Sample records for inductive plasma source

The subject of this paper is the review of inductively coupled plasma (ICP) sources enhanced with ferromagnetic cores, FMICP, found in various applications, including plasma fusion, space propulsion, light sources, plasma chemistry and plasma processing of materials. The history of FMICP, early attempts for their realization, some recent developments and examples of successful FMICP devices are given here. A comparative study of FMICPs with conventional ICPs demonstrates their certain advantages in power transfer efficiency, power factor and their ability to operate without rf plasma potentials at low plasma densities and with small gaps, while effectively controlling plasma density profile.

A novel pulsed, neutralized ion beam source is provided. The source uses pulsed inductive breakdown of neutral gas, and magnetic acceleration and control of the resulting plasma, to form a beam. The beam supplies ions for applications requiring excellent control of ion species, low remittance, high current density, and spatial uniformity.

A resonant planar antenna as an inductiveplasmasource operating at 13.56 MHz inside a low pressure vacuum vessel is presented for potential plasma processing applications. Its principle consists in interconnecting elementary resonant meshes composed of inductive and capacitive elements. Due to its structure, the antenna shows a set of resonant modes associated with peaks of the real input impedance. Each of these modes is defined by its own current and voltage distribution oscillating at the frequency of the mode. A rectangular antenna of 0.55mx0.20m has been built, and first results obtained with argon plasmas are presented. Plasma generation is shown to be efficient as densities up to 4{center_dot}10{sup 17}m{sup -3} at 2000 W have been measured by microwave interferometry at a distance of 4 cm from the source plane. It is also demonstrated that the plasma couples inductively with the resonating currents flowing in the antenna above a threshold power of about 60 W. A non-uniformity of less than {+-}5% is obtained at 1000 W at a few centimeters above the antenna over 75% of its surface.

The characteristics of a line-type, internal antenna for an inductively coupled plasma (ICP) source installed with a ferromagnetic module were investigated for possible application to roll-to-roll processing of next-generation display devices. The use of 2 MHz instead of 13.56 MHz for the 2300 mm long ICP source improved the plasma uniformity to less than 11% along the antenna line. In addition, the use of Ni-Zn ferromagnetic material in the line-type antenna improved the plasma density to about 3.1 × 1011 cm-3 at 3500 W of 2 MHz radio frequency power by confining the induced, time-varying magnetic field between the antenna line and the substrate. When the photoresist-covered glass substrate was etched at 4000 W using 40 mTorr and Ar/O2 (7 : 3), an etch uniformity of about 5-6% was obtained along the antenna line.

Plasma characteristics and electrical parameters of an internal linear inductively coupled plasma (ICP) source with a U-type antenna with/without a Ni-Zn ferromagnetic material installed near the antenna were investigated. The application of the ferromagnetic material to the antenna increased the plasma density, improved the plasma uniformity, lowered the antenna voltage, and increased the stability of the plasma during the operation. For the U-type ferromagnetic enhanced internal linear ICP source, a high density plasma on the order of 4.5×1011 cm-3 which is about three higher than that obtained for the source without the ferromagnetic material could be obtained at the pressure of 10 mTorr Ar and at the RF power of 600 W at 13.56 MHz.

U-shaped inductively coupled plasma (ICP) source was investigated as a linear plasmasource for the next generation roll-to-toll flexible display processing. For the radio frequency power to the source, the dual frequency composed of 13.56 MHz and 2 MHz was used and the effect of dual frequency to the U-shaped ICP source on the plasma density, electron temperature, and plasma uniformity was investigated. As the operating condition, 200 mTorr Ar was used without operating turbo pumps. The use of superimposed dual frequency composed of 13.56 MHz + 2 MHz instead the single frequency of 13.56 MHz increased the plasma density slightly at the same total power. In addition, the addition of 2 MHz rf power to 0.4 kW while maintaining 1 kW 13.56 MHz rf power not only decreased electron temperature but also improved both the plasma uniformity and the process uniformity measured by photoresist etching. Therefore, by using the dual frequency to the U-shaped ICP source, not only the plasma density but also plasma uniformity could be improved in addition to the decrease of possible damage to the substrate. PMID:26726573

The inductively heated plasma generator (IPG6-B) located in the CASPER labs at Baylor University has recently been characterized for both air, nitrogen and helium. A primary area of research within the intended scope of the instrument is the analysis of material degradation under high heat fluxes such as those imposed by a plasma during atmospheric entry of a spacecraft and at the divertor within various fusion experiment. In order to achieve higher flow velocities and respectively higher heat fluxes, a new exit flange has been designed to allow the installation of nozzles with varying geometries at the exit of the plasma generator. This paper will discuss characterization of the plasma generator for a convergent nozzle accelerating the plasma jet to supersonic velocity. The diagnostics employed include a cavity calorimeter to measure the total plasma power, a Pitot probe to measure stagnation pressure and a heat flux probe to measure the local heat flux. Radial profiles of stagnation pressure and heat flux allowing the determination of the local plasma enthalpy in the plasma jet will be presented. Support from the NSF and the DOE (award numbers PHY-1262031 and PHY-1414523) is gratefully acknowledged.

In close collaboration between the Center for Astrophysics, Space Physics and Engineering Research (CASPER) at Baylor University, Texas, and the Institute of Space Systems (IRS) at the University of Stuttgart, Germany, two plasma facilities have been established using the Inductively heated Plasma Generator 6 (IPG6). The facility at Baylor University (IPG6-B) works at a frequency of 13.56 MHz and a maximum power of 15 kW. A vacuum pump of 160 m3/h in combination with a butterfly valve allows pressure control over a wide range. Intended fields of research include basic investigation into thermo-chemistry and plasma radiation, space plasma environments and high heat fluxes e.g. those found in fusion devices or during atmospheric re-entry of spacecraft. After moving the IPG6-B facility to the Baylor Research and Innovation Collaborative (BRIC) it was placed back into operation during the summer of 2014. Initial characterization in the new lab, using a heat flux probe, Pitot probe and cavity calorimeter, has been conducted for Air, Argon and Helium. The results of this characterization are presented.

The variation in plasma uniformity over an extremely large size inductively coupled plasma (ICP) source of 2750×2350mm2 was examined. An internal linear-type antenna called "double comb-type antenna" was used as the ICP source. A plasma density of ˜1.4×1011/cm3 could be obtained at 5mTorr Ar by applying 10kW rf power to the source at a frequency of 13.56MHz. An increase in rf power from 1to10kW improved the plasma uniformity over a substrate area of 2300×2000mm2 from 18.1% to 11.4%. The improvement in uniformity of the internal ICP source was attributed to the increase in plasma density near the wall.

In this study, we attempted to determine the possibility of multiple inductively coupled plasma (ICP) and helicon plasmasources for large-area processes. Experiments were performed with the one and two coils to measure plasma and electrical parameters, and a circuit simulation was performed to measure the current at each coil in the 2-coil experiment. Based on the result, we could determine the possibility of multiple ICP sources due to a direct change of impedance due to current and saturation of impedance due to the skin-depth effect. However, a helicon plasmasource is difficult to adapt to the multiple sources due to the consistent change of real impedance due to mode transition and the low uniformity of the B-field confinement. As a result, it is expected that ICP can be adapted to multiple sources for large-area processes.

A multi inductively coupled plasma (ICP) system can be used to maintain the plasma uniformity and increase the area processed by a high-density plasma. This article presents a source in two different configurations. The distributed planar multi ICP (DM-ICP) source comprises individual ICP sources that are not overlapped and produce plasma independently. Mutual coupling of the ICPs may affect the distribution of the produced plasma. The integrated multicoil ICP (IMC-ICP) source consists of four low-inductance ICP antennas that are superimposed in an azimuthal manner. The identical geometry of the ICP coils was assumed in this work. Both configurations have highly asymmetric components. A three-dimensional (3D) plasma model of the multicoil ICP configurations with asymmetric features is used to investigate the plasma characteristics in a large chamber and the operation of the sources in inert and reactive gases. The feasibility of the computational calculation, the speed, and the computational resources of the coupled multiphysics solver are investigated in the framework of a large realistic geometry and complex reaction processes. It was determined that additional variables can be used to control large-area plasmas. Both configurations can form a plasma, that azimuthally moves in a controlled manner, the so-called “sweeping mode” (SM) or “polyphase mode” (PPM), and thus they have the potential for large-area and high-density plasma applications. The operation in the azimuthal mode has the potential to adjust the plasma distribution, the reaction chemistry, and increase or modulate the production of the radicals. The intrinsic asymmetry of the individual coils and their combined operation were investigated within a source assembly primarily in argon and CO gases. Limited investigations were also performed on operation in CH4 gas. The plasma parameters and the resulting chemistry are affected by the geometrical relation between individual antennas. The aim of

Inductively Coupled Plasma (ICP) sources are extremely promising for large-area, high-ion density etching or deposition processes. In this review the authors compare results for GaAs and GaN etching with both ICP and Electron Cyclotron Resonance (ECR) sources on the same single-wafer platform. The ICP is shown to be capable of very high rates with excellent anisotropy for fabrication of GaAs vias or deep mesas in GaAs or GaN waveguide structures.

A magnetic pole enhanced inductively coupled H e - N2/A r plasma is studied at low pressure, to monitor the effects of helium mixing on plasma parameters like electron number density (ne) , electron temperature (Te) , plasma potential (Vp ) , and electron energy probability functions (EEPFs). An RF compensated Langmuir probe is employed to measure these plasma parameters. It is noted that electron number density increases with increasing RF power and helium concentration in the mixture, while it decreases with increase in filling gas pressure. On the other hand, electron temperature shows an increasing trend with helium concentration in the mixture. At low RF powers and low helium concentration in the mixture, EEPFs show a "bi-Maxwellian" distribution with pressure. While at RF powers greater than 50 W and higher helium concentration in the mixture, EEPFs evolve into "Maxwellian" distribution. The variation of skin depth with RF power and helium concentration in the mixture, and its relation with EEPF are also studied. The effect of helium concentrations on the temperatures of two electron groups ( Tb u l k and Tt a i l ) in the "bi-Maxwellian" EEPFs is also observed. The temperature of low energy electron group ( Tb u l k) shows significant increase with helium addition, while the temperature of tail electrons ( Tt a i l) increases smoothly as compared to ( Tb u l k).

Large-area and large-volume radio frequency (RF) plasmas are produced by different arrangements of an elementary electrical mesh consisting of two conductors interconnected by a capacitor at each end. The obtained cylindrical and planar RF networks are resonant and generate very high RF currents. The input impedance of such RF networks shows the behaviour of an RLC parallel resonance equivalent circuit. The real impedance at the resonance frequency is of great advantage for power matching compared with conventional inductive devices. Changes in the RLC equivalent circuit during the observed E-H transition will allow future interpretation of the plasma-antenna coupling. Furthermore, high power transfer efficiencies are found during inductively coupled plasma (ICP) operation. For the planar RF antenna network it is shown that the E-H transition occurs simultaneously over the entire antenna. The underlying physics of these discharges induced by the resonant RF network antenna is found to be identical to that of the conventional ICP devices described in the literature. The resonant RF network antenna is a new versatile plasmasource, which can be adapted to applications in industry and research.

This report describes a compact, high current density, pulsed ion source, based on electrodeless, inductively driven gas breakdown, developed to meet the requirements on normalized emittance, current density, uniformity and pulse duration for an ion injector in a heavy-ion fusion driver. The plasmasource produces >10 μs pulse of Argon plasma with ion current densities >100 mA/cm2 at 30 cm from the source and with strongly axially directed ion energy of about 80 eV, and sub-eV transverse temperature. The source has good reproducibility and spatial uniformity. Control of the current density during the pulse has been demonstrated with a novel modulator coil method which allows attenuation of the ion current density without significantly affecting the beam quality. This project was carried out in two phases. Phase 1 used source configurations adapted from light ion sources to demonstrate the feasibility of the concept. In Phase 2 the performance of the source was enhanced and quantified in greater detail, a modulator for controlling the pulse shape was developed, and experiments were conducted with the ions accelerated to >40 kV.

In order to extend the operating range of the GEC RF Reference Cell, the authors developed an inductively coupled plasmasource that replaced the standard parallel-plate upper-electrode assembly. Voltage and current probes, Langmuir probes, and an 80 GHz interferometer provided information on plasmas formed in argon, chlorine, and nitrogen at pressures from 0.1 Pa to 3 Pa. For powers deposited in the plasma from 20 W to 300 W, the source produced peak electron densities between 10{sup 10}/cm{sup 3} and 10{sup 12}/cm{sup 3} and electron temperatures near 4 eV. The electron density peaked on axis with typical full-width at half maximum of 7 cm to 9 cm. Discharges in chlorine and nitrogen had bimodal operation that was clearly evident from optical emission intensity. A dim mode occurred at low power and a bright mode at high power. The transition between modes had hysteresis. After many hours of high-power operation, films formed on electrodes and walls of one Cell. These deposits affected the dim-to-bright mode transition, and also apparently caused generation of hot electrons and increased the plasma potential.

This study examined the optimal conditions of neutral beam generation to maintain a high degree of neutralization and focusing during beam energy variation for a neutral beam source based on inductively coupled plasma with a three-grid ion beam acceleration system. The neutral beam energy distribution was estimated by measuring the energy profiles of ions that "survived" the neutralization after reflection. The energy measurements of the primary and reflected ions showed narrow distribution functions, each with only one peak. At higher beam energies, both the ratio of the ion energy loss to the primary energy and the degree of energy divergence decreased, confirming the precise alignment of the neutral beam. The neutralization efficiency of the neutral beam source with a three-grid acceleration system was found to be affected mainly by the beam angle divergence rather than by the particle translation energy.

This study examined the optimal conditions of neutral beam generation to maintain a high degree of neutralization and focusing during beam energy variation for a neutral beam source based on inductively coupled plasma with a three-grid ion beam acceleration system. The neutral beam energy distribution was estimated by measuring the energy profiles of ions that 'survived' the neutralization after reflection. The energy measurements of the primary and reflected ions showed narrow distribution functions, each with only one peak. At higher beam energies, both the ratio of the ion energy loss to the primary energy and the degree of energy divergence decreased, confirming the precise alignment of the neutral beam. The neutralization efficiency of the neutral beam source with a three-grid acceleration system was found to be affected mainly by the beam angle divergence rather than by the particle translation energy.

Inductively coupled plasma (ICP) sources have received increasing interest in microelectronics fabrication and lighting industry. In 2-D configuration space (r, z) and 2-D velocity domain (νθ,νz), a self- consistent electron kinetic analytic model is developed for various ICP sources. The electromagnetic (EM) model is established based on modal analysis, while the kinetic analysis gives the perturbed Maxwellian distribution of electrons by solving Boltzmann-Vlasov equation. The self- consistent algorithm combines the EM model and the kinetic analysis by updating their results consistently until the solution converges. The closed-form solutions in the analytical model provide rigorous and fast computing for the EM fields and the electron kinetic behavior. The kinetic analysis shows that the RF energy in an ICP source is extracted by a collisionless dissipation mechanism, if the electron thermovelocity is close to the RF phase velocities. A criterion for collisionless damping is thus given based on the analytic solutions. To achieve uniformly distributed plasma for plasma processing, we propose a novel discharge structure with both planar and vertical coil excitations. The theoretical results demonstrate improved uniformity for the excited azimuthal E-field in the chamber. Non-monotonic spatial decay in electric field and space current distributions was recently observed in weakly- collisional plasmas. The anomalous skin effect is found to be responsible for this phenomenon. The proposed model successfully models the non-monotonic spatial decay effect and achieves good agreements with the measurements for different applied RF powers. The proposed analytical model is compared with other theoretical models and different experimental measurements. The developed model is also applied to two kinds of ICP discharges used for electrodeless light sources. One structure uses a vertical internal coil antenna to excite plasmas and another has a metal shield to prevent the

Low-frequency, inductively coupled plasmas (LFICP) have recently attracted great attention in connection with the plasma processing of materials. The low-frequency sources feature high plasma density (10^18 - 10^19 m-3), excellent uniformity over large areas, low electron temperature, moderate plasma potential, deeper RF filed penetration and high power transfer efficiency. This work presents a comprehensive experimental and theoretical investigation of the electric/electromagnetic properties, electron density and temperature, and the optical emission in 500 kHz ICP sources. A series of experiments conducted in Ar/N_2/H2 and CH4 discharges show that the high-density plasmas are generated in the two distinctive E- and H- operating regimes. Near the mode transitions the power reflection coefficient exhibits resonant minima. The optical emission spectra of neutral atoms and ions together with global power balance arguments reveal that the step-wise ionization via excited states can be responsible for delaying the backward transition between the H- and E- discharge states, and, hence, lead to hysteresis. The experimental and theoretical results on the discharge mode transitions and hysteresis are discussed as well. It is demonstrated that the low-frequency ICP source is extremely efficient for nitriding of solid materials, especially of stainless steel. A low-temperature ( 350^oC) steel nitriding experiments undertaken in plasmas of various Ar/N_2/H2 gas mixtures show that very high nitriding rates, ranging from 40 μm/hour (stainless steel AISI304) to 90 μm/hour (AISI410), can be achieved. The microstructure, phases and composition of the nitrided surface layers have been characterized by Scanning Electron Microscopy, x-ray photoelectron spectroscopy, x-ray diffraction spectroscopy and energy dispersive x-ray spectroscopy. It has been shown that the crystalline phases of the nitrided layer can efficiently be controlled by the processing conditions. The nitrogen

Low-temperature electronegative plasmas have important applications in high-energy sources for fusion energy, plasma thrusters and materials processing. Neutral beam injection systems and space thruster technology such as the PEGASUS propulsion system rely on efficiently producing extractable negative ions. In this work we investigate the production of hydrogen negative ions in a pulsed inductively coupled plasma across a magnetic filter. The electron energy distribution function, plasma density and electron temperature are determined using an RF compensated Langmuir probe, and time-resolved laser photo-detachment is used to measure the negative ion fraction. The spatial and temporal evolution of these plasma parameters within the plasmasource will be presented. Using a pulsed plasma and a magnetic filter, the electron temperature can be efficiently controlled and a higher density of negative ions compared to electrons can be obtained at certain locations within the source.

The isotopic composition of nanogram quantities of osmium was measured by using an inductively coupled plasmasource mass spectrometer. Sensitivity was enhanced a factor of approx.100 by the use of an osmium tetraoxide vapor generator rather than nebulization of solution. For samples less than or equal to5 ng, the ratios /sup 190/Os//sup 192/Os, /sup 189/Os//sup 192/Os, and /sup 188/Os//sup 192/Os were determined to better than +/- 0.5% (1sigma/sub m/) precision. For the minor isotopes, the ratios /sup 187/Os//sup 192/Os and /sup 186/Os//sup 192/Os were determined to +/-1%, and /sup 184/Os//sup 192/Os (4 x 10/sup -4/) was determined to approx.10%. Isotope ratios for common osmium are reported.

The authors developed a neutral beam source consisting of a 200-mm-diameter inductively coupled plasma etcher and a graphite neutralization aperture plate based on the design of a neutral beam source that Samukawa et al. [Jpn. J. Appl. Phys., Part 2 40, L779 (2001)] developed. They measured flux and energy of neutral particles, ions, and photons using a silicon wafer with a thermocouple and a Faraday cup and calculated the neutralization efficiency. An Ar neutral beam flux of more than 1 mA/cm{sup 2} in equivalent current density and a neutralization efficiency of more than 99% were obtained. The spatial uniformity of the neutral beam flux was within {+-}6% within a 100 mm diameter. Silicon etching using a F{sub 2}-based neutral beam was done at an etch rate of about 47 nm/min, while Cl{sub 2}-based neutral beam realized completely no undercut. The uniformity of etch rate was less than {+-}5% within the area. The etch rate increased by applying bias power to the neutralization aperture plate, which shows that accelerated neutral beam was successfully obtained. These results indicate that the neutral beam source is scalable, making it possible to obtain a large-diameter and uniform neutral beam, which is inevitable for application to mass production.

Solution aerosols are injected into an inductively coupled argon plasma (ICP) to generate a relatively high number density of positive ions derived from elemental constituents. A small fraction of these ions is extracted through a sampling orifice into a differentially pumped vac...

Low-temperature or cold plasmas have been shown to be effective for the sterilization of sensitive medical devices and electronic equipment. Low-temperature plasma sterilization procedures possess certain advantages over other protocols such as ethylene oxide, gamma radiation, and heat due to the use of inexpensive reagents, the insignificant environmental impacts and the low energy requirements. In addition, plasmas may also be more efficacious in the removal of robust microorganisms due to their higher chemical reactivity. Together, these attributes render cold plasma sterilization as ideal for the surface decontamination requirements for NASA Planetary Protection. Hence, the work described in this study involves the construction, characterization, and application of an inductively-coupled, RF powered oxygen (O2) plasma.

This paper describes advances in isotopic measurements that have been made with an inductively coupled plasmasource magnetic sector multiple collector mass spectrometer and presents results of new experiments aimed at further evaluating the instrument`s capability. It is shown using standard solutions that trace element ratios such as Rb/Sr can be measured precisely without isotope dilution by comparison with reference solutions of known composition. Similarly, using a new wide flight tube, Pb isotopic compositions and U/Pb ratios can be accurately measured simultaneously without isotope dilution. The effects of deliberately inducing changes in the running conditions (RF power) are shown to be significant for measuring trace element ratios but not for mass bias and interference corrected isotopic compositions. Finally, it is demonstrated that precise and accurate isotopic compositions of elements as refractory as W can be determined relatively easily by solution nebulization and even by direct laser ablation of complex silicates. Isobaric interferences in such experiments are negligible. These experiments serve to highlight the remarkable potential that this new field offers for hitherto difficult isotopic measurements in nuclear, earth, environmental and medical sciences. Isotopic measurements can be made that are reproducible at high precision through a range of running conditions, even in the presence of isobaric interferences. The ability to correct for mass discrimination accurately using a second element of similar mass, the very high sensitivity for elements that are otherwise difficult to ionize, the demonstrated capability for laser ablation work and the ability to measure through a wide mass range simultaneously give this instrument major advantages over other more traditional techniques of isotopic measurement.

An inductionplasma tube having a segmented, fluid-cooled internal radiation shield is disclosed. The individual segments are thick in cross-section such that the shield occupies a substantial fraction of the internal volume of the plasma enclosure, resulting in improved performance and higher sustainable plasma temperatures. The individual segments of the shield are preferably cooled by means of a counterflow fluid cooling system wherein each segment includes a central bore and a fluid supply tube extending into the bore. The counterflow cooling system results in improved cooling of the individual segments and also permits use of relatively larger shield segments which permit improved electromagnetic coupling between the induction coil and a plasma located inside the shield. Four embodiments of the invention, each having particular advantages, are disclosed.

An inductionplasma tube having a segmented, fluid-cooled internal radiation shield is disclosed. The individual segments are thick in cross-section such that the shield occupies a substantial fraction of the internal volume of the plasma enclosure, resulting in improved performance and higher sustainable plasma temperatures. The individual segments of the shield are preferably cooled by means of a counterflow fluid cooling system wherein each segment includes a central bore and a fluid supply tube extending into the bore. The counterflow cooling system results in improved cooling of the individual segments and also permits use of relatively larger shield segments which permit improved electromagnetic coupling between the induction coil and a plasma located inside the shield. Four embodiments of the invention, each having particular advantages, are disclosed.

An inductionplasma tube having a segmented, fluid-cooled internal radiation shield is disclosed. The individual segments are thick in cross-section such that the shield occupies a substantial fraction of the internal volume of the plasma enclosure, resulting in improved performance and higher sustainable plasma temperatures. The individual segments of the shield are preferably cooled by means of a counterflow fluid cooling system wherein each segment includes a central bore and a fluid supply tube extending into the bore. The counterflow cooling system results in improved cooling of the individual segments and also permits use of relatively larger shield segments which permit improved electromagnetic coupling between the induction coil and a plasma located inside the shield. Four embodiments of the invention, each having particular advantages, are disclosed.

Bounded whistler wave, called ``helicon wave,'' is known to produce high-density plasmas and has been exploited as a high density plasmasource for many applications, including electric propulsion for spacecraft. In a helicon plasmasource, an antenna wrapped around the magnetized plasma column launches a low frequency wave, ωce/2 >ωhelicon >ωce/100, in the plasma which is responsible for maintaining high density plasma. Several antenna designs have been proposed in order to match efficiently the wave modes. In our experiment, helicon wave mode is observed using an m = 0 antenna. A floating B dot probe, compensated to the capacitively coupled E field, is employed to measure axial-wave-field-profiles (z, r, and θ components) in the plasma at multiple radial positions as a function of rf power and pressure. The Bθ component of the rf-field is observed to be unaffected as the wave propagates in the axial direction. Power coupling between the antenna and the plasma column is identified and agrees with the E, H, and wave coupling regimes previously seen in M =1 antenna systems. That is, the Bz component of the rf-field is observed at low plasma density as the Bz component from the antenna penetrates the plasma. The Bz component becomes very small at medium density due to shielding at the centre of the plasma column; however, with increasing density, a sudden ``jump'' occurs in the Bz component above which a standing wave under the antenna with a propagating wave away from the antenna are observed.

Impedance matching circuit between radio frequency (RF) generator and the plasma load, placed between them, determines the RF power transfer from RF generator to the plasma load. The impedance of plasma load depends on the plasma parameters through skin depth and plasma conductivity or resistivity. Therefore, for long pulse operation of inductively coupled plasmas, particularly for high power (∼100 kW or more) where plasma load condition may vary due to different reasons (e.g., pressure, power, and thermal), online tuning of impedance matching circuit is necessary through feedback. In fusion grade ion source operation, such online methodology through feedback is not present but offline remote tuning by adjusting the matching circuit capacitors and tuning the driving frequency of the RF generator between the ion source operation pulses is envisaged. The present model is an approach for remote impedance tuning methodology for long pulse operation and corresponding online impedance matching algorithm based on RF coil antenna current measurement or coil antenna calorimetric measurement may be useful in this regard.

In plasma materials processing, such as plasma etching, control of the time-averaged electron energy distributions (EEDs) in the plasma allows for control of the time-averaged electron impact source functions of reactive species in the plasma and their fluxes to surfaces. One potential method for refining the control of EEDs is through the use of pulsed power. Inductively coupled plasmas (ICPs) are attractive for using pulsed power in this manner because the EEDs are dominantly controlled by the ICP power as opposed to the bias power applied to the substrate. In this paper, we discuss results from a computational investigation of EEDs and electron impact source functions in low pressure (5–50 mTorr) ICPs sustained in Ar/N{sub 2} for various duty cycles. We find there is an ability to control EEDs, and thus source functions, by pulsing the ICP power, with the greatest variability of the EEDs located within the skin depth of the electromagnetic field. The transit time of hot electrons produced in the skin depth at the onset of pulse power produces a delay in the response of the EEDs as a function of distance from the coils. The choice of ICP pressure has a large impact on the dynamics of the EEDs, whereas duty cycle has a small influence on time-averaged EEDs and source functions.

Traditional fluid simulation and Particle-in-Cell/Monte-Carlo collision (PIC/MCC) are very time consuming in inductively coupled plasma. In this work, a hybrid model, i.e. global model coupled bidirectional with parallel Monte-Carlo collision (MCC) sheath model, is developed to investigate inductively coupled plasma discharge with bias source. The global model is applied to calculate plasma density in bulk plasma. The sheath model is performed to consistently calculate the electric field, ion kinetic and the sheath thickness above the bias electrode. Moreover, specific numbers of ions are tracked and ultimately ion energy distribution functions (IEDFs) incident into bias electrode are obtained from MCC module. It is found that as the bias amplitude increases, the energy width of both IEDFs becomes wider, and the total outlines of IEDFs move towards higher energy. The results from the model are validated by experimental measurement and a qualitative agreement is obtained. The advantage of this model is that plasma density, ion flux and IEDF, which are widely concerned in the actual process, could be obtained within an hour. This work was supported by the National Natural Science Foundation of China (NSFC) (Grant No. 11205025 and 11335004) and (Grant No.11405018), the Important National Science and Technology Specific Project (Grant No. 2011ZX02403-001).

A system is described for sampling and analyzing a material located at a hazardous site. A laser located remotely from the hazardous site is connected to an optical fiber, which directs laser radiation proximate the material at the hazardous site. The laser radiation abates a sample of the material. An inductively coupled plasma is located remotely from the material. An aerosol transport system carries the ablated particles to a plasma, where they are dissociated, atomized and excited to provide characteristic optical reduction of the elemental constituents of the sample. An optical spectrometer is located remotely from the site. A second optical fiber is connected to the optical spectrometer at one end and the plasmasource at the other end to carry the optical radiation from the plasmasource to the spectrometer. 10 figs.

The long-pulse surface-plasmasource prototype is developed at Budker Institute of Nuclear Physics for negative-ion based neutral beam injector use. The essential source features are (1) an active temperature control of the ion-optical system electrodes by circulation of hot thermal fluid through the channels, drilled in the electrode bodies, (2) the concaved transverse magnetic field in the extraction and acceleration gaps, preventing the electrons trapping and avalanching, and (3) the directed cesium deposition via distribution tubes adjacent to the plasma grid periphery. The long term effect of cesium was obtained just with the single cesium deposition. The high voltage strength of ion-optical system electrodes was improved with actively heated electrodes. A stable H- beam with a current ˜1 A and energy 90 keV was routinely extracted and accelerated.

The long-pulse surface-plasmasource prototype is developed at Budker Institute of Nuclear Physics for negative-ion based neutral beam injector use. The essential source features are (1) an active temperature control of the ion-optical system electrodes by circulation of hot thermal fluid through the channels, drilled in the electrode bodies, (2) the concaved transverse magnetic field in the extraction and acceleration gaps, preventing the electrons trapping and avalanching, and (3) the directed cesium deposition via distribution tubes adjacent to the plasma grid periphery. The long term effect of cesium was obtained just with the single cesium deposition. The high voltage strength of ion-optical system electrodes was improved with actively heated electrodes. A stable H(-) beam with a current ∼1 A and energy 90 keV was routinely extracted and accelerated. PMID:26932044

An electrically floating radiofrequency (RF) pre-ionization plasmasource has been developed to enable neutral gas breakdown at lower pressures and to access new experimental regimes in the Caltech laboratory astrophysics experiments. The source uses a customized 13.56 MHz class D RF power amplifier that is powered by AA batteries, allowing it to safely float at 3-6 kV with the electrodes of the high voltage pulsed power experiments. The amplifier, which is capable of 3 kW output power in pulsed (<1 ms) operation, couples electrical energy to the plasma through an antenna external to the 1.1 cm radius discharge tube. By comparing the predictions of a global equilibrium discharge model with the measured scalings of plasma density with RF power input and axial magnetic field strength, we demonstrate that inductive coupling (rather than capacitive coupling or wave damping) is the dominant energy transfer mechanism. Peak ion densities exceeding 5 × 10(19) m(-3) in argon gas at 30 mTorr have been achieved with and without a background field. Installation of the pre-ionization source on a magnetohydrodynamically driven jet experiment reduced the breakdown time and jitter and allowed for the creation of hotter, faster argon plasma jets than was previously possible. PMID:26233382

Two Americium-Beryllium neutron sources were dismantled, sampled (sub-sampled) and analyzed via inductively coupled plasma mass spectrometry (ICP-MS). Characteristics such as “age” since purification, actinide content, trace metal content and inter and intra source composition were determined. The “age” since purification of the two sources was determined to be 25.0 and 25.4 years, respectively. The systematic errors in the “age” determination were ± 4 % 2s. The amount and isotopic composition of U and Pu varied substantially between the sub-samples of Source 2 (n=8). This may be due to the physical means of sub-sampling or the way the source was manufactured. Source 1 was much more consistent in terms of content and isotopic composition (n=3 sub-samples). The Be-Am ratio varied greatly between the two sources. Source 1 had an Am-Be ratio of 6.3 ± 52 % (1s). Source 2 had an Am-Be ratio of 9.81 ± 3.5 % (1s). In addition, the trace element content between the samples varied greatly. Significant differences were determined between Source 1 and 2 for Sc, Sr, Y, Zr, Mo, Ba and W.

Research for the development of plasmasources and processes for new generations of feature and wafer sizes must meet requirements in many dimensions including performance, cost, schedule, and yield. This last requirement is becoming increasingly difficult to meet because the process for submicron features frequently have narrow windows and it is difficult to have the needed tool to tool and wafer to wafer repeatability to consistently hit the window. Data from sensors, in particular post-match rf sensors, can be used to measure and control some of the critical process parameters. This work, in many respects, parallels previous work by Paul Miller on capacitively coupled tools. Three examples utilizing post-match rf sensor data will be presented. First, a common approach to auto-matching is to (separately) use the phase and magnitude of the reflected rf power signal to control two capacitors in the match box. At a minimum, presets must be changed for new processes and auto-matches sometimes fail. By utilizing error signals derived from both pre-and post-match rf sensors, we have developed and tested a new matching algorithm that accommodates a wide range of power and plasma conditions without the need for presets. Second, the same rf data can be used to infer power input to the plasma. Losses in match boxes range from 10-50%, depending on the both the rf system and desired plasma conditions. In addition, because of small, but significant differences in particular tool installation or rf components, there can be differences between the efficiencies of nominally the same tool under identical conditions. Thus machine control based on net power is needed for optimum control. Post-match sensors provide the data needed to separate the loses in the matchbox from power coupled to the plasma. The third use of rf system data is the measurement parameters that can be used to both characterize the tool and to indicate and help diagnose or even predict equipment failures. The

In accordance with advanced data storage device fabrication requirements, we have evaluated a new broad-beam rf ion source for ion beam etching and deposition application. This source utilizes a novel reentrant shaped plasmainductively coupled plasma generator for improved radial plasma density uniformity and a dynamic magnetic field for improved static etch uniformity. It has the capability of reproducibly generating extremely uniform ion beams from 500 to 1500 eV with divergence angle <3 deg. and high directionality [Kanarov et al. (patent pending)]. For a 150 mm diameter wafer, an etch uniformity of <1% {sigma}/mean in static condition or <0.5% with wafer rotation is obtained over an ion incident angle range of 0 deg. - 65 deg. Recently, we have investigated extending the operation of this source to the critical low energy range, 100-500 eV, required for fabricating thin film magnetic head sensors. It was found that, under optimum operating conditions, excellent static etch uniformity (1%-1.5% {sigma}/mean) could be obtained at high ion beam current densities, up to 0.5 mA/cm{sup 2}, over the entire low-energy range while still achieving low divergence angles (<5 deg.) and high beam directionality. The ion beam performance was consistent with results obtained by simulation and by experiment using a 19-hole array ion optic test stand with scanning ion probe [E. Waahlin (unpublished)]. In this article we will describe the design of the ion source and then present the experimental performance data including plasma density distribution measured by an array of flat Langmuir probes, beam divergence distribution obtained by a 'pepper-pot' etch measurement technique, and etching rate distributions.

Inductively Coupled Plasmas (ICPs) are being used for a variety of deposition processes for microelectronics fabrication. Of particular concern in scaling these devices to large areas is maintaining azimuthal symmetry of the reactant fluxes. Sources of nonuniformity may be physical (e.g., gas injection and side pumping) or electromagnetic (e.g., transmission line effects in the antennas). In this paper, a 3-dimensional plasma equipment model, HPEM-3D,(M. J. Kushner, J. Appl. Phys. v.82, 5312 (1997).) is used to investigate physical and electromagentic sources of azimuthal nonuniformities in deposition tools. An ionized metal physical vapor deposition (IMPVD) system will be investigated where transmission line effects in the coils produce an asymmetric plasma density. Long mean free path transport for sputtered neutrals and tensor conducitivities have been added to HPEM-3D to address this system. Since the coil generated ion flux drifts back to the target to sputter low ionization potential metal atoms, the asymmetry is reinforced by rapid ionization of the metal atoms.

An inductively coupled plasma torch including a base member, a plasma tube and a threaded insert member within the plasma tube for directing the plasma gas in a tangential flow pattern. The design of the torch eliminates the need for a separate coolant gas tube. The torch can be readily assembled and disassembled with a high degree of alignment accuracy.

The subsurface distribution of a nuclear waste tank leak on the U.S. Department of Energy’s Hanford Site was sampled by slant drilling techniques in order to characterize the chemical and radiological characteristics of the leaked material and assess geochemical transport properties of hazardous constituents. Sediment core samples recovered from the borehole were subjected to distilled water and acid leaching procedures with the resulting leachates analyzed for isotopic and chemical signatures. High-sensitivity inductively coupled plasma/mass spectrometry (ICP/MS) techniques were used for determination of isotopic ratios for Cs, I, Mo. Analysis of the isotopic patterns of I and Mo combined with associated chemical data showed evidence for at least two separate intrusions of nuclear waste into the subsurface. Isotopic data for Cs was inconclusive with respect to a source attribution signature.

As the wafer size increases, dual frequency (DF) inductively coupled plasma (ICP) sources have been proposed as an effective method to achieve large-area uniform plasma processing. A two-dimensional (2D) self-consistent fluid model, combined with an electromagnetic module, has been employed to investigate the influence of the low frequency (LF) source on the plasma radial uniformity in an argon DF discharge. When the DF antenna current is fixed at 10 A, the bulk plasma density decreases significantly with the LF due to the less efficient heating, and the best radial uniformity is obtained at 3.39 MHz. As the LF decreases to 2.26 MHz, the plasma density is characterized by an edge-high profile, and meanwhile the maximum of the electron temperature appears below the outer two-turn coil. Moreover, the axial ion flux at 3.39 MHz is rather uniform in the center region except at the radial edge of the substrate, where a higher ion flux is observed. When the inner five-turn coil frequency is fixed at 2.26 MHz, the plasma density profiles shift from edge-high over uniform to center-high as the LF coil current increases from 6 A to 18 A, and the best plasma uniformity is obtained at 14 A. In addition, the maximum of the electron temperature becomes lower with a second peak appears at the radial position of r = 9 cm at 18 A.

A closed inductively coupled plasma cell generates a relatively high power, low noise plasma for use in spectroscopic studies is disclosed. A variety of gases can be selected to form the plasma to minimize spectroscopic interference and to provide a electron density and temperature range for the sample to be analyzed. Grounded conductors are placed at the tube ends and axially displaced from the inductive coil, whereby the resulting electromagnetic field acts to elongate the plasma in the tube. Sample materials can be injected in the plasma to be excited for spectroscopy. 1 fig.

A closed inductively coupled plasma cell generates a relatively high power, low noise plasma for use in spectroscopic studies. A variety of gases can be selected to form the plasma to minimize spectroscopic interference and to provide a electron density and temperature range for the sample to be analyzed. Grounded conductors are placed at the tube ends and axially displaced from the inductive coil, whereby the resulting electromagnetic field acts to elongate the plasma in the tube. Sample materials can be injected in the plasma to be excited for spectroscopy.

Distance-of-flight mass spectrometry (DOFMS) is demonstrated for the first time with a commercially available ion detector—the IonCCD camera. Because DOFMS is a velocity-based MS technique that provides spatially dispersive, simultaneous mass spectrometry, a position-sensitive ion detector is needed for mass-spectral collection. The IonCCD camera is a 5.1-cm long, 1-D array that is capable of simultaneous, multichannel ion detection along a focal plane, which makes it an attractive option for DOFMS. In the current study, the IonCCD camera is evaluated for DOFMS with an inductively coupled plasma (ICP) ionization source over a relatively short field-free mass-separation distance of 25.3-30.4 cm. The combination of ICP-DOFMS and the IonCCD detector results in a mass-spectral resolving power (FWHM) of approximately 900 and isotope-ratio precision equivalent to or slightly better than current ICP-TOFMS systems. The measured isotope-ratio precision in % relative standard deviation (%RSD) was ≥0.008%RSD for nonconsecutive isotopes at 10-ppm concentration (near the ion-signal saturation point) and ≥0.02%RSD for all isotopes at 1-ppm. Results of DOFMS with the IonCCD camera are also compared with those of two previously characterized detection setups.

Distance-of-flight mass spectrometry (DOFMS) is demonstrated for the first time with a commercially available ion detector-the IonCCD camera. Because DOFMS is a velocity-based MS technique that provides spatially dispersive, simultaneous mass spectrometry, a position-sensitive ion detector is needed for mass-spectral collection. The IonCCD camera is a 5.1-cm long, 1-D array that is capable of simultaneous, multichannel ion detection along a focal plane, which makes it an attractive option for DOFMS. In the current study, the IonCCD camera is evaluated for DOFMS with an inductively coupled plasma (ICP) ionization source over a relatively short field-free mass-separation distance of 25.3-30.4 cm. The combination of ICP-DOFMS and the IonCCD detector results in a mass-spectral resolving power (FWHM) of approximately 900 and isotope-ratio precision equivalent to or slightly better than current ICP-TOFMS systems. The measured isotope-ratio precision in % relative standard deviation (%RSD) was ≥0.008%RSD for nonconsecutive isotopes at 10-ppm concentration (near the ion-signal saturation point) and ≥0.02%RSD for all isotopes at 1-ppm. Results of DOFMS with the IonCCD camera are also compared with those of two previously characterized detection setups. Graphical Abstract ᅟ. PMID:26552388

A planar radio-frequency (rf) inductively-coupled plasma (ICP) source is used to produce fluorocarbon discharges (CF_4/Ar) to fluorinate the surface of high-density polyethylene (HDPE). Using this system, concurrent studies of discharge characteristics, permeation properties of treated polymers and polymer surface characteristics are conducted to advance the use of plasma-fluorinated polymer surfaces as a barrier layer for automotive applications. Langmuir probes are used to determine spatial distribution of charged-particle and space-potential characteristics in Ar and CF_4/Ar discharges and to show the influence of the spatial distribution of the heating regions and the reactor boundaries on the discharge uniformity. Langmuir probes are also used to identify rf anisotropic drift motion of electrons in the heating regions of the source and transient high-energy electron features in pulsed discharges. These latter features allow pulsed ICP sources to be operated at low time-averaged powers that are necessary to treat thermally sensitive polymers. Fourier Transform Infrared (FITR) spectroscopy is used to measure the dissociation of fluorocarbon gases and to explore differences between pulsed- and continuous -power operation. Dissociation levels of CF_4 (50-85%) using pulsed-power operation are as high as that for continuous operation, even though the net time -averaged power is far less with pulsed operation. The result suggests that pulsed fluorocarbon discharges possess high concentrations of chemically-active species needed for rapid surface fluorination. A gravimetric permeation cup method is used to measure the permeation rate of test fuels through HDPE membranes, and electron spectroscopy for chemical analysis (ESCA) studies are performed to determine the stoichiometry and thickness of the barrier layer. From these studies we find that a 50-70 A thick, polar, fluoro-hydrocarbon over layer reduces the permeation of isooctane/toluene/methanol mixtures by a

A vacuum ultraviolet absorption spectroscopy system for a wide measurement range of atomic number densities is developed. Dual-tube inductively coupled plasma was used as a light source. The probe beam profile was optimized for the target number density range by changing the mass flow rate of the inner and outer tubes. This system was verified using cold xenon gas. As a result, the measurement number density range was extended from the conventional two orders to five orders of magnitude.

A vacuum ultraviolet absorption spectroscopy system for a wide measurement range of atomic number densities is developed. Dual-tube inductively coupled plasma was used as a light source. The probe beam profile was optimized for the target number density range by changing the mass flow rate of the inner and outer tubes. This system was verified using cold xenon gas. As a result, the measurement number density range was extended from the conventional two orders to five orders of magnitude.

A study is carried out on the influence of in-flight particle parameters on their splatting properties during the inductionplasma deposition of ceramics. Results are presented for alumina powders with mean particle diameters of 21 microns and 82 microns under soft vacuum conditions. The chamber pressure was varied between 46.6 and 66.6 kPa. Measurements are carried out on the particle surface temperature and velocity prior to impact on stainless steel substrates. The form of the splat obtained is evaluated using SEM. The results are used for the parametric optimization of the inductionplasma spraying process. Thick alumina coatings with total porosities as low as 2 percent were obtained.

Low power atmospheric pressure inductively coupled thermal plasmasources integrated with a quenching device (cold ICP) for the efficient production of biologically active agents have been recently developed for potential biomedical applications. In the present work, in vitro experiments aimed at assessing the decontamination potential of a cold ICP source were carried out on bacteria typically associated with chronic wounds and designed to represent a realistic wound environment; further in vitro experiments were performed to investigate the effects of plasma-irradiated physiological saline solution on eukaryotic cells viability. A thorough characterization of the plasmasource and process, for what concerns ultraviolet (UV) radiation and nitric oxide production as well as the variation of pH and the generation of nitrates and nitrites in the treated liquid media, was carried out to garner fundamental insights that could help the interpretation of biological experiments. Direct plasma treatment of bacterial cells, performed at safe level of UV radiation, induces a relevant decontamination, both on agar plate and in physiological saline solution, after just 2 min of treatment. Furthermore, the indirect treatment of eukaryotic cells, carried out by covering them with physiological saline solution irradiated by plasma, in the same conditions selected for the direct treatment of bacterial cells does not show any noticeable adverse effect to their viability. Some considerations regarding the role of the UV radiation on the decontamination potential of bacterial cells and the viability of the eukaryotic ones will be presented. Moreover, the effects of pH variation, nitrate and nitrite concentrations of the plasma-irradiated physiological saline solution on the decontamination of bacterial suspension and on the viability of eukaryotic cells subjected to the indirect treatment will be discussed. The obtained results will be used to optimize the design of the ICP source

We describe the design and performance of an atomic force microscope (AFM) combined with a miniaturized inductively coupled plasmasource working at a radio frequency of 27.12 MHz. State-of-the-art scanning probe microscopes (SPMs) have limited in situ sample treatment capabilities. Aggressive treatments such as plasma etching or harsh treatments such as etching in aggressive liquids typically require the removal of the sample from the microscope. Consequently, time consuming procedures are required if the same sample spot has to be imaged after successive processing steps. We have developed a first prototype of a SPM which features a quasi in situ sample treatment using a modified commercial atomic force microscope. A sample holder is positioned in a special reactor chamber; the AFM tip can be retracted by several millimeters so that the chamber can be closed for a treatment procedure. Most importantly, after the treatment, the tip is moved back to the sample with a lateral drift per process step in the 20 nm regime. The performance of the prototype is characterized by consecutive plasma etching of a nanostructured polymer film.

The development of titanium dioxide (TiO2) films in the rutile and anatase phases is reported. The films have been obtained from an implantation/diffusion and sputtering process of commercially pure titanium targets, carried out in up to 500 W plasmas. The experimental outcome is of particular interest, in the case of anatase, for atmospheric pollution degradation by photocatalysis and, as to the rutile phase, for the production of biomaterials required by prosthesis and implants. The reactor employed consists in a cylindrical pyrex-like glass vessel inductively coupled to a 13.56 MHz RF source. The process takes place at a 5×10-2 mbar pressure with the target samples being biased from 0 to -3000 V DC. The anatase phase films were obtained from sputtering the titanium targets over glass and silicon electrically floated substrates placed 2 cm away from the target. The rutile phase was obtained by implantation/diffusion on targets at about 700 °C. The plasma was developed from a 4:1 argon/oxygen mixture for ~5 hour processing periods. The target temperature was controlled by means of the bias voltage and the plasmasource power. The obtained anatase phases did not require annealing after the plasma oxidation process. The characterization of the film samples was conducted by means of x-ray diffraction, scanning electron microscopy, x-ray photoelectron spectroscopy and Raman spectroscopy.

A novel ion source/sampling cone device for inductively coupled plasma mass spectrometry (ICP-MS) especially operated in the hyphenated mode as a detection system coupled with different separation modules is presented. Its technical setup is described in detail. Its main feature is the very low total argon consumption of less than 1.5 L min- 1, leading to significant reduction of operational costs especially when time-consuming speciation analysis is performed. The figures of merit of the new system with respect to sensitivity, detection power, long-term stability and working range were explored. Despite the profound differences of argon consumption of the new system in comparison to the conventional ICP-MS system, many of the characteristic features of the conventional ICP-MS could be maintained to a great extent. To demonstrate the ion source's capabilities, it was used as an element-selective detector for gas (GC) and high performance liquid chromatography (HPLC) where organic compounds of mercury and cobalt, respectively, were separated and detected with the new low-flow ICP-MS detection system. The corresponding chromatograms are shown. The applicability for trace element analysis has been validated with the certified reference material NIST 1643e.

A 13.56 MHz radio frequency plasma bridge neutralizer (rf-PBN) for ion thruster applications as well as ion beam surface processing of insulating materials is presented. The energy for the plasma excitation is inductively coupled into the plasma chamber. Because no components are located inside the plasma, the lifetime of the rf-PBN is expected to be very long. A compact tuning system adapts the input power to the plasma impedance. The electron current may be controlled over a wide range by the rf input power. An electron current of up to 1.6 A has been extracted. PMID:18315215

This study examined the effect of the antenna capacitance of an inductively coupled plasma (ICP) source, which was varied using an internal linear antenna, on the electrical and plasma characteristics of the ICP source. The inductive coupling at a given rf current increased with decreasing antenna capacitance. This was caused by a decrease in the inner copper diameter of the antenna made from coaxial copper/quartz tubing, which resulted in a higher plasma density and lower plasma potential. By decreasing the diameter of the copper tube from 25to10mm, the plasma density of a plasmasource size of 2750×2350mm2 was increased from approximately 8×1010/cm3to1.5×1011/cm3 at 15mTorr Ar and 9kW of rf power.

Continuing research has resulted in significant advances in induction-heated plasma torch technology which extend and enhance its potential for broad range of uses in chemical processing, materials development and testing, and development of large illumination sources. Summaries of these advances are briefly described.

Helicon plasmasource is known as efficient generator of uniform and high density plasma. A helicon plasmasource was developed for investigation of plasma neutralization and plasma lens in the Institute of Modern Physics in China. In this paper, the characteristics of helicon plasma have been studied by using Langmuir four-probe and a high argon plasma density up to 3.9x10{sup 13} cm{sup -3} have been achieved with the Nagoya type III antenna at the conditions of the magnetic intensity of 200 G, working gas pressure of 2.8x10{sup -3} Pa, and rf power of 1200 W with a frequency of 27.12 MHz. In the experiment, the important phenomena have been found: for a given magnetic induction intensity, the plasma density became greater with the increase in rf power and tended to saturation, and the helicon mode appeared at the rf power between 200 and 400 W.

