Those sitting in pews during the private service included stars Cate Blanchett with her husband, Andrew Upton, Michelle Williams, Ashley Olsen, Mary-Louis Parker, Marisa Tomei, Louis CK, Joaquin Phoenix and Meryl Streep. Many of them also attended the actor's wake Thursday night.

Hoffman leaves behind his longtime girlfriend, costume designer Mimi O'Donnell, and their three young children. The family is planning a larger memorial for the end of the month.

"In lieu of flowers, the family requests donations be made in Phil's name to two charities that were very close to his heart: The DreamYard Project (http://dreamyard.com/) and the Christopher and Dana Reeve Foundation (www.christopherreeve.org)," they said in a statement, provided to ABC News by the late actor's publicist. "The family wishes to thank everyone for their continued support and good wishes."