Vacuum Microelectronics 1989

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... N.Morita, Y.Hashimoto, K.Sano* and H.Nakanishi* Manufacturing
Developement Laboratory, Mitsubishi Electric Corporation, ... The device was
constructed of a deposited tungsten film on a sapphire substrate and a welded
platinum wire lead. ... The substrate was made of a single crystal sapphire having
a polished mirror-like Heating Element IW! ... A schematic diagram of the heating
element Fig.

Title

:

Vacuum Microelectronics 1989

Author

:

Roy Edgar Turner

Publisher

:

Inst of Physics Pub Incorporated - 1989

ISBN-13

:

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