FloTHERM is powerful 3D computational fluid dynamics (CFD) software that predicts airflow and heat transfer in and around electronic equipment, from components and boards up to complete systems. Learn More →

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Course Highlights

The lecture modules will guide you through the various concepts underlying state-of-the-art RET/OPC techniques and specific aspects of the Calibre toolset. Hands-on lab exercises will reinforce lecture topics and provide you with rule writing experience under the guidance of our industry expert instructors.

You will learn how to

Use Calibre nmBIAS for rule-based retargeting

Use Calibre nmSRAFTM to insert sub-resolution assist features (SRAFs) into a design

Use Calibre PIXbar to automatically generate SRAFs

Modify SRAF generation using various options

Find and correct SRAF conflicts with Mask Rule Constraints (MRCs)

Create Calibre nmOPCTM setup files

Specify various nmOPC options and simulation settings

Control fragmentation options

Manage OPC correction and convergence

Write simple nmOPC TCL scripts

Apply Calibre Process Window OPC (PWOPC) to meet the challenges of the real world lithography process

Use Calibre SRAF Print Avoidance (SPA) to detect and prevent sub-resolution assist features (SRAFs) from printing

Integrate OPCverifyTM into the post-tapeout flow

Write and execute simple OPCverify rule decks

Generate a basic OPCverify setup file for layer verification

Perform process window verification in both production and recipe development flows

Use limiting code in OPCverify to reduce error output

Analyze OPCverify tabular property data with the Calibre RVE GUI

Hands-on labs

Running Calibre nmBIAS in rule mode and table mode

Using LFT for nmSRAF template setup

Generating SRAFs with Calibre PIXbar

Using RectCorner and RectEdge with SRAF templates

Using various SRAF options

Modifying the minfeaturespace value specified in the setup file in order to get the rectCorner template to resolve