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Abstract

We present a novel optical configuration of a phase-shifting interferometer for high-accuracy figure metrology of large dioptric convex spherical surfaces. The conformation and design considerations according to measurement accuracy, practicability, and system errors analysis are described. More in detail, we show the design principle and methods for the crucial parts. Some are expounded upon with examples for thorough understanding. The measurement procedures and the alignment approaches are also described. Finally, a verification experiment is further presented to verify our theoretical design. This system gives full-aperture and high-precision surface testing while maintaining relatively low cost and convenient operation.

Test setup to measure the figure of a large dioptric convex spherical surface with our measurement system. The testing process is composed of two main steps. (a) Step 1: SACA and the lens to be tested are installed and adjusted through monitoring interferograms, which are produced by the back bare surface of the optical flat and the test surface. (b) Step 2: move the optical flat out of light path, install and adjust the reference sphere, and measure figure of test surface by wavelength phase shifting.

Spherical aberrations introduced in four types of test lenses; the test surface is perpendicular to the rays, so it has no spherical aberrations. (a) Concentric lens, (b) meniscus lens, (c)plano-convex lens, (d) bi-convex lens.