An experimental system consisting of an axial feed plasma gun, a variable-rate liquid delivery system, a liquid atomizer-feeder, and a substrate movement and control system was designed and assembled for preparing nanograined ceramic deposits. Sprayed deposits were produced with different spray and sol feed parameters and investigated in both the as-sprayed and heat-treated conditions. Assprayed deposits were predominately hydroxide phases and were strongly adherent to the substrates. Postspray heat treatment at 873 K led to conversion of the alumina and zirconia deposits to γ-alumina and tetragonal zirconia phases, respectively. Subsequent heat treatment at 1273 K resulted in densification of the deposits and formation of high-temperature phases. A small increase in the grain size was observed with heat treatment, but the specimens still retained nanosized grains.