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High Purity Filters

All-metal gas filters and systems in configurations ranging from 1 slpm to 200,000 slpm. Materials of construction include nickel, 316LSS and Hastelloy® which provide highly efficient filtration for processes used in the production of integrated circuits.

GasShield Point of Use Filters (<50 SLPM)

High purity low point of use gas filters for flows ranging from under 50 SLPM. Wide variety of hardware configurations, alloys, and filter micron sizes available to meet desired specifications.

GasShield Penta Filters

Bulk Gas & Utility Line Filters

These filters are designed to accommodate flows from 1,000 to 100,000 slpm with 316L SS or nickel filter elements. Other metal gas filter designs are available for higher pressures or highly corrosive gases.

OEM High Purity Filter Assemblies

Mott can provide a wide range of shapes, media grades, types of metal, and can apply advanced welding techniques to add fittings, housings and even fully automated systems. Many other OEM high purity filter assembly types are available.