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Abstract:

A transmissive image modulator for allowing image modulation over a wide
bandwidth with multiple Fabry-Perot resonant modes and multiple
absorption modes is provided. The transmissive image modulator includes a
lower reflection layer; an active layer disposed on the lower reflection
layer, including multiple quantum well layers and multiple barrier
layers; an upper reflection layer disposed on the active layer; and at
least one micro-cavity layer disposed in at least one of the lower and
upper reflection layer. The active layer and the at least one
micro-cavity layer have thicknesses of a multiple of λ/2, where
λ is a resonant wavelength.

Claims:

1. A transmissive image modulator comprising, a lower reflection layer;
an active layer disposed on the lower reflection layer, the active layer
comprising a plurality of quantum well layers and a plurality of barrier
layers; an upper reflection layer disposed on the active layer; and at
least one micro-cavity layer disposed in at least one of the lower and
upper reflection layer, wherein the active layer has an optical thickness
which is a multiple of λ/2, and the at least one micro-cavity layer
has an optical thickness which is a multiple of λ/2, where λ
is a resonant wavelength.

2. The transmissive image modulator of claim 1, wherein each of the lower
reflection layer and the upper reflection layer is a DBR layer comprising
first refractive index layers and second refractive index layers stacked
alternately, wherein a first refractive index of the first refractive
index layers is different from a second refractive index of the second
refractive index layers, and wherein each of the first refractive index
layers and each of the second refractive index layers has a thickness of
λ/4.

3. The transmissive image modulator of claim 2, wherein the lower
reflection layer comprises a first lower reflection layer, a first
micro-cavity layer disposed on the first lower reflection layer, a first
phase matching layer disposed on the first micro-cavity layer, and a
second lower reflection layer disposed on the first phase matching layer.

4. The transmissive image modulator of claim 3, wherein: the first lower
reflection layer comprises first pairs of the first and second refractive
index layers, the first micro-cavity layer comprises the first refractive
index layer, the first phase matching layer comprises the second
refractive index layer, and the second lower reflection layer comprises
second pairs of the first and second reflective layers.

5. The transmissive image modulator of claim 4, wherein a number of the
first pairs is less than a number of the second pairs.

6. The transmissive image modulator of claim 3, wherein the upper
reflection layer comprises a first upper reflection layer, a second phase
matching layer disposed on the first upper reflection layer, a second
micro-cavity layer disposed on the second phase matching layer, and a
second upper reflection layer disposed on the second micro-cavity layer.

7. The transmissive image modulator of claim 6, wherein: the first upper
reflection layer comprises third pairs of the first and second refractive
index layers, the second phase matching layer comprises the second
refractive index layer, the second micro-cavity layer comprises the first
refractive index layer, and the second upper reflection layer comprises
fourth pairs of the first and second reflective layers.

8. The transmissive image modulator of claim 7, wherein a number of the
third pairs are larger than a number of the fourth pairs.

9. The transmissive image modulator of claim 6, wherein the lower and
upper reflection layers are disposed symmetrically about the active
layer.

10. The transmissive image modulator of claim 9, wherein a reflectance of
the first lower reflection layer is the same as a reflectance of the
second upper reflection layer, and a reflectance of the second lower
reflection layer is the same as a reflectance of the first upper
reflection layer.

11. The transmissive image modulator of claim 6, wherein a phase of light
reflected at the surface of the second upper reflection layer lags by
π, while phases of light reflected at surfaces of the first lower
reflection layer, the second lower reflection layer, and the first upper
reflection layer are 0.

12. The transmissive image modulator of claim 2, wherein the first
refractive index layer is made from AlxGa1-xAs, and the second
refractive index layer is made from AlyGa1-yAS, where
0<x<1, 0<y<1, and x<y.

13. The transmissive image modulator of claim 1, wherein the active layer
comprises the plurality of quantum well layers and the plurality of
barrier layers stacked alternately, a first cladding layer disposed
between the lower reflection layer and the active layer, and a second
cladding layer disposed between the upper reflection layer and the active
layer.

14. The transmissive image modulator of claim 13, wherein a refractive
index of the first cladding layer is between a refractive index of the
quantum well layer and a refractive index of the upper reflection layer,
a refractive index of the second cladding layer is between a refractive
index of the quantum well layer and a refractive index of the lower
reflection layer, and the first cladding layer and the second cladding
layer are made from the same material and have the same thickness.

15. The transmissive image modulator of claim 13, wherein the multiple
quantum well layer comprises first quantum well layers and second quantum
well layers, wherein a thickness of the first quantum well layers is
different from a thickness of the second quantum well layers.

16. The transmissive image modulator of claim 1, further comprising, a
first contact layer disposed on a lower surface of the lower reflection
layer, and a second contact layer disposed on a top layer of the upper
reflection layer.

17. The transmissive image modulator of claim 16, wherein the first
contact layer is made from n-GaAs or n-InGaP.

18. The transmissive image modulator of claim 16, further comprising, a
substrate disposed on the lower surface of the first contact layer, and a
transparent widow formed in a center of the substrate by removing a
central part of the substrate.

19. The transmissive image modulator of claim 18, further comprising, a
transparent resin applied to the second contact layer, and a transparent
cover disposed on the transparent resin.

20. A method of forming a transmissive image modulator on a substrate,
the method comprising, forming a first contact layer on a substrate;
forming the transmissive image modulator on the first contact layer,
wherein the transmissive image modulator comprises: a lower reflection
layer, an active layer disposed on the lower reflection layer, the active
layer comprising a plurality of quantum well layers and a plurality of
barrier layers, and an upper reflection layer disposed on the active
layer, wherein the lower reflection layer comprises at least one first
micro-cavity layer disposed therein. wherein the upper reflection layer
comprises at least one second micro-cavity layer disposed therein, and
wherein the active layer has a thickness which is a multiple of
λ/2, the at least one first micro-cavity layer has a thickness
which is a multiple of λ/2, and the at least one second
micro-cavity layer has a thickness which is a multiple of λ/2,
where λ is a resonant wavelength; forming a second contact layer on
a top surface of the upper reflection layer; and forming a transparent
window by removing a central part of the substrate.

21. The method of claim 20, wherein the first contact layer is made from
n-GaAs, the forming the first contact layer on the substrate comprises
forming an AlAs buffer layer on the substrate, and forming the first
contact layer on the AlAs buffer layer.

22. The method of claim 21, wherein the forming the transparent window by
removing the central part of the substrate comprises: forming a first
protection layer on a bottom surface of the substrate and forming a
second protection layer on a top surface of the second contact layer;
forming a photoresist layer along an edge of the first protection layer,
and removing a central part of the first protection layer to expose the
substrate; removing a portion of the exposed substrate with a dry
etching; removing a remaining part of the exposed substrate with a wet
etching, this exposing the buffer layer; and removing the exposed buffer
layer and the first protection layer and the second protection layer.

23. The method of claim 20, wherein the first contact layer is made from
n-InGaP.

24. The method of claim 23, wherein the forming the transparent window by
removing the central part of the substrate comprises: forming a first
protection layer on a bottom surface of the substrate and forming a
second protection layer on a top surface of the second contact layer;
forming a photoresist layer along an edge of the first protection layer,
and removing a central part of the first protection layer to expose the
substrate; removing an exposed part of the substrate with a wet etching
method to expose the buffer layer; and removing the exposed buffer layer
and the first and second protection layers.

