Patent application title: LIGHT GUIDE ARRAY FOR AN IMAGE SENSOR

Abstract:

An image sensor pixel that includes a photoelectric conversion unit
supported by a substrate and an insulator adjacent to the substrate. The
pixel includes a cascaded light guide that is located within an opening
of the insulator and extends above the insulator such that a portion of
the cascaded light guide has an air interface. The air interface improves
the internal reflection of the cascaded light guide. The cascaded light
guide may include a self-aligned color filter having air-gaps between
adjacent color filters. Air-gaps may be sealed from above by a
transparent sealing film. The transparent sealing film may have a concave
surface over the air-gap to diverge light that cross the concave surface
into the air-gap away from the air-gap into adjacent color filters. These
characteristics of the light guide eliminate the need for a microlens.
Additionally, a portion of a support wall between a pair of color filters
may have a larger width above than below to form a necking to hold down
the color filters for better retention.

Claims:

8. The image sensor of claim 4, wherein each of said light guides is
directly under a corresponding one of said color filters.

9. The image sensor of claim 4, wherein no microlens is disposed on an
opposite side of each of said color filters away from a corresponding one
of said photoelectric conversion units.

[0004]Photographic equipment such as digital cameras and digital
camcorders may contain electronic image sensors that capture light for
processing into still or video images. Electronic image sensors typically
contain millions of light capturing elements such as photodiodes.

[0005]Solid state image sensors can be either of the charge coupled device
(CCD) type or the complimentary metal oxide semiconductor (CMOS) type. In
either type of image sensor, photo sensors are formed in a substrate and
arranged in a two-dimensional array. Image sensors typically contain
millions of pixels to provide a high-resolution image.

[0006]FIG. 1A shows a sectional view of a prior art solid-state image
sensor 1 showing adjacent pixels in a CMOS type sensor, reproduced from
U.S. Pat. No. 7,119,319. Each pixel has a photoelectric conversion unit
2. Each conversion unit 2 is located adjacent to a transfer electrode 3
that transfers charges to a floating diffusion unit (not shown). The
structure includes wires 4 embedded in an insulating layer 5. The sensor
typically includes a flattening layer 6 below the color filter 8 to
compensates for top surface irregularities due to the wires 4, since a
flat surface is essential for conventional color filter formation by
lithography. A second flattening layer 10 is provided above the color
filter 8 to provide a flat surface for the formation of microlens 9. The
total thickness of flattening layers 6 and 10 plus the color filter 8 is
approximately 2.0 um.

[0007]Light guides 7 are integrated into the sensor to guide light onto
the conversion units 2. The light guides 7 are formed of a material such
as silicon nitride that has a higher index of refraction than the
insulating layer 5. Each light guide 7 has an entrance that is wider than
the area adjacent to the conversion units 2. The sensor 1 may also have a
color filter 8 and a microlens 9.

[0008]The microlens 9 focuses light onto the photo photoelectric
conversion units 2. As shown in FIG. 1B because of optical diffraction,
the microlens 9 can cause diffracted light that propagates to nearby
photoelectric conversion units and create optical crosstalk and light
loss. The amount of cross-talk increases when there is a flattening layer
above or below the color filter, positioning the microlens farther away
from the light guide. Light can crosstalk into adjacent pixels by passing
through either flattening layer (above or below color filter) or the
color filter's sidewall. Metal shields are sometimes integrated into the
pixels to block cross-talking light. In addition, alignment errors
between microlens, color filter, and light guide also contribute to
crosstalk. The formation, size, and shape of the microlens can be varied
to reduce crosstalk. However, extra cost must be added to the precise
microlens forming process, and crosstalk still cannot be eliminated.

[0009]Backward reflection from the image sensor at the substrate interface
is another issue causing loss of light reception. As shown in FIG. 1A,
the light guide is in direct contact with the silicon. This interface can
cause undesirable backward reflection away from the sensor. Conventional
anti-reflection structures for image sensors include the insertion of a
oxide-plus-nitride dual-layer film stack directly above the silicon
substrate, or a oxynitride layer having variation of nitrogen-to-oxygen
ratio there, but only reduces reflection between the silicon substrate
and a tall oxide insulator. This approach is not applicable when the
interface is silicon substrate and a nitride light guide.

BRIEF SUMMARY OF THE INVENTION

[0010]An image sensor pixel that includes a photoelectric conversion unit
supported by a substrate and an insulator adjacent to the substrate. The
pixel may have a cascaded light guide, wherein a portion of the cascaded
light guide is within the insulator and another portion extends above the
insulator. The cascaded light guide may include a self-aligned color
filter having air-gaps between adjacent color filters. Air-gaps may be
sealed from above by a transparent sealing film. The transparent sealing
film may have a concave surface over the air-gap to diverge light away
from the air-gap into adjacent color filters. The pixel may have an
anti-reflection stack between the substrate and the cascaded light guide.

BRIEF DESCRIPTION OF THE DRAWINGS

[0011]FIG. 1A is an illustration showing a cross-section of two image
sensor pixels of the prior art;

[0012]FIG. 1B is an illustration showing light cross-talk between adjacent
pixels of the prior art;

[0013]FIG. 2 is an illustration showing a cross-section of two image
sensor pixels of an embodiment of the present invention;

[0014]FIG. 3A is an illustration showing light traveling along an air gap
between two color filters;

[0015]FIG. 3B is an illustration showing the redirection of light from the
air gap into the color filters;

[0016]FIG. 3C is a graph of light power versus the distance along the air
gap;

[0017]FIG. 3D is a graph of gap power loss versus gap width versus
distance along the air gap of widths 0.6 um and 1.0 um for three
different colors;

[0018]FIG. 3E is a graph of maximal gap power loss versus gap width at a
depth of 1.0 um;

[0019]FIG. 3F is a table of maximal gap power loss for different gap
widths at a depth of 1.0 um;

[0020]FIG. 3G is a table of gap area as percentage of pixel area for
different gap widths and different pixel pitches;

[0021]FIG. 3H is a table of pixel power loss for different gap widths and
different pixel pitches;

[0022]FIG. 3I is a graph of pixel power loss versus pixel pitch for
different gap widths;

[0023]FIGS. 4A-L are illustrations showing a process used to fabricate the
pixels shown in FIG. 2;

[0024]FIG. 5 is an illustration showing ray traces within the pixel of
FIG. 2;

[0025]FIG. 6A is an illustration showing a pixel at a corner of the array;

[0026]FIG. 6B is an illustration showing light ray traces within the pixel
of FIG. 6A;

