Russia backs e-beam lithography firm

The investment is earmarked to build a Matrix 1.1 machine that uses
1,326 beams to deliver a throughput of one wafer per hour. A proposed
Matrix 10.1 machine, using 13,260 beams, would be capable of a
throughput of 10 wafers per hour while Matrix 10.10 – a clustered
version composed of ten Matrix 10.1 machines, would be capable of
delivering 100 wafers per hour.

The MEMS-based lens components
system, one of Mapper's major innovations, is now set to be made at a
Russian MEMS fab. In addition, the investment is expected to develop
scientific cooperation with leading Russian research institutes.

"Mapper
stands at the very beginning of the semiconductor value chain, so this
investment strengthens the synergy among Rusnano's microelectronic
projects," said Rusnano managing director Dmitriy Lisenkov, in a
statement issued by Mapper.

The Imagine project conducted between
Mapper, TSMC and CEA-Leti has resolved 22-nm lines, spaces and contract
holes in positive chemically amplified resist. This is said to be
sufficiently dense for 14-nm and 10-nm logic manufacturing process
technology nodes.

CEA-Leti has had a pre-alpha machine since
mid-2009. Now CEA-Leti will receive one of the first Matrix systems to
enable continuation of the Imagine research program for three years more
years.

@resistion
The information about Russian manufacture of key components came from Mapper so I should think they are OK with it.
It is basically the price of the $50 million that Rusnano is putting up.
Many of Rusnano's deals have had a local (Russian) manufacturing element to them.