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Abstract

In this work, the in uence of model order reduction methods on optical aberrations is analysed within an dynamical-optical simulation of a high precision optomechanical system. Therefore, an integrated modeling process and new methods have to be introduced for the computation and investigation of the dynamical-optical behaviour. For instance, this optical system can be a telescope optic or a lithographic objective. In order to derive a simplified mechanical model for transient time simulations with low computational cost, the method of elastic multibody systems in combination with model order reduction methods can be used. For this, software-tools and interfaces are utilized. Furthermore, mechanical and optical simulation models are derived and implemented. With these, on the one hand, the mechanical sensitivity can be investigated for arbitrary external excitations and on the other hand, the related optical behaviour can be predicted. In order to clarify these methods, academic examples are chosen and the influences of the model order reduction methods and simulation strategies are analysed. Finally, the systems are investigated with respect to the mechanical-optical frequency responses.

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Journal of Applied Remote SensingJournal of Astronomical Telescopes Instruments and SystemsJournal of Biomedical OpticsJournal of Electronic ImagingJournal of Medical ImagingJournal of Micro/Nanolithography, MEMS, and MOEMSJournal of NanophotonicsJournal of Photonics for EnergyNeurophotonicsOptical EngineeringSPIE Reviews