Semiconductor Industry EHS

Semiconductor Environmental Safety & Health – Clean Rooms

We have substantial clean room experience and are knowledgeable of processes and potential health risks for workers, and the potential for chemical releases to the environment. We also address quality control concerns about product (wafers and chips) with standard chemical air sampling and analytical methods.

We advise clients about regulatory and industry standards for controlling worker exposures to chemicals, including:

Radiation and noise: worker exposures to X-ray from ion implanters and x-ray cabinets, microwave and radiofrequency ( MW/RF) from plasma etchers, and noise.

Tracer gas testing: Evaluate the performance of the exhaust system of a tool to demonstrate the effective control of toxic and dangerous gases. We follow the guidelines of the SEMI S6 7070E (2007) standard, now revised as SEMI draft document 4494 “Test Method (SF6 Tracer Gas) for Enclosures”.