Presentation on theme: "The need for Ultra Pure Water in the semiconductor industry."— Presentation transcript:

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03/06/ KILLER PARTICLES Membrane distillation can make purer water than state- of-the-art water purification technology

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03/06/ ONLY VAPORIZED WATER MOLECULES PASS THE MEMBRANE Only vapour can leave the surface of the water, because of the surface tension. The surface tension stops all non- volatiles from leaving the feed water

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Estimated Water consumption in a 300mm wafer IDM fab For a fab water consumption is: 1500 m3/hour Per wafer = 8.8 m3 Per clean per wafer = 44 liter This includes all water consumption: idle UPW flows, chemical waste treatment, gas-exhaust washing, Reject water from purification Cooling water Sanitary water for staff: toilets.... … 5