Abstract

A 70 mm diameter 70 mm long compact ion source equipped with a hollow sputtering target has been designed and tested. The hollow sputtering target serves as the radio frequency (RF) plasma excitation electrode at 13.56 MHz. A stable beam of Cu+ has been extracted when Ar was used as the discharge support gas. In the extracted beam,Cu+ had occupied more than 85% of the total ion current. Further increase in Cu+ ions in the beam is anticipated by increasing the RF power and Ar pressure.

This work was supported in part by a Grant-in-Aid of MEXT (Ministry of Education, Culture, Sports, Science and Technology) of Japan for the Research Center of Applied Electromagnetic Energy of Doshisha University, as a part of MEXT's program to support Japanese private universities for establishing research centers of advanced sciences. This work has been also supported in part by Bilateral Joint Research Program sponsored by Japan Society of Promotion of Science and the Philippines’ Department of Science and Technology.