Transpector® XPR3L Gas Analysis System

Monitoring process gases and base vacuum conditions is an affordable and efficient RGA with the Transpector ® XPR3L Gas Analysis System. PVD process monitoring with the XPR3L provides real-time data on process gas pressures, gas ratios, contamination levels, impurities, and leaks. This information can be used to maximize both process yield and product quality. Background monitoring with the XPR3L can make preventive maintenance programs more efficient and effective by quickly detecting and diagnosing leaks and contaminants.