System Design Optimazation

Type and position of vaporizing source used for OLED thin film manufacturing is closely related to material using efficiency, thin film’s evenness, mask temperature, etc.
The longer distance between vaporizing source and substrate (TS) is, the lower materials using efficiency is as well as the lower deposition speed and thin film’s evenness is.
On the other hand, if temperature delivered from vaporizing source to mask is decreased, mask deformation and its drooping phenomenon can be reduced.
Therefore, vaporizing source and its position should be designed under optimized condition according system’s using purpose by deciding if material using efficiency is important or thin film’s evenness is important.