Super-thick Thermal Oxidized Wafers

Super-thick Thermal Oxidized Wafers

With respect to optical waveguides (AWG), the so-called undercladding layer, which is the lowermost SiO2 film, has a critical effect on the process yield.

Guaranteed specifications

Item

Specification

Film thickness

20um±5%（Maximum thickness）

In-plane uniformity

±0.5%

Surface uniformity

±0.5%

Refractive index(@1550nm)

1.4458±0.0001

Refractive index plane distribution data

Surface roughness data

Supplier

KST service as a wafer foundry providing various services to deposit films on silicon wafers meeting customers’ needs since the establishment of 1998 throughout. Our deposition process service include oxide film, which enjoys the highest demand in the industry today ,and nitride film. In addition, we respond to the diverse needs of customers by creating films of different thickness, from common thin films to thick ones.