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Abstract

The principle of a setup for realtime mass-spectrometry of gas phase reactions is described. An orifice between the high pressure (about 200 Pa) reaction cell and the quadrupol mass spectrometer reduces the pressure and controls some important performance parameter. . With this method it is also possible to investigate the kinetics of laser-induced gas/surface reactions. Some results for C02laser-induced reactions in the system SF6/Si are presented. 1.

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Journal of Applied Remote SensingJournal of Astronomical Telescopes Instruments and SystemsJournal of Biomedical OpticsJournal of Electronic ImagingJournal of Medical ImagingJournal of Micro/Nanolithography, MEMS, and MOEMSJournal of NanophotonicsJournal of Photonics for EnergyNeurophotonicsOptical EngineeringSPIE Reviews