Monochromators

Description: The EP200™ Series monochromators are designed
to measure a single wavelength of light in the range of 185–925nm.
When used with Verity’s system controllers and the proper optical
input path, the EP200 Series provides robust endpoint detection for
production or research applications.

The EP200 Series is used extensively in semiconductor and related thin
film applications for endpoint detection in etch, CVD etchback, photoresist
stripping and related applications. The EP200Mmd is designed for manual
adjustment of wavelengths. The EP200Msd permits computer-controlled
spectral scanning through the use of a stepper motor, hardened lead
screw assembly and position encoders. These elements allow the scanning
monochromator to reposition itself for different wavelengths when a
process recipe changes or a new product calls for monitoring a new endpoint
emission. Performance of the EP200 Series monochromators is enhanced
by its wide spectral range, superior wavelength resolution (up to 0.2nm)
and extraordinary dynamic range of the photomultiplier tube (PMT).