Surface- or path-independent integrals based on the Maxwell stress tensor can be used to compute the forces and torques on micromachined electrostatic devices. The connection of these integrals with charge concentration near the edge of thin plate-like devices (combdrives) is discussed. To illustrate the use of these path-independent integrals, the force acting on a periodic array of asymmetric combdrives is evaluated.

Surface- or path-independent integrals based on the Maxwell stress tensor can be used to compute the forces and torques on micromachined electrostatic devices. The connection of these integrals with charge concentration near the edge of thin plate-like devices (combdrives) is discussed. To illustrate the use of these path-independent integrals, the force acting on a periodic array of asymmetric combdrives is evaluated.

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eng

en_US

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Institute of Physics Publishing. The Journal's web site is located at http://www.iop.org/journals/jmm

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dc.relation.ispartof

Journal of Micromechanics and Microengineering

en_HK

dc.title

Calculation of electrostatic forces and torques in MEMS using path-independent integrals