From eenriquez at snf.stanford.edu Wed Sep 1 07:54:00 2004
From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu)
Date: Wed, 1 Sep 2004 07:54:00 -0700
Subject: Shutdown gasonics SNF 2004-08-31 15:45:27: Shutdown
Message-ID:
Main pneumatic solenoid was not turning on. Found the output arm home sensor module was unplugged. This must have occured when the Coral wires got caught up in the output arm sensor flag. Cycled 9 wafers through the system with no problems.