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Abstract

An apparatus for achieving simultaneous two-sided exposure of a mask is shown in the figures.

Country

United States

Language

English (United States)

This text was extracted from an ASCII text file.

This is the abbreviated version, containing approximately
65% of the total text.

Repeatable Registration And Sealless Vacuum Contact
System

An apparatus
for achieving simultaneous two-sided
exposure of a mask is shown in the figures.

In Fig. 1,
the overall arrangement of the apparatus is shown.

Fig. 2 shows
a detailed view of a cone and ball-alignment
fixture. The top frame 1 holds the top
photoplate 3, and the bottom
frame 2 holds the bottom photoplate 4 (not shown). The cone 9
recessed in each corner of the bottom frame prevents any lateral
movement, while the spring 13 at the bottom of each cone 9 allows the
cone 9 to move in a vertical direction to compensate for varying
substrate thicknesses. Alignment of the
two photoplates 3, 4 is
accomplished by adjustment of the ball assembly 7 located in each
corner of the top frame 1. When the lock
nuts 11 are loosened, the
ball assemblies 7 are allowed to move in a lateral direction, but not
vertically. The top frame 1 is placed on
top of the bottom frame 2
with the ball assemblies 7 seated in the cones.
The lock nuts 11 are
loosened, and the top frame 1 is adjusted with respect to the bottom
frame 2 until registration is achieved.
The four lock nuts 11 are
then tightened to lock the ball assemblies 7 in place. Once
registration is achieved and the ball assemblies 7 locked, the two
frames 1, 2 can be separated and rejoined repeatedly without
disturbing alignment.