Abstract

The authors report the first ever in situscanning tunnelling microscopy measurements in metal-organic vapor phase epitaxy(MOVPE) using an active cooling shield for operation up to . Apart from fundamental considerations and constraints, some MOVPE specific problems are discussed. The authors present images representing the current status and discuss the effect of tip interaction with the MOVPE process.

Received 14 May 2006Accepted 23 June 2006Published online 08 August 2006

Acknowledgments:

Part of this work was supported by the Deutsche Forschungsgemeinschaft (Sonderforschungsbereich 296). One of the authors (M.P.) would like to thank Shiro Tsukamoto who introduced him to the art of in situ STM in MBE.