Precision-class 6-axis positioning system

Parallel-kinematic design for six degrees of freedom making it significantly more compact and stiff than serial-kinematic systems, higher dynamic range, no moved cables: Higher reliability, reduced friction

Upgrades for C-887.11 (order separately)

F-206.NCU fast piezo nano-alignment system for alignment with nanometer precision

Accessories

C-887.MC manual control unit for Hexapods, USB, 3 m cable

C-887.VM1 PIVeriMove software for collision checking

Fields of application

Research and industry. For tool control, life sciences, micromanufacturing

Specifications

Specifications

H-840.Gxx

H-840.Dxx

Unit

Tolerance

for higher resolution and loads

for higher velocity

Active axes

X, Y, Z, θX, θY, θZ

X, Y, Z, θX, θY, θZ

Motion and positioning

Travel range* X, Y

±50

±50

mm

Travel range* Z

±25

±25

mm

Travel range* θX, θY

±15

±15

°

Travel range* θZ

±30

±30

°

Single-actuator design resolution

0.017

0.5

µm

Min. incremental motion X, Y

1

3

µm

typ.

Min. incremental motion Z

0.5

1

µm

typ.

Min. incremental motion θX, θY, θZ

5

5

µrad

typ.

Backlash X, Y

3

3

µm

typ.

Backlash Z

0.2

0.2

µm

typ.

Backlash θX, θY

20

20

µrad

typ.

Backlash θZ

30

30

µrad

typ.

Repeatability X, Y

±0.5

±0.5

µm

typ.

Repeatability Z

±0.4

±0.4

µm

typ.

Repeatability θX, θY

±7

±7

µrad

typ.

Repeatability θZ

±12

±12

µrad

typ.

Max. velocity X, Y, Z

2.5

50

mm/s

Max. velocity θX, θY, θZ

30

600

mrad/s

Typ. velocity X, Y, Z

2

30

mm/s

Typ. velocity θX, θY, θZ

20

300

mrad/s

Mechanical properties

Load (base plate horizontal / any orientation)

30 / 10

10 / 3

kg

max.

Holding force, de-energized (base plate horizontal / any orientation)

100 / 25

15 / 5

N

max.

Motor type

DC gear motor

DC motor

Miscellaneous

Operating temperature range

-10 to 50

-10 to 50

°C

Material

Aluminum

Aluminum

Mass

12

12

kg

±5 %

Cable length

3

3

m

±10 mm

Technical data specified at 20 ±3 °C.Ask about custom designs!* The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The data for each axis in this table shows its maximum travel, where all other axes are at their zero positions. If the other linear or rotational coordinates are not zero, the available travel may be less.