I am just starting to use solidworks to draw some small features for optical application. My feature sizes are in between 5 nanometer to 7 micro meter. I can not draw features smaller than 0.0001mm. Does anyone know how to do it? I will really appreciate your help!

Thank you for your reply. I do not need model them. I just need draw a 3d structure and export this structure for my simulation. However, solidworks told me "please enter a number greater than 100nm or smaller than....." So I can not draw any feature smaller than 100nm as a part. I do not know how to solve this problem. Hope you have an idea!

Thank you for your suggestion. I did try your method. It can give me about 50 nm resolution in SW. But after I save this file as x_t file and import it with 1e-14m import tolerance, the drawing changed a lot. Could you please tell me how to reduce the tolerance in SW? The one in Documentation properties seem does not work.....

Solidworks sets the tolerance absolutely, to keep things standardized and within a range that will work for the majority of users. I think this is the best way to go, unfortunately it makes cases like these difficult. I do not think you will be able to model nanometer scaled parts using Solidworks.

What are you going to use this for? Form/fit/function in 3d and then 2d production drawings? You could very well work with a scale factor of about 100, then all the way at the end when making your drawings you will need to come up with some way to make it work.

Just remember that in the computer size is relative, it doesn't care, but things like tolerances (how close is close enough) does care about the size of your models, or shall I say the distance between the vertices, edges and faces relative to each other.