Description:

CROSS-REFERENCE TO RELATED APPLICATION

[0001] This application claims priority from Korean Patent Application No.
10-2011-00133052, filed on Dec. 12, 2011, in the Korean Intellectual
Property Office, the disclosure of which is incorporated herein in its
entirety by reference.

BACKGROUND

[0002] 1. Field

[0003] Apparatuses and methods consistent with exemplary embodiments
relate to a transmissive image modulator, and more particularly, to a
transmissive image modulator that allows image modulation over a wide
bandwidth by using a multi-Fabry-Perot resonant mode and a
multi-absorption mode.

[0004] 2. Description of the Related Art

[0005] Images captured by general cameras do not contain information about
a distance from the camera to a pictured subject. In order to implement a
three dimensional (3D) image capture device, such as, a 3D camera, an
additional component to measure distances from multiple points on the
surface of the pictured subject is required. The information about the
distance to the pictured subject can generally be obtained by a vision
method that uses two cameras, or by triangulation that uses structured
light and a camera. However, with these methods, accurate distance
information is hardly obtained because the accuracy of the distance
information drastically degrades as the distance to the pictured subject
gets farther, and it depends on the status of the surface of the pictured
subject.

[0006] A Time-of-Flight (TOF) method has been introduced to obtain more
accurate distance information. The TOF method is used to measure the time
that takes a laser beam from being irradiated to and reflected back from
the pictured subject until the reflected beam is received by a light
receptor. According to the TOF method, a beam of a certain wavelength
(e.g., a near-infrared beam of 850 nm) having been projected from a
light-emitting diode (LED) or a laser diode (LD) to the pictured subject,
reflected back from the pictured subject in kind, and then finally
received by the light receptor undergoes a special process for extracting
the distance information. Various TOF methods have been introduced
depending on such light handling processes. For instance, in a direct
time-measurement method, the time that takes a pulse beam from being
projected to the pictured subject to being reflected back from the
pictured subject is measured with a timer. In a correlation method, the
distance is measured based on brightness of the pulse beam that has been
projected to and then reflected back from the pictured subject. A phase
delay measurement method projects a continuous wave beam to the pictured
subject, detects a phase difference in the beam reflected back from the
pictured subject, and then calculates the phase difference as a distance.

[0007] In addition, there are many different phase delay measurement
methods, among which it is advantageous to use an external modulation
method to obtain a higher resolution distance image by performing
amplitude modulation on the reflected beam and photographing the
modulated reflected beam with a photography device, such as, a
charge-coupled device (CCD) or Complementary Metal Oxide Semiconductor
(CMOS) to measure a phase delay. In the external modulation method, a
brightness image can be obtained by accumulating or sampling the amount
of incoming light for a predetermined time, and the phase delay and the
distance can be calculated from the brightness image. In the external
modulation method, a normal photography device may be used as is, but a
light modulator is required to modulate light super fast at tens to
hundreds of MHz rates, in order to obtain an accurate phase delay.

[0008] Among light modulators, there is, for example, an image intensifier
or a transmissive modulator using a Pockel or Kerr effect based on
crystal optics, but both of these have several defects, including large
volume, operation at a high voltage of several kV, and cost
ineffectiveness.

[0009] Recently, a compact, low voltage-driven, and GaAs
semiconductor-based light modulator, which is also easy to implement, has
been proposed. The GaAs semiconductor-based light modulator has a
multiple quantum well layer disposed between p-and n-electrodes and uses
a light absorption effect within a MOW layer when a reverse bias voltage
is applied to the p- and n-electrodes. The GaAs semiconductor-based light
modulator has advantages in that it is fast driven, operates at a
relatively low driving voltage, and has a large reflectivity difference
(i.e., contrast) when operating between ON and OFF. On the other hand,
the GaAs semiconductor-based light modulator has quite a narrow bandwidth
of 4-5 nm.

[0010] A 3D camera uses multiple light sources, between which there is a
variation in the center wavelength. Furthermore, the center wavelength of
a light source may vary with temperature. Likewise, the light modulator
has a varying characteristic in the center absorption wavelength
depending on variables of a manufacturing process and changes in
temperature. Accordingly, a light modulator capable of modulating beams
over a wide bandwidth is required to be applied in the 3D camera.
However, since there is a trade-off between the reflectivity difference
in ON/OFF operations and bandwidth, it is difficult to increase both of
them simultaneously.

[0011] In a reflective modulator, an optical path for providing a
modulated optical image to a photography device (e.g., CCD, CMOS) is
complicated. Accordingly, an additional configuration of an optical
system is required.

SUMMARY

[0012] One or more exemplary embodiments may provide a transmissive image
modulator for performing image modulation over a wide bandwidth which is
easy to manufacture and has a big transmittance difference.

[0013] Additional aspects will be set forth in part in the description
which follows and, in part, will be apparent from the description, or may
be learned by practice of the presented exemplary embodiments.

[0014] According to an aspect of an exemplary embodiment, a transmissive
image modulator includes a lower reflection layer; an active layer
disposed on the lower reflection layer, including a plurality of quantum
well layers and a plurality of barrier layers; an upper reflection layer
disposed on the active layer; and at least one micro-cavity layer
disposed in at least one of the lower and upper reflection layer, wherein
the active layer and the at least one micro-cavity layer have optical
thicknesses of a multiple of λ/2, where λ is a resonant
wavelength.

[0015] The lower and upper reflection layers may be distributed Bragg
reflector (DBR) layers having first and second refractive index layers
stacked alternately, where the first and the second refractive indexes
are different, each of the first and second refractive index layers
having an optical thickness of λ/4.

[0016] The lower reflection layer may include a first lower reflection
layer, a first micro-cavity layer disposed on the first lower reflection
layer, a first phase matching layer disposed on the first micro-cavity
layer, and a second lower reflection layer disposed on the first phase
matching layer.

[0017] The first lower reflection layer may include first pairs of the
first and second refractive index layers, the first micro-cavity layer
may consist of the first refractive index layer, the first phase matching
layer may consist of the second refractive index layer, and the second
lower reflection layer may include second pairs of the first and second
reflective layers.

[0018] A number of first pairs may be less than a number of second pairs.

[0019] The upper reflection layer may include a first upper reflection
layer, a second phase matching layer disposed on the first upper
reflection layer, a second micro-cavity layer disposed on the second
phase matching layer, and a second upper reflection layer disposed on the
second micro-cavity layer.

[0020] The first upper reflection layer may include third pairs of the
first and second refractive index layers, the second phase matching layer
may include the second refractive index layer, the second micro-cavity
layer may include the first refractive index layer, and the second upper
reflection layer may include fourth pairs of the first and second
reflective layers.

[0021] A number of third pairs may be larger than a number of fourth
pairs.

[0022] The lower and upper reflection layers may be structured
symmetrically about the active layer.

[0023] The first lower and second upper reflection layers may have the
same reflectance, and the second lower and the first upper reflection
layers may have the same reflectance.

[0024] A phase of light reflected on the surface of the second upper
reflection layer may lag by π, while phases of light reflected on
surfaces of the first lower reflection layer, the second lower reflection
layer, and the first upper reflection layer may be 0.

