SemiConductor Wafer Loader

Nikon NWL200

The NWL200 series is the first lineup of wafer loaders for inspection microscopes capable of loading 100 micron thin wafers. Thanks to a new chuck system, the NWL200 series achieves highly reliable loading suitable for inspection of next-generation semiconductors. Improved wafer-sensing functions also help prevent damage to wafers, while wafer edge-chipping detection automatically detects edge-chipping defects.