Publication Type

Co-author

Journals and Conferences

In this paper we discuss the development of a MEMS-based solid state atom source that can provide controllable atom deposition ranging over eight orders of magnitude, from ten atoms per square micron… (More)

Semiconductor fabs are large, complex industrial sites with costs for a single facility approaching $10B. In this paper we discuss the possibility of putting the entire functionality of such a fab… (More)

This paper presents two capacitive comb drive designs for electrostatic actuation of MEMS with the aim to eliminate the levitation effect often observed in such systems. By placing a shield over the… (More)