Micro Probe Station is suitable to analyze the 'Electrical & Optical' properties of the materials.
Its advantage is the in-situ measurement of the electrical and optical properties under the various environmental conditions;
Vacuum,Temperature, Gas flow, Humidity, Irradiation of light.

Temperature Ranges

Peltier Stage -40 ℃ ~ 200 ℃

Resistor Heater StageRT ~ 750 ℃

Cryo Stage -196 ℃ ~ RT

Number of Probe

Standard Model For the analysis of most electrical properties

4 Ch Probes

6 Ch Probes

8 Ch Probes

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+ Providing various probe distributions
according to the electrodes and applications

Unique Probing Method

Quick & Easy
A unique probe module is only 30x20x20 mm. A stable contact is possible even on a 20x20 ㎛ contact pad.
As the probe module has a very flexible motion, it smoothly follows the displacement of the contact point caused by thermal expansion and maintains a stable contact.

hyperfinePiezo-Driven Positioner
When stability and resolution are of the utmost importance, the Piezo-Driven positioner provides the perfect solution. Positioners are ultra-compact and based on slides with linear ball bearings. They are well-suited for micro-positioning systems, where space is the top priority.

All probes have spring structure
inside and/or outside the probe module.
It never loses contact stability in gas flow and scanning experiments.
There is also a great advantage that the contact does not become unstable even if there is a movement due to thermal expansion and vibration.

The 20 &100 μm tip can be selected when the contact pad is small. For more precise probing, it is recommended to use optional Precise probing arm.
* The larger tip size, the better sample clamping force and durability.