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Abstract

The Kite testbed at JPL is being developed to demonstrate relative
metrology on a four-cornered metrology truss with six gauges to 10's
of picometers. The solution to the truss equation requires accurate
knowledge of the direction cosines between the fiducials, which is derived from the absolute distances that the gauges measure. The absolute distance accuracy is required at better than 10μm in order for relative metrology to measure picometer accuracy. In this
paper, a technique called switched heterodyne interferometry is
described and implemented. The implementation is in a calibration
testbed which is used to develop the hardware and software to perform
this technique, as well as to calibrate the interferometric
beamlaunchers which are part of the metrology gauges. Some early tests
were successful, but recent tests have had more noise in the
measurement than acceptable. The reasons for this are under investigation.

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Journal of Applied Remote SensingJournal of Astronomical Telescopes Instruments and SystemsJournal of Biomedical OpticsJournal of Electronic ImagingJournal of Medical ImagingJournal of Micro/Nanolithography, MEMS, and MOEMSJournal of NanophotonicsJournal of Photonics for EnergyNeurophotonicsOptical EngineeringSPIE Reviews