Available with ThermoCompTM for high-performance in changing environments

The PRO115LM is a latest addition to the second-generation PRO-LM stage series and is the smallest linear motor, sealed mechanical bearing stage in Aerotech’s lineup. Building on the fundamental precision design of other PRO-LM series stages, the PRO115LM is the ideal choice for space-constrained medium and high-performance applications.

Rugged Mechanical Construction

A long-life recirculating linear guide bearing system and a low-friction sealing solution make the PRO115LM an attractive solution for industrial applications such as laser machining. The basic external construction of the PRO115LM design provides protection from debris while the side-seals prevent dirt and particulates from entering the stage. The curved hard-cover design provides a natural shape that prevents excessive debris from collecting on the stage.

Precision Motion Performance

The PRO115LM series stages are optimized with high-precision, noncontact linear encoders that are protected from debris by the stage sealing system. These encoders provide minimum incremental motion down to 5 nm and sub-micrometer positioning repeatability. Precision recirculating linear bearings along with machining and assembly craftsmanship enable excellent geometric performance specifications. The optional HALAR factory calibration improves positioning accuracy down to ±0.75 μm.

Accurate Positioning with ThermoComp

Temperature changes and thermal effects are some of the largest error sources in precision machines. All PRO series stages are available with Aerotech’s ThermoComp feature, an embedded temperature compensation unit that guarantees accurate positioning in variable temperature environments. Using this feature protects your process from real-world conditions, even in extreme industrial settings.

Direct-Drive Linear Motor

This ironless design is ideal for applications requiring outstanding contour accuracy and smooth velocity profiling. As with all Aerotech linear motor stages, the linear motor has zero backlash, no windup, zero friction, and excellent dynamic responsiveness.

Design and Integration Flexibility

The PRO115LM is designed with many standard features and options that make the design incredibly flexible and allow it to be easily tailored to a specific application. The PRO115LM is available in nine different models with travels ranging from 50 mm to 600 mm and speeds up to 2 m/s. Configurable cable management solutions are available for single and multi-axis systems as standard options.

The base mounting holes are accessible from the outside of the stage allowing for easy mounting. Standard mounting holes for both English and metric optical tables are present in all travels. The tabletop is available with both English and metric mounting patterns and can be ordered with brush attachments to clear any debris that may collect on the stage hard cover. Tabletops with hole patterns that allow the direct attachment of Aerotech’s ADRS, ACS-LP, and AGR rotary stages are also available.

The PRO115LM series is also available with cleanroom preparation and vacuum versions.

Specifications

PRO115LM Specifications

PRO115LM

Travel

50

100

150

200

250

300

400

500

600

Accuracy(1)

Standard

±3 µm

±4 µm

±6 µm

±8 µm

±9 µm

±10 µm

±12 µm

±14 µm

±15.5 µm

Calibrated

±0.75 µm

±1 µm

±1 µm

±1.5 µm

±1.5 µm

±1.5 µm

±1.5 µm

±2 µm

±2 µm

Resolution(Min. Incremental Motion)

5 nm (-E1 Encoder)

Bidirectional Repeatability(1)

±0.4 μm

±0.4 μm

±0.4 μm

±0.5 μm

±0.5 μm

±0.5 μm

±0.5 μm

±0.5 μm

±0.5 μm

Horizontal Straightness(1)

±1.5 μm

±2.5 μm

±3 μm

±4 μm

±5 μm

±6 μm

±8 μm

±9 μm

±10 μm

Vertical Straightness(1)

±1.5 μm

±2.5 μm

±3 μm

±4 μm

±5 μm

±6 μm

±8 μm

±9 μm

±10 μm

Pitch

19 μrad(3.9 arc sec)

29 μrad(6 arc sec)

29 μrad(6 arc sec)

39 μrad(8 arc sec)

49 μrad(10.1 arc sec)

58 μrad(12 arc sec)

78 μrad(16.1 arc sec)

97 μrad(20 arc sec)

116 μrad(23.9 arc sec)

Roll

19 μrad(3.9 arc sec)

29 μrad(6 arc sec)

29 μrad(6 arc sec)

39 μrad(8 arc sec)

49 μrad(10.1 arc sec)

58 μrad(12 arc sec)

78 μrad(16.1 arc sec)

97 μrad(20 arc sec)

116 μrad(23.9 arc sec)

Yaw

19 μrad(3.9 arc sec)

29 μrad(6 arc sec)

29 μrad(6 arc sec)

39 μrad(8 arc sec)

49 μrad(10.1 arc sec)

58 μrad(12 arc sec)

78 μrad(16.1 arc sec)

97 μrad(20 arc sec)

116 μrad(23.9 arc sec)

Maximum Speed(2)

2 m/s

Maximum Acceleration(2)

3 g

Maximum Force (Continuous)

20.8 N

Load Capacity(3)

Horizontal

40 kg

Side

40 kg

Moving Mass

1.9 kg

Stage Mass

5.1 kg

5.7 kg

6.2 kg

6.8 kg

7.4 kg

7.9 kg

9.0 kg

10.2 kg

11.3 kg

Material

Aluminum

MTBF (Mean Time Between Failure)

20,000 Hours

Certified with -PL1 option.

Requires the selection of an appropriate amplifier with sufficient voltage and current.

ThermoComp (Optional)

Metrology (Required)

Option

Description

-PL0

No metrology performance plots

-PL1

Metrology, uncalibrated with performance plots

-PL2

Metrology, calibrated (HALAR) with performance plots

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

Option

Description

-TAS

Integration - Test as systemTesting, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.

-TAC

Integration - Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.