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This year the Advanced Lithography Conference felt very different to me than the last couple of years. I think it was Chris Mack who proclaimed it the year of Stochastics. EUV has dominated the conference for the last several years but in the past the conversation has been mostly centered on the systems, system power and uptime.

I will be writing up more detailed blogs from interviews with ASML and imec and their presentations, but I wanted to first present some overall impressions.

I was invited to present at Nikon's LithoVision event held the day before the SPIE Advanced Lithography Conference in San Jose. The following is a write up of the talk I gave. In this talk I discuss the three main segments in the semiconductor industry, NAND, DRAM and Logic and how technology transitions will affect lithography. Please note the slide numbering used in the article is matched to the slide numbers in the presentation.
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At IEDM in December I had a chance to interview Thomas Ernst about the paper "Performance and Design Considerations for Gate-All-around Stacked-NanoWires FETs" by Leti and STMicroelectonics.

Leti published the first stacked nanowire in 2006, it was very new then, now stacked nanowire/nanosheets are starting to show up in commercial roadmaps. IBM working with Samsung and GLOBALFOUNDRIES has published on 5nm nanosheets at VLSIT in 2017 and Samsung has announced a foundry roadmap including 4nm nanosheets
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As I have said many times, IEDM is one of the premier conferences for semiconductor technology. On Sunday before the formal conference started I took the "Boosting Performance, Ensuring Reliability, Managing Variation in sub-5nm CMOS" short course. The second module in the course was "Multi-Vt Engineering and Gate Performance Control for Advanced FinFET Architecture" taught by Steven Hung of Applied Materials. This excellent module was particularly timely because GLOBALFOUNDRIES and Intel gave papers on their 7nm
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I was invited to give a talk at the ISS conference on the Impact of EUV on the Semiconductor Supply Chain. The ISS conference is an annual gathering of semiconductor executives to review technology and global trends. In this article I will walk through my presentation and conclusions.
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At the IEDM 2017, imec held an imec technology forum and presented several papers, I also had the opportunity to interview Anda Mocuta director of technology solutions and enablement. In this article I will summarize the keys points of what I learned about the future of logic. I will follow this up with a later article covering memory.

Imec is one of the premier semiconductor research organizations in the world today and their work, and the papers and forums describing it, are always
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The 63rd annual IEDM (International Electron Devices Meeting) will be held December 2nd through 6th in San Francisco. In my opinion IEDM is one of, if not the premier conference on leading edge semiconductor technology. I will be attending the conference again this year
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At the imec technology forum held at SEMICON West, Martin Van Den Brink, President and CTO of ASML presented on the latest developments on EUV. I also had an opportunity to sit down with Mike Lercel, ASML Director of Strategic Marketing for an interview.

At SEMICON West I attended the imec technology forum where Zsolt Tokei presented "How to Solve the BEOL RC Dilemma" and the SEMICON Economics of Density Scaling session where Larry Clevenger of IBM presented "Interconnect Scaling Strategic for Advanced Semiconductor Nodes". I also had the opportunity to meet with Tanaka Precious Materials and hear about their new Ruthenium precursor material. In this blog I will discuss back end of line
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At Semicon West last week I attended presentations by Soitec and CEA Leti, and had breakfast with CEA Leti CEO Marie Semeria, key members of the Fully Depleted Silicon On Insulator (FDSOI) ecosystem. I have also seen some comments in the SemiWiki forum lately that make me believe there is some confusion on the roles of different companies in the FDSOI ecosystem. In this article, I will review the key players and their roles and then discuss the
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