Abstract

Nanocompositefilms consisting of nanosized Ag particles embedded in partially oxidizedamorphous Si matrices were prepared by radio frequency cosputtering deposition. Subsequent heat treatment at different temperatures ranging from 200 to 500 °C and its effects on the optical absorption of the films were investigated by spectrometry in the wavelength ranging from 200 to 1200 nm. “Surface resonance state” is introduced to discuss the broadening, blue-shift, and intensity decrease of the plasmon resonance absorption peak with decreasing Ag particle size.