[0027]FIG. 7 is an illustration showing a top view of four pixels within
an array;

[0028]FIG. 8 is an alternate embodiment of the sensor pixels with ray
tracing;

[0029]FIGS. 9A-M are illustrations showing a process used to fabricate the
pixels shown in FIG. 8;

[0030]FIGS. 10A-H are illustrations showing a process to expose a bond
pad;

[0031]FIG. 11 is an illustration showing an anti-reflection stack within
the sensor of an embodiment of the present invention;

[0032]FIGS. 12A-E are illustrations showing an alternate process to form
an anti-reflection stack within the sensor of an embodiment of the
present invention;

[0033]FIG. 13A is a graph of transmission coefficient versus light
wavelength for an anti-reflection stack;

[0034]FIG. 13B is a graph of transmission coefficient versus light
wavelength for the anti-reflection stack;

[0035]FIG. 13C is a graph of transmission coefficient versus light
wavelength for the anti-reflection stack;

[0036]FIGS. 14A-G are illustrations showing an alternate process to form
two anti-reflection stacks within the sensor of an embodiment of the
present invention;

[0037]FIG. 15A is a graph of transmission coefficient versus light
wavelength for a first anti-reflection stack on a left hand portion of
FIG. 14G;

[0038]FIG. 15B is a graph of transmission coefficient versus light
wavelength for a second anti-reflection stack shown on a right hand
portion of FIG. 14G;

[0039]FIG. 16 is an alternate embodiment of the image sensor of this
invention;

[0040]FIG. 17 is an alternate embodiment of the image sensor of this
invention;

[0041]FIG. 18 is an alternate embodiment of the image sensor of this
invention;

[0042]FIG. 19 is an alternate embodiment of the image sensor of this
invention;

[0043]FIG. 20 is an illustration showing a process step used to fabricate
the pixels shown in FIG. 18;

[0044]FIGS. 21A-D are illustrations showing process steps used to
fabricate the pixels shown in FIG. 19;

[0045]FIG. 22 is an alternate embodiment of the image sensor of this
invention;

[0046]FIG. 23 is an illustration showing ray traces crossing from cover
glass to the light guides in a image sensor package according to an
embodiment of this invention;

[0047]FIG. 24 is an illustration showing a packaging configuration of this
invention.

DETAILED DESCRIPTION

[0048]Disclosed is an image sensor pixel that includes a photoelectric
conversion unit supported by a substrate and an insulator adjacent to the
substrate. The pixel includes a light guide that is located within an
opening of the insulator and extends above the insulator such that a
portion of the light guide has an air interface. The air interface
improves the internal reflection of the light guide. Additionally, the
light guide and an adjacent color filter are constructed with a process
that optimizes the upper aperture of the light guide and reduces
crosstalk. These characteristics of the light guide eliminate the need
for a microlens. Additionally, an anti-reflection stack is constructed
above the photoelectric conversion unit and below the light guide to
reduce light loss through backward reflection from the image sensor. Two
pixels of different color may be individually optimized for
anti-reflection by modifying the thickness of one film within the
anti-reflection stack.

[0049]The pixel may include two light guides, one above the other. The
first light guide is located within a first opening of the insulator
adjacent to the substrate. The second light guide is located within a
second opening in a support film, which may be eventually removed or
partially removed during fabrication of the pixel. A color filter may be
located within the same opening and thus self-aligns with the second
light guide. The second light guide may be offset from the first light
guide at the outer corners of the pixel array to capture light incident
at a non-zero angle relative to the vertical axis.

[0050]An air gap is created between neighboring color filters by removing
the support film material adjacent to the filter. Air has a lower
refractive index than the support film and enhances internal reflection
within the color filter and the light guide. In addition, the air gap is
configured to "bend" light incident on the gap into the color filter and
increase the amount of light provided to the sensor.

[0051]Reflection at the silicon-light-guide interface is reduced by
creating a nitride film and a first oxide film below the first light
guide. A second oxide film may be additionally inserted below the nitride
film to broaden the range of light frequencies for effective
anti-reflection. The first oxide film can be deposited into an etched pit
before application of the light-guide material. In an alternate
embodiment, all anti-reflection films are formed before a pit is etched,
and an additional light-guide etch-stop film covers the anti-reflection
films to protect them from the pit etchant.

[0052]Referring to the drawings more particularly by reference numbers,
FIGS. 2, 4A-L, 5 and 6A-B show embodiments of two adjacent pixels in an
image sensor 100. Each pixel includes a photoelectric conversion unit 102
that converts photonic energy into electrical charges. In a conventional
4T pixel, electrode 104 may be a transfer electrode to transfer the
charges to a separate sense node (not shown). Alternately, in a
conventional 3T pixel, electrode 104 may be a reset electrode to reset
the photoelectric conversion unit 102. The electrodes 104 and conversion
units 102 are formed on a substrate 106. The sensor 100 also includes
wires 108 that are embedded in an insulating layer 110.

[0053]Each pixel has a first light guide 116. The first light guides 116
are constructed with a refractive material that has a higher index of
refraction than the insulating layer 110. As shown in FIG. 4B, each first
light guide 116 may have a sidewall 118 that slopes at an angle α
relative to a vertical axis. The angle α is selected to be less
than 90-asin(ninsulating layer/nlight guide), preferably 0, so
that there is total internal reflection of light within the guide,
wherein ninsulating layer and nlight guide are the indices of
refraction for the insulating layer material and light guide material,
respectively. The light guides 116 internally reflect light from the
second light guide 130 to the conversion units 102.

[0054]The second light guides 130 are located above first light guides 116
and may be made from the same material as the first light guide 116. The
top end of the second light guide 130 is wider than the bottom end, where
the second light guide 130 meets the first light guide 116. Thus the gap
between adjacent second light guides 130 at the bottom (henceforth
"second gap") is larger than at the top, as well as larger than the air
gap 422 between the color filters 114B, 114G above the second light
guides 130. The second light guides 130 may be offset laterally with
respect to the first light guides 116 and/or the conversion unit 102, as
shown in FIG. 6A, wherein the centerline C2 of the second light guide 130
is offset from the centerline C1 of the first light guide 116 or of the
photoelectric conversion unit 102. The offset may vary depending upon the
pixel position within an array. For example, the offset may be greater
for pixels located at the outer portion of the array. The offset may be
in the same lateral direction as the incident light to optimize reception
of light by the first light guide. For incident light arriving at a
nonzero angle relative to the vertical axis, offset second light guides
130 pass on more light to the first light guides 116. Effectively second
light guide 130 and first light guide 116 together constitute a light
guide that takes different vertical cross-section shapes at different
pixels. The shape is optimized to the incident light ray angle at each
pixel.

