SEMICON West 2014

Park Systems, the enabler of nanoscale advances, invites you to discover an exhibition that will immerse you in the most sophisticated nanotechnology. Please visit our booth at SEMICON West 2014 being held at the Moscone Center in San Francisco.

l Date : July 8 – 10, 2014

lVenue : Moscone Center – San Francisco, CA (United States)

lPark’s Booth : South Hall, No. #2139

Remember to also join our SEMICON West 2014 AFM Luncheon and Reception at the nearby Jillian's, just a short walk from the Moscone Center:

*EVENT OPEN TO RESEARCH ACADEMIA AND INDUSTRY PROFESSIONALS ONLY; REGISTRATION WILL BE SCREENED. ONLY COMPANY/UNIVERSITY EMAIL ADDRESSES WILL BE ACCEPTED.

Park Systems is proud to announce that we will be hosting Phil Kaszuba, Advisory Engineer to the Scanning Probe Microscopy (SPM) Laboratory of the IBM System and Technology Group in Vermont. Phil will be presenting "The Role of Scanning Probe Microscopy in Nanoscale Semiconductor Device Analysis":

Since the invention of the Atomic Force Microscope (AFM) in 1986, numerous analytical techniques have been developed and implemented on the AFM platform, evolving into what is collectively called the Scanning Probe Microscope (SPM). The SPM has since become established as a mainstream analytical instrument with a continually increasing role in the development of nanoscale semiconductor technologies providing critical data from initial concept to technology development to manufacturing to failure analysis. This presentation will discuss Atomic Force Microscopy (AFM), Scanning Kelvin Probe Microscopy (SKPM), Scanning Capacitance Microscopy (SCM), Conductive-AFM (C-AFM), Magnetic Force Microscopy (MFM), and Scanning Surface Photo Voltage Microscopy (SSPVM). An overview of each technique will be presented along with examples of how each is currently used in the development of new technologies, the monitoring of a manufacturing line, and the failure analysis of nanoscale semiconductor devices.

Wand controlling the cost of IC manufacturing. AFM has been already proven to be a unique non-destructive technique for providing accurate three-dimensional information on the defects (without leaving irradiation marks like SEM). However it was limited due to its throughput, and laborious efforts for finding the defects. Park Systems recently introduced its unique solution for 300 mm wafer technology: the smart Automatic Defect Review (ADR), on Park's Wafer series. In this talk, ADR's capabilities will be discussed and presented along with examples of ADR on 300 mm bare silicon wafers. With the help of Park's Smart ADR, the throughput for defect review using AFM tools has been improved by 1000%. hile the semiconductor industry is concentrating more on sub-45 nm nodes and larger incoming wafers, defect inspection and review is playing a key role in increasing the yield

About SEMICON West :

Founded 1971 (2014: 44th year)

SEMICON West is the flagship annual event for the global microelectronics industry. It is the premier event for the display of new products and technologies for microelectronics design and manufacturing, featuring technologies from across the microelectronics supply chain, from electronic design automation, to device fabrication (wafer processing), to final manufacturing (assembly, packaging, and test). More than semiconductors, SEMICON West is also showcase for emerging markets and technologies born from the microelectronics industry, including micro-electromechanical systems (MEMS), photovoltaics (PV), flexible electronics and displays, nano-electronics, solid state lighting (LEDs), and related technologies.