TurboDisc MaxBright® MHP™ GaN MOCVD Multi-Reactor System

The TurboDisc MaxBright® MHP™ GaN MOCVD Multi-Reactor System features a breakthrough in yield performance. As the industry's most productive MOCVD system designed to manufacture high quality, high brightness light emitting diodes (LEDs), the MaxBright MHP provides as much as 20% within-wafer wavelength uniformity improvement compared to the MaxBright. Higher yields are achieved from technology advancements that result in improved thermal and flow capability. Enhanced heat management during the process cycle within each reactor results in improved thermal uniformity across all wafers. The MaxBright MHP leverages Veeco’s production-proven Uniform FlowFlange® technology and automation expertise by combining multiple high throughput reactors in 2- or 4-reactor cluster architecture resulting in an improved yield rate.