Table 4 summarizes differences between the analyses of spectra from the fractionated resins and the low Mw fractions removed during the fractionation of MPT by both methods.

Results show that the centrifugal fractionation process gave a yield improvement of about 35% while functional properties were mostly improved as well when compared with resists made with resins from the conventional process.

Thus the new fractionation protocol provides a critical raw material with improved or comparable functional properties while substantially increasing the overall yield of the material.

Figure 4 shows an overlay of the GPC chromatograms for the unfractionated MPT resin (top), the fractionated resin from the centrifugal separation and the material removed during the fractionation step (bottom).

We concluded that the overall distribution of higher o-o' and lower total trisubstituted fragments of the resin isolated from the new fractionation method was undoubtedly responsible for the properties seen when used in resist formulations.

Volatile materials from the waste layer were characterized by GC/MS of the material removed during the fractionation step.

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