[0055]FIGS. 5 and 6B illustrate ray tracing for a pixel at the center of
an array and at a corner of the array, respectively. In FIG. 5, incident
light rays come in vertically. The second light guides 130 are centered
to the first light guides 116. Both light rays a and b reflect once
within the second light guide 130 then enter the first light guide 116,
reflects once (ray a) or twice (ray b) and then enter conversion units
102. In FIG. 6B, the second light guides 130 are offset to the right,
away from the center of the array, which is towards the left. Light ray
c, which comes in from the left at an angle up to 25 degrees relative to
the vertical axis, reflects off the right sidewall of the second light
guide 130, hits and penetrates the lower-left sidewall of the same,
enters the first light guide 116, and finally reaches conversion unit
102. The offset is such that the first light guide 116 recaptures the
light ray that exits lower-left sidewall of second light guide 130. At
each crossing of light guide sidewall, whether exiting the second light
guide or entering the first light guide, light ray c refracts in a way
that the refracted ray's angle to the vertical axis becomes less each
time, enhancing propagation towards the photoelectric conversion unit.
Thus, having a light guide built from a first light guide 116 and a
second light guide 130 allows the vertical cross-section shape of the
light guide to vary from pixel to pixel to optimize for passing light to
the photoelectric conversion unit 102.

[0056]Building a light guide from two separate light guides 116, 130 has a
second advantage of reducing the etch depth for each light guide 116,
130. Consequently, side wall slope angle control can achieve higher
accuracies. It also makes deposition of lightguide material less likely
to create unwanted keyholes, which often happen when depositing thin film
into deep cavities, causing light to scatter from the light guide upon
encountering the keyholes.

[0057]Color filters 114B, 114G are located above the second light guides
130. The sidewall upper portion at and adjacent to the color filters is
more vertical than the rest of second lightguide.

[0058]First air-gap 422 between the color filters has a width of 0.45 um
or less, and a depth of 0.6 um or greater. An air gap with the
dimensional limitations cited above causes the light within the gap to be
diverted into the color filters and eventually to the sensors. Thus the
percentage loss of light impinging on the pixel due to passing through
the gap (henceforth "pixel loss") is substantially reduced.

[0059]Light incident upon a gap between two translucent regions of higher
refractive indices become diverted to one or the other when the gap is
sufficiently narrow. In particular, light incident upon an air gap
between two color filters diverts to one color filter or the other when
the gap width is sufficiently small. FIG. 3A shows a vertical gap between
two color filter regions filled with a lower refractive index medium,
e.g. air. Incident light rays entering the gap and nearer one sidewall
than the other is diverted towards and into the former, whereas the rest
are diverted towards and into the latter. FIG. 3B shows wavefronts spaced
one wavelength apart. Wavefronts travel at slower speed in higher
refractive index medium, in this example the color filter having an index
n of approximately 1.6. Thus the spacing between wavefronts in the gap,
assuming air filled, is 1.6 times that of the color filter, resulting in
the bending of wavefronts at the interface between the color filter and
air gap and causing the light rays to divert into the color filter. FIG.
3C is a graph of propagated light power P(z) along a vertical axis z of
the air gap divided by the incident light power P(0) versus a distance z.
As shown by FIG. 3C, light power decreases deeper into the gap for
different gap widths, more rapidly for lesser gap widths on the order of
one wavelength and converges to be essentially negligible for a gap width
of 0.4 times wavelength or less at a depth of 1.5 times wavelength. From
FIG. 3C, it is preferable to have a depth equal to at least 1 times the
wavelength of the longest wavelength of interest, which is 650 nm in this
embodiment for a visible light image sensor. At this depth, the
percentage of light power incident upon the gap and lost to the space
further below (henceforth "gap loss") is less than 15%. The color filter
thus needs to have thickness at least 1 time the wavelength in order to
filter incident light entering the gap to prevent unfiltered light from
passing on to light guides 130, 114 and eventually to the conversion unit
102. If the gap is filled with a transparent medium other than air, with
refractive index ngap>1.0, then presumably the gap would need to
narrow to 0.45 um/ngap or less, since effectively distances in terms
of wavelength remains the same but absolute distances are scaled by
1/ngap.

[0060]Referring to FIG. 3C, for red light of wavelength in air of 650 nm,
at a depth of 0.65 um (i.e. 1.0 time wavelength in air) the gap power
flux attenuates to 0.15 (15%) for a gap width of 0.6 time wavelength in
air, i.e. 0.39 um. Attenuation reaches maximum at around 1 um of depth.
Attenuation is steeper with depth for shorter wavelengths.

[0061]FIG. 3D shows the gap loss versus gap width W for 3 colors--blue at
450 nm wavelength, green at 550 nm, and red at 650 nm--at depths of 0.6
um and 1.0 um, respectively. For a depth of 1.0 um, the highest gap loss
among the 3 colors and the maximal gap loss for gap widths of 0.2 um to
0.5 um are plotted in FIG. 3E. Gap loss against gap width is tabulated in
FIG. 3F. In FIG. 3G, gap area as percentages of pixel areas is tabulated
against pixel pitch and gap width. Each entry (percentage gap area) in
the table of FIG. 3G is multiplied with the corresponding column entry
(i.e. gap loss) to give pixel loss as tabulated in FIG. 3H. FIG. 3I plots
pixel loss versus pixel pitch for different gap widths ranging from 0.2
um to 0.5 um.

[0062]FIG. 3I shows that keeping gap width below 0.45 um would result in
less than 8% pixel loss for pixel pitch between 1.8 um and 2.8 um--the
range of pixel sizes for compact cameras and camera phones--for color
filter thickness of 1.0 um. For less than 3%, a gap width below 0.35 um
is needed; for less than 1.5%, a gap width below 0.3 um; and for less
than 0.5%, a gap width below 0.25 um. FIG. 3I also shows that pixel loss
is less for bigger pixels given the same gap width. Thus for pixels
larger than 5 um, the above guidelines result in at least halving the
pixel loss.

