Document 5421 defines a test method for below 30 nm-rated
filters mainly used for chemical filtration by using GNP and ICP-MS as particle
concentration detector.

A purpose of this document is to provide a standard of
mono-dispersed gold nanoparticle (GNP) challenge test for liquid filter rated
below 30 nm using ICP-MS. Two appendixes
are included and are the subject of voting. Appendix 1 outlines definitions
with respect to ligand addition and the Appendix 2 describes the particle size
of NIST reference materials. The following areas are to be
addressed in this document:

The method of membrane treatment prior to the
test for decreasing the adsorbing effect.

The description of the test result.

Ballot 5421 was recently adjudicated during the Liquid
Chemical Committee’s Japan chapter, and failed committee review. The authors
will now revise the document based on voter input, and reballot in a future
cycle. Please contact SEMI Japan staff if you have any questions about this
document. Chie Yanagisawa (cyanagisawa@semi.org)