Title (de)

Title (fr)

Publication

Application

Priority

US 2586087 A 19870316

US 84978686 A 19860409

US 8700804 W 19870408

Abstract (en)

[origin: WO8706391A1] An ion beam scanning method and apparatus produces a parallel scanned ion beam (12) with a magnetic deflector (26) having in one instance wedge-shaped pole pieces (28, 30) that develop a uniform magnetic field. A beam accelerator (68) for the scanned beam has a slot-shaped passage (42a, 44a) which the scanned beam traverses. The beam scan and the beam traverse over a target object (64) are controlled to attain selected beam current, and correspondingly ion dose, on a target object.