Many trade-offs exist in the design and specification of a motion system. With its high-load capacity, large travels, high speeds, and sub-micrometer precision, the HEX500-350HL does not force you to compromise on application specifications.

Superior Structural Design

The HEX500-350HL is actuated with six high-accuracy struts that are built with precision preloaded bearings, ball screws, and drive components. Unlike competitive hexapods driven by DC brushed servomotors, the HEX500-350HL is driven by AC brushless, slotless servomotors that maximize device lifetime and performance. The servomotors are directly coupled to the actuator ball-screw enabling increased drive stiffness, higher positioning accuracy, and better minimum incremental motion (20 nm in XYZ and 0.2 μrad for θxθyθz) when compared to competitive designs that use belts, gearheads, or compliant couplings. The strut pivot-joints are engineered to provide low friction and high stiffness enhancing the overall hexapod performance.

Design Flexibility

The HEX500-350HL is designed with flexibility and customization in mind. The platform and base can be easily modified with user-specific features or mounting patterns. For applications that require different travels or a unique performance parameter, the kinematic and/or structural layout of the design can be customized with that criteria in mind.

The HEX500-350HL is available with an absolute encoder option for applications that demand no movement on start-up or power loss. The base and platform have a 150 mm diameter clear aperture to allow for workpiece access from the bottom. The base is designed with mounting holes to adapt directly to English or metric optical tables. The hexapod can also be vacuum prepared for demanding applications in synchrotron sample or optics adjustment, semiconductor manufacturing and inspection, or satellite sensor testing.

Powerful Controls and Software

Driving the HEX500-350HL is Aerotech’s award-winning A3200 motion control software. Built on years of experience in difficult kinematics applications, the A3200 controller allows simple programming and control of the hexapod in multiple user-defined coordinate systems with an intuitive interface and real-time motion visualization. Aerotech’s free HexGen™ sizing software provides the ability to easily simulate the available travel and workspace of the hexapod.

Specifications

HEX500-350HL Specifications

Mechanical Specifications

HEX500-350HL

Axis

X

Y

Z

A (θx)

B (θy)

C (θz)

Travel(1)

100 mm

110 mm

54 mm

22 deg

22 deg

40 deg

Axis Positioning Accuracy(2,3)

Over Full Travel

Standard

±4 μm

±4 μm

±3 μm

±50 μrad(±10.3 arc-sec)

±50 μrad(±10.3 arc-sec)

±25 μrad(±5.2 arc-sec)

ULTRA

±1 μm

±1 μm

±0.75 μm

±10 μrad(±2.1 arc-sec)

±10 μrad(±2.1 arc-sec)

±5 μrad(±1.0 arc-sec)

Over any 20 mm (X, Y, Z) or 5 deg (A, B, C)

Standard

±1.25 μm

±1.25 μm

±1.25 μm

±12.5 μrad(±2.6 arc-sec)

±12.5 μrad(±2.6 arc-sec)

±7.5 μrad(±1.5 arc-sec)

ULTRA

±0.75 μm

±0.75 μm

±0.5 μm

±5 μrad(±1.0 arc-sec)

±5 μrad(±1.0 arc-sec)

±2.5 μrad(±0.5 arc-sec)

Resolution (Minimum Incremental Motion)

20 nm

20 nm

20 nm

0.2 μrad(0.04 arc sec)

0.2 μrad(0.04 arc sec)

0.2 μrad(0.04 arc sec)

Bidirectional Repeatability, pk-pk(3)

±0.6 μm

±0.6 μm

±0.35 μm

±1 μrad(±0.2 arc sec)

±1 μrad(±0.2 arc sec)

±1 μrad(±0.2 arc sec)

Unidirectional Repeatability, pk-pk

±0.25 μm

±0.25 μm

±0.15 μm

±0.5 μrad(±0.1 arc sec)

±0.5 μrad(±0.1 arc sec)

±0.5 μrad(±0.1 arc sec)

Maximum Speed(4)

50 mm/s

50 mm/s

25 mm/s

10 deg/s

10 deg/s

20 deg/s

Load Capacity, All Positions(5)

Vertical

200 kg (Push); 120 kg (Pull)

Horizontal

35 kg

Holding Capacity, De-Energized(6)

165 kg

Stage Mass

49 kg

Material

Anodized Aluminum Platform and Base; Steel Used in Joints and Inside Struts

Recommended Controller

Dimensions

Ordering Information

HexGen HEX500-350HL

Feedback (Required)

Option

Description

-E2

Absolute encoders

-E3

Incremental encoders

Performance Grade (Optional)

Option

Description

-PL3

Base performance

-PL4

Ultra high-accuracy performance, ULTRA

Integration (Required)

Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration is required, or if you desire custom integration support with your system.

-TAS

Integration - Test as system Testing, integration, and documentation of a group of components as a complete system that will be used together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, and documentation of the system configuration.

-TAC

Integration - Test as components Testing and integration of individual items as discrete components that ship together. This is typically used for spare parts, replacement parts, or items that will not be used together. These components may or may not be part of a larger system.