SURFACE ACOUSTIC WAVE DEVICE
A surface acoustic wave device arranged such that pyroelectricity of a piezoelectric substrate is not revived, and a process for fabricating that device. The piezoelectric substrate (12) of a surface acoustic wave element (10) being cont...

WO/2005/083881A1

SURFACE ACOUSTIC WAVE DEVICE
A surface acoustic wave device such that the resonance frequency and the center frequency can be easily adjusted, the frequency temperature characteristic is favorable, the specific bandwidth is wide, and the antiresonance resistance is ...

WO/2005/081272A1

LC COMPOSITE COMPONENT
The LC composite component of the present invention comprises a base, a first to third terminals provided on the base, a helical conductor provided on the base, and an internal layer conductor inside the base, the internal layer conducto...

ELECTRICAL COMPONENT AND PRODUCTION METHOD
The invention relates to a modularly constructed electrical component having a module substrate preferably made of Si and having one or more preferably unhoused chips, which are placed on this module substrate while being electrically co...

METHOD FOR FABRICATING PIEZOELECTRIC ELEMENT
A mask material (12) applied to the surface to be processed of a piezoelectric material (11) is brought into contact with solvent vapor (V) and reflowed, and then shaped into a bump mask (14) where the central part is raised by the surfa...

ELECTRONIC COMPONENT MANUFACTURING METHOD
An electronic component manufacturing method in which few voids in the resin encapsulation portion are produced, degradation of the characteristics hardly occurs, and the cost can be reduced. The method includes a reduced-pressure packin...

WO/2005/069486A1

ACOUSTIC BOUNDARY WAVE DEVICE
An acoustic boundary wave device (1) using an acoustic boundary wave of SH type. The devise effectively suppresses unwanted spurious and have a good resonance characteristic and a filter characteristic. Electrodes including an interdigit...

THERMAL-MECHANICAL SIGNAL PROCESSING
A source signal is converted into a time-variant temperature field with transduction into mechanical motion. In one embodiment, the conversion of a source signal into the time-variant temperature field is provided by utilizing a micro-fa...

MECHANICAL RESONATOR
A sensor and methods for making and using the same in which a mechanical resonator is employed, comprising a resonator portion for resonating in a fluid without the substantial generation of acoustic waves; and an electrical connection b...

WO/2005/048450A1

SEMICONDUCTOR DEVICE WITH A RESONATOR.
The present invention relates to a method of manufacturing a resonator within a semiconductor device, said semiconductor device comprising a substrate, wherein said method comprises the steps of: - etching a hole in the substrate, - crea...

WO/2005/046051A1

MICRO-RESONATOR AND COMMUNICATION APPARATUS
A micro-resonator wherein the combined impedance of the resonator can be reduced so as to allow the resonator to be applied to a desired device. A communication apparatus having a filter comprising such a micro-resonator. The micro-reson...

WO2005020434A3

SHELL TYPE ACTUATOR
A micromechanical resonator (400, 1125) is formed on a substrate (120). The resonator has a partial spherical shell (110) clamped on an outside portion of the shell to the substrate. In other embodiments, a flat disc or other shape may b...

WO2005006432A3

ELECTRONIC COMPONENT AND METHOD FOR PRODUCTION THEREOF
The invention relates to the formation of vertical electrical through contacts in a support substrate, on the surface of which component structures are fixed, whereby the component structures are associated with contact surfaces, arrange...

WO/2005/035436A2

MEMS DEVICE ANNEALING BY LASER
A method of increasing a quality factor for a micromechanical resonator uses a laser beam to anneal the micromechanical resonator. In one embodiment, the micromechanical oscillator is formed by fabricating a mushroom shaped silicon oscil...

WO2004059836A8

PIEZOELECTRIC MEMS RESONATOR
A longitudinal mode resonator that includes a substrate and a bar that is suspended relative to the substrate. The bar is suspended such that it is free to expand and contract longitudinally in response to the application of an electric ...

WO/2005/034347A1

SURFACE ACOUSTIC WAVE DEVICE
A surface acoustic wave device having a structure where an insulator layer is formed to cover an IDT electrode. The reflection coefficient of the IDT is sufficiently high and deterioration of the characteristics due to undesired ripple c...

RESONATOR STRUCTURE AND METHOD OF PRODUCING IT
In order to provide a resonator structure (100) in particular a bulk-acoustic-wave (BAW) resonator, such as a film BAW resonator (FBAR) or a solidly-mounted BAW resonator (SBAR), comprising at least one substrate (10); at least one refle...

STRUCTURE AND METHOD OF MAKING SEALED CAPPED CHIPS
A method of making one or more sealed assemblies is provided which includes assembling a first element to a second element so that a bottom surface of the first element faces downwardly toward a front surface of the second element and a ...

PIEZOELECTRIC RESONANT COMPONENT
A piezoelectric resonant component utilizing a basic wave and having good characteristics in which a spurious resonance due to a high order mode is suppressed. The piezoelectric resonant component (1) comprises a plurality of resonance e...

WO/2005/020482A2

THERMAL-MECHANICAL SIGNAL PROCESSING
A source signal is converted into a time-variant temperature field with transduction into mechanical motion. In one embodiment, the conversion of a source signal into the time-variant temperature field is provided by utilizing a micro-fa...

WO/2005/020434A2

SHELL TYPE ACTUATOR
A micromechanical resonator (400, 1125) is formed on a substrate (120). The resonator has a partial spherical shell (110) clamped on an outside portion of the shell to the substrate. In other embodiments, a flat disc or other shape may b...

QUARTZ OSCILLATOR
In the step of the occurrence of a single cancer cell at the early stage in, for example, the liver of the human body, a protein characteristic to liver cancer is discharged from the caner cell occurring in the liver and dissolved in the...

PIEZOELECTRIC DEVICE AND METHOD OF PRODUCING THE SAME
A piezoelectric element plate is rectangular as seen from above. Its upper surface is formed to be flat, while its lower surface has a beveling arc applied thereto. The piezoelectric element plate is mounted on a package by adsorbing one...

WO/2005/006432A2

ELECTRONIC COMPONENT AND METHOD FOR PRODUCTION THEREOF
The invention relates to the formation of vertical electrical through contacts in a support substrate, on the surface of which component structures are fixed, whereby the component structures are associated with contact surfaces, arrange...

RADIAL BULK ANNULAR RESONATOR USING MEMS TECHNOLOGY
A MEMS resonator includes an annular resonator body defined by an inner radius and an outer radius, a first electrode positioned within the inner radius and spaced from the resonator body, and a second electrode positioned around the ann...

WO2004013893B1

PIEZO ELECTRIC ON SEMINCONDUCTOR ON- INSULATOR RESONATOR
A piezoelectric resonator (205) is disclosed. In one embodiment the piezo electric resonator includes a semiconductor material (206) an electrode (210) and a piezo electric material (208) disposed between the semiconductor material and t...

WO/2004/109912A1

SAW DEVICE MANUFACTURING METHOD
An SAW device has a hermetically sealed space defined under an IDT by covering the outer surface of an SAW chip mounted on a mounting board with a resin sheet softened by heating and by filling the SAW chip with resin. The SAW device has...

WO/2004/103932A1

PIEZOELECTRIC MATERIAL WORKING METHOD
A mask (14) having a predetermined film thickness distribution is arranged on a piezoelectric material substrate (11), which is subjected to dry etching by using a working speed difference between the piezoelectric material substrate (11...