Summary: A SILICON NITRID
S.
OxideMEMS L
ABSTRACT
We present an integrated chip-scale R
driven Opto-Mechanical Oscillator (RP
nitride with excellent close-to-carrier
illustrate a process to micro-fabricate
resonators, waveguides and grating co
nitride and demonstrate an RP-OM
41.95MHz, with phase noise of -85dBc/H
The phase noise does not show 1/f3
or o
slopes all the way down to 10Hz of
Using a lower optical quality facto
demonstrate improvement of 6dB in pha
INTRODUCTION
Overview of chip-scale oscillators
Quartz oscillators in tens of MHz ra
far-from-carrier phase noise, but have h