Abstract

The fabrication and characterization of a glass containing a regular parallel array of submicrometer channels or capillaries are described. The capillaries are arranged in a two-dimensional hexagonal close packing configuration with channel diameters as small as 33 nanometers and packing densities as high as 3 x 1010 channels per square centimeter. The high-temperature stability of the nanochannel glass array is well suited as a host or template for the formation of quantum confined semiconductor structures or as a mask for massively parallel patterned lithographic applications.