Abstract

Two dimensionally confining x-raychannel waveguide structures are fabricated and used for the delivery of nanoscopic x-ray beams. The waveguides can be combined with a high gain Kirkpatrick-Baez-prefocusing mirror system yielding hard x-ray beams with a cross section down to (full width at half maximum). The incoming synchrotron x-ray beam is coupled in from the front side of the waveguide. Here we address the general design of the x-ray optical devices and their fabrication by e-beam lithography methods.

Received 17 July 2006Accepted 15 December 2006Published online 05 March 2007

Acknowledgments:

We acknowledge the German Federal Ministry of Education and Research (BMBF) for funding through Project No. 05KS4MGA/9. We are grateful for the provision of several consecutive synchrotron beamtimes at HASYLAB/DESY and ESRF, Grenoble.