AbstractA combined layer structure of aluminum nitride (AlN) and silicon nitride (SixNy) enables the fabrication of multisegment piezo-actuated micro lenses with a precise control of the lens surface. It is demonstrated that these micro lenses offer free aspheric deformation of the lens surface and can operate at high repetition rates along with reproducible and precise tunability. The AlN/SixNy micro lenses are highly advantageous to be used as wave front filter or for fast focus correction.