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Abstract

We report on the design and realization of photonic integrated devices based on 3D organic
microresonators. This has been achieved by combining microfluidics techniques and thin-film
processes. The microfluidic device and the control of the flow rates of the continuous and dispersed
phases allow the fabrication of organic microresonators with diameter ranging from 30 to 200 μm. The
resonance of the sphere in air has been first investigated by using the Raman spectroscopy set-up
demonstrating the appropriate photonic properties. Then the microresonators have been integrated on
an organic chip made of the photosensitive resin SU-8 and positioned at the extremity of a taper and
alongside a rib waveguide. The realization of these structures by thin-film processes needs one step
UV-lithography leading to 6μm width and 30μm height. Both devices have proved the efficient
evanescent coupling leading to the excitation of the whispering gallery modes confined at the surface
of the organic 3D microresonators. Finally, a band-stop filter has been used to detect the resonance
spectra of the resonators once integrated.

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Journal of Applied Remote SensingJournal of Astronomical Telescopes Instruments and SystemsJournal of Biomedical OpticsJournal of Electronic ImagingJournal of Medical ImagingJournal of Micro/Nanolithography, MEMS, and MOEMSJournal of NanophotonicsJournal of Photonics for EnergyNeurophotonicsOptical EngineeringSPIE Reviews