This dissertation is focused on three problem areas in the performance of inductively coupled plasma (ICP) source. The noise characteristics of aerosols produced by ICP nebulizers are investigated. A laser beam is scattered by aerosol and detected by a photomultiplier tube and the noise amplitude spectrum of the scattered radiation is measured by a spectrum analyzer. Discrete frequency noise in the aerosol generated by a Meinhard nebulizer or a direct injection nebulizer is primarily caused by pulsation in the liquid flow from the pump. A Scott-type spray chamber suppresses white noise, while a conical, straight-pass spray chamber enhances white noise, relative to the noise seen from the primary aerosol. Simultaneous correction for both spectral interferences and matrix effects in ICP atomic emission spectrometry (AES) can be accomplished by using the generalized standard additions method (GSAM). Results obtained with the application of the GSAM to the Perkin-Elmer Optima 3000 ICP atomic emission spectrometer are presented. The echelle-based polychromator with segmented-array charge-coupled device detectors enables the direct, visual examination of the overlapping lines Cd (1) 228.802 nm and As (1) 228.812 nm. The slit translation capability allows a large number of data points to be sampled, therefore, the advantage of noise averaging is gained. An ICP is extracted into a small quartz vacuum chamber through a sampling orifice in a water-cooled copper plate. Optical emission from the Mach disk region is measured with a new type of echelle spectrometer equipped with two segmented-array charge-coupled-device detectors, with an effort to improve the detection limits for simultaneous multielement analysis by ICP-AES.

The coupling between an inductivesource and the plasma determines the power transfer efficiency and the reflected impedance in the primary circuit. Usually, the plasma coupling is analysed by means of a transformer equivalent circuit, where the plasmainductance and resistance are estimated using a global plasma model. This paper shows that, for planar RF antennas, the mutual inductance between the plasma and the primary circuit can be calculated using partial inductances and the complex image method, where the plasma coupling is determined in terms of the plasma skin depth and the distance to the plasma. To introduce the basic concepts, the mutual inductance is calculated here for a linear conductor parallel to the plasma surface. In the accompanying paper part II Guittienne et al (2015 PlasmaSources Sci. Technol. 24 065015), impedance measurements on a RF resonant planar plasmasource are modeled using an impedance matrix where the plasma-antenna mutual impedances are calculated using the complex image method presented here.

A starter assembly is provided for use with an inductively coupled plasma (ICP) tube to reliably initiate a plasma at internal pressures above about 30 microns. A conductive probe is inserted within the inductor coil about the tube and insulated from the tube shield assembly. A capacitive circuit is arranged for momentarily connecting a high voltage radio-frequency generator to the probe while simultaneously energizing the coil. When the plasma is initiated the probe is disconnected from the generator and electrically connected to the shield assembly for operation. 1 fig.

A starter assembly is provided for use with an inductively coupled plasma (ICP) tube to reliably initate a plasma at internal pressures above about 30 microns. A conductive probe is inserted within the inductor coil about the tube and insulated from the tube shield assembly. A capacitive circuit is arranged for momentarily connecting a high voltage radio-frequency generator to the probe while simultaneously energizing the coil. When the plasma is initiated the probe is disconnected from the generator and electrically connected to the shield assembly for operation.

An all permanent magnet Electron Cyclotron Resonance, large diameter (e.g., 40 cm) plasmasource suitable for ion/plasma processing or electric propulsion, is capable of producing uniform ion current densities at its exit plane at very low power (e.g., below 200 W), and is electrodeless to avoid sputtering or contamination issues. Microwave input power is efficiently coupled with an ionizing gas without using a dielectric microwave window and without developing a throat plasma by providing a ferromagnetic cylindrical chamber wall with a conical end narrowing to an axial entrance hole for microwaves supplied on-axis from an open-ended waveguide. Permanent magnet rings are attached inside the wall with alternating polarities against the wall. An entrance magnet ring surrounding the entrance hole has a ferromagnetic pole piece that extends into the chamber from the entrance hole to a continuing second face that extends radially across an inner pole of the entrance magnet ring.

Optimization criteria for pulsed inductiveplasma acceleration are developed using an acceleration model consisting of a set of coupled circuit equations describing the time-varying current in the thruster and a one-dimensional momentum equation. The model is nondimensionalized, resulting in the identification of several scaling parameters that are varied to optimize the performance of the thruster. The analysis reveals the benefits of underdamped current waveforms and leads to a performance optimization criterion that requires the matching of the natural period of the discharge and the acceleration timescale imposed by the inertia of the working gas. In addition, the performance increases when a greater fraction of the propellant is initially located nearer to the inductive acceleration coil. While the dimensionless model uses a constant temperature formulation in calculating performance, the scaling parameters that yield the optimum performance are shown to be relatively invariant if a self-consistent description of energy in the plasma is instead used.

An apparatus for producing a vacuum arc plasmasource device using a low mass, compact inductive energy storage circuit powered by a low voltage DC supply acts as a vacuum arc plasma thruster. An inductor is charged through a switch, subsequently the switch is opened and a voltage spike of Ldi/dt is produced initiating plasma across a resistive path separating anode and cathode. The plasma is subsequently maintained by energy stored in the inductor. Plasma is produced from cathode material, which allows for any electrically conductive material to be used. A planar structure, a tubular structure, and a coaxial structure allow for consumption of cathode material feed and thereby long lifetime of the thruster for long durations of time.

A large-area wafer size is necessary for plasma processing in the micro-electronics industry. However, it is one of the most important issues to obtain uniform plasma over a large-area substrate in addition to high-density plasmas for the plasma processing. Recently, the experimental study on the dual-frequency inductively coupled plasma (ICP) has been reported as a mean of improving the plasma uniformity over the large-area substrate. In this work, we develop a self-consistent method combined with the electromagnetic theory and fluid model to simulate the plasma characteristics for dual-frequency inductively coupled argon plasma. In the model, the ICP source consists of two planar-spiral coils. We investigate the plasma uniformity problem by adjusting the parameters of the two coils, such as the RF current, the position of the coils and the RF frequency ratio. It was found that the uniformity of the ion density over the wafer is improved with dual-frequency antennas comparing with a single-frequency antenna. The plasma uniformity increases when the coils are located farther from the centre of the ICP source. It is consistent with the experimental study. This work was supported by the National Natural Science Foundation of China (No. 11175034, No. 11075029).

Induction heating is introduced as an evaporation heat source in ion plating. A bare induction coil without shielding can be directly used in the glow discharge region with no arcing. The only requirement is to utilize an rf inductive generator with low operating frequency of 75 kHz. Mechanical simplicity of the ion plating apparatus and ease of operation is a great asset for industrial applications; practically any metal such as nickel, iron, and the high temperature refractories can be evaporated and ion plated.

An inductive probing scheme, originally developed for shock tube studies, has been adapted to measure explosive plasma jet conductivities. In this method, the perturbation of an applied magnetic field by a plasma jet induces a voltage in a search coil, which, in turn, can be used to infer electrical conductivity through the inversion of a Fredholm integral equation of the first kind. A 1-inch diameter probe was designed and constructed, and calibration was accomplished by firing an aluminum slug through the probe using a light-gas gun. Exploratory laboratory experiments were carried out using plasma jets expelled from 15-gram high explosive shaped charges. Measured conductivities were in the range of 3 kS/m for unseeded octol charges and 20 kS/m for seeded octol charges containing 2% potassium carbonate by mass.

We have developed a high-current laser ion source for induction accelerators. A copper target was irradiated by a frequency-quadrupled Nd:YAG laser (266 nm) with relatively low intensities of 10{sup 8} W/cm{sup 2}. The laser-produced plasma supplied a large number of Cu{sup +} ions (∼10{sup 12} ions/pulse) during several microseconds. Emission spectra of the plasma were observed and the calculated electron temperature was about 1 eV. An induction voltage adder extracted high-current ion beams over 0.5 A/cm{sup 2} from a plasma-prefilled gap. The normalized beam emittance measured by a pepper-pot method was smaller than 1 π mm mrad.

We have developed a high-current laser ion source for induction accelerators. A copper target was irradiated by a frequency-quadrupled Nd:YAG laser (266 nm) with relatively low intensities of 108 W/cm2. The laser-produced plasma supplied a large number of Cu+ ions (˜1012 ions/pulse) during several microseconds. Emission spectra of the plasma were observed and the calculated electron temperature was about 1 eV. An induction voltage adder extracted high-current ion beams over 0.5 A/cm2 from a plasma-prefilled gap. The normalized beam emittance measured by a pepper-pot method was smaller than 1 π mm mrad.

A single-stage pulsed inductiveplasma accelerator is modeled as an inductive mass-driver. The plasma is treated as a rigid slug, which acts as the armature. The system is a transformer, with the drive coil serving as the primary and the slug as the secondary. We derive a set of coupled dynamic-circuit equations, which depend on five dimensionless coefficients, and on the functional form of the mutual inductance profile, M (z). For a given coil geometry, M (z) was determined experimentally and compared to the results of calculations carried out with QuickField. The equations are solved with various coefficient values, in order to determine the conditions that yield high efficiencies. It was found that the coupling efficiency can be quite high and likely scales with power, although this does not preclude operation at lower power with acceptable efficiency. The effect of an imbedded magnetic bias flux, as for the case of a plasmoid thruster, was also included in the calculations.

Plasma instabilities have been observed in low-pressure inductive discharges, in the transition between low density capacitive mode and high density inductive mode of the discharge when attaching gases such as SF6 and Ar/SF 6 mixtures are used. Oscillations of charged particles, plasma potential and light emitted from the plasma with the frequencies from a few hertz to tens of kilohertz are seen for gas pressures between 1 and 100 mTorr and the discharge power in the range of 75--1200 W. The region of instability increases as the plasma becomes more electronegative and the frequency of plasma oscillations increases as the power, pressure, and gas flow rate increase. The instability frequencies may also depend on the settings of a matching network. A volume-averaged (global) model of the instability has been developed, for a discharge containing time varying densities of electrons, positive ions, and negative ions, and time invariant excited states and neutral densities. The particle and energy balance equations are integrated to produce the dynamical behavior. As pressure or power is varied to cross a threshold, the instability goes through a series of oscillatory states to large scale relaxation oscillations between higher and lower density states. The model qualitatively agrees with experimental observations, and also shows a significant influence of the matching network. A stability analysis of an electronegative discharge has been performed, using a Hurwitz criterion, for a system of linearized particle and power balance differential equations. Capacitive coupling plays a crucial role in the instability process. A variable electrostatic (Faraday) shield has been used to control the capacitive coupling from the excitation coil to the plasma. The plasma instability disappears when the shielded area exceeds 65% of the total area of the coil. The global model of instability gives a slightly higher value of 85% for instability suppression with the same discharge

An in-house code is developed to simulate the inductively coupled plasma (ICP). The model comprises the fluid, electromagnetic and transformer submodels. Fluid equations are solved to evaluate the plasma flow parameters, including the plasma and neutral densities, ion and neutral velocities, electron flux, electron temperature, and electric potential. The model relies on the ambipolar approximation and offers the evaluation of plasma parameters without solving the sheath region. The electromagnetic model handles the calculation of the electric and magnetic fields using the magnetic vector potential. The transformer model captures the effect of the matching circuit utilized in laboratory experiments for RF power deposition. The continuity and momentum equations are solved using finite volume method. The energy, electric potential, and magnetic vector potential equations are solved using finite difference method. The resulting linear systems of equations are solved with iterative solvers including Jacobi and GMRES. The code is written using the C++ programming language, it works in parallel and has graphical user interface. The model is applied to study ICP characteristics of a plasma confined within a cylindrical chamber with dielectric walls for two different power deposition cases. The results obtained from the developed model are verified using the plasma module of COMSOL Multiphysics. The model is also applied to a plasmasource configuration, and it is demonstrated that there is an overall increase in the plasma potential when current is extracted from ICP with a biased wall electrode.

A high density plasma generated by microwave injection using a windowless electrodeless rectangular slotted antenna waveguide plasmasource has been demonstrated. Plasma probe measurements indicate that the source could be applicable for low power ion thruster applications, ion implantation, and related applications. This slotted antenna plasmasource invention operates on the principle of electron cyclotron resonance (ECR). It employs no window and it is completely electrodeless and therefore its operation lifetime is long, being limited only by either the microwave generator itself or charged particle extraction grids if used. The high density plasmasource can also be used to extract an electron beam that can be used as a plasma cathode neutralizer for ion source beam neutralization applications.

A method for making fine power using an inductively coupled plasma. The method provides a gas-free environment, since the plasma is formed without using a gas. The starting material used in the method is in solid form.

In this study, the antenna characteristics of an internal-type, linear, inductively coupled plasma (ICP) source were varied by changing the inner conductor diameter of the ICP antenna composed of an inner conductor enclosed by outer dielectric tubing. The effect of the varied antenna characteristics on the plasma characteristics and the electrical characteristics of the large area plasmasource with a substrate area of 2300×2000 mm2 were investigated. The decrease of the antenna conductor diameter from 25 to 10 mm decreased the capacitance of the antenna between the conductor and the dielectric tubing, increased the plasma density, decreased the plasma potential at the same rf power, and improved the plasma uniformity. The increased plasma density and the decreased plasma potential obtained with the smaller antenna conductor diameter were attributed to the increased power transfer efficiency caused by the increased inductive coupling at the same rf power.

In this study, the antenna characteristics of an internal-type, linear, inductively coupled plasma (ICP) source were varied by changing the inner conductor diameter of the ICP antenna composed of an inner conductor enclosed by outer dielectric tubing. The effect of the varied antenna characteristics on the plasma characteristics and the electrical characteristics of the large area plasmasource with a substrate area of 2300× 2000 mm2 were investigated. The decrease of the antenna conductor diameter from 25 to 10 mm decreased the capacitance of the antenna between the conductor and the dielectric tubing, increased the plasma density, decreased the plasma potential at the same rf power, and improved the plasma uniformity. The increased plasma density and the decreased plasma potential obtained with the smaller antenna conductor diameter were attributed to the increased power transfer efficiency caused by the increased inductive coupling at the same rf power.

Pulsed inductiveplasma thrusters [1-3] are spacecraft propulsion devices in which electrical energy is capacitively stored and then discharged through an inductive coil. The thruster is electrodeless, with a time-varying current in the coil interacting with a plasma covering the face of the coil to induce a plasma current. Propellant is accelerated and expelled at a high exhaust velocity (O(10-100 km/s)) by the Lorentz body force arising from the interaction of the magnetic field and the induced plasma current. While this class of thruster mitigates the life-limiting issues associated with electrode erosion, pulsed inductiveplasma thrusters can su er from both high pulse energy requirements imposed by the voltage demands of inductive propellant ionization, and low propellant utilization efficiencies. The Microwave Assisted Discharge InductivePlasma Accelerator (MAD-IPA)[4], shown in Fig. 1 is a pulsed inductiveplasma thruster that is able to operate at lower pulse energies by partially ionizing propellant with an electron cyclotron resonance (ECR) discharge inside a conical inductive coil whose geometry serves to potentially increase propellant and plasma plume containment relative to at coil geometries. The ECR plasma is created with the use of permanent mag- nets arranged to produce a thin resonance region along the inner surface of the coil, restricting plasma formation and, in turn, current sheet formation to areas of high magnetic coupling to the driving coil.

The principles of the operation of plasmasources for the neutralization of the surface of a spacecraft traveling in the presence of hot plasma are discussed with special attention given to the hollow-cathode-based plasma contactors. Techiques are developed that allow the calculation of the potentials and particle densities in the near environment of a hollow cathode plasma contactor in both the test tank and the LEO environment. The techniques and codes were validated by comparison of calculated and measured results.

An atmospheric pressure inductively coupled plasma (ICP) is used with a quadrupole mass spectrometer (MS) for ion deposition. The deposited element is introduced as a nebulized aqueous solution. Modifications to the ICP-MS device allow generation and deposition of a mass-resolved beam of {sup 165}Ho{sup +} at 5{times}10{sup 12} ions s{sup {minus}1}. The ICP is a universal, multielement ion source that can potentially be used for applications such as deposition of mixtures of widely varying stoichiometry or of alternating layers of different elements. {copyright} {ital 1996 American Vacuum Society}

ABSTRACT New analytical techniques for multiparametric characterisation of individual cells are likely to reveal important information about the heterogeneity of immunological responses at the single-cell level. In this proof-of-principle study, laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS) was applied to the problem of concurrently detecting 24 lineage and activation markers expressed by human leucocytes. This approach was sufficiently sensitive and specific to identify subpopulations of isolated T, B, and natural killer cells. Leucocyte subsets were also accurately detected within unfractionated peripheral blood mononuclear cells preparations. Accordingly, we judge LA-ICP-MS to be a suitable method for assessing expression of multiple tissue antigens in solid-phase biological specimens, such as tissue sections, cytospins, or cells grown on slides. These results augur well for future development of LA-ICP-MS–based bioimaging instruments for general users. PMID:27500232

The development of a framework for the automated analysis of inductively couple plasma atomic emission spectroscopy is present. Some of the research that lead to current state of this framework is presented. A small expert system that uses information about the current sample to generate a line search strategy which minimizes the number of emission lines which need to be measured, and avoids spectral overlaps when possible. A program is presented that evaluates the minimum number of spectral windows required to perform elemental analysis by ICP- AES, given a certain spectral window width. A method with the potential for rapidly ascertaining the physical properties of the sample matrix is presented. This system has the potential to help reduce sample introduction related system failures. Finally, three optimization algorithms are compared in their ability to optimize ICP- AES performance, from this an optimization module was developed for inclusion in the automated analysis framework.

The production of aluminium and zinc plasmas for the deposition of coatings upon steel strip is monitored by optical emission spectroscopy measurements. The plasma is created from an inductivesource. The atom and the ion densities as well as the electron temperature are obtained such that the plasma can be characterized. It will be shown that the obtained plasmas are typically highly ionized and deviate from thermal equilibrium.

The negative ion density in radio-frequency (rf) inductively-coupled chlorine discharges has been inferred using laser photodetachment spectroscopy. A Gaseous Electronics Conference (GEC) rf Reference Cell with an inductively coupled plasmasource was used to produce the plasma. For this experiment, the chlorine pressure was between 20 and 50 mTorr and the rf power into the plasma was 150 to 250 Watts at 13.56 MHz. Light from a frequency quadrupled Nd:YAG laser (266 nm) was used to photodetach electrons from Cl{sup {minus}}. The time dependent excess electron density was then detected by a microwave interferometer operating at 80 GHz. Based upon the cross section for photodetachment and the measurement geometry, negative ion densities can be calculated. The inferred negative ion densities are at least an order of magnitude higher than the steady state electron density over the parameter space investigated. The dependence of the negative ion density on rf power, gas pressure, flow rate and rf phase will be discussed.

A new plasma accelerator concept that employs electrodeless plasma preionization and pulsed inductive acceleration is presented. Preionization is achieved through an electron cyclotron resonance discharge that produces a weakly-ionized plasma at the face of a conical theta pinch-shaped inductive coil. The presence of the preionized plasma allows for current sheet formation at lower discharge voltages than those found in other pulsed inductive accelerators. The location of an electron cyclotron resonance discharge can be controlled through the design of the applied magnetic field in the thruster. A finite-element model of the magnetic field was used as a design tool, allowing for the implementation of an arrangement of permanent magnets that yields a small volume of preionized propellant at the coil face. This allows for current sheet formation at the face of the inductive coil, minimizing the initial inductance of the pulse circuit and maximizing the potential efficiency of the new accelerator.

With an enlargement of the wafer size, development of large-area plasmasources and control of plasma density distribution are required. To control the spatial distribution of the plasma density, wireless power transfer is applied to an inductively coupled plasma for the first time. An inner powered antenna and an outer resonant coil connected to a variable capacitor are placed on the top of the chamber. As the self-resonance frequency ωr of the resonant coil is adjusted, the power transfer rate from the inner powered coil to the outer resonant coil is changed and the dramatic evolution of the plasma density profile is measured. As ωr of the outer resonant coil changes from the non-resonant condition (where ωr is not the driving angular frequency ωrf) to the resonant condition (where ωr = ωrf), the plasma density profile evolves from a convex shape with maximal plasma density at the radial center into a concave shape with maximal plasma density in the vicinity of the resonant antenna coil. This result shows that the plasma density distribution can be successfully controlled via wireless resonance power transfer.

A constricted glow discharge chamber and method are disclosed. The polarity and geometry of the constricted glow discharge plasmasource is set so that the contamination and energy of the ions discharged from the source are minimized. The several sources can be mounted in parallel and in series to provide a sustained ultra low source of ions in a plasma with contamination below practical detection limits. The source is suitable for applying films of nitrides such as gallium nitride and oxides such as tungsten oxide and for enriching other substances in material surfaces such as oxygen and water vapor, which are difficult process as plasma in any known devices and methods. The source can also be used to assist the deposition of films such as metal films by providing low-energy ions such as argon ions.

Plasma applications in life science are currently emerging worldwide. Whereas today's commercially available plasma surgical technologies such as argon plasma coagulation (APC) or ablation are mainly based on lethal plasma effects on living systems, the newly emerging therapeutic applications will be based on selective, at least partially non-lethal, possibly stimulating plasma effects on living cells and tissue. Promising results could be obtained by different research groups worldwide revealing a huge potential for the application of low temperature atmospheric pressure plasma in fields such as tissue engineering, healing of chronic wounds, treatment of skin diseases, tumor treatment based on specific induction of apoptotic processes, inhibition of biofilm formation and direct action on biofilms or treatment of dental diseases. The development of suitable and reliable plasmasources for the different therapies requires an in-depth knowledge of their physics, chemistry and parameters. Therefore much basic research still needs to be conducted to minimize risk and to provide a scientific fundament for new plasma-based medical therapies. It is essential to perform a comprehensive assessment of physical and biological experiments to clarify minimum standards for plasmasources for applications in life science and for comparison of different sources. One result is the DIN-SPEC 91315, which is now open for further improvements. This contribution intends to give an overview on the status of commercial cold plasmasources as well as cold plasmasources still under development for medical use. It will discuss needs, prospects and approaches for the characterization of plasmas from different points of view. Regarding the manageability in everyday medical life, atmospheric pressure plasma jets (APPJ) and dielectric barrier discharges (DBD) are of special interest. A comprehensive risk-benefit assessment including the state of the art of commercial sources for medical use

Inductive Pulsed Plasma Thrusters (iPPT) spacecraft propulsion devices in which electrical energy is capacitively stored and then discharged through an inductive coil. The thruster is electrodeless, with a time-varying current in the coil interacting with a plasma covering the face of the coil to induce a plasma current Propellant is accelerated and expelled at a high exhaust velocity (O(10 -- 100 km/s)) by the Lorentz body force arising from the interaction of the magnetic field and the induced plasma current. While this class of thruster mitigates the life-limiting issues associated with electrode erosion, inductive pulsed plasma thrusters can suffer from both high pulse energy requirements imposed by the voltage demands of inductive propellant ionization, and low propellant utilization efficiencies. While this class of thruster mitigates the life-limiting issues associated with electrode erosion, inductive pulsed plasma thrusters can suffer from both high pulse energy requirements imposed by the voltage demands of inductive propellant ionization, and low propellant utilization efficiencies. A conical coil geometry may offer higher propellant utilization efficiency over that of a at inductive coil, however an increase in propellant utilization may be met with a decrease in axial electromagnetic acceleration, and in turn, a decrease in the total axially-directed kinetic energy imparted to the propellant.

An inductively coupled plasma, multielement atomic emission spectrometric analysis system has been evaluated with respect to the Environmental Protection Agency's need for a rapid method for determination of trace elemental concentrations in water. Data are presented on detection...

The inductively coupled plasma is an electrodeless discharge in a gas (usually Ar) at atmospheric pressure. Radio frequency energy generated by a RF power source is inductively coupled to the plasma gas through a water cooled load coil. In ICP-MS the {open_quotes}Fassel{close_quotes} TAX quartz torch commonly used in emission is mounted horizontally. The sample aerosol is introduced into the central flow, where the gas kinetic temperature is about 5000 K. The aerosol is vaporized, atomized, excited and ionized in the plasma, and the ions are subsequently extracted through two metal apertures (sampler and skimmer) into the mass spectrometer. In ICP-MS, the matrix effects, or non-spectroscopic interferences, can be defined as the type of interferences caused by dissolved concomitant salt ions in the solution. Matrix effects can be divided into two categories: (1) signal drift due to the deposition of solids on the sampling apertures; and/or (2) signal suppression or enhancement by the presence of the dissolved salts. The first category is now reasonably understood. The dissolved salts, especially refractory oxides, tend to deposit on the cool tip of the sampling cone. The clogging of the orifices reduces the ion flow into the ICP-MS, lowers the pressure in the first stage of ICP-MS, and enhances the level of metal oxide ions. Because the extent of the clogging increases with the time, the signal drifts down. Even at the very early stage of the development of ICP-MS, matrix effects had been observed. Houk et al. found out that the ICP-MS was not tolerant to solutions containing significant amounts of dissolved solids.

A method for coating surfaces or implanting ions in an object using an inductively coupled plasma. The method provides a gas-free environment, since the plasma is formed without using a gas. The coating material or implantation material is intitially in solid form.

Stabilization of the rf power driving an inductively coupled plasma (ICP) has implications for fields ranging from atomic clocks to analytical chemistry to illumination technology. Here, we demonstrate a technique in which the plasma itself acts as a probe of radio wave power, and provides a correction signal for active rf-power control. Our technique takes advantage of the resonant nature of forced ion waves in the plasma, and their observation in the ICP's optical emission.

The objective of this research is to study the formation processes of a pulsed inductiveplasma using heavy gases, specifically the coupling of stored capacitive energy into plasma via formation in a theta pinch coil. To aid in this research, the Missouri Plasmoid Experiment Mk. I (and later Mk. II) was created. In the first paper, the construction of differential magnetic field probes are discussed. The effects of calibration setup on B-dot probes is studied using a Helmholtz coil driven by a vector network analyzer and a pulsed-power system. Calibration in a pulsed-power environment yielded calibration factors at least 9.7% less than the vector network analyzer. In the second paper, energy deposition into various gases using a pulsed inductive test article is investigated. Experimental data are combined with a series RLC model to quantify the energy loss associated with plasma formation in Argon, Hydrogen, and Xenon at pressures from 10-100 mTorr. Plasma resistance is found to vary from 25.8-51.6 mΩ and plasmainductance varies from 41.3--47.0 nH. The greatest amount of initial capacitively stored energy that could be transferred to the plasma was 6.4 J (8.1%) of the initial 79.2 +/- 0.1 J. In the third paper, the effects of a DC preionization source on plasma formation energy is studied. The preionization source radial location is found to have negligible impact on plasma formation repeatability while voltage is found to be critical at low pressures. Without preionization, plasma formation was not possible. At 20 mTorr, 0.20 W of power was sufficient to stabilize plasma formation about the first zero-crossing of the discharge current. Increasing power to 1.49 W increased inductively coupled energy by 39%. At 200 mTorr, 4.3 mW was sufficient to produce repeatable plasma properties.

A cathodic arc plasmasource has an anode formed of a plurality of spaced baffles which extend beyond the active cathode surface of the cathode. With the open baffle structure of the anode, most macroparticles pass through the gaps between the baffles and reflect off the baffles out of the plasma stream that enters a filter. Thus the anode not only has an electrical function but serves as a prefilter. The cathode has a small diameter, e.g. a rod of about 1/4 inch (6.25 mm) diameter. Thus the plasmasource output is well localized, even with cathode spot movement which is limited in area, so that it effectively couples into a miniaturized filter. With a small area cathode, the material eroded from the cathode needs to be replaced to maintain plasma production. Therefore, the source includes a cathode advancement or feed mechanism coupled to cathode rod. The cathode also requires a cooling mechanism. The movable cathode rod is housed in a cooled metal shield or tube which serves as both a current conductor, thus reducing ohmic heat produced in the cathode, and as the heat sink for heat generated at or near the cathode. Cooling of the cathode housing tube is done by contact with coolant at a place remote from the active cathode surface. The source is operated in pulsed mode at relatively high currents, about 1 kA. The high arc current can also be used to operate the magnetic filter. A cathodic arc plasma deposition system using this source can be used for the deposition of ultrathin amorphous hard carbon (a-C) films for the magnetic storage industry.

Inductive Pulsed Plasma Thrusters (iPPT) are spacecraft propulsion devices in which electrical energy is capacitively stored and then discharged through an inductive coil. The thruster is electrodeless, with a time-varying current in the coil interacting with a plasma covering the face of the coil to induce a plasma current. Propellant is accelerated and expelled at a high exhaust velocity (O(10 .. 100 km/s)) by the Lorentz body force arising from the interaction of the magnetic field and the induced plasma current. While this class of thruster mitigates the life-limiting issues associated with electrode erosion, inductive pulsed plasma thrusters can suffer from both high pulse energy requirements imposed by the voltage demands of inductive propellant ionization, and low propellant utilization efficiencies. A conical coil geometry may o er higher propellant utilization efficiency over that of a at inductive coil, however an increase in propellant utilization may be met with a decrease in axial electromagnetic acceleration, and in turn, a decrease in the total axially-directed kinetic energy imparted to the propellant.

The presentation deals with the assessment on two non thermal plasmasources developed and optimized for oncology applications. The first plasmasource is a floating-electrode dielectric barrier discharge powered at a few hundreds of Hz which deliver air-plasma directly on the surface of cell culture medium in dishes or on the skin or organs of mice bearing cancer tumors. The second plasmasource, so called Plasma Gun, is a plasma jet source triggered in noble gas, transferred in high aspect ratio and flexible capillaries, on targeting cells or tumors after plasma transfer in air through the ``plasma plume'' generated at the capillary outlet. In vitro evidence for massive cancer cell destruction and in vivo tumor activity and growth rate reductions have been measured with both plasmasources. DNA damages, cell cycle arrests and apoptosis induction were also demonstrated following the application of any of the two plasmasource both in vitro and in vivo. The comparison of plasma treatment with state of the art chemotherapeutic alternatives has been performed and last but not least the benefit of combined protocols involving plasma and chemotherapeutic treatments has been evidenced for mice bearing orthotopic pancreas cancer and is under evaluation for the colon tumors.

The von-Kármán plasma experiment is a novel versatile experimental device designed to explore the dynamics of basic magnetic induction processes and the dynamics of flows driven in weakly magnetized plasmas. A high-density plasma column (1016-1019 particles. m-3) is created by two radio-frequency plasmasources located at each end of a 1 m long linear device. Flows are driven through J × B azimuthal torques created from independently controlled emissive cathodes. The device has been designed such that magnetic induction processes and turbulent plasma dynamics can be studied from a variety of time-averaged axisymmetric flows in a cylinder. MHD simulations implementing volume-penalization support the experimental development to design the most efficient flow-driving schemes and understand the flow dynamics. Preliminary experimental results show that a rotating motion of up to nearly 1 km/s is controlled by the J × B azimuthal torque.

Bromate is a disinfection by-product in drinking water, formed during the ozonation of source water containing bromide. An inductively coupled plasma mass spectrometer is combined with an ion chromatograph for the analysis of bromate in drinking waters. Three chromatographic colu...

Optical emission spectra from high-purity Pu-242 were generated with a glovebox-enclosed inductively coupled plasma (ICP) source. Spectra covering the 2280 to 7008 Angstrom wavelength range are presented along with general commentary on ICP-Pu spectroscopy.

Laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS) has been applied to the characterization of the trace element composition "fingerprint" of selected gold samples from Western Australia and South Africa. By comparison of the elemental associations it is possible to relate gold to a specific mineralizing event, mine or bullion sample. This methodology facilitates identification of the provenance of stolen gold or gold used in salting activities. In this latter case, it is common for gold from a number of sources to be used in the salting process. Consequently, gold in the prospect being salted will not come from a single source and identification of multiple sources for this gold will establish that salting has occurred. Preliminary results also indicate that specific elemental associations could be used to identify the country of origin of gold. The technique has already been applied in 17 cases involving gold theft in Western Australia, where it is estimated that up to 2% of gold production is "relocated" each year as a result of criminal activities.

Development of large-area high-density plasmasources with a scale length of meters is strongly desired for a variety of plasma processes, especially the flat panel display fabrications. Considering design issues for plasma production with high-frequency power sources to satisfy the requirements for enlargement of source-size exceeding a meter, the power deposition profile and hence the plasma distribution become inherently non-uniform, largely due to standing wave effects, which cannot be avoided with increasing source size when the source employs power-coupling devices (inductive antennas or capacitive electrodes) with a scale-length equivalent to or as long as the 1/4 wavelength of the HF-power transmission. In this article, these constraints associated with large-area sources are reviewed, and an inductively coupled RF plasmasource with multiple low-inductance antenna (LIA) units is presented as a promising candidate to avoid the problems with conventional sources.

In inductiveplasmasources, the rapid spatial decay of the electric field arising from the skin effect produces a large radio frequency (RF) magnetic field via Faraday`s law. We previously determined that this magnetic field leads to a reduction of the electron density in the skin region, as well as a reduction in the collisionless heating rate. The electron deficit leads to the formation of an electrostatic potential which pulls electrons in to restore quasineutrality. Here we calculate the electron density including both the induced and electrostatic fields. If the wave frequency is not too low, the ions respond only to the averaged fields, and hence the electrostatic field is oscillatory, predominantly at the second harmonic of the applied field. We calculate the potential required to establish a constant electron density, and compare with numerical orbit-code calculations. For times short compared to ion transit times, the quasineutral density is just the initial ion density. For timescales long enough that the ions can relax, the density profile can be found from the solution of fluid equations with an effective (ponderomotive-like) potential added. Although the time-varying electrostatic potential is an extra source of heating, the net effect of the induced magnetic and electrostatic fields through trapping, early turning, and direct heating is a significant reduction in collisionless heating for parameters of interest.

Laser induced fluorescence has been used to measure the spatial distribution of the two lowest energy argon excited states, 1s{sub 5} and 1s{sub 4}, in inductively driven plasmas containing argon, chlorine and boron trichloride. The behavior of the two energy levels with plasma conditions was significantly different, probably because the 1s{sub 5} level is metastable and the 1s{sub 4} level is radiatively coupled to the ground state but is radiation trapped. The argon data is compared with a global model to identify the relative importance of processes such as electron collisional mixing and radiation trapping. The trends in the data suggest that both processes play a major role in determining the excited state density. At lower rfpower and pressure, excited state spatial distributions in pure argon were peaked in the center of the discharge, with an approximately Gaussian profile. However, for the highest rfpowers and pressures investigated, the spatial distributions tended to flatten in the center of the discharge while the density at the edge of the discharge was unaffected. The spatially resolved excited state density measurements were combined with previous line integrated measurements in the same discharge geometry to derive spatially resolved, absolute densities of the 1s{sub 5} and 1s{sub 4} argon excited states and gas temperature spatial distributions. Fluorescence lifetime was a strong fi.mction of the rf power, pressure, argon fraction and spatial location. Increasing the power or pressure resulted in a factor of two decrease in the fluorescence lifetime while adding Cl{sub 2} or BCl{sub 3} increased the fluorescence lifetime. Excited state quenching rates are derived from the data. When Cl{sub 2} or BCl{sub 3} was added to the plasma, the maximum argon metastable density depended on the gas and ratio. When chlorine was added to the argon plasma, the spatial density profiles were independent of chlorine fraction. While it is energetically possible for

The design and construction of a thruster that employs electrodeless plasma preionization and pulsed inductive acceleration is described. Preionization is achieved through an electron cyclotron resonance discharge that produces a weakly-ionized plasma at the face of a conical theta pinch-shaped inductive coil. The presence of the preionized plasma allows for current sheet formation at lower discharge voltages than those employed in other pulsed inductive accelerators that do not employ preionization. The location of the electron cyclotron resonance discharge is controlled through the design of the applied magnetic field in the thruster. Finite element analysis shows that there is an arrangement of permanent magnets that yields a small volume of resonant magnetic field at the coil face. Preionization in the resonant zone leads to current sheet formation at the coil face, which minimizes the initial inductance of the pulse circuit and maximizes the potential electrical efficiency of the accelerator. A magnet assembly was constructed around an inductive coil to provide structural support to the selected arrangement of neodymium magnets. Measured values of the resulting magnetic field compare favorably with the finite element model.

An internal-type linear inductive antenna, that is, a double-comb-type antenna, was developed for a large-area plasmasource having the size of 1020 mmx830 mm, and high density plasmas on the order of 2.3x10{sup 11} cm{sup -3} were obtained with 15 mTorr Ar at 5000 W of inductive power with good plasma stability. This is higher than that for the conventional serpentine-type antenna, possibly due to the low impedance, resulting in high efficiency of power transfer for the double-comb antenna type. In addition, due to the remarkable reduction of the antenna length, a plasma uniformity of less than 8% was obtained within the substrate area of 880 mmx660 mm at 5000 W without having a standing-wave effect.

Recent developments in high reliability components for linear induction accelerators (LIA) make possible the use of LIAs as large-scale, economical sources of radio-frequency (rf) power for many applications. One particularly attractive example of interest to high energy physicists is a ''two-beam accelerator'' version of a linear e/sup +/-e/sup -/ collider at TeV energies in which the LIA is configured as a monolithic relativistic klystron operating at 10 to 12 GHz. Another example of keen interest to the fusion community is the use of the LIA to drive a free-electron laser operating at 200 to 500 GHz for use in heating fusion plasma via electron resonance cyclotron heating. This paper briefly describes several potential uses of LIA radiation sources. It discusses the physical basis for scaling our present experience with LIAs to the operating characteristics applicable to large-scale sources of rf power and synchrotron radiation. 14 refs., 6 figs., 1 tab.

The (187)Os/(188)Os ratio that is based on the β(-)-decay of (187)Re to (187)Os (t1/2 = 41.6 billion years) is widely used to investigate petroleum system processes. Despite its broad applicability to studies of hydrocarbon deposits worldwide, a suitable matrix-matched reference material for Os analysis does not exist. In this study, a method that enables Os isotope measurement of crude oil with in-line Os separation and purification from the sample matrix is proposed. The method to analyze Os concentration and (187)Os/(187)Os involves sample digestion under high pressure and high temperature using a high pressure asher (HPA-S, Anton Paar), sparging of volatile osmium tetroxide from the sample solution, and measurements using multicollector inductively coupled plasma mass spectrometry (MC-ICPMS). This methods significantly reduced the total procedural time compared to conventional Carius tube digestion followed by Os separation and purification using solvent extraction, microdistillation and N-TIMS analysis. The method yields Os concentration (28 ± 4 pg g(-1)) and (187)Os/(188)Os (1.62 ± 0.15) of commercially available crude oil reference material NIST 8505 (1 S.D., n = 6). The reference material NIST 8505 is homogeneous with respect to Os concentration at a test portion size of 0.2 g. Therefore, (187)Os/(188)Os composition and Os concentration of NIST 8505 can serve as a matrix-matched reference material for Os analysis. Data quality was assessed by repeated measurements of the USGS shale reference material SCo-1 (sample matrix similar to petroleum source rock) and the widely used Liquid Os Standard solution (LOsSt). The within-laboratory reproducibility of (187)Os/(188)Os for a 5 pg of LOsSt solution, analyzed with this method over a period of 12 months was ∼1.4% (1 S.D., n = 26), respectively. PMID:24552484

A method of processing materials. The invention enables ultrafine, ultrapure powders to be formed from solid ingots in a gas free environment. A plasma is formed directly from an ingot which insures purity. The vaporized material is expanded through a nozzle and the resultant powder settles on a cold surface. An inductively coupled plasma may also be used to process waste chemicals. Noxious chemicals are directed through a series of plasma tubes, breaking molecular bonds and resulting in relatively harmless atomic constituents. 3 figs.

An improved inductively coupled gas plasma torch. The torch includes inner and outer quartz sleeves and tubular insert snugly fitted between the sleeves. The insert includes outwardly opening longitudinal channels. Gas flowing through the channels of the insert emerges in a laminar flow along the inside surface of the outer sleeve, in the zone of plasma heating. The laminar flow cools the outer sleeve and enables the torch to operate at lower electrical power and gas consumption levels additionally, the laminar flow reduces noise levels in spectroscopic measurements of the gaseous plasma.

Inductively coupled ion sources are applied to a wide range of plasma applications, especially surface modifications. The knowledge of the behavior and precise information of the plasma parameters are of main importance. These values are tedious to measure without influencing the discharge. By applying our fully three-dimensional PlasmaPIC tool we are able to reach these plasma parameters with a spatial and temporal resolution which is quite hard to achieve experimentally. PlasmaPIC is used for modeling discharges in arbitrary geometries without limitations to any symmetry. By this means we are able to demonstrate that the plasma density has an irrotational character. Furthermore, we will show the dependence of the plasma parameters of different working conditions. We will show that for gridded inductively coupled ion sources the neutral gas pressure inside the discharge chamber depends on the extraction of ions. This effect is considered in PlasmaPIC by a self-consistent coupling of the neutral gas simulation and the plasma simulation whereas the neutral gas distribution is calculated using the direct simulation Monte Carlo method (DSMC). This work has been supported by the ``Bundesministerium fuer Wirtschaft und Energie.'' Grant 50RS1507.

Neutral and ion transport phenomena were simulated by a hybrid-type direct simulation Monte Carlo (DSMC) method for a one-dimensional (1D) electrostatic plasma in Ar/N{sub 2} mixtures to identify the mechanism of neutral depletion. The results show that gas heating and pressure balance are the main mechanisms of neutral depletion in an inductively coupled plasma. When plasma pressure becomes comparable to neutral pressure in high density plasmasources (T{sub e}{approx}2-5 eV, n{sub e}{approx}10{sup 11}-10{sup 12} cm{sup -3}), the total pressure (neutral pressure and plasma pressure) is conserved. Therefore, the finite plasma pressure (mainly electron pressure) reduces the neutral pressure. Neutrals collide with ions that have been accelerated by the ambipolar electric field and with Franck-Condon dissociated atoms, resulting in gas heating. Significant neutral depletion (up to 90%) is found at the typical condition of inductively coupled plasma process reactors. The resulting neutral depletion enhances the plasma transport to the surrounding wall, increases the particle loss, and decreases the plasma density.

Measurements and analysis of a radio-frequency planar antenna are presented for applications in inductively-coupled plasma processing. The network of inductive and capacitive elements exhibits high currents under resonance which are efficient for plasma generation. Mode frequencies and impedances are accurately calculated by accounting for the mutual partial inductances using the impedance matrix. The effect of plasmainductive coupling on mode frequency shift and mode impedance is estimated using the complex image method, giving good agreement with experiment. It is proposed that the complex image method combined with the partial inductance concept (see the accompanying paper, Part I (Howling et al 2015 PlasmaSources Sci. Technol. 24 065014)) offers a general way to calculate the impedance characteristics of inductively-coupled plasmasources in planar geometry.

Recently it has been recognized that the neutral gas in inductively coupled plasma reactors heats up significantly during processing. The resulting gas density variations across the reactor affect reaction rates, radical densities, plasma characteristics, and uniformity within the reactor. A self-consistent model that couples the plasma generation and transport to the gas flow and heating has been developed and used to study CF4 discharges. A Langmuir probe has been used to measure radial profiles of electron density and temperature. The model predictions agree well with the experimental results. As a result of these comparisons along with the poorer performance of the model without the gas-plasma coupling, the importance of gas heating in plasma processing has been verified.

We report on the observation of rapid particle acceleration in numerical simulations of relativistic jet-plasma interactions and discuss the underlying mechanisms. The dynamics of a charge-neutral, narrow, electron-positron jet propagating through an unmagnetized electron-ion plasma was investigated using a three-dimensional, electromagnetic, particle-in-cell computer code. The interaction excited magnetic filamentation as well as electrostatic (longitudinal) plasma instabilities. In some cases, the longitudinal electric fields generated inductively and electrostatically reached the cold plasma wave-breaking limit, and the longitudinal momentum of about half the positrons increased by 50% with a maximum gain exceeding a factor of two. The results are relevant to understanding the micro-physics at the interface region of an astrophysical jet with the interstellar plasma, for example, the edge of a wide jet or the jet-termination point.

To control the plasma characteristics more efficiently, a dual antenna inductively coupled plasma (DF-ICP) source composed of a 12-turn inner antenna operated at 2 MHz and a 3-turn outer antenna at 13.56 MHz was pulsed. The effects of pulsing to each antenna on the change of plasma characteristics and SiO2 etch characteristics using Ar/C4F8 gas mixtures were investigated. When the duty percentage was decreased from continuous wave (CW) mode to 30% for the inner or outer ICP antenna, decrease of the average electron temperature was observed for the pulsing of each antenna. Increase of the CF2/F ratio was also observed with decreasing duty percentage of each antenna, indicating decreased dissociation of the C4F8 gas due to the decreased average electron temperature. When SiO2 etching was investigated as a function of pulse duty percentage, increase of the etch selectivity of SiO2 over amorphous carbon layer (ACL) was observed while decreasing the SiO2 etch rate. The increase of etch selectivity was related to the change of gas dissociation characteristics, as observed by the decrease of average electron temperature and consequent increase of the CF2/F ratio. The decrease of the SiO2 etch rate could be compensated for by using the rf power compensated mode, that is, by maintaining the same time-average rf power during pulsing, instead of using the conventional pulsing mode. Through use of the power compensated mode, increased etch selectivity of SiO2/ACL similar to the conventional pulsing mode could be observed without significant decrease of the SiO2 etch rate. Finally, by using the rf power compensated mode while pulsing rf powers to both antennas, the plasma uniformity over the 300 mm diameter substrate could be improved from 7% for the CW conditions to about around 3.3% with the duty percentage of 30%.

A zoom-time-of-flight mass spectrometer has been coupled to an inductively coupled plasma (ICP) ionization source. Zoom-time-of-flight mass spectrometry (zoom-TOFMS) combines two complementary types of velocity-based mass separation. Specifically, zoom-TOFMS alternates between conventional, constant-energy acceleration (CEA) TOFMS and energy-focused, constant-momentum acceleration (CMA) (zoom) TOFMS. The CMA mode provides a mass-resolution enhancement of 1.5-1.7× over CEA-TOFMS in the current, 35-cm ICP-zoom-TOFMS instrument geometry. The maximum resolving power (full-width at half-maximum) for the ICP-zoom-TOFMS instrument is 1200 for CEA-TOFMS and 1900 for CMA-TOFMS. The CMA mode yields detection limits of between 0.02 and 0.8 ppt, depending upon the repetition rate and integration time—compared with single ppt detection limits for CEA-TOFMS. Isotope-ratio precision is shot-noise limited at approximately 0.2% relative-standard deviation (RSD) for both CEA- and CMA-TOFMS at a 10 kHz repetition rate and an integration time of 3-5 min. When the repetition rate is increased to 43.5 kHz for CMA, the shot-noise limited, zoom-mode isotope-ratio precision is improved to 0.09% RSD for the same integration time.

The interaction of the Jovian magnetospheric environment with an atmosphere and induced dipole at Callisto is investigated by applying a hybrid (kinetic ions, fluid electrons) simulation code. Callisto is unique among the Galilean satellites in its interaction with the ambient magnetospheric plasma as the gyroradii of the impinging plasma and pickup ions are large compared to the size of the moon. A kinetic representation of the ions is therefore mandatory to adequately describe the resulting asymmetries in the electromagnetic fields and the deflection of the plasma flow near Callisto. When Callisto is embedded in the magnetodisk lobes of Jupiter, a dipolar magnetic field is generated via induction in a subsurface ocean. This field creates an obstacle to the impinging magnetospheric plasma flow at the moon. However, when Callisto is located near the center of the Jovian current sheet, local magnetic perturbations due to the magnetosphere-ionosphere interaction are more than twice the strength of the background field and may therefore obscure any magnetic signal generated via induction in a subsurface ocean. Our simulations demonstrate that the deflection of the magnetospheric plasma into Callisto's wake cannot alone explain the plasma density enhancement of two orders of magnitude measured in the wake of the interaction region during Galileo flybys of the moon. However, through inclusion of an ionosphere around Callisto, modeled densities in the wake are consistent with in situ measurements.

Optimizing and controlling electron energy distributions (EEDs) is a continuing goal in plasma materials processing as EEDs determine the rate coefficients for electron impact processes. There are many strategies to customize EEDs in low pressure inductively coupled plasmas (ICPs), for example, pulsing and choice of frequency, to produce the desired plasma properties. Recent experiments have shown that EEDs in low pressure ICPs can be manipulated through the use of static magnetic fields of sufficient magnitudes to magnetize the electrons and confine them to the electromagnetic skin depth. The EED is then a function of the local magnetic field as opposed to having non-local properties in the absence of the magnetic field. In this paper, EEDs in a magnetized inductively coupled plasma (mICP) sustained in Ar are discussed with results from a two-dimensional plasma hydrodynamics model. Results are compared with experimental measurements. We found that the character of the EED transitions from non-local to local with application of the static magnetic field. The reduction in cross-field mobility increases local electron heating in the skin depth and decreases the transport of these hot electrons to larger radii. The tail of the EED is therefore enhanced in the skin depth and depressed at large radii. Plasmas densities are non-monotonic with increasing pressure with the external magnetic field due to transitions between local and non-local kinetics.

Magnetic fields are applied to inductively coupled plasma (ICP) to achieve high plasma densities using electromagnets. If the magnetic fields are set up such that the magnitude of magnetic flux density on the substrate decreases with both radial and axial distances from the substrate’s center (here after referred to as M-ICP-A), the plasma density increases by 237% compared with that for ICP although the non-uniformity of the plasma density for M-ICP-A (11.1%) is higher than that for ICP (10.9%). As the rate of decrease in the magnitude of magnetic flux density on the substrate increases both radially and axially, the non-uniformity in the plasma density increases further. The increase in the non-uniformity for M-ICP-A was confirmed to arise from the flute instability. To suppress the flute instability, we arranged the magnitude of magnetic flux density on the substrate to increase with increasing distance from the substrate center both radially and axially (here after referred to as M-ICP-V). In this configuration, plasma fluctuations were not observed, hence the plasma density non-uniformity was lowered to 8.1%, although the measured plasma density was higher than that for M-ICP-A. The oxide etch-rate non-uniformity in M-ICP-V (2.5%) was also lower than that for ICP (5.2%) or that for M-ICP-A (21.4%).

