Abstract:

An electronic device using quantum dots, which comprises a ferromagnetic
micro magnet and performs individual ESR control on each multi-quantum
bit in a power saving way.
The electronic device comprising the ferromagnetic micro magnet (10)
disposed in the vicinity of the quantum dots (8, 9) of a plurality of
aligned semiconductor quantum dots, wherein a strong magnetic field is
applied so as to induce electron spin resonance (ESR), and the layout of
the ferromagnetic micro magnet (10) is changed, thereby controlling the
resonance frequency of the quantum dots (8, 9). Under the condition where
the resonance frequency of each quantum dot (8, 9) is controlled,
swapping of the electron spins in the quantum dots (8, 9) is performed,
thereby creating a quantum bit (QUBIT) required for quantum calculation.

Claims:

1. An electronic device using quantum dots, comprising:a plurality of
aligned semiconductor quantum dots formed in a semiconductor crystal
substrate;a plurality of gate electrodes formed on a surface of the
semiconductor substrate;an electrode for applying an ESR signal;a
dielectric film formed on the semiconductor crystal substrate; anda
single ferromagnetic micro magnet formed on a surface of the dielectric
film and above the semiconductor quantum dots, the magnet being a ferro
magnetic thin film and transforming a high frequency electric field to a
high frequency magnetic field.

2. The electronic device of claim 1, wherein a frequency of the high
frequency electric field is 1.6 GHz and more and 300 GHz or less.

3. The electronic device of claim 2, wherein a frequency of the high
frequency electric field is 1.6 GHz and more and 3 GHz or less.

4. The electronic device of claim 2, wherein a frequency of the high
frequency electric field is 3 GHz and more and 30 GHz or less.

5. The electronic device of claim 2, wherein a frequency of the high
frequency electric field is 30 GHz and more and 300 GHz or less.

6. The electronic device of claim 1, wherein the ferromagnetic thin film
is made from cobalt or cobalt alloy containing 50% and more of cobalt.

7. The electronic device of claim 6, wherein a thickness of the
ferromagnetic thin film is from 0.05 μm to 1 μm, a width of the
ferromagnetic thin film is from 0.3 μm to 0.4 μm, and a length of
the ferromagnetic thin film is 1 μm.

8. The electronic device of claim