[0025] The first refractive index layer may be made from
AlxGa1-xAs, and the second refractive index layer may be made
from AlyGa1-yAS, where 0<x<1, 0<y<1, and x<y.

[0026] The active layer may include the plurality of quantum well layers
and the plurality of barrier layers stacked alternately, a first cladding
layer disposed between the lower reflection layer and the active layer,
and a second cladding layer disposed between the upper reflection layer
and the active layer.

[0027] The first cladding layer may have a refractive index between those
of the quantum well layer and the upper reflection layer, the second
cladding layer may have a refractive index between those of the quantum
well layer and the lower reflection layer, and the first and second
cladding layers may be made from the same material and have the same
thickness.

[0028] The multiple quantum well layer may include first and second
quantum well layers with different thicknesses.

[0029] The transmissive image modulator may further include a first
contact layer disposed on a lower surface of the lower reflection layer,
and a second contact layer disposed on a top layer of the upper
reflection layer.

[0030] The first contact layer may be made from n-GaAs or n-InGaP.

[0031] The transmissive image modulator may further include a substrate
disposed on the lower surface of the first contact layer, and a
transparent widow formed in the center of the substrate by removing the
central part of the substrate.

[0032] The transmissive image modulator may further include a transparent
resin applied to the second contact layer, and a transparent cover
disposed on the transparent resin.

[0033] According to an aspect of another exemplary embodiment, a method of
forming a transmissive image modulator on a substrate, includes forming a
first contact layer on a substrate; forming the transmissive image
modulator as described above on the first contact layer; forming a second
contact layer on a top surface of an upper reflection layer; and forming
a transparent window by removing a central part of the substrate.

[0034] The first contact layer may be made from n-GaAs, the forming of the
first contact layer on the substrate may include forming at first an AlAs
buffer layer on the substrate, and forming the first contact layer on the
AlAs buffer layer.

[0035] The forming of the transparent window by removing a central part of
the substrate may include forming a first protection layer on a bottom
surface of the substrate and forming a second protection layer on a top
surface of the second contact layer; forming a photoresist layer along an
edge of the first protection layer, and removing a central part of the
first protection layer to expose the substrate; removing the exposed
substrate with a dry etching until the buffer layer is almost exposed;
removing the remaining part of the substrate with a wet etching method to
expose the buffer layer; and removing the exposed buffer layer and the
first and second protection layers.

[0036] The first contact layer may be made from n-InGaP.

[0037] The forming of the transparent window by removing the central part
of the substrate may include forming a first protection layer on a bottom
surface of the substrate and forming a second protection layer on a top
surface of the second contact layer; forming a photoresist layer along an
edge of the first protection layer, and removing a central part of the
first protection layer to expose the substrate; removing an exposed part
of the substrate with a wet etching method to expose the buffer layer;
and removing the exposed buffer layer and the first and second protection
layers.

BRIEF DESCRIPTION OF THE DRAWINGS

[0038] These and/or other exemplary aspects and advantages will become
apparent and more readily appreciated from the following description of
exemplary embodiments, taken in conjunction with the accompanying
drawings in which:

[0039] FIG. 1 is a cross-sectional view of a schematic structure of an
image modulator according to an exemplary embodiment;

[0040] FIGS. 2A to 4B illustrate simple principles of how bandwidths of
the image modulator increase according to a Fabry-Perot resonant mode;

[0041]FIG. 5 is a graph representing changes of transmittance peaks with
the reflectance of mirrors in the multiple Fabry-Perot resonant modes at
three cavities;

[0042]FIG. 6 is a graph representing changes of transmittance peaks with
changes of the reflectance of mirrors in the multiple Fabry-Perot
resonant modes at three cavities, where the reflectance of the mirrors is
symmetrically designed;

[0043] FIGS. 7A and 7B are graphs representing light absorption
characteristics of an active layer in which a single type of quantum well
layer is arranged;

[0044] FIGS. 8A and 8B are graphs representing light absorption
characteristics of an active layer in which two types of quantum well
layers are arranged;

[0045]FIG. 9 shows a table of illustrative examples of structures and
thickness of layers of the image modulator, according to an exemplary
embodiment;

[0046] FIG. 10A illustrates an exemplary design result of the image
modulator;

[0050]FIG. 12A illustrates another exemplary design result of the image
modulator;

[0051]FIG. 12B is a graph representing optical characteristics of the
image modulator illustrated in FIG. 12A;

[0052]FIG. 13A illustrates another design result of an image modulator;

[0053]FIG. 13B is a graph representing optical characteristics of the
image modulator illustrated in FIG. 13A;

[0054] FIGS. 14A to 14H illustrate schematic cross-sectional views of a
process of forming a transparent window of a substrate;

[0055] FIGS. 15A to 15C illustrate schematic cross-sectional views of
another process of forming the transparent window of the substrate;

[0056]FIG. 16 is a schematic cross-sectional view representing an example
of the image modulator having a reinforcing structure mounted on the top
surface thereof; and

[0057]FIG. 17 schematically illustrates a large image modulator array
including arrays of the image modulator as illustrated in FIG. 1.

DETAILED DESCRIPTION

[0058] Reference will now be made in detail to embodiments, examples of
which are illustrated in the accompanying drawings, wherein like
reference numerals refer to like elements throughout. In this regard, the
exemplary embodiments may have different forms and should not be
construed as being limited to the descriptions set forth herein.
Accordingly, the exemplary embodiments are merely described below, by
referring to the figures, to explain aspects of the present description.
As used herein, the term "and/or" includes any and all combinations of
one or more of the associated listed items. Expressions such as "at least
one of," when preceding a list of elements, modify the entire list of
elements and do not modify the individual elements of the list.

[0059] FIG. 1 is a cross-sectional view of a schematic structure of an
image modulator 100 according to an exemplary embodiment. Referring to
FIG. 1, the image modulator 100 may include a substrate 101, a first
contact layer 102 on top of the substrate 101, a lower distributed Bragg
reflector (DBR) layer 110 on top of the first contact layer 102, an
active layer 120 having a multiple quantum well structure on top of the
lower DBR layer 110, an upper DBR layer 130 on top of the active layer
120, and a second contact layer 140 on top of the upper DBR layer 130.
Furthermore, the image modulator 100 may further include at least one of
a first micro-cavity layer 111 disposed within the lower DBR layer 110,
and a second micro-cavity layer 131 disposed within the upper DBR layer
130.

[0060] The substrate 101 may be made from non-doped GaAs. A center portion
of the substrate 101 may be removed and a transparent window 101a may be
formed, to allow the light to penetrate. The first contact layer 102
connected to an electrode (not shown) to apply a voltage to the active
layer 120, and is made from silicon-doped n-GaAs or n-InGaP, for example.
The second contact layer 140 is connected to another electrode (not
shown) to apply a voltage to the active layer 120, and is made from
beryllium (Be)-doped p-GaAs, for example.

[0061] The lower DBR layer 110 and the upper DBR layer 130 each have a
structure where relatively low refractive index layers and relatively
high refractive index layers are repeatedly alternately stacked. For
example, the lower and upper DBR layers 110 and 130 may each consist of a
number of pairs of AlxGa1-xAs and AlyGa1-yAs as high and low refractive
index layers, respectively, where 0<x<1, 0<y<1, and x<y.
In more detail, the lower and upper DBR layers 110 and 130 each have a
structure where Al0.2Ga0.8As and Al0.87Ga0.13 are
alternately stacked.

