lithium-niobate

Hello all,
Does anyone have experience with Li-Niobate wafers? I have to do a simple
lithography on a Li-Nb wafer. But, I am not quite sure how to ramp the
temperature during the singe and photoresist bake. Any idea?
Thanks
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Goksen G. Yaralioglu, PhD
Stanford University
Ginzton Lab.
Stanford CA, 94305
e-mail: goksenin at stanford.edu
off tel.: (650) 725 49 42
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