The main objective of this deliverable is to collect detailed description on the best practice for micro/ nano replication process data acquisition system. In particular the following aspects are summed up in the deliverable: Process requirements for COTECH demonstrators General description of the processes and process parameters State-of-the-art process control and data acquisition systems Sensor integration in COTECH tools Expected COTECH improvement in process control and data acquisition system Information provide by this deliverable will be used as input to the COTECH process control system. This report presents the important processes and process parameters required for the realization of COTECH demonstrator. It also presents the cutting edge sensor systems used for different process and set a guideline to integrate sensors in COTECH tools.