[0062] When there is a beam with a certain wavelength incident on the
lower and upper DBR layers 110 and 130, reflection occurs at a boundary
layer between the different refractive index layers (i.e., between the
high and low refractive index layers). In this regard, by ensuring that
all the reflected beams are in phase, high reflectance is obtained. To do
this, an optical thickness (i.e., a value resulting from multiplying
physical thickness by the refractive index of a material of a layer) of
each of the high and low refractive index layers within the lower and
upper DBR layers 110 and 130 may be selected to be an odd-numbered
multiple of λ/4, where λ is a wavelength of the incident beam
or a resonant wavelength to be modulated). Reflectance at the lower and
upper DBR layers 110 and 130 may increase as the number of repetitive
pairs of high and low refractive index layers increases. The lower and
upper DBR layers 110 and 130 have electrodes configured to form an
electric field for light absorption at the active layer 120. To do this,
the lower DBR layer 110 may be a Si-doped n-DBR layer with Si doping
density of about 2.0˜2.6×1018/cm3, while the upper
DBR layer 130 may be a Be-doped p-DBR layer with Be doping density of
about 0.8˜1.2×1019/cm3.

[0063] The active layer 120 is where the light absorption occurs and has a
multiple quantum well structure in which multiple quantum well layers and
multiple barrier layers are stacked alternately. For example, the active
layer 120 may include multiple barrier layers of Al0.31Ga0.69As
and multiple quantum well layers of GaAs. The active layer 120 also
serves as a main cavity for Fabry-Perot resonance. To do this, the active
layer 120 may be formed to have an optical thickness that is the same as
a multiple of λ/2.

[0064] Thus, the image modulator 100 has a P-I-N structure having the
p-type upper DBR layer 130, the non-doped active layer 120, and the
n-type lower DBR layer 110. In this structure, a beam incident on the
image modulator 100 resonates between the upper DBR layer 130 and the
lower DBR layer 110 through the active layer 120, and a beam with a
wavelength λ that satisfies a resonance condition may be
transmitted through the image modulator 100. At this time, by applying a
reverse bias voltage to the image modulator 100, light absorption by the
active layer 120 may be controlled to modulate the intensity of the
transmitted beam.

[0065] Furthermore, there are the first and second micro-cavity layers 111
and 131 disposed in the lower and upper DBR layers 110 and 130,
respectively. The image modulator 100 may include any one of the first
and second micro-cavity layers 111 and 131 or may include both the first
and second micro-cavity layers 111 and 131. The first and second micro
cavity layers 111 and 131 serve as additional cavities for the
Fabry-Perot resonance. To do this, each of the first and second micro
cavity layers 111 and 131 may be formed to be a multiple of λ/2 in
optical thickness. Materials of the first and second micro cavity layers
111 and 131 may be identical to, for example, those of either the high
and low refractive index layers (e.g., Al0.2Ga0.8As and
AlorGa0.13As) in the lower and upper DBR layers 110 and 130.
Furthermore, the first micro-cavity layer 120 may be n-type doped to
forward a current to the activity layer 120, as well as the lower DBR
layer 110, while the second micro-cavity layer 131 may be p-type doped.

[0066] The lower DBR layer 110 is divided by the first micro cavity layer
111 into two parts. That is, a first lower DBR layer 112 is below the
first micro cavity layer 111, while a second lower DBR layer 113 is above
the first micro cavity layer 112. Similarly, the upper DBR layer 130 is
also divided by the second micro cavity layer 131 into two parts. That
is, a first upper DBR layer 132 is below the second micro cavity layer
131, while a second upper DBR layer 133 is above the second micro cavity
layer 131. Therefore, the image modulator 100 may have a multiple
Fabry-Perot resonant mode based on four mirrors 112, 113, 132, and 133
and three cavities 111, 120, and 131. Using the multiple Fabry-Perot
resonant mode may increase the transmission bandwidth of the image
modulator 100.

[0067] FIGS. 2A to 4B illustrate simple principles of how the transmission
bandwidths of the image modulator 100 increases according to the multiple
Fabry-Perot resonant mode.

[0068] First, as shown in FIG. 2A, in a case that a single cavity is
disposed between two mirrors R1 and R2, only one transmittance peak is
formed as shown in FIG. 2B. In FIG. 2B, phases refer to differences in
phase between incident and exiting beams to and from the image modulator
100, and the phase is zero at the Fabry-Perot resonant wavelength. Here,
it is assumed that cavity absorption is zero and reflectance of the two
mirrors R1 and R2 are the same. In addition, as shown in FIG. 3A, in a
case that two cavities are disposed between three miffors R1-R3, two
transmittance peaks are formed as shown in FIG. 3B. Phases at the two
peaks of the resonant wavelength are around 0 and 180 degrees,
respectively. Furthermore, as shown in FIG. 4A, in a case that three
cavities are disposed between four mirrors R1-R4, three transmittance
peaks are formed as shown in FIG. 4B. As such, as the number of cavities
increases, it is possible to increase transmission bandwidth due to
overlapping between resonant wavelengths. As shown in FIG. 5, in an
example of using four mirrors R1-R4 and three cavities, when the mirrors'
reflectance is symmetrically designed, i.e., R1=R4 and R2=R3, three
transmittance peaks would be the same. Alternatively, when a middle
mirror has higher reflectance than that of outer mirrors (i.e.,
R1=R4<R2=R3), a flat-top transmittance characteristic may be obtained
due to overlapping between the resonant wavelengths, as shown in FIG. 6.
In a case where the mirrors R1-R4 are the lower and upper DBR layers 110
and 130 as shown in FIG. 1, the reflectance may be proportional to the
number of pairs of high and low refractive index layers.

[0069] The transmission bandwidth of the image modulator 100 is also
affected by the light absorption property of the active layer 120. In
particular, a difference in transmittance, indicative of light modulation
performance of the image modulator 100, (i.e., a difference in
transmittance between when no voltage has been applied to the image
modulator 100 and when a voltage has been applied to the image modulator
100) may be significantly affected by the light absorption property of
the active layer 120 The light absorption property of the active layer
120 depends on thicknesses of the quantum well layer and the barrier
layer as well as compositions of their materials. For example, as the
thickness of the quantum well layer increases while other conditions
remain constant, an absorption coefficient peak shifts more toward long
wavelengths.

[0070] FIGS. 7A and 7B are graphs representing light absorption
characteristics of an active layer in which only a single type of quantum
well layer (e.g., a quantum well layer that is about 8 nm thick) is
arranged. Here, it is assumed that the active layer 120 is designed to
have an about 850 nm resonant wavelength. Referring to FIG. 7A, when no
voltage has been applied to the image modulator 100, there is exciton
absorption that occurs at the active layer 120 at a lower wavelength than
the resonant wavelength but there is almost no absorption at the resonant
wavelength, as indicated by a dashed line. Alternatively, when a reverse
bias voltage (e.g., about -8.1 V/um) has been applied to the image
modulator 100, an exciton peak shifts toward long wavelengths with
decreased magnitude, as indicated by a solid line. Here, the exciton peak
(e.g., at about 849.4 nm) nearly occurs at the resonant wavelength. Then,
as shown in FIG. 7B, transmittance at the resonant wavelength is lowered.

