MEI semiconductor wet process tools built to prevent contamination

April 27, 2012 — MEI makes batch immersion equipment for cleaning, etching, and developing microelectronics wafers, including silicon and gallium arsenide, as well as process control equipment and automation software. The PVC materials used to make process tools influence tool performance, safety in the fab, and chip quality. Semiconductor and solar are two of the most materials-/contamination-sensitive manufacturing sectors. MEI uses Vycom Flametec PVC-C for chemical rinse tanks and other wafer-contacting elements of its process tools, reducing tool-based contamination and protecting fab workers.

Wet process chemicals can be punishing to the equipment and its internal components. Older bench-construction materials were brittle, difficult to weld, and had color matching issues, said McGinty. An inherently clean material, PVC-C is resistant to bacteria, reducing contamination opportunities. It is abrasion resistant and easy to clean, reducing particulate contamination created from internal tool components rubbing together. Tool-created contamination can compromise the wafer bath and enable corrosion or contamination of tool components from wafer-processing chemicals.

Flametec PVC-C is also ANSI FM-4910 compliant, passing the Factory Mutual test for fire propagation and smoke density. Contamination from smoke particulates and toxicity can damage chips and endanger workers in the fab.

To build its automated wet processing systems housings and tanks, MEI starts with 5 x 8 and 5 x 10 PVC-C sheets, using multiple CNC router tables up to 10 feet long to cut and shape them according to designs made in SolidWorks. MEI obtains its PVC-C raw material — tens of thousands of pounds per year — through a stocking program with Vycom’s distributors.

Thermoplastic welds must be strong and precise to prevent leaks and contamination in the fab tool. PVC welders complete an apprentice program at MEI to learn timing, technique, pressure, and angle skills. After a year of training, welders are qualified to build the wet plenum — the tank area below the tool where chemicals and water drain — the most sensitive wet bench tool component.

MEI is a semiconductor process tool supplier. The company also develops process control equipment and automation software, and provides field service, repair, and retrofits on used equipment. Learn more at http://meillc.com/semiconductor-wet-benches.

FEATURED PRODUCTS

TECHNOLOGY PAPERS

Keysight Technologies’ popular 276-page Parametric Measurement Handbook is an invaluable reference tool for anyone performing device or process characterization. It is filled with tips to help both novice and advanced users, and the latest edition (Rev 4) includes an entirely new section devoted to power device test.February 27, 2019Sponsored by Keysight Technologies

Traditional root cause analysis in manufacturing uses summary data, which is ineffective in the face of complex issues stemming from subtle defects in a process. Full trace analytics, backed by powerful Artificial Intelligence (A.I.) algorithms, uses the entirety of all the sensor and tool data available in a production line for analysis, enabling fabrication engineers to quickly and accurately focus on the causes of issues that negatively affect yield, large and small.February 07, 2019Sponsored by BISTel

WEBCASTS

The semiconductor industry is an acknowledged global leader in promoting environmental sustainability in the design, manufacture, and use of its products, as well as the health and safety of its operations and impacts on workers in semiconductor facilities (fabs). We will examine trends and concerns related to emissions, chemical use, energy consumption and worker safety and health.

Extension Media websites place cookies on your device to give you the best user experience. By using our websites, you agree to placement of these cookies and to our Privacy Policy. Please click here to accept.