Product Description

Vacuum coating machine mainly refers to a class of high vacuum required to carry out the coating equipment, the main idea is divided into two kinds of evaporation and sputtering. Vacuum coating machine application is very complex, users need to master a certain amount of operational knowledge. Xiaobian to the following detailed description of the vacuum coating machine operation method, hoping to help everyone. Electric control cabinet operation 1. Water pump, gas source. 2. Turn on the main power supply. 3. Open the pump, vacuum gauge power supply, vacuum gauge position V1 position, wait for its value is less than 10, and then enter the next step. It takes about 5 minutes. 4. Open the mechanical pump, to pump, open the turbo molecular pump power, start, vacuum switch to V2 position, pumping less than 2, about 20 minutes. 5. Observe the turbo molecular pump readings after reaching 250, off to the pump, before the machine and High valve to continue to vacuum, vacuum to reach a certain degree of time to open the right side of the high vacuum head, observe the vacuum. Vacuum to reach 2 × 10-3 to open the gun after the power supply. operating 1. total power supply. 2. At the same time open the gun control I and the electron gun control Ⅱ power: according to the electron gun control Ⅰ power supply, delay switch, delay, power and protection lights, three minutes after the delay and protection lights off, if the back door is not closed or water flow relay Failure, protection lights will be bright. 3. Open high pressure, high pressure will reach more than 10KV, adjust the beam can be about 200mA, curtain grid for the 20V / 100mA, filament current 1.2A, deflection current swing between 1 ~ 1.7. Shutdown order 1. Close high vacuum head, off molecular pump. 2. To be shown when the molecular pump to 50, followed by closing the valve, the former, mechanical pump, this period takes about 40 minutes. 3. To 50 or less, and then maintain the pump.

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