MEMS/NEMS Sensors

Rapid development of micro-fabrication technology is allowing both the academia and the industry to pursue mass fabrication of high-precision navigation grade motion sensing. The technology once considered as exclusively for aerospace navigation, is now being regarded as within reach for a range of day-to-day motion sensing applications such as in smart phones, camera and gaming console. This research project search for an innovative 3D design, fabrication and packaging prospect for MEMS based ultra-precision gyroscopes with robust mechanical materials that have never been explored before in MEMS.