Dragon® XP8 PECVD

​​​​Dragon XP8 is a high-productivity 300mm tool for PECVD applications. The Dragon XP8 PECVD system can be configured with up to four Dual Chamber Modules (DCM) enabling eight chambers in high-volume production within a very compact footprint.

DRAGON® XP8 BENEFITS

Dragon XP8 is the highest throughput single wafer PECVD tool in the industry.