Abstract：A servo valve direct driven by piezoelectric actuator (PZT-DDV) using hydraulic amplification was researched. It takes advantage of the higher bandwidth and larger flow rate. The actuary model was built. The characteristic of PZT-DDV was investigated based on the co-simulation environment of AMESim and Simulink. By using AMESim the PZT-DDV nonlinear model and hydraulic environment have been set up. By using Simulink the digital controller model had been set up. LuGre friction model was used to estimate the friction force, feed forward and adaptive back stepping control was investigated to improve the hysteresis, friction and load sensitive characteristic of PZT-DDV. The simulation results demonstrate that the steady precision can be improved by the adaptive back stepping control and the dynamic performances can be improved by the feed forward control.

曹锋.压电液伺服阀结构设计及控制方法研究[D].北京:北京航空航天大学自动化科学与电气工程学院,2008 Cao Feng.Structural design and control methods of the piezoelectric hydraulic servo-valve[D].Beijing:School of Automation Science and Electrical Engineering,Beijing University of Aeronautics and Astronautics,2008 (in Chinese)

吴帅,康荣杰,俞军涛,等.VCM-DDV建模与控制仿真[J].北京航空航天大学学报,2010,36(3):342-345 Wu Shuai,Kang Rongjie,Yu Juntao,et al.Modeling of VCM-DDV and control simulation[J].Journal of Beijing University of Aeronautics and Astronautics,2010,36(3):342-345 (in Chinese)

吴帅,康荣杰,俞军涛,等.VCM-DDV建模与控制仿真[J].北京航空航天大学学报,2010,36(3):342-345 Wu Shuai,Kang Rongjie,Yu Juntao,et al.Modeling of VCM-DDV and control simulation[J].Journal of Beijing University of Aeronautics and Astronautics,2010,36(3):342-345 (in Chinese)