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Accurate Parasitic RC Extraction using Realistic 3D TCAD Structures

Accurate determination of RC parasitics is a key component in the design and integration of many state of the art semiconductor technologies. Often, the traditional flow of using rule based parasitic extraction can fall short due to accuracy limits, or isn’t possible because the LPE rule decks are not available. To address this issue, physics-based parasitic extraction utilizing field solvers are an optimal solution. Field-based solutions are optimal as extraction can occur on realistic 3D geometries, accurately taking into account the more detailed geometric effects influencing RC parastics.

Presenter:

Dr. Garrett Schlenvogt is a Senior Applications Engineer within the Silvaco TCAD division, based out of Silvaco’s east coast sales/support office in North Chelmsford, Massachusetts. He has been with Silvaco for 5 years, with responsibilities including presales and support of Silvaco TCAD customers for a wide variety of applications including: Advanced CMOS, Display Technologies, Sensors and Power/RF devices. Additionally, Garrett has lead multiple research proposals and collaborations for Silvaco, working with both with academic and commercial institutions. Prior to joining Silvaco, he was a research assistance at Arizona State University, with research focused on reliability simulation and modeling of CMOS technologies for harsh environments.

Dr. Schlenvogt holds a BSE, MS, and Ph.D in Electrical Engineering from Arizona State University in Tempe, Arizona.

Who should attend:

Circuit designers desiring a higher level of detail and accuracy to further optimize RC parasitics in their designs. Process, Device and Integration Engineers looking to expand their device design and optimization work with 3D TCAD to consider the performance effects of RC parasitics.