Good Morning All,
Ted is out today. Things looking very good today. I will check out the DCS
flow this morning to see if the MFC calibration is way off at the low end of
the flow.
All else looking good.
Date:
1/29/2006
THICKNESS-Change at
Tube Name/Number
Status
Comments
Tylan 1
Up
Tylan 2
Up
Tylan 3
Up
Tylan 4
Up
Tylan 5-BBr3
Up
Tylan 6-POCl3
Up
Tylan 7-TEOS2
Up
.9/30
Tylan 8-SiGe
Up
30.17/30
Tylan 9-Poly
Up
5.72/30
Tylan 10-Nitride
Yellow
DCS flow concern
28.1/30
Tylan 11-BPSG-LTO
Yellow
Uniformity
3.32/30
Tylan 12-FGA
Up
Thermco 1
Up
Thermco 2
Up
Thermco Poly
Up
Thermco Nitride
Down
Testing
EPI
Yellow
Leak rate concerns
Burn Box
Up
ZYGO
up
GAAS 22
UP
GAAS 23
UP
SiH4 for furnaces
A on line 540
changeover working well
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