We have successfully grown the a-axis YBa2Cu3O7- (YBCO) film on (100) oriented MgO substrate at low temperature by vertical Metal Organic Chemicals Vapor deposition (MOCVD) method. The a-axis growth of YBCO significantly depends on many deposition parameters, such as background pressure, metal organic precursors and the deposition rate. The most important parameters among deposition parameters are lattice matching to substrate and the deposition temperature. The electrical properties of the deposited films grown at 650oC and 680oC have critical temperature (Tc,z) near 78.6 K and 87 K, respectively. The SEM images show several structures such as white color regions and rough regions, and the surface morphologies were not very smooth. The composition of Y:Ba:Cu is slightly Ba-poor and close to 1:2:3, as confirmed by EDAX spectra

Deskripsi Alternatif :

We have successfully grown the a-axis YBa2Cu3O7- (YBCO) film on (100) oriented MgO substrate at low temperature by vertical Metal Organic Chemicals Vapor deposition (MOCVD) method. The a-axis growth of YBCO significantly depends on many deposition parameters, such as background pressure, metal organic precursors and the deposition rate. The most important parameters among deposition parameters are lattice matching to substrate and the deposition temperature. The electrical properties of the deposited films grown at 650oC and 680oC have critical temperature (Tc,z) near 78.6 K and 87 K, respectively. The SEM images show several structures such as white color regions and rough regions, and the surface morphologies were not very smooth. The composition of Y:Ba:Cu is slightly Ba-poor and close to 1:2:3, as confirmed by EDAX spectra