Good Morning All,
Looking pretty good this morning. Nitride is getting very close to
pull and clean, I have reserved Monday but it might not make it.
Burn box has high pressure this morning and it doesn't look like there
are any gaps to take it down! Still doing temp cal on SiGe.
MFC for TEOS 2 should be here next week. Replaced temp firing board on
TEOs. Everything else looking OK.
Diffusion Date: 3/16/2004
Tube Name/Number Status Comments THICKNESS-Change at
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-TEOS2 down Waiting for Mfc-3/26 delivery
Tylan 8-SiGe down Temp cal 5.4/30
Tylan 9-Poly Up 8.1/30
Tylan 10-Nitride yellow particles 28.4/30
Tylan 11-BPSG-LTO Up 1.63/30
Tylan 12-FGA Up
Tystar Up 1.2/30
Doped Poly GONE
TEOS yellow running
Tylan 16 N/A
Burn Box Up
ZYGO yellow keyboard problem
GAAS 22 UP
GAAS 23 UP
SiH4 for furnaces Auto changeover working well A on line 660 PSI
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