We applied near-field total internal reflection holography to solve the problems of miniaturization of lenslet arrays. A regular 100 x 100 lenslet array with a 390-μm focal length and a nonregular lenslet array for clock distribution to a specially designed VLSI circuit were recorded in a planar-optics configuration. We also developed an appropriate recording technique to satisfy both the low-aberration condition and the Bragg condition, despite a wavelength shift between the recording and readout.