Electron energy probability functions (EEPFs) were measured in a low pressure argon inductive discharge. As radio frequency (RF) power increases, discharge mode is changed from E-mode (capacitively coupled) to H-mode (inductively coupled) and the EEPFs evolve from a bi-Maxwellian distribution to a Maxwellian distribution. It is found that the plasma densities at low RF powers (<30 W) are much higher than the density predicted from the slope of the densities at high powers. Because high portion of high energy electrons of the bi-Maxwellian distribution lowers the collisional energy loss and low electron temperature of low energy electrons reduces particle loss rate at low powers. Therefore, the energy loss of plasma decreases and electron densities become higher at low powers.

Thin coatings of normally solid materials are applied to target substrates using an inductively coupled plasma. Particles of the coating material are vaporized by plasma heating, and pass through an orifice to a first vacuum zone in which the particles are accelerated to a velocity greater than Mach 1. The shock wave generated in the first vacuum zone is intercepted by the tip of a skimmer cone that provides a second orifice. The particles pass through the second orifice into a second zone maintained at a higher vacuum and impinge on the target to form the coating. Ultrapure coatings can be formed.

A numerical investigation of sputtering distribution on antenna cover in Radio Frequency (13.56 MHz) plasma(RF plasma) source by energetic ions bombardment has been performed including influences of static electric field from voltage of antenna and of inductive electric field from current of antenna. In order to validate the developed technique, the static electron heating distribution and the inductive electron heating distribution in simulation are compared. The comparison shows the static electric field is shielded in the sheath of the high electron density (1017m-3) plasma and the plasma is sustained by inductive electric field from current of antenna. The deep sheath potential in simulation is generated over the region of large vulnerable in experiment. The numerical simulation technique with calculating static electric field and inductive electric field is important for development of the RF plasmasource with large current and long life time.

The effects of capacitor termination to a solenoidal antenna coil on the plasma parameters, such as the plasma density, the electron temperature, the electron energy distribution function and the plasma potential, are studied in an Ar or O2/N2 gas mixture inductively coupled plasma (ICP). As the capacitance is varied from tens to hundreds of pF, the plasma parameters change significantly. When the reactance of the capacitor is half that of the antenna, there is a resonance condition where the electrostatic coupling between the antenna coil and the chamber wall is effectively suppressed. The plasma density is maximal, while the electron temperature and the plasma potential are minimal under this resonance condition. This result shows that the ICP generated by the antenna coil with capacitor termination can be applied to a plasma process that requires high plasma density and low ion damage. The ashing process of a photoresistor by the ICP source with capacitor termination is also performed in this study and it is found that the ashing rate is enhanced under the resonance condition compared with the non-resonance condition.

The primary source of plasma for Jupiter's magnetosphere is supplied internally by Io, the innermost Galilean satellite. The Iogenic plasmasource is created by gases (e.g., Na, K, O, S, and SO_2) lost from Io as they undergo electron impact and charge exchange reactions in the plasma torus. This Iogenic plasmasource provides mass, momentum, pick-up electrical conductivity, and energy to the plasma torus. The three-dimensional nature of the Iogenic plasmasource is an important input quantity (1) in local studies to understand the plasma torus properties (density, composition, subcorotational motion, electric currents, and temperature) and the plasma torus near-Io MHD flow and atmosphere interactions, and (2) in more global studies to understand the spacetime structure of the outward transport dynamics of the plasma torus, such as in RCM-J (Rice Convection Model for Jupiter) calculations. To elucidate and quantify the nature of the Iogenic plasmasource for such studies, we have undertaken simulations of it using the AER neutral cloud models. Calculations will be presented to illustrate the spacetime nature of the Iogenic plasmasource and to estimate the net-mass, momentum and energy input rates to the plasma torus and the height-integrated electrical conductivity near Io and in Jupiter's ionosphere. These calculations show that the instantaneous Iogenic plasmasource is highly peaked at Io's position in the plasma torus and that its rates vary significantly with Io System III longitude and also with Io phase angle because of the east-west electric field. For the lower-velocity escape of gases by incomplete collisional cascade processes (i.e., plasma torus ion sputtering), contributions to the instantaneous Iogenic plasmasource are primarily confined to a broader (but still limited) spatial region in L-shell and System III longitude angle near Io. For the higher-velocity loss of gases by charge exchange, contributions to the Iogenic plasmasource are more

The effect of inductive coil geometry on the operating characteristics of a pulsed inductiveplasma thruster is investigated analytically and experimentally. Coil inductance is measured as a function of the position of a simulated current sheet and modeled using finite element analysis to develop a two-dimensional semi-empirical inductance relation that is used to expand a circuit-based acceleration model from one to two dimensions. The model includes electromagnetic and gas-dynamic forces but excludes any process to translate radial plasma motion into axial motion. Furthermore a magnetically-impermeable current sheet encompassing all the propellant for a pulse is assumed to form immediately at the start of the pulse and at the surface of the inductive coil. The two-dimensional acceleration model is nondimensionalized, yielding a set of dimensionless performance scaling parameters. Model results indicate that the introduction of radial current sheet motion caused by a conical inductive coil geometry (versus a flat circular plate) increases the axial dynamic impedance parameter at which thrust efficiency is maximized and generally decreases the overall achievable thrust efficiency. Operational characteristics of two thrusters with inductive coils of different cone angles are explored through thrust stand measurements and time-integrated, unfiltered photography. Trends in impulse bit measurements indicate that, in the present configuration, the thruster with the inductive coil possessing a smaller cone angle produced larger values of thrust, in apparent contradiction to results of the model. Areas of increased light intensity in photographs of thruster operation are assumed to qualitatively represent locations of increased current density. Light intensity is generally greater in images of the thruster with the smaller cone angle when compared to those of the thruster with the larger half cone angle for the same operating conditions, and generally decreases in both

A ferrite-module-enhanced internal-type linear inductively coupled plasma (ICP) source having multiple U-type antennas operated at 2 MHz has been proposed as a promising candidate to serve as an efficient high-density plasmasource for plasma processing areas larger than 2,000×2,300 mm2. When the ICP source was operated at 2 MHz RF power with the ferrite module, high density plasmas on the order of 2.9×1011 cm-3 were obtained at 10 mTorr Ar by applying 4 kW RF power/one U-type antenna; this is 1.5 times higher than the densities obtained at 13.56 MHz without the ferrite module. The higher plasma density obtained with the ICP source operated at 2 MHz with the ferrite module compared with that operated at 13.56 MHz without the ferrite module is related to the magnetic field enhancement caused by the ferrite module. The etch uniformity on a substrate of 2,300×2,000 mm2 at 15 mTorr Ar/O2 (7:3) and about 2.3 kW/U-type antenna was about 11%.

Multicomponent metal targets serving as sources of vapor for plasma vapor deposition made in modified pressureless-sintering process. By use of targets made in modified process, one coats components with materials previously plasma-sprayed or sintered but not plasma-vapor-deposited.

Plasma instabilities are observed in low-pressure inductive discharges in the transition between low density capacitively driven and high density inductively driven discharges when attaching gases are used. A two-dimensional hybrid fluid-analytic simulation is used to determine the space- and time-varying densities of electrons, positive and negative ions, and neutral species, and electron and neutral gas temperatures. The simulation includes both the capacitive and inductive coupling of the source coils to the plasma and the neutral gas dissociation and heating. The plasma is described using the time-dependent fluid equations, along with an analytical sheath model. The simulation is applied to an experiment in Cl2, in which gaps in the electron and positive ion densities versus power curves were observed, with our numerical results indicating the existence of an inductive-capacitive transition instability, corresponding approximately to the observed gaps. The fluid calculation captures various features that are not included in previous global instability models. A method is developed to match the numerical results to the global model formalism, which predicts the existence of the unstable mode, as numerically found. The time and space variations can be used to improve the global model formalism.

A method is given for producing energetic ions by ionizing a gas with an oscillating electric field which is parallel to a confining magnetic field, then reorienting the fields perpendicular to each other to accelerate the ions to higher energies. An ion source is described wherein a secondary coil threads the bottom of a rectangular ionization chamber and induces an oscillating field parallel to a fixed intense magnetic field through the chamber. (AEC)

Inductively coupled plasma mass spectrometry (ICP-MS) complements the traditional methods of quantitation of radioactive isotopes. Because of the favorable ionization potential of most actinides and their daughter products, the argon plasma provides a rich, stable source of ions, which are introduced through a plasma-mass spectrometer interface into the mass spectrometer for isotopic separation. Samples are normally introduced in solution, although direct solids analysis has also been achieved using laser ablation of the sample into the argon plasma. Since 1983, improvements in ICP-MS sensitivity have resulted in correspondingly lower mass detection capability. This development has in turn expanded the number of isotopes accessible to measurement at the levels required in the nuclear industry.

Measurements of electron number density, electron temperature, and electron energy distribution function (EEDF) using a compensated Langmuir probe have been performed on an inductively (transformer ) coupled Gaseous Electronics Conference (GEC) reference cell plasma. The plasmasource is operated with CH4, CF4, or their mixtures with argon. The effect of independently driving the electrode supporting the wafer on the probe data is studied. In particular, we find that the plasma structure depends on the phase in addition to the magnitude of the power coupled to the electrode relative to that of the transformer coil. The Langmuir probe is translated in a plane parallel to the electrode to investigate the spatial structure of the plasma. The probe data is also compared with fluid model predictions.

Spatial distributions of various plasma parameters such as plasma density, electron temperature, and radical density in an inductively coupled plasma (ICP) and a magnetized inductively coupled plasma (M-ICP) were investigated and compared. Electron temperature in between the rf window and the substrate holder of M-ICP was higher than that of ICP, whereas the one just above the substrate holder of M-ICP was similar to that of ICP when a weak (<8 G) magnetic field was employed. As a result, radical densities in M-ICP were higher than those in ICP and the etch rate of oxide in M-ICP was faster than that in ICP without severe electron charging in 90 nm high aspect ratio contact hole etch.

An inductively coupled plasma torch is provided which comprises an inner tube, including a sample injection port to which the sample to be tested is supplied and comprising an enlarged central portion in which the plasma flame is confined; an outer tube surrounding the inner tube and containing water therein for cooling the inner tube, the outer tube including a water inlet port to which water is supplied and a water outlet port spaced from the water inlet port and from which water is removed after flowing through the outer tube; and an r.f. induction coil for inducing the plasma in the gas passing into the tube through the sample injection port. The sample injection port comprises a capillary tube including a reduced diameter orifice, projecting into the lower end of the inner tube. The water inlet is located at the lower end of the outer tube and the r.f. heating coil is disposed around the outer tube above and adjacent to the water inlet.

An inductively coupled plasma torch is provided which comprises an inner tube, including a sample injection port to which the sample to be tested is supplied and comprising an enlarged central portion in which the plasma flame is confined; an outer tube surrounding the inner tube and containing water therein for cooling the inner tube, the outer tube including a water inlet port to which water is supplied and a water outlet port spaced from the water inlet port and from which water is removed after flowing through the outer tube; and an rf induction coil for inducing the plasma in the gas passing into the tube through the sample injection port. The sample injection port comprises a capillary tube including a reduced diameter orifice, projecting into the lower end of the inner tube. The water inlet is located at the lower end of the outer tube and the rf heating coil is disposed around the outer tube above and adjacent to the water inlet.

METC is continuing development of a real-time, multi-element plasma based spectrometer system for application to high temperature and high pressure fossil fuel process streams. Two versions are under consideration for development. One is an Inductively Coupled Plasma system that has been described previously, and the other is a high power microwave system. The ICP torch operates on a mixture of argon and helium with a conventional annular swirl flow plasma gas, no auxiliary gas, and a conventional sample stream injection through the base of the plasma plume. A new, demountable torch design comprising three ceramic sections allows bolts passing the length of the torch to compress a double O-ring seal. This improves the reliability of the torch. The microwave system will use the same data acquisition and reduction components as the ICP system; only the plasmasource itself is different. It will operate with a 750-Watt, 2.45 gigahertz microwave generator. The plasma discharge will be contained within a narrow quartz tube one quarter wavelength from a shorted waveguide termination. The plasmasource will be observed via fiber optics and a battery of computer controlled monochromators. To extract more information from the raw spectral data, a neural net computer program is being developed. This program will calculate analyte concentrations from data that includes analyte and interferant spectral emission intensity. Matrix effects and spectral overlaps can be treated more effectively by this method than by conventional spectral analysis.

Independent control of the ion flux and energy can be achieved in a dual frequency inductively coupled plasma (ICP) system. Typically, the plasma density is controlled by the high-frequency antenna radio-frequency (RF) power and the ion energy is controlled by the low-frequency bias RF power. Increasing the bias power has been known to cause a decrease in the plasma density in capacitively coupled discharge systems as well as in ICP systems. However, an applied axial magnetic field was found to sustain or increase the plasma density as bias power is increased. Measurements show higher electron temperatures but lower plasma densities are obtained in ordinary ICP systems than in magnetized ICP systems under the same neutral gas pressure and RF power levels. Explanations for the difference in the behavior of plasma density with increasing bias power are given in terms of the difference in the heating mechanism in ordinary unmagnetized and magnetized ICP systems.

Correct prediction of the fission products inventory in irradiated nuclear fuels is essential for accurate estimation of fuel burnup, establishing proper requirements for spent fuel transportation and storage, materials accountability and nuclear forensics. Such prediction is impossible without accurate knowledge of neutron induced fission yields. Unfortunately, the accuracy of the fission yields reported in the ENDF/B-VII.0 library is not uniform across all of the data and much of the improvement is desired for certain isotopes and fission products. We discuss our measurements of cumulative fission yields in nuclear fuels irradiated in thermal and fast reactor spectra using Inductively Coupled Plasma Mass Spectrometry.

Inductionplasma heating techniques were studied for calcining zinc orthotitanate particles for use in thermal control coatings. Previous studies indicated that the optimum calcining temperature is between 1400 and 1750 C. An intermediate temperature (1670 C) was chosen as a reference point for running a temperature series at the reference point and 220 C on both sides. The effect of varying chamber temperature on the reflectance spectra, before and after vacuum UV irradiation, is presented. The correlation between Zn2Ti04 paramagnetic resonance activity and its susceptibility to vacuum UV damage is discussed.

Optimization of radiofrequency (RF) plasmasources for the development of space thrusters differs from other applications such as plasma processing of materials since power efficiency, propellant usage, particle acceleration or heating become driving parameters. The development of two RF (13.56 MHz) plasmasources, the high-pressure (˜1 Torr) capacitively coupled ‘pocket rocket’ plasma micro-thruster and the low-pressure (˜1 mTorr) inductively coupled helicon double layer thruster (HDLT), is discussed within the context of mature and emerging electric propulsion devices. The density gradient in low-pressure expanding RF plasmas creates an electric field that accelerates positive ions out of the plasma. Generally, the total potential drop is similar to that of a wall sheath allowing the plasma electrons to neutralize the ion beam. A high-pressure expansion with no applied magnetic field can result in large dissociation rates and/or a collimated beam of ions of small area and a flowing heated neutral beam (‘pocket rocket’). A low-pressure expansion dominated by a magnetic field can result in the formation of electric double layers which produce a very directed neutralized beam of ions of large area (HDLT).

It is well known experimentally that the circuit matching network plays an important role in the mode transition behavior of inductively coupled plasmas. To date, however, there have been no reports of numerical models being used to study the role of the matching circuit in the transition process. In this paper, a new two-dimensional self-consistent fluid model that couples the components of an equivalent circuit module is developed to investigate the effects of the equivalent circuit on the mode transition characteristics of an inductively coupled, hydrogen plasma. The equivalent circuit consists of a current source, impedance matching network, reactor impedance, and plasma transferred impedance. The nonlinear coupling of the external circuit with the internal plasma is investigated by adjusting the matching capacitance at a fixed input current. The electron density and temperature as well as the electromagnetic fields all change suddenly, and the E to H mode transition occurs abruptly at a certain matching capacitance as the impedance matching of the external circuit is varied. We also analyze the fields and the plasma characteristics during the transition process, especially for the case of the capacitive E mode.

Pulsed inductiveplasma thrusters [1-3] are spacecraft propulsion devices in which electrical energy is capacitively stored and then discharged through an inductive coil. The thruster is electrodeless, with a time-varying current in the coil interacting with a plasma covering the face of the coil to induce a plasma current. Propellant is accelerated and expelled at a high exhaust velocity (O(10-100 km/s)) by the Lorentz body force arising from the interaction of the magnetic field and the induced plasma current. While this class of thruster mitigates the life-limiting issues associated with electrode erosion, pulsed inductiveplasma thrusters require high pulse energies to inductively ionize propellant. The Microwave Assisted Discharge InductivePlasma Accelerator (MAD-IPA) [4, 5] is a pulsed inductiveplasma thruster that addressees this issue by partially ionizing propellant inside a conical inductive coil via an electron cyclotron resonance (ECR) discharge. The ECR plasma is produced using microwaves and permanent magnets that are arranged to create a thin resonance region along the inner surface of the coil, restricting plasma formation, and in turn current sheet formation, to a region where the magnetic coupling between the plasma and the inductive coil is high. The use of a conical theta-pinch coil is under investigation. The conical geometry serves to provide neutral propellant containment and plasma plume focusing that is improved relative to the more common planar geometry of the Pulsed Inductive Thruster (PIT) [2, 3], however a conical coil imparts a direct radial acceleration of the current sheet that serves to rapidly decouple the propellant from the coil, limiting the direct axial electromagnetic acceleration in favor of an indirect acceleration mechanism that requires significant heating of the propellant within the volume bounded by the current sheet. In this paper, we describe thrust stand measurements performed to characterize the performance

A prototype RF H(-) surface plasmasource (SPS) with saddle (SA) RF antenna is developed which will provide better power efficiency for high pulsed and average current, higher brightness with longer lifetime and higher reliability. Several versions of new plasma generators with small AlN discharge chambers and different antennas and magnetic field configurations were tested in the plasmasource test stand. A prototype SA SPS was installed in the Spallation Neutron Source (SNS) ion source test stand with a larger, normal-sized SNS AlN chamber that achieved unanalyzed peak currents of up to 67 mA with an apparent efficiency up to 1.6 mA∕kW. Control experiments with H(-) beam produced by SNS SPS with internal and external antennas were conducted. A new version of the RF triggering plasma gun has been designed. A saddle antenna SPS with water cooling is fabricated for high duty factor testing. PMID:22380221

A prototype RF H{sup -} surface plasmasource (SPS) with saddle (SA) RF antenna is developed which will provide better power efficiency for high pulsed and average current, higher brightness with longer lifetime and higher reliability. Several versions of new plasma generators with small AlN discharge chambers and different antennas and magnetic field configurations were tested in the plasmasource test stand. A prototype SA SPS was installed in the Spallation Neutron Source (SNS) ion source test stand with a larger, normal-sized SNS AlN chamber that achieved unanalyzed peak currents of up to 67 mA with an apparent efficiency up to 1.6 mA/kW. Control experiments with H{sup -} beam produced by SNS SPS with internal and external antennas were conducted. A new version of the RF triggering plasma gun has been designed. A saddle antenna SPS with water cooling is fabricated for high duty factor testing.

The E to H mode transitions are studied by a hairpin probe and optical emission spectroscopy in inductively coupled CF4 + Ar plasmas. Electron density, optical emission intensity of Ar, and the voltage and current are measured during the E to H mode transitions. It is found that the electron density and plasma emission intensity increase continuously at low pressure during the E to H mode transition, while they jump up discontinuously at high pressure. Meanwhile, the transition threshold power and △P (the power interval between E and H mode) increase by increasing the pressure. When the ratio of CF4 increases, the E to H mode transition happens at higher applied power, and meanwhile, the △P also significantly increases. Besides, the effects of CF4 gas ratio on the plasma properties and the circuit electrical properties in both pure E and H modes were also investigated. The electron density and plasma emission intensity both decrease upon increasing the ratio of CF4 at the two modes, due to the stronger electrons loss scheme. The applied voltages at E and H modes both increase as increasing the CF4 gas ratio, however the applied current at two modes behave just oppositely with the gas ratio.

This article reviews the different sources of plasma for Saturn's magnetosphere, as they are known essentially from the scientific results of the Cassini-Huygens mission to Saturn and Titan. At low and medium energies, the main plasmasource is the H2O cloud produced by the "geyser" activity of the small satellite Enceladus. Impact ionization of this cloud occurs to produce on the order of 100 kg/s of fresh plasma, a source which dominates all the other ones: Titan (which produces much less plasma than anticipated before the Cassini mission), the rings, the solar wind (a poorly known source due to the lack of quantitative knowledge of the degree of coupling between the solar wind and Saturn's magnetosphere), and the ionosphere. At higher energies, energetic particles are produced by energy diffusion and acceleration of lower energy plasma produced by the interchange instabilities induced by the rapid rotation of Saturn, and possibly, for the highest energy range, by contributions from the CRAND process acting inside Saturn's magnetosphere. Discussion of the transport and acceleration processes acting on these plasmasources shows the importance of rotation-induced radial transport and energization of the plasma, and also shows how much the unexpected planetary modulation of essentially all plasma parameters of Saturn's magnetosphere remains an unexplained mystery.

The entropy properties in a D.C. argon arc plasmasource are studied. The local thermodynamical entropy relations are established for a set of uniform sub-systems (Ar, Ar{sup +}, e) in order to deduce the entropy balance equation in presence of dissipative effects and in the case of a thermal non equilibrium. Phenomenological linear laws are deduced in near equilibrium situation. The flow parameters inside the plasmasource are calculated by a Navier-Stokes fluid description taking into account a thermal local non equilibrium. The entropy function is calculated in the plasmasource using the values of the local variables obtained from the numerical code.

Io, the innermost Galilean satellite of Jupiter, supplies the primary source of heavy ion plasma for the planetary magnetosphere. Understanding the temporal and three-dimensional nature of the Iogenic plasmasource (pickup ions created by ionization and charge exchange of neutrals in Io's local and extended atmosphere) is highly relevant to a large number of studies for the Io-Jupiter system. These studies include the structure and outward transport of the plasma torus and a significant number of coupled electrodynamic interactions that have been observed by ground-based, earth-orbiting, and interplanetary spacecraft instruments to occur between the plasma torus, Io, and Jupiter. To explore the nature of the Iogenic plasmasource, we have undertaken neutral cloud model calculations for atmospheric gases located above Io's exobase (in the corona and extended clouds) and have calculated in three dimensions their instantaneous electron impact ionization and charge exchange production rates in the plasma torus. Here we report on the spatial nature of the Iogenic plasmasource that is created by realistic incomplete collisional cascade velocity distribution sources for O and S at Io's exobase. On a large circumplanetary spatial scale, the Iogenic plasmasource is highly peaked at Io's instantaneous position on its orbit about Jupiter. On finer spatial scales near Io, the three-dimensional spatial structure of this sharp peak will be presented and implications discussed. This finer spatial scale description of the Iogenic plasmasource is particularly relevant to understanding the Galileo Plasma Analyzer (PLS) measured downstream spatial and velocity distributions for the ions near Io (Frank et al. Science 274 394-395, 1996) and the Galileo Magnetometer (MAG) measured magnetic field reduction near Io (Kivelson et al., Science 274, 396-398, 1996) as well as new particle and field data expected during the Galileo I24 and I25 encounters with Io.

SF6 gas or Ar/SF6 mixing gas is widely used in plasma processes. However, there are a little experimental study with various external parameters such as gas pressures and mixing ratios. In this work, a study of the plasma parameters was done in Ar/SF6 inductively coupled plasma (ICP) from a careful measurement of the electron energy distribution function (EEDF). The measured plasma parameters are compared to the theoretical results with simplified global model. At a low gas pressure, as mixing ratio of SF6 gas increased at a fixed ICP power, electron density decreased and electron temperature increased, but they were not changed largely. However, a remarkable increase in the electron temperature was observed with decrease in the electron density at higher gas pressures. These changes in the plasma parameters could be explained by large electron losses due to the electron attachment and the experimental results were in agreement with the theoretical results.

Proposed plasma generation system can be used for high current negative ion beam production and for directed deposition by flux of sputtered neutrals and negative ions. The main mechanism of negative ion formation in surface plasmasources is the secondary emission from low work function surface bombarded by a flux of positive ion or neutrals. The emission of negative ions is enhanced significantly by introducing a small amount of cesium or other substance with low ionization potential. In the proposed source are used positive ions generated by Hall drift plasma accelerator (anode layer plasma accelerator or plasma accelerator with insulated channel, with cylindrical or race track configuration of emission slit). The target-emitter is bombarded by the ion beam accelerated in crossed ExB fields. Negative ions are extracted from the target surface with geometrical focusing and are accelerated by negative voltage applied between emitter and plasma, contacting with the plasma accelerator. Hall drift ion source has a special design with a space for passing of the emitted negative ions and sputtered particles through the positive ion source.

The pair e(+)-e(-) annihilation phenomena in hot plasma was studied in order to evaluate the photon energy spectrum. The spectra of the broadening 0.511 MeV annihilation line was calculated in the case of unthermalized plasma, i.e., T sub e(-) does not equal T sub e(+). The energy spectra from annihilation process for unthermalized positrons are characterized by the presence of flat part for energies greater than 0.511 MeV. The flattening in the spectrum of annihilation unthermalized plasma is a strong indication that the observed features of the hard tailed spectrum of the gamma bursts can be well described by annihilation of hot positrons and cold electrons. It is proposed that the mechanism for the production of unthermalized positrons is associated with the charge separation in Eddington limited accretion onto a neutron star.

The effects of Ar plasma exposure on transconductance, channel sheet resistance, output resistance, and gate contact ideality factor of GaAs metal-semiconductor field-effect transistors (MESFETs) were investigated using two different high-density plasmasources, namely inductively coupled plasma and electron resonance plasma. Ion-induced damage is found to be reduced at moderate source powers ({approximately}200W) because of the reduction in cathode dc self-bias and hence ion energy, but at higher source powers the increase in ion flux produces significant deterioration of the device performance. Careful attention must be paid to both ion flux and ion energy in order to minimize ion-induced damage. Due to their relatively low channel doping levels, MESFETs are found to be more sensitive to plasma damage than devices with very heavily doped component layers such as heterojunction bipolar transistors. {copyright} {ital 1997 American Vacuum Society.}

A new type of plasmasource is presented: A collisionless plasma is formed by producing ions on one end and electrons on the other of a cylindrical vacuum chamber in a solenoidal magnetic field. The ions are produced by contact ionization of potassium on tungsten. The source of electrons is a LaB/sub 6/ plate. In the usual single-ended Q machine the elements rhenium, iridium, and platinum are tested as ionizing metals for potassium and barium.

In order to include the nonlocal characteristics of electrons and investigate the inductively coupled plasma (ICP) resources more completely, we have developed a hybrid Monte Carlo (MC)/fluid hybrid model and calculated the axial and radial distributions of electron density, electron temperature, plasma potential, and electron energy distribution functions (EEDFs) of Ar discharge in a planar ICP. Furthermore, to make the model more practical, we still incorporate the effects of metastable atoms, whose sets of rate coefficients and density are, respectively, calculated through the electron MC part and fluid module. Besides, the corresponding Langmuir probe measurements are used to compare these data to validate the simulated results. Under all the selected discharge powers and pressures, the theoretically simulated and experimentally measured quantity profiles agree reasonably with each other, embodied in the generally identical magnitude ranges and spatial distributions. Furthermore, the interpretations about their detailed differences are given, which are based on the designs of both experimental schematic and model configuration. The analysis implements that the inclusions of electron-electron collision and a neutral density distribution into the hybrid model are likely to improve the comparison between the model predictions and experiment diagnostics. Furthermore, the evolution of plasma parameters and EEDFs with discharge conditions is discussed.

Device generates argon, krypton, or xenon plasma via thermionic emission and electrical discharge within hollow cathode and ejects plasma into surrounding vacuum. Goes from cold start up to full operation in less than 5 s after initial application of power. Exposed to moist air between operations without significant degradation of starting and running characteristics. Plasma generated by electrical discharge in cathode barrel sustained and aided by thermionic emission from emitter tube. Emitter tube does not depend on rare-earth oxides, making it vulnerable to contamination by exposure to atmosphere. Device modified for use as source of plasma in laboratory experiments or industrial processes.

This paper gives the results of studies on a plasma x-ray source, which enables one to obtain a 2.5-krad radiation dose per pulse over an area of 100 cm2 in the quantum energy range from 20 to 500 keV. Pulse duration is 100 ns. Spectral radiation distributions from a diode under various operation conditions of a plasma are obtained. A Marx generator served as an initial energy source of 120 kJ with a discharge time of T/4 = 10-6 s. A short electromagnetic pulse (10-7 s) was shaped using plasma erosion opening switches. PMID:21307500

A pulsed rf plasmasource was evaluated for materials processing. A pulsed rf discharge of carbon tetrafluoride (CF_4), sulfur hexafluoride (SF _6), oxygen (O_2), or acetylene (C_2H_2 ) created the plasmas. The frequency and duration of the rf discharge were about 290 kHz and 30 musec, respectively. The repetition rate was 1 discharge per minute. Plasma diagnostics included Langmuir probes, a photodiode dectector, an optical multichannel analyzer (OMA), and a microwave interferometer. Langmuir probe measurements showed that at a position 67 cm away from the rf coil, CF_4 plasma arrived in separate packets. Plasma densities and electron temperatures at this position were in the range 4 times 10^{11} cm ^{-3} to 1.8 times 10^{13} cm ^{-3} and 2 eV to 8.3 eV, respectively. The OMA measurements identified neutral atomic fluorine in the CF_4 plasma and neutral atomic oxygen in the O_2 plasma. A plasma slab model of the microwave interferometer was applied to predict the interferometer response. The measured response was found to be almost identical to the predicted response. The influence of different reactor parameters on plasma parameters was studied. Metal barriers of different geometry were used to control the ratio of charged particles to atomic neutrals in the plasma chamber. Four plasma structures were identified: precursor plasma, shock induced plasma, driver plasma, and delayed glow plasma. Pulsed CF _4 and SF_6 plasmas were used to etch silicon dioxide (SiO_2 ) grown on silicon wafers. The SF_6 plasma etched SiO_2 at a rate of about 0.71 A per discharge and the CF_4 plasma deposited a non-uniform film (possibly polymer) instead of etching. The C_2H _2 plasma deposited plasma polymerized acetylene on a KBr pellet with a deposition rate of 127 A per discharge. An FT-IR spectrum of the deposited film showed that carbon -to-carbon double bonds as well as carbon-to-hydrogen bonds were present. This device can be used in plasma assisted deposition and/or synthesis

The results of investigation of a capillary discharge plasma, used as a source of intense VUV radiation and soft X-rays, are presented. The plasma was generated during the discharge of low-inductance condensers in a gas-filled ceramic capillary. Intense line radiation was observed in a broad spectral range (30-400 A) in various gases (CO{sub 2}, Ne, Ar, Kr, Xe). The absolute radiation yield for the xenon discharge was {approx}5 mJ (2{pi} sr){sup -1} pulse{sup -1} within a spectral band of width 9 A at 135 A. Such a radiation source can be used for various practical applications, such as EUV projection lithography, microscopy of biological objects in a 'water window', reflectometry, etc. (special issue devoted to the 80th anniversary of academician n g basov's birth)

An inductionplasma tube in combination with a current concentrator. The rent concentrator has a substantially cylindrical body having an open end and a partially closed end which defines an aperture. A first slot extends the longitudinal length of the cylindrical body and a second slot extends radially outward from the aperture. Together the first and second slots form a single L-shaped slot. The current concentrator is disposed within a volume bounded by an induction coil substantially along the axis thereof, and when power is applied to the induction coil a concentrated current is induced within the current concentrator aperture. The concentrator is moveable relative to the coil along the longitudinal axis of the coil to control the amount of current which is concentrated at the aperture.

Transition of the electron kinetics from nonlocal to local regime was studied in weakly magnetized solenoidal inductively coupled plasma from the measurement of the electron energy probability function (EEPF). Without DC magnetic field, the discharge property was governed by nonlocal electron kinetics at low gas pressure. The electron temperatures were almost same in radial position, and the EEPFs in total electron energy scale were radially coincided. However, when the DC magnetic field was applied, radial non-coincidence of the EEPFs in total electron energy scale was observed. The electrons were cooled at the discharge center where the electron heating is absent, while the electron temperature was rarely changed at the discharge boundary with the magnetic field. These changes show the transition from nonlocal to local electron kinetics and the transition is occurred when the electron gyration diameter was smaller than the skin depth. The nonlocal to local transition point almost coincided with the calculation results by using nonlocal parameter and collision parameter.

The Hazards Control Department at Lawrence Livermore National Laboratory (LLNL) uses Inductively Coupled Plasma Mass Spectrometer (ICP/MS) technology to analyze uranium in urine. The ICP/MS used by the Hazards Control Department is a Perkin-Elmer Elan 6000 ICP/MS. The Department of Energy Laboratory Accreditation Program requires that the total error be assessed for bioassay measurements. A previous evaluation of the errors associated with the ICP/MS measurement of uranium demonstrated a {+-} 9.6% error in the range of 0.01 to 0.02 {micro}g/l. However, the propagation of total error for concentrations above and below this level have heretofore been undetermined. This document is an evaluation of the errors associated with the current LLNL ICP/MS method for a more expanded range of uranium concentrations.

Substituted hydroxyapatite coatings with different ions (Mg, Na, K, Cl, F) have been developed by the induction suspension plasma spray process. Suspensions were prepared with sol-gel. The main objective of this study was to demonstrate that induction suspension plasma spray technology possesses high material composition flexibility that allows as-sprayed coatings to closely mimic natural bone composition. Long-term in vitro behaviour of as-sprayed substituted coatings was evaluated with simulated body fluid. Data on the suspensions showed the formation of a pure hydroxyapatite phase. Transmission electron microscopy characterized various preparation stages of the suspensions. As-sprayed samples were distinguished by X-ray diffraction and scanning electron microscopy. Substituted elements were quantified by neutron activation. A well-crystallized hydroxyapatite phase was produced with concentration in various substitutions very close to natural bone composition. Ca/P and (Ca + Mg + Na + K)/P ratios provided evidence of the introduction of different cations into apatite structures. The immersion of samples into simulated body fluid led to the nucleation and growth of a flake-like octacalcium phosphate crystal layer at the surface of as-sprayed coatings after one week. Proof of octacalcium phosphate transformation and its partial dissolution and direct re-precipitation into apatite was disclosed by local energy dispersive spectroscopy and microstructure observation. Formation of a Ca/P ratio gradient from the precipitated layer surface to the as-sprayed coatings interface was observed after four weeks once the octacalcium phosphate crystals reached a critical size, resulting in the formation of a rich apatite layer at the interface after six weeks. A set of mechanisms has been proposed to explain these findings. PMID:25586411

A hybrid model is used to investigate the fragmentation of C{sub 4}F{sub 8} inductive discharges. Indeed, the resulting reactive species are crucial for the optimization of the Si-based etching process, since they determine the mechanisms of fluorination, polymerization, and sputtering. In this paper, we present the dissociation degree, the density ratio of F vs. C{sub x}F{sub y} (i.e., fluorocarbon (fc) neutrals), the neutral vs. positive ion density ratio, details on the neutral and ion components, and fractions of various fc neutrals (or ions) in the total fc neutral (or ion) density in a C{sub 4}F{sub 8} inductively coupled plasmasource, as well as the effect of pressure and power on these results. To analyze the fragmentation behavior, the electron density and temperature and electron energy probability function (EEPF) are investigated. Moreover, the main electron-impact generation sources for all considered neutrals and ions are determined from the complicated C{sub 4}F{sub 8} reaction set used in the model. The C{sub 4}F{sub 8} plasma fragmentation is explained, taking into account many factors, such as the EEPF characteristics, the dominance of primary and secondary processes, and the thresholds of dissociation and ionization. The simulation results are compared with experiments from literature, and reasonable agreement is obtained. Some discrepancies are observed, which can probably be attributed to the simplified polymer surface kinetics assumed in the model.

The initial density and electron temperature at the surface of a ferroelectric plasmasource were deduced from floating probe measurements in an expanding plasma. The method exploits negative charging of the floating probe capacitance by fast flows before the expanding plasma reaches the probe. The temporal profiles of the plasma density can be obtained from the voltage traces of the discharge of the charged probe capacitance by the ion current from the expanding plasma. The temporal profiles of the plasma density, at two different distances from the surface of the ferroelectric plasmasource, could be further fitted by using the density profiles for the expanding plasma. This gives the initial values of the plasma density and electron temperature at the surface. The method could be useful for any pulsed discharge, which is accompanied by considerable electromagnetic noise, if the initial plasma parameters might be deduced from measurements in expanding plasma.

The control of electron energy probability functions (EEPFs) in low pressure partially ionized plasmas is typically accomplished through the format of the applied power. For example, through the use of pulse power, the EEPF can be modulated to produce shapes not possible under continuous wave excitation. This technique uses internal control. In this paper, we discuss a method for external control of EEPFs by transport of electrons between separately powered inductively coupled plasmas (ICPs). The reactor incorporates dual ICP sources (main and auxiliary) in a tandem geometry whose plasma volumes are separated by a grid. The auxiliary ICP is continuously powered while the main ICP is pulsed. Langmuir probe measurements of the EEPFs during the afterglow of the main ICP suggests that transport of hot electrons from the auxiliary plasma provided what is effectively an external source of energetic electrons. The tail of the EEPF and bulk electron temperature were then elevated in the afterglow of the main ICP by this external source of power. Results from a computer simulation for the evolution of the EEPFs concur with measured trends.

In close collaboration between the Center for Astrophysics, Space Physics and Engineering Research (CASPER) at Baylor University, Texas, and the Institute of Space Systems (IRS) at the University of Stuttgart, Germany, two plasma wind tunnel facilities of similar type have been established using the inductively heated plasmasource IPG6 which is based on proven IRS designs. The facility at Baylor University (IPG6-B) works at a frequency of 13.56 MHz and a maximum power of 15 kW. A vacuum pump of 160m^3/h in combination with a butterfly valve allows pressure control in a wide range. First experiments have been conducted with Air, O2 and N2 as working gases and volumetric flow rates of up to 14 L/min at pressures of a few 100 Pa, although pressures below 1 Pa are achievable at lower flow rates. The maximum tested electric power so far was 8 kW. Plasma powers and total pressures in the plasma jet have been obtained. In the near future the set up of additional diagnostics, the use of other gases (i.e. H2, He), and the integration of a dust particle accelerator are planned. The intended fields of research are basic investigation in thermo-chemistry and plasma radiation, space plasma environments and high heat fluxes e.g. in fusion devices or during atmospheric entry of spacecraft.

High accelerating gradients generated by a high density electron beam moving through plasma has been used to double the energy of the SLAC electron beam [1]. During that experiment, the electron current density was high enough to generate its own plasma without significant head erosion. In the newly commissioned FACET facility at SLAC, the peak current will be lower and without pre-ionization, head erosion will be a significant challenge for the planned experiments. In this work we report on our design of a meter scale plasmasource for these experiments to effectively avoid the problem of head erosion. The plasmasource is based on a homogeneous metal vapor gas column that is generated in a heat pipe oven [2]. A lithium oven over 30 cm long at densities over 1017 cm-3 has been constructed and tested at UCLA. The plasma is then generated by coupling a 10 TW short pulse Ti:Sapphire laser into the gas column using an axicon lens setup. The Bessel profile of the axicon setup creates a region of high intensity that can stretch over the full length of the gas column with approximately constant diameter. In this region of high intensity, the alkali metal vapor is ionized through multi-photon ionization process. In this manner, a fully ionized meter scale plasma of uniform density can be formed. Methods for controlling the plasma diameter and length will also be discussed.

High accelerating gradients generated by a high density electron beam moving through plasma has been used to double the energy of the SLAC electron beam [1]. During that experiment, the electron current density was high enough to generate its own plasma without significant head erosion. In the newly commissioned FACET facility at SLAC, the peak current will be lower and without pre-ionization, head erosion will be a significant challenge for the planned experiments. In this work we report on our design of a meter scale plasmasource for these experiments to effectively avoid the problem of head erosion. The plasmasource is based on a homogeneous metal vapor gas column that is generated in a heat pipe oven [2]. A lithium oven over 30 cm long at densities over 10{sup 17} cm{sup -3} has been constructed and tested at UCLA. The plasma is then generated by coupling a 10 TW short pulse Ti:Sapphire laser into the gas column using an axicon lens setup. The Bessel profile of the axicon setup creates a region of high intensity that can stretch over the full length of the gas column with approximately constant diameter. In this region of high intensity, the alkali metal vapor is ionized through multi-photon ionization process. In this manner, a fully ionized meter scale plasma of uniform density can be formed. Methods for controlling the plasma diameter and length will also be discussed.

Tin (Sn) has the advantage of delivering higher conversion efficiency compared to other fuel materials (e.g., Xe or Li) in an extreme ultraviolet (EUV) source, a necessary component for the leading next generation lithography. However, the use of a condensable fuel in a lithography system leads to some additional challenges for maintaining a satisfactory lifetime of the collector optics. A critical issue leading to decreased mirror lifetime is the buildup of debris on the surface of the primary mirror that comes from the use of Sn in either gas discharge produced plasma (GDPP) or laser produced plasma (LPP). This leads to a decreased reflectivity from the added material thickness and increased surface roughness that contributes to scattering. Inductively coupled plasma reactive ion etching with halide ions is one potential solution to this problem. This article presents results for etch rate and selectivity of Sn over SiO{sub 2} and Ru. The Sn etch rate in a chlorine plasma is found to be much higher (of the order of hundreds of nm/min) than the etch rate of other materials. A thermally evaporated Sn on Ru sample was prepared and cleaned using an inductively coupled plasma etching method. Cleaning was confirmed using several material characterization techniques. Furthermore, a collector mock-up shell was then constructed and etching was performed on Sn samples prepared in a Sn EUV source using an optimized etching recipe. The sample surface before and after cleaning was analyzed by atomic force microscopy, x-ray photoelectron spectroscopy, and Auger electron spectroscopy. The results show the dependence of etch rate on the location of Sn samples placed on the collector mock-up shell.

Pulsed inductiveplasma thrusters [1-3] are spacecraft propulsion devices in which electrical energy is capacitively stored and then discharged through an inductive coil. This type of pulsed thruster is electrodeless, with a time-varying current in the coil interacting with a plasma covering the face of the coil to induce a plasma current. Propellant is accelerated and expelled at a high exhaust velocity (O(10-100 km/s)) by the Lorentz body force arising from the interaction of the magnetic field and the induced plasma current. While this class of thruster mitigates the life-limiting issues associated with electrode erosion, pulsed inductiveplasma thrusters require high pulse energies to inductively ionize propellant. The Microwave Assisted Dis- charge InductivePlasma Accelerator (MAD-IPA), shown in Fig. 1, is a pulsed inductiveplasma thruster that addressees this issue by partially ionizing propellant inside a conical inductive coil before the main current pulse via an electron cyclotron resonance (ECR) discharge. The ECR plasma is produced using microwaves and a static magnetic field from a set of permanent magnets arranged to create a thin resonance region along the inner surface of the coil, restricting plasma formation, and in turn current sheet formation, to a region where the magnetic coupling between the plasma and the theta-pinch coil is high. The use of a conical theta-pinch coil also serves to provide neutral propellant containment and plasma plume focusing that is improved relative to the more common planar geometry of the Pulsed Inductive Thruster (PIT) [1, 2]. In this paper, we describe thrust stand measurements performed to characterize the performance (specific impulse, thrust efficiency) of the MAD-IPA thruster. Impulse data are obtained at various pulse energies, mass flow rates and inductive coil geometries. Dependencies on these experimental parameters are discussed in the context of the current sheet formation and electromagnetic plasma

Helicon discharges produce plasmas with a density gradient across the confining magnetic field. Such plasmas can create a radial potential well for nonaxisymmetric whistlers, allowing radially localized helicon (RLH) waves. This work presents new evidence that RLH waves play a significant role in helicon plasmasources. An experimentally measured plasma density profile in an argon helicon discharge is used to calculate the rf field structure. The calculations are performed using a two-dimensional field solver under the assumption that the density profile is axisymmetric. It is found that RLH waves with an azimuthal wave number m=1 form a standing wave structure in the axial direction and that the frequency of the RLH eigenmode is close to the driving frequency of the rf antenna. The calculated resonant power absorption, associated with the RLH eigenmode, accounts for most of the rf power deposited into the plasma in the experiment.

Various mechanisms are provided relating to plasma-based light source that may be used for lithography as well as other applications. For example, a device is disclosed for producing extreme ultraviolet (EUV) light based on a sheared plasma flow. The device can produce a plasma pinch that can last several orders of magnitude longer than what is typically sustained in a Z-pinch, thus enabling the device to provide more power output than what has been hitherto predicted in theory or attained in practice. Such power output may be used in a lithography system for manufacturing integrated circuits, enabling the use of EUV wavelengths on the order of about 13.5 nm. Lastly, the process of manufacturing such a plasma pinch is discussed, where the process includes providing a sheared flow of plasma in order to stabilize it for long periods of time.

Helicon discharges produce plasmas with a density gradient across the confining magnetic field. Such plasmas can create a radial potential well for nonaxisymmetric whistlers, allowing radially localized helicon (RLH) waves. This work presents new evidence that RLH waves play a significant role in helicon plasmasources. An experimentally measured plasma density profile in an argon helicon discharge is used to calculate the rf field structure. The calculations are performed using a two-dimensional field solver under the assumption that the density profile is axisymmetric. It is found that RLH waves with an azimuthal wave number m =1 form a standing wave structure in the axial direction and that the frequency of the RLH eigenmode is close to the driving frequency of the rf antenna. The calculated resonant power absorption, associated with the RLH eigenmode, accounts for most of the rf power deposited into the plasma in the experiment.

The application of the chromatic sensing for monitoring of a microwave plasmasource is described. The emitted radiation from the plasma excited in the argon, oxygen and CF4 mixture was measured with three PIN-diodes with integrated optical filters. The response of the chromatic signals on variation of power and gas composition was investigated. Whereas a good sensitivity of the integrated optical signal to the power was confirmed, only a limited sensitivity to the working gas mixture was found.

Results are presented demonstrating the e ect of inductive coil geometry and current sheet trajectory on the exhaust velocity of propellant in conical theta pinch pulsed induc- tive plasma accelerators. The electromagnetic coupling between the inductive coil of the accelerator and a plasma current sheet is simulated, substituting a conical copper frustum for the plasma. The variation of system inductance as a function of plasma position is obtained by displacing the simulated current sheet from the coil while measuring the total inductance of the coil. Four coils of differing geometries were employed, and the total inductance of each coil was measured as a function of the axial displacement of two sep- arate copper frusta both having the same cone angle and length as the coil but with one compressed to a smaller size relative to the coil. The measured relationship between total coil inductance and current sheet position closes a dynamical circuit model that is used to calculate the resulting current sheet velocity for various coil and current sheet con gura- tions. The results of this model, which neglects the pinching contribution to thrust, radial propellant con nement, and plume divergence, indicate that in a conical theta pinch ge- ometry current sheet pinching is detrimental to thruster performance, reducing the kinetic energy of the exhausting propellant by up to 50% (at the upper bound for the parameter range of the study). The decrease in exhaust velocity was larger for coils and simulated current sheets of smaller half cone angles. An upper bound for the pinching contribution to thrust is estimated for typical operating parameters. Measurements of coil inductance for three di erent current sheet pinching conditions are used to estimate the magnetic pressure as a function of current sheet radial compression. The gas-dynamic contribution to axial acceleration is also estimated and shown to not compensate for the decrease in axial electromagnetic acceleration

Empire Hard Chrome has recently installed commercial plasmasource ion implantation (PSU) equipment built by North Star Research Corporation. Los Alamos National Laboratory has assisted in this commercialization effort via two Cooperative Research and Development Agreements to develop the plasmasource for the equipment and to identify low-risk commercial PSII applications. The PSII system consists of a 1 m x 1 m cylindrical vacuum chamber with a rf plasmasource. The pulse modulator is capable of delivering pulses kV and peak currents of 300 A at maximum repetition rate of 400 Hz. thyratron tube to switch a pulse forming network which is tailored to match the dynamic PSII load. In this paper we discuss the PSII system, process facility, and early commercial applications to production tooling.

An experimental setup was built up to carry out radio frequency (RF) inductively coupled plasma (ICP) and dielectric barrier discharge (DBD), and to depict the optical emission spectra (OES) of the discharges. OES from argon ICP and DBD plasmas in visible and near ultraviolet region were measured. For argon ICP, the higher RF power input (higher than 500 W for our machine), the higher degree of argon plasma ionization. But that doesn't mean a higher mean electron energy. With the increase in the power input, the mean electron energy increases slightly, whereas the density of electron increases apparently. Or, the contrary, argon DBD discharge behaves in the manner of a pulsed DC discharge on optical emission spectroscopy and V-I characteristics. DBD current is composed of a series of pulses equally spaced in temporal domain. The kinetics of DBD emission strength is mainly governed by the frequency of the current pulse.

