From uthumser at stanford.edu Thu Apr 3 14:45:43 2014
From: uthumser at stanford.edu (Uli Thumser)
Date: Thu, 03 Apr 2014 14:45:43 -0700
Subject: [wbflexcorr-1] down for scheduled maintenance 4/8 10am to 12
Message-ID: <533DD687.6020005@stanford.edu>
Hi All,
The wet bench will be down for scheduled maintenance on Tuesday, April
8th from 10 am to noon. We are moving the HF drain a little bit further
in to make draining HF easier.
Uli
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From uthumser at stanford.edu Tue Apr 15 17:24:42 2014
From: uthumser at stanford.edu (Uli Thumser)
Date: Tue, 15 Apr 2014 17:24:42 -0700
Subject: [wbflexcorr-1] PRS3000 replaces PRX127
Message-ID: <534DCDCA.1040504@stanford.edu>
Hi former PRX127 users,
Unfortunately, the production of PRX127 has been stopped.
After running tests with aluminum wafers, we've decided to use PRS3000
at the wbmetal at 60C for 20 minutes.
MSDS:
https://snf.stanford.edu/SNF/materials-and-chemicals/msds-std-chemicals/liquid/prs-3000-metal-resist-remover/prs-3000-metal-resist-remover/view
Technical note:
http://jtbaker.com/search.aspx?searchtext=PRS3000
PRS3000 etches copper, we are looking into getting a different chemical
for wafers with copper. Please run test wafers before you are going to
use PRS3000 for your process wafers and let me know if you have any issues.
Uli