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Abstract

We demonstrate a ring-resonator modulator based on a silicon-polymer hybrid slot waveguide with a tunability of 12.7 pm/V at RF speeds and a bandwidth of 1 GHz, for optical wavelengths near 1550 nm. Our slot waveguides were fabricated with 193 nm optical lithography, as opposed to the electron beam lithography used for previous results. The tunability is comparable to some of the best ring-based modulators making use of the plasma dispersion effect. The speed is likely limited only by resistance in the strip-loading section, and it should be possible to realize significant improvement with improved processing.

Measured normalized S21. Also shown is the projected S21 based on the DC performance of the device and the known optical losses. The black dashed line corresponds to the S21 that would be predicted based on a high-speed resonator tunability of 12.7 pm/V, and the optical losses and photodetector responsivity seen in our system.

Equivalent circuit model of device (a) and differential element used for response calculation (b). Note that the capacitor in (b) corresponds to the slot waveguide, R1 corresponds to the resistance across the strip-loaded section, and R0 corresponds to the resistance around the outer edge of the ring. The lower portion of R1 is in direct contact with the center metal pad. (c) shows the configuration of the two slot waveguides near the coupling region between the add waveguide, and the ring. This is the region that is not fully charged due to a bandwidth limit at higher speeds.