Helium leak detection in semiconductor factories

Many hightech products only exist thanks to the semiconductor industry. Without it, the memory chips and processors used in modern communication media could not be produced. For their manufacture, extremely clean vacuum conditions are needed, which have to be monitored precisely.

A leak test is conducted in form of a measurement of pressure rise after having maintained a semiconductor production facility – known as “fab”. Only if the tightness of the system is approved, the process is being released. If the pressure rise is larger than a defined threshold value, the fab is closed and the leak detection started to localize a leak and repair it. With its broad service portfolio, Pfeiffer Vacuum provides optimal support by experts – even for on-site leak detection. Take a glance at a typical on-site service of one of our service engineers.

Read more about this state of the art technology in the attached application report.