VLSI Standards can provide deposition of polystyrene latex (PSL) spheres on either side of a reticle, and on either side of any of two optional pellicles applied to the reticle. The two sides of the reticle and the two sides of each of the optional pellicle define 6 surfaces onto which PSL spheres can be deposited. On each of these surfaces, PSL spheres can be deposited as a blanket deposition or as a spot deposition. A blanket deposition consists of spheres, all of the same size, uniformly distributes on the entire surface. A spot deposition consists of multiple sphere sizes, up to eight, deposited onto the surface. Each sphere size is deposited into a spot of approximately 20 mm in diameter.

Please refer to the drawing below to specify the depositions.

Fields marked with an asterisk (*) are required.

Name *

Company Name *

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City *

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Country *

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Title *

1.

Reticle

a.

Will you provide your own reticle?

Yes

No

If you answered "YES" to question 1a, please skip to question 2

b.

What reticle size do you require?

5" x 5" x 0.120"

6" x 6" x 0.250"

Other

c.

What pattern do you require on the reticle?

Clear

Antireflective Cr

Half clear and half antireflective Cr

Other

2.

Top pellicle

a.

Do you need a top pellicle?

Yes

No

If you answered "NO" skip to question 3.

b.

Will you provide your own top pellicle?

Yes

No

If you answered "YES" skip to question 3.

c.

What pellicle size (mm x mm) do you require?

d.

What size standoff (mm) do you require?

e.

What specific pellicle type do you require?

3.

Bottom pellicle

a.

Do you need a bottom pellicle?

Yes

No

If you answered "NO" skip to question 4.

b.

Will you provide your own bottom pellicle?

Yes

No

If you answered "YES" skip to question 4.

c.

What pellicle size (mm x mm) do you require?

d.

What size standoff (mm) do you require?

e.

What specific pellicle type do you require?

4.

Please fill in the tables below for the surfaces that need to be deposited, as applicable.

Use this table to specify blanket depositions

Sphere size [nm]

Number of spheres

S1

S2

S3

S4

S5

S6

Use this table to specify spot depositions

Spot #

Sphere size [nm]

Number of spheres

X coordinate of center of spot [mm]

Y coordinate of center of spot [mm]

S1

1

2

3

4

5

6

7

8

S2

1

2

3

4

5

6

7

8

S3

1

2

3

4

5

6

7

8

S4

1

2

3

4

5

6

7

8

S5

1

2

3

4

5

6

7

8

S6

1

2

3

4

5

6

7

8

The coordinate system is defined according to the figure below, with the reticle right reading, Cr side up. Please note that the reticle and pellicle have different coordinate system, each referenced to their lower left corner. The pellicle is always mounted centered with respect to the reticle.