Techniques available with this tool are X-ray photoelectron spectroscopy (XPS), angle-resolved XPS, depth profiling, and ultraviolet photoelectron spectroscopy (UPS). The transfer station allows platens to be introduced via either a transport pod or an atmospheric load lock; if necessary, they can be flipped to the correct orientation for analysis. These modifications do not hinder the tool from performing angle-resolved XPS measurements.

Unlike small-spot XPS tools that use a micro-focused X-ray beam, this tool uses a large-area X-ray flood source, combined with selectable apertures, to create a virtual X-ray probe. Small-area spectra can be acquired in spectroscopy mode from regions as small as 10 µm using an electrostatic deflection system to position the virtual probe anywhere on the sample. In parallel imaging mode, a direct chemical image or map of the surface with spatial resolution as small as 3 µm can be obtained without rastering the X-ray beam. Parallel images can thus be acquired more rapidly than traditional approaches to mapping, thereby reducing the potential for damage to samples sensitive to X-rays. A hemispherical analyzer and spherical mirror analyzer facilitate spectroscopy mode and parallel-imaging mode, respectively. A dual-anode Al and Ag X-ray source allows a wide range of core levels to be probed. An integrated sputter ion gun allows depth profile analysis.