The inductively coupled plasma (ICP) is an atmospheric pressure ionization source. Traditionally, the plasma is sampled via a sampler cone. A supersonic jet develops behind the sampler, and this region is pumped down to a pressure of approximately one Torr. A skimmer cone is located inside this zone of silence to transmit ions into the mass spectrometer. The position of the sampler and skimmer cones relative to the initial radiation and normal analytical zones of the plasma is key to optimizing the useful analytical signal [1]. The ICP both atomizes and ionizes the sample. Polyatomic ions form through ion-molecule interactions either in the ICP or during ion extraction [l]. Common polyatomic ions that inhibit analysis include metal oxides (MO{sup +}), adducts with argon, the gas most commonly used to make up the plasma, and hydride species. While high resolution devices can separate many analytes from common interferences, this is done at great cost in ion transmission efficiency--a loss of 99% when using high versus low resolution on the same instrument [2]. Simple quadrupole devices, which make up the bulk of ICP-MS instruments in existence, do not present this option. Therefore, if the source of polyatomic interferences can be determined and then manipulated, this could potentially improve the figures of merit on all ICP-MS devices, not just the high resolution devices often utilized to study polyatomic interferences.

Plasma etching for microelectronics fabrication is facing extreme challenges as processes are developed for advanced technological nodes. As device sizes shrink, control of shallow trench isolation (STI) features become more important in both logic and memory devices. Halogen-based inductively coupled plasmas in a pressure range of 20-60 mTorr are typically used to etch STI features. The need for improved performance and shorter development cycles are placing greater emphasis on understanding the underlying mechanisms to meet process specifications. In this work, a surface mechanism for STI etch process will be discussed that couples a fundamental plasma model to experimental etch process measurements. This model utilizes ion/neutral fluxes and energy distributions calculated using the Hybrid Plasma Equipment Model. Experiments are for blanket Si wafers in a Cl2/HBr/O2/N2 plasma over a range of pressures, bias powers, and flow rates of feedstock gases. We found that kinetic treatment of electron transport was critical to achieve good agreement with experiments. The calibrated plasma model is then coupled to a string-based feature scale model to quantify the effect of varying process parameters on the etch profile. We found that the operating parameters strongly influence critical dimensions but have only a subtle impact on the etch depths.

Almost electron-free (ion-ion) plasmas can be transiently formed during the afterglow phase of pulsed plasmas in electronegative gases. In ion-ion plasmas, both positive and negative ions can be extracted which makes them advantageous for a number of applications. In this paper, we investigate the extraction and acceleration of positive and negative ion beams from a pulsed inductively coupled plasma in SF6. The plasma is bounded by two electrodes biased synchronously with the discharge modulation. It is shown that when a DC bias voltage is applied during the afterglow phase, positive/negative ions are accelerated in a positive/negative space charge sheath formed in front of one of the electrodes. The energy of extracted ions closely follows the amplitude of the applied bias voltage (25-150 V) and the peak beam current density reaches 2 A m-2. With a view to using the described system as a source of energetic neutral beams for low damage material processing, simultaneous extraction and surface neutralization of positive and negative ions using an extraction electrode with high aspect ratio apertures is investigated.

The development of plasmasources with densities and temperatures in the 10{sup 15}-10{sup 17} cm{sup -3} and 1-10eV ranges which are slowly varying over several hundreds of nanoseconds within several cubic centimeter volumes is of interest for applications such as intense electron beam focusing as part of the x-ray radiography program. In particular, theoretical work [1,2] suggests that replacing neutral gas in electron beam focusing cells with highly conductive, pre-ionized plasma increases the time-averaged e-beam intensity on target, resulting in brighter x-ray sources. This LDRD project was an attempt to generate such a plasmasource from fine metal wires. A high voltage (20-60kV), high current (12-45kA) capacitive discharge was sent through a 100 {micro}m diameter aluminum wire forming a plasma. The plasma's expansion was measured in time and space using spectroscopic techniques. Lineshapes and intensities from various plasma species were used to determine electron and ion densities and temperatures. Electron densities from the mid-10{sup 15} to mid-10{sup 16} cm{sup -3} were generated with corresponding electron temperatures of between 1 and 10eV. These parameters were measured at distances of up to 1.85 cm from the wire surface at times in excess of 1 {micro}s from the initial wire breakdown event. In addition, a hydrocarbon plasma from surface contaminants on the wire was also measured. Control of these contaminants by judicious choice of wire material, size, and/or surface coating allows for the ability to generate plasmas with similar density and temperature to those given above, but with lower atomic masses.

Significant improvements in the performance of high power microwave tubes have been achieved in recent years by the introduction of plasma into the beam- coupling structures of the devices. Plasma has been credited with increasing the maximum electron beam current, frequency bandwidth, electrical efficiency and reducing or eliminating the need for guiding magnetic fields in microwave sources. These advances are critically important for the development of high power, frequency agile microwave systems where size and weight are important. Conversely, plasma has been blamed for causing noise, instabilities, power variations and pulse-length limitations in microwave tubes for many years. Recent experimental and theoretical studies have demonstrated that introducing the right amount of plasma in a controlled manner can be beneficial in the areas described above. Enhanced beam propagation at lower magnetic fields and higher beam current levels due to the space-charge neutralization by plasma can be realized provided that the neutralization fraction is fairly stable and maintained near a value of one for the duration of the desired pulse length. The generation of hybrid waves in plasma-filled slow-wave structures (SWS) operating near cutoff has resulted in an increased electric field on axis and improved coupling to solid beams in both helix and coupled-cavity SWS, and wider coupling-aperture pass-bands and frequency bandwidth in coupled-cavity devices. In the event of excess plasma generation in these TWTs or BWOs, the device structures rapidly approach cutoff or breakdown and the beam forms instabilities, which degrades the output power level and pulse length. Recent experimental and theoretical advances in this field including plasma implementation techniques in the gun and circuit will be presented, and the benefits and limitations of plasma filling of microwave sources will be shown and discussed.

We used an electrostatic size classification technique to segregate particles of known composition prior to being injected into an inductively coupled plasma mass spectrometer (ICP-MS). Moreover, we counted size-segregated particles with a condensation nuclei counter as well as sampled with an ICP-MS. By injecting particles of known size, composition, and aerosol concentration into the ICP-MS, efficiencies of the order of magnitude aerosol detection were calculated, and the particle size dependencies for volatile and refractory species were quantified. Similar to laser ablation ICP-MS, aerosol detection efficiency was defined as the rate at which atoms were detected in the ICP-MS normalized bymore » the rate at which atoms were injected in the form of particles. This method adds valuable insight into the development of technologies like laser ablation ICP-MS where aerosol particles (of relatively unknown size and gas concentration) are generated during ablation and then transported into the plasma of an ICP-MS. In this study, we characterized aerosol detection efficiencies of volatile species gold and silver along with refractory species aluminum oxide, cerium oxide, and yttrium oxide. Aerosols were generated with electrical mobility diameters ranging from 100 to 1000 nm. In general, it was observed that refractory species had lower aerosol detection efficiencies than volatile species, and there were strong dependencies on particle size and plasma torch residence time. Volatile species showed a distinct transition point at which aerosol detection efficiency began decreasing with increasing particle size. This critical diameter indicated the largest particle size for which complete particle detection should be expected and agreed with theories published in other works. Aerosol detection efficiencies also displayed power law dependencies on particle size. Aerosol detection efficiencies ranged from 10-5 to 10-11. Free molecular heat and mass transfer theory was

An electrostatic size classification technique was used to segregate particles of known composition prior to being injected into an inductively coupled plasma mass spectrometer (ICP-MS). Size-segregated particles were counted with a condensation nuclei counter as well as sampled with an ICP-MS. By injecting particles of known size, composition, and aerosol concentration into the ICP-MS, efficiencies of the order of magnitude aerosol detection were calculated, and the particle size dependencies for volatile and refractory species were quantified. Similar to laser ablation ICP-MS, aerosol detection efficiency was defined as the rate at which atoms were detected in the ICP-MS normalized by the rate at which atoms were injected in the form of particles. This method adds valuable insight into the development of technologies like laser ablation ICP-MS where aerosol particles (of relatively unknown size and gas concentration) are generated during ablation and then transported into the plasma of an ICP-MS. In this study, we characterized aerosol detection efficiencies of volatile species gold and silver along with refractory species aluminum oxide, cerium oxide, and yttrium oxide. Aerosols were generated with electrical mobility diameters ranging from 100 to 1000 nm. In general, it was observed that refractory species had lower aerosol detection efficiencies than volatile species, and there were strong dependencies on particle size and plasma torch residence time. Volatile species showed a distinct transition point at which aerosol detection efficiency began decreasing with increasing particle size. This critical diameter indicated the largest particle size for which complete particle detection should be expected and agreed with theories published in other works. Aerosol detection efficiencies also displayed power law dependencies on particle size. Aerosol detection efficiencies ranged from 10- 5 to 10- 11. Free molecular heat and mass transfer theory was applied, but

The acoustic environment created by turbulence in aircraft flight tests demands that illumination sources for high speed photography of munitions drops be extremely rugged. A repetitive pulsed surface discharge system has been developed to provide wide angle illumination in a bomb bay for photography at 250 - 500 Hertz. The lamp has a simple construction suitable for adverse environments and produces 100 mJ of visible light per pulse. The discharge parameters were selected to minimize the size and complexity of the power supply. The system is also capable of operating at high repetition rates; preliminary tests demonstrated 1000 pulses at 1 kHz, 200 pulses at 1.5 kHz, and 13 pulses at 2 kHz. A simple power supply capable of providing several amperes at 450 V is being completed; it will be used to extend the run times and to explore extensions to higher repetition rate.

The ion saturation current uniformities of two different type plasmasources, a coaxial and a Lisitano coil type, are investigated using a moveable Langmuir probe. They both operate under off-resonance microwave discharge. H/sub 2/ or Ar is used as the discharge gas. The coaxial source provides better uniformities for ion saturation current, electron temperature, and electon density than the Lisitano coil, independent of the discharge gas species. The ion saturation current with the coaxial source is uniform within approx.15% inside a 40-mm-diam circle for a 0.17 Pa H/sub 2/ discharge. However, with the Lisitano coil, uniformity is limited to a 20-mm-diam circle. Furthermore, the Lisitano coil easily suffers from heat distortion because of difficulties in realizing a cooled system. It is also experimentally confirmed that the coaxial-type source is more appropriate for obtaining high density plasma under continuous operation.

Plasmasource ion implantation (PSII) is a scaleable, non-line-of-sight method for the surface modification of materials. In this paper, we consider three important issues that should be addressed before wide-scale commercialization of PSII: (1) implant conformality; (2) ion sources; and (3) secondary electron emission. To insure uniform implanted dose over complex shapes, the ion sheath thickness must be kept sufficiently small. This criterion places demands on ion sources and pulsed-power supplies. Another limitation to date is the availability of additional ion species beyond B, C, N, and 0. Possible solutions are the use of metal arc vaporization sources and plasma discharges in high-vapor-pressure organometallic precursors. Finally, secondary electron emission presents a potential efficiency and x-ray hazard issue since for many metallurgic applications, the emission coefficient can be as large as 20. Techniques to suppress secondary electron emission are discussed.

Etching mechanisms and characteristics of bismuth zinc niobate (BZN) thin films were investigated in inductively coupled SF6/Ar plasmas. The influences of various etching parameters including the gas flow ratio, process pressure, and ICP power on the etching results were analyzed. It is found that the chemical etching with F radicals was more effective than the physical sputtering etching with Ar ions for the inductively coupled plasma etching of BZN thin films. The mechanism of ion assisted chemical etching of BZN thin films in SF6/Ar plasmas was proposed. A maximum etch rate of approximately 43.15 nm/min for the BZN thin film was obtained at the optimum etching conditions: 3/2 for the SF6/Ar gas flow ratio, 10 mTorr for the process pressure, and 600 W for the ICP power. The surface morphology of the etched BZN thin film was observed, where was smooth and clean and no post-etch residues were remained.

A stable electrical ground which enables the particle spectrometers to measure the low energy particle populations was investigated and the current required to neutralize the spacecraft was measured. In addition, the plasmasource for potential control (PSPO C) prevents high charging events which could affect the spacecraft electrical integrity. The plasmasource must be able to emit a plasma current large enough to balance the sum of all other currents to the spacecraft. In ion thrusters, hollow cathodes provide several amperes of electron current to the discharge chamber. The PSPO C is capable of balancing the net negative currents found in eclipse charging events producing 10 to 100 microamps of electron current. The largest current required is the ion current necessary to balance the total photoelectric current.

A 100 KeV NEC duoplasmatron is used to produce an energetic ion beam (10 KeV < E < 100 KeV). The beam is sent through plasmas produced by the ASTRAL helicon plasmasource. The beam current and beam size are measured by a device combining Retarding Field Analyzer (RFA) and Faraday Cup (FC) features. ASTRAL produces bright intense He/Ne/Ar plasmas with the following parameters: ne = 1E11 -- 1E13 cm-3 and Te = 2 - 10 eV, B-field < 1.3 kGauss, rf power <= 2 kWatt. RF compensated Langmuir probes are used to measure Te and ne. Depending on the ion beam energy and the ratio of beam density over plasma density different wave instabilities will be generated within the plasmas. A real-time spectrum analyzer will be used to identify the wave instabilities and their evolution in the plasma. We will present early experimental results together with some preliminary theoretical simulation using 2D and 3D hybrid simulation codes. In these codes, ions are treated as fully kinetic particles while electrons are treated as a fluid. Both species are moving in a self-consistent electromagnetic field.

Here the authors report the development of a fuzzy logic based feedback control of the plasma electron density and ion energy for high density plasma etch process. The plasma electron density was measured using their recently developed transmission line microstrip microwave interferometer mounted on the chamber wall, and the rf voltage was measured by a commercial impedance meter connected to the wafer stage. The actuators were two 13.56 MHz rf power generators which provided the inductively coupled plasma power and bias power, respectively. The control system adopted the fuzzy logic control algorithm to reduce frequent actuator action resulting from measurement noise. The experimental results show that the first wafer effect can be eliminated using closed-loop control for both poly-Si and HfO{sub 2} etching. In particular, for the HfO2 etch, the controlled variables in this work were much more effective than the previous one where ion current was controlled, instead of the electron density. However, the pressure disturbance effect cannot be reduced using plasma electron density feedback.

Significant etch rate drop after the treatment of an etch chamber with Fluorine-based plasma has been found for some silicon etch processes on an inductively coupled plasma reactor, which might cause problems in IC production line once the etch chamber runs alternative processes with F-based and F-free chemistry, or needs frequent cleaning with F-plasma. In this work, a systematic study of the root cause of process sensitivity to the etch chamber treated with F-plasma has been conducted. The experimental results show that pressure is a key factor to affect the etch rate drop. Processes at high pressure are more sensitive than those at low pressure because the quenching of neutral reactive species becomes more severe after the F-treatment. O2 addition also increases the etch rate sensitivity, basically due to higher O2(subscript: )concentration after F-treatment which enhances the oxidation of silicon. The EDX and XPS elemental analysis of the chamber interior wall reveals a significant composition change after the interaction with F-plasma, the altered surface might accelerate the recombination of free radical species.

Johnsen-Rahbek electrostatic chuck (ESC) for holding a silicon wafer in semiconductor processing is investigated in inductively coupled plasma (ICP). Bi-layer model of the ESC consisting of a thick bulk layer and a thin interface layer is proposed. The resistance of each layer is obtained by measuring the ESC voltage-current (V-I) characteristic with and without the wafer in ICP, along with the voltage effectively applied to the interface layer. Surface charges stored in the interface layer capacitance are found by the time-integration of current in a turn-on phase of a ramped voltage. On the other hand, the chuck holding force is in situ obtained in a turn-off phase of slowly ramped voltage, from the critical conditions of helium gas pressurization for wafer de-chuck. The electrostatic force predicted on a basis of equivalent circuit in the bi-layer model coincides with the mechanical force obtained in the wafer de-touch experiments.

The design and testing of a small inductive pulsed plasma thruster (IPPT) is described. The device was built as a test-bed for the pulsed gas-valves and solid-state switches required for a thruster of this kind, and was designed to be modular to facilitate modification. The thruster in its present configuration consists of a multi-turn, spiral-wound acceleration coil (270 millimeters outer diameter, 100 millimeters inner diameter) driven by a 10 microfarad capacitor and switched with a high-voltage thyristor, a propellant delivery system including a fast pulsed gas-valve, and a glow-discharge pre-ionizer circuit. The acceleration coil circuit may be operated at voltages up to 4 kilovolts (the thyristor limit is 4.5 kilovolts) and the thruster operated at cyclic-rates up to 30 Herz. Initial testing of the thruster, both bench-top and in-vacuum, has been performed. Cyclic operation of the complete device was demonstrated (at 2 Herz), and a number of valuable insights pertaining to the design of these devices have been gained.

In this study we report uranium analysis for human semen samples. Uranium quantification was performed by inductively coupled plasma mass spectrometry. No additives, such as chymotrypsin or bovine serum albumin, were used for semen liquefaction, as they showed significant uranium content. For method validation we spiked 2g aliquots of pooled control semen at three different levels of uranium: low at 5 pg/g, medium at 50 pg/g, and high at 1000 pg/g. The detection limit was determined to be 0.8 pg/g uranium in human semen. The data reproduced within 1.4-7% RSD and spike recoveries were 97-100%. The uranium level of the unspiked, pooled control semen was 2.9 pg/g of semen (n=10). In addition six semen samples from a cohort of Veterans exposed to depleted uranium (DU) in the 1991 Gulf War were analyzed with no knowledge of their exposure history. Uranium levels in the Veterans' semen samples ranged from undetectable (<0.8 pg/g) to 3350 pg/g. This wide concentration range for uranium in semen is consistent with known differences in current DU body burdens in these individuals, some of whom have retained embedded DU fragments. PMID:22944582

Phase-resolved optical emission spectroscopy measurements in argon and neon inductively coupled plasmas (ICPs) have revealed a surplus of high-energy electrons in neon-containing plasmas. Differences between results of emission model analyses using neon and argon lines (as well as probe measurements) also indicate a high-energy enhancement in neon-containing plasmas. The abundance of these extra high-energy electrons is correlated with the sheath thickness near the rf antenna and can be reduced by either adding a Faraday shield (external shielding) or increasing the plasma density. A comparison of modelled and experimental values of the 13.56 MHz time modulation of select neon emission lines strongly suggests plasma series resonance heating adjacent to the ICP antenna as the source of the extra heating.

This paper describes the development of laser-produced-plasma (LPP) extreme-ultraviolet (EUV) source architecture for advanced lithography applications in high volume manufacturing. EUV lithography is expected to succeed 193 nm immersion technology for sub-22 nm critical layer patterning. In this paper we discuss the most recent results from high qualification testing of sources in production. Subsystem performance will be shown including collector protection, out-of-band (OOB) radiation measurements, and intermediate-focus (IF) protection as well as experience in system use. This presentation reviews the experimental results obtained on systems with a focus on the topics most critical for an HVM source.

An ion-filtered inductively coupled plasma (IF-ICP) is proposed to reduce ion bombardment and provide high metastable species density for chemical vapor deposition. Argon plasma, which has simple reaction mechanism, is simulated to show the effects of ion filter. Compared to typical ICP, the maximum density of ions of IF-ICP is lower while that of metastable species is higher. The filter can absorb ions effectively and relatively small amount of metastable species, with the absorption coefficient proportional to its surface area. A proper gap between filter and substrate can achieve more metastable species and less ions on the substrate. The pressure and RF power need to be optimized based on the tradeoff between deposition rate and ion damage. The density of ions on the substrate can be reduced by two orders of magnitude while that of metastable species are maintained in the order of 1017 m-3 under the optimized conditions.

A XUV radiation source uses an interaction of electron beam pulses with a gas to create a plasma radiator. A flowing gas system (10) defines a circulation loop (12) with a device (14), such as a high pressure pump or the like, for circulating the gas. A nozzle or jet (16) produces a sonic atmospheric pressure flow and increases the density of the gas for interacting with an electron beam. An electron beam is formed by a conventional radio frequency (rf) accelerator (26) and electron pulses are conventionally formed by a beam buncher (28). The rf energy is thus converted to electron beam energy, the beam energy is used to create and then thermalize an atmospheric density flowing gas to a fully ionized plasma by interaction of beam pulses with the plasma wake field, and the energetic plasma then loses energy by line radiation at XUV wavelengths Collection and focusing optics (18) are used to collect XUV radiation emitted as line radiation when the high energy density plasma loses energy that was transferred from the electron beam pulses to the plasma.

Significant differences (approximately 30 percent) have been observed in the sulfur measurements in high-level waste sludge by the Analytical Development Section (ADS) using the inductively coupled plasma-atomic emission spectroscopy (ICP-AES) method compared with the ADS ion chromatography (IC) method. Since the measured concentrations of sulfur in the sludge approached the maximum concentration that can be processed in the DWPF, experiments were performed to determine the source of the differences and assess the true accuracy of sulfur measurements.

This paper describes 5 kA, 12 ms pulsed power supply for inductive load of Electron Energy Filter (EEF) in large volume plasma device. The power supply is based upon the principle of rapid sourcing of energy from the capacitor bank (2.8 F/200 V) by using a static switch, comprising of ten Insulated Gate Bipolar Transistors (IGBTs). A suitable mechanism is developed to ensure equal sharing of current and uniform power distribution during the operation of these IGBTs. Safe commutation of power to the EEF is ensured by the proper optimization of its components and by the introduction of over voltage protection (>6 kV) using an indigenously designed snubber circuit. Various time sequences relevant to different actions of power supply, viz., pulse width control and repetition rate, are realized through optically isolated computer controlled interface.

This paper describes 5 kA, 12 ms pulsed power supply for inductive load of Electron Energy Filter (EEF) in large volume plasma device. The power supply is based upon the principle of rapid sourcing of energy from the capacitor bank (2.8 F/200 V) by using a static switch, comprising of ten Insulated Gate Bipolar Transistors (IGBTs). A suitable mechanism is developed to ensure equal sharing of current and uniform power distribution during the operation of these IGBTs. Safe commutation of power to the EEF is ensured by the proper optimization of its components and by the introduction of over voltage protection (>6 kV) using an indigenously designed snubber circuit. Various time sequences relevant to different actions of power supply, viz., pulse width control and repetition rate, are realized through optically isolated computer controlled interface. PMID:27475553

Correlations between the external discharge parameters (the driving frequency ω and the chamber dimension R) and plasma characteristics (the skin depth δ and the electron-neutral collision frequency ν{sub m}) are studied using the transformer circuit model [R. B. Piejak et al., PlasmaSources Sci. Technol. 1, 179 (1992)] when the absorbed power is maximized in an inductively coupled plasma. From the analysis of the transformer circuit model, the maximum power transfer conditions, which depend on the external discharge parameters and the internal plasma characteristics, were obtained. It was found that a maximum power transfer occurs when δ≈0.38R for the discharge condition at which ν{sub m}/ω≪1, while it occurs when δ≈√(2)√(ω/ν{sub m})R for the discharge condition at which ν{sub m}/ω≫1. The results of this circuit analysis are consistent with the stable last inductive mode region of an inductive-to-capacitive mode transition [Lee and Chung, Phys. Plasmas 13, 063510 (2006)], which was theoretically derived from Maxwell's equations. Our results were also in agreement with the experimental results. From this work, we demonstrate that a simple circuit analysis can be applied to explain complex physical phenomena to a certain extent.

The RF heating of the plasma in the Linac4 H(-) ion source has been simulated using a particle-in-cell Monte Carlo collision method. This model is applied to investigate the plasma formation starting from an initial low electron density of 10(12) m(-3) and its stabilization at 10(18) m(-3). The plasma discharge at low electron density is driven by the capacitive coupling with the electric field generated by the antenna, and as the electron density increases the capacitive electric field is shielded by the plasma and induction drives the plasma heating process. Plasma properties such as e(-)/ion densities and energies, sheath formation, and shielding effect are presented and provide insight to the plasma properties of the hydrogen plasma. PMID:24593555

The RF heating of the plasma in the Linac4 H{sup −} ion source has been simulated using a particle-in-cell Monte Carlo collision method. This model is applied to investigate the plasma formation starting from an initial low electron density of 10{sup 12} m{sup −3} and its stabilization at 10{sup 18} m{sup −3}. The plasma discharge at low electron density is driven by the capacitive coupling with the electric field generated by the antenna, and as the electron density increases the capacitive electric field is shielded by the plasma and induction drives the plasma heating process. Plasma properties such as e{sup −}/ion densities and energies, sheath formation, and shielding effect are presented and provide insight to the plasma properties of the hydrogen plasma.

The RF heating of the plasma in the Linac4 H- ion source has been simulated using a particle-in-cell Monte Carlo collision method. This model is applied to investigate the plasma formation starting from an initial low electron density of 1012 m-3 and its stabilization at 1018 m-3. The plasma discharge at low electron density is driven by the capacitive coupling with the electric field generated by the antenna, and as the electron density increases the capacitive electric field is shielded by the plasma and induction drives the plasma heating process. Plasma properties such as e-/ion densities and energies, sheath formation, and shielding effect are presented and provide insight to the plasma properties of the hydrogen plasma.

Current and future generations of sophisticated compound semiconductor devices require the ability for submicron scale patterning. The situation is being complicated since some of the new devices are based on a wider diversity of materials to be etched. Conventional IUE (Reactive Ion Etching) has been prevalent across the industry so far, but has limitations for materials with high bond strengths or multiple elements. IrI this paper, we suggest high density plasmas such as ECR (Electron Cyclotron Resonance) and ICP (Inductively Coupled Plasma), for the etching of ternary compound semiconductors (InGaP, AIInP, AlGaP) which are employed for electronic devices like heterojunction bipolar transistors (HBTs) or high electron mobility transistors (HEMTs), and photonic devices such as light-emitting diodes (LEDs) and lasers. High density plasmasources, opeiating at lower pressure, are expected to meet target goals determined in terms of etch rate, surface morphology, surface stoichiometry, selectivity, etc. The etching mechanisms, which are described in this paper, can also be applied to other III-V (GaAs-based, InP-based) as well as III-Nitride since the InGaAIP system shares many of the same properties.

A plasma thruster with a cylindrical inner and cylindrical outer electrode generates plasma particles from the application of energy stored in an inductor to a surface suitable for the formation of a plasma and expansion of plasma particles. The plasma production results in the generation of charged particles suitable for generating a reaction force, and the charged particles are guided by a magnetic field produced by the same inductor used to store the energy used to form the plasma.

With continuous decrease of nanoscale design rule, plasma etching processes to form high aspect ratio contact hole still remains a challenge to overcome their inherent drawbacks such as bowing and twisted feature. Due to their complexities there still exist big gaps between current research status and predictable modeling of this process. To address this issue, we proposed a surface kinetic model of silicon nitride etch process under inductively coupled fluorocarbon plasmas. For this work, the cut-off probe and quadrapole mass spectroscopy were used for measuring electrical plasma properties, the ion and neutral radical species. Furthermore, the systematic surface analysis was performed to investigate the thickness and chemical bonding of polymer passivation layer during the etch process. The proposed semi-global surface kinetic model can consider deposition of polymer passivation layer and silicon nitride etching self-consistently. The predicted modeling results showed good agreement with experimental data. We believe that our research will provide valuable information to avoid the empirical development of plasma etching process.

Reduction of stray light in the inductively coupled plasma emission spectrometer (ICPES) has greatly increased its reliability as a technique for the multielemental analysis of water. Because of interferences introduced by matrix elements, reliable analysis of some less-sensitive...

The design and testing of a small inductive pulsed plasma thruster (IPPT), shown in Fig. 1 with all the major subsystems required for a thruster of this kind are described. Thrust measurements and imaging of the device operated in rep-rated mode are presented to quantify the performance envelope of the device. The small IPPT described in this paper was designed to serve as a test-bed for the pulsed gas-valves and solid-state switches required for a IPPTs. A modular design approach was used to permit future modifications and upgrades. The thruster consists of the following sub-systems: a) a multi-turn, spiral-wound acceleration coil (27 cm o.d., 10 cm i.d.) driven by a 10 microFarad capacitor and switched with a high-voltage thyristor, b) a fast pulsed gas-valve, and c.) a glow-discharge pre-ionizer (PI) circuit. The acceleration-coil circuit may be operated at voltages up to 4 kV (the thyristor limit is 4.5 kV). The device may be operated at rep-rates up to 30 Hz with the present gas-valve. Thrust measurements and imaging of the device operated in rep-rated mode will be presented. The pre-ionizer consists of a 0.3 microFarad capacitor charged to 4 kV and connected to two annular stainless-steel electrodes bounding the area of the coil-face. The 4 kV potential is held across them and when the gas is puffed in over the coil, the PI circuit is completed, and a plasma is formed. Even at the less than optimal base-pressure in the chamber (approximately 5 × 10(exp -4) torr), the PI held-off the applied voltage, and only discharged upon command. For a capacitor charge of 2 kV the peak coil current is 4.1 kA, and during this pulse a very bright discharge (much brighter than from the PI alone) was observed (see Fig. 2). Interestingly, for discharges at this charge voltage the PI was not required as the current rise rate, dI/dt, of the coil itself was sufficient to ionize the gas.

A new calibration method was developed and applied to inductively coupled plasma atomic emission spectrometry. External calibration was performed as follows. A container was filled with a given volume of deionized (V(p)) water. Then a concentrated standard was introduced at a controlled rate (Q(e)) into the tank by means of a peristaltic pump. The resulting solution was stirred throughout the experiment. Simultaneously, the solution inside the tank was pumped from the vessel to the plasma at a given rate (Q(s)). The signal was continuously recorded. The variation of the concentration of the solution leaving the tank with time was determined by applying a basic equation of stirred tanks. The representation of the emission intensity versus the time and the further conversion of the time scale into a concentration scale gave rise to the calibration line. The best results in terms of linearity were achieved for V(p)=15 cm3, Q(e)=0.6-0.75 ml min(-1) and Q(s)=1-1.2 ml min(-1). Graphs with more than 40 standards were obtained within about 10 min. The results found were not statistically different from those afforded by the conventional calibration method. In addition, the new method was faster and supplied better linearity and precision than the conventional one. Another advantage of the stirred tank was that procedures such as dynamic calibration and standard additions could be easily and quickly applied, thus shortening the analysis time. A complete analysis following these procedures based on the measurement of 30 standards took about 5 min. Several synthetic as well as certified samples (i.e., bovine liver, mussel tissue and powdered milk) were analyzed with the stirred tank by applying four different calibration methodologies (i.e., external calibration, internal calibration, standard additions and a combination of internal standardization and standard additions), with the combination of internal standardization and standard additions being the method that provided

A system and a method of generating radiation and/or particle emissions are disclosed. In at least some embodiments, the system includes at least one laser source that generates a first pulse and a second pulse in temporal succession, and a target, where the target (or at least a portion the target) becomes a plasma upon being exposed to the first pulse. The plasma expand after the exposure to the first pulse, the expanded plasma is then exposed to the second pulse, and at least one of a radiation emission and a particle emission occurs after the exposure to the second pulse. In at least some embodiments, the target is a solid piece of material, and/or a time period between the first and second pulses is less than 1 microsecond (e.g., 840 ns).

Abstract Electron and ion energy distribution functions and other plasma parameters such as plasma potential (V(sub p)) , electron temperature (T(sub e)), and electron and ion number densities (n (sub e) and n(sub i)) in low pressure CF4 plasmas have been measured. The experiments were conducted in a GEC cell using an inductively coupled plasma (ICP) device powered by a 13.56 MHz radio-frequency (rf) power source. The measurements were made at 300 W of input rf power at 10, 30 and 50 mTorr gas pressures. Langmuir probe measurements suggest that n(sub e), n(sub i) and V(sub p) remain constant over 60% of the central electrode area, beyond which they decrease. Within the limits of experimental error (+/- 0.25 eV), T(sub e) remains nearly constant over the electrode area. T(sub e) and V(sub p) increase with a decrease in pressure. n(sub e) and n(sub i) are not affected as significantly as T(sub e) or V(sub p) by variation in the gas pressure. The electron energy distribution function (EEDF) measurements indicate a highly non-Maxwellian plasma. CF3+ is the most dominant ion product of the plasma, followed by CF2+ and CF+. The concentrations of CF2+ and CF+ are much larger than that is possible from direct electron impact ionization of the parent gas. The cross-section data suggest that the direct electron impact ionization of fragment neutrals and negative ion production by electron attachment may be responsible for increase of the minor ions.

Plasma characterization and impedance matching are an integral part of any radio frequency (RF) based plasmasource. In long pulse operation, particularly in high power operation where plasma load may vary due to different reasons (e.g. pressure and power), online tuning of impedance matching circuit and remote plasma density estimation are very useful. In some cases, due to remote interfaces, radio activation and, due to maintenance issues, power probes are not allowed to be incorporated in the ion source design for plasma characterization. Therefore, for characterization and impedance matching, more remote schemes are envisaged. Two such schemes by the same authors are suggested in these regards, which are based on air core transformer model of inductive coupled plasma (ICP) [M. Bandyopadhyay et al., Nucl. Fusion 55, 033017 (2015); D. Sudhir et al., Rev. Sci. Instrum. 85, 013510 (2014)]. However, the influence of the RF field interaction with the plasma to determine its impedance, a physics code HELIC [D. Arnush, Phys. Plasmas 7, 3042 (2000)] is coupled with the transformer model. This model can be useful for both types of RF sources, i.e., ICP and helicon sources. PMID:26932040

In order to develop very high energy (>1 MeV) neutral beam injection systems for applications, such as plasma heating in fusion devices, it is necessary first to develop high throughput negative ion sources. For the ITER reference source, this will be realised using caesiated inductively coupled plasma devices, containing either hydrogen or deuterium discharges, operated with high rf input powers (up to 90 kW per driver). It has been suggested that due to their high power coupling efficiency, helicon devices may be able to reduce power requirements and potentially obviate the need for caesiation due to the high plasma densities achievable. Here, we present measurements of negative ion densities in a hydrogen discharge produced by a helicon device, with externally applied DC magnetic fields ranging from 0 to 8.5 mT at 5 and 10 mTorr fill pressures. These measurements were taken in the magnetised plasma interaction experiment at the Australian National University and were performed using the probe-based laser photodetachment technique, modified for the use in the afterglow of the plasma discharge. A peak in the electron density is observed at ∼3 mT and is correlated with changes in the rf power transfer efficiency. With increasing magnetic field, an increase in the negative ion fraction from 0.04 to 0.10 and negative ion densities from 8 × 10{sup 14 }m{sup −3} to 7 × 10{sup 15 }m{sup −3} is observed. It is also shown that the negative ion densities can be increased by a factor of 8 with the application of an external DC magnetic field.

A helicon plasmasource at Oak Ridge National Laboratory is being used to investigate operating scenarios relevant to the VASIMR (VAriable Specific Impulse Magnetoplasma Rocket). These include operation at high magnetic field (> = 0.4 T), high frequency (<= 30 MHz), high power (< = 3 kW), and with light ions (He+, H+). To date, He plasmas have been produced with n(sub e0) = 1.7 x 10(exp 19)/cu m (measured with an axially movable 4mm microwave interferometer), with Pin = I kW at f = 13.56 MHz and absolute value of B(sub 0) = 0.16 T. In the near future, diagnostics including a mass flow meter and a gridded energy analyzer array will be added to investigate fueling efficiency and the source power balance. The latest results, together with modeling results using the EMIR rf code, will be presented.

Saturn's magnetospheric dynamics are dominated by two facts: 1) the planet rotates very rapidly (~10-hour period); and 2) the moon Enceladus, only 500 km in diameter, orbits Saturn at a distance of 4 Rs. This tiny moon produces jets of water through cracks in its icy surface, filling a large water-product torus of neutral gas that surrounds Saturn near Enceladus' orbit. Through photoionization and electron-impact ionization, the torus forms the dominant source of Saturn's magnetospheric plasma. This inside-out loading of plasma, combined with the rapid rotation of the magnetic field, leads to outward transport through a nearly continuous process of discrete flux-tube interchange. The magnetic flux that returns to the inner magnetosphere during interchange events brings with it hotter, more-tenuous plasma from the outer magnetosphere. When dense, relatively cold plasma from the inner magnetosphere flows outward in the tail region, the magnetic field is often not strong enough to confine it, and magnetic reconnection allows the plasma to break off in plasmoids that escape the magnetospheric system. This complicated ballet of production, transport, and loss is carried on continuously. In this talk we will investigate its temporal variability, on both short and long timescales.

After developing a pulsed-8X source for H{sup {minus}} beams, we are now testing a cooled, dc version. The design dc power density on the cathode surface is 900 W/cm{sup 2}, much higher than achieved in any previously-reported Penning surface-plasmasource (SPS). The source is designed to accommodate dc arc power levels up to 30 kW by cooling the electrode surfaces with pressurized, hot water. After striking the arc using a 600-V pulser, a 350-V dc power supply is switched in to sustain the 100-V discharge. Now our tests are concentrating on arc pulse lengths {le}1 s. Ultimately, the discharge will be operated dc. The source is described and the initial arc test results are presented.

Plasma cathodes are insert free devices that are developed to be employed as electron sources in electric propulsion and ion source applications as practical alternatives to more commonly used hollow cathodes. Inductively coupled plasma cathodes, or Radio Frequency (RF) plasma cathodes, are introduced in recent years. Because of its compact geometry, and simple and efficient plasma generation, RF plasmasource is considered to be suitable for plasma cathode applications. In this study, numerous RF plasma cathodes have been designed and manufactured. Experimental measurements have been conducted to study the effects of geometric and operational parameters. Experimental results of this study show that the plasma generation and electron extraction characteristics of the RF plasma cathode device strongly depend on the geometric parameters such as chamber diameter, chamber length, orifice diameter, orifice length, as well as the operational parameters such as RF power and gas mass flow rate.

Plasma cathodes are insert free devices that are developed to be employed as electron sources in electric propulsion and ion source applications as practical alternatives to more commonly used hollow cathodes. Inductively coupled plasma cathodes, or Radio Frequency (RF) plasma cathodes, are introduced in recent years. Because of its compact geometry, and simple and efficient plasma generation, RF plasmasource is considered to be suitable for plasma cathode applications. In this study, numerous RF plasma cathodes have been designed and manufactured. Experimental measurements have been conducted to study the effects of geometric and operational parameters. Experimental results of this study show that the plasma generation and electron extraction characteristics of the RF plasma cathode device strongly depend on the geometric parameters such as chamber diameter, chamber length, orifice diameter, orifice length, as well as the operational parameters such as RF power and gas mass flow rate. PMID:26932094

The floating harmonic method was developed for in situ plasma diagnostics of allowing real time measurement of electron temperature (T{sub e}) and ion flux (J{sub ion}) without contamination of the probe from surface modification by reactive species. In this study, this novel non-invasive diagnostic system was studied to characterize inductively coupled plasma of reactive gases monitoring T{sub e} and J{sub ion} for investigating the optimum plasma etching conditions and controlling of the real-time plasma surface reaction in the range of 200-900 W source power, 10-100 W bias power, and 3-15 mTorr chamber pressure, respectively.

Low-damage processing of polymers is of key importance for fabrication of next-generation devices including electronics on polymers, which require development of plasmasources with reduced plasma potential in order to control interface between the polymer substrate and functional films without suffering degradations due to ion bombardment. Furthermore, applications to polymer-based displays and photovoltaic devices require ultra-large area processes at high throughput. To meet these requirements, we have developed plasma processing technologies with low-inductance antenna (LIA) modules to sustain inductively-coupled RF plasmas. Ion energy distributions showed considerably suppressed ion energy as low as 3.8 eV. The polymer surfaces after plasma exposure were analyzed via hard x-ray photoelectron spectroscopy (HXPES) at SPring8 (National SOR facility in Japan), which exhibited nano-surface modification of polymer surface without suffering degradation of molecular structures underneath. Furthermore, plasma-enhanced deposition of silicon films showed low-temperature (200 deg.C) formation of micro-crystalline silicon films due to sufficiently reduced damage during deposition.

Positioning the sampling orifice relatively far from the load coil combined with use of low forward power and high aerosol gas flow rate causes the background mass spectrum to become dominated by NO/sup +/. Nearly all the Ar/sup +/ and ArH/sup +/ ions are suppressed under these conditions, which frees m/z 39 and 41 for potassium isotope ratio measurements. The precision is 0.3-0.9% relative standard deviation for potassium concentrations in the range 1-50 mg L/sup -1/. The determined ratios are approx. 9% higher than the accepted value and also vary with the concentration of sodium concomitant, so calibrations and chemical separations are desirable. These observations should permit use of inductively coupled plasma mass spectrometry for rapid isotope ratio determinations of potassium from biological organisms or water sources.

Particle size effects and elemental fractionation in laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS) are investigated with nanosecond and femtosecond laser ablation, differential mobility analysis, and magnetic sector ICP-MS. Laser pulse width was found to have a significant influence on the LA particle size distribution and the elemental composition of the aerosol and thus fractionation. Emission from individual particles from solution nebulization, glass, and a pressed powder pellet are observed with high speed digital photography. The presence of intact particles in an ICP is shown to be a likely source of fractionation. A technique for the online detection of stimulated elemental release from neural tissue using magnetic sector ICP-MS is described. Detection limits of 1 μg L-1 or better were found for P, Mn, Fe, Cu, and Zn in a 60 μL injection in a physiological saline matrix.

Electron kinetics regime is characterized with the evolution of electron energy probability functions (EEPFs) in inductively coupled hydrogen plasmas. Measurements on EEPFs are carried out with a radio-frequency-compensated single Langmuir probe at the center of a planar-type hydrogen plasma driven by 13.56 MHz wave frequency. Measured EEPFs deviate considerably from the Maxwellian distribution only at relatively high pressures (15-40 mTorr), and the effective electron temperature steeply decreases as the gas pressure increases. Such evolution of the EEPF shapes with pressures is discussed in the consideration of the electron energy relaxation length and various characteristic frequencies. It is found that the EEPFs show locally depleted electron energy distribution where the electron-molecule vibrational collision frequency exceeds the electron-electron collision frequency at the local kinetics regime, while the measured EEPF is not dependent on the vibrational collision frequency at the non-local kinetics regime. Variation of the EEPF shape with distance from the heating region at the local kinetics regime is also well explained in the context of the energy relaxation length and electron-molecule collision frequencies. This study indicates that the control of electron energy distribution should be carried out in the consideration of electron kinetic regime depending on the energy relaxation length for various hydrogen plasmasources.

The ion saturation current uniformities of two different type plasmasources, a coaxial and a Lisitano coil type, are investigated using a moveable Langmuir probe. They both operate under off-resonance microwave discharge; H2 or Ar is used as the discharge gas. The coaxial source provides better uniformities for ion saturation current, electron temperature, and electron density than the Lisitano coil, independent of the discharge gas species. The ion saturation current with the coaxial source is uniform within about 15% inside a 40-mm-diam circle for a 0.17 Pa H2 discharge. However, with the Lisitano coil uniformity is limited to a 20-mm-diam circle and the coil is subject to heat distortion because of difficulties in realizing a cooled system

A planar coil RF inductively coupled plasma (PC-RFICP) systems is set up for the purpose of thin film deposition. The system is powered by a 13.56 MHz, 550 W, 50 OMEGA RF generator. The RF power is transferred to the plasma via a planar induction coil. The impedance matching unit consists of an air core step-down transformer and a tunable vacuum capacitor. This system is used for the plasma enhanced chemical vapor deposition (PECVD) of diamond-like carbon (DLC) film on silicon substrate, and hydrogenated amorphous carbon (a-C:H) film.

Storable propellants (for example water, ammonia, and hydrazine) are attractive for deep space propulsion due to their naturally high density at ambient interplanetary conditions, which obviates the need for a cryogenic/venting system. Water in particular is attractive due to its ease of handling and availability both terrestrially and extra-terrestrially. While many storable propellants are reactive and corrosive, a propulsion scheme where the propellant is insulated from vulnerable (e.g. metallic) sections of the assembly would be well-suited to process these otherwise incompatible propellants. Pulsed inductiveplasma thrusters meet this criterion because they can be operated without direct propellant-electrode interaction. During operation of these devices, electrical energy is capacitively stored and then discharged through an inductive coil creating a time-varying current in the coil that interacts with a plasma covering the face of the coil to induce a plasma current. Propellant is accelerated and expelled at a high exhaust velocity (O(10-100 km/s)) by the Lorentz body force arising from the interaction of the magnetic field and the induced plasma current. While this class of thruster mitigates the life-limiting issues associated with electrode erosion, many pulsed inductiveplasma thrusters require high pulse energies to inductively ionize propellant. The Microwave Assisted Discharge InductivePlasma Accelerator (MAD-IPA) is a pulsed inductiveplasma thruster that addressees this issue by partially ionizing propellant inside a conical inductive coil before the main current pulse via an electron cyclotron resonance (ECR) discharge. The ECR plasma is produced using microwaves and a static magnetic field from a set of permanent magnets arranged to create a thin resonance region along the inner surface of the coil, restricting plasma formation, and in turn current sheet formation, to a region where the magnetic coupling between the plasma and the theta

Formations of a closed flux surface (CFS) on QUEST are achieved by fully non-inductive current start-up driven by RF, which is 8.2GHz in frequency and more than 40kW in power. It found that appropriate magnetic configuration with positive n-index and reduction of particle recycling was crucial to achieve the non-inductiveplasma current start-up (PCS) successfully. Especially the controllability of particle recycling should be improved by wall conditioning based on successive plasma production and wall cleaning with electron cyclotron resonance heating (ECR) plasmas induced by RF in frequency of 2.45GHz.

A laser ion source (LIS) can easily provide a high current beam. However, it has been difficult to obtain a longer beam pulse while keeping a high current. On occasion, longer beam pulses are required by certain applications. For example, more than 10 micros of beam pulse is required for injecting highly charged beams to a large sized synchrotron. To extend beam pulse width, a solenoid field was applied at the drift space of the LIS at Brookhaven National Laboratory. The solenoid field suppressed the diverging angle of the expanding plasma and the beam pulse was widened. Also, it was observed that the plasma state was conserved after passing through a few hundred gauss of the 480 mm length solenoid field. PMID:20192365

The cesiation effect, a significant enhancement of negative ion emission from a gas discharge with decrease of co-extracted electron current below negative ion current, was observed for the first time on July 1, 1971 by placing into the discharge a compound with 1 mg of cesium. Subsequent developments of surface plasmasources (SPS) for highly efficient negative ion production caused by the interaction of plasma particles with electrodes on which the adsorbed cesium reduced the surface work function are described. In the last 40 years, the intensity of negative ion beams has increased by cesiation up to 10{sup 4} times from 3 mA to tens of amperes. Here, the main attention is concentrated on earlier SPS developments because recent results are well known and widely available.

Plasma Technology, Inc. (PTI), a Santa Fe, New Mexico corporation has developed the Plasma Energy Recycle and Conversion (PERC){trademark} treatment process as a safe and environmentally clean alternative to conventional thermal destruction technologies. The PERC{trademark} treatment process uses as its heat source an advanced Induction Coupled Plasma (ICP) torch connected to a reaction chamber system with an additional emission control system. For example, organic-based gas, liquid, slurry, and/or solid waste streams can be converted into usable or even salable products while residual emissions are reduced to an absolute minimum. In applications for treatment of hazardous and radioactive waste streams, the PERC system could be used for destruction of the hazardous organic constituents and/or significant waste volume reduction while capturing the radioactive fraction in a non-leachable form. Like Direct Current (DC) and Alternating Current (AC) arc plasma systems, ICP torches offer sufficient energy to decompose, melt and/or vitrify any waste stream. The decision for an arc plasma or an IC plasma system has to be made on a case by case evaluation and is highly dependent on the specific waste stream`s form and composition. Induction coupled plasma technology offers one simple, but significant difference compared to DC or AC arc plasma systems: the ICP torch is electrodeless. To date, enormous research effort has been spent to improve the lifetime of electrodes and the effectiveness of related cooling systems. Arc plasma systems are established in research laboratories worldwide and are approaching a broad use in commercial applications. ICP technology has been improved relatively recently, but nowadays offers complete new and beneficial approaches in the field of waste conversion and treatment.

Spatial characteristics of plasma parameters such as electron temperature, plasma density, plasma potential, and electron energy distribution (EED) were studied in inductively coupled plasma with an axial dc magnetic field. With dc magnetic field, the measured EEDs in the total electron energy scale are spatially coincided except cutting of the low electron energy part indicating the conserved non-local electron kinetics in an axial direction, even though the dc magnetic field is applied. Spatial distributions of the plasma densities at axial positions have almost same trends with various magnetic field strengths. We also discuss the reduction of the ambipolar potential along the axial direction as the applied magnetic field increased.

The fundamental and practical aspects are described for extracting ions from atmospheric pressure plasmasources into an analytical mass spectrometer. Methodologies and basic concepts of inductively coupled plasma mass spectrometry (ICP-MS) are emphasized in the discussion, including ion source, sampling interface, supersonic expansion, slumming process, ion optics and beam focusing, and vacuum considerations. Some new developments and innovative designs are introduced. The plasma extraction process in ICP-MS was investigated by Langmuir measurements in the region between the skimmer and first ion lens. Electron temperature (T{sub e}) is in the range 2000--11000 K and changes with probe position inside an aerosol gas flow. Electron density (n{sub e}) is in the range 10{sup 8}--10{sup 10} {sup {minus}cm }at the skimmer tip and drops abruptly to 10{sup 6}--10{sup 8} cm{sup {minus}3} near the skimmer tip and drops abruptly to 10{sup 6}--10{sup 8} cm{sup {minus}3} downstream further behind the skimmer. Electron density in the beam leaving the skimmer also depends on water loading and on the presence and mass of matrix elements. Axially resolved distributions of electron number-density and electron temperature were obtained to characterize the ion beam at a variety of plasma operating conditions. The electron density dropped by a factor of 101 along the centerline between the sampler and skimmer cones in the first stage and continued to drop by factors of 10{sup 4}--10{sup 5} downstream of skimmer to the entrance of ion lens. The electron density in the beam expansion behind sampler cone exhibited a 1/z{sup 2} intensity fall-off (z is the axial position). An second beam expansion originated from the skimmer entrance, and the beam flow underwent with another 1/z{sup 2} fall-off behind the skimmer. Skimmer interactions play an important role in plasma extraction in the ICP-MS instrument.