[0063]Referring to FIGS. 2 and 5 again, it is clear that the first air-gap
422 prevents crosstalk from the color filter of one pixel to an adjacent
pixel by internal reflection. Thus the color filters 114B, 114G each
functions like a light guide. Together, the color filter, the second
light guide, and the first light guide along ray a in FIG. 5 are cascaded
together to capture incident light and convey to the photoelectric
conversion unit 102 while minimizing loss and crosstalk. Unlike prior art
which uses metal walls or light absorbing walls between color filters to
reduce crosstalk, at the expense of losing light that impinging on such
walls, the first air-gap 422 achieves negligible gap loss by diverting
light to the nearest color filter. And since there is no underlying
flattening layer below the color filters that bridges between adjacent
light guides like in prior art (see FIG. 1B), the associated crosstalk is
also eliminated.

[0064]Air interface may continue from the color filter sidewall along the
second light guide sidewall and end above protection film 410, creating a
second air gap 424. The air interface between second air gap 424 and the
second light guide 130 enhances internal reflection for the second light
guide 130.

[0065]A protection film 410 may be formed above insulating layer 110 of
silicon nitride to prevent alkali metal ions from getting into the
silicon. Alkali metal ions, commonly found in color filter materials, can
cause instability in MOS transistors. Protection film 410 also keeps out
moisture. The protection film 410 may be made of silicon nitride (Si3N4)
of thickness between 10,000 Angstroms and 4,000 Angstroms, preferably
7,000 Angstroms. If either first light guide 116 or second light guide
130 is made of silicon nitride, the protection film 410 which is formed
of silicon nitride is continuous across and above the insulating layer
110 to seal the transistors from alkali metal ions and moisture. If both
first 116 and second 130 light guides are not made of silicon nitride,
the protection film 110 may cover the top surface of the first light
guide 116 to provide similar sealing or, alternatively, cover the
sidewalls and bottom of first light guide 116.

[0066]First 422 and second 424 air gaps together form a connected opening
to air above the top surface of the image sensor. Viewing this in another
way, there exists a continuous air interface from the protection film 410
to the top surfaces of the color filters 114B, 114G. In particular, there
is an air-gap between the top surfaces 430 of the pixels. The existence
of this opening during manufacture allows waste materials formed during
the forming of first air gap 422 and second air gap 424 to be removed
during the manufacture of the image sensor. If for some reason the first
air-gap 422 is sealed subsequently using some plug material, this plug
material should have a refractive index lower than the color filter
material so that (i) there is internal reflection within the color
filter, and (ii) light incident within the air-gap 422 is diverted into
the color filters 114B, 114G. Likewise if some fill material fills the
second air gap 424, this fill material needs to have a lower refractive
index than the second light guide 130.

[0067]Together, the color filter 114 and light guides 130 and 116
constitute a "cascaded light guide" that guides light to the
photoelectric conversion unit 102 by utilizing total internal reflection
at the interfaces with external media such as the insulator 110 and air
gaps 422 and 424. Unlike prior art constructions, light that enters the
color filter does not cross over to the color filter of the next pixel
but can only propagate down to the second light guide 130. This makes it
unnecessary to have a microlens above to focus light to the center of the
pixel area to prevent light ray passing out from a color filter of a
pixel to an adjacent pixel. Doing away with microlens has a benefit of
eliminating the aforementioned problem of alignment error between
microlens and color filter that can cause crosstalk, in addition to
lowering manufacturing costs.

[0068]As mentioned before, a cascaded light guide further holds an
advantage over prior art that uses opaque wall material between color
filters in that incident light falling into the first air gap 422 between
color filters 114B and 114G is diverted to either one, thus no light is
lost, unlike prior art pixels where light is lost to the opaque walls
between the filters.

[0069]An advantage of this color filter forming method over prior art
methods is that the color filter sidewall is not defined by the
photoresist and dye materials constituting the color filters. In prior
art color filter forming methods, the color filter formed must produce
straight sidewalls after developing. This requirement places a limit on
the selection of photoresist and dye material because the dye must not
absorb light to which the photoresist is sensitive, otherwise the bottom
of the color filter will receive less light, resulting in color filter
that is narrower at its bottom than its top. The present color filter
forming method forms the color filter sidewall by the pocket 210 etched
into the support film 134 and not relying on the characteristics of the
color filter material or the accuracy of lithography, resulting in a
cheaper process.

[0070]Another advantage over prior art color filter forming methods is
that gap spacing control is uniform between all pixels, and highly
accurate at low cost. Here, the gap spacing is a combination of the
line-width in the single lithography step that etches the openings in the
support film, plus the control of sideway etching during dry etch, both
easily controlled uniformed and highly accurately without adding cost. If
such gaps were to be created by placing 3 color filters of different
colors at 3 different lithography steps as in the prior arts, uniformity
of gap widths is difficult, the lithography steps become expensive, and
sidewall profile control becomes even more stringent.

[0071]A cascaded light guide wherein a color filter 114 and a light guide
130 are formed in the same opening in the support film 134 (henceforth
"self-aligned cascaded light guide") has an advantage over prior art in
that there is no misalignment between the color filter 114 and the light
guide 130. The color filter 114 has sidewalls that self-align to
sidewalls of the light guide 130.

[0072]FIGS. 4A-L show a process for forming an embodiment of the image
sensor this invention. The image sensor may be processed to a point where
the conversion units 102 and electrodes 104 are formed on the silicon
substrate 106 and the wires 108 are embedded in the insulator material
110 as shown in FIG. 4A. The insulator 110 may be constructed from a low
refractive index ("RI") material such as silicon dioxide (RI=1.46). The
top of the insulator 110 may be flattened with a chemical mechanical
polishing process ("CMP").

[0073]As shown in FIG. 4B, insulating material may be removed to form
light guide openings 120. The openings 120 have sloping sidewalls at an
angle α. The openings 120 may be formed, by example, using a
reactive ion etching ("RIE") process. For silicon oxide as the insulating
material, a suitable etchant is CF4+CHF3 in a 1:2 flow ratio,
carried in Argon gas under 125 mTorr, 45° C. The sidewall angle
may be adjusted by adjusting the RF power between 300 W and 800 W at
13.56 MHz.

[0074]FIG. 4C shows the addition of light guide material 122. By way of
example, the light guide material 122 can be a silicon nitride that has
an index of refraction of 2.0, greater than the refractive index of the
insulating material 110 (e.g. silicon oxide, RI=1.46). Additionally,
silicon nitride provides a diffusion barrier against H2O and alkali
metal ions. The light guide material can be added for example by plasma
enhanced chemical vapor deposition ("PECVD").

