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Nanocarbon such as graphene has been expected for a conductor material for semiconductor metallization because of its lower resistance and higher reliability than conventional metals, and it will lead to a low-carbon society by the lower power consumption and less waste of electronic systems. We have been developing the fabrication processes for semiconductor devices such as LSIs and GaN power devices.

Laboratory Character

Grobal students in the docotor and master courses have been worikng on advanced research projects including premier national project in Japan such as CREST and publishing their works in international journals and conferences. We have been collaborating with industries and top universities such as UCSB.