In this review paper, fundamental overviews of low-temperature atmospheric-pressure plasma generation are provided and various sources for plasma medicine are described in terms of operating conditions and plasma properties. PMID:27109191

Features of the semiplanotron surface plasmasources (SPS) with cesiation used for high efficient negative ion beam production from first development to modern condition are considered. Design features of semiplanotrons SPS with cylindrical and spherical geometric focusing and the features of the negative ion production in the semiplanotrons are reviewed. Several versions of semiplanotrons with efficiency up to 0.1 A of H{sup -} per kW of discharge power are discussed. Modifications of the semiplanotrons for dc operation and for heavy negative ion production are reviewed.

Langmuir probe measurements of radio frequency (RF) magnetic pole enhanced inductively coupled (MaPE-ICP) argon plasma were accomplished to obtain the electron number densities and electron temperatures. The measurements were carried out with a fixed RF frequency of 13.56 MHz in a pressure range of 7.5 mTorr to 75 mTorr at an applied RF power of 10 W and 100 W. These results are compared with a global (volume average) model. The results show good agreement between theoretical and experimental measurements. The electron number density shows an increasing trend with both RF power and pressure while the electron temperature shows decreasing trend as the pressure increases. The difference in the plasma potential and floating potential as a function of electron temperature measured from the electrical probe and that obtained theoretically shows a linear relation with a small difference in the coefficient of proportionality. The intensity of the emission line at 750.4 nm due to 2p1 → 1s2 (Paschen's notation) transition closely follows the variation of ne with RF power and filling gas pressure. Measured electron energy probability function (EEPF) shows that electron occupation changes mostly in the high-energy tail, which highlights close similarity of 750.4 nm argon line to ne.

In order to create a compact plasma etching reactor, plasma discharge characteristics in compact SF6 radio-frequency (RF) plasmasource which has a chamber diameter of 40 mm have been studied. Convergent magnetic field configuration produced by a solenoid coil and a permanent magnet located behind substrate is employed for efficient plasma transport downstream of plasmasource. A discharge characteristics with the changes in relative emission intensity of fluorine atom of FI at 703.7 nm in compact SF6 plasmasource are discussed: the dependence of relative emission intensity on the magnetic field strength, the RF input power, and the mass flow rate of the SF6 gas. The relative emission intensity was significantly increased when the RF input power is ~150 W. We present the fundamental etching performance (especially etching rate) of compact plasmasource, and then the etching rate of 0.1-1.0 μm/min was obtained under the condition of a RF input power of 50-200 W, a mass flow rate of SF6 of 5.5 sccm and a bias RF power of 20 W. The results of test etching will be shown in presentation.

A simple conical helix has been successfully employed as a slow wave structure to generate plasmas by electron cyclotron resonance heating (ECRH). The plasma is typical of plasmas created by ''Lisitano coil'' sources, n approximately 10(10)-10(12) cm(-3) with T(e) approximately 2-20 eV. This source, however, is much simpler to fabricate. The ease of fabrication allows the user some flexibility in designing the source to fit a specific plasma physics experiment. PMID:18698943

Pulsed inductiveplasma accelerators are electrodeless space propulsion devices where a capacitor is charged to an initial voltage and then discharged through a coil as a high-current pulse that inductively couples energy into the propellant. The field produced by this pulse ionizes the propellant, producing a plasma near the face of the coil. Once a plasma is formed if can be accelerated and expelled at a high exhaust velocity by the Lorentz force arising from the interaction of an induced plasma current and the magnetic field. While there are many coil geometries that can be employed to inductively accelerate a plasma, in this paper the discussion is limit to planar geometries where the coil take the shape of a flat spiral. A recent review of the developmental history of planar-geometry pulsed inductive thrusters can be found in Ref. [1]. Two concepts that have employed this geometry are the Pulsed Inductive Thruster (PIT) and the Faraday Accelerator with Radio-frequency Assisted Discharge (FARAD).

A double-plasmasource capable of the generation of a continuous bipolar ion-ion beam is described. The quasi-neutral ion-ion flow to an extraction electrode is formed in the system containing primary inductively coupled plasma separated from a secondary plasma by an electrostatic grid-type filter. The total current of each ion species to the 250 mm diameter extraction electrode is about 80 mA; the electron current does not exceed 30% of the ion current. Method of positive/negative ion current ratio control is proposed, allowing the ion currents ratio variation in wide range.

The injection of a single micrometer-sized droplet into an analytical inductively coupled plasma (ICP) perturbs the plasma and involves three sequential effects: local cooling, thermal pinching and plasma reheating. Time-resolved two-dimensional monochromatic imaging of the load-coil region of an ICP was used to monitor this sequence of plasma perturbations. When a microdroplet enters the plasma, it acts as a local heat sink and cools the nearby plasma region. The cooling effect is considered local, although the cooling volume can be large and extends 6 mm from the physical location of the vaporizing droplet. The liberated hydrogen, from decomposition of water, causes a thermal pinch effect by increasing the thermal conductivity of the bulk plasma and accelerating heat loss at the plasma periphery. As a response to the heat loss, the plasma shrinks in size, which increases its power density. Plasma shrinkage starts around the same time when the microdroplet enters the plasma and lasts at least 2 ms after the droplet leaves the load-coil region. Once the vaporizing droplet passes through a particular plasma volume, that volume is reheated to an even higher temperature than under steady-state conditions. Because of the opposing effects of plasma cooling and reheating, the plasma conditions are different upstream (downward) and downstream (upward) from a vaporizing droplet - cooling dominates the downstream region whereas reheating controls in the upstream domain. The boundary between the local cooling and reheating zones is sharp and is only ~ 1 mm thick. The reheating effect persists a relatively long time in the plasma, at least up to 4 ms after the droplet moves out of the load-coil region. The restoration of plasma equilibrium after the perturbation induced by microdroplet injection is slow. Microdroplet injection also induces a momentary change in plasma impedance, and the impedance change was found to correlate qualitatively with the different stages of plasma

Changes in the ion flux and the time-averaged ion distribution functions are reported for pulsed, inductively coupled RF plasmas (ICPs) operated over a range of duty cycles. For helium and argon plasmas, the ion flux increases rapidly after the start of the RF pulse and after about 50 {mu}s reaches the same steady state value as that in continuous ICPs. Therefore, when the plasma is pulsed at 1 kHz, the ion flux during the pulse has a value that is almost independent of the duty cycle. By contrast, in molecular electronegative chlorine/chlorosilane plasmas, the ion flux during the pulse reaches a steady state value that depends strongly on the duty cycle. This is because both the plasma chemistry and the electronegativity depend on the duty cycle. As a result, the ion flux is 15 times smaller in a pulsed 10% duty cycle plasma than in the continuous wave (CW) plasma. The consequence is that for a given synchronous RF biasing of a wafer-chuck, the ion energy is much higher in the pulsed plasma than it is in the CW plasma of chlorine/chlorosilane. Under these conditions, the wafer is bombarded by a low flux of very energetic ions, very much as it would in a low density, capacitively coupled plasma. Therefore, one can extend the operating range of ICPs through synchronous pulsing of the inductive excitation and capacitive chuck-bias, offering new means by which to control plasma etching.

Data from the TIMAS ion mass spectrometer on the Polar satellite, covering 15 ev/e to 33 keV/e in energy and essentially 4(pi) in view angles, are used to investigate the properties of earthward (sunward) field-aligned flows of ions, especially protons, in the plasma sheet-lobe transition region near local midnight. A total of 142 crossings of this region are analyzed at 12-sec time resolution, all in the northern hemisphere, at R(SM) approx. 4 - 7 R(sub E), and most (106) in the poleward (sunward) direction. Earthward proton flows are prominent in this transition region (greater than 50% of the time), typically appearing as sudden "blasts" with the most energetic protons (approx. 33 keV) arriving first with weak flux, followed by protons of decreasing energy and increasing flux until either: (1) a new "blast" appears, (2) the flux ends at a sharp boundary, or (3) the flux fades away within a few minutes as the mean energy drops to a few keV. Frequent step-like changes (less than 12 sec) of the flux suggest that perpendicular gradients on the scale of proton gyroradii are common. Peak flux is similar to central plasma sheet proton flux (10(exp 5) - 10(exp 6)/[cq cm sr sec keV/e] and usually occurs at E approx. 4 - 12 keV. Only the initial phase of each "blast" (approx. 1 min) displays pronounced field-alignment of the proton velocity distribution, consistent with the time-of-flight separation of a more or less isotropic source distribution with df/d(nu) less than 0. The dispersive signatures are often consistent with a source at R(SM) less than or equal to 30 R(sub E). No systematic latitudinal velocity dispersion is found, implying that the equatorial plasmasource is itself convecting. In short, the proton "blasts" appear as sudden local expansions of central plasma sheet particles along reconfigured ("dipolarized") magnetic field lines.

The shape of the electron energy distribution function (EEDF) in low-temperature plasmas governs the relative rates of electron-impact processes that determine key discharge properties. Comparison of EEDFs measured with probes and optical emission [1] in argon and neon inductively coupled plasmas (ICP) has revealed a surplus of high-energy electrons in neon-containing plasmas. The abundance of these extra high energy electrons is correlated with the sheath thickness near the rf antenna and can be reduced by either adding a Faraday shield or increasing the plasma density. These trends suggest an association of the surplus high-energy electrons with stochastic heating of electrons in capacitively-coupled electric fields in the sheath adjacent to the antenna. Conventional stochastic heating, however, is found to be insufficient to account for the EEDF observations, and a comparison of modeled and experimental values of the 13.56 MHz time modulation of select neon emission lines strongly suggests plasma series resonance (PSR) heating adjacent to the ICP antenna as the source of the extra high-energy electrons. [4pt] [1] PlasmaSources Sci. Technol. 20, (2011) 055006.

A global model has been developed for low-pressure, inductively coupled plasma (ICP) SF{sub 6}/O{sub 2}/Ar mixtures. This model is based on a set of mass balance equations for all the considered species, coupled with the discharge power balance equation and the charge neutrality condition. The present study is an extension of the kinetic global model previously developed for SF{sub 6}/Ar ICP plasma discharges [Lallement et al., PlasmaSources Sci. Technol. 18, 025001 (2009)]. It is focused on the study of the impact of the O{sub 2} addition to the SF{sub 6}/Ar gas mixture on the plasma kinetic properties. The simulation results show that the electron density increases with the %O{sub 2}, which is due to the decrease of the plasma electronegativity, while the electron temperature is almost constant in our pressure range. The density evolutions of atomic fluorine and oxygen versus %O{sub 2} have been analyzed. Those atomic radicals play an important role in the silicon etching process. The atomic fluorine density increases from 0 up to 40% O{sub 2} where it reaches a maximum. This is due to the enhancement of the SF{sub 6} dissociation processes and the production of fluorine through the reactions between SF{sub x} and O. This trend is experimentally confirmed. On the other hand, the simulation results show that O(3p) is the preponderant atomic oxygen. Its density increases with %O{sub 2} until reaching a maximum at almost 40% O{sub 2}. Over this value, its diminution with O{sub 2}% can be justified by the high increase in the loss frequency of O(3p) by electronic impact in comparison to its production frequency by electronic impact with O{sub 2}.

The plasmasources of Mercury, Earth, Jupiter, and Saturn have been described in this issue in great detail. Much less information exists about the plasmasources of Uranus and Neptune. Only one flyby of the Voyager 2 spacecraft through the highly complex and time variable magnetospheres of those ice giants gives us a limited snapshot of the main plasmasources in those systems. The basic knowledge derived from those flybys are described briefly in this paper for completeness. The main purpose of this paper is to summarize the plasmasources of all planetary magnetospheres and compare the similarities and differences of those huge plasma laboratories in our solar system.

Extraction of negative ions from the large inductively driven surface-plasma negative ion source was studied. The dependencies of the extracted currents vs plasma grid (PG) bias potential were measured for two modifications of radio-frequency driver with and without Faraday screen, for different hydrogen feeds and for different levels of cesium conditioning. The maximal PG current was independent of driver modification and it was lower in the case of inhibited cesium. The maximal extracted negative ion current depends on the potential difference between the near-PG plasma and the PG bias potentials, while the absolute value of plasma potential in the driver and in the PG area is less important for the negative ion production. The last conclusion confirms the main mechanism of negative ion production through the surface conversion of fast atoms. PMID:26932001

Extraction of negative ions from the large inductively driven surface-plasma negative ion source was studied. The dependencies of the extracted currents vs plasma grid (PG) bias potential were measured for two modifications of radio-frequency driver with and without Faraday screen, for different hydrogen feeds and for different levels of cesium conditioning. The maximal PG current was independent of driver modification and it was lower in the case of inhibited cesium. The maximal extracted negative ion current depends on the potential difference between the near-PG plasma and the PG bias potentials, while the absolute value of plasma potential in the driver and in the PG area is less important for the negative ion production. The last conclusion confirms the main mechanism of negative ion production through the surface conversion of fast atoms.

Numerical simulations of 10 kW and 110 kW inductively coupled plasma (ICP) wind tunnels were carried out to study physical properties of the flow inside the ICP torch and vacuum chamber with air as the working gas. Two-dimensional compressible axisymmetric Navier-Stokes (N-S) equations that took into account 11 species and 49 chemical reactions of air, were solved. A heat source model was used to describe the heating phenomenon instead of solving the electromagnetic equations. In the vacuum chamber, a four-temperature model was coupled with N-S equations. Numerical results for the 10 kW ICP wind tunnel are presented and discussed in detail as a representative case. It was found that the plasma flow in the vacuum chamber tended to be in local thermochemical equilibrium. To study the influence of operation conditions on the flow field, simulations were carried out for different chamber pressures and/or input powers. The computational results for the above two ICP wind tunnels were compared with corresponding experimental data. The computational and experimental results agree well, therefore the flow fields of ICP wind tunnels can be clearly understood.

We describe herein an improvement in the surface wettability of plasma-treated separators for use in lithium-ion batteries. We treated the separators with an O2/Ar inductively coupled plasma to increase their surface energy. The plasma treatment on the separator and plasma diagnostic experiments were performed in an inductively coupled plasma (ICP) reactor. The fraction of Ar in the O2/Ar plasma was changed from 0% to 100%. The plasma diagnostics were performed using optical emission spectroscopy and a double Langmuir probe. To confirm the morphological change of the separator membrane by the plasma treatment, we used the scanning electron microscopy. The surface energy measurements were performed using the drop method. We found that the plasma treatment transformed the separator from a hydrophobic membrane to a hydrophilic one, thereby achieving high separator wettability. After the treatment of the separators with O2/Ar plasma, the batteries exhibited better cycle performance and rate capacity than those employing the untreated ones. PMID:25971067

Pulsed inductiveplasma accelerators are electrodeless space propulsion devices where a capacitor is charged to an initial voltage and is then discharged through an inductive coil that couples energy into the propellant, ionizing and accelerating it to produce thrust. A model that employs a set of circuit equations (as illustrated in Fig. 1a) coupled to a one-dimensional momentum equation has been previously used by Lovberg and Dailey [1] and Polzin et al. [2-4] to model the plasma acceleration process in pulsed inductive thrusters. In this paper an extra capacitor, inductor, and resistor are added to the system in the manner illustrated in the schematic shown in Fig. 1b. If the second capacitor has a smaller value than the initially charged capacitor, it can serve to increase the current rise rate through the inductive coil. Increasing the current rise rate should serve to better ionize the propellant. The equation of motion is solved to find the effect of an increased current rise rate on the acceleration process. We examine the tradeoffs between enhancing the breakdown process (increasing current rise rate) and altering the plasma acceleration process. These results provide insight into the performance of modified circuits in an inductive thruster, revealing how this design permutation can affect an inductive thruster's performance.

A numerical study is done to understand the possible operating regimes of RF-ICP torch (3 MHz, 50 kW) using different gases for plasma formation at atmospheric pressure. A two dimensional numerical simulation of RF-ICP torch using argon, nitrogen, oxygen, and air as plasma gas has been investigated using computational fluid dynamic (CFD) software fluent{sup (c)}. The operating parameters varied here are central gas flow, sheath gas flow, RF-power dissipated in plasma, and plasma gas. The temperature contours, flow field, axial, and radial velocity profiles were investigated under different operating conditions. The plasma resistance, inductance of the torch, and the heat distribution for various plasma gases have also been investigated. The plasma impedance of ICP torch varies with different operating parameters and plays an important role for RF oscillator design and power coupling. These studies will be useful to decide the design criteria for ICP torches required for different material processing applications.

The dense plasma focus (DPF), a coaxial plasma gun, utilizes pulsed high current electrical discharge to heat and compress the plasma to very high density and temperature with energy densities in the range of 1-10 × 1010 J/m3. The DPF device has always been in the company of several alternative magnetic fusion devices as it produces intense fusion neutrons. Several experiments conducted on many different DPF devices ranging over several order of storage energy have demonstrated that at higher storage energy the neutron production does not follow I4 scaling laws and deteriorate significantly raising concern about the device's capability and relevance for fusion energy. On the other hand, the high energy density pinch plasma in DPF device makes it a multiple radiation source of ions, electron, soft and hard x-rays, and neutrons, making it useful for several applications in many different fields such as lithography, radiography, imaging, activation analysis, radioisotopes production etc. Being a source of hot dense plasma, strong shockwave, intense energetic beams and radiation, etc, the DPF device, additionally, shows tremendous potential for applications in plasma nanoscience and plasma nanotechnology. In the present paper, the key features of plasma focus device are critically discussed to understand the novelties and opportunities that this device offers in processing and synthesis of nanophase materials using, both, the top-down and bottom-up approach. The results of recent key experimental investigations performed on (i) the processing and modification of bulk target substrates for phase change, surface reconstruction and nanostructurization, (ii) the nanostructurization of PLD grown magnetic thin films, and (iii) direct synthesis of nanostructured (nanowire, nanosheets and nanoflowers) materials using anode target material ablation, ablated plasma and background reactive gas based synthesis and purely gas phase synthesis of various different types of

We present the development of population kinetics models for tin plasmas that can be employed to design an EUV source for microlithography. The atomic kinetic code is constrained for the requirement that the model must be able to calculate spectral emissivity and opacity that can be used in radiation hydrodynamic simulations. Methods to develop compact and reliable atomic model with an appropriate set of atomic states are discussed. Specifically, after investigation of model dependencies and comparison experiment, we improve the effect of configuration interaction and the treatment of satellite lines. Using the present atomic model we discuss the temperature and density dependencies of the emissivity, as well as conditions necessary to obtain high efficiency EUV power at λ = 13.5 nm.

Low temperature plasmas are widely used for thin film etching during micro and nano-electronic device fabrication. Fluid and hybrid plasma models were developed 15-20 years ago to understand the fundamentals of these plasmas and plasma etching. These models have significantly evolved since then, and are now a major tool used for new plasma hardware design and problem resolution. Plasma etching is a complex physical phenomenon, where inter-coupled plasma, electromagnetic, fluid dynamics, and thermal effects all have a major influence. The next frontier in the evolution of fluid-based plasma models is where these models are able to self-consistently treat the inter-coupling of plasma physics with fluid dynamics, electromagnetics, heat transfer and magnetostatics. We describe one such model in this paper and illustrate its use in solving engineering problems of interest for next generation plasma etcher design. Our 3-dimensional plasma model includes the full set of Maxwell equations, transport equations for all charged and neutral species in the plasma, the Navier-Stokes equation for fluid flow, and Kirchhoff's equations for the lumped external circuit. This model also includes Monte Carlo based kinetic models for secondary electrons and stochastic heating, and can take account of plasma chemistry. This modeling formalism allows us to self-consistently treat the dynamics in commercial inductively and capacitively coupled plasma etching reactors with realistic plasma chemistries, magnetic fields, and reactor geometries. We are also able to investigate the influence of the distributed electromagnetic circuit at very high frequencies (VHF) on the plasma dynamics. The model is used to assess the impact of azimuthal asymmetries in plasma reactor design (e.g., off-center pump, 3D magnetic field, slit valve, flow restrictor) on plasma characteristics at frequencies from 2 -- 180 MHz. With Jason Kenney, Ankur Agarwal, Ajit Balakrishna, Kallol Bera, and Ken Collins.

This paper links up with a previous publication by the same authors [ Spectrochim. Acta41B, 1235 (1986)] dealing with the measurement of the effective line profiles of about 350 prominent lines at high spectral resolution and the determination of the physical widths of these lines. In the present work the line widths are used for a breakdown of the detection limits obtained with these lines using different ICPs and different spectrometers. This breakdown takes into account the separate effects of source characteristics, noise, and spectral bandwidth. The availability of the numerical values of the physical widths of a large number of lines permitted a more rigorous approach than in a previous work [ Spectrochim. Acta40B, 1437 (1985)]. The present approach was applied to detection limits obtained in this work with a 50 MHz ICP at high spectral resolution and to results reported by W INGEet al. [ Appl. Spectrosc.33, 206 (1979)] and WOHLERS [ ICP Information Newslett.10, 601 (1985)]for 27 MHz ICPs. The 50 MHz ICP was shown to have an advantage in source signal-to-background ratio (SBR) with respect to either of the two 27 MHz ICPs. This SBR advantage was a factor of 3-15 with respect to the "Winge ICP" and a factor of 2-6 with respect to the "Wohlers ICP". The approach was also used to convert detection limits measured in the 50 MHz ICP at high resolution into values for 15 pm spectral bandwidth and a relative standard deviation of the background signal equal to 1%. These values are recommended as standards of performance for the conventional argon ICP. The paper comprises a tabulation of the complete results for the 350 prominent lines and includes four sets of detection limits for these lines.

An electron cyclotron resonance (ECR) multicusp plasmatron has been developed by feeding a multicusp bucket arc chamber with a compact ECR plasmasource. This novel source produced large (about 25-cm-diam), uniform (to within {plus minus}10%), dense (>10{sup 11}-cm{sup -3}) plasmas of argon, helium, hydrogen, and oxygen. It has been operated to produce an oxygen plasma for etching 12.7-cm (5-in.) positive photoresist-coated silicon wafers with uniformity within {plus minus}8%. Results and potential applications of this new ECR plasmasource for plasma processing of thin films are discussed. 21 refs., 10 figs.

The electromagnetic quasineutral particle-in-cell code, simulating interaction of a plane electromagnetic wave with a plasma slab, is developed. The code is used to study the ponderomotive effects in a plasma with a finite temperature. Simulations in linear regime show the strong thermal reduction of the ponderomotive force, which is in a good agreement with the linear analytical theory. It is found that in the essentially nonlinear regime, when the electron trajectories are strongly modified, the amplitude of the ponderomotive force increases compared to the linear case, but remains lower than the classical cold plasma value. The transition from nonlinear to linear regime as a function of the amplitude of the driving electromagnetic field is investigated.

A fluid dynamic model is used to simulate the electromagnetic field, fluid flow and heat transfer in an inductively coupled plasma torch working at atmospheric pressure for argon plasma. The numerical simulation is carried out by using the finite element method based on COMSOL software. The two-dimensional profiles of the electric field, temperature, velocity and charged particle densities are demonstrated inside the discharge region. These numerical results are obtained for a fixed flow rate, frequency and electric power.

The results of synthesis of carbon onionlike nanostructures from methane in plasma flow of inert gas (argon) generated in induction high-frequency plasmatron are considered and discussed. Carbon vapor obtained via dissociation of methane in plasma flow was condensed on copper substrates placed in a working chamber of the setup. The content of the synthesized soot was analyzed using scanning and transmission electron microscopy. As a result of the performed experiments, carbon onionlike structures with 20- to 100-nm sizes were obtained.

A computer controlled, scanning monochromator system specifically designed for the rapid, sequential determination of the elements is described. The monochromator is combined with an inductively coupled plasma excitation source so that elements at major, minor, trace, and ultratrace levels may be determined, in sequence, without changing experimental parameters other than the spectral line observed. A number of distinctive features not found in previously described versions are incorporated into the system here described. Performance characteristics of the entire system and several analytical applications are discussed.

Space and phase resolved optical emission spectroscopic measurements reveal that in certain parameter regimes, inductively coupled radio-frequency driven plasmas exhibit three distinct operation modes. At low powers, the plasma operates as an alpha-mode capacitively coupled plasma driven through the dynamics of the plasma boundary sheath potential in front of the antenna. At high powers, the plasma operates in inductive mode sustained through induced electric fields due to the time varying currents and associated magnetic fields from the antenna. At intermediate powers, close to the often observed capacitive to inductive (E-H) transition regime, energetic electron avalanches are identified to play a significant role in plasma sustainment, similar to gamma-mode capacitively coupled plasmas. These energetic electrons traverse the whole plasma gap, potentially influencing plasma surface interactions as exploited in technological applications.

A hybrid model, i.e. a global model coupled bidirectionally with a parallel Monte-Carlo collision (MCC) sheath model, is developed to investigate an inductively coupled discharge with a bias source. This hybrid model can self-consistently reveal the interaction between the bulk plasma and the radio frequency (rf) bias sheath. More specifically, the plasma parameters affecting characteristics of rf bias sheath (sheath length and self-bias) are calculated by a global model and the effect of the rf bias sheath on the bulk plasma is determined by the voltage drop of the rf bias sheath. Moreover, specific numbers of ions are tracked in the rf bias sheath and ultimately the ion energy distribution function (IEDF) incident on the bias electrode is obtained. To validate this model, both bulk plasma density and IEDF on the bias electrode in an argon discharge are compared with experimental measurements, and a good agreement is obtained. The advantage of this model is that it can quickly calculate the bulk plasma density and IEDF on the bias electrode, which are of practical interest in industrial plasma processing, and the model could be easily extended to serve for industrial gases.

A magnetically enhanced radio-frequency (rf) plasmasource operating on water vapor has an extensive list of potential applications. In this work, the use of a rf plasmasource to dissociate water vapor for hydrogen production is investigated. This paper describes a rf plasmasource operated on water vapor and characterizes its plasma properties using a Langmuir probe, a residual gas analyzer, and a spectrometer. The plasmasource operated first on argon and then on water vapor at operating pressures just over 300 mtorr. Argon and water vapor plasma number densities differ significantly. In the electropositive argon plasma, quasineutrality requires n(i) approximately = n(e), where n(i) is the positive ion density. But in the electronegative water plasma, quasineutrality requires n(i+) = n(i-) + n(e). The positive ion density and electron density of the water vapor plasma are approximately one and two orders of magnitude lower, respectively, than those of argon plasma. These results suggest that attachment and dissociative attachment are present in electronegative water vapor plasma. The electron temperature for this water vapor plasmasource is between 1.5 and 4 eV. Without an applied axial magnetic field, hydrogen production increases linearly with rf power. With an axial magnetic field, hydrogen production jumps to a maximum value at 500 W and then saturates with rf power. The presence of the applied axial magnetic field is therefore shown to enhance hydrogen production. PMID:19725651

Nonlocal plasma technology is based on the effect of self-trapping of fast electrons in the plasma volume [V. I. Demidov, C. A. DeJoseph, Jr., and A. A. Kudryavtsev, Phys. Rev. Lett. 95, 215002 (2006)]. This effect can be achieved by changing the ratio of fast electron flux to ion flux incident on the plasma boundaries. This in turn leads to a significant change in plasma properties and therefore can be useful for technological applications. A gas-discharge device which demonstrates control of the plasma properties by this method is described.

Ultrasonic and pneumatic nebulizers used in inductively coupled plasma-atomic emission spectrometry (ICP-AES) are compared in the analysis of standard materials and environmental samples. Results verify that ICP-AES with ultrasonic nebulization is capable of lower detection limit...

Arsenic is a toxic element to which humans are primarily exposed through food and water; it occurs as a result of human activities and naturally from the earth's crust. An experiment was developed for a senior level analytical laboratory utilizing an Inductively Coupled Plasma-Mass Spectrometer (ICP-MS) for the analysis of arsenic in household…

The design, execution, and results of an interlaboratory study of Method 6010, 'Inductively Coupled Plasma Atomic Emission Spectroscopy,' are described. The study examined the application of the method to the analysis of solid-waste materials for 23 elements. Part of the interlab...

An analytical method has been developed for the determination of trace impurities in high-purity uranium hexafluoride using liquid-liquid extraction of the uranium from the trace impurities followed by analysis with inductively coupled plasma-atomic emission spectroscopy. Detection limits, accuracy, and precision data are presented.

An ultrasonic nebulizer (USN) was utilized as a sample introduction device for an inductively coupled plasma mass spectrometer in an attempt to increase the sensitivity for As. The USN produced a valence state response difference for As. The As response was suppressed approximate...

A novel interface to connect a capillary electrophoresis (CE) system with an inductively coupled plasma mass spectrometric (ICPMS) detector is reported here. The interface was built using a direct injection nebulizer (DIN) system. In this interface, the CE capillary was placed co...

A method and apparatus for in situ addition calibration of an inductively coupled plasma atomic emission spectrometer or mass spectrometer using a precision gas metering valve to introduce a volatile calibration gas of an element of interest directly into an aerosol particle stream. The present situ calibration technique is suitable for various remote, on-site sampling systems such as laser ablation or nebulization.

Operational characteristics of two separate inductive thrusters with conical theta pinch coils of different cone angles are explored through thrust stand measurements and time- integrated, unfiltered photography. Trends in impulse bit measurements indicate that, in the present experimental configuration, the thruster with the inductive coil possessing a smaller cone angle produced larger values of thrust, in apparent contradiction to results of a previous thruster acceleration model. Areas of greater light intensity in photographs of thruster operation are assumed to qualitatively represent locations of increased current density. Light intensity is generally greater in images of the thruster with the smaller cone angle when compared to those of the thruster with the larger half cone angle for the same operating conditions. The intensity generally decreases in both thrusters for decreasing mass flow rate and capacitor voltage. The location of brightest light intensity shifts upstream for decreasing mass flow rate of propellant and downstream for decreasing applied voltage. Recognizing that there typically exists an optimum ratio of applied electric field to gas pressure with respect to breakdown efficiency, this result may indicate that the optimum ratio was not achieved uniformly over the coil face, leading to non-uniform and incomplete current sheet formation in violation of the model assumption of immediate formation where all the injected propellant is contained in a magnetically-impermeable current sheet.

Operational characteristics of two separate inductive thrusters with coils of different cone angles are explored through thrust stand measurements and time-integrated, un- filtered photography. Trends in impulse bit measurements indicate that, in the present experimental configuration, the thruster with the inductive coil possessing a smaller cone angle produced larger values of thrust, in apparent contradiction to results of a previous thruster acceleration model. Areas of greater light intensity in photographs of thruster operation are assumed to qualitatively represent locations of increased current density. Light intensity is generally greater in images of the thruster with the smaller cone angle when compared to those of the thruster with the larger half cone angle for the same operating conditions. The intensity generally decreases in both thrusters for decreasing mass ow rate and capacitor voltage. The location of brightest light intensity shifts upstream for decreasing mass ow rate of propellant and downstream for decreasing applied voltage. Recognizing that there typically exists an optimum ratio of applied electric field to gas pressure with respect to breakdown efficiency, this result may indicate that the optimum ratio was not achieved uniformly over the coil face, leading to non-uniform and incomplete current sheet formation in violation of the model assumption of immediate formation where all the injected propellant is contained in a magnetically-impermeable current sheet.

A new plasma device, the Fisk PlasmaSource (FPS), has been developed at Fisk University. This plasma device is used to study the physics of low temperature plasmas and plasma-material interactions. The FPS device is a stainless steel vacuum 6-way cross vacuum vessel with at 10-inch inner diameter. Low temperature argon plasmas are generated using DC glow discharge and thermionic filament techniques. Spatial profiles of the plasma density, plasma potential, and electron temperature are measured using Langmuir probes. We present initial experimental measurements of density and temperature profiles in the FPS device. Experimental and theoretical studies of low frequency oscillations observed in the FPS device are also presented.

A numerical model has been developed to investigate the effects of central carrier gas flow rate and coil location in an inductively coupled RF plasma torch. Solution algorithm is based on the primitive variable formulation of the Navier-Stokes equations and includes a pseudo two-dimensional electromagnetic field model. Computational results have shown that with increasing carrier gas flow rate, the plasma plume is penetrated and the back flow due to the magnetic pumping effects is diminished. This facilitates the delivery of powder particles into the discharge region. However, the plasma plume is also disturbed significantly thus enhancing power loss.

An investigation was made into polystyrene (PS) grafted onto nanometre silicon carbide (SiC) particles. In our experiment, the grafting polymerization reaction was induced by a radio frequency (RF) inductively coupled plasma (ICP) treatment of the nanometre powder. FTIR (Fourier transform infrared spectrum) and XPS (X-ray photoelectron spectroscopy) results reveal that PS is grafted onto the surface of silicon carbide powder. An analysis is presented on the effectiveness of this approach as a function of plasma operating variables including the plasma treating power, treating time, and grafting reaction temperature and time.

The use of low pressure high density plasmas to assist the synthesis of ceramic thin film materials is in its infancy. Using an inductively coupled plasma assisted magnetron sputtering system, we examine the dependence of plasma-assisted growth of TiN thin films on growth temperature at different ratios of ion flux to neutral atom flux. Our results indicate that a temperature independent densification of TiN films occurs above a certain ion to neutral atom flux ratio. As an example of this temperature independent densification, we demonstrate the formation of dense B1 TiN crystalline thin films at growth temperatures down to {approx}100 K.

This paper presents evaluation of the plasma pressure in a high current, low inductance vacuum spark on the cathode surface (the electrode material is steel). Calculations are provided for the first half period of the discharge, wherein the cathode surface is subjected to the most severe impacts (micropinches are created resulting in high-energy plasma beams). The evaluations were made using the experimental data obtained on the Pion device. The data of electrical measurements of the discharge current, the average plasma flow values obtained with the multi-grid probe and the data from a cathode macrostructure study were used. The results are given for different values of the discharge current.

In order to miniaturize a high-density, inductively coupled magnetized plasma or helicon plasma to be applied to, e.g., an industrial application and an electric propulsion field, small helicon device has been developed. The specifications of this device along with the experimental results are described. We have succeeded in generating high-density (~10(19) m(-3)) plasmas using quartz tubes with very small diameters of 10 and 20 mm, with a radio frequency power ~1200 and 700 W, respectively, in the presence of the magnetic field less than 1 kG. PMID:24182105

One of the major goals of NSTX-U is to demonstrate non-inductive operation. To facilitate this and other program goals, the center stack has been upgraded and a second neutral beam line has been added with three sources aimed more tangentially to provide higher current drive efficiency and the ability to shape the current drive profile. While non-inductive start-up and ramp-up scenarios are being developed, initial non-inductive studies will likely rely on clamping the Ohmic coil current after the plasma current has been established inductively. In this work the ability to maintain control of stored energy and plasma current once the Ohmic coil has been clamped is explored. The six neutral beam sources and the mid-plane outer gap of the plasma are considered as actuators. System identification is done using TRANSP simulations in which the actuators are modulated around a reference shot. The resulting reduced model is used to design an optimal control law with anti-windup and a recently developed framework for closed loop simulations in TRANSP is used to test the control. Limitations due to actuator saturation are assessed and robustness to beam modulation, changes in the plasma density and confinement, and changes in density and temperature profile shapes are studied. Supported by US DOE contract DE-AC02-09CH11466.

During the past decade, thermal plasma technology has been pointed out as one of the most promising innovative technologies for the thermal destruction of hazardous wastes and for this role, it has been supported by the EPA. In this field, many process alternatives have been developed but insufficient attention have been given to the details of their economic viability. The objective of this paper is to carry out an economic analysis of a particular thermal inductionplasma technology for toxic liquid waste destruction. This work is presented in three parts. The first part presents a description of the conceptual design for a process using high frequency (HF) inductionplasma. The second part, based on an order-of-magnitude factored estimate, provides an analysis of the capital investment cost of this process. The third part presents an estimation of the operating costs and a discounted cash flow analysis of this conceptual project using a HF plasma generator. The analysis of the economic viability is discussed with reference to the net present worth and the internal rate of return. The discussion examines those variables that significantly affect the viability of such technology by exploring its advantages towards minimizing impacts on the global environment and economic situation. Finally, a comparison is drawn up between the inductionplasma technology and other alternative competitive processes.

Core-shell structured amorphous Si nanoparticles were synthesized by induction thermal plasma. Crystalline Si powder with 3 μm of average diameter was injected into the induction thermal plasma at 4 MHz. The Si raw materials immediately evaporate in the high temperature plasma region and nanoparticles were produced through the quenching process. Counterflow quenching gas was injected from downstream of the torch with its direction against the plasma flow. The effect of the operating parameter such as flow rate of quenching gas and input power was investigated. Collected particles were characterized by X-ray diffraction, transmission electron microscopy, electron energy-loss spectroscopy, and Raman spectroscopy. Obtained results indicate that amorphization degree of the synthesized nanoparticles is more than 90% when additional quenching gas of 20 L/min is injected. The quenching rate of the prepared nanoparticles in the growth region have an important role on determining the amorphization degree. Moreover, EELS and Raman analyses showed the synthesized nanoparticles were coated by the SiO2 shell with thickness of 2-4 nm. These findings indicated that amorphous Si/SiO2 core-shell structured nanoparticles were successfully synthesized by induction thermal plasma in single step.

In this paper, we present an analysis of the tuning characteristics of waveguide-supplied metal-cylinder-based nozzleless microwave plasmasource. This analysis has enabled to estimate the electron concentration ne and electron frequency collisions ν in the plasma generated in nitrogen and in a mixture of nitrogen and ethanol vapour. The parameters ne and ν are the basic quantities that characterize the plasma. The presented new plasma diagnostic method is particularly useful, when spectroscopic methods are useless. The presented plasmasource is currently used in research of a hydrogen production from liquids.

The electrical characteristics and the spatial distribution of oxygen plasma according to the number of turns in ferrite inductively coupled plasmas (ferrite ICPs) are investigated. Through a new ICP model, which includes the capacitive coupling and the power loss of the ferrite material with the conventional ICP model, the variation of the oxygen discharge characteristics depending on the number of turns is simply understood by the electrical measurement, such as the antenna voltages and the currents. As the number of the turns increases, the capacitive coupling dominantly affects the spatial plasma distribution. This capacitive coupling results in a center focused density profile along the radial direction. In spite of the same discharge conditions (discharge chamber, neutral gas, and pressure), the spatial plasma distribution over 450 mm has drastic changes by increasing number of the turns. In addition, the effect of the negative species to the density profile is compared with the argon discharge characteristics at the same discharge configuration.

The advent of the plasma revolution began in the 1970's with the exploitation of plasmasources for anisotropic etching and processing of materials. In recent years, plasma processing has gained popularity, with research institutions adopting projects in the field and industries implementing dry processing in their production lines. The advantages of utilizing plasmasources would be uniform processing over a large exposed surface area, and the reduction of toxic emissions. This leads to reduced costs borne by manufacturers which could be passed down as consumer savings, and a reduction in negative environmental impacts. Yet, one constraint that plagues the industry would be the control of contaminants in a plasma reactor which becomes evident when reactions are conducted in a clean vacuum environment. In this work, amorphous silicon (a-Si) thin films were grown on glass substrates in a low frequency inductively coupled plasma (LF-ICP) reactor with a top lid made of quartz. Even though the chamber was kept at high vacuum ( 10-4 Pa), it was evident through secondary ion mass spectroscopy (SIMS) and Fourier-transform infra-red spectroscopy (FTIR) that oxygen contaminants were present. With the aid of optical emission spectroscopy (OES) the contaminant species were identified. The design of the LF-ICP reactor was then modified to incorporate an Alumina (Al2O3) lid. Results indicate that there were reduced amounts of contaminants present in the reactor, and that an added benefit of increased power transfer to the plasma, improving deposition rate of thin films was realized. The results of this study is conclusive in showing that Al2O3 is a good alternative as a top-lid of an LF-ICP reactor, and offers industries a solution in improving quality and rate of growth of thin films.

A bulk plasmasource, based on a high-current dc glow discharge with electron injection, is described. Electron injection and some special design features of the plasma arc emitter provide a plasmasource with very long periods between maintenance down-times and a long overall lifetime. The source uses a sectioned sputter-electrode array with six individual sputter targets, each of which can be independently biased. This discharge assembly configuration provides multifunctional operation, including plasma generation from different gases (argon, nitrogen, oxygen, acetylene) and deposition of composite metal nitride and oxide coatings.

Total power absorption inside the plasma (by taking the thermal motion of the electrons into account) has been calculated using different inductively coupled plasma models. The comparison shows that in the low-frequency region the results of the semi-infinite plasma models are different from those of the finite-length plasma models. The semi-infinite plasma models show net reduction of heating in the low-frequency region, due to thermal motion of the electrons from inside the skin region to outside the skin region. The finite-length plasma models on the other hand (due to change in the skin depth owing to the boundary condition of E=0 at z=L, and reflection of electrons from the plasma boundary) show that the decrease in heating due to the motion of the electrons from inside the skin depth to outside the skin depth is recovered by the reflection of the electrons from the plasma boundary. Hence, it is concluded that the results of the semi-infinite plasma models presented by Tyshetskiy et al. [Phys Rev. Lett. 90, 255002 (2003)] can be misleading (in the low-frequency region), since they overlooked the effect of axial finiteness of the plasma.

By definition a plasma is an electrically conducting gaseous mixture containing a significant concentration of cations and electrons. The Inductively Coupled Plasma (ICP) is an electrodeless discharge in a gas at atmospheric pressure. This discharge is an excellent one for vaporizing, atomizing, and ionizing elements. The early development of the ICP began in 1942 by Babat and then by Reed in the early 1960s. This was then followed by the pioneering work of Fassel and coworkers in the late 1960s. Commercial ICP spectrometers were introduced in the mid 1970s. A major breakthrough in the area of ICP took place in the early 1980s when the ICP was shown to be an excellent ion source for mass spectrometry.

Negative ions in conventional inductively coupled plasma are often more chemically active than positive ions (for example, in CF4 or SF6 plasmas), but inconveniently they are trapped inside the sheath and cannot be used for high-energy surface etching in sources with a grid-type acceleration system. In this work we describe a method of positive and negative ion extraction that allows the energy and flux of oppositely charged particles to be varied independently. Then by scattering the ions off from a metal surface, it is possible to form a high-energy beam of neutrals from the negative ions by using the low-energy positive component of the beam current for better charge compensation.

A negative ion source of the type where negative ions are formed by bombarding a low-work-function surface with positive ions and neutral particles from a plasma, wherein a highly ionized plasma is injected into an anode space containing the low-work-function surface. The plasma is formed by hollow cathode discharge and injected into the anode space along the magnetic field lines. Preferably, the negative ion source is of the magnetron type.

A negative ion source of the type where negative ions are formed by bombarding a low-work-function surface with positive ions and neutral particles from a plasma, wherein a highly ionized plasma is injected into an anode space containing the low-work-function surface is described. The plasma is formed by hollow cathode discharge and injected into the anode space along the magnetic field lines. Preferably, the negative ion source is of the magnetron type.

Laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS) was used for quantitative imaging of toxic and essential elements in thin sections (thickness of 30 or 40 μm) of tobacco plant tissues. Two-dimensional images of Mg, Fe, Mn, Zn, Cu, Cd, Rh, Pt and Pb in leaves, shoots and roots of tobacco were produced. Sections of the plant tissues (fixed onto glass slides) were scanned by a focused beam of a Nd:YAG laser in a laser ablation chamber. The ablated material was transported with argon as carrier gas to the ICP ion source at a quadrupole ICP-MS instrument. Ion intensities of the investigated elements were measured together with 13C +, 33S + and 34S + within the entire plant tissue section. Matrix matching standards (prepared using powder of dried tobacco leaves) were used to constitute calibration curves, whereas the regression coefficient of the attained calibration curves was typically 0.99. The variability of LA-ICP-MS process, sample heterogeneity and water content in the sample were corrected by using 13C + as internal standard. Quantitative imaging of the selected elements revealed their inhomogeneous distribution in leaves, shoots and roots.

Over the last two decades, there has been increased concern regarding the impact of some noble metals, such as Pd and Pt, on human health. These elements pollute the environment due to their widespread use as catalytic converters and in medical applications. The risk they pose to human health and the environment is still controversial; however, literature data point to diet as an important source of uptake by the human body. Within this context, the total Pd and Pt content of several Italian food commodities has been investigated. A total of 90 samples, including flour products, vegetables and foodstuffs of animal origin (meat, milk and eggs), were collected and freeze-dried. Samples were analyzed by sector field inductively coupled plasma mass spectrometry (SF-ICP-MS) after chopping or crushing followed by freeze-drying and microwave (MW)-assisted acid digestion in a Class-100 clean-room. A mathematical approach was adopted to correct the mass signals for still unresolved interference (mDeltam = 300, 10 000). The lowest and highest concentrations of Pt, i.e. 17 and 93 ng kg(-1) (dry weight, dw), were found in vegetables and flour products, respectively. The lowest Pd level (2830 ng kg(-1) dw) was found in eggs and the highest (47 800 ng kg(-1) dw) in vegetables. PMID:17487666

Presence of more dental alloys in oral cavity often causes pathological symptoms. Due to various and multi-faced symptomatology, they tend to be a source of significant problems not only for the patient but also for the dentist. Metal ions released from alloys can cause subjective and objective symptoms in mouth. The aim of this study was detection of metal elements presence in saliva. There were 4 groups of examined persons: with intact teeth (15 individuals) with metallic restorations, pathological currents 5-30 (mu) A, multi-faced subjective symptomatology and uncharacteristic objective diagnosis (32 patients), with metallic restorations and no subjective symptoms (14 persons) and with metallic restorations, without pathological currents and with problems related to galvanism (13 patients). Presence of 14 metal elements was checked by inductively coupled plasma mass spectrometer with laser ablation. Nd:YAG laser detector was used. There were significant differences in content of silver, gold and mercury between persons with intact teeth and other three groups. There were no differences found between subjects with and without galvanic currents, and presence of subjective and objective symptoms.

A novel mechanism of collisionless heating in large planar arrays of small inductive coils operated at radio frequencies is presented. In contrast to the well-known case of non-local heating related to the transversal conductivity, when the electrons move perpendicular to the planar coil, we investigate the problem of electrons moving in a plane parallel to the coils. Two types of periodic structures are studied. Resonance velocities where heating is efficient are calculated analytically by solving the Vlasov equation. Certain scaling parameters are identified. The concept is further investigated by a single particle simulation based on the ergodic principle and combined with a Monte Carlo code allowing for collisions with Argon atoms. Resonances, energy exchange, and distribution functions are obtained. The analytical results are confirmed by the numerical simulation. Pressure and electric field dependences are studied. Stochastic heating is found to be most efficient when the electron mean free path exceeds the size of a single coil cell. Then the mean energy increases approximately exponentially with the electric field amplitude.

In a dual plasma device, the first plasma is a microwave discharge having its own means of plasma initiation and control. The microwave discharge operates at electron cyclotron resonance (ECR), and generates a uniform plasma over a large area of about 1000 cm.sup.2 at low pressures below 0.1 mtorr. The ECR microwave plasma initiates the second plasma, a radio frequency (RF) plasma maintained between parallel plates. The ECR microwave plasma acts as a source of charged particles, supplying copious amounts of a desired charged excited species in uniform manner to the RF plasma. The parallel plate portion of the apparatus includes a magnetic filter with static magnetic field structure that aids the formation of ECR zones in the two plasma regions, and also assists in the RF plasma also operating at electron cyclotron resonance.

In a dual plasma device, the first plasma is a microwave discharge having its own means of plasma initiation and control. The microwave discharge operates at electron cyclotron resonance (ECR), and generates a uniform plasma over a large area of about 1000 cm[sup 2] at low pressures below 0.1 mtorr. The ECR microwave plasma initiates the second plasma, a radio frequency (RF) plasma maintained between parallel plates. The ECR microwave plasma acts as a source of charged particles, supplying copious amounts of a desired charged excited species in uniform manner to the RF plasma. The parallel plate portion of the apparatus includes a magnetic filter with static magnetic field structure that aids the formation of ECR zones in the two plasma regions, and also assists in the RF plasma also operating at electron cyclotron resonance. 4 figures.

Lithium-ion batteries have high energy efficiency and good cycling life and are considered as one of the best energy storage device for hybrid and/or electrical vehicle. Still, several problems must be solved prior to a broad adoption by the automotive industry: energy density, safety, and costs. To enhance both energy density and safety, the current study aims at depositing binder-free cathode materials using inductively coupled thermal plasma. In a first step, lithium iron phosphate (LiFePO4) powders are synthesized in an inductively coupled thermal plasma reactor and dispersed in a conventional polyvinylidene fluoride (PVDF) binder. Then, binder-free LiFePO4 coatings are directly deposited onto nickel current collectors by solution precursor plasma spraying (SPPS). The morphology, microstructure, and composition of the synthesized LiFePO4 powders and coatings are fully characterized by electronic microscopy, x-ray diffraction, and x-ray photoelectron spectroscopy (XPS). Quantifying Li with XPS requires the substitution of iron with manganese in the SPPS precursors (LiMPO4, where M = Fe or Mn). The plasma-derived cathodes (with and without PVDF binder) are assembled in button cells and tested. Under optimized plasma conditions, cyclic voltammetry shows that the electrochemical reversibility of plasma-derived cathodes is improved over that of conventional sol-gel-derived LiFePO4 cathodes.

A commercially manufactured PlasmaVolt sensor wafer was studied in an inductively coupled plasma reactor in an effort to validate sensor measurements. A pure Ar plasma at various powers (25-420 W), for a range of pressures (10-80 mT), and bias voltages (0-250 V) was utilized. A numerical sheath simulation was simultaneously developed in order to interpret experimental results. It was found that PlasmaVolt sensor measurements are proportional to the rf-current through the sheath. Under conditions such that the sheath impedance is dominantly capacitive, sensor measurements follow a scaling law derived from the inhomogeneous sheath model of Lieberman and Lichtenberg, [Principles of Plasma Discharges and Materials Processing (Wiley, New York, 2005)]. Under these conditions, sensor measurements are proportional to the square root of the plasma density at the plasma-sheath interface, the one-fourth root of the electron temperature, and the one-fourth root of the rf bias voltage. When the sheath impedance becomes increasingly resistive, the sensor measurements deviate from the scaling law and tend to be directly proportional to the plasma density. The measurements and numerical sheath simulation demonstrate the scaling behavior as a function of changing sheath impedance for various plasma conditions.

