$2.5B in R&D Funding for US Small Business

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3 Awards Won

$69.9K

We plan to use Laser Chemical Etching (LCE, or also called Laser Microchemical etching, LMC), a direct etch process capable of true high resolution 3-D etching with micron resolution, almost arbitrary depth, high aspect ration, and extremely smooth surface finish (less than 40nm RMS), to produce convex gratings for use in Offner spectrometers. L...

This Small Business Innovation Research Phase 1 Project will use a commercial laser system for laser chemical etching to develop processes to fabricate Micro-opto-electro-mechanical systems (MOEMS) components such as micro-lenses, channels, and electrical contacts by directly writing with a laser. MEMS/MOEMS devices are often difficult to make a...

$69.9K

We plan to use Laser Chemical Etching (LCE), a "direct etch process" capable of true high resolution 3-D etching with micron resolution, almost arbitrary depth, and high aspect ratio, to produce convex longwave infrared gratings for use in Offner spectrometers. Laser Chemical Etching (LCE) is vastly superior to Excimer Laser Micromachining in e...