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Abstract

The step tablet is for accurately determining the proper exposure for photoresists. In addition to the usual inclusion of a series of steps 1 on a transparent film of progressively increasing optical densities, the step tablet incorporates resolution target 2 into each step strip. The pattern of the resolution target can be clear or opaque for negative or positive resists as required. In operation, an exposure is made by passing light from a source through the step tablet onto a photoresist layer. In effect, the graduated density strips vary the effective exposure on different parts of the photoresist to provide an indication of the minimum exposure required to produce a continuous film.

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United States

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English (United States)

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Step Tablet

The step tablet is for accurately determining the proper exposure for
photoresists. In addition to the usual inclusion of a series of steps 1 on a
transparent film of progressively increasing optical densities, the step tablet
incorporates resolution target 2 into each step strip. The pattern of the resolution
target can be clear or opaque for negative or positive resists as required. In
operation, an exposure is made by passing light from a source through the step
tablet onto a photoresist layer. In effect, the graduated density strips vary the
effective exposure on different parts of the photoresist to provide an indication of
the minimum exposure required to produce a continuous film. The incorporation
of target 2 enables the determination of the maximum exposure permissible
which does not affect the dimensional integrity of the transferred pattern.