A general study of performance attributes was conducted for a prototypical electrothermal vaporization (ETV) sample introduction system, in which induction heating (IH) was used to facilitate the drying, pyrolysis, and vaporization of samples from long, undercut graphite cup probes in a radio-frequency (RF) induction field. In the first part of this study, experiments were carried out to determine the heating characteristics and temperature control aspects of an IH-ETV arrangement. Using a remote-sensing infrared thermocouple, it was determined that a 3/8-inch (9.53-mm) outer diameter graphite cup sample probe could be heated to a maximum temperature of 1860°C in the induction field of the IH-ETV under full forward power (1.5 kW). The IH-ETV device was found to have a rapid heating response (1/ e time-constant of 2.0±0.2 s) that was independent of the initial/final temperatures chosen. Linear temperature control was possible by regulating either the DC voltage applied to the plate or the current flowing to the grid of the RF generator oscillator tube. The second part of this work consisted of studies to establish benchmarks, such as limits of detection (LOD) with inductively coupled plasma optical emission spectrometry (ICP-OES) and transport efficiency for analyte vaporization under several x-Ar mixed gas atmospheres [where x=15% N 2, 10% O 2, HCl (sparged), or 15% SF 6 (v/v)]. In general, reproducible transient signals with evolution times of 5-15 s were seen for the vaporization of most elements studied, with peak area intensity and reproducibility generally being the best with SF 6-Ar. A 10-fold increase in transport efficiency was seen for refractory carbide-forming analytes (Cr, V) when vaporization was conducted in a halogenous ( x=HCl, SF 6) versus non-halogenous ( x=N 2, O 2) environment, with a two-fold improvement being observed for most other non-refractory elements (Cd, Cu, Fe, Mn, Ni, Pb, Zn). The transport of arsenic proved to be a special case

Plasmas are employed as a source of unbound electrons for charge neutralizing heavy ion beams to allow them to focus to a small spot size. Calculations suggest that plasma at a density of 1-100 times the ion beam density and at a length {approx} 0.1-1 m would be suitable. To produce one-meter plasma, large-volume plasmasources based upon ferroelectric ceramics are being developed. These sources have the advantage of being able to increase the length of the plasma and operate at low neutral pressures. The source utilizes the ferroelectric ceramic BaTiO{sub 3} to form metal plasma. The drift tube inner surface of the Neutralized Drift Compression Experiment (NDCX) will be covered with ceramic, and high voltage ({approx} 1-5 kV) applied between the drift tube and the front surface of the ceramic by placing a wire grid on the front surface. A prototype ferroelectric source 20 cm long has produced plasma densities of 5 x 10{sup 11} cm{sup -3}. The source was integrated into the previous Neutralized Transport Experiment (NTX), and successfully charge neutralized the K{sup +} ion beam. Presently, the one-meter source is being fabricated. The source is being characterized and will be integrated into NDCX for charge neutralization experiments.

In this letter, we present results from multispectroscopic analysis of protein films, after exposure to a peculiar plasmasource, i.e., the capillary plasma jet. This plasmasource is able to generate very small pulsed plasma volumes, in kilohertz range, with characteristic dimensions smaller than 1 mm. This leads to specific microscale generation and transport of all plasma species. Plasma diagnosis was realized using general electrical and optical methods. Depending on power level and exposure duration, this miniature plasma jet can induce controllable modifications to soft matter targets. Detailed discussions on protein film oxidation and chemical etching are supported by results from absorption, X-ray photoelectron spectroscopy, and microscopy techniques. Further exploitation of principles presented here may consolidate research interests involving plasmas in biotechnologies and plasma medicine, especially in patterning technologies, modified biomolecule arrays, and local chemical functionalization.

Plasma ignition delays were observed in a ‘main’ inductively coupled plasma (ICP), in tandem with an ‘auxiliary’ ICP. The Faraday-shielded ICPs were separated by a grounded metal grid. Power (13.56 MHz) to the main ICP was pulsed with a frequency of 1 kHz, while the auxiliary ICP was operated in continuous wave (cw) mode. In chlorine plasmas, ignition delay was observed for duty cycles greater than 60% and, in contrast to expectation, the delay was longer with increasing duty cycle up to ~99.5%. The ignition delay could be varied by changing the auxiliary and/or main ICP power. Langmuir probe measurements provided the temporal evolution of electron temperature, and electron and positive ion densities. These measurements revealed that the plasma was ignited shortly after the decaying positive ion density (n +), in the afterglow of the main ICP, reached the density ({{n}+},\\text{aux} ) prevailing when only the auxiliary ICP was powered. At that time, production of electrons began to dominate their loss in the main ICP, due to hot electron injection from the auxiliary ICP. As a result, {{n}\\text{e}} increased from a value below {{n}\\text{e,\\text{aux}}} , improving inductive power coupling efficiency, further increasing plasma density leading to plasma ignition. Plasma ignition delay occurred when the afterglow of the pulsed plasma was not long enough for the ion density to reach {{n}+},\\text{aux} during the afterglow. Besides Cl2, plasma ignition delays were also observed in other electronegative gases (SF6, CF4/O2 and O2) but not in an electropositive gas (Ar).

Two independent ovarian cancer cell lines and fibroblast controls were treated with nonequilibrium atmospheric pressure plasma (NEAPP). Most ovarian cancer cells were detached from the culture dish by continuous plasma treatment to a single spot on the dish. Next, the plasmasource was applied over the whole dish using a robot arm. In vitro cell proliferation assays showed that plasma treatments significantly decreased proliferation rates of ovarian cancer cells compared to fibroblast cells. Flow cytometry and western blot analysis showed that plasma treatment of ovarian cancer cells induced apoptosis. NEAPP could be a promising tool for therapy for ovarian cancers.

Two independent ovarian cancer cell lines and fibroblast controls were treated with nonequilibrium atmospheric pressure plasma (NEAPP). Most ovarian cancer cells were detached from the culture dish by continuous plasma treatment to a single spot on the dish. Next, the plasmasource was applied over the whole dish using a robot arm. In vitro cell proliferation assays showed that plasma treatments significantly decreased proliferation rates of ovarian cancer cells compared to fibroblast cells. Flow cytometry and western blot analysis showed that plasma treatment of ovarian cancer cells induced apoptosis. NEAPP could be a promising tool for therapy for ovarian cancers.

Several previous human postmortem experiments have detected an increase in striatal [(3)H]WIN 35428 binding to the dopamine transporter (DAT) in chronic cocaine users. However, animal experiments have found considerable variability in DAT radioligand binding levels in brain after cocaine administration, perhaps caused by length and dose of treatment and type of radioligand used. The present experiments tested the hypothesis that [(3)H]WIN 35428 binding and [(3)H]dopamine uptake would be increased by exposure to cocaine through alterations in DAT cellular trafficking, rather than increased protein synthesis. Experiments were conducted in stably hDAT-transfected N2A cells and assessed the dose response and time course of cocaine effects on [(3)H]WIN 35428 binding to the DAT, [(3)H]dopamine uptake, measures of DAT protein and mRNA, as well as DAT subcellular location. Cocaine doses of 10(-6) M caused statistically significant increases in [(3)H]WIN 35428 binding and [(3)H]dopamine uptake after 12 and 3 h, respectively. Despite these increases in DAT function, there was no change in DAT total protein or mRNA. Immunofluorescence and biotinylation experiments indicated that cocaine treatment induced increases in plasma membrane DAT immunoreactivity and intracellular decreases. The present model system may further our understanding of regulatory alterations in DAT radioligand binding and function caused by cocaine exposure. PMID:11809869

RATIONALE The otoliths of the inner ear of fishes record the environment of their surrounding water throughout their life. For paddlefish (Polyodon spathula), otoliths have not been routinely used by scientists since their detriments were outlined in the early 1940s. We sought to determine if paddlefish otoliths were useful for resolving elemental information contained within. METHODS Adult paddlefish were collected from two wild, self-sustaining populations in Oklahoma reservoirs in the Arkansas River basin. Juveniles were obtained from a hatchery in the Red River basin of Oklahoma. Otoliths were removed and laser ablation, inductively coupled plasma mass spectrometry (ICP-MS) was used to quantify eight elements (Li, Mg, Mn, Rb, Sr, Y, Ba, and Pb) along the core and edge portions, which were analyzed for differences between otolith regions and among paddlefish sources. RESULTS Differences were found among samples for six of the eight elements examined. Otoliths from Red River basin paddlefish born in a hatchery had significantly lower amounts of Mg and Mn, but higher levels of Rb than otoliths from wild paddlefish in the Arkansas River basin. Concentrations of Y, Sr, and Ba were reduced on the edges of adult paddlefish from both reservoirs compared with the cores. CONCLUSIONS This research shows the utility of using an ICP-MS analysis of paddlefish otoliths. Future research that seeks to determine sources of paddlefish production, such as which reservoir tributaries are most important for reproduction or what proportion of the population is composed of wild versus hatchery-produced individuals, appears promising. Published in 2013. This article is a U.S. Government work and is in the public domain in the USA.

The electron densities of argon inductively coupled plasmas were measured by terahertz time-domain spectroscopy (THz-TDS). At a low pressure, the electron densities were also measured with a Langmuir-type double probe and the validity of THz-TDS electron-density measurement in a plasma has been corroborated. As the input radio-frequency (RF) power increases, the plasma density and gas temperature increase, which makes the probe measurement less reliable or even impossible, due to the large heat load to the probe surface. On the contrary, the THz-TDS measurement is unaffected by the gas temperature and becomes more reliable due to the higher electron density at higher input power for plasma generation.

The axial profiles of plasma parameters for low and moderate pressures, such as the plasma potential, electron temperature, and number density, have been evaluated in magnetized inductively coupled plasma. The experimental results revealed in both cases the existence of a genuine current-free double-layer structure, separating two plasma regions with different properties. Based on the experimental results, a physical scenario for the self-assembling of the double layer is proposed. Also, the axial profile of the electron number density downstream is analyzed, emphasizing the role of neutral metastable ionization, and a simple analytical model is developed to fit the experimental data. The model allows the estimation of neutral metastable number density downstream and the recombination rate coefficient.

A plasmasource is developed using a coaxial shunting arc plasma gun to extract a pure carbon ion beam. The pure carbon ion beam is a new type of deposition system for diamond and other carbon materials. Our plasma device generates pure carbon plasma from solid-state carbon material without using a hydrocarbon gas such as methane gas, and the plasma does not contain any hydrogen. The ion saturation current of the discharge measured by a double probe is about 0.2 mA∕mm(2) at the peak of the pulse. PMID:22380206

A plasmasource is developed using a coaxial shunting arc plasma gun to extract a pure carbon ion beam. The pure carbon ion beam is a new type of deposition system for diamond and other carbon materials. Our plasma device generates pure carbon plasma from solid-state carbon material without using a hydrocarbon gas such as methane gas, and the plasma does not contain any hydrogen. The ion saturation current of the discharge measured by a double probe is about 0.2 mA/mm2 at the peak of the pulse.

Technological advancement in the microelectronics industry requires an understanding of the physical and chemical processes occurring in plasmas of fluorocarbon gases, such as carbon tetrafluoride (CF4) which is commonly used as an etchant, and their mixtures to optimize various operating parameters. In this paper we report data on electron number density (ne), electron temperature'(Te), electron energy distribution function (EEDF), mean electron energy, ion number density (ni), and plasma potential (Vp) measured by using Langmuir probe in an inductively coupled 13.56 MHz radio frequency plasmas generated in 50%Ar:50%CF4 mixture in the GEC cell. The probe data were recorded at various radial positions providing radial profiles of these plasma parameters at 10-50 mTorr pressures and 200 W and 300 W of RF power. Present measurements indicate that the electron and ion number densities increase with increase in pressure and power. Whereas the plasma potential and electron temperature decrease with increase in pressure, and they weakly depend on RF power. The radial profiles exhibit that the electron and ion number densities and the plasma potential peak at the center of the plasma with an exponential fall away from it, while the electron temperature has a minimum at the center and it increases steadily towards the electrode edge. The EEDFs have a characteristic drop near the low energy end at all pressures and pressures and their shapes represent non-Maxwellian plasma and exhibit more like Druyvesteyn energy distribution.v

PlasmaSource Ion Implantation research at Los Alamos Laboratory includes direct investigation of the plasma and materials science involved in target surface modification, numerical simulations of the implantation process, and supporting hardware engineering. Target materials of Al, Cr, Cu-Zn, Mg, Ni, Si, Ti, W, and various Fe alloys have been processed using plasmas produced from Ar, NH{sub 3}, N{sub 2}, CH{sub 4}, and C{sub 2}H{sub 2} gases. Individual targets with surface areas as large as {approximately}4 m{sup 2}, or weighing up to 1200 kg, have been treated in the large LANL facility. In collaboration with General Motors and the University of Wisconsin, a process has been developed for application of hard, low friction, diamond-like-carbon layers on assemblies of automotive pistons. Numerical simulations have been performed using a 2{1/2}-D particle- in-cell code, which yields time-dependent implantation energy, dose, and angle of arrival for ions at the target surface for realistic geometries. Plasmasource development activities include the investigation of pulsed, inductively coupled sources capable of generating highly dissociated N{sup +} with ion densities n{sub i} {approximately} 10{sup 11}/cm{sup 3}, at {approximately}100 W average input power. Cathodic arc sources have also been used to produce filtered metallic and C plasmas for implantation and deposition either in vacuum, or in conjunction with a background gas for production of highly adherent ceramic coatings.

We describe an induction-linac based free-electron laser amplifier that is presently under construction at the Lawrence Livermore National Laboratory. It is designed to produce up to 2 MW of average power at a frequency of 250 GHz for plasma heating experiments in the Microwave Tokamak Experiment. In addition, we shall describe a FEL amplifier design for plasma heating of advanced tokamak fusion devices. This system is designed to produce average power levels of about 10 MW at frequencies ranging form 280 to 560 GHz. 7 refs., 1 tab.

A model for pulsed inductiveplasma acceleration is presented that consists of a set of circuit equations coupled to both a one-dimensional equation of motion and an equation governing the partitioning of energy. The latter two equations are obtained for the plasma current sheet by treating it as a single element of finite volume and integrating the governing equations over that volume. The integrated terms are replaced where necessary by physically-equivalent quantities that are calculated through the solution of other parts of the governing equation set. The model improves upon previous one-dimensional performance models by permitting the time-evolution of the energy and state properties of the plasma, the latter allowing for the tailoring of the model to different gases that may be chosen as propellants. The time evolution of the various energy modes in the system and the associated plasma properties, calculated for argon propellant, are presented to demonstrate the efficacy of the model. The model produces a result where efficiency is maximized at a given value of the electrodynamic scaling term known as the dynamic impedance parameter. Qualitatively and quantitatively, the model compares favorably with performance measured for two separate inductive pulsed plasma thrusters, with disagreements attributable to simplifying assumptions employed in the generation of the model solution.

The attenuation of electromagnetic (EM) waves in unmagnetized plasma generated by an inductively coupled plasma (ICP) actuator has been investigated both theoretically and experimentally. A numerical study is conducted to investigate the propagation of EM waves in multilayer plasma structures which cover a square flat plate. Experimentally, an ICP actuator with dimensions of 20 cm×20 cm×4 cm is designed to produce a steady plasma slab. The attenuation of EM waves in the plasma generated by the ICP actuator is measured by a reflectivity arch test method at incident waves of 2.3 GHz and 10.1 GHz, respectively. A contrastive analysis of calculated and measured results of these incident wave frequencies is presented, which suggests that the experiment accords well with our theory. As expected, the plasma slab generated by the ICP actuator can effectively attenuate the EM waves, which may have great potential application prospects in aircraft stealth. supported by National Natural Science Foundation of China (Nos. 51276197, 11472306 and 11402301)

Atmospheric-pressure plasmas (APPs) have attracted great interest and have been widely applied in biomedical applications, as due to their non-thermal and reactive properties, they interact with living tissues, cells and bacteria. Various types of plasmasources generated at atmospheric pressure have been developed to achieve better performance in specific applications. This article presents an overview of the general characteristics of APPs and a brief summary of their biomedical applications, and reviews a wide range of these sources developed for biomedical applications. The plasmasources are classified according to their power sources and cover a wide frequency spectrum from dc to microwaves. The configurations and characteristics of plasmasources are outlined and their biomedical applications are presented.

An apparatus and method for controlling an array of constricted glow discharge chambers are disclosed. More particularly a linear array of constricted glow plasmasources whose polarity and geometry are set so that the contamination and energy of the ions discharged from the sources are minimized. The several sources can be mounted in parallel and in series to provide a sustained ultra low source of ions in a plasma with contamination below practical detection limits. The quality of film along deposition "tracks" opposite the plasmasources can be measured and compared to desired absolute or relative values by optical and/or electrical sensors. Plasma quality can then be adjusted by adjusting the power current values, gas feed pressure/flow, gas mixtures or a combination of some or all of these to improve the match between the measured values and the desired values.

A plasma focus system composed of a pair of counter-facing coaxial guns was proposed as a long-pulse and/or repetitive high energy density plasmasource. We applied Li as the source of plasma for improvement of the conversion efficiency, the spectral purity, and the repetition capability. For operation of the system with ideal counter-facing plasma focus mode, we changed the system from simple coaxial geometry to a multi-channel configuration. We applied a laser trigger to make synchronous multi-channel discharges with low jitter. The results indicated that the configuration is promising to make a high energy density plasma with high spectral efficiency.

Low-energy ions of gallium (Ga) and argon (Ar) were extracted from a plasma sputter-type ion source system that utilized a tungsten (W) wire extractor geometry. The 90% transparent W wire extractor configuration had shown that the system was capable of producing an ion beam with the energy as low as 10 eV in a dc filament discharge and 50 eV in a radio frequency (rf) excited system. In the present investigation, Ar plasma was sustained in an ion source chamber through an inductively coupled 13.56 MHz rf power source. Negatively biased liquid Ga target suspended on a W reservoir was sputtered and postionized prior to extraction. Mass spectral analyses revealed a strong dependence of the Ga{sup +} current on the induced target bias.

The two-dimensional (R - Z) electromagnetic code FMRZ has been written to model inductivesources self-consistently in time. The code models an argon plasma with momentum-transfer, excitation and ionization as electron-neutral reactions and scattering and charge-exchange for the ion-neutral reactions. The electrons and ions are treated as Maxwellian fluid species and a reduced set of Maxwell`s equations is used to advance the electromagnetic fields. The set of equations used in FMRZ is not subject to typical numerical constraints present in many time dynamic codes allowing one to choose appropriate the and space scales to resolve only the frequencies and scale lengths of interest. The model retains nonlinear driving terms which give rise to a pondermotive force that distorts the density profile. Density and power profiles will be used to illustrate the physical effects of various terms in the equations. Trends in average density and temperature compare well with an analytic model.

Atmospheric pressure ionization (API) sources using direct-current (DC) and radio-frequency (RF) plasma have been developed in this thesis work. These ion sources can provide stable discharge currents of ~ 1 mA, 2-3 orders of magnitude larger than that of the corona discharge, a widely used API source. The plasmas can be generated and maintained in 1 atm of various buffer gases by applying -500 to -1000 V (DC plasma) or 1-15 W with a frequency of 165 kHz (RF plasma) on the needle electrode. These ion sources have been used with liquid injection to detect various organic compounds of pharmaceutical, biotechnological and environmental interest. Key features of these ion sources include soft ionization with the protonated molecule as the largest peak, and superb sensitivity with detection limits in the low picogram or femtomole range and a linear dynamic range over ~4 orders of magnitude. The RF plasma has advantages over the DC plasma in its ability to operate in various buffer gases and to produce a more stable plasma. Factors influencing the performance of the ion sources have been studied, including RF power level, liquid flow rate, chamber temperature, solvent composition, and voltage affecting the collision induced dissociation (CID). Ionization of hydrocarbons by the RF plasma API source was also studied. Soft ionization is generally produced. To obtain high sensitivity, the ion source must be very dry and the needle-to-orifice distance must be small. Nitric oxide was used to enhance the sensitivity. The RF plasmasource was then used for the analysis of hydrocarbons in auto emissions. Comparisons between the corona discharge and the RF plasma have been made in terms of discharge current, ion residence time, and the ion source model. The RF plasmasource provides larger linear dynamic range and higher sensitivity than the corona discharge, due to its much larger discharge current. The RF plasma was also observed to provide longer ion residence times and was not

The sample is treated with 5N H2SO4 followed by concentrated HNO3 and the diluted mixture is filtered. Soluble B is determined in the filtrate by Inductively-Coupled Plasma (ICP) spectrometry after addition HCl and extraction of Fe with ethyl-ether. The residue is fused with Na2CO3 and, after treatment with HCl, the insoluble B is determined by ICP spectrometry as before. The method permits determination of ppm amounts of B in steel.

The importance of Fe biogeochemistry has stimulated interest in Fe isotope fractionation. Recent studies using thermal ionization mass spectrometry (TIMS) and a "double spike" demonstrate the existence of biogenic Fe isotope effects. Here, we assess the utility of multiple-collector inductively-coupled plasma mass spectrometry(MC-ICP-MS) with a desolvating sample introduction system for Fe isotope studies, and present data on Fe biominerals produced by a thermophilic bacterium. Additional information is contained in the original extended abstract.

A method and apparatus are disclosed for in situ addition calibration of an inductively coupled plasma atomic emission spectrometer or mass spectrometer using a precision gas metering valve to introduce a volatile calibration gas of an element of interest directly into an aerosol particle stream. The present in situ calibration technique is suitable for various remote, on-site sampling systems such as laser ablation or nebulization. 5 figs.

A circuit model for an inductive pulsed plasma thruster was developed in order to investigate the performance of thrusters with conical coils; the model can accommodate cone-angles from 0° (a straight theta-pinch coil) to 90° (a planar coil). The plasma is treated as a deformable slug that moves both radially and axially in response to the force applied by the coil. The radial equation of motion includes a restoring force due to the plasma pressure, which is derived under the assumption that the electron population is isothermal, while the ions are isothermal, adiabatic, or shock-heated depending on the magnitude and sign of the radial velocity. The inductance of the coil and the plasma slug, and their mutual inductance, was determined using QuickField. A local maximum in efficiency and specific impulse was found for angles less than 90° however the absolute maximum for both these quantities occurs at 90°. High pulse-rate operation was found to yield dynamic efficiencies (excluding ionization cost) as high as 60-70% for I SP in the range of 3000-5000 s, even for a device with modest jet-power (5 kW). This mode of operation also permits elimination of the pulsed gas valve, which would be a significant system-level simplification. An alternate mode of inductive recapture, in which the current is interrupted at the second zero-crossing, was found to result in a sacrifice of only 1-2% in efficiency, while offering other significant system-level benefits for this kind of thruster.

A model of the maximum achievable exhaust velocity of a conical theta pinch pulsed inductive thruster is presented. A semi-empirical formula relating coil inductance to both axial and radial current sheet location is developed and incorporated into a circuit model coupled to a momentum equation to evaluate the effect of coil geometry on the axial directed kinetic energy of the exhaust. Inductance measurements as a function of the axial and radial displacement of simulated current sheets from four coils of different geometries are t to a two-dimensional expression to allow the calculation of the Lorentz force at any relevant averaged current sheet location. This relation for two-dimensional inductance, along with an estimate of the maximum possible change in gas-dynamic pressure as the current sheet accelerates into downstream propellant, enables the expansion of a one-dimensional circuit model to two dimensions. The results of this two-dimensional model indicate that radial current sheet motion acts to rapidly decouple the current sheet from the driving coil, leading to losses in axial kinetic energy 10-50 times larger than estimations of the maximum available energy in the compressed propellant. The decreased available energy in the compressed propellant as compared to that of other inductiveplasma propulsion concepts suggests that a recovery in the directed axial kinetic energy of the exhaust is unlikely, and that radial compression of the current sheet leads to a loss in exhaust velocity for the operating conditions considered here.

Compared to conventional particle accelerators, plasmas can sustain accelerating fields that are thousands of times higher. To exploit this ability, massively parallel SciDAC particle simulations provide physical insight into the development of next-generation accelerators that use laser-driven plasma waves. These plasma-based accelerators offer a path to more compact, ultra-fast particle and radiation sources for probing the subatomic world, for studying new materials and new technologies, and for medical applications.

The Spallation Neutron Source (SNS) at Oak Ridge National Laboratory is a world-class facility for materials research based on neutron scattering. It consists of a negative hydrogen (H-) ion source, linear accelerator, proton accumulator ring, and liquid Hg target. A power upgrade is planned for the device, which will require significant improvements in the negative ion source, including the production of H-beam currents of 70-95 mA ({approx}2xthe present SNS source value), with a pulse length of 1 ms and duty factor of {approx}7%. No H-sources currently in existence meet these combined requirements. A proof-of-principle experiment is being constructed in which the rf inductiveplasma generator in the present source is replaced by a helicon plasma generator. This is expected to produce a factor of three or better increase in the maximum sourceplasma density at a reduced rf power level, resulting in significantly increased negative ion current with reduced heat removal requirements.

The Spallation Neutron Source (SNS) at Oak Ridge National Labo ratory is a world-class facility for materials research based on neutron scattering. It consists of a negative hydrogen (H-) ion source, linear accelerator, proton accumulator ring, and liquid Hg target. A power up grade is planned for the device, which will require significant improvements in the negative ion source, including the production of H- beam currents of 70-95 mA (~2 the present SNS source value), with a pulse length of 1 ms and duty factor of ~ 7%. No H- sources currently in existence meet these combined requirements. A proof-of-principle experiment is being constructed in which the rf inductiveplasma generator in the present source is replaced by a helicon plasma generator. This is expected to produce a factor of three or better in crease in the maximum sourceplasma density at a reduced rf power level, resulting in significantly increased negative ion current with reduced heat removal requirements.

An inductively heated hot cavity catcher has been constructed for the production of low-energy ion beams of exotic, neutron-deficient Ag isotopes. A proof-of-principle experiment has been realized by implanting primary (107)Ag(21+) ions from a heavy-ion cyclotron into a graphite catcher. A variable-thickness nickel foil was used to degrade the energy of the primary beam in order to mimic the implantation depth expected from the heavy-ion fusion-evaporation recoils of N = Z (94)Ag. Following implantation, the silver atoms diffused out of the graphite and effused into the catcher cavity and transfer tube, where they were resonantly laser ionized using a three-step excitation and ionization scheme. Following mass separation, the ions were identified by scanning the frequency of the first resonant excitation step while recording the ion count rate. Ion release time profiles were measured for different implantation depths and cavity temperatures with the mean delay time varying from 10 to 600 ms. In addition, the diffusion coefficients for silver in graphite were measured for temperatures of 1470 K, 1630 K, and 1720 K, from which an activation energy of 3.2 ± 0.3 eV could be determined. PMID:26724021

An inductively heated hot cavity catcher has been constructed for the production of low-energy ion beams of exotic, neutron-deficient Ag isotopes. A proof-of-principle experiment has been realized by implanting primary {sup 107}Ag{sup 21+} ions from a heavy-ion cyclotron into a graphite catcher. A variable-thickness nickel foil was used to degrade the energy of the primary beam in order to mimic the implantation depth expected from the heavy-ion fusion-evaporation recoils of N = Z {sup 94}Ag. Following implantation, the silver atoms diffused out of the graphite and effused into the catcher cavity and transfer tube, where they were resonantly laser ionized using a three-step excitation and ionization scheme. Following mass separation, the ions were identified by scanning the frequency of the first resonant excitation step while recording the ion count rate. Ion release time profiles were measured for different implantation depths and cavity temperatures with the mean delay time varying from 10 to 600 ms. In addition, the diffusion coefficients for silver in graphite were measured for temperatures of 1470 K, 1630 K, and 1720 K, from which an activation energy of 3.2 ± 0.3 eV could be determined.

An inductively heated hot cavity catcher has been constructed for the production of low-energy ion beams of exotic, neutron-deficient Ag isotopes. A proof-of-principle experiment has been realized by implanting primary 107Ag21+ ions from a heavy-ion cyclotron into a graphite catcher. A variable-thickness nickel foil was used to degrade the energy of the primary beam in order to mimic the implantation depth expected from the heavy-ion fusion-evaporation recoils of N = Z 94Ag. Following implantation, the silver atoms diffused out of the graphite and effused into the catcher cavity and transfer tube, where they were resonantly laser ionized using a three-step excitation and ionization scheme. Following mass separation, the ions were identified by scanning the frequency of the first resonant excitation step while recording the ion count rate. Ion release time profiles were measured for different implantation depths and cavity temperatures with the mean delay time varying from 10 to 600 ms. In addition, the diffusion coefficients for silver in graphite were measured for temperatures of 1470 K, 1630 K, and 1720 K, from which an activation energy of 3.2 ± 0.3 eV could be determined.

This dissertation focuses on the development of methods for stable isotope metabolic tracer studies in living systems using inductively coupled plasma single and dual quadrupole mass spectrometers. Sub-nanogram per gram levels of molybdenum (Mo) from human blood plasma are isolated by the use of anion exchange alumina microcolumns. Million-fold more concentrated spectral and matrix interferences such as sodium, chloride, sulfate, phosphate, etc. in the blood constituents are removed from the analyte. The recovery of Mo from the alumina column is 82 {+-} 5% (n = 5). Isotope dilution inductively coupled plasma mass spectrometry (ID-ICP-MS) is utilized for the quantitative ultra-trace concentration determination of Mo in bovine and human blood samples. The average Mo concentration in reference bovine serum determined by this method is 10.2 {+-} 0.4 ng/g, while the certified value is 11.5 {+-} 1.1 ng/g (95% confidence interval). The Mo concentration of one pool of human blood plasma from two healthy male donors is 0.5 {+-} 0.1 ng/g. The inductively coupled plasma twin quadrupole mass spectrometer (ICP-TQMS) is used to measure the carbon isotope ratio from non-volatile organic compounds and bio-organic molecules to assess the ability as an alternative analytical method to gas chromatography combustion isotope ratio mass spectrometry (GC-combustion-IRMS). Trytophan, myoglobin, and {beta}-cyclodextrin are chosen for the study, initial observation of spectral interference of {sup 13}C{sup +} with {sup 12}C{sup 1}H{sup +} comes from the incomplete dissociation of myoglobin and/or {beta}-cyclodextrin.

We have developed a new method, based on the ballistic transfer of preaccumulated plasmas, to obtain large and dense positron plasmas in a cryogenic environment. The method involves transferring plasmas emanating from a region with a low magnetic field (0.14 T) and relatively high pressure (10(-9) mbar) into a 15 K Penning-Malmberg trap immersed in a 3 T magnetic field with a base pressure better than 10(-13) mbar. The achieved positron accumulation rate in the high field cryogenic trap is more than one and a half orders of magnitude higher than the previous most efficient UHV compatible scheme. Subsequent stacking resulted in a plasma containing more than 1.2 x 10(9) positrons, which is a factor 4 higher than previously reported. Using a rotating wall electric field, plasmas containing about 20 x 10(6) positrons were compressed to a density of 2.6 x 10(10) cm(-3). This is a factor of 6 improvement over earlier measurements. PMID:16090691

In a study of an inductively coupled plasma optical emission spectrometer, data from an early commercially available instrument are compared with data from the same instrument after modifications to correct observed inadequacies were made. Results show negligible changes in power...

ABSTRACT Junctions between cortical endoplasmic reticulum (cER) and the plasma membrane are a subtle but ubiquitous feature in mammalian cells; however, very little is known about the functions and molecular interactions that are associated with neuronal ER–plasma-membrane junctions. Here, we report that Kv2.1 (also known as KCNB1), the primary delayed-rectifier K+ channel in the mammalian brain, induces the formation of ER–plasma-membrane junctions. Kv2.1 localizes to dense, cell-surface clusters that contain non-conducting channels, indicating that they have a function that is unrelated to membrane-potential regulation. Accordingly, Kv2.1 clusters function as membrane-trafficking hubs, providing platforms for delivery and retrieval of multiple membrane proteins. Using both total internal reflection fluorescence and electron microscopy we demonstrate that the clustered Kv2.1 plays a direct structural role in the induction of stable ER–plasma-membrane junctions in both transfected HEK 293 cells and cultured hippocampal neurons. Glutamate exposure results in a loss of Kv2.1 clusters in neurons and subsequent retraction of the cER from the plasma membrane. We propose Kv2.1-induced ER–plasma-membrane junctions represent a new macromolecular plasma-membrane complex that is sensitive to excitotoxic insult and functions as a scaffolding site for both membrane trafficking and Ca2+ signaling. PMID:25908859

Junctions between cortical endoplasmic reticulum (cER) and the plasma membrane are a subtle but ubiquitous feature in mammalian cells; however, very little is known about the functions and molecular interactions that are associated with neuronal ER-plasma-membrane junctions. Here, we report that Kv2.1 (also known as KCNB1), the primary delayed-rectifier K(+) channel in the mammalian brain, induces the formation of ER-plasma-membrane junctions. Kv2.1 localizes to dense, cell-surface clusters that contain non-conducting channels, indicating that they have a function that is unrelated to membrane-potential regulation. Accordingly, Kv2.1 clusters function as membrane-trafficking hubs, providing platforms for delivery and retrieval of multiple membrane proteins. Using both total internal reflection fluorescence and electron microscopy we demonstrate that the clustered Kv2.1 plays a direct structural role in the induction of stable ER-plasma-membrane junctions in both transfected HEK 293 cells and cultured hippocampal neurons. Glutamate exposure results in a loss of Kv2.1 clusters in neurons and subsequent retraction of the cER from the plasma membrane. We propose Kv2.1-induced ER-plasma-membrane junctions represent a new macromolecular plasma-membrane complex that is sensitive to excitotoxic insult and functions as a scaffolding site for both membrane trafficking and Ca(2+) signaling. PMID:25908859

Parameters of the hybrid hollow electrode activated discharge (H-HEAD) source for cold atmospheric plasma applications are described. The source with a simple cylindrical electrode terminated by a gas nozzle combines the microwave antenna plasma with the hollow cathode plasma generated inside the nozzle by a pulsed dc power. The source can produce over 15 cm long plasma plumes at less than 200 sccm of argon and 100 sccm of neon flowing in open air at the microwave power of 400 W (2.4 GHz). Parameters of the hybrid plasma are controlled by both the microwave power and the power delivered to the hollow cathode. An anomalous effect of a sharp increase in the length of the plasma plume at low gas flows is discussed. Results of the optical emission spectroscopy in argon and neon are presented. Optical spectra confirmed the presence of Ti and Fe from the hollow cathode in the plasma. The production of metal increases with the power applied to the hollow cathode. Traces of Ti from the hollow cathode have been found at substrates positioned as far as 2 cm from the cathode. This finding confirms the possibility to use the H-HEAD source for atmospheric physical vapor deposition (PVD) and hybrid PVD and plasma-enhanced chemical-vapor deposition of composite films.

Mass spectrometry is a useful diagnostic technique for monitoring plasma species and plasma-surface interactions. In order to maximize the sensitivity of measurements of hydrogen-fueled fusion plasmas or hydrogen-based discharge cleaning and etching plasmas, the ion sources of mass spectrometers are operated at or near the high pressure limit of 10/sup -4/ Torr (10/sup -2/ Pa). Such high ambient pressures of hydrogen give rise to high background levels of residual gases such as H/sub 2/O, CO, and CH/sub 4/, due to surface reactions on the ion source electrodes. For a commonly used ion source configuration, the residual gas production is a linear function of the ambient H/sub 2/ pressure. Hydrogen conditioning can reduce the absolute residual gas levels. Steady-state residual gas production is observed in a conditioned ion source, which is related to a balance of diffusion and sorption on the electrode surfaces.

A compact matching network couples an RF power supply to an RF antenna in a plasma generator. The simple and compact impedance matching network matches the plasma load to the impedance of a coaxial transmission line and the output impedance of an RF amplifier at radio frequencies. The matching network is formed of a resonantly tuned circuit formed of a variable capacitor and an inductor in a series resonance configuration, and a ferrite core transformer coupled to the resonantly tuned circuit. This matching network is compact enough to fit in existing compact focused ion beam systems.

The Thermal Ion Dynamics Experiment (TIDE) and the PlasmaSource Instrument (PSI) have been developed in response to the requirements of the ISTP Program for three-dimensional (3D) plasma composition measurements capable of tracking the circulation of low-energy (0-500 eV) plasma through the polar magnetosphere. This plasma is composed of penetrating magnetosheath and escaping ionospheric components. It is in part lost to the downstream solar wind and in part recirculated within the magnetosphere, participating in the formation of the diamagnetic hot plasma sheet and ring current plasma populations. Significant obstacles which have previously made this task impossible include the low density and energy of the outflowing ionospheric plasma plume and the positive spacecraft floating potentials which exclude the lowest-energy plasma from detection on ordinary spacecraft. Based on a unique combination of focusing electrostatic ion optics and time of flight detection and mass analysis, TIDE provides the sensitivity (seven apertures of about 1 cm squared effective area each) and angular resolution (6 x 18 degrees) required for this purpose. PSI produces a low energy plasma locally at the POLAR spacecraft that provides the ion current required to balance the photoelectron current, along with a low temperature electron population, regulating the spacecraft potential slightly positive relative to the space plasma. TIDE/PSI will: (a) measure the density and flow fields of the solar and terrestrial plasmas within the high polar cap and magnetospheric lobes; (b) quantify the extent to which ionospheric and solar ions are recirculated within the distant magnetotail neutral sheet or lost to the distant tail and solar wind; (c) investigate the mass-dependent degree energization of these plasmas by measuring their thermodynamic properties; (d) investigate the relative roles of ionosphere and solar wind as sources of plasma to the plasma sheet and ring current.

An inductively coupled plasma (ICP) based negative hydrogen ion source is chosen for ITER neutral beam (NB) systems. To avoid regular maintenance in a radioactive environment with high flux of 14 MeV neutrons and gamma rays, invasive plasma diagnostics like probes are not included in the ITER NB source design. While, optical or microwave based diagnostics which are normally used in other plasmasources, are to be avoided in the case of ITER sources due to the overall system design and interface issues. In such situation, alternative forms of assessment to characterize ion sourceplasma become a necessity. In the present situation, the beam current through the extraction system in the ion source is the only measurement which indicates plasma condition inside the ion source. However, beam current not only depends on the plasma condition near the extraction region but also on the perveance condition and negative ion stripping. Apart from that, the ICP production region radio frequency (RF) driver region) is placed far (∼30 cm) from the extraction region. Therefore, there are uncertainties involved in linking the beam current with plasma properties inside the RF driver. To maintain the optimum condition for source operation it is necessary to maintain the optimum conditions in the driver. A method of characterization of the plasma density in the driver without using any invasive or non-invasive probes could be a useful tool to achieve that objective. Such a method, which is exclusively for ICP based ion sources, is presented in this paper. In this technique, plasma density inside the RF driver is estimated through the measurements of the electrical parameters in the RF power supply circuit path. Monitoring RF driver plasma through the described route will be useful during the source commissioning phase and also in the beam operation phase.

A new type of plasmasource is presented: A collisionless plasma is formed by producing ions on one end and electrons on the other of a cylindrical vacuum chamber in a solenoidal magnetic field. The ions are produced by contact ionization of potassium on tungsten. The source of electrons is a LaB6 plate. In the usual single-ended Q machine the elements rhenium, iridium, and platinum are tested as ionizing metals for potassium and barium.

The restoration of plasma acetylcholinesterase activity in mice following inhibition by organophosphorus pesticides and nerve agents has been attributed to synthesis of new enzyme. It is generally assumed that activity levels return to normal, are stable and do not exceed the normal level. We have observed over the past 10 years that recovery of acetylcholinesterase activity levels in mice treated with organophosphorus agents (OP) exceeds pretreatment levels and remains elevated for up to 2 months. The most dramatic case was in mice treated with tri-cresyl phosphate and tri-ortho-cresyl phosphate, where plasma acetylcholinesterase activity rebounded to a level 250% higher than the pretreatment activity. The present report summarizes our observations on plasma acetylcholinesterase activity in mice treated with chlorpyrifos, chlorpyrifos oxon, diazinon, tri-ortho-cresyl phosphate, tri-cresyl phosphate, tabun thiocholine, parathion, dichlorvos, and diisopropylfluorophosphate. We have developed a hypothesis to explain the excess acetylcholinesterase activity, based on published observations. We hypothesize that acetylcholinesterase activity is induced when cells undergo apoptosis and that consequently there is a rise in the level of plasma acetylcholinesterase. - Highlights: > Acetylcholinesterase activity is induced by organophosphorus agents. > AChE induction is related to apoptosis. > Induction of AChE activity by OP is independent of BChE.

Sterilization of bio-medical materials using radio frequency (RF) excited inductively coupled plasmas (ICPs) has been investigated. A double ICP has been developed and studied for homogenous treatment of three-dimensional objects. Sterilization is achieved through a combination of ultraviolet light, ion bombardment and radical treatment. For temperature sensitive materials, the process temperature is a crucial parameter. Pulsing of the plasma reduces the time average heat strain and also provides additional control of the various sterilization mechanisms. Certain aspects of pulsed plasmas are, however, not yet fully understood. Phase resolved optical emission spectroscopy and time resolved ion energy analysis illustrate that a pulsed ICP ignites capacitively before reaching a stable inductive mode. Time resolved investigations of the post-discharge, after switching off the RF power, show that the plasma boundary sheath in front of a substrate does not fully collapse for the case of hydrogen discharges. This is explained by electron heating through super-elastic collisions with vibrationally excited hydrogen molecules.

Plasmas are a source of unbound electrons for charge neutralizing intense heavy ion beams to focus them to a small spot size and compress their axial length. The plasmasource should operate at low neutral pressures and without strong externally-applied fields. To produce long plasma columns, sources based upon ferroelectric ceramics with large dielectric coefficients have been developed. The source utilizes the ferroelectric ceramic BaTiO{sub 3} to form metal plasma. The drift tube inner surface of the Neutralized Drift Compression Experiment (NDCX) is covered with ceramic material. High voltage ({approx} 8 kV) is applied between the drift tube and the front surface of the ceramics. A BaTiO{sub 3} source comprised of five 20-cm-long sources has been tested and characterized, producing relatively uniform plasma in the 5 x 10{sup 10} cm{sup -3} density range. The source was integrated into the NDCX device for charge neutralization and beam compression experiments, and yielded current compression ratios {approx} 120. Present research is developing multi-meter-long and higher density sources to support beam compression experiments for high energy density physics applications.

Initial results have been obtained from operation of a helicon plasmasource built to conduct optimization studies for space propulsion applications. The source features an easily reconfigurable antenna to test different geometries. Operating with He as the source gas, peak densities >= 1.6X10{sup 19} m{sup -3} have been achieved. Radial and axial plasma profiles have been obtained using a microwave interferometer that can be scanned axially and a Langmuir probe. The source will be used to investigate operation at high magnetic field, frequency, and input power.

Spatially resolved measurements of electron energy distribution functions (EEDFs) are investigated in inductively coupled plasmas with two planar antenna coils. When the plasma is sustained by the antenna with a diameter of 18 cm, the nonlocal kinetics is preserved in the argon gas pressure range from 2 mTorr to 20 mTorr. However, electron kinetics transit from nonlocal kinetics to local kinetics in discharge sustained by the antenna coil with diameter 34 cm. The results suggest that antenna size as well as chamber length are important parameters for the transition of the electron kinetics. Spatial variations of plasma potential, effective electron temperature, and EEDF in terms of total electron energy scale are also presented.

By using a hybrid plasma solver (ions as particles and electrons as a fluid), we have modeled the interaction between Callisto and Jupiter's magnetosphere for variable ambient plasma parameters. We compared the results with the magnetometer data from flybys (C3, C9, and C10) by the Galileo spacecraft. Modeling the interaction between Callisto and Jupiter's magnetosphere is important to establish the origin of the magnetic field perturbations observed by Galileo and thought to be related to a subsurface ocean. Using typical upstream magnetospheric plasma parameters and a magnetic dipole corresponding to the inductive response inside the moon, we show that the model results agree well with observations for the C3 and C9 flybys, but agrees poorly with the C10 flyby close to Callisto. The study does support the existence of a subsurface ocean at Callisto.

The recently developed code SEMS (semiconductor equipment modeling software)is applied to the simulation of CF4 and CF4/Ar inductively coupled plasmas (ICP). This work builds upon the earlier nitrogen, transformer coupled plasma (TCP) SEMS research by demonstrating its accuracy for more complex reactive mixtures, moving closer to the realization of a virtual plasma reactor. Attention is given to the etching of and/or formation of carbonaceous films on the quartz dielectric window and diagnostic aperatures. The simulations are validated through comparisons with experimental measurements using FTIR (Fourier Transform Infrared) and UV absorption spectroscopy for CFx and SiFx neutral radicals, QMS (quadrupole mass spectrometry) for the ions, and Langmuir probe measurements of electron number density and temperature in an ICP GEC reference cell.

Measuring the temperature of neutrals in inductively coupled plasmas (ICP) is important as heating of neutral particles will influence plasma characteristics such as the spatial distributions of plasma density and electron temperature. Neutral gas temperatures were deduced using a non-invasive technique that combines gas actinometry, optical emission spectroscopy and simulation which is described here. Argon gas temperature in a 13.56 MHz ICP were found to fall within the range of 500 − 800 K for input power of 140 − 200 W and pressure of 0.05 − 0.2 mbar. Comparing spectrometers with 0.2 nm and 0.5 nm resolution, improved fitting sensitivity was observed for the 0.2 nm resolution.

The technical feasibility of using an induction-coupled plasma (ICP) torch to synthesize ozone at atmospheric pressure is explored. Ozone concentrations up to ~250 ppm were produced using a thermal plasma reactor system based on an ICP torch operating at 2.5 MHz and ~11 kVA with an argon/oxygen mixture as the plasma-forming gas. A gaseous oxygen quench formed ozone by rapid mixing of molecular oxygen with atomic oxygen produced by the torch. The ozone concentration in the reaction chamber was measured by Fourier Transform infrared (FTIR) spectroscopy over a wide range of experimental configurations. The geometry of the quench gas flow, the quench flow velocity, and the quench flow rate played important roles in determining the ozone concentration. The ozone concentration was sensitive to the torch RF power, but was insensitive to the torch gas flow rates. These observations are interpreted within the framework of a simple model of ozone synthesis.

A global model for inductively coupled HBr/Ar plasma was developed. The model was based on a self-consistent global model had been developed by Kwon et al., and a set of chemical reactions in the HBr/Ar plasma was compiled by surveying theoretical, experimental and evaluative researches. In this model vibrational excitations of bi-atomic molecules and electronic excitations of hydrogen atom were taken into account. Neutralizations by collisions between positive and negative ions were considered with Hakman's approximate formula achieved by fitting of theoretical result. For some reactions that were not supplied from literatures the reaction parameters of Cl2 and HCl were adopted as them Br2 and HBr, respectively. For validation calculation results using this model were compared with experimental results from literatures for various plasma discharge parameters and it showed overall good agreement.

The effect of the transition from capacitive (E) to inductive (H) mode on propanethiol plasma polymer films properties was investigated by optical emission as well as by x-ray photoelectron spectroscopy. The E mode is characterized by low deposition rate and by high sulfur content in the films ({approx}40% vs {approx}20% in H mode). After aging, a strong decrease of sulfur to carbon content (from {approx}0.75 to 0.13), attributed to desorption of unbounded sulfur-based molecules (e.g., H{sub 2}S), is detected at low power in E mode. The importance of the E-H transition for altering the film properties is highlighted.

The effect of the transition from capacitive (E) to inductive (H) mode on propanethiol plasma polymer films properties was investigated by optical emission as well as by x-ray photoelectron spectroscopy. The E mode is characterized by low deposition rate and by high sulfur content in the films (˜40% vs ˜20% in H mode). After aging, a strong decrease of sulfur to carbon content (from ˜0.75 to 0.13), attributed to desorption of unbounded sulfur-based molecules (e.g., H2S), is detected at low power in E mode. The importance of the E-H transition for altering the film properties is highlighted.

A gas nozzle having an increased resistance to erosion from energetic plasma particles generated by laser plasmasources. By reducing the area of the plasma-facing portion of the nozzle below a critical dimension and fabricating the nozzle from a material that has a high EUV transmission as well as a low sputtering coefficient such as Be, C, or Si, it has been shown that a significant reduction in reflectance loss of nearby optical components can be achieved even after exposing the nozzle to at least 10.sup.7 Xe plasma pulses.

Io, the innermost Galilean satellite of Jupiter, supplies the primary source of heavy ion plasma for the planetary magnetosphere. Understanding the temporal and three-dimensional nature of the Iogenic plasmasource (the pickup ions created by ionization and charge exchange of neutrals in Io's local and extended atmosphere) is highly relevant to a large number of studies for the Io-Jupiter system. These studies include the structure and outward transport of the plasma torus, the densest portion of the planetary magnetosphere located about Io's orbit, and a significant number of coupled electrodynamic interactions that have been observed by ground-based, earth-orbiting, and interplanetary spacecraft instruments to occur between the plasma torus, Io, and Jupiter. To explore the nature of the Iogenic plasmasource, we have undertaken neutral cloud model calculations for atmospheric gases located above Io's exobase (in the corona and extended clouds) and have calculated in three dimensions their instantaneous electron impact ionization and charge exchange production rates in the plasma torus. Calculations for O and S presented at an earlier meeting (Marconi and Smyth, BAAS 28, 1154-1155, 1996) examined the spatial nature of these Iogenic plasmasources on a large circumplanetary spatial scale and showed that they were highly peaked at Io's instantaneous position on its orbit about Jupiter. Calculations presented here for O and S will focus on the three-dimensional spatial structure of the peak in the Iogenic plasmasource at Io. This finer spatial scale description of the Iogenic plasmasource near Io is particularly relevant for the December 5, 1995 Galileo spacecraft encounter with Io to investigate the Galileo Plasma Analyzer (PLS) downstream spatial and velocity distributions of the ions (Frank et al. Science 274 394-395, 1996) and the Galileo Magnetometer (MAG) magnetic field reduction near Io (Kivelson et al., Science 274, 396-398, 1996). Recent estimates of the

In experiments with RF saddle antenna surface plasmasources (SPS), the efficiency of H- ion generation was increased by up to a factor of 5 by long time plasma electrode activation, without adding Cs from Cs supply, by heating the collar to high temperature using hot air flow and plasma discharge. Without cracking or heating the cesium ampoule, but likely with Cs recovery from impurities, the achieved energy efficiency was comparable to that of conventionally cesiated SNS RF sources with an external or internal Cs supply. In the experiments, perfect cesiation was produced (without additional Cs supply) by the collection and trapping of traces of remnant cesium compounds from SPS surfaces.

