From jwc at snf.stanford.edu Thu Jul 7 17:00:30 2011
From: jwc at snf.stanford.edu (jwc at snf.stanford.edu)
Date: Thu, 7 Jul 2011 17:00:30 -0700
Subject: Shutdown sem4160 SNF 2011-07-07 17:00:29: Rotation will not zero to exchange position on unload
Message-ID:
Shut down the system as during the unload I could not rotate R back to the exchange position to pick up the screw threaded insert to pull isample holder out.
I lost a 100 mm sample holder with resolution std. during high tilt operation and it fell down into one of the 25 mm holes. The touch during this event may have knocked the rotation position off its indexed position.
The stage controller does read that it arrived at the exchange position and the Stage is in LCK (locked mode)
Will wait tilll tomorrow to work with Ted on this issue.
System is unavailable this evening to ALL USERS until resolved
sorry....
JWC
From tberg at snf.stanford.edu Fri Jul 8 07:52:19 2011
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Fri, 8 Jul 2011 07:52:19 -0700
Subject: Shutdown sem4160 SNF 2011-07-07 17:00:29: Rotation will not zero to exchange position on unload
Message-ID:
Vented system and removed stage reset rotation. Moved and checked unload. Back in high vac
From srikantv at snf.stanford.edu Wed Jul 13 18:23:03 2011
From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu)
Date: Wed, 13 Jul 2011 18:23:03 -0700
Subject: Problem sem4160 SNF 2011-07-13 18:23:02: holder sliding/slipping
Message-ID:
during imaging, the picture noticeably moves
Sample is prime Si wafer with no oxide etc (no charging)
From zzp at snf.stanford.edu Wed Jul 13 22:32:50 2011
From: zzp at snf.stanford.edu (zzp at snf.stanford.edu)
Date: Wed, 13 Jul 2011 22:32:50 -0700
Subject: Shutdown sem4160 SNF 2011-07-13 22:32:50: wafer broken during unloading
Message-ID:
some pieces inside the load chamber, very sorry. The load chamber is left vented.
From tberg at snf.stanford.edu Thu Jul 14 07:54:39 2011
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Thu, 14 Jul 2011 07:54:39 -0700
Subject: Shutdown sem4160 SNF 2011-07-13 22:32:50: wafer broken during unloading
Message-ID:
Cleaned sample exchange area back in high vac.
From tberg at snf.stanford.edu Thu Jul 14 08:10:06 2011
From: tberg at snf.stanford.edu (tberg at snf.stanford.edu)
Date: Thu, 14 Jul 2011 08:10:06 -0700
Subject: Comment sem4160 SNF 2011-07-14 08:10:05: Did not see any movement during imaging
Message-ID:
Did not see any movement during imaging. but will leave open for observation
From jwc at snf.stanford.edu Mon Jul 18 12:07:45 2011
From: jwc at snf.stanford.edu (jwc at snf.stanford.edu)
Date: Mon, 18 Jul 2011 12:07:45 -0700
Subject: Problem sem4160 SNF 2011-07-13 18:23:02: holder sliding/slipping
Message-ID:
seems to be OK