[0071] FIGS. 8A and 8B are graphs representing light absorption
characteristics of the active layer 120 in which two types of quantum
well layers (e.g., quantum well layers being that are about 8 nm and
about 8.5 nm thick) are arranged. Similarly here, it is assumed that the
active layer 120 is designed to have an 850 nm resonant wavelength.
Referring to FIG. 8A, the exciton absorption occurs at each of the about
8 nm and about 8.5 nm quantum well layers. When a reverse bias voltage is
applied to the image modulator 100, each of the exciton peaks shifts
toward long wavelengths, i.e., the exciton peak in the about 8 nm quantum
well layer shifts to about 849.4 nm, and that of the about 8.5 nm quantum
well layer shifts to about 853.9 nm. As shown in FIG. 8B, relatively low
transmittance may be obtained over a wide range of wavelengths, due to
the two exciton peaks near the resonant wavelength.

[0072]FIG. 9 shows a table of illustrative examples of structures and
thickness of layers of the image modulator 100, according to an exemplary
embodiment, considering what is described above. The image modulator 100
according to the table shown in FIG. 9 is designed to have about an 850
nm center absorption wavelength with a GaAs compound semiconductor.
Referring to FIG. 9, the second contact layer 140, which serves as a
p-contact layer, is made from p-GaAs. It is desirable to use a GaAs
material to form an ohmic contact in forming an electrode, because the
GaAs material has low oxidation rate on its surface and has a small band
gap. The thickness of the second contact layer 140 may be about 100 Å
considering an absorption loss of the incident beams.

[0073] The upper DBR layer 130 is disposed under the second contact layer
140. The upper DBR layer 130 may include a first upper DBR layer 132, a
phase matching layer 135, a second micro-cavity layer 131, and a second
upper DBR layer 133. The second upper DBR layer 133 has a structure in
which high and low refractive index layers 130a and 130b are alternately
stacked in order from the top. The high refractive index layer 130a may,
for example, be made from Al0.2Ga0.8As having a 3.483
refractive index, and in this case the thickness of the high refractive
index layer 130a may be about 610 Å. Then, the optical thickness of
the high refractive index layer 130a may be λ/4 (=850 nm/4=physical
thickness×refractive index (=610 Å×3.483)). The low
refractive index layer 130b may, for example, be made from
Al0.87Ga0.13As having a 3.096 refractive index, and in this
case the thickness of the low refractive index layer 130b may be about
685 Å. Then, the optical thickness of the low refractive index layer
130b may be λ/4 (=850 nm/4=physical thickness×refractive
index (=685 Å×3.096)). However, materials for the high and low
refractive index layers 130a and 130b are not limited to the above
examples, and other types and compound ratios of materials may also be
used for the high and low refractive index layers 130a and 130b.

[0074] The second micro cavity layer 131 is disposed under the second
upper DBR layer 133. Since there is the low refractive index layer 130b
disposed in the bottom of the second upper DBR layer 133, the second
micro-cavity layer 131 may be formed with Al0.2Ga0.8AS, the
same material as the high refractive index layer 130a. the thickness of
the second micro-cavity layer 131 may be about 2440 Å so that it may
have an optical thickness λ. However, the optical thickness of the
second micro-cavity layer 131 is not limited to λ, and may be
properly selected from among multiples of λ/2. Furthermore, if the
high refractive index layer 130a is disposed on the bottom of the second
upper DBR layer 133, the material of the second micro-cavity layer 131
can be the same as the low refractive index layer 130b. The phase
matching layer 135 is disposed under the second micro-cavity layer 131,
which has a thickness of λ/4. The phase matching layer 135 is
included to allow the high and low refractive layers 130a and 130b to
alternate with each other within the upper DBR layer 130. Accordingly, if
the second micro-cavity layer 131 is made from the same material as the
high refractive index layer 130a, the phase matching layer 135 may be
made from the same material as the low refractive index layer 130b.
Alternatively, If the second micro-cavity layer 131 is made from the same
material as the low refractive index layer 130b, the phase matching layer
135 may be made from the same material as the high refractive index layer
130a.

[0075] The first upper DBR layer 132 is disposed under the phase matching
layer 135. Similarly with the second upper DBR layer 133, the first upper
DBR layer 132 also has a structure in which the high and low refractive
index layers 130a and 130b are alternately stacked. Because the phase
matching layer 135 is made from the same material as the low refractive
index layer 130b, the high refractive index layer 130a may be disposed
first right under the phase matching layer 135.

[0076] As discussed above, the upper DBR layer 130 that includes the first
upper DBR layer 132, the phase matching layer 135, the second
micro-cavity layer 131, and the second upper DBR layer 133 is arranged
such that the high and low refractive index layers 130a and 130b, each
having a thickness of λ/4, alternate with each other. However, the
second micro-cavity layer 131 is not λ/4 but a multiple of
λ/2 in optical thickness. As such, for the formation of the upper
DBR layer 130, implementing the exact thickness of each film layers may
be crucial. To do this, for example, with in-situ optical reflectometry,
measurement and growth of respective film layers may be achieved. In
other words, while a film layer is growing as white light is projected
into Molecular Beam Epitaxy (MBE) equipment, beams reflecting back into a
substrate may be sensed and used to fine tune the thickness of the
respective film layers.

[0077] In addition, as already described earlier, the upper DBR layer 130
may serve as a passage through which a current flows. Thus, materials for
the first upper DBR layer 132, the phase matching layer 135, the second
micro-cavity layer 131, and the second upper DBR layer 133 may be p-doped
using Be as a dopant. The doping concentration may be about
0.8˜1.2×1019/cm3.

[0078] The active layer 120 is disposed under the upper DBR layer 130,
which absorbs light and serves as a main cavity. The active layer 120 may
include a plurality of quantum well layers 122 made of GaAs and a
plurality of barrier layers 123 which are disposed between the quantum
well layers 122 and made of Al0.31Ga0.69As. Additionally,
cladding layers 121 may further be disposed between the quantum well
layer 122 and the upper DBR layer 130 and between the quantum well layer
122 and the lower DBR layer 110, respectively. The refractive index of
GaAs, a material of the quantum well layer 122, is about 3.652, which
causes light loss between the low refractive index layer 130b (having a
refractive index of 3.096) in the upper DBR layer 130 and the quantum
well layer 122, and a low refractive index layer 110b in the lower DBR
layer 110 and the quantum well layer 122. Thus, to minimize the light
loss, the cladding layers 121 may have a middle refractive index between
those of the quantum well layer 122 and the low refractive index layers
110b and 130b. For example, the cladding layer 121 is made from
Al0.31Ga0.69As, which has about a 3.413 refractive index.

[0079] The optical thickness of the active layer 120 serving as the main
cavity may be a multiple of λ/2. For obtaining higher light
absorption, the optical thickness may also be selected from among, for
example, 3λ, 5λ, or 7λ. There is trade-off relation in
connection with the thickness of the active layer 120, i.e., as the
thickness of the active layer 120 increases, the absorption rate
increases and the capacitance of an associated device decreases, but the
manufacturing process becomes complicated and a driving voltage is
increased. The optical thickness of the active layer 120 may be adjusted
depending on the thickness and the number of quantum well layers 122 and
barrier layers 123 as well as the thickness of the cladding layer 121.
For example, in order to obtain a desired absorption characteristic, the
thicknesses and the number of quantum well layers 122 and barrier layers
123 are set, and then the thickness of the cladding layer 121 may be
selected such that the entire optical thickness of the active layer 120,
including the cladding layer 121, may be 3λ, 5λ, or 7λ.

