Abstract

Hard x-ray microscopy with nanometer resolution will open frontiers in the study of materials and devices, environmental sciences, and life sciences by utilizing the unique characterization capabilities of x-rays. Here we report two-dimensional nanofocusing by multilayer Laue lenses (MLLs), a type of diffractive optics that is in principle capable of focusing x-rays to 1 nm. We demonstrate focusing to a 25 × 27 nm2 FWHM spot with an efficiency of 2% at a photon energy of 12 keV, and to a 25 × 40 nm2 FWHM spot with an efficiency of 17% at a photon energy of 19.5 keV.

D. Shu, H. Yan, and J. Maser, “Mechanical design of a multi-dimensional alignment system for an MLL system with nanometerscale 2-D focusing,” in Proceedings of SRI-2008(to be published in Nucl. Instrum. Methods A, Saskatoon, Canada, 2008).

D. Shu, H. Yan, and J. Maser, “Mechanical design of a multi-dimensional alignment system for an MLL system with nanometerscale 2-D focusing,” in Proceedings of SRI-2008(to be published in Nucl. Instrum. Methods A, Saskatoon, Canada, 2008).

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