Hi,
I have adhesion problems of 120um thick and 50um wide SU-8 50 structures on
pyrex.
I have a long dehydration time (at least one hour), a high exposure dose
(600mJ/cm2) and even tried stepwise exposure.
Although I could improve the adhesion some parts still peel of during the
development.
I know, that by increasing the exposure dose I could get better adhesion, but an
unwanted side effect would be rough sidewalls that I try to prevent..
I appreciate any comments!!! Thanks in advance.
Arne
---
Arne Schleunitz
MEMS Sensors and Actuators Lab
Department of Electrical and Computer Engineering
University of Maryland
Tel: (301) 405-1897