From eenriquez at snf.stanford.edu Wed Jun 1 16:58:42 2005
From: eenriquez at snf.stanford.edu (Elmer Enriquez)
Date: Wed, 01 Jun 2005 16:58:42 -0700
Subject: Gasonics status
Message-ID: <429E4BB2.4070102@snf.stanford.edu>
Still troubleshooting the output cassette. If users really need to
process their wafer, they can run one wafer at a time by following this
procedure:
1) Load one wafer into the input cassete.
2) Select recipe and start process.
3) Allow the wafer to unload into the unload cassette.
4) The system will fault for "Unload cassette Full".
5) Using tweezers, take the wafer from the unload cassette
6) Press the "Stop" button to abort.
7) If you have more wafers to process, lift the load cassette and load
another wafer.