The aim of this work is to identify the main process responsible for sterilization of Geobacillus Stearothermophilus spores in O{2}:N{2} RF inductively coupled plasma. In order to meet this objective the sterilization efficiencies of discharges in mixtures differing in the initial O{2}/N{2} ratios are compared with plasma properties and with scanning electron microscopy images of treated spores. According to the obtained results it can be concluded that under our experimental conditions the time needed to reach complete sterilization is more related to O atom density than UV radiation intensity, i.e. complete sterilization is not related only to DNA damage as in UV sterilization but more likely to the etching of the spore.

Fluorocarbon gases, such as CF4, and their mixtures are widely used in contemporary low-pressure and high-density plasma processing techniques. In such plasmas Langmuir probe is one of the most commonly employed diagnostic techniques to obtain electron number density (ne), electron temperature (Te), electron energy distribution function (EEDF), mean electron energy (Ee), ion number density (ni), and plasma potential (Vp). In this paper we report probe data for planar inductively coupled plasmas in CF4/O2/Ar mixtures. By varying the relative concentrations in the mixture, radial profiles of ne, ni, Te, Ee, Vp, EEDF were measured in the mid-plane of the plasma at 10 mTorr and 20 mTorr of gas pressures, and 200 W and 300 W of RF powers. Data show that ne and ni decrease with increase of CF4 content and decrease of gas-pressure but they increase with increase of RF-power, whereas Vp increases with decrease of gas-pressure and remains independent of RF-power. However, they all peak at the center of the plasma and decrease towards the edge while Te follows the other way and increases a little with increase of power. The measured EEDFs exhibit Druyvesteyn-like distribution at all pressures and powers. Data are analyzed and will be presented.

In many RF discharges, Langmuir probe measurements are usually made against a background of sinusoidal (and not so sinusoidal) fluctuations in the plasma parameters such as the plasma potential (Vp), the electron number density (ne), and the electron temperature (Te). The compensation of sinusoidal fluctuations in Vp has been extensively studied and is relatively well understood. Less attention has been paid to the possible distortions introduced by small fluctuations in plasma density and/or plasma temperature, which may arise in the sheath and pre-sheath regions of RF discharges. Here, we present the results of a model simulation of probe characteristics subject to fluctuations in both Vp and ne. The modeling of probe distortion due to possible fluctuations in Te is less straightforward. A comparison is presented of calculations with experimental measurements using a compensated and uncompensated Langmuir probe in an inductively coupled GEC reference cell plasma, operating on Ar and Ar/CF4 mixtures. The plasma parameters determined from the compensated probe characteristics are compared to previous measurements of others made in similar discharges, and to our own measurements of the average electron density derived from electrical impedance measurements.

The temporal measurement of gas pressure in inductive coupled plasma revealed that there is an interesting anomalous evolution of gas pressure in the early stage of plasma ignition and extinction: a sudden gas pressure change and its relaxation of which time scales are about a few seconds and a few tens of second, respectively, were observed after plasma ignition and extinction. This phenomenon can be understood as a combined result between the neutral heating effect induced by plasma and the pressure relaxation effect for new gas temperature. The temporal measurement of gas temperature by laser Rayleigh scattering and the time dependant calculations for the neutral heating and pressure relaxation are in good agreement with our experimental results. This result and physics behind are expected to provide a new operational perspective of the recent plasma processes of which time is very short, such as a plasma enhanced atomic layer deposition/etching, a soft etch for disposal of residual by-products on wafer, and light oxidation process in semiconductor manufacturing.

A versatile linear dusty (complex) plasma device is designed to study the transport and dynamical behavior of dust particles in a large volume. Diffused inductively coupled plasma is generated in the background of argon gas. A novel technique is used to introduce the dust particles in the main plasma by striking a secondary direct current glow discharge. These dust particles are found to get trapped in an electrostatic potential well, which is formed due to the combination of the ambipolar electric field caused by diffusive plasma and the field produced by the charged glass wall of the vacuum chamber. According to the requirements, the volume of the dust cloud can be controlled very precisely by tuning the plasma and discharge parameters. The present device can be used to address the underlying physics behind the transport of dust particles, self-excited dust acoustic waves, and instabilities. The detailed design of this device, plasma production and characterization, trapping and transport of the dust particle, and some of the preliminary experimental results are presented. PMID:27250421

A versatile linear dusty (complex) plasma device is designed to study the transport and dynamical behavior of dust particles in a large volume. Diffused inductively coupled plasma is generated in the background of argon gas. A novel technique is used to introduce the dust particles in the main plasma by striking a secondary direct current glow discharge. These dust particles are found to get trapped in an electrostatic potential well, which is formed due to the combination of the ambipolar electric field caused by diffusive plasma and the field produced by the charged glass wall of the vacuum chamber. According to the requirements, the volume of the dust cloud can be controlled very precisely by tuning the plasma and discharge parameters. The present device can be used to address the underlying physics behind the transport of dust particles, self-excited dust acoustic waves, and instabilities. The detailed design of this device, plasma production and characterization, trapping and transport of the dust particle, and some of the preliminary experimental results are presented.

Inductively coupled plasmas (ICP) are widely used in the microelectronic industry for thin film etching. ICPs have typically been operated at low gas pressures (<50 mTorr) and they have been well-characterized in this regime. Several applications requiring high etch rates (e.g., vertical NAND etch) have recently extended the use of ICPs to the high power (>4000 W) and high pressure (>100 mTorr) regime. ICP operation in this high-power, high-pressure regime imposes a tremendous challenge of achieving good plasma uniformity over large substrates. This necessitates a good theoretical understanding of the underlying physics, thorough experimental characterization, and more accurate numerical models for hardware design guidance. In this study, we will focus on the characterization of ICP in the high-power, high-pressure regime. Computational modeling is done using CRTRS, our in-house 2D/3D plasma model. The fluid plasma model is coupled to a circuit model to self-consistently account for the capacitive coupling from the coils that is expected to dominate in this operating regime. Properties of Ar plasma will be discussed and compared with experiments. The impact of critical operating parameters such as ICP power, pressure, flow rate, and current ratio (in multi-coil antenna structures) on plasma characteristics will be examined. Results in relevant processing gases will also be discussed.

The effect of magnetic filtering on the electron energy distribution function is studied in an inductive discharge with internal coil coupling. The coil is placed inside the plasma and driven by a low-frequency power supply (5.8 MHz) which leads to a very high power transfer efficiency. A permanent dipole magnet may be placed inside the internal coil to produce a static magnetic field around 100 Gauss. The coil and the matching system are designed to minimize the capacitive coupling to the plasma. Capacitive coupling is quantified by measuring the radiofrequency (rf) plasma potential with a capacitive probe. Without the permanent magnet, the rf plasma potential is significantly smaller than the electron temperature. When the magnet is present, the rf plasma potential increases. The electron energy distribution function is measured as a function of space with and without the permanent magnet. When the magnet is present, electrons are cooled down to low temperature in the downstream region. This region of low electron temperature may be useful for plasma processing applications, as well as for efficient negative ion production.

In spectrochemistry, various plasmasources are used for the analysis of samples. The simplest way to characterise these plasmasources is to determine the absolute intensities of several atomic lines of the main plasma gas (argon or helium). From these measurements absolute population densities of excited states can be deduced and, via a so-called Boltzmann plot, the electron temperature Te and density ne. This method works quite well as long as the plasma is relatively close to equilibrium. The reason why spectrochemical plasmas can show strong deviations from equilibrium will be discussed. An other limitation of emission spectroscopy is the lack of accurate transition probabilities for transitions from highly excited states. For argon 15 of these probabilities have been determined with an uncertainty of ±25%.

A low-power, plasmasource-based, portable molecular light emission generator/detector employing an atmospheric pressure pulsed-plasma for molecular fragmentation and excitation is described. The average power required for the operation of the plasma is between 0.02 W and 5 W. The features of the optical emission spectra obtained with the pulsed plasmasource are significantly different from those obtained with direct current (dc) discharge higher power; for example, strong CH emission at 431.2 nm which is only weakly observed with dc plasmasources was observed, and the intense CN emission observed at 383-388 nm using dc plasmasources was weak in most cases. Strong CN emission was only observed using the present apparatus when compounds containing nitrogen, such as aniline were employed as samples. The present apparatus detects dimethylsulfoxide at 200 ppb using helium as the plasma gas by observing the emission band of the CH radical. When coupled with a gas chromatograph for separating components present in a sample to be analyzed, the present invention provides an apparatus for detecting the arrival of a particular component in the sample at the end of the chromatographic column and the identity thereof.

Rf-driven ion sources for accelerators and many industrial applications benefit from detailed numerical modeling and simulation of plasma characteristics. For instance, modeling of the Spallation Neutron Source (SNS) internal antenna H- source has indicated that a large plasma velocity is induced near bends in the antenna where structural failures are often observed. This could lead to improved designs and ion source performance based on simulation and modeling. However, there are significant separations of time and spatial scales inherent to Rf-driven plasma ion sources, which makes it difficult to model ion sources with explicit, kinetic Particle-In-Cell (PIC) simulation codes. In particular, if both electron and ion motions are to be explicitly modeled, then the simulation time step must be very small, and total simulation times must be large enough to capture the evolution of the plasma ions, as well as extending over many Rf periods. Additional physics processes such as plasma chemistry and surface effects such as secondary electron emission increase the computational requirements in such a way that even fully parallel explicit PIC models cannot be used. One alternative method is to develop fluid-based codes coupled with electromagnetics in order to model ion sources. Time-domain fluid models can simulate plasma evolution, plasma chemistry, and surface physics models with reasonable computational resources by not explicitly resolving electron motions, which thereby leads to an increase in the time step. This is achieved by solving fluid motions coupled with electromagnetics using reduced-physics models, such as single-temperature magnetohydrodynamics (MHD), extended, gas dynamic, and Hall MHD, and two-fluid MHD models. We show recent results on modeling the internal antenna H- ion source for the SNS at Oak Ridge National Laboratory using the fluid plasma modeling code USim. We compare demonstrate plasma temperature equilibration in two-temperature MHD models

Rf-driven ion sources for accelerators and many industrial applications benefit from detailed numerical modeling and simulation of plasma characteristics. For instance, modeling of the Spallation Neutron Source (SNS) internal antenna H(-) source has indicated that a large plasma velocity is induced near bends in the antenna where structural failures are often observed. This could lead to improved designs and ion source performance based on simulation and modeling. However, there are significant separations of time and spatial scales inherent to Rf-driven plasma ion sources, which makes it difficult to model ion sources with explicit, kinetic Particle-In-Cell (PIC) simulation codes. In particular, if both electron and ion motions are to be explicitly modeled, then the simulation time step must be very small, and total simulation times must be large enough to capture the evolution of the plasma ions, as well as extending over many Rf periods. Additional physics processes such as plasma chemistry and surface effects such as secondary electron emission increase the computational requirements in such a way that even fully parallel explicit PIC models cannot be used. One alternative method is to develop fluid-based codes coupled with electromagnetics in order to model ion sources. Time-domain fluid models can simulate plasma evolution, plasma chemistry, and surface physics models with reasonable computational resources by not explicitly resolving electron motions, which thereby leads to an increase in the time step. This is achieved by solving fluid motions coupled with electromagnetics using reduced-physics models, such as single-temperature magnetohydrodynamics (MHD), extended, gas dynamic, and Hall MHD, and two-fluid MHD models. We show recent results on modeling the internal antenna H(-) ion source for the SNS at Oak Ridge National Laboratory using the fluid plasma modeling code USim. We compare demonstrate plasma temperature equilibration in two-temperature MHD

The plasma wall interaction (PWI) in the MST RFP has yet to be studied systematically to determine the effects of the edge plasma on overall plasma performance. Two imaging views of the MST plasma currently exist. The first views the outboard toroidal and poloidal belt limiters at the main poloidal gap limiter. The second views the inboard poloidal limiter, as well as a section of the outboard toroidal limiter away from the man gap limiter. Data from viewing outboard limiters reveals PWI structures correlate with the plasma conditions. In standard RFP plasmas at lower plasma currents the PWI is dominated by non-axisymmetric radiation belts. As the RFP plasma current rises, increasing axisymmetry is seen from the edge. When in the 3D equilibria of the quasi-single helicity (QSH) state the PWI correlates with the main magnetic mode of the plasma. The dominant source of light observed from the MST edge is from hydrogen recycling. This will be used to inform neutral particle sourcing in the EIRENE neutral transport code. EIRENE will be used to compare how variations in fueling could affect the neutral profile in MST. This work is supported by the U.S. Department of Energy.

The hybrid kinetic model supports comprehensive simulation of the interaction between different spatial and energetic elements of the Europa moon-magnetosphere system with respect to a variable upstream magnetic field and flux or density distributions of plasma and energetic ions, electrons, and neutral atoms. This capability is critical for improving the interpretation of the existing Europa flyby measurements from the Galileo Orbiter mission, and for planning flyby and orbital measurements (including the surface and atmospheric compositions) for future missions. The simulations are based on recent models of the atmosphere of Europa (Cassidy et al., 2007; Shematovich et al., 2005). In contrast to previous approaches with MHD simulations, the hybrid model allows us to fully take into account the finite gyroradius effect and electron pressure, and to correctly estimate the ion velocity distribution and the fluxes along the magnetic field (assuming an initial Maxwellian velocity distribution for upstream background ions). Photoionization, electron-impact ionization, charge exchange and collisions between the ions and neutrals are also included in our model. We consider the models with Oþ þ and Sþ þ background plasma, and various betas for background ions and electrons, and pickup electrons. The majority of O2 atmosphere is thermal with an extended non-thermal population (Cassidy et al., 2007). In this paper, we discuss two tasks: (1) the plasma wake structure dependence on the parameters of the upstream plasma and Europa's atmosphere (model I, cases (a) and (b) with a homogeneous Jovian magnetosphere field, an inductive magnetic dipole and high oceanic shell conductivity); and (2) estimation of the possible effect of an induced magnetic field arising from oceanic shell conductivity. This effect was estimated based on the difference between the observed and modeled magnetic fields (model II, case (c) with an inhomogeneous Jovian magnetosphere field, an inductive

Two-dimensional (2D) numerical simulations of thermochemical nonequilibrium inductively coupled plasma (ICP) flows inside a 10-kW inductively coupled plasma wind tunnel (ICPWT) were carried out with nitrogen as the working gas. Compressible axisymmetric Navier-Stokes (N-S) equations coupled with magnetic vector potential equations were solved. A four-temperature model including an improved electron-vibration relaxation time was used to model the internal energy exchange between electron and heavy particles. The third-order accuracy electron transport properties (3rd AETP) were applied to the simulations. A hybrid chemical kinetic model was adopted to model the chemical nonequilibrium process. The flow characteristics such as thermal nonequilibrium, inductive discharge, effects of Lorentz force were made clear through the present study. It was clarified that the thermal nonequilibrium model played an important role in properly predicting the temperature field. The prediction accuracy can be improved by applying the 3rd AETP to the simulation for this ICPWT. supported by Grant-in-Aid for Scientific Research (No. 23560954), sponsored by the Japan Society for the Promotion of Science

A 20 cm long 10 cm wide microwave plasmasource was realized by inserting two 20 cm long 1.5 mm diameter rod antennas into the plasma. Plasma luminous distributions around the antennas were changed by magnetic field arrangement created by permanent magnets attached to the source. The distributions appeared homogeneous in one direction along the antenna when the spacing between the antenna and the source wall was 7.5 mm for the input microwave frequency of 2.45 GHz. Plasma density and temperature at a plane 20 cm downstream from the microwave shield were measured by a Langmuir probe array at 150 W microwave power input. The measured electron density and temperature varied over space from 3.0 × 10(9) cm(-3) to 5.8 × 10(9) cm(-3), and from 1.1 eV to 2.1 eV, respectively. PMID:26932114

A 20 cm long 10 cm wide microwave plasmasource was realized by inserting two 20 cm long 1.5 mm diameter rod antennas into the plasma. Plasma luminous distributions around the antennas were changed by magnetic field arrangement created by permanent magnets attached to the source. The distributions appeared homogeneous in one direction along the antenna when the spacing between the antenna and the source wall was 7.5 mm for the input microwave frequency of 2.45 GHz. Plasma density and temperature at a plane 20 cm downstream from the microwave shield were measured by a Langmuir probe array at 150 W microwave power input. The measured electron density and temperature varied over space from 3.0 × 109 cm-3 to 5.8 × 109 cm-3, and from 1.1 eV to 2.1 eV, respectively.

A "triggerless" arc initiation method and apparatus is based on simply switching the arc supply voltage to the electrodes (anode and cathode). Neither a mechanical trigger electrode nor a high voltage flashover from a trigger electrode is required. A conducting path between the anode and cathode is provided, which allows a hot spot to form at a location where the path connects to the cathode. While the conductive path is eroded by the cathode spot action, plasma deposition ensures the ongoing repair of the conducting path. Arc initiation is achieved by simply applying the relatively low voltage of the arc power supply, e.g. 500 V-1 kV, with the insulator between the anode and cathode coated with a conducting layer and the current at the layer-cathode interface concentrated at one or a few contact points. The local power density at these contact points is sufficient for plasma production and thus arc initiation. A conductive surface layer, such as graphite or the material being deposited, is formed on the surface of the insulator which separates the cathode from the anode. The mechanism of plasma production (and arc initiation) is based on explosive destruction of the layer-cathode interface caused by joule heating. The current flow between the thin insulator coating and cathode occurs at only a few contact points so the current density is high.

The influence of a capacitive radio frequency substrate bias on the E- to H-mode transition and the electron heating dynamics in a low pressure inductively coupled plasma (ICP) in hydrogen is investigated. The inductive and capacitive power sources are driven at the same frequency and can be operated in a phase-locked mode with a fixed, but adjustable phase between them. This approach of phase-locked discharge operation is a new feature which enables time-resolved studies of both the inductive and the capacitive energy coupling by phase-resolved optical emission spectroscopy (PROES). The inductive power at which the mode transition occurs, Pmtp, is determined by PROES and from probe measurements of the electron density. For both, phase-locked and phase-unlocked operation, the plasma density in the E-mode is significantly influenced by the applied capacitive power: Already low values of bias power can reduce the value of Pmtp. This coupling between the power sources is dependent on the adjustable phase between them and is attributed to a phase sensitive confinement mechanism for the energetic electrons produced by the expanding sheaths at the substrate and at the ICP coil. At higher pressures the effect diminishes. In contrast, by using electrodes with ring-shaped trenches the coupling is enhanced.

The region between a Maxwellian plasmasource and an absorbing surface is modeled with an electrostatic particle simulation and with a kinetic plasma-sheath model. In the kinetic model, Poisson's equation and Vlasov equations govern the velocity distribution of the ions and electrons. Our numerical and theoretical results for collector potential and plasma transport agree with the bounded model of Emmert et al., but differ somewhat from those using traditional Bohm sheath analysis. The plasmasource injects equal fluxes of half-Maxwellian ions and electrons with specified mass and temperature ratios and is assumed to have a zero electric field. Representing the potential change within a distributed full-Maxwellian source region, the source potential drop depends primarily on temperature ratio and evolves a few Debye lengths from the source to neutralize the injected plasma. The plasma flows to an electrically floating collector where the more familiar electron-repelling collector sheath appears. Profiles of potential, density, drift velocity, temperature, kinetic energy flux, and heat flux are shown from simulation; all compare very well with theory. 24 refs., 7 figs., 1 tab.

The generation of electromagnetic radiation from the free energy available in electron streams is discussed. The fundamental principles involved in a particular class of coherent plasma radiation sources, i.e., plasma lasers, are reviewed, focusing on three wave coupling, nonlinear parametric instabilities, and negative energy waves. The simplest case of plasma lasers, that of an unmagnetized plasma containing a finite level of density fluctuations and electrons streaming with respect to the ions, is dealt with. A much more complicated application of plasma lasers to the case of auroral kilometric radiation is then examined. The concept of free electron lasers, including the role of relativistic scattering, is elucidated. Important problems involving the escape of the excited radiation from its generation region, effects due to plasma shielding and nonlinear limits, are brought out.

Multicharged ions that are needed are produced from solid pure material with high melting point in an electron cyclotron resonance ion source. We develop an evaporator by using induction heating (IH) with multilayer induction coil, which is made from bare molybdenum or tungsten wire without water cooling and surrounding the pure vaporized material. We optimize the shapes of induction coil and vaporized materials and operation of rf power supply. We conduct experiment to investigate the reproducibility and stability in the operation and heating efficiency. IH evaporator produces pure material vapor because materials directly heated by eddy currents have no contact with insulated materials, which are usually impurity gas sources. The power and the frequency of the induction currents range from 100 to 900 W and from 48 to 23 kHz, respectively. The working pressure is about 10{sup -4}-10{sup -3} Pa. We measure the temperature of the vaporized materials with different shapes, and compare them with the result of modeling. We estimate the efficiency of the IH vapor source. We are aiming at the evaporator's higher melting point material than that of iron.

In this study, the effect of O2 inductively coupled plasma (ICP) conditions for the indium tin oxide (ITO) surface treatment on the organic light emitting diode (OLED) device performances were investigated. By the O2 plasma treatment of ITO glass, better OLED device performances such as a lower turn-on voltage, a higher luminescence, and a higher power efficiency could be obtained and the use of lower oxygen pressure and higher ICP power improved the device properties further. DC-biasing of the ITO glass substrate degraded the device properties. The use of lower oxygen pressure and higher ICP power increased the densities of O2+ and O* in the plasma, and the plasma-treated ITO surface showed a lower carbon, a higher O/(Sn+In), and a higher Sn4+/In for the condition of lower oxygen pressure and higher ICP power. The improved OLED device properties with the ITO treated at the higher ICP power and the lower pressure appear to be from the increased hole injection to the OLED materials by decreasing the resistance of ITO and by increasing the work function of the ITO.

Vibrational temperature (Tvib) of N2 gas and electron energy distribution function (EEDF) were measured in Ar/N2 mixture inductively coupled plasma (ICP). At a low gas pressure of 5 mTorr where the EEDF is bi-Maxwellian distribution, plasma density np and Tvib (from 7000 K to 5600 K) slightly decrease. However, remarkable decrease in np and Tvib is found with the dilution of N2 gas at a high gas pressure of 50 mTorr, where the EEDF is depleted Maxwellian distribution at a fixed ICP power of 150 W. When the ICP power increases from 150 W to 300 W at the gas pressure of 50 mTorr, the depleted tail on the EEDF is replenished, while np is little changed with the dilution of N2 gas. In this case, Tvib slightly decreases from 9500 K to 7600 K. These results indicate that the variation of Tvib is strongly correlated to the plasma parameters, such as the plasma density and EEDF.

Immediate impact of external sources on pressure-gradient-driven turbulence and turbulent transport (without waiting the evolution of global parameters and those in mean velocity distribution function) is discussed. The case, where an external source directly couples with plasma fluctuations in particle source and momentum source, is investigated. Theoretical analysis is developed by use of Hasegawa-Wakatani model equations. It is shown that the momentum source can induce the immediate influence on the turbulence and turbulent transport. The effect of this coupling between source and fluctuations on the momentum theorem is also explained.

The Prototype Materials Plasma Experiment (Proto-MPEX) is a linear high-intensity rf plasmasource that combines a high-density helicon plasma generator with electron and ion heating sections. It is being used to study the physics of heating over-dense plasmas in a linear configuration. The helicon plasma is produced by coupling 13.56 MHz rf power at levels up to 100 kW. Microwaves at 28 GHz (~ 150 kW) are coupled to the electrons in the over-dense helicon plasma via Electron Bernstein Waves (EBW). Ion cyclotron heating (~ 30 kW) will be via a magnetic beach approach. Plasma diagnostics include Thomson Scattering and a retarding field energy analyzer near the target, while a microwave interferometer and double-Langmuir probes are used to determine plasma parameters elsewhere in the system. Filterscopes are being used to measure D-alpha emission and He line ratios at multiple locations, and IR cameras image the target plates to determine heat deposition. High plasma densities in the helicon region have been produced in He (>3x1019/m3) and D (>1.5x1019/m3) , and operation with on-axis magnetic field strength >1 T has been demonstrated. Details of the experimental results and future plans for studying plasma surface/RF antenna interactions will be presented. ORNL is managed by UT-Battelle, LLC, for the U.S. DOE under contract DE-AC-05-00OR22725.

This document is prepared as a briefing aid and technical primer for persons unfamiliar and uninitiated with the theory of imploding plasma radiation sources. It is hoped that it will prove helpful in introducing the basic physics concepts of these sources and in presenting these concepts to newcomers and potential users.

A simplified vacuum arc design [based on metal vapor vacuum arc (MeVVA) concepts] is employed as a plasmasource for a study of a {sup 7}Be non-neutral plasma. The design includes a mechanism for interchanging the cathode source. Testing of the plasmasource showed that it is capable of producing on the order of 10{sup 12} charges at confinable energies using a boron-carbide disk as the cathode target. The design is simplified from typical designs for lower energy and lower density applications by using only the trigger spark rather than the full vacuum arc in high current ion beam designs. The interchangeability of the cathode design gives the source the ability to replace only the source sample, simplifying use of radioactive materials in the plasmasource. The sample can also be replaced with a completely different conductive material. The design can be easily modified for use in other plasma confinement or full MeVVA applications.

The region between a Maxwellian plasmasource and an absorbing surface is described theoretically with a static, kinetic plasma--sheath model and modeled numerically with a dynamic, electrostatic particle simulation. In the kinetic theory, Poisson's equation and Vlasov equations govern the non-Maxwellian velocity distribution of the ions and electrons. The results in this paper for collector potential and plasma transport agree with the bounded model of Emmert {ital et} {ital al}. (Phys. Fluids {bold 23}, 803 (1980)). However, this approach differs from those using traditional Bohm sheath analysis by {plus minus}0.25 (in units of electron temperature) for potential drop through the collector sheath of a hydrogen plasma. In both the theory and simulation, the plasmasource injects equal fluxes of ions and electrons with half-Maxwellian velocities and various mass and temperature ratios and is assumed to have a zero electric field. The potential change within a spatially distributed, full Maxwellian source region is represented with the source sheath potential drop that depends primarily on temperature ratio. This source sheath evolves over a few Debye lengths from the source to neutralize the injected plasma. The plasma flows to an electrically floating collector where the more familiar electron-repelling collector sheath appears. The collector potential {psi}{sub {ital C}} and source sheath potential drop {psi}{sub {ital P}} (in units of electron temperature) are evaluated as a function of mass and temperature ratio. The velocity moments of density, drift velocity, temperature, kinetic energy flux, and heat flux are also derived as a function of {psi}{sub {ital C}} and {psi}{sub {ital P}}. Comparisons with electrostatic particle simulations are shown for the ion/electron mass ratios of 40 and 100 and temperature ratios of 0.1, 1, and 10.

A Multi-Purpose Plasma (MP(2)) facility has been renovated from Hanbit mirror device [Kwon et al., Nucl. Fusion 43, 686 (2003)] by adopting the same philosophy of diversified plasma simulator (DiPS) [Chung et al., Contrib. Plasma Phys. 46, 354 (2006)] by installing two plasmasources: LaB(6) (dc) and helicon (rf) plasmasources; and making three distinct simulators: divertor plasma simulator, space propulsion simulator, and astrophysics simulator. During the first renovation stage, a honeycomblike large area LaB(6) (HLA-LaB(6)) cathode was developed for the divertor plasma simulator to improve the resistance against the thermal shock fragility for large and high density plasma generation. A HLA-LaB(6) cathode is composed of the one inner cathode with 4 in. diameter and the six outer cathodes with 2 in. diameter along with separate graphite heaters. The first plasma is generated with Ar gas and its properties are measured by the electric probes with various discharge currents and magnetic field configurations. Plasma density at the middle of central cell reaches up to 2.6 x 10(12) cm(-3), while the electron temperature remains around 3-3.5 eV at the low discharge current of less than 45 A, and the magnetic field intensity of 870 G. Unique features of electric property of heaters, plasma density profiles, is explained comparing with those of single LaB(6) cathode with 4 in. diameter in DiPS. PMID:17979417

A Multi-Purpose Plasma (MP2) facility has been renovated from Hanbit mirror device [Kwon et al., Nucl. Fusion 43, 686 (2003)] by adopting the same philosophy of diversified plasma simulator (DiPS) [Chung et al., Contrib. Plasma Phys. 46, 354 (2006)] by installing two plasmasources: LaB6 (dc) and helicon (rf) plasmasources; and making three distinct simulators: divertor plasma simulator, space propulsion simulator, and astrophysics simulator. During the first renovation stage, a honeycomblike large area LaB6 (HLA-LaB6) cathode was developed for the divertor plasma simulator to improve the resistance against the thermal shock fragility for large and high density plasma generation. A HLA-LaB6 cathode is composed of the one inner cathode with 4in. diameter and the six outer cathodes with 2in. diameter along with separate graphite heaters. The first plasma is generated with Ar gas and its properties are measured by the electric probes with various discharge currents and magnetic field configurations. Plasma density at the middle of central cell reaches up to 2.6×1012 cm-3, while the electron temperature remains around 3-3.5eV at the low discharge current of less than 45A, and the magnetic field intensity of 870G. Unique features of electric property of heaters, plasma density profiles, is explained comparing with those of single LaB6 cathode with 4in. diameter in DiPS.

A model for pulsed inductiveplasma acceleration is presented that consists of a set of circuit equations coupled to both a one-dimensional (1D) equation of motion and an equation governing the partitioning of energy. The latter two equations are obtained for the plasma current sheet by treating it as a single element of finite volume and integrating the governing equations over that volume. The integrated terms are replaced where necessary by physically equivalent approximations that are calculated through the solution of other parts of the governing equation set. The model improves upon previous 1D performance models by permitting the time-evolution of the temperature consistent with the time-varying energy flux into the plasma. The plasma state properties are also more realistically modelled and evolved in time, allowing for the tailoring of the model to different gases that may be chosen as propellants. Computational results for argon propellant are presented to demonstrate the efficacy of the model. The model produces a result where efficiency is maximized at a given value of the electrodynamic scaling term known as the dynamic impedance parameter. The scaling of different energy sinks as a function of the dynamic impedance parameter provides insight into the global energy partitioning in these types of accelerators. Results from the present model deviate from the previous version where temperature is selected as an input without regard for the energy that would be deposited to heat the gas to that temperature. Qualitatively and quantitatively, the model predicts specific impulse values that compare favourably with those measured for two separate inductive pulsed plasma thrusters. Efficiency is underpredicted in the regime where data are available, but the trends in the data and simulations follow similar trajectories that appear to be converging towards a predicted peak efficiency as the dynamic impedance parameter is increased.

Pulsed Plasma Thrusters (PPTs) are advanced electric space propulsion devices that are characterized by simplicity and robustness. They suffer, however, from low thrust efficiencies. This summer, two approaches to improve the thrust efficiency of PPTs will be investigated through both numerical modeling and experimental testing. The first approach, an inductively-driven PPT, uses a double-ignition circuit to fire two PPTs in succession. This effectively changes the PPTs configuration from an LRC circuit to an LR circuit. The LR circuit is expected to provide better impedance matching and improving the efficiency of the energy transfer to the plasma. An added benefit of the LR circuit is an exponential decay of the current, whereas a traditional PPT s under damped LRC circuit experiences the characteristic "ringing" of its current. The exponential decay may provide improved lifetime and sustained electromagnetic acceleration. The second approach, a high-energy PPT, is a traditional PPT with a variable size capacitor bank. This PPT will be simulated and tested at energy levels between 100 and 450 joules in order to investigate the relationship between efficiency and energy level. Arbitrary Coordinate Hydromagnetic (MACH2) code is used. The MACH2 code, designed by the Center for Plasma Theory and Computation at the Air Force Research Laboratory, has been used to gain insight into a variety of plasma problems, including electric plasma thrusters. The goals for this summer include numerical predictions of performance for both the inductively-driven PPT and high-energy PFT, experimental validation of the numerical models, and numerical optimization of the designs. These goals will be met through numerical and experimental investigation of the PPTs current waveforms, mass loss (or ablation), and impulse bit characteristics.

Electrodynamic tethers have been proposed as a means of generating power in low earth orbit. One of the limitations on the power generated is the relatively low electron current that can be collected. It is proposed that the electron current can be significantly enhanced by means of current-induced plasma turbulence in a plasma cloud around the collecting anode. This is examined for the specific case of ion acoustic turbulence. An important conclusion is that the use of plasma clouds in the ionosphere will entail a high-impedance (no instability) and a low-impedance (ion acoustic instability) mode of operation. The low-impedance mode of operation will have two submodes, one steady state and one pulsed.

The multi-dipolar microwave plasma is a suitable technology for the scaling-up of high density plasma processing in the very low pressure range. Effectively, a large area or volume of plasma can be achieved by a mere distribution, over 2 or 3 dimensions, of a number of elementary plasmasources. To enhance the microwave coupling efficiency and optimize the spatial repartition of the elementary plasmasources, it could be helpful to localize the production regions and coupling modes that govern the energy transfer from the wave to the electrons. The main objective of this work is to identify the possible coupling modes as a function of operating parameters. Accordingly, the plasma parameters (electron temperature, density) were correlated together with the electromagnetic radiation, as well as with different coupling modes observed as a function of microwave power. High plasma densities, up to 10 times the critical density (for one source), can be achieved through an efficient transfer of the electrostatic wave energy to the electrons.

Spectroscopic measurements are reported of the plasma formed inside a hollow anode (HA) with a ferroelectric plasmasource (FPS) incorporated in it. The HA was used as a cathode in a diode supplied by an accelerating pulse ({<=}300 kV, {<=}400 ns). It was found that the HA discharge (1.2 kA, 10 {mu}s) is accompanied by the formation of a dense ({approx_equal}8x10{sup 14} cm{sup -3}) plasma layer at the surface of the FPS. This surface plasma serves as a practically unlimited source of electrons. In the bulk of the HA plasma the density is {approx_equal}3x10{sup 13} cm{sup -3} and it remains the same during the accelerating pulse whereas the plasma electron temperature increases from 4 to 11 eV.

Since Helicon plasmasources can efficiently couple power and generate high-density plasma, they have received interest also as spacecraft propulsive devices, among other applications. In order to maximize the power deposited into the plasma, it is necessary to assess the performance of the radiofrequency (RF) antenna that drives the discharge, as typical plasma parameters (e.g. the density) are varied. For this reason, we have conducted a comparative analysis of three Helicon sources which feature different RF antennas, namely, the single-loop, the Nagoya type-III and the fractional helix. These antennas are compared in terms of input impedance and induced current density; in particular, the real part of the impedance constitutes a measure of the antenna ability to couple power into the plasma. The results presented in this work have been obtained through a full-wave approach which (being hinged on the numerical solution of a system of integral equations) allows computing the antenna current and impedance self-consistently. Our findings indicate that certain combinations of plasma parameters can indeed maximize the real part of the input impedance and, thus, the deposited power, and that one of the three antennas analyzed performs best for a given plasma. Furthermore, unlike other strategies which rely on approximate antenna models, our approach enables us to reveal that the antenna current density is not spatially uniform, and that a correlation exists between the plasma parameters and the spatial distribution of the current density.

An inductively coupled plasma-mass spectrometer (ICP-MS) is an elemental analytical instrument capable of determining nearly all elements in the periodic table at limits of detection in the parts per quadrillion and with a linear analytical range over 8-10 orders of magnitude. Three concentric quartz tubes make up the plasma torch. Argon gas is spiraled through the outer tube and generates the plasma powered by a looped load coil operating at 27.1 or 40.6 MHz. The argon flow of the middle channel is used to keep the plasma above the innermost tube through which solid or aqueous sample is carried in a third argon stream. A sample is progressively desolvated, atomized and ionized. The torch is operated at atmospheric pressure. To reach the reduced pressures of mass spectrometers, ions are extracted through a series of two, approximately one millimeter wide, circular apertures set in water cooled metal cones. The space between the cones is evacuated to approximately one torr. The space behind the second cone is pumped down to, or near to, the pressure needed for the mass spectrometer (MS). The first cone, called the sampler, is placed directly in the plasma plume and its position is adjusted to the point where atomic ions are most abundant. The hot plasma gas expands through the sampler orifice and in this expansion is placed the second cone, called the skimmer. After the skimmer traditional MS designs are employed, i.e. quadrupoles, magnetic sectors, time-of-flight. ICP-MS is the leading trace element analysis technique. One of its weaknesses are polyatomic ions. This dissertation has added to the fundamental understanding of some of these polyatomic ions, their origins and behavior. Although mainly continuing the work of others, certain novel approaches have been introduced here. Chapter 2 includes the first reported efforts to include high temperature corrections to the partition functions of the polyatomic ions in ICP-MS. This and other objections to preceeding

Gallium nitride (GaN) films were grown on sapphire substrate by reactive magnetron sputtering. Inductively coupled-plasma (ICP) source was installed between the substrate holder and the sputtering target to increase the plasma density and the degree of ionization of nitrogen gas. Liquid Ga and Ar/N{sub 2} were used as the sputtering target and sputtering gases, respectively. X-ray diffraction measurements confirmed that the authors could grow high quality GaN crystallites at 500 °C. However, the crystalline GaN (0002) peak remained even by lowering the growth temperature down to 300 °C. The N:Ga ratio of the film grown at 500 °C was almost 1:1, and the nitrogen composition became higher toward the 1:1 N:Ga ratio with increasing the growth temperature. The high degree of ionization induced by ICP source was essential to the growth of high crystalline quality GaN films.

This study addresses the optical performance of a plasma adaptive lens for aero-optical applications by using both axisymmetric and three-dimensional numerical simulations. Plasma adaptive lenses are based on the effects of free electrons on the phase velocity of incident light, which, in theory, can be used as a phase-conjugation mechanism. A closed cylindrical chamber filled with Argon plasma is used as a model lens into which a beam of light is launched. The plasma is sustained by applying a radio-frequency electric current through a coil that envelops the chamber. Four different operating conditions, ranging from low to high powers and induction frequencies, are employed in the simulations. The numerical simulations reveal complex hydrodynamic phenomena related to buoyant and electromagnetic laminar transport, which generate, respectively, large recirculating cells and wall-normal compression stresses in the form of local stagnation-point flows. In the axisymmetric simulations, the plasma motion is coupled with near-wall axial striations in the electron-density field, some of which propagate in the form of low-frequency traveling disturbances adjacent to vortical quadrupoles that are reminiscent of Taylor-Görtler flow structures in centrifugally unstable flows. Although the refractive-index fields obtained from axisymmetric simulations lead to smooth beam wavefronts, they are found to be unstable to azimuthal disturbances in three of the four three-dimensional cases considered. The azimuthal striations are optically detrimental, since they produce high-order angular aberrations that account for most of the beam wavefront error. A fourth case is computed at high input power and high induction frequency, which displays the best optical properties among all the three-dimensional simulations considered. In particular, the increase in induction frequency prevents local thermalization and leads to an axisymmetric distribution of electrons even after introduction of

This study addresses the optical performance of a plasma adaptive lens for aero-optical applications by using both axisymmetric and three-dimensional numerical simulations. Plasma adaptive lenses are based on the effects of free electrons on the phase velocity of incident light, which, in theory, can be used as a phase-conjugation mechanism. A closed cylindrical chamber filled with Argon plasma is used as a model lens into which a beam of light is launched. The plasma is sustained by applying a radio-frequency electric current through a coil that envelops the chamber. Four different operating conditions, ranging from low to high powers and induction frequencies, are employed in the simulations. The numerical simulations reveal complex hydrodynamic phenomena related to buoyant and electromagnetic laminar transport, which generate, respectively, large recirculating cells and wall-normal compression stresses in the form of local stagnation-point flows. In the axisymmetric simulations, the plasma motion is coupled with near-wall axial striations in the electron-density field, some of which propagate in the form of low-frequency traveling disturbances adjacent to vortical quadrupoles that are reminiscent of Taylor-Görtler flow structures in centrifugally unstable flows. Although the refractive-index fields obtained from axisymmetric simulations lead to smooth beam wavefronts, they are found to be unstable to azimuthal disturbances in three of the four three-dimensional cases considered. The azimuthal striations are optically detrimental, since they produce high-order angular aberrations that account for most of the beam wavefront error. A fourth case is computed at high input power and high induction frequency, which displays the best optical properties among all the three-dimensional simulations considered. In particular, the increase in induction frequency prevents local thermalization and leads to an axisymmetric distribution of electrons even after introduction of

Measurement of plasma jet electrical conductivity has utility in the development of explosively driven magnetohydrodynamic (MHD) energy converters as well as magnetic flux compression reaction chambers for nuclear/chemical pulse propulsion and power. Within these types of reactors, the physical parameter of critical importance to underlying MHD processes is the magnetic Reynolds number, the value of which depends upon the product of plasma electrical conductivity and velocity. Therefore, a thorough understanding of MHD phenomena at high magnetic Reynolds number is essential, and methods are needed for the accurate and reliable measurement of electrical conductivity in high-speed plasma jets. It is well known that direct measurements using electrodes suffer from large surface resistance, and an electrodeless technique is desired. To address this need, an inductive probing scheme, originally developed for shock tube studies, has been adapted. In this method, the perturbation of an applied magnetic field by a plasma jet induces a voltage in a search coil, which, in turn, can be used to infer electrical conductivity through the inversion of a Fredholm integral equation of the first kind. A 1-in.-diameter probe using a light-gas gun. Exploratory laboratory experiments were carried out using plasma jets expelled from 15-g shaped charges. Measured conductivities were in the range of 4 kS/m for unseeded octol charges and 26 kS/m for seeded octol charges containing 2-percent potassium carbonate by mass.

Radio Frequency (RF) Inductively Coupled Plasmas (ICPs) are widely known for their two discharge modes, i.e., H-mode and E-mode, where the dynamics of the plasmas are completely different from each other. We have performed a kinetic simulation of a hydrogen plasma discharge in order to clarify the discharge mechanism and the E-to-H transition of the RF ICPs. The numerical simulation results, such as the time variations of spatial distribution of electron density and the power dissipated in the plasma, show the characteristic changes of the plasma dynamics due to E-to-H mode transition. Especially, the drastic change during the mode transition has been observed in the time evolution of the electron energy distribution function (EEDF). The EEDF deviates from a Maxwellian distribution before/after the transition and the deviation is more significant in the E-mode phase. These results indicate the importance of kinetic modeling for the physical understanding of E-to-H transition.

Adenovirus is one of the most important causative agents of iatrogenic infections derived from contaminated medical devices or finger contact. In this study, we investigated whether nitrogen gas plasma, generated by applying a short high-voltage pulse to nitrogen using a static induction thyristor power supply (1.5 kilo pulse per second), exhibited a virucidal effect against adenoviruses. Viral titer was reduced by one log within 0.94 min. Results from detection of viral capsid proteins, hexon and penton, by Western blotting and immunochromatography were unaffected by the plasma treatment. In contrast, analysis using the polymerase chain reaction suggested that plasma treatment damages the viral genomic DNA. Reactive chemical products (hydrogen peroxide, nitrate, and nitrite), ultraviolet light (UV-A) and slight temperature elevations were observed during the operation of the gas plasma device. Viral titer versus intensity of each potential virucidal factor were used to identify the primary mechanism of disinfection of adenovirus. Although exposure to equivalent levels of UV-A or heat treatment did not inactivate adenovirus, treatment with a relatively low concentration of hydrogen peroxide efficiently inactivated the virus. Our results suggest the nitrogen gas plasma generates reactive chemical products that inactivate adenovirus by damaging the viral genomic DNA. PMID:27322066

A method for detecting and correcting inaccurate results in inductively coupled plasma-atomic emission spectrometry (ICP-AES). ICP-AES analysis is performed across a plurality of selected locations in the plasma on an unknown sample, collecting the light intensity at one or more selected wavelengths of one or more sought-for analytes, creating a first dataset. The first dataset is then calibrated with a calibration dataset creating a calibrated first dataset curve. If the calibrated first dataset curve has a variability along the location within the plasma for a selected wavelength, errors are present. Plasma-related errors are then corrected by diluting the unknown sample and performing the same ICP-AES analysis on the diluted unknown sample creating a calibrated second dataset curve (accounting for the dilution) for the one or more sought-for analytes. The cross-over point of the calibrated dataset curves yields the corrected value (free from plasma related errors) for each sought-for analyte.

A two-step desolvation system for a continuous-flow ultrasonic nebulizer reduced the solvent load on an argon inductively coupled plasma (ICP). The aerosol was first heated above the boiling point of the solvent. Subsequently, solvent vapor was removed in two condensers kept at {minus}10{degree}C and {approx equal}{minus}80{degree}C. No special plasma ignition procedures were required; a change of solvent did not cause plasma instability. The plasma was stable to a forward power as low as 0.5 kW when methanol, acetone, acetonitrile, or ethanol was nebulized. The plasma could not be sustained while organic solvents were ultrasonically nebulized without at least partial desolvation. Detection limits for metals ranged from 0.2 {mu}g L{sup {minus}1} for Fe to 5 {mu}g L{sup {minus}1} for Pb. The detection limits for each element were approximately the same regardless of the organic solvent used and were comparable to those obtained during ultrasonic nebulization of aqueous solutions. With a forward power of 1.0 kW, molecular band emission from C{sub 2} was about 25 times less than when the aerosol was partially desolvated using a condensation temperature of {minus}10{degree}C.

Adenovirus is one of the most important causative agents of iatrogenic infections derived from contaminated medical devices or finger contact. In this study, we investigated whether nitrogen gas plasma, generated by applying a short high-voltage pulse to nitrogen using a static induction thyristor power supply (1.5 kilo pulse per second), exhibited a virucidal effect against adenoviruses. Viral titer was reduced by one log within 0.94 min. Results from detection of viral capsid proteins, hexon and penton, by Western blotting and immunochromatography were unaffected by the plasma treatment. In contrast, analysis using the polymerase chain reaction suggested that plasma treatment damages the viral genomic DNA. Reactive chemical products (hydrogen peroxide, nitrate, and nitrite), ultraviolet light (UV-A) and slight temperature elevations were observed during the operation of the gas plasma device. Viral titer versus intensity of each potential virucidal factor were used to identify the primary mechanism of disinfection of adenovirus. Although exposure to equivalent levels of UV-A or heat treatment did not inactivate adenovirus, treatment with a relatively low concentration of hydrogen peroxide efficiently inactivated the virus. Our results suggest the nitrogen gas plasma generates reactive chemical products that inactivate adenovirus by damaging the viral genomic DNA. PMID:27322066

Analysis of the power spectral densities (PSD's) of eight 50-hour time series from Apollo 12 lunar surface magnetometer (LSM) and isochronous Explorer 35 Ames magnetometer data points to the existence of a new source of electromagnetic induction in the interior of the moon which is independent of the transverse electric mode. This source is hypothesized to arise from extension of the cavity diamagnetic field into the moon in analogy with the fringing field of a solenoid.

Optical computer aided tomography (CAT) is being investigated as a potential in situ diagnostic for measuring plasma uniformity without making assumptions concerning the plasma symmetry. The presence of an opaque vacuum chamber wall severely limits the different directions from which optical emission measurements can be made of the plasma. The tomographic inversion problem with restricted optical access is being solved using Tikhonov regularization. The accuracy of this inversion process is investigated for several different observation geometries using theoretical test data generated from known distributions. Optical CAT is applied to an ICP-GEC plasmasource, with all the measurements made through a single large 152 mm diameter window. Axially asymmetric plasma distributions are demonstrated as a function of gas flow rate and gas composition.

In low-pressure inductively coupled argon and oxygen discharges, the plasma density and electron temperature and the electron energy distribution function (EEDF) were obtained by using a cylindrical electric probe. The plasma densities were determined by various methods to interpret the probe current-voltage characteristic curve: the EEDF integration, the electron saturation current, the ion current at the floating potential, and the orbital-motion-limited (OML) ion current. Quite a good agreement exists between the plasma densities determined by various classical methods. Although the probe technique has some limitation in electronegative plasmas, the plasma densities determined from OML theory compare well with those measured by the ion saturation current at the floating potential in the oxygen discharges. In addition, the EEDFs of inductively coupled Ar and oxygen plasmas are observed to be nearly Maxwellian at the pressure range of 1-40 mTorr.

Electromagnetic induction in a laterally homogeneous earth is analyzed in terms of a source field with finite dimensions. Attention is focused on a time-varying two-dimensional current source directed parallel to the strike of a two-dimensional anomalous structure within the earth, i.e., the E-parallel mode. The spatially harmonic source field is expressed as discontinuities in the magnetic (or electric) field of the current in the source. The model is applied to describing the magnetic gradients across megatectonic features, and may be used to predict the magnetic fields encountered by a satellite orbiting above the ionosphere.

An extreme-ultraviolet radiation source based on a xenon pinch plasma is discussed with respect to the demands on a radiation source for extreme-ultraviolet lithography. Operation of the discharge in a self-igniting-plasma mode and omitting a switch permits a very effective and low-inductive coupling of the electrically stored energy to the electrode system. The xenon plasma exhibits broadband emission characteristics that offer radiation near 11 and 13 nm. Both wavelengths are useful in combination with beryllium- and silicon-based multilayer mirrors. The plasma emits approximately 74 mW/sr at 11.5 nm and 40 mW/sr at 13.5 nm in a bandwidth of 2% when operated at a repetition frequency of 120 Hz. The source size is less than 500 microm in diameter (FWHM) when viewed from the axial direction. The pulse-to-pulse stability is better than 3.6%. First results with a repetition rate of as much as 6 kHz promise the possibility of scaling to the required emission power for extreme-ultraviolet lithography. PMID:18349959

The exhaust of the source flowing into vacuum was measured by Thomson scattering diagnosis. Mean electron temperatures and densities were found to be 4-8 eV and of order ten to the 13th power cm/3 respectively over the 8 cm exhaust diameter at 30 cm from the source. Large shot to shot variations were noted. After a transient spike passes, these conditions persist during the power time of 125 microsecond. These exhaust conditions are marginal for evaluation of a proposed near resonant charge exchange pumped laser theory.

