Labworks technology in clean room characterisation - 4PMEM1D9

Number of hours

Lectures : 8.0

Tutorials : 0

Laboratory works : 12.0

Projects : 0

Internship : 0

ECTS : 2.0

Goals

The lecture will introduce the main technological steps and their key parameters, in order to prepare the students for the clean-room labwork. The labwork flow and steps will be benchmarked with respect to actual solutions used in the microelectronics industry. The aim the clean room labworks is to familiarize students with the technological operations for the elaboration of integrated circuits (NMOS process).Electrical characterization sessions will follow the realization in order to test the electrical behavior of the fabricated devices.

Evaluation for the lecture part: one hour exam. A report for the clean room sessions as well as a report for the electrical characterization sessions, to be held one week after the last session of each part.The behavior during the sessions will be taken into account.