A polymer-polysilicon cantilever bimorph device is to be utilized as a thermal infrared detector. Third generation prototypes were designed, fabricated, and are being tested. These device utilize a capacitive readout scheme, a double-beam design in order to eliminate the effect of residual stress in the polymer layer, and a nitride stopper layer for reduced sticking and pull-in. Devices are characterized using optical and thermal methods. Future goals include detailed characterization of the current prototypes, analytical model correlation, low-pressure testing, geometric optimization, and the fabrication of arrays.