Entrepix to Market Rudolph AutoEL Ellipsometers

Photonics.comNov 2007
Rudolph Technologies, a Flanders, N.J., provider of process control metrology, defect inspection and data analysis systems used by semiconductor device manufacturers, has granted Entrepix Inc. an exclusive license to manufacture, sell, service and support its AutoEL series of thin-film ellipsometers. Entrepix is a Tempe, Ariz., provider of chemical mechanical polishing (CMP) process outsourcing and equipment services. The systems, used to measure film thickness, will be labeled “Rudolph Technologies AutoEL — provided and supported by Entrepix." Under the agreement, the transfer of assets and inventory will be completed in the fourth quarter. Entrepix is licensed to market the AutoEL on a global basis (except in Japan) beginning immediately. The first microprocessor-based automated ellipsometer, the AutoEL was has been installed in universities, semiconductor research labs and semiconductor production lines since it was launched in 1977. “The AutoEL technology was the foundation of our overwhelming success in thin-film metrology,” said Paul McLaughlin, chairman and CEO of Rudolph. “We are confident that Entrepix will continue to maintain the high level of support for this product that our customers have expected over the past 30 years.” All inquiries for the AutoEL received by Rudolph will now be redirected to Entrepix.

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