[0075]The light guide material may be etched down to leave a thinner and
flatter protection film 410 to cover the insulator and seal the
conversion unit 102, gate 104, and electrodes 108 against H2O and
alkali metal ions during the subsequent processes. Alternatively, if the
first light guide material 122 is not silicon nitride, a silicon nitride
film may be deposited on top of light guide material 122 after an
etch-down of the latter to flatten the top surface, to form a protection
film 410 that seals the conversion unit 102, gate 104, and electrodes 108
against H2O and alkali metal ions. The protection film 410 may be
between 10,000 Angstroms and 4,000 Angstroms thick, preferably 7,000
Angstroms.

[0076]A shown in FIG. 4D a support film 134 is formed on top of the
silicon nitride. The support film 134 may be silicon oxide deposited by
High Density Plasma ("HDP").

[0077]In FIG. 4E, the support film is etched to form openings. The
openings may include sidewalls 136 that slope at an angle β. The
angle β is selected so that β<90-asin (1/n2light
guide), where n2light guide is the index of refraction of the second
light guide material 130, such that there is a total internal reflection
within the second light guides 130. Incorporating two separate lights
guides reduces the etching depth for each light guide. Consequently,
slope side wall etching is easier to achieve with higher accuracy. The
support film 134 and second light guides 130 may be made from the same
materials and with the same processes as the insulating layer 110 and
first light guides 116, respectively.

[0078]As shown in FIG. 4E the sidewall may have a vertical portion and a
sloped portion. The vertical portion and sloped portion can be achieved
by changing the etching chemistry or plasma conditions during the etching
process. The etch recipe during the vertical portion etch is selected to
be favorable for forming the vertical sidewall 162, then switched to a
recipe favorable for forming the sloped sidewall.

[0079]FIG. 4F shows the addition of light guide material. By way of
example, the light guide material can be a silicon nitride deposited for
example by plasma enhanced chemical vapor deposition ("PECVD").

[0080]FIG. 4G shows each second light guide 130 has a pocket 210. The
pockets 210 are separated by a support wall 212, being part of the
support film 134. Pocket 210 may be formed by etching down light guide
material to expose the wall 212 and further till the top surface of light
guide is below the top surface of the wall 212 by between 0.6 um to 1.2
um.

[0081]As shown in FIG. 4H, a color film material 114B having a particular
color, for example blue or magenta or yellow, may be applied to fill the
pockets 210 and extends above the support film 134. In this example, the
color material may contain blue dye. Color filter material is may be made
of negative photoresist, which forms polymers that when exposed to light
becomes insoluble to a photoresist developer. A mask (not shown) is
placed over the material 114B with openings to expose areas that are to
remain while the rest is etched away.

[0082]Color filter material used may comprise inorganic particles
interspersed therein that have diameters less than a small fraction, for
instance a quarter, of the wavelengths of the light permitted to pass
through. For instance, zirconium oxide and tantalum oxide particles of
diameters less than 100 nm may be mixed in the blue color filter of this
example. Particles of inorganic materials that are transparent to the
intended color and have high refractive index, preferably above 1.9, can
increase the overall refractive index of the color filter to enhance
sidewall internal reflection of the color filters used in this invention.

[0083]FIG. 4I shows the image sensor after the etching step. The process
can be repeated with a different color material such as green or red to
create color filters for different pixels as shown in FIG. 4J. The last
color material applied fills the remaining pockets 210, thus requires no
mask step. In other words, exposure light may be applied everywhere on
the image sensor wafer to exposure the last color filter film everywhere.
During the bake step, the last color filter forms a film that overlaps
all pixels, including pixels of other colors. The overlap of the last
color filter on other pixels is removed during a subsequent color filter
etch-down process shown in FIG. 4K.

[0084]Referring to FIG. 4G, the pockets 210 provide an self-alignment
feature to self-align the color filter material with the second light
guide 130. The pockets 210 may be wider than the corresponding mask
openings. To reduce the thickness of the support wall 212 for an desired
second light guide opening for a given pixel pitch, the pressure in the
plasma chamber may be increased to enhance sideway (i.e. isotropic) etch
(by increasing ion scattering) to undercut the mask.

[0085]As shown in FIG. 4K the color filters 114B, 114G are etched down to
expose the support wall 212, being part of the support film 134. A
portion of the support film 134 is then removed as shown in FIG. 4L so
that there is an air/material interface for the color filters 114B, 114G.
A further portion of the support film 134 may be removed as shown in FIG.
4L so that there is an air/material interface for the second light guide
130 to further aid internal reflection by allowing light rays closer to
the perpendiculars to the interface to undergo total internal reflection.
The first gap 422 has a width sufficiently small, 0.45 um or less, so
that incident red light and light of lesser wavelengths impinging into
the first gap 422 is diverted to either color filter 114B or 114G, thus
improving light reception. Light internally reflects along the color
filters 114B, 114G and light guides 130 and 116. The color filters 114B,
114G have a higher refractive index than air so that the color filters
114B, 114G provides internal reflection. Likewise, the second light guide
130 may have an air interface which improves the internal reflection
properties of the guide. If the support film 134 is not completely
removed, as long as the support film has a lower refractive index (e.g.
silicon oxide, 1.46) than the light guide material (e.g. silicon nitride,
2.0), the interface between the second light guide 130 and the support
film 134 has good internal reflection. FIG. 16 shows an alternate
embodiment where the support material between the adjacent second light
guides 130 is only partially removed. Likewise, the interface between the
first light guide 116 and the first insulator film 110 enjoys good
internal reflection. FIG. 7 is a top view showing four pixels 200 of a
pixel array. For embodiments that include both first and second light
guides the area B may be the area of the second light guide top surface
and the area C represents the area of the first light guide bottom
surface. The area A minus the area B may be the area of the first air gap
422 between color filters.

[0086]FIG. 17 shows an alternate embodiment where the support film 134 is
only partially removed between adjacent color filters 114B, 114G. The gap
unfilled by support film preferably has a depth of 0.6 um or greater and
a width of 0.45 um or less. The depth may be reduced to 0.4 um if the
overall refractive index of the color filter material is increased above
1.5, for instance by interspersing particles made of transparent material
that has a refractive index of 1.9 or above in an amount to bring the
overall refractive index to 1.7˜1.8 or above.

[0087]FIG. 18 shows an alternate embodiment where opposite sidewalls of
each color filter are not straight and vertical. In this example,
opposite sidewalls from adjacent color filters 114B, 114G sandwich a
portion of the support film 134 in such a way that the support film 134
has a wider width at one depth than at a lower depth. With this property,
the support film 134 exerts a downward force on each of the color filters
114B, 114G to hold the color filters in place, thus improving color
filter retention. In particular, in this example, the support film 134 is
wider at its top surface than at the deepest depth where it abuts the
adjacent color filters 114B, 114G due to the color filters each taking a
trapezoidal shape from the top of the support film 134 downwards.

