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Abstract

Electro-optic polymer waveguides in electron beam sensitive polymethyl methacrylate (PMMA) polymer matrix doped with organic nonlinear chromophores could be directly patterned by electron beam exposure with high resolution and smoothness. The polymer in the exposed regions was removed with standard electron beam resist developer and without damaging the chromophore containing polymer waveguides. Feature sizes on the order of 100 nm could be clearly resolved. High quality microring resonators made of YL124/PMMA electro-optic polymer were successfully fabricated with this technique. The measured resonance extinction ratios were more than 16 dB and quality factors were in the range of 103~104.

The resonance extinction ratios of the EO polymer microring resonators of various coupling gap sizes. The coupling length is fixed at 100 µm. The input light was TM polarized. The traces are vertically offset for clarity.

Resonance extinction ratios of the EO polymer microring resonators of various coupling lengths. The coupling gap is fixed at 0 µm and the input light was TM polarized. The traces are vertically offset for clarity.

Change of the resonance spectrum of a microring resonator of 50 µm coupling length and zero coupling gap when the air cladding was replaced with the DI water cladding. The input light was TM polarized.

Change of the resonance spectrum of a microring resonator of 0.5 µm coupling gap and 100 µm coupling length when the air cladding was replaced with the DI water cladding. The input light was TM polarized.