Fabrication Engineering at the Micro- and Nanoscale

Stephen A. Campbell

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.

Fabrication Engineering at the Micro- and Nanoscale

Stephen A. Campbell

Description

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.

With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.

Fabrication Engineering at the Micro- and Nanoscale

Stephen A. Campbell

Reviews and Awards

"This is one of the best texts in the field. It provides the most complete coverage of fabrication techniques."--Xian-An Cao, West Virginia University

"I like Campbell's style and enjoy reading the text. The material is appropriate for the intended audience and there are good summaries of background material."--Trevor Thornton, Arizona State University