Summary

Microelectromechanical sytems (MEMS) applications in RF and microwave electronics are revolutionizing wireless communications. This text provides a comprehensive explanation of the fabrication and fundamental physics of MEMS and their applications in electronic communication systems.

Author Notes

Héctor J. De Los Santos is principal scientist, RF MEMS, at Conventor, Inc. and the author of Introduction to Microelectromechanical (MEM) Microwave Systems (Artech House, 1999). A senior member of the IEEE and distinguished lecturer for the IEEE Microwave Theory and Techniques Society, he holds a Ph.D. in electrical engineering from Purdue University.

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9780890062821

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