices can be operated without knowledge
of their position on the substrate and without constraining rails or
tethers.