Hysitron PI 85L SEM PicoIndenter

Quantitative In-Situ Nanomechanical Testing

Bruker’s SEM series PicoIndenter instruments are depth-sensing nanomechanical test instruments that can be interfaced with scanning electron microscopes (SEM). With these systems, it is possible to perform quantitative nanomechanical testing while simultaneously imaging with the SEM. Coupling these two techniques allows the researcher to position the probe with extreme accuracy and image the deformation process throughout the test.

The sample positioning stages of the system are designed to accommodate samples up to 10 mm thick, while providing precise sample positioning with >3 mm range in all three directions (XYZ). In addition, the mechanical coupling of the sample stage and the transducer provides a stable, rigid platform for nanomechanical testing. Overall, this low-profile instrument allows for maximum stage tilt and minimum working distance for optimal imaging during testing.

In-Situ Mechanical Data Synchronized with SEM Imaging

In-situ mechanical data acquired with the PI 85L is synchronized with SEM imaging and displayed in side by side format. In the example at left, discontinuities in the load-displacement data are correlated to the onset of fracture observed in a FIB-milled beam containing copper interconnects and brittle dielectric material. Simultaneous mechanical measurements and SEM imaging enables a complete understanding of material deformation behavior.

Explore Behavior with Precise Modes

The PI 85L utilizes a multitude of different modes to test fundamental mechanical properties, stress-strain behavior, stiffness, fracture toughness, and deformation mechanisms in a variety of different samples.

Expand Capabilities with Hybrid Techniques

In addition to the standard line-up of testing modes, the PI 85L can be upgraded with optional modes that further expand its capabilities. From heating options to electrical characterization, the PI 85L can adapt to your needs.

The PI 85L SEM PicoIndenter is the next-generation version of our dedicated in-situ nanomechanical test instrument, designed for use in SEM but suitable for a variety of platforms and environments. Featuring Bruker’s capacitive transducer working in conjunction with an extremely fast 78kHz control system, the system provides exceptional performance and superior stability at nanoscale. The compact, low profile design makes the system ideally suited for small chamber SEMs, Raman and optical microscopes, beamlines, and more.