ASML inks another litho deal

November 25, 2003 – A week after announcing a similar partnership with Dainippon Screen, ASML NV, Veldhoven, The Netherlands, has signed a deal with Tokyo Electron Ltd. to link the companies’ lithography and track systems.

ASML will install TEL’s Clean Track line with its Twinscan system in Japan, Europe, and the US starting in “early 2004,” with volume shipments slated for 2H04.

In the deal with Dainippon, ASML projected equipment move-in for November 2003 and initial shipments by January 2004.

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