Sidewall Roughness Measurement

The NX-3DM’s innovative head tilting design allows access to the sidewalls using an ultra sharp tip to obtain high resolution, well-defined details of the area and its roughness. Innovative head tilting design allows access to the sidewalls using ultra sharp tip to obtain high resolution and(more defined)details of the side wall roughness.

3D AFM image provide high resolution profiles for bottom, sidewall, and top of the photoresist line, which can be used for LER/sidewall roughness analysis of the structure

Park 3DM features

Innovative Z-Scan System

The many unique features of the NX-3DM are made possible by independently tilting the Z-scanner in its patented Crosstalk Eliminated platform,
where XY and Z scanners are completely decoupled. This design allows users to access the vertical sidewalls as well as theundercut structures at
various angles. Unlike in systems with flared tips, here high resolution and high aspect ratio probes can be used.

Flexure-Guided XY Scanner with Closed-loop Dual Servo System

The 100 μm x 100 μm XY scanner consists of a symmetrical 2-dimensional flexure stage and high-force piezoelectric stacks that provide highly
orthogonal movement with minimal out-of-plane motion, as well as the high responsiveness essential for precise sample scanning at the nanometer
scale. Two symmetric, low-noise sensors are present on each axis of the XY scanner to retain a high level of orthogonality in the context of large
scanning ranges and sample sizes. The secondary sensor corrects and compensates for non-linear and non-planar positional errors which might
occur using a single sensor alone.

Automatic Measurement Control for Increased Efficiency

The NX-3DM is equipped with automated software that makes operation seamless. Just select the desired measurement program to get
precise multi-site analysis and auto-optimized settings for cantilever tuning, scan rate, gain, and set-point parameters. Park's user-friendly
software interface gives you the flexibility to create customized operation routines so you can make the most of the NX-3DM with the least
amount of effort. Creating new routines is easy. On average it takes only 10 minutes to make a new routine, and less than 5 to modify an
existing one.

Industry Leading Low Noise Z Detector

Our AFMs are equipped with the most effective low noise Z detectors in the field, with a noise of 0.2 Å over large bandwidth.
This produces highly accurate sample topography, no edge overshoot and no need for calibration. Just one of the many ways
Park NX-3DM saves you time and gives you better data.

Accurate Sample Topography Measured by Low Noise Z Detector

No artifact by AFM scanner in low noise closed-loop topography

• Uses low noise Z detector signal for topography
• Has low Z detector noise of 0.02 nm over large bandwidth
• Has no edge overshoot at the leading and trailing edges
• Needs calibration done only once at the factory

Industry’s Lowest Noise Floor

To detect the smallest sample features, and image the flattest surfaces, Park has engineered the industry’s lowest noise floor
specification of < 0.5 Å. The noise floor data is determined using a “zero scan.” The system noise is measured with the cantilever in
contact with the sample surface at a single point under the following conditions:

Gauge Repeatability and Reproducibility

Due to the ever-decreasing size of components, manufacturers now
require the highest level of quality control. Park AFM can provide 1
gauge sigma of less than 1 angstrom.

Tool-to-tool Correlation

Thanks to Park's revolutionary AFM platform designed for industrial
metrology, Park NX-3DM will correlate with any existing Park AFMs
that have been previously used for manufacturing, inspection,
analysis, or research.