[0088]FIG. 20 shows an alternate processing step to a beginning portion of
the processing step shown in FIG. 4E. Unlike in FIG. 4E where the pit
etched into the support film 134 has a top portion having vertical
sidewalls, FIG. 20 shows a processing step to initially open the pit such
that it has a wider bottom than an opening at the top. This may be
achieved by opening the pit top by anisotropic plasma etching while
rotating the wafer and holding the wafer at a tilt such that a normal to
the wafer makes an angle to the direction of the incoming ions in the
plasma. As shown in FIG. 20, relative to the wafer, the incoming ions (in
solid arrows and dotted arrows) etch into the support film under the
photoresist mask 450, creating sidewalls that are further apart deeper
into the pit. As seen in FIG. 20, a portion of the support film between
adjacent pits exhibits a necking. After a pit top having this property is
created, further processing may resume the remaining portion of the step
description in FIG. 4E, including switching to the corresponding plasma
conditions, to create the remaining, lower portion of the pit for the
second light guide. In particular, sidewalls 136 of the second light
guide is formed below a necking of the support film 134.

[0089]FIG. 19 shows an alternate embodiment where color filters are formed
in trenches formed separately from pits that house light guides. Color
filters 114B, 114G, like in the alternate embodiment in FIG. 18, have
sidewalls that are not vertical and straight. Between sidewalls of
adjacent color filters are second support film 140 and air gap 422. Color
filters 114B, 114G are each above a second light guide 130. Each filter
may have a bottom that is narrower than the top of second light guide 130
by between 0.05 um to 0.2 um so that under worst case alignment errors
each filter bottom is within the top of the corresponding light guide
below.

[0090]FIGS. 21A-21D illustrate processing steps to form the alternate
embodiment of FIG. 19. The process is similar to FIGS. 4A-4G, except
there being no provision for a portion of the pit to house a color
filter. After second light guide film above the support film 134 is
removed, either by etch-down or by CMP, the second light guide 130 and
the support film 134 may assume the shape shown in FIG. 21A. It is,
however, not necessary for both to share a flush flat top, as the top
surface of second light guide 130 may be lower or higher than the top of
support film 134. In the latter, adjacent second light guides may be
mutually connected by a thin layer of second light guide film left over
from the etch-down or CMP. Subsequently, second support film 140 is
deposited. Second support film 140 may be silicon oxide or any material
that may be removed by a wet etch or plasma etch that has a 4× or
more slower etch on color filter material to be used to form the color
filters 114B, 114G. A lithography step (not shown) forms a photoresist
mask (not shown) on the second support film 140, trenches are etched into
the film 140 to result in the structure shown in FIG. 21B. Subsequently,
color filters 114B, 114G are formed in steps similar to described for
FIGS. 4H-4K, resulting into a structure shown in FIG. 21C then a
subsequent one shown in FIG. 21D. Finally, an etch-down of second support
film 140 creates a gap 422 between adjacent color filters 114B, 114G like
shown in FIG. 19, in steps similar to described for FIG. 4L.

[0091]FIG. 8 shows an alternate embodiment where the second and first
light guides are both etched using the same mask after the support film
134 is formed, and both filled with light guide material in one step. A
process for fabricating this alternate embodiment is shown in FIGS. 9A-M.
The process is similar to the process shown in FIGS. 4A-L, except the
opening for the first light guide is formed after the opening for the
second light as shown in FIG. 9F, where no additional mask is needed
because the protective film 410 and the support film 134 above act as
hard masks to block etchants. Both light guides are filled in the same
step shown in FIG. 9G.

[0092]FIG. 22 shows an alternate embodiment comprising a sealing film 500
above the light guides 130 and color filters 114B, 114G that seals
air-gap 422. Air gap 422 in this embodiment can hold air, nitrogen or
other inert gases, or any gaseous medium. Sealing film 500 may comprise
polycarbonate or acrylic or epoxy and may comprise a plurality of layers.
It may further comprise inorganic particles, dye, or organic pigment for
filtering ultra-violate light and/or infra-red light. Sealing film 500
may have a refractive index that is within 0.2 of the refractive index of
the color filter material of color filter 114B, 114G to minimize
reflection at the interface between color filter and sealing film. If the
refractive index of the color filters is 1.55, the sealing film 500 may
be chosen to have refractive index between 1.45 and 1.65. Sealing film
500 may be applied by dynamic spin coating where the wafer spins facing
up at approximately 500 rpm while a stream of resin is dispensed at the
center of the wafer through a dispensing tip and after the resin fluid
completely wets the wafer top surface the wafer spins to higher speed,
e.g. 3000 rpm to obtain a uniform resin thickness. The resin may be cured
by heat or UV light. Air (or gas) is sealed in gap 422 during the
dispensing. Heating or UV shots may be applied during either one or both
of dispensing and high-speed spin to promote viscosity to prevent resin
fluid from filling the gaps. Final heating or UV cure hardens the sealing
film 500, and may help form boundary 510 into a concave shape due to
thermal expansion of air/gas in the gap 422. The concave film surface 510
helps to diverge light rays that enter into the bubble from the sealing
film 500 and direct the rays towards either color filter 114G or 114B. As
a result, the depth for air gap 422 may be halved compared with
embodiment having no sealing film 500. The wafer may be faced downwards
during high-speed spin. Portions of the sealing film 500 above bond pads
may be removed by any one of the known methods. Sealing film 500 may be
applied to any embodiments of image sensor 100 discussed in this patent
application.

[0093]FIG. 24 shows the image sensor 100 packaged in a package 800. A
cover glass 810 is above the image sensor 100 to keep out dust and let
light in. Between cover glass 810 and image sensor 100, a transparent
adhesive film 820 such as epoxy resin fills the space and is cured by
heat or UV light. Together, the sealing film 500 and the adhesive film
820 constitute a transparent film filling the space between the cover
glass 810 and the color filters of the image sensor 100. If the sealing
film 500 and the adhesive film 820 comprise the same material(s), during
this curing, the adhesive film 820 and the sealing film 500 can merge
together into one homogeneous transparent film.

