E-616 Piezo Controller

AUBURN, Mass., Sept. 14, 2009 – PI (Physik Instrumente) LP has extended its E-616 multichannel controller line for piezo-based steering and stabilization mirror platforms. Four open- and closed-loop models are now available in benchtop and OEM module versions. The closed-loop units contain two servo controllers, sensor circuit channels and three power amplifiers that provide up to 10 W of peak power.

Piezo steering mirrors are faster than galvo mirror scanners and provide better resolution and stability due to their high-stiffness, solid-state piezo drives. They are used to steer or stabilize beams or to enhance image resolution. Applications include optical communications, astronomy, super-resolution microscopy and nanolithography.

The controllers can drive parallel-kinematics steering mirror designs. With the tripod design (for S-325 Z/tip/tilt mirrors), the platform is driven by three piezo actuators at 120° spacing. The quadra-pod differential drive design (as used in the S-330 and S-334 mirror models) runs two orthogonal axes with a fixed pivot point based on two pairs of actuators operating in push/pull-mode. The company says that the differential evaluation of two sensors per axis improves linearity, stability and resolution.

Parallel kinematics requires transformation of the commanded tilt angles into the corresponding linear motion of the individual actuators. In the E-616, this is taken care of by an integrated circuit, eliminating the need for additional external hardware or software. In the tripod version, all actuators can be commanded by an offset-voltage simultaneously, resulting in a vertical movement, for example for optical path length tuning.

To facilitate integration, setup and operation the controller features both front and rear panel connections: The 25 pin sub-D piezo and sensor connector is located on the front, along with offset trim pots and LEDs for power and overflow. A 32-pin rear connector enables commanding and reading of the sensor and amplifier monitor outputs.

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