abstract

In this paper, we propose two structures for electrostatically actuated torsional microresonators in order to improve their mechanical quality factor (Q). In order to attain higher Q-factors, various mechanisms that limit Q-value of microresonators are investigated. The dominant sources of energy loss were minimized through structural design considerations. Since anchor and support losses are known to be the dominant energy dissipation mechanisms for most resonators, including the torsional microresonators of this work, our main focus is to come up with design structures that lead to anchor loss reduction. Finite element analyses (FEA) were employed to verify the design principle. It is demonstrated that the results are in agreement with our expectations, validating the effectiveness of presented structures from the view point of anchor loss reduction and Q-factor boosting. To compare analytic and experimental results, the proposed structures are fabricated and will be tested.

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