[0094]The example shown in FIG. 24 is a known wafer-level chip-scale
package known under the trade name ShellOp from ShellCase, now Tessera.
This package is sealed from below by lower glass plate 815, held to the
image sensor 100 by epoxy 825. Inverted external leads 830 are
electrically connected to die terminals 835 by trace contacts 840 at
junctions 845. Junction 845 is sometimes referred to as a T-junction, and
contact 840 as a T-junction contact. External leads 830 are coated with a
protective solder-mask 850. Solder-mask 850 is a dielectric material that
electrically isolates leads 830 from external contact, and protects the
lead surface against corrosion. Contacts 855 are attached to the bottom
end of leads 830, and are suitable for printed circuit board (PCB)
mounting by known methods. Contacts 855 may be formed by known methods
such as solder-balls or plating, and may be suitably shaped for PCB
mounted.

[0095]As shown in FIG. 23, from above the cover glass 810, incoming light
rays pass through only flat interfaces to enter second light guides 130.
Each interface has minimal reflection due to the small difference in
refraction indices on both sides, since glass has approximately 1.46,
epoxy 820 and sealing film 500, and color filters 114B, 114G between 1.45
to 1.65.

[0096]FIGS. 10A-H show a process to expose bond pads 214 of the image
sensor. An opening 216 may be formed in a first insulator material 110
that covers a bond pad 214 as shown in FIGS. 10A-B. As shown in FIGS.
10C-D the first light guide material 116 is applied and a substantial
portion of the material 116 may be removed, leaving a thinner layer to
seal the first insulator material 110 below. The support film material
134 may be applied and a corresponding opening 218 formed therein as
shown in FIGS. 10E-F. The second light guide material 130 may be applied
as shown in FIG. 10G. As shown in FIG. 10H a maskless etch step may be
used to form an opening 220 that exposes the bond pad 214. The etchant
preferably has a characteristic that attacks light guide material 116 and
130 (e.g. silicon nitride) faster than the insulator material 110 and 134
(e.g. silicon oxide) and color filter 114 (photoresist). Dry etch in
CH3F/O2 has 5×˜10× greater etch rate on
silicon nitride than on color filter or silicon oxide.

[0097]FIG. 11 shows an embodiment where an anti-reflection (AR) stack
comprising a top AR film 236, a second AR film 234, and a third AR film
236 covers the conversion units 102. The anti-reflection stack improves
the transmission of light from the first light guide 116 to the
conversion units 102. Members of the AR stack together may constitute
layer 230 that also blanket the substrate 106, conversion units 102 and
electrodes 104 to protect the elements from chemical pollutants and
moisture. For example, the second AR film 234 may be a contact etch-stop
nitride film common in CMOS wafer fabrication for stopping the oxide
etching of contact holes to prevent over-etch of polysilicon contacts
whose contact holes are shallower than source/drain contacts by typically
2,000 Angstroms. The third AR film 232 may be silicon oxide. This silicon
oxide film may be a gate insulating film under the gate electrode 114, or
the spacer liner oxide film that runs down the side of the gate electrode
114 between the gate and the spacer (not shown) in common deep submicron
CMOS processes, a silicide-blocking oxide film deposited before contact
silicidation to block contact siliciding, or a combination thereof, or a
blanket oxide film deposited after salicide-block oxide etch that etches
away all oxide in areas coinciding with the bottom of light guides 116.
Using an existing silicon nitride contact etch-stop film as part of the
AR stack provides cost savings. The same contact etch-stop film also
functions to stop the etch of the opening in insulator 110 for
fabrication of the light guide. Finally, the top AR film 236 may be
formed in the opening in the insulator 110 prior to filling the opening
with light guide material.

[0098]The top AR film 236 has a lower refractive index than the light
guide 116. The second AR film 234 has a higher refractive index than the
top AR film 236. The third AR film 232 has a lower refractive index than
the second AR film 234.

[0099]The top AR film 236 may be silicon oxide or silicon oxynitride,
having refractive index about 1.46, with a thickness between 750 Angstrom
and 2000 Angstrom, preferably 800 Angstrom. The second AR film 234 may be
silicon nitride (Si3N4), having refractive index about 2.0,
with a thickness between 300 Angstrom and 900 Angstrom, preferably 500
Angstrom. The third AR film 232 may be silicon oxide or silicon
oxynitride (SiOxNy, where 0<x<2 and 0<y<4/3), having
refractive index about 1.46, with a thickness between 25 Angstrom and 170
Angstrom, preferably 75 Angstrom. The third AR film 232 may comprise the
gate oxide under the gate 104 and above the substrate 106 of FIG. 2, as
shown in FIG. 3 of U.S. application Ser. No. 61/009,454. The third AR
film 232 may further comprise gate liner oxide as shown in FIG. 3 of the
same. Alternately, the third AR film 232 may be formed by a blanket
silicon oxide deposition everywhere on the wafer after a salicide-block
etch removes salicide-block oxide 64, gate-liner oxide 55, and gate-oxide
54 shown in FIG. 2 of U.S. application Ser. No. 61/009,454 by using a
salicide-block-etch mask having a mask opening coinciding with the bottom
of light guide 116.

[0100]The anti-reflection structure shown in FIG. 11 can be fabricated by
first forming the third AR film 232 and the second AR film 234 over the
substrate, respectively. The insulator 110 may be then formed on the
second AR film 234. Silicon nitride film may be deposited by PECVD on the
first insulator 110 in a manner that covers and seals the insulator and
underlying layers to form a protection film 410 with a thickness between
10,000 Angstrom and 4,000 Angstrom, preferably 7,000 Angstrom. The
support film 134 may be formed on the protection film 410 by, for
example, HDP silicon oxide deposition.

[0101]The support film 134 is masked and a first etchant is applied to
etch openings in the support film 134. The first etchant may be chosen to
have high selectivity towards the protection film material. For example,
if the support film 134 comprises HDP silicon oxide and the protection
film 410 comprises silicon nitride, the first etchant may be CHF3,
which etches HDP silicon oxide 5 times as fast as silicon nitride. A
second etchant is then applied to etch through the silicon nitride
protection film 410. The second etchant may be CH3F/O2. The
first etchant is then applied again to etch the first insulator 110 and
to stop on the contact etch-stop film 234 which comprises silicon
nitride. The contact etch-stop film 234 acts as an etchant stop to define
the bottom of the opening. The top AR film 236 is then formed in the
opening by anisotropic deposition methods, for example, PECVD or HDP
silicon oxide deposition, that deposits predominantly to the bottom of
the opening than to the sidewalls. An etchant can be applied to etch away
any residual top AR film material that extends along the sidewalls of the
opening, for example by dry etch using the first etchant and holding the
wafer substrate at a tilt angle and rotated about the axis parallel to
the incoming ion beam. Light guide material is then formed in the
openings, for example by silicon nitride PECVD. Color filters may be
formed over the light guide and a portion of the support film between
adjacent color filters and a further portion between adjacent light
guides may be etched to create the structure shown in FIG. 5.

