Abstract:
Molecular Imprints Inc. (MII), a developer of a maskless alternative to optical lithography known as nano-imprint lithography, expects to ship 12 machines in 2004. These will be low-throughput machines, only able to handle a few wafers an hour, but suitable for emerging applications in MEMS, optical components, microfluidics and bio-chips, as well as for R&D and process development for conventional chipmaking.