EasyTube® 101

EasyTube® 101

25 mm x 50 mm Substrate

The EasyTube® 101 is a budget friendly, small footprint, reliable, and repeatable CVD system for the advanced R&D user.

The system has a usable processing area of 25 mm x 50 mm. Up to 8 input lines are available for gases. 3 of the input lines can be configured for vapor delivery of solid or liquid sources. The system can be configured for vacuum and/or atmospheric processes. Most system options are available as upgrades after installation.

The system is designed to meet today’s safety standards for handling pyrophoric, corrosive, flammable, and toxic gases such as hydrogen, silane, germane, diborane, hydrogen chloride, and metal organic precursors. The system has application configured safety protocols embedded into relay logic, PLC, and CVDWinPrC™ software.

Our entry level EasyTube® 101 is the product of choice for the researcher that has a limited budget and floor space, and needs turnkey equipment with a baseline process recipe, and a proven safety system.