[0102]FIGS. 12A-E show a process for fabricating another embodiment of
anti-reflection between the light guide 116 and substrate 202. Referring
to FIG. 12E, in this embodiment an etch-stop film 238 is interposed
between the light guide 116 and the anti-reflection (AR) stack comprising
the top AR film 236, second AR film 234, and third AR film 232. The light
guide etch-stop film 238 may be formed of the same material as the light
guide 116, and may be silicon nitride, with a thickness between 100
Angstrom and 300 Angstrom, preferably 150 Angstrom. Forming the AR stack
in this embodiment has an advantage of more precise control of the
thickness of the second AR film, at the expense of one more deposition
step and the slight added complexity of etching through a
oxide-nitride-oxide-nitride-oxide stack instead of oxide-nitride-oxide
stack for contact hole openings (not shown). The previous embodiment uses
the second AR film 234 as a light guide etch stop and loses some of
thickness to the final step of insulator pit etch over-etch.

[0103]As shown in FIGS. 12A-B, the third 232 and second 234 AR films are
applied on the substrate 106 and then a top AR film 236 is applied onto
the second AR film 234, followed by a light guide etch-stop film 238 made
of silicon nitride. As shown in FIG. 12C, the insulator layer 110 and
wiring electrodes 108 are formed above the AR films 232, 234, and 236,
and light guide etch-stop film 238. FIG. 12D shows an opening etched into
insulator 110, stopping at the top of the light guide etch-stop film 238.
FIG. 12E shows the opening filled with light guide material.

[0104]FIG. 13A is a graph of transmission coefficient versus light
wavelength for the anti-reflection stack of FIG. 11 and FIG. 12E, for top
AR film 236 (oxide) nominal thickness of 800 Angstroms, and varied
+/-10%, whereas second AR film 234 (nitride) thickness is 500 Angstroms
and third AR film 232 (oxide) thickness is 75 Angstroms. The transmission
curves exhibit steep decline in the violet color region (400 nm to 450
nm). The nominal thicknesses of the AR films 232, 234, and 236
constituting the AR stack are chosen to position the maximum of the
transmission curve in the blue color region (450 nm to 490 nm) instead of
green color region (490 nm to 560 nm) so that any shift in film
thicknesses due to manufacturing tolerance would not result in
transmission coefficient fall-off much more in violet than in red color
region (630 nm to 700 nm).

[0105]FIG. 13B is a graph of transmission coefficient versus light
wavelength for the anti-reflection stack of FIG. 11 and FIG. 12E, for
nominal second AR film (nitride) of 500 Angstroms thick, and varied
+/-10%.

[0106]FIG. 13C is a graph of transmission coefficient versus light
wavelength for the anti-reflection stack of FIG. 11 and FIG. 12E, for
third AR film 232 (nitride) nominal thickness of 75 Angstroms, and varied
+/-10%.

[0107]FIGS. 14A-G show a process for fabricating another embodiment of
anti-reflection stack between the light guides 116 and substrate 202 to
provide two different AR stacks at two different pixels that each
optimizes for a different color region. Third and second AR film 232 and
234 are provided over the photoelectric conversion unit 201 in FIG. 14A,
similar to the embodiment shown in FIG. 12A. In FIG. 14A, the top AR film
236 is deposited to the thickness of thicker top AR film 236b shown in
FIG. 14B. Subsequently a lithography mask (not shown) is applied to
create mask openings over the pixels that use the thinner top AR film
236a. An etch step is applied to thin the top AR film 236 under the mask
opening to the smaller thickness of top AR film 236a in FIG. 14B.
Subsequent steps, shown in FIGS. 14C to 14G, are similar to FIGS. 12B-E.
Green color filters 114G may be applied on the pixels having the thinner
top AR film 236a, whereas Blue and Red color filters on the pixels having
the thicker top AR film 236b.

[0108]FIG. 15A is a graph of transmission coefficient versus light
wavelength for the anti-reflection stack of FIG. 14G for a thinner top AR
film 236a of nominal thickness 0.12 um, a second AR film 234 of nominal
thickness 500 Angstroms, and a third AR film 232 of nominal thickness 75
Angstroms. This graph peaks in the green color region at approximately
99%, and drops gently to approximately 93% at the center of the red color
region. This graph shows that the thinner top AR film 236a can be used at
red pixels as well as green pixels. This thinner top AR film 236a may be
used at magenta pixels where magenta color is part of the mosaic pattern
of the pixel array of the image sensor.

[0109]FIG. 15B is a graph of transmission coefficient versus light
wavelength for the anti-reflection stack of FIG. 14G for a thicker top AR
film 236b of nominal thickness 0.20 um, a second AR film 234 of nominal
thickness 500 Angstroms, and a third AR film 232 of nominal thickness 75
Angstroms. This graph peaks in two separate color regions, viz. purple
and red. This graph shows that the top AR film 236b can be used at blue
pixels and red pixels. This thicker top AR film 236b may be used at
yellow pixels where yellow color is part of the mosaic pattern of the
pixel array of the image sensor.

[0110]A pixel array may use the thinner top AR film 236a for green pixels
only while the thicker top AR film 236b for both blue and red pixels.
Alternately, the pixel array may use the thinner top AR film 236a for
both green and red pixels while the thicker top AR film 236b for blue
pixels only.

[0111]Another embodiment to provide two different AR stacks that each
optimizes for a different color region can be provided by creating
different second AR film thicknesses while keeping the same top AR film
thickness. Two different thicknesses are determined, one for each color
region. For example, thicknesses of 2800 Angstrom and optimizes
transmission for blue and red lights, whereas thickness of 650 Angstrom
optimizes for green lights. The second AR film is first deposited to the
larger thickness. Subsequently a lithography mask is applied to create a
mask opening over the pixels that uses the smaller second AR film
thickness. An etching step is applied to thin the second AR film under
the mask opening to the smaller thickness. Subsequent steps are identical
to FIGS. 12B-E.

[0112]While certain exemplary embodiments have been described and shown in
the accompanying drawings, it is to be understood that such embodiments
are merely illustrative of and not restrictive on the broad invention,
and that this invention not be limited to the specific constructions and
arrangements shown and described, since various other modifications may
occur to those ordinarily skilled in the art.