Abstract

High Tcsuperconducting YBa2Cu3 O7−xfilms were prepared by chemical vapor deposition using β‐diketonates of Y, Ba, and Cu as source materials. The films were epitaxially grown on SrTiO3 (100) substrates. The c‐axis orientation perpendicular to the plane of the substrates was observed. A sharp resistive superconducting transition with Tc (R=0) at 84 K was obtained. The maximum critical‐current density at 77 K was 2×104 A/cm2 .