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About Optics & Photonics TopicsOSA Publishing developed the Optics and Photonics Topics to help organize its diverse content more accurately by topic area. This topic browser contains over 2400 terms and is organized in a three-level hierarchy. Read more.

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Abstract

An iterative algorithm to analyze three-flat test data for absolute planarity measurements is presented. Using the properties of Zernike polynomial representations, results are achieved in a fast and effective manner. Details and demonstrative examples are provided.

International Bureau of Weights and Measures, International Electrotechnical Commission, International Federation of Clinical Chemistry, International Organization for Standardization, International Union of Pure and Applied Chemistry, International Union of Pure and Applied Physics, and International Organization of Legal Metrology, Guide to the Expression of Uncertainty in Measurements (International Organization for Standardization, Geneva, 1993).

Other (2)

International Bureau of Weights and Measures, International Electrotechnical Commission, International Federation of Clinical Chemistry, International Organization for Standardization, International Union of Pure and Applied Chemistry, International Union of Pure and Applied Physics, and International Organization of Legal Metrology, Guide to the Expression of Uncertainty in Measurements (International Organization for Standardization, Geneva, 1993).