SPM3

The SPM3 stage is a 3-axis ultra-high speed nanopositioner, offering a travel range of 75µm along X and Y with resonant frequencies higher than 2kHz on both axis.

The Z portion of the SPM3 stage can have up to 50µm travel range and offers the highest speed capabilities available on the market since it can have up to 12.5kHz resonnant frequency. Indeed, when used with the high power controller, the step response time of the Z axis of the SPM3.5 can be smaller than a millisecond.

Hence, the SPM stage is designed for demanding metrology applications such as Atomic Force Microscopy.

This piezostage can be proposed with a coarse positioning Microstage (See our Hybrid System).

This nanopositioner is part of our high-speed product line (High power controller available).

————————————————————————————————————

Features & Applications

Related Product

Downloads

Features :

Ultra high speed

All 3 axis are Direct drive

75 µm XY and up to 50µm Z travel range

Closed loop control

Silicon sensor technology

Picometric noise floor

Applications :

Atomic Force Microscopy

Scanning Probe Microscopy

High speed and high resolution XYZ positioning

3 Axis Controller
Our 3 axis PiezoStage will be used with a 3 axis controller standard or high speed

Hybrid system
The SPM-3 can be proposed with a coarse positioning stage

Adapter Plate
This adapter plate allows to mount the SPM-3 on a stages with K-type frame (160mm x 110mm aperture)