Building a novel nanofabrication system using MEMS

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https://hdl.handle.net/2144/19737

Abstract

Micro-electromechanical systems (MEMS) are electrically controlled
micro-machines which have been widely used in both industrial applications and
scientific research. This technology allows us to use macro-machines to build
micro-machines (MEMS) and then use micro-machines to fabricate even smaller
structures, namely nano-structures. In this thesis, the concept of Fab on a Chip will be discussed where we construct a palette of MEMS-based micron scale tools including lithography tools, novel atomic deposition sources, atomic mass
sensors, thermometers, heaters, shutters and interconnect technologies that
allow us to precisely fabricate nanoscale structures and conduct
in-situ measurements using these micron scale devices. Such MEMS
devices form a novel microscopic nanofabrication system that can be integrated
into a single silicon chip. Due to the small dimension of MEMS,
fabrication specifications including heat generation, patterning resolution and
film deposition precision outperform traditional fabrication in many ways. It
will be shown that one gains many advantages by doing nano-lithography and physical
vapor deposition at the micron scale. As an application, I will showcase the
power of the technique by discussing how we use Fab on a Chip to conduct
quench condensation of superconducting Pb thin films where we are able to gently
place atoms upon a surface, creating a uniform, disordered amorphous film and
precisely tune the superconducting properties. This shows how the new set of
techniques for nanofabrication will open up an unexplored regime for the study
of the physics of devices and structures with small numbers of atoms.