The investigators developed a Time-of-Flight Fourier Transformed Ion Energy Analyzer for space-resolved and energy-resolved observation of products in electron-or photo-stimulated desorption. In the present project, a multi-functionalized ultrahigh vacuum system was built to observe the coordination, energy state, and structure of absorbed reaction intermediates, by combining the analyzer with an Reflection Absorption Infared Spectroscope (RAIRS) .The RAIRS with a reaction chamber allowed us to observe in-situ surface reaction in atmospheric reactant ambient. The ion analyzer operated with pulsed electron beam enabled the detection of reaction intermediate in a time resolution as small as 20 ms.As the developing the system, thermal and photo induced reaction of alkygallium compounds on a Si (111) - (7*7) surface was studied by scanning tunneling spectroscopy (STM) . The decomposition of individual trimethylgallium and triethylgallium molecule was imaged. The manipulation of adsorbed formate, a simple organic molecule, was also successfully examined on TiO_2 (110) .さらに、光励起選択エピタキシ-に関する基礎研究として、Si(111)-(7×7)表面に吸着したトリメチルガリウム(TMG)・トリエチルガリウム(TEG)分子の光分解過程を、超高真空走査トンネル顕微鏡(UHV-STM)をもちいて観察した。熱あるいは紫外光の照射によりTMG・TEG分子が分解していく過程を分子レベルの分解能で初めてとらえることができた。また、STMによる吸着有機分子のナノ加工にも成功した。