From mahnaz at stanford.edu Thu Oct 17 13:19:54 2013
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Thu, 17 Oct 2013 13:19:54 -0700
Subject: [asml] ASML demo coming up
Message-ID: <5260466A.3070604@stanford.edu>
Hello all,
Just a heads up that ASML needs to do a demo
We need the tool from Monday October 28th, at 7 am till November 1stat
5 pm.
Please note that the reservation shows 24 hours on badger during this
period but we only need the tool for two nights. So far the two night
are 10/29 and 10/31 but the date might change depending how we are doing.
As we find out more information, we will clear the reservation in the
evening and nights on the days that the tool is not needed. We will do
our best to communicate the changes in schedule in a timely manner.
Please plan accordingly and respect the ASML's time on the tool and in
the lab.
Litho/ Asml team
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From anupama2 at stanford.edu Mon Oct 21 17:23:03 2013
From: anupama2 at stanford.edu (Anupama Arun)
Date: Mon, 21 Oct 2013 17:23:03 -0700 (PDT)
Subject: [asml] Shutdown: reticles lost inside;
wont be up until tomorrow (Tuesday) morning
In-Reply-To: <1754499136.1889953.1382401313958.JavaMail.zimbra@stanford.edu>
References: <1754499136.1889953.1382401313958.JavaMail.zimbra@stanford.edu>
Message-ID: <1422833925.1891096.1382401383458.JavaMail.zimbra@stanford.edu>
From mahnaz at stanford.edu Wed Oct 23 16:02:34 2013
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Wed, 23 Oct 2013 16:02:34 -0700
Subject: [asml] stress wafers
Message-ID: <5268558A.1010707@stanford.edu>
Hello all,
All epi wafers that come to ASML for exposure need to be stress test
before and after the EPI.
You need to know the the curveture of your wafer. You will get the same
treatment of loss of your privilege on the tool and hours of community
service No Exception.
The stress wafers need to be scheduled for exposure with STAFF.
mahnaz
From mtang at stanford.edu Fri Oct 25 18:42:30 2013
From: mtang at stanford.edu (Mary Tang)
Date: Fri, 25 Oct 2013 18:42:30 -0700
Subject: [asml] ASML Availability for 10/28-11/1
Message-ID: <526B1E06.5020103@stanford.edu>
Dear ASML Users --
Just a reminder of the upcoming activity which will limit ASML
availability starting Monday, 10/28.
The system will not be available from 8 am to 5 pm, Monday through
Friday. If all goes according to plan, the system will be available two
evenings, from 5 pm to 8 am. The system will NOT be available the
nights of 10/29 and 10/31 (when ASML will run 32 hour sessions.) The
times and days may change if things go better -- or worse -- than planned.
Day to day, reservations will be opened up on Badger as soon as the
system is released. An email will also go out to the
asml at snf.stanford.edu list as reservations are opened up, so please
watch this list.
By the way, this is not a demo -- ASML will be generating the
calibration standard wafers that are used for ASML systems throughout
the world. Be assured that the system will be tuned up as well as it
can possibly be during and after this project.
Lastly, if you would like to receive the Badger comments, problem and
shutdown reports for the ASML, you can subscribe to the email list here:
http://snf.stanford.edu/mailman/listinfo/asml-pcs
Thanks for your patience and we apologize for the inconvenience --
Your SNF Staff
--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
Paul G. Allen Bldg 141, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu
From makoto.nakamura at asml.com Mon Oct 28 07:56:31 2013
From: makoto.nakamura at asml.com (Makoto Nakamura)
Date: Mon, 28 Oct 2013 14:56:31 +0000
Subject: [asml] Released ASML reservation from 5 pm today (10/28/2013) to
7:30 am tomorrow (10/29/2013).
Message-ID: <1D1CA93268F48647B7F9F24BDCDF9E24F51AA3@NLVDHX736.sn-eu.asml.com>
Released ASML reservation from 5 pm today (10/28/2013) to 7:30 am tomorrow (10/29/2013).
--
The information contained in this communication and any attachments is confidential and may be privileged, and is for the sole use of the intended recipient(s). Any unauthorized review, use, disclosure or distribution is prohibited. Unless explicitly stated otherwise in the body of this communication or the attachment thereto (if any), the information is provided on an AS-IS basis without any express or implied warranties or liabilities. To the extent you are relying on this information, you are doing so at your own risk. If you are not the intended recipient, please notify the sender immediately by replying to this message and destroy all copies of this message and any attachments. ASML is neither liable for the proper and complete transmission of the information contained in this communication, nor for any delay in its receipt.
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