TiN Hardmask Wet Etch: QUALI-SURF QSF-700

The QUALISURF QSF-700 control system is a fully automated chemical process control system designed to support AlN ESL Removal process in BEOL manufacturing of Logic chips. Get better utilization of your existing equipment by connecting QUALI-SURF to multiple tools and chemistries!

Supports Multiple Chemistries and Process Tools

Modular Design for Ultimate Flexibility

Precise Control of the Most Demanding Specs

Customized Metrology Proprietary Applications

Maximizes Up-Time and Reliability

Monitors Impact of Incoming Raw Material Variations

Analyzer Health Monitor Keeps Track of System Performance

Controls Advanced Cleaning Chemistries with Multiple Species

Rapid Conversion from R&D to HVM

Maintains Process Control Using Advanced SPC Capabilities

The Lowest CoO with the Highest Operational Convenience

Enables Chemical Vendors to Provide Metrology for Their Chemistries

Option – Benchtop analyzer for labs

Multi-channel capability to support all tanks for a process tool

Supports integration/communication with all the process tools and the Fab host for closed loop control

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ECI Technology

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Established in 1987, we boast thousands of satisfied customers worldwide. From R&D labs to high volume manufacturing environments, ECI’s products offer the best flexibility, accuracy, and reliability, where it matters most.