SEMI F104-0312 - Particle Test Method Guide for Evaluation of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems

This Standard was technically approved by the global
Liquid Chemicals Technical Committee. This edition was approved for publication
by the global Audits and Reviews Subcommittee on December 24, 2011. Available at
www.semiviews.org and www.semi.org in March 2012; originally published November
2007.

NOTICE: This Document was completely rewritten in
2011.

This Document provides recommended test methods to
evaluate and compare components for particle contribution into an ultrapure
water (UPW) fluid stream. These methods fulfill the particle testing
requirements within SEMI F57.

Two methods for evaluating particle contribution are
provided.

The rinse test method evaluates performance in a
flushing mode while the component is in a static state. It provides an
indication of the volume required to bring particle levels to a user-defined
specification.

The cycle test method evaluates performance during
component cycling and provides an indication of the steady state particle
contribution due to cycling.

Referenced SEMI Standards

SEMI E49 —
Guide for High Purity and Ultrahigh Purity Piping Performance, Subassemblies,
and Final Assemblies

SEMI F57 —
Specification for Polymer Components Used in Ultrapure Water and Liquid Chemical
Distribution Systems