This research aims to estimate displacement and generated force of a piezoelectric element (piezo) by using induced charge caused by internal charge to reduce the hysteresis of the piezo. Miniaturization of devices is expected by this method because additional elements are very small. A control method using the induced charge is established after basic performance of the induced charge is measured in 1997 and a precise positioning device is developed in 1998.(1)[Measurement of displacement and force generated]The relationship between induced charge and the displacement of a piezo is measured. The hysteresis of the displacement of the piezo to the induced charge and to applied voltage is also measured. The linearity of the induced charge to the displacement is much better than the linearity of the applied voltage.(2)[Precise positioning]The positioning performance by induced charge feedback control (ICFC) is compared with open loop control and displacement feedback control. The displace
… Morement can be controlled by the ICFC as well as by the displacement feedback control. The. displacement is controlled by combining the ICFC with inverse transfer function compensation for 10 seconds.(3)[Design of positioning table with parallel mechanism]A Stewart platform type device with six degrees of freedom is developed for precise positioning. It measures 160xl60x85mm. The movable range of a positioning table is 100x100x10mum. Its resonance frequencies are 50 Hz in the x and y directions and 190 Hz in the z direction. A noise from power line is reduced by an active noise reduction method.(4)[Application to atomic force microscope (AFM)]The pitching error of the positioning table is 10 times smaller than a tube type piezoelectric element. The repeatablitity of the z motion is 16 nm in the measurement of force curves. An AFM with good linearity can be obtained.軸間の干渉量、ピッチング誤差に関して、誘導電荷フィードバック制御は変位フィードバック制御と同等以上の運動精度が得られることが明らかになった。フォースカーブを測定した場合のz方向の運動のばらつきは16nmであった。回折格子を観察した結果、直線性のよい像が得られた。 Less