Genus - 1510 MeV Ion Implanter

Summary : High-energy ion implanters, typically in the range of 1 to 3 MEV, were originally looked at in the late seventies but were never too successful.

High-energy ion implanters, typically in the range of 1 to 3 MEV, were originally looked at in the late seventies but were never too successful. They then had a strong comeback in the mid-to-late eighties with the growing interest in buried layer implants. A small company called General Ionix joined the crowd of new high-energy suppliers. It shipped its first system, a model 1500 in 1985, but was then hit hard by the severe downturn of 85-86, and had no sales. It shipped its second unit in 1987 but by then it was too late. Its investors persuaded Genus to acquire the failing company and several years of very successful production prevailed. This unit, Model 1510, was an upgraded version of the original 1500.