In-situ Quantitative Integrated Tribo-SPM Nano-Micro-Metrology

N. Gitis, A. Daugela and M. VinogradovCETR, US

Keywords:nano, micro, spm, tribo, metrology

Abstract:Quantitative nano-metrology tools have become a standard in semiconductor, data storage and other hi-tech industries where products are tested for thin-film properties. Though it is critical to characterize advanced thin films and coatings, today’s off-line nanoscale metrology tools can capture only limited number of parameters. A novel quantitative nano/micro-tribometer with both SPM and optical microscope imaging integrated into it has been developed to characterize numerous physical and mechanical properties of liquid and solid thin films and coatings, with in-situ monitoring their changes during micro and nano indentation, scratching, reciprocating, rotating and other tribology tests. Both the materials properties and surface topography can be assessed periodically during the tests. Various experiments on semiconductor wafers, MEMS, bio-tissues and other objects with thin films are presented and discussed in detail.