Spectral Reflectometer SP2006TM Series

Consult Verity for availability as this item is at End of Life.

Verity’s SP2006TM Spectral Reflectometer is designed for a wide variety of film thickness applications, including those required in etch, CVD and CMP processes. Verity Spectral Reflectometers are successfully controlling hundreds of semiconductor process tools worldwide.

The key components of the SP2006 are the SD1024FTM spectrometer, FL2006 Xenon flashlamp, and SpectraViewTM applications software. The heart of the SP2006 is the SD1024F Spectrometer, which uses a scientific grade CCD detector for excellent dynamic range, UV detection capability, and low noise. The SD1024F also has capability for multi-fiber input operation, and controls the flashlamp. The

FL2006TM flashlamp is a bright, broadband light source useful for the applications described herein. The FL2006’s output has a strong UV content thus enabling the measurement of relatively thin film layers that would not otherwise be possible using a reflectometer. Since a flashlamp is used, the motion of moving wafers does not result in the blurring of data, which enables more accurate measurement.

The SpectraView PC host application provides robust film thickness determination through a variety of “open” algorithms. SpectraView enables integration with tool-to-application-PC communication based on RS232, Ethernet or DI/O.

We’ve gone the extra mile, so you don’t go the extra nanometer.

Features & Benefits

Designed for in-situ or in-line measurement of film thickness in etch, CMP and CVD applications

Real-time measurement

SD1024F™ Spectrometer provides:

Excellent UV sensitivity

Wide dynamic range

Excellent S/N ratio

Multi-fiber input capability

Pulsed light source provides:

In-situ measurement by subtraction of plasma

Freeze-frame images in case of moving wafer

High brightness for excellent S/N ratio

Features & Benefits

SpectraView™ software provides:

Robust endpoint and film thickness algorithms

Open algorithms and sequences for flexibility

Tool integration via Ethernet, RS232, and DI/O

Usable range:

Standard: 225-800nm

Optional: <225-800nm

Fringe-count, reflectivity and model-based algorithms

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