Hi, I want to deposite a thin layer of polysilicon on
alminum coated silicon wafer. The aluminum layer is
coated on Si wafer by using electron beam and the
thickness is about 100 nm. The polysilicon layer could
be 0.1~10 um. Please let me know if you have some
information about how and where I can do this process?
Also, if this kind of wafer is commerically available,
please email me the name of the company.
Thank you in advance.
Mark
University of Washington,
Dept. of Chemistry
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