The procedure for the determination of {sup 99}Tc inductively coupled plasma-mass spectrometry (ICP-MS) was based on the modification of a variety of available separation techniques. Standard Ru and Rh solutions were used for checking decontaminations and instrument response respectively. Technetium-99 and {sup 95m}Tc tracers were applied as yield monitors using ICP-MS and gamma-ray spectrometry respectively. Percent recoveries are reported for a variety of radiochemical separation procedures for water (58-83%), seaweed (10-76%), and for soil matrices (19-79%).

A carboxymethylated polyethylenimine-polylmethylenepolyphenylene isocyanate chelating ion exchange resin was prepared, characterized, and used for metals preconcentration for inductively coupled plasma spectrometry. The uptake of copper, cadmium, lead, and zinc by the resin was quantitative in the presence of high concentrations of ammonium, calcium, magnesium, potassium, sodium, and acetate and citrate salts. These metals could be collected from artificial seawater, Dead Sea water, and dissolved bone with a recovery of nearly 100%. The resin also chelates heavy metals and rare earths. Complexed metals can be eluted from the resin column with strong acids. The resin does not change volume with ionic form changes and can be regenerated for repeated use.

The purpose of this trip to LECO Corporation was to test the non-matrix matched calibration method and the principal component analysis (PCA) method on a laser ablation-inductively coupled plasma-time of flight mass spectrometry (LA-ICP-TOFMS) system. An LA-ICP-TOFMS system allows for multielement single-shot analysis as well as spatial analysis on small samples, because the TOFMS acquires an entire mass spectrum for all ions extracted simultaneously from the ICP. The TOFMS system differs from the double-focusing mass spectrometer, on which the above methods were developed, by having lower sensitivity and lower mass resolution.

The nanoscale dry etching of germanium was investigated by using inductively coupled CF4 plasma and electron-beam lithography. The optimal dose of PMMA as E-beam lithography resist was ˜200 mC/cm2. When ICP Power was 200W, CF4 gas flow rate was 40 sccm, and process pressure was 20 mTorr, it had a smooth surface and good etch rate. The etching selectivity of Ge wafer to PMMA resist was as low as ˜1.5. Various sub-100 nm dry-etching patterns have been obtained. SEM pictures showed good profile qualities with a smooth etching sidewall and ultrasmall etching features.

In an interlaboratory test, inductively coupled plasma atomic emission spectrometry (ICP-AES) was compared with flame atomic absorption spectrometry and molecular absorption spectrophotometry for the determination of 17 major and trace elements in 100 filtered natural water samples. No unacceptable biases were detected. The analysis precision of ICP-AES was found to be equal to or better than alternative methods. Known-addition recovery experiments demonstrated that the ICP-AES determinations are accurate to between plus or minus 2 and plus or minus 10 percent; four-fifths of the tests yielded average recoveries of 95-105 percent, with an average relative standard deviation of about 5 percent.

A new calibration method to obtain the electron density from Thomson scattering on an inductively coupled plasma is discussed. Raman scattering of nitrogen is used for recovering the Rayleigh scattering signal. This has the advantage that no corrections are necessary for stray light, like with other calibration methods, using the direct measured Rayleigh scattering signal on a well-known gas. It is shown that electron densities and electron temperatures can be measured with an accuracy of about 15% in density and of about 150 K in temperature. {copyright} {ital 1995} {ital American} {ital Institute} {ital of} {ital Physics}.

Inductively coupled plasma mass spectrometry (ICP-MS) was used for the analysis of two marine biological reference materials (dogfish liver tissue (DOLT-1) and dogfish muscle tissue (DORM-1)). The materials were put into solution by digestion in a nitric acid/hydrogen peroxide mixture. Thirteen elements (Na, Mg, Cr, Fe, Mn, Co, Ni, Cu, Zn, As, Cd, Hg, and Pb) were then determined. Accurate results were obtained by standard additions or isotope dilution techniques for all of these elements in DORM-1 and for all but Cr in DOLT-1.

Time resolved signals in laser ablation inductively coupled plasma mass spectrometry (LA-ICP-MS) are studied to determine the influence of experimental parameters on ICP-induced fractionation effects. Differences in sample composition and morphology, i.e., ablating brass, glass, or dust pellets, have a profound effect on the time resolved signal. Helium transport gas significantly decreases large positive signal spikes arising from large particles in the ICP. A binder for pellets also reduces the abundance and amplitude of spikes in the signal. MO{sup +} ions also yield signal spikes, but these MO{sup +} spikes generally occur at different times from their atomic ion counterparts.

The paper describes analytical methods developed for the production date determination of uranium-based nuclear materials by the measurement of 230Th/234U isotope ratio. An improved sample preparation method for the destructive analysis involving extraction chromatographic separation with TEVA resin was applied prior to the measurement by isotope dilution inductively coupled plasma sector field mass spectrometry (ICP-SFMS). The results obtained were compared with the direct, quasi-non-destructive measurement using laser ablation ICP-SFMS technique for age determination. The advantages and limitations of both methods are discussed. PMID:17765059

This work investigates the isotropic etching properties in inductively coupled plasma (ICP) etcher for microneedle arrays fabrication. The effects of process variables including powers, gas and pressure on needle structure generation are characterized by factorial design of experiment (DOE). The experimental responses of vertical etching depth, lateral etching length, ratio of vertical etching depth to lateral etching length and photoresist etching rate are reported. The relevance of the etching variables is also presented. The obtained etching behaviours for microneedle structure generation will be applied to develop recipes to fabricate microneedles in designed dimensions.

A fusion reactor is described that utilizes compression and heating of an ionized thermonuclear fuel by an externally applied magnetic field, thus avoiding reliance on the pinch effect and its associated instability problems. The device consists of a gas-confining ceramic container surrounded by a single circumferential coil having a shape such as to produce a magnetic mirror geometry. A sinusoidally-oscillating, exponentially-damped current is passed circumferentially around the container, through the coil, inducing a circumferential current in the gas. Maximum compression and plasma temperature are obtained at the peak of the current oscillations, coinciding with maximum magnetic field intensity. Enhanced temperatures are obtained in the second and succeeding half cycles because the thermal energy accumulates from one half cycle to the next. (AEC)

The recent discovery of Type II spicules has generated considerable excitement. It has even been suggested that these ejections can account for a majority of the hot plasma observed in the corona, thus obviating the need for "coronal" heating. If this is the case, however, then there should be observational consequences. We have begun to examine some of these consequences and find reason to question the idea that spicules are the primary source of hot coronal plasma.

E → H transition power and density were investigated at various argon pressures in inductively coupled plasma (ICP) in a cylindrical interlaid chamber. The transition power versus the pressure shows a minimum transition power at 4 Pa (ν/ω=1) for argon. Then the transition density hardly changes at low pressures (ν/ω≪1), but it increases clearly when argon pressure exceeds an appropriate value. In addition, both the transition power and transition density are lower in the re-entrant configuration of ICP compared with that in the cylindrical configuration of ICP. The result may be caused from the decrease of stochastic heating in the re-entrant configuration of ICP. This work is useful to understand E → H mode transition and control the transition points in real plasma processes.

We have investigated very low frequency, on the order of one hertz, self-pulsing in alkali-metal inductively-coupled plasmas (i.e., rf-discharge lamps). This self-pulsing has the potential to significantly vary signal-to-noise ratios and (via the ac-Stark shift) resonant frequencies in optically pumped atomic clocks and magnetometers (e.g., the atomic clocks now flying on GPS and Galileo global navigation system satellites). The phenomenon arises from a nonlinear interaction between the atomic physics of radiation trapping and the plasma's electrical nature. To explain the effect, we have developed an evaporation/condensation theory (EC theory) of the self-pulsing phenomenon.

Coaxial Helicity Injection (CHI) has been successfully used in the National Spherical Torus Experiment (NSTX) for a demonstration of closed flux current generation without the use of the central solenoid. The favorable properties of the Spherical Torus (ST) arise from its very small aspect ratio. However, small aspect ratio devices have very restricted space for a substantial central solenoid. Thus methods for initiating the plasma current without relying on induction from a central solenoid are essential for the viability of the ST concept. CHI is a promising candidate for solenoid-free plasma startup in a ST. The method has now produced closed flux current up to 160 kA verifying the high current capability of this method in a large ST built with conventional tokamak components.

A model of the steady-state interaction between the solar wind and an electrically conducting body having neither an atmosphere nor an intrinsic magnetic field sufficient enough to deflect the plasma flow is presented which considers some effects of a plasma surface sheath on unipolar induction. The Sonett-Colburn (1967, 1968) unipolar dynamo model is reviewed, and it is noted that the unipolar dynamo response of an electrically conducting body in the solar wind's motional field can be controlled by sheath effects in certain cases where the body radius is less than a certain critical value. It is shown that sheath effects do not limit the unipolar response of the moon or Mercury since their body radii are much larger than their critical radii. Sheath effects are also considered for asteroids, the Martian satellites, the irregular Jovian satellites, the outer satellites of Saturn, and meteorite parent bodies in a primordial enhanced solar wind.

The self-absorption of spectral lines was studied with up to date multi-element inductively coupled plasma atomic emission spectrometry (ICP-AES) instrumentation using radial and axial viewing of the plasma, as well, performing line peak height and line peak area measurements. Two resonance atomic and ionic lines of Cd and Mg were studied, the concentration range was extended up to 2000 mg/L. At the varying analyte concentration, constant matrix concentration of 10,000 mg/L Ca was ensured in the pneumatically nebulized solutions. The physical and the phenomenological formulation of the emission analytical function is overviewed and as the continuity of the earlier results the following equation is offered:

Laser ablation of pressed soil pellets was examined as a means of direct sample introduction to enable inductively coupled plasma mass spectrometry (ICP-MS) screening of soils for residual depleted uranium (DU) contamination. Differentiation between depleted uranium, an anthropogenic contaminant, and naturally occurring uranium was accomplished on the basis of measured 235U/238U isotope ratios. The amount of sample preparation required for laser ablation is considerably less than that typically required for aqueous sample introduction. The amount of hazardous laboratory waste generated is diminished accordingly. During the present investigation, 235U/238U isotope ratios measured for field samples were in good agreement with those derived from gamma spectrometry measurements. However, substantial compensation was required to mitigate the effects of impaired pulse counting attributed to sample inhomogeneity and sporadic introduction of uranium analyte into the plasma. PMID:14611049

Inductively coupled plasma (ICP) etching has distinct advantages over reactive ion etching in that the etching rates are considerably higher, the uniformity is much better, and the sidewalls of the etched material are highly anisotropic due to the higher plasma density and lower operating pressure. Therefore, ICP etching is a promising process for pattern transfer required during microelectronic and optoelectronic fabrication. Resonator-quantum well infrared photodetectors (R-QWIPs) are the next generation of QWIP detectors that use resonances to increase the quantum efficiency (QE). To fabricate R-QWIP focal plane arrays (FPAs), two optimized ICP etching processes are developed. Using these etching techniques, we have fabricated R-QWIP FPAs of several different formats and pixel sizes with the required dimensions and completely removed the substrates of the FPAs. Their QE spectra were tested to be 30 to 40%. The operability and spectral nonuniformity of the FPA is ˜99.5 and 3%, respectively.

For modeling of low-pressure Inductively Coupled Plasma (ICP) discharges, a number of approaches have been proposed with varying degree of complexity. A self-consistent 1-D model was developed in this work to study the effects of non-local electron conductivity on power absorption and plasma density profiles in a planar inductively coupled argon discharge at low pressures (< 10 mTorr). The self-consistent kinetic description of the discharge included three modules: (1) an EEDF module to compute a non-Maxwellian EEDF, (2) a non-local electron conductivity module which predicted current distribution in the plasma as an integral over the electric field and solved Maxwell's equations to find the self-consistent electric field as well as the non-local power deposition profile and (3) a Heavy Species Transport (HST) module which solved for the ion and metastable atom density and velocity. Results from the full model were then compared with those obtained by using a local conductivity model (Ohm's law) for the RF current. For 10 mTorr, the EEDF was found to be almost Maxwellian with electron temperature ˜ 3 V. As a result, the plasma density profiles obtained from the local and non-local cases were almost identical for the same total power. Interestingly, a similar result was obtained even for a pressure of 1 mTorr where the EEDF was non-Maxwellian. This suggests that as far as species density and flux are concerned, local conductivity models, with lesser computational expense, can be employed even in the non-local regime. Comparisons between simulation and experiment for RF field and current density showed better agreement for non-local model compared with local model. A two-dimensional (r,z) continuum model was then developed to study the spatio-temporal dynamics of a pulsed power (square-wave modulated) discharge in argon (electropositive) and chlorine (electronegative) sustained in an inductively coupled plasma (ICP) reactor with a planar coil. The self

This note addresses the idea of a photon source that is based on an e+e-plasma created by co-propagating beams of e+ and e-. The plasma has a well-defined temperature, and the thermal distribution of the charged particles is used to average over the relative velocity cross section multiplied by the relative velocity. Two relevant cross sections are the direct “free-free” annihilation of e+e- pairs in the plasma, and the radiative recombination of e+e- pairs into positronium (Ps) which subsequently undergoes annihilation.

On the basis of the global model, the influences of driving voltage and frequency on electron heating in geometrically symmetrical dual capacitively coupled radio frequency plasma have been investigated. Consistent with the experimental and simulation results, non-monotonic behavior of dc self bias and plasma heating with increasing high frequency is observed. In addition to the local maxima of plasma parameters for the integer values of the ratio between the frequencies ({xi}), ourstudies also predict local maxima for odd integer values of 2{xi} as a consequence of the electrical asymmetry effect produced by dual frequency voltage sources.

A "plasma needle" is a cold plasmasource operating at atmospheric pressure. Such sources interact strongly with living cells, but experimental studies on bacterial samples show that this interaction has a surprising pattern resulting in circular or annular killing structures. This paper presents numerical simulations showing that this pattern occurs because biologically active reactive oxygen and nitrogen species are produced dominantly where effluent from the plasma needle interacts with ambient air. A novel solution strategy is utilised coupling plasma produced neutral (uncharged) reactive species to the gas dynamics solving for steady state profiles at the treated biological surface. Numerical results are compared with experimental reports corroborating evidence for atomic oxygen as a key bactericidal species. Surface losses are considered for interaction of plasma produced reactants with reactive solid and liquid interfaces. Atomic oxygen surface reactions on a reactive solid surface with adsorption probabilities above 0.1 are shown to be limited by the flux of atomic oxygen from the plasma. Interaction of the source with an aqueous surface showed hydrogen peroxide as the dominant species at this interface.

A “plasma needle” is a cold plasmasource operating at atmospheric pressure. Such sources interact strongly with living cells, but experimental studies on bacterial samples show that this interaction has a surprising pattern resulting in circular or annular killing structures. This paper presents numerical simulations showing that this pattern occurs because biologically active reactive oxygen and nitrogen species are produced dominantly where effluent from the plasma needle interacts with ambient air. A novel solution strategy is utilised coupling plasma produced neutral (uncharged) reactive species to the gas dynamics solving for steady state profiles at the treated biological surface. Numerical results are compared with experimental reports corroborating evidence for atomic oxygen as a key bactericidal species. Surface losses are considered for interaction of plasma produced reactants with reactive solid and liquid interfaces. Atomic oxygen surface reactions on a reactive solid surface with adsorption probabilities above 0.1 are shown to be limited by the flux of atomic oxygen from the plasma. Interaction of the source with an aqueous surface showed hydrogen peroxide as the dominant species at this interface.

A two-dimensional fluid plasma model for a transformer-coupled toroidal plasmasource is described. Ferrites are used in this device to improve the electromagnetic coupling between the primary coils carrying radio frequency (rf) current and a secondary plasma loop. Appropriate components of the Maxwell equations are solved to determine the electromagnetic fields and electron power deposition in the model. The effect of gas flow on species transport is also considered. The model is applied to 1 Torr Ar/NH{sub 3} plasma in this article. Rf electric field lines form a loop in the vacuum chamber and generate a plasma ring. Due to rapid dissociation of NH{sub 3}, NH{sub x}{sup +} ions are more prevalent near the gas inlet and Ar{sup +} ions are the dominant ions farther downstream. NH{sub 3} and its by-products rapidly dissociate into small fragments as the gas flows through the plasma. With increasing source power, NH{sub 3} dissociates more readily and NH{sub x}{sup +} ions are more tightly confined near the gas inlet. Gas flow rate significantly influences the plasma characteristics. With increasing gas flow rate, NH{sub 3} dissociation occurs farther from the gas inlet in regions with higher electron density. Consequently, more NH{sub 4}{sup +} ions are produced and dissociation by-products have higher concentrations near the outlet.

Plasma ion assisted-deposition (PIAD) is a combination of conventional thermal evaporation deposition and plasma-beam surface modification; it serves as a well-established technology for the creation of high quality coatings on mirrors, lenses, and other optical devices. It is closely related to ion-assisted deposition to the extent that electrons preserve quasineutrality of the ion beam. This paper investigates the Advanced PlasmaSource (APS), a plasma beam source employed for PIAD. A field enhanced glow discharge generates a radially expanding plasma flow with an ion energy of about 80-120 eV. Charge exchange collisions with the neutral background gas (pressure 0.1 Pa and below) produce a cold secondary plasma, which expands as well. A model is developed which describes the primary ions by a simplified Boltzmann equation, the secondary ions by the equations of continuity and momentum balance, and the electrons by the condition of Boltzmann equilibrium. Additionally, quasineutrality is assumed. The model can be reduced to a single nonlinear differential equation for the velocity of the secondary ions, which has several removable singularities and one essential singularity, identified as the Bohm singularity. Solving the model yields macroscopic plasma features, such as fluxes, densities, and the electrical field. An add-on Monte-Carlo simulation is employed to calculate the ion energy distribution function at the substrate. All results compare well to experiments conducted at a commercial APS system.

Helicon plasmas are useful as hot, dense sources requiring low magnetic fields. Since Boswell's^1 use of helicon waves in low pressure gas, research has strived to determine the wave-plasma coupling mechanism. Trivelpiece-Gould (TG) modes^2 remain a strong candidate. An inverted helicon plasmasource uses a Nagoya Type III dielectric-covered helicon antenna, placed within a vacuum chamber. The antenna is 8.2 cm long, 2.2 cm in radius, using an frequency of 13.56 MHz. Basic dispersion relation theory is developed as an extension of existing helicon theory which includes TG modes and annular helicons^3. With this arrangement, diagnostic measurements are made inside and outside the antenna volume. To characterize the plasma, an RF-compensated Langmuir probe measures ne and Te, and 3 B-dot probes measure the field shape of the R, Theta and Z components about the antenna region in the R and Z directions. Typical ne and Te in an Ar plasma were found to be 3x10^18/m^3 and 3 eV. The goal of this work is to find another configuration to determine the method of efficient plasma heating. [1] R.W. Boswell, Phys. Lett. 33A, 457 (1970) [2] A.W. Trivelpiece and R.W. Gould, Jour. App. Phys. 30 (11) (1959) [3] M. Yano and M.L.R. Walker, Phys. of Plasmas. 13 (063501) (2006)

THE inductive pulsed plasma thruster (IPPT) is an electrodeless space propulsion device where a capacitor is charged to an initial voltage and then discharged producing a high current pulse through a coil. The field produced by this pulse ionizes propellant, inductively driving current in a plasma located near the face of the coil. Once the plasma is formed it can be accelerated and expelled at a high exhaust velocity by the electromagnetic Lorentz body force arising from the interaction of the induced plasma current and the magnetic field produced by the current in the coil. In the present work, we present a summary of the IPPT research and development conducted at NASA's Marshall Space Flight Center (MSFC). As a higher-power, still relatively low readiness level system, there are many issues associated with the eventual deployment and use of the IPPT as a primary propulsion system on spacecraft that remain to be addressed. The present program aimed to fabricate and test hardware to explore how these issues could be addressed. The following specific areas were addressed within the program and will be discussed within this paper. a) Conical theta-pinch IPPT geometry thruster configuration. b) Repetition-rate multi-kW thruster pulsing. c) Long-lifetime pulsed gas valve. d) Fast pulsed gas valve driver and controller. e) High-voltage, repetitive capacitor charging power processing unit. During the course of testing, a number of specific tests were conducted, including several that, to our knowledge, have either never been previously conducted (such as multi-KW repetition-rate operation) or have not been performed since the early 1990s (direct IPPT thrust measurements).2 Conical theta-pinch IPPT thrust stand measurements are presented in Fig. 1 while various time-integrated and time

In experiments with RF saddle antenna surface plasmasources (SPS), the efficiency of H{sup -} ion generation was increased by up to a factor of 5 by plasma electrode 'activation', without supplying additional Cs, by heating the collar to high temperature for several hours using hot air flow and plasma discharge. Without cracking or heating the cesium ampoule, but likely with Cs recovery from impurities, the achieved energy efficiency was comparable to that of conventionally cesiated SNS RF sources with an external or internal Cs supply. In the experiments, optimum cesiation was produced (without additional Cs) by the collection and trapping of traces of remnant cesium compounds from SPS surfaces. Such activation by accumulation of impurities on electrode surfaces can be a reason for H{sup -} emission enhancement in other so-called 'volume' negative ion sources.

Experiments on hydrogen negative ions production in the large radio-frequency negative ion source with cesium seed are described. The system of directed cesium deposition to the plasma grid periphery was used. The small cesium seed (˜0.5 G) provides an enhanced H- production during a 2 month long experimental cycle. The gradual increase of negative ion yield during the long-term source runs was observed after cesium addition to the source. The degraded H- production was recorded after air filling to the source or after the cesium washing away from the driver and plasma chamber walls. The following source conditioning by beam shots produces the gradual recovery of H- yield to the high value. The effect of H- yield recovery after cesium coverage passivation by air fill was studied. The concept of cesium coverage replenishment and of H- yield recovery due to sputtering of cesium from the deteriorated layers is discussed.

Experiments on hydrogen negative ions production in the large radio-frequency negative ion source with cesium seed are described. The system of directed cesium deposition to the plasma grid periphery was used. The small cesium seed (∼0.5 G) provides an enhanced H(-) production during a 2 month long experimental cycle. The gradual increase of negative ion yield during the long-term source runs was observed after cesium addition to the source. The degraded H(-) production was recorded after air filling to the source or after the cesium washing away from the driver and plasma chamber walls. The following source conditioning by beam shots produces the gradual recovery of H(-) yield to the high value. The effect of H(-) yield recovery after cesium coverage passivation by air fill was studied. The concept of cesium coverage replenishment and of H(-) yield recovery due to sputtering of cesium from the deteriorated layers is discussed. PMID:26932015

Comparisons between measurements and spatially-averaged (0D) simulations of low-pressure Ar and Cl2 pulsed-plasmas in an industrial inductively coupled reactor are reported. Our analysis focuses on the impact of the pulsing parameters (frequency f, duty cycle dc) on the chemical reactivity of the plasma and on the ion fluxes to the walls. Charged particle densities and ion fluxes are highly modulated when the plasma is pulsed at 1 kHz < f < 20 kHz. In rare gas Ar plasmas, the ion flux rise time is short (50 μs), therefore the dc has almost no influence on the ion flux value during the pulse. By contrast, in molecular electronegative Cl2 plasmas, both the value and rise/decay time of the ion flux during the on and off-periods depend strongly on the dc. This is because in Cl2 both the plasma chemistry and electronegativity depend on the dc. During the off-period, the electron density drops much faster than the negative ion density, leading to a large increase in plasma electronegativity. A minimum afterglow time (75 µs) is required for an ion-ion plasma to form and for the sheath to collapse, exposing the walls and wafers to a negative ion flux. The positive ion flux is 3 to 10 times smaller in Cl2 than in Ar for the same operating conditions. In contrast with charged species, the radical (Cl) kinetics are slow and thus the radical density is hardly modulated for f > 1 kHz. However, the dc strongly influences the Cl2/Cl density ratio and is an excellent knob for controlling the plasma chemical reactivity: the higher the dc the higher the Cl density. The trends and quantities in the 0D simulation are in close agreement with experiments. This proves the capacity of global models to reproduce the fundamental features of pulsed plasmas in simple chemistries and to assist the development of pulsed processes.

Experiments conducted with a magnetoplasma thruster in which plasma production and acceleration were treated separately indicate that different plasmasource geometries have the most direct effect on energy conversion efficiency. An analysis of cup and tube type constraining structures shows the cup type to incur the greatest losses. It is noted that a parallel rail-type open structure such as that employed by the Chinese MDT-2A thruster leads to substantial discharge process dispersion. It is emphasized that the type and performance characteristics of a plasmasource have a critical influence on thruster behavior. 5 references.

A simple economical 2.45 GHz microwave system has been developed and utilized for preionization on the Korea Advanced Institute of Science and Technology (KAIST)-TOKAMAK. The magnetron microwave source was obtained from a widely used, household microwave oven. Since ac operation of the magnetron is not suitable for tokamak application, the magnetron cathode bias circuit was modified to obtain continuous and stable operation of the magnetron for several hundred milliseconds. Application of the developed microwave system to KAIST-TOKAMAK resulted in a reduction of ohmic flux consumption.

In this article the effect of different engineering parameters of an rf-driven ion sources with external spiral antenna and quartz disk rf-window are studied. Paper consists of three main topics: The effect of source geometry on the operation gas pressure, the effect of source materials and magnetic confinement on extracted current density and ion species and the effect of different antenna geometries on the extracted current density. The operation gas pressure as a function of the plasma chamber diameter, was studied. This was done with three cylindrical plasma chambers with different inner diameters. The chamber materials were studied using two materials, aluminum and alumina (AlO{sub 2}). The removable 14 magnet multicusp confinement arrangement enabled us to compare the effects of the two wall materials with and without the magnetic confinement. Highest proton fraction of {approx} 8% at 2000 W of rf-power and at pressure of 1.3 Pa was measured using AlO{sub 2} plasma chamber and no multicusp confinement. For all the compared ion sources at 1000W of rf-power, source with multicusp confinement and AlO2 plasma chamber yields highest current density of 82.7 mA/cm{sup 2} at operation pressure of 4 Pa. From the same source highest measured current density of 143 mA/cm{sup 2} at 1.3 Pa and 2200W of rf-power was achieved. Multicusp confinement increased the maximum extracted current up to factor of two. Plasma production with different antenna geometries was also studied. Antenna tests were performed using same source geometry as in source material study with AlO{sub 2} plasma chamber and multicusp confinement. The highest current density was achieved with 4.5 loop solenoid antenna with 6 cm diameter. Slightly lower current density with lower pressure was achieved using tightly wound 3 loop spiral antenna with 3.3 cm ID and 6 cm OD.

Multi-scale turbulence properties are altered as core toroidal rotation and ExB shearing rates are systematically varied in relatively high-beta, advanced-inductive H-mode plasmas on DIII-D. The energy confinement time increases by 50% as the toroidal rotation is increased by a factor of 2.5 (to Mo = 0.5), while core turbulence, measured with BES, DBS and PCI, decreases in dimensionlessly matched plasmas (β ~ 2 . 7 ,q95 = 5 . 1). Low-wavenumber (k⊥ρ< 1) density fluctuations obtained with BES near mid-radius exhibit significant amplitude reduction along with a slight reduction in radial correlation length at higher rotation, while fluctuations in the outer region of the plasma, ρ > 0 . 6 , exhibit, but little change in amplitude. Fluctuation measurements and transport behavior will be quantitatively compared with nonlinear simulations. The resulting reduction in confinement will need to be ascertained for low-rotating plasmas such as ITER and FNSF. Work supported by the US DOE under DE-FG02-08ER54999, DE-FG02-07ER54917, DE-FC02-04ER54698, DE-FG02-08ER54984 and DE-AC02-09CH11466.

Inductively coupled plasma mass spectrometry (ICP-MS) is widely used in the analysis of biological samples (whole blood, serum, blood plasma, urine, tissues, etc.) and pharmaceutical drugs. The shortcomings of this method related to spectral and non-spectral interferences are manifested in full measure in determination of the target analytes in these complex samples strongly differing in composition. The spectral interferences are caused by similarity of masses of the target component and sample matrix components. Non-spectral interferences are related to the influence of sample matrix components on the physicochemical processes taking place during formation and transportation of liquid sample aerosols into the plasma, on the value and spatial distribution of plasma temperature and on the transmission of the ion beam from the interface to mass spectrometer detector. The review is devoted to analysis of different mechanisms of appearance of non-spectral interferences and to ways for their minimization or elimination. Special attention is paid to the techniques of biological sample preparation, which largely determine the mechanisms of the influence of sample composition on the results of element determination. The ways of lowering non-spectral interferences by instrumental parameter tuning and application of internal standards are considered. The bibliography includes 189 references.

We propose a method to measure the densities of vibrationally excited Cl2(v) molecules in levels up to v = 3 in pure chlorine inductively coupled plasmas (ICPs). The absorption continuum of Cl2 in the 250–450 nm spectral range is deconvoluted into the individual components originating from the different vibrational levels of the ground state, using a set of ab initio absorption cross sections. It is shown that gas heating at constant pressure is the major depletion mechanism of the Cl2 feedstock in the plasma. In these line-integrated absorption measurements, the absorption by the hot (and therefore rarefied) Cl2 gas in the reactor centre is masked by the cooler (and therefore denser) Cl2 near the walls. These radial gradients in temperature and density make it difficult to assess the degree of vibrational excitation in the centre of the reactor. The observed line-averaged vibrational distributions, when analyzed taking into account the radial temperature gradient, suggest that vibrational and translational degrees of freedom in the plasma are close to local equilibrium. This can be explained by efficient vibrational-translational (VT) relaxation between Cl2 and Cl atoms. Besides the Cl2(v) absorption band, a weak continuum absorption is observed at shorter wavelengths, and is attributed to photodetachment of Cl‑ negative ions. Thus, line-integrated densities of negative ions in chlorine plasmas can be directly measured using broad-band absorption spectroscopy.

Statistically designed amphiphilic copolymer coatings were deposited onto Thermanox, Si wafer, and quartz crystal microbalance (QCM) substrates via Plasma Enhanced Chemical Vapor Deposition of 1H,1H,2H,2H-perfluorodecyl acrylate and diethylene glycol vinyl ether in an Inductively Excited Low Pressure Plasma reactor. Plasma deposited amphiphilic coatings were characterized by Field Emission Scanning Electron Microscopy, X-ray Photoelectron Spectroscopy, Atomic Force Microscopy, and Water Contact Angle techniques. The surface energy of the coatings can be adjusted between 12 and 70 mJ/m(2). The roughness of the coatings can be tailored depending on the plasma mode used. A very smooth coating was deposited with a CW (continuous wave) power, whereas a rougher surface with R(a) in the range of 2 to 12 nm was deposited with the PW (pulsed wave) mode. The nanometer scale roughness of amphiphilic PFDA-co-DEGVE coatings was found to be in the range of the size of the two proteins namely BSA and lysozyme used to examine for the antifouling properties of the surfaces. The results show that the statistically designed surfaces, presenting a surface energy around 25 mJ/m(2), present no adhesion with respect to both proteins measured by QCM. PMID:22029599

Inductively coupled plasmas of CF4:Ar:O2, which have been of importance to material processing, were studied in the GEC cell at 80:10:10, 60:20:20, and 40:30:30 mixture ratios. Radial distributions of plasma potential (V(sub p)), electron and ion number densities (n(sub e) and n(sub i)), electron temperature (T(sub e)), and electron energy distribution functions (EEDFs) were measured in the mid-plane of plasma across the electrodes in the pressure range of 10-50 mTorr, and RF power of 200 and 300 W. V(sub p), n(sub e) and n(sub i), which peak in the center of the plasma, increase with decrease of pressure. T(sub e) also increases with pressure but peaks toward the electrode edge. Both V(sub p) and T(sub e) remain nearly independent of RF power, whereas n(sub e) and n(sub i) increase with power. In all conditions the EEDFs exhibit non-Maxwellian shape and are more like Druyvesteyn form at higher energies. They exhibit a broad lip in the energy range 0-10 eV suggesting an electron loss mechanism, which could be due to via resonance electron attachment processes producing negative ions in this rich electronegative gas mixture. This behavior is more prominent towards the electrode edge.

Inductively coupled plasmas of CF4:Ar:O2, which have been of importance to material processing, were studied in the GEC cell at 80:10:10, 60:20:20, and 40:30:30 mixture ratios. Radial distributions of plasma potential (V(sub p)), electron and ion number densities (n(sub e) and n(sub i), electron temperature (T(sub e)), and electron energy distribution functions (EEDFs) were measured in the mid-plane of plasma across the electrodes in the pressure range of 10-50 mTorr, and RF (radio frequency) power of 200 and 300 W. V(sub p), n(sub e) and n(sub i), which peak in the center of the plasma, increase with decrease of pressure. T(sub e) also increases with pressure but peaks toward the electrode edge. Both V(sub p) and T(sub e) remain nearly independent of RF power, whereas n(sub e) and n(sub i) increase with power. In all conditions the EEDFs exhibit non-Maxwellian shape and are more like Druyvesteyn form at higher energies. They exhibit a broad dip in the energy range 0-10 eV suggesting an electron loss mechanism, which could be due to via resonance electron attachment processes producing negative ions in this rich electronegative gas mixture. This behavior is more prominent towards the electrode edge.

The E to H mode transitions are studied by a hairpin probe and optical emission spectroscopy in inductively coupled CF{sub 4} + Ar plasmas. Electron density, optical emission intensity of Ar, and the voltage and current are measured during the E to H mode transitions. It is found that the electron density and plasma emission intensity increase continuously at low pressure during the E to H mode transition, while they jump up discontinuously at high pressure. Meanwhile, the transition threshold power and △P (the power interval between E and H mode) increase by increasing the pressure. When the ratio of CF{sub 4} increases, the E to H mode transition happens at higher applied power, and meanwhile, the △P also significantly increases. Besides, the effects of CF{sub 4} gas ratio on the plasma properties and the circuit electrical properties in both pure E and H modes were also investigated. The electron density and plasma emission intensity both decrease upon increasing the ratio of CF{sub 4} at the two modes, due to the stronger electrons loss scheme. The applied voltages at E and H modes both increase as increasing the CF{sub 4} gas ratio, however the applied current at two modes behave just oppositely with the gas ratio.

A laser ablation-inductively coupled plasma-mass spectrometric (LA-ICPMS) technique utilizing a titanium-sapphire (TiS) femtosecond laser (fs-laser) has been developed for elemental and isotopic analysis. The signal intensity profile, depth of the ablation pit and level of elemental fractionation were investigated in order to evaluate the analytical capability of the present fs-laser ablation-ICPMS technique. The signal intensity profile of (57)Fe, obtained from iron sulfide (FeS(2)), demonstrated that the resulting signal intensity of (57)Fe achieved by the fs-laser ablation was almost 4-times higher than that obtained by ArF excimer laser ablation under a similar energy fluence (5 J/cm(2)). In fs-laser ablation, there is no significant difference in a depth of the ablation pit between glass and zircon material, while in ArF laser ablation, the resulting crater depth on the zircon crystal was almost half the level than that obtained for glass material. Both the thermal-induced and particle size-related elemental fractionations, which have been thought to be main sources of analytical error in the LA-ICPMS analysis, were measured on a Harvard 91500 zircon crystal. The resulting fractionation indexes on the (206)Pb/(238)U (f(Pb/U)) and (238)U/(232)Th (f(U/Th)) ratios obtained by the present fs-laser ablation system were significantly smaller than those obtained by a conventional ArF excimer laser ablation system, demonstrative of smaller elemental fractionation. Using the present fs-laser ablation technique, the time profile of the signal intensity of (56)Fe and the isotopic ratios ((57)Fe/(54)Fe and (56)Fe/(54)Fe) have been measured on a natural pyrite (FeS(2)) sample. Repeatability in signal intensity of (56)Fe achieved by the fs-laser ablation system was significantly better than that obtained by ArF excimer laser ablation. Moreover, the resulting precision in (57)Fe/(54)Fe and (56)Fe/(54)Fe ratio measurements could be improved by the fs-laser ablation system

A model of pulsed inductiveplasma thrusters consisting of a set of coupled circuit equations and a one-dimensional momentum equation has been used to study the effects of adding a second, parallel capacitor into the system. The equations were nondimensionalized, permitting the recovery of several already-known scaling parameters and leading to the identification of a parameter that is unique to the particular topology studied. The current rise rate through the inductive acceleration coil was used as a proxy measurement of the effectiveness of inductive propellant ionization since higher rise rates produce stronger, potentially better ionizing electric fields at the coil face. Contour plots representing thruster performance (exhaust velocity and efficiency) and current rise rate in the coil were generated numerically as a function of the scaling parameters. The analysis reveals that when the value of the second capacitor is much less than the first capacitor, the performance of the two-capacitor system approaches that of the single-capacitor system. In addition, as the second capacitor is decreased in value the current rise rate can grow to be twice as great as the rise rate attained in the single capacitor case.

A method of analysis of geological materials for the determination of the rare-earth elements using the Inductively coupled plasma mass spectrometric technique (ICP-MS) has been developed. Instrumental parameters and factors affecting analytical results have been first studied and then optimized. Samples are analyzed directly following an acid digestion, without the need for separation or preconcentration with limits of detection of 2-11 ng/g, precision of ?? 2.5% relative standard deviation, and accuracy comparable to inductively coupled plasma emission spectrometry and instrumental neutron activation analysis. A commercially available ICP-MS instrument is used with modifications to the sample introduction system, torch, and sampler orifice to reduce the effects of high salt content of sample solutions prepared from geologic materials. Corrections for isobaric interferences from oxide ions and other diatomic and triatomic ions are made mathematically. Special internal standard procedures are used to compensate for drift in metahmetal oxide ratios and sensitivity. Reference standard values are used to verify the accuracy and utility of the method.

A transport model is developed for nonlocal effects on motion and heating of electrons in inductively coupled plasma reactors. The model is based on the electron momentum equation derived from the Boltzmann equation, retaining anisotropic stress components which in fact are viscous stresses. The resulting model consists of transport equations for the magnitude of electron velocity oscillation and terms representing energy dissipation due to viscous stresses in the electron energy equation. In this model, electrical current is obtained in a nonlocal manner due to viscous effects, instead of Ohm's law or the electron momentum equation without viscous effects, while nonlocal heating of electrons is represented by the viscous dissipation. Computational results obtained by two-dimensional numerical simulations show that nonlocal determination of electrical current indeed is important, and viscous dissipation becomes an important electron heating mechanism at low pressures. It is suspected that viscous dissipation in inductively coupled plasma reactors in fact represents stochastic heating of electrons, and this possibility is exploited by discussing physical similarities between stochastic heating and energy dissipation due to the stress tensor.

Plasma activation of liquids is now being investigated for a variety of biomedical applications. The plasmasources used for this activation can be generally classified as direct (the plasma is in contact with the surface of the liquid) or remote (the plasma does not directly touch the liquid). The direct plasmasource may be a dielectric barrier discharge (DBD) where the surface of the liquid is a floating electrode or a plasma jet in which the ionization wave forming the plasma plume reaches the liquid. The remote plasmasource may be a DBD with electrodes electrically isolated from the liquid or a plasma jet in which the ionization wave in the plume does not reach the liquid. In this paper, a comparison of activation of thin water layers on top of tissue, as might be encountered in wound healing, will be discussed using results from numerical investigations. We used the modeling platform nonPDPSIM to simulate direct plasma activation of thin water layers using DBDs and remote activation using plasma jets using up to hundreds of pulses. The DBDs are sustained in humid air while the plasma jets consist of He/O2 mixtures flowed into humid air. For similar number of pulses and energy deposition, the direct DBD plasmasources produce more acidification and higher production of nitrates/nitrites in the liquid. This is due to the accumulation of NxOy plasma jets, the convective flow removes many of these species prior to their diffusing into the water or reacting to form higher nitrogen oxides. This latter effect is sensitive to the repetition rate which determines whether reactive species formed during prior pulses overlap with newly produced reactive species. in the gas phase. In the plasma jets, the convective flow removes many of these species prior to their diffusing into the water or reacting to form higher nitrogen oxides. This latter effect is sensitive to the repetition rate which determines whether reactive species formed during prior pulses overlap with

Highly ionized plasmas are being used as a medium for charge neutralizing heavy ion beams in order to focus the ion beam to a small spot size. A radio frequency (RF) plasmasource has been built at the Princeton Plasma Physics Laboratory (PPPL) in support of the joint Neutralized Transport Experiment (NTX) at the Lawrence Berkeley National Laboratory (LBNL) to study ion beam neutralization with plasma. The goal is to operate the source at pressures {approx} 10{sup -5} Torr at full ionization. The initial operation of the source has been at pressures of 10{sup -4}-10{sup -1} Torr and electron densities in the range of 10{sup 8}-10{sup 11} cm{sup -3}. Recently, pulsed operation of the source has enabled operation at pressures in the 10{sup -6} Torr range with densities of 10{sup 11} cm{sup -3}. Near 100% ionization has been achieved. The source has been integrated with the NTX facility and experiments have begun.

Researchers at the Lawrence Livermore National Laboratory (LLNL) are developing a flexible, all solid-state pulsed power source that will enable an induction accelerator to produce mulitkiloampere electron beams at a maximum pulse repetition frequency (prf) of 2 MHz. The prototype source consists of three, 15-kV, 4.8-kA solid-state modulators stacked in an induction adder configuration. Each modulator contains over 1300 field-effect transistors (FETs) that quickly connect and disconnect four banks of energy storage capacitors to a magnetic induction core. The FETs are commanded on and off by an optical signal that determines the duration of the accelerating pulse. Further electronic circuitry is provided that resets the magnetic cores in each modulator immediately after the accelerating pulse. The system produces bursts of five or more pulses with an adjustable pulse width that ranges from 200 ns to 2 {micro}s The pulse duty factor within a burst can be as high as 25% while still allowing time for the induction core to reset. The solid-state modulator described above is called ARM-II and is named for the Advanced Radiographic Machine (ARM)-a powerful radiographic accelerator that will be the principal diagnostic device for the future Advanced Hydrotest Facility (AHF).

Helicon plasmas are useful as hot, dense sources requiring low magnetic fields. Since Boswell's^1 use of helicon waves in low pressure gas, no single theory fully explains the wave-plasma coupling mechanism. However, Trivelpiece-Gould modes^2 remain a strong candidate. An inverted geometry helicon plasmasource is further explored, using a dielectric-covered helicon antenna, placed within a vacuum chamber, in contrast to conventional antennas that surround a dielectric cylinder. A Nagoya Type III antenna is used, other antennas are equally feasible. Many industrial advantages of such a system exist; namely, more efficient electromagnets, as well as producing a plasma with a larger radius than the antenna. With this arrangement, diagnostic measurements can be made arbitrarily close to the antenna. To characterize the plasma, an RF-compensated Langmuir probe measures electron temperature and density, while a B-dot probe measures the field shape inside and outside of the antenna region. In addition, optical emission spectroscopy observes changes in plasma intensity for mode jumps, and measures line ratios. 1. R.W. Boswell, Phys. Lett. 33A, 457 (1970) 2. A.W. Trivelpiece and R.W. Gould, Jour. App. Phys. 30 (11) (1959)

Ferroelectric plasmasources in vacuum are known as sources of ablative plasma, formed due to surface discharge. In this paper, observations of a gas discharge mode of operation of the ferroelectric plasmasources (FPS) are reported. The gas discharge appears at pressures between approximately 20 and approximately 80 Torr. At pressures of 1-20 Torr, there is a transition from vacuum surface discharge to the gas discharge, when both modes coexist and the surface discharges sustain the gas discharge. At pressures between 20 and 80 Torr, the surface discharges are suppressed, and FPS operate in pure gas discharge mode, with the formation of almost uniform plasma along the entire surface of the ceramics between strips. The density of the expanding plasma is estimated to be about 1013 cm-3 at a distance of 5.5 mm from the surface. The power consumption of the discharge is comparatively low, making it useful for various applications. This paper also presents direct measurements of the yield of secondary electron emission from ferroelectric ceramics, which, at low energies of primary electrons, is high and dependent on the polarization of the ferroelectric material

A new version of a Constricted PlasmaSource is described,characterized by all metal-ceramic construction, a linear slit exit of180 mm length, and cw-operation (typically 50 kHz) at an average power of1.5 kW. The plasmasource is here operated with oxygen gas, producingstreaming plasma that contains mainly positive molecular and atomic ions,and to a much lesser degree, negative ions. The maximum total ion currentobtained was about 0.5 A. The fraction of atomic ions reached more than10 percent of all ions when the flow rate was less then 10 sccm O2,corresponding to a chamber pressure of about 0.5 Pa for the selectedpumping speed. The energy distribution functions of the different ionspecies were measured with a combinedmass spectrometer and energyanalyzer. The time-averaged distribution functions were broad and rangedfrom about 30eV to 90 eV at 200 kHz and higher frequencies, while theywere only several eV broad at 50 kHz and lower frequencies, with themaximum located at about 40 eV for the grounded anode case. This maximumwas shifted down to about 7 eV when the anode was floating, indicatingthe important role of the plasma potential for the ion energy for a givensubstrate potential. The source could be scaled to greater length and maybe useful for functionalization of surfaces and plasma-assisteddeposition of compound films.

Aims: We present a new method for determining the magnetic field strength and plasma density in the solar zebra radio sources. Methods: Using the double plasma resonance (DPR) model of the zebra emission, we analytically derived the equations for computing the gyroharmonic number s of selected zebra lines and then solved these equations numerically. Results: The method was successfully tested on artificially generated zebras and then applied to observed ones. The magnetic field strength and plasma density in the radio sources were determined. Simultaneously, we evaluated the parameter Lnb = 2Lb/ (2Ln - Lb), where Ln and Lb are the characteristic scale-heights of the plasma density and magnetic field strength in the zebra source, respectively. Computations show that the maximum frequency of the low-polarized zebras is about 8 GHz, in very good agreement with observations. For the high-polarized zebras, this limit is about four times lower. Microwave zebras are preferentially generated in the regions with steep gradients of the plasma density, such as in the transition region. In models with smaller density gradients, such as those with a barometric density profile, the microwave zebras cannot be produced owing to the strong bremsstrahlung and cyclotron absorptions. We also show that our DPR model is able to explain the zebras with frequency-equidistant zebra lines.

Plasmasource performance parameters, including plasma ejection density and velocity, greatly affect the operation of a short-conduction-time plasma opening switch (POS). In this paper, the plasmasource used in the POS of Qiangguang I generator is chosen as the study object. At first the POS working process is analyzed. The result shows that the opening performance of the POS can be improved by increasing the plasma ejection velocity and decreasing the plasma density. The influence of the cable plasma gun structure and number on the plasma ejection parameters is experimentally investigated with two charge collectors. Finally a semi-empirical model is proposed to describe the experimental phenomenon.

A sensitive analytical method for determining the artificial radionuclides 90Sr, 239Pu and 240Pu at the ultratrace level in groundwater samples from the Semipalatinsk Test Site area in Kazakhstan by double-focusing sector field inductively coupled plasma mass spectrometry (ICP-SFMS) was developed. In order to avoid possible isobaric interferences at m/z 90 for 90Sr determination (e.g. 90Zr+, 40Ar50Cr+, 36Ar54Fe+, 58Ni16O2+, 180Hf2+, etc.), the measurements were performed at medium mass resolution under cold plasma conditions. Pu was separated from uranium by means of extraction chromatography using Eichrom TEVA resin with a recovery of 83%. The limits of detection for 90Sr, 239Pu and 240Pu in water samples were determined as 11, 0.12 and 0.1 fg ml-1, respectively. Concentrations of 90Sr and 239Pu in contaminated groundwater samples ranged from 18 to 32 and from 28 to 856 fg ml-1, respectively. The 240Pu/239Pu isotopic ratio in groundwater samples was measured as 0.17. This isotope ratio indicates that the most probable source of contamination of the investigated groundwater samples was the nuclear weapons tests at the Semipalatinsk Test Site conducted by the USSR in the 1960s.

Examples and basic theories of various methods of laser diagnostics of plasmas for light sources are introduced. Most introduced papers were presented at International Symposium on the Science and Technology of Light Sources (LS), which is the only international symposium on the science and technology of light sources.

It is suggested by qualitative considerations based on analogy with earth, Jupiter, and Saturn that the magnetosphere of Uranus may lack a plasmasource able to produce significant internal currents, internal convection, and associated effects. A class of approximately self-consistent quantitative magnetohydrostatic equilibrium configurations for the case of a pole-on magnetosphere with variable plasma parameters is presently constructed in order to test this hypothesis by means of forthcoming Voyager measurements. The configurations that can be computed for the geometries of the magnetic field and of the tail current sheet, for a given distribution of plasma pressure, have a single, funnel-shaped polar cusp pointing into the solar wind and a cylindrical tail plasma sheet whose currents close within the tail, rather than on the tail magnetopause. Interconnection of interplanetary and magnetospheric fields yields a highly asymmetric tail-field configuration.

Ion implantation into surfaces of three-dimensional targets is achieved by forming an ionized plasma about the target within an enclosing chamber and applying a pulse of high voltage between the target and the conductive walls of the chamber. Ions from the plasma are driven into the target object surfaces from all sides simultaneously without the need for manipulation of the target object. Repetitive pulses of high voltage, typically 20 kilovolts or higher, causes the ions to be driven deeply into the target. The plasma may be formed of a neutral gas introduced into the evacuated chamber and ionized therein with ionizing radiation so that a constant source of plasma is provided which surrounds the target object during the implantation process. Significant increases in the surface hardness and wear characteristics of various materials are obtained with ion implantation in this manner. 7 figs.