Gas Sensor based
on Mid-infrared MEMS Design
- VTT Technical
Research Centre of Finland has developed a series of new mid-infrared
spectrometers, which have been integrated into compact gas sensors,
branded as “GasSensors”. The spectrometers are based on MEMS-tunable
Fabry-Perot filter spectral sensors. The first demonstrator sensors,
which were shown recently at BiOS and Photonics West in San Francisco,
are now available for detecting and analyzing low levels of hydrocarbon
gases in the spectrum between 3 and 3.7 microns ...

Abstract - This
paper presents the design of a general purpose gas sensor interface used
in toxic gas control systems. The system integrates a large number of
complex analog, digital and periphery functions in a single IC, offering
on one hand the advantage of higher reliability, higher rejection of EMI
interferences and reduced power consumption and a high flexibility in
interfacing with a wide variety of gas sensors and microprocessor families
on the other. Experimental results on a prototype chip, realized in a 1.2
m CMOS technology, shows that the proposed IC represents a very low cost
solution for efficient processing of the signal detected by a generic gas
sensor.

Abstract - This
paper describes an integrated microstructure used to control temperature
in a gas sensor system. An innovative technological approach has been
pursued to integrate gas sensors on silicon substrate, compatible with IC
fabrication. A mixed analog-digital electronic interface controls
temperature operation, to maximize the sensitivity to substances to be
detected.