XYHigh Speed Positioner Series nanoSXY 120

NanoSXY 120

XYHigh Speed Positioner

Linear motion up to 120 µm in XY

12.5 mm free clearance aperture

Excellent guidance accuracy

10 N stiffness in z-axis

0.25 nm resolution

The newly designed stages of the nanoSXY series combine the high accuracy and the high speed of a piezo positioning system with a special actuating design for long travel motion. Furthermore, the stages offer a compact design with a height of only 20 mm, outside dimensions of only 60 x 60 mm, and a free center space of 12.5 mm!

The ultra flat design of the stage and the ease with which you can combine the stage to an xy scanning system make the system especially useful for a wide variety of applications.

Based on the unique piezojena bi-directional actuating nanoX design, this series is designed to move high load masses with a resolution of 0.25 nm. The nanoX design also guarantees excellent guidance accuracy without parasitic motion and improves the settling time in an active manner.The stages can be equipped with a high resolution feedback system for closed loop control.

Fields of application include high resolution metrology, x and xy scanning, and dynamic positioning. The stages are available in cryogenic and vacuum versions as well.

Recommended Piezo ControllerBased on the bi-directional actuating manner of the nanoX series the required piezo controller units needs to support the nanoXprinciple. The following piezo controller units are recommended: