IQ+FLOW®
Chip-sensor based Mass Flow Meters/Controllers for gases

General

Equipment manufacturers are looking for compact solutions to monitor
or control the gas flow or pressure in their system. Previously, conventional
mass flow and pressure meters and controllers have needed a footprint of
1.5", as for instance specified in the NeSSITM system.
Now, and in close co-operation with TNO-TPD (leading Dutch institute for
applied physics) Bronkhorst has developed the IQ+FLOW®
mass flow sensor. Due to the use of micro solid state technology (MEMS),
Bronkhorst has been able to halve the footprint dimension to 0.75", thereby
realizing the ultra compact flow and pressure controllers.