[0080] The lower DBR layer 110 is disposed under the active layer 120. The
lower DBR layer 110 may include a first lower DBR layer 112, a first
micro-cavity layer 111, a phase matching layer 115, and a second lower
DBR layer 113. The second lower DBR layer 113 has a structure in which
low and high refractive index layers 110b and 110a are alternately
stacked in order from the top. The high refractive index layer 110a may,
for example, be made from Al0.2Ga0.8As having a 3.483
refractive index, and in this case the thickness of the high refractive
index layer 110a may be about 610 Å. The low refractive index layer
110b may, for example, be made from Al0.87Ga0.13As having a
3.096 refractive index, and in this case the thickness of the low
refractive index layer 110b may be about 685 Å. The phase matching
layer 115 is disposed under the second lower DBR layer 113, which has an
optical thickness of λ/4. The phase matching layer 115 is added so
that overall, the low and high refractive layers 110b and 110a may
alternate with each other within the lower DBR layer 110. For example, a
material of the phase matching layer 115 may be the same as the low
refractive index layer 110b.

[0081] The first micro-cavity layer 111 is disposed under the phase
matching layer 115. The first micro-cavity layer 111 may be made from the
same material as the high refractive index layer 110a, i.e.,
Al0.2Ga0.8As. The thickness of the first micro-cavity layer 111
may be about 2440 Å so that it may have an optical thickness λ.
The optical thickness of the first micro-cavity layer 111 is not limited
to λ, and may be properly selected from among multiples of
λ/2. If the phase matching layer 115 is made from the same material
of the high refractive index layer 110a, the material of the first
micro-cavity layer 111 may be the same as the low refractive index layer
110b. Lastly, the first lower DBR layer 112 may be disposed under the
first micro-cavity layer 111. Similarly with the second lower DBR layer
113, the first lower DBR layer 112 also has a structure in which the low
and high refractive index layers 110b and 110a are alternately stacked.

[0082] As already described above, the lower DBR layer 110 may also serve
as a passage through which a current flows. Thus, materials for the first
lower DBR layer 112, the first micro-cavity layer 111, the phase matching
layer 115, and the second lower DBR layer 113 may be n-doped with Si as a
dopant. The doping concentration may be about
2.0˜2.6×1018/cm3.

[0083] Furthermore, the first contact layer 102, which is made from n-GaAs
and has a thickness of about 100 Å, may be disposed under the lower
DBR layer 110. The first contact layer 102 may not only be formed
directly on the GaAs substrate 101, but may also be formed on an AlAs
buffer layer that is previously formed. In place of the AlAs buffer layer
and the n-GaAs contact layer, InGaP may be used for the first contact
layer 102. The transparent window 101a may be formed in the center region
of the GaAs substrate 101 in order to allow light to be transmitted
without loss. The transparent window 101a may be, for example, air.

[0084] Each of the film layers, such as the lower DBR layer 110, the
active layer 120, and the upper DBR layer 130 as described above, may be
epitaxially grown by a molecular beam epitaxy (MBE) method. As described
above, each of the film layers may be measured and grown in parallel
according to a reflectance measurement method, in order to grow each of
them at an exact set thickness. In this regard, the lower DBR layer 110,
the active layer 120, and the upper DBR layer 130 are collectively called
a "P-I-N epitaxy structure".

[0085] As illustrated in FIG. 9, the image modulator 100 has a four-minor
three-cavity structure in which there are four DBR mirrors, namely, the
first lower DBR layer 112, the second lower DBR layer 113, the first
upper DBR layer 132, and the second upper DBR layer 133, and three
cavities, namely, the active layer 120, the first micro-cavity 111, and
the second micro cavity 131. Here, the phase of light reflected on the
DBR mirrors may be π, 0, 0, and 0 in the order of light incidence (see
FIG. 4A). In other words, the phase in light reflected on the top surface
of the second upper DBR layer 133 lags by π with respect to the
incident light. Phases in light reflected on the remaining DBR layers
112, 113, and 132 may be in phase with the incident light.

[0086] The lower and upper DBR layers 110 and 130 may be symmetrically
formed about the active layer 120. For example, reflectance of the second
lower DBR layer 113 and the first upper DBR layer 132 may be the same,
and reflectance of the first lower DBR layer 112 and the second upper DBR
layer 133 may be the same. Reflectance of each DBR layer may be
determined according to the number of pairs of high and low refractive
index layers. In FIG. 9, R1, R2, R3, and R4 represent the number of pairs
of high and low refractive index layers within the second upper DBR layer
133, first upper DBR layer 132, the second lower DBR layer 113, and the
first lower DBR layer 112, respectively. R1, R1, R3, and R4 may be
properly selected according to optical characteristics required by the
image modulator 100. However, it is not necessary to symmetrically form
the lower and upper DBR layers 110 and 130, and one of the first and
second micro-cavities 111 and 131 may be omitted. Furthermore, a
plurality of micro-cavities may be disposed on at least one of the lower
and upper DBR layers 110 and 130.

[0087] In FIG. 9, X1 and X2 represent thicknesses of the quantum well
layers 122 and, may, for example, be selected from among 7 nm, 7.5 nm, 8
nm, and 8.5 nm. X1 and X2 may be the same or may be different. Y'
represents the number of quantum well layers 122, and Y-λ
represents the overall optical thickness of the active layer 120.
Y-λ, for example, may be selected from among 3λ, 5λ,
and 7λ. Y'' is a thickness of the cladding layer 121, and may be
determined together with X1, X2, Y', and Y after X1, X2, Y', and Y are
determined.

[0088] FIG. 10A shows illustrative a design result of the image modulator
100. Referring to FIG. 10A, the active layer 120 may include 137 quantum
well layers 122, which are 80 Å in thickness and 136 barrier layers
123, and the cladding layer 121 being 70 Å in thickness. Further, the
second upper DBR layer 133 has two pairs of the high and low refractive
index layers, the upper DBR layer 132 has eleven pairs of the high and
low refractive index layers, the second lower DBR layer 113 has eleven
pairs of the high and low refractive index layers, and the first lower
DBR layer 112 has two pairs of the high and low refractive index layers.
The overall thickness of the active layer 120 is 7λ.

[0089] FIG. 10B is a graph representing optical characteristics of the
image modulator 100 illustrated in FIG. 10A. In FIG. 10B, a line
represented by {circle around (1)} shows transmittance characteristics of
wavelengths, assuming that there is no active layer 120. A line
represented by {circle around (2)} shows transmittance characteristics
when no voltage has been applied to the image modulator 100, and a line
represented by {circle around (3)} shows transmittance characteristics
when a reverse bias voltage has been applied to the image modulator 100.
A line represented by {circle around (4)} shows the difference between
the transmittances of {circle around (2)} and {circle around (3)} lines
(hereinafter, referred to as a transmittance difference). As the
transmittance difference becomes large and its bandwidth (e.g., half
width at half maximum, HWHM) becomes large, the performance of the image
modulator 100 may be improved. The bandwidth of the transmittance
difference represented by line {circle around (4)} is about 9.4 nm.

[0090] FIG. 11A illustrates another design result of the image modulator
100. Referring to FIG. 11A, only in the upper DBR layer 130 is formed the
micro-cavity having a thickness of λ/2, and no micro-cavity is
formed in the lower DBR layer 110. Al0.31Ga0.69AS is used for
the high refractive index layer instead of Al0.2Ga0.8As, while
Al0.88Ga0.12AS is used for the low refractive index instead of
Al0.87Ga0.13As. The image modulator 100 may have two pairs of
second upper DBR layers 133, eleven pairs of first upper DBR layers 132,
a pair of second lower DBR layers 113, and a pair of first lower DBR
layers 112. Furthermore, the active layer 120 includes 74 quantum well
layers 122 that are about 85 Å in thickness and 60 quantum well
layers 122 that are about 80 Å in thickness. In other words, the
active layer 120 has two kinds of quantum well layers, which have
different thicknesses. The thickness of the cladding layer 121 is about
61 Å. The overall thickness of the active layer 120 is 7λ. The
first contact layer 102 on the bottom is made from n-GaAs that is about
500 Å in thickness. In the present embodiment, the first contact
layer 102 is designed to a thickness such that etch-stop may be easily
implemented in a subsequent electrode formation process.

[0091] FIG. 11B is a graph representing optical characteristics of the
image modulator 100 of FIG. 11A. In FIG. 11B, a line represented by
{circle around (1)} shows transmittance characteristics when no voltage
has been applied to the image modulator 100, and a line represented by
{circle around (2)} shows transmittance characteristics when a reverse
bias voltage has been applied to the image modulator 100. A line
represented by {circle around (3)} shows the transmittance difference
between the transmittances of {circle around (1)} and {circle around
(2)}. The bandwidth of the transmittance difference represented by
{circle around (3)} is about 10 nm.

[0092]FIG. 12A shows another exemplary design result of the image
modulator 100. Referring to FIG. 12A, the arrangement of the DBR layers
110 and 130 is similar to that of the DBR layers 110 and 130 shown in
FIG. 10A. However, the image modulator 100 shown in FIG. 12A has 12 pairs
of first and second lower DBR layers 132 and 113. The arrangement of the
active layer 120 is the same as the active layer 120 shown in FIG. 11A.
In detail, the active layer 120 includes 74 quantum well layers 122
having a thickness of about 85 Å and 60 quantum well layers 122
having a thickness of about 80 Å. The thickness of the cladding layer
121 is 61 Å, and the overall thickness of the active layer 120 is
7λ.

[0093]FIG. 12B is a graph representing optical characteristics of the
image modulator 100 illustrated in FIG. 12A. In FIG. 12B, a line
represented by {circle around (1)} shows transmittance characteristics of
wavelengths, assuming that there is no active layer 120. A line
represented by {circle around (2)} shows transmittance characteristics
when no voltage has been applied to the image modulator 100, and a line
represented by {circle around (3)} shows transmittance characteristics
when a reverse bias voltage has been applied to the image modulator 100.
Furthermore, a line represented by {circle around (4)} shows
transmittance difference between the transmittances of {circle around
(2)} and {circle around (3)}. The bandwidth of the transmittance
difference represented by line {circle around (4)} is about 10.6 nm, and
the summit part of the line became smoother.

[0094]FIG. 13A shows another exemplary design result of the image
modulator 100. Referring to FIG. 13A, the arrangement of the DBR layers
110 and 130 is similar to that of the DBR layers 110 and 130 shown in
FIG. 12A. In detail, the active layer 120 includes 75 quantum well layers
122 having a thickness of about 75 Å and 65 quantum well layers 122
having a thickness of about 80 Å. The thickness of the cladding layer
121 is about 83 Å, and the overall thickness of the active layer 120
is 7λ.

[0095]FIG. 13B is a graph representing optical characteristics of the
image modulator 100 illustrated in FIG. 13A. In FIG. 13B, a line
represented by {circle around (1)} shows transmittance characteristics of
wavelengths, assuming that there is no active layer 120. A line
represented by {circle around (2)} shows transmittance characteristics
when no voltage has been applied to the image modulator 100, and a line
represented by {circle around (3)} shows transmittance characteristics
when a reverse bias voltage has been applied to the image modulator 100.
Furthermore, a line represented by {circle around (4)} shows the
transmittance difference between the transmittances of {circle around
(2)} and {circle around (3)}. The bandwidth of the transmittance
difference represented by line {circle around (4)} is about 11.0 nm, and
the summit part of the line became smoother.

[0096] As described above, by forming at least one micro-cavity 111, 131
in the lower and upper DBR layers 110, 130 of the transmissive image
modulator 100 in the PIN structure, transmittance over a wide range of
wavelengths may be improved with a resonant wavelength mode having three
or more peaks. Since the micro cavities 111 and 131 are formed to
thicknesses of multitudes of λ/2 with high and low refractive index
materials, respectively, they may be easily implemented without a need
for a separate complicated process. Having a large transmittance
bandwidth and improved smoothness characteristics, the image modulator
100 may be observed to be stable from fluctuation of resonant wavelengths
due to an error in the process of manufacturing or according to an
external environment, such as temperature.

[0097] Since the image modulator 100 is transmissive, it is desirable to
remove the GaAs substrate 101 that absorbs light having an about 850 nm
waveband, so as to minimize light loss. As a way of removing the
substrate 101, there is a wet etching method for completely removing the
substrate 101, or an Epitaxy Lift Off (ELO) method for lifting off the
substrate 101. However, such a method may possibly damage other film
layers in the image modulator 100. Thus, in order to reduce uncertainty
from a complicated process of removing the substrate 101, a transparent
window 101a may instead be formed in a center of the substrate 101,
allowing light having an about 850 nm waveband to be transmitted by
removing a part of the substrate 101. However, etching the substrate 101
made from GaAs in an attempt to form the transparent window 101a may harm
the first contact layer 102 made from n-GaAs on the substrate 101.
Especially, the possibility of damaging the first contact layer 102 is
high because the first contact layer 102 is normally formed as thin as
about 50 nm so as to minimize the light loss from GaAs. However, using
n-AlGaAs rather than n-GaAs for the first contact layer 102 to prevent
the first contact layer 102 from being damaged from the etching makes it
difficult to form an electrode thereon.

[0098] FIGS. 14A to 14H are cross-sectional views schematically
representing a process of forming the transparent window 101a of the
substrate 101, considering the above limitations.

[0099] First, referring to FIG. 14A, a buffer layer 150 is formed on the
GaAs substrate 101. The buffer layer 150 may be made from AlAs. Then, the
first contact layer 102, the epitaxy layer 200, and the second contact
layer 140 are grown on the buffer layer 150 in sequence. The first
contact layer 102 may be, for example, made from n-GaAs, while the second
contact layer 140 may be made from p-GaAs. Here, the epitaxy layer 200
may include the lower DBR layer 110, the active layer 120, and the upper
DBR layer 130.

[0100] Then, referring to FIG. 14B, the thickness of the substrate 101 may
be reduced, for example, using a Chemical Mechanical Polishing method.
For example, an about 350 um-thick substrate 101 may be reduced to about
200 um. Then, Mesa etching is performed on the epitaxy layer 200 and the
second contact layer 140 to expose parts of the first contact layer 102.
First and second electrodes 161 and 162 may then be formed on the first
and second contact layer 102, respectively.

[0101] Referring to FIG. 14c, during subsequent dry and wet etching
processes, protection layers 151 and 152 may be formed to protect the
first contact layer 102, the epitaxy layer 200, the second contact layer
140, the first electrode 161, and the second electrode 162. The
protection layers 151, 152 may fully cover the bottom of the substrate
101, the second contact layer 140, the first electrode 161 and the second
electrode 162. The protection layers 151, 152 may be made from SiO2,
for example.

[0102] Next, as shown in FIG. 14D, a photoresist layer 153 is formed on
the surface of the lower protection layer 151 by patterning. As a result,
the photoresist layer 153 is formed along the edge of the lower
protection layer 151, and a central part of the lower protection layer
151 is exposed to the outside. Then, as shown in FIG. 14E, the central
part of the exposed lower protection layer 151 is removed through
etching. As a result, the central part of the substrate 101 may be
exposed to the outside.

[0103] Then, with a dry etching method, such as, Inductive Coupled Plasma
(ICP) etching, for example, as shown in FIG. 14F, the central part of the
substrate 101 may be removed. By dry etching, a part of the substrate 101
is not removed to an extent that the buffer layer 150 is exposed and a
part of the substrate 101 remains. Next, as shown in FIG. 14G, with a wet
etching method, the remaining part of the substrate 101 is finely etched.
For example, as an etching solution, hydroxide solution (NH4OH) may
be used. The wet etching is performed until the remaining part of the
substrate 101 is completely removed and the buffer layer 150 is exposed.

[0104] Finally, referring to FIG. 14H, SiO2 of the lower and upper
protection layers 151 and 152 may be removed with a buffer oxide etchant
(BOE). At this time, the buffer layer 150 that is exposed through the
central part of the substrate 101 may also be removed. According to the
process described so far, the transparent window 101a may be formed in
the substrate 101 while not damaging various film layers within the
epitaxy layer 200.

[0105] In the process illustrated in FIGS. 14A to 14H, GaAs is used for
the first contact layer 102. Alternatively, the transparent window 101a
may be formed with a different method when other materials than GaAs are
used for the first contact layer 102. For example, as a material for the
first contact layer 102, InGaP may be used. InGaP allows light of about
850 nm wavelength to be transmitted and also to easily form an electrode
thereon. Furthermore, InGaP may also serve as an etch stop layer for the
hydroxide solution used as an etching solution.

[0106] FIGS. 15A to 15C are cross-sectional views schematically
representing another process of forming the transparent window 101a of
the substrate 101 when InGaP is used for the first contact layer 102.

[0107] First, referring to FIG. 15A, the first contact layer 102, the
epitaxy layer 200, and the second contact layer 140 are grown on the GaAs
substrate 101 in sequence. The first contact layer 102 may be, for
example, made from n-InGaP while the second contact layer 140 may be made
from p-GaAs. The epitaxy layer 200 may include the lower DBR layer 110,
the active layer 120, and the upper DBR layer 130. On the contrary to
GaAs, InGaP brings less light loss when used for the first contact layer
102. In this case, the first contact layer 102 may be formed as thick as
possible, and thus, elaborateness of a subsequent process of etching the
substrate 101 is not required.

[0108] After that, the same process as in FIGS. 14B to 14E is performed.
That is, after the substrate 101 is polished, first and second electrodes
161 and 162 may be formed on the first and second contact layers 102 and
140, respectively. In addition, the protection layers 151 and 152 may be
formed to cover the bottom of the substrate 101 and the second electrode
162. Then, the photoresist layer 153 may be formed along the edge of the
lower protection layer 151, and a central part of the exposed lower
protection layer 151 may be removed via etching.

[0109] Next, as shown in FIG. 15B, with a wet etching method, a part of
the substrate 101 may be removed with an etching solution, such as, the
hydroxide solution (NH4OH). When InGaP is used as a material for the
first contact layer 102, only a part of the substrate 101 may be removed
in advance via dry etching. Etching continues until the substrate 101 is
completely removed and the first contact layer 102 made from InGaP is
exposed.

[0110] Finally, referring to FIG. 15c, SiO2 of the lower and upper
protection layers 151 and 152 may be removed with a proper BOE. At this
time, the buffer layer 150 that is exposed through the central part of
the substrate 101 may also be removed. According to the above process,
the transparent window 101a may be more simply formed in the substrate
101 while not damaging various other film layers within the epitaxy layer
200 without a need for the buffer layer 150.

[0111] Since the transparent window 101a is formed in the substrate 101,
the image modulator 100 may be weak to an external percussion. In this
regard, as shown in FIG. 16, a transparent supporting structure may be
mounted on the top of the image modulator 100. Referring to FIG. 16,
transparent epoxy resin 170 is applied onto the top of the image
modulator 100, on top of which a transparent cover 171 may be glued. The
transparent cover 171 may be made from, for example, glass or transparent
plastic materials. An anti-reflection layer, for example, may be coated
on the transparent cover 171 on the light-entering side.

[0112] The image modulator 100 may be positioned, for example, before a
photography device in a three dimensional image capturing device such
that a modulated image may be provided to the photography device. In a
case of manufacturing an image modulator to have the same size of a
Charged-Coupled Device (CCD) or complementary metal-oxide semiconductor
(CMOS), a capacitance of the image modulator 100 may be increased. The
increase in capacitance in turn causes an increase of an RC time
constant, thus limiting super-fast operations at about 20˜40 MHz.
Thus, in order to reduce the capacitance and a sheet resistance, a number
of small image modulators 100 may be arranged and used in an array form.

[0113]FIG. 17 schematically illustrates the image modulator array device
200 having the structure as described above. Referring to FIG. 17, the
image modulator array device 200 may include a print circuit substrate
201, a number of driving circuits 210 arranged on the print circuit
substrate 201, and an image modulator array 220 mounted on the print
circuit substrate 201. As shown in FIG. 17, the image modulator array 220
may include an array of image modulators 100 arranged in an insulation
layer 221. The number of driving circuits 210 and the image modulators
100 may be the same, wherein each driving circuit 210 may control a
respective image modulator 100 independently. The second electrode 162 is
disposed on the top surface of the image modulator 100 and is
electrically connected to a second electrode pad 223 formed on the
insulation layer 221. The second electrode pad 223 may be, in turn,
electrically connected to a corresponding driving circuit 210. The second
electrode 162 may be formed in a lattice in the shape of a fishbone, a
matrix, or a mesh. In addition, the first electrode 161 is disposed along
a circumference of the image modulator 100 and is electrically connected
to a first electrode pad 222 formed on the insulation layer 221. The
first electrode pad 222 may be connected to a common power source.

[0114] For the purpose of understanding the exemplary embodiments, the
embodiments of transmissive image modulators employing multiple
Fabry-Perot resonant modes and multiple absorption modes have been
described and shown in the accompanying drawings. It should be understood
that the exemplary embodiments described herein should be considered in a
descriptive sense only and not for purposes of limitation. Descriptions
of features or aspects within each embodiment should typically be
considered as available for other similar features or aspects in other
embodiments.