Current alignment technology is incapable of satisfying the needs of imminent generations of lithography. This dissertation delineates a novel method of alignment and three-dimensional position metrology that is compatible ...

The success of neural network models often comes at a cost of interpretability. This thesis addresses the problem by providing justifications behind the model's structure and predictions. In the first part of this thesis, ...

One of the fundamental goals of human genetics is to identify the genetic causes of human disease to ultimately design novel therapeutics. However, two challenges have become readily apparent. First, the majority of genomic ...

The ability to exchange secret information is critical to many commercial, governmental, and military networks. Information-theoretic security - widely accepted as the strictest notion of security - relies on channel coding ...

Two inverse problems in electromagnetics are investigated in this thesis. The first is the retrieval of the effective constitutive parameters of metamaterials from the measurement of the reflection and the transmission ...

In this thesis, we introduce two large-step-down dc-dc converter architectures that are designed to provide zero-voltage switching of the power devices. While the techniques used in these converters can be used in a wide ...

Control of parametric laser-plasma interactions (LPI) is essential to the success of inertial confinement fusion (ICF). Through a research collaboration with the Los Alamos National Laboratory (LANL), we have had the ...

This thesis presents work aimed at investigating the possible benefit of strained-Si/SiGe heterostructure MOSFETs designed for nanoscale (sub-50-nm) gate lengths with the aid of device fabrication and electrical measurements ...