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Quartz Via Etch Process End Point Detection Control Software

Publishing Venue

IBM

Related People

Smith, EG: AUTHOR

Abstract

Shown below is control software to effect the end of etch for a first level quartz via etch process step. The process end-point detection (PEPD) algorithm presented hereunder enhances formation of (first metal to second metal contact) vias. Additionally, the Quartz Via Etch PEPD algorithm detailed below can be used for etching second and third quartz vias.

Country

United States

Language

English (United States)

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Quartz Via Etch Process End Point Detection Control Software

Shown below is control software to effect the end of etch for a first level
quartz via etch process step. The process end-point detection (PEPD) algorithm
presented hereunder enhances formation of (first metal to second metal contact)
vias. Additionally, the Quartz Via Etch PEPD algorithm detailed below can be
used for etching second and third quartz vias.

In addition to signalling process end point time (t(E)), corresponding to a
point of radical departure on the reflectivity waveform, the Quartz Via Etch PEPD
algorithm supplies estimates of (1) quartz thickness removed and (2) quartz etch
rate (which can vary during the quartz etch process). An alternate process shut-
down scheme can be employed in place of that shown herein. Assume that (1)
etch rate is modeled as