1. These shares are restricted stock units with restrictions that lapse over a four year period with respect to 25% of these shares per year, beginning February 19, 2020, and thereafter on February 19, 2021, February 19, 2022 and February 19, 2023.

2. Awarded pursuant to the Entegris, Inc. 2010 Stock Plan, as amended, in consideration of services as an employee.

3. These shares include 213.502 shares acquired under the Entegris, Inc. Employee Stock Purchase Plan on December 31, 2018.

4. The option vests in four equal annual installments beginning on February 19, 2020 and thereafter on February 19, 2021, February 19, 2022 and February 19, 2023.

Remarks:

/s/ Joseph Colella, Attorney-In-Fact for Clint Haris

02/07/2019

** Signature of Reporting Person

Date

Reminder: Report on a separate line for each class of securities beneficially owned directly or indirectly.

* If the form is filed by more than one reporting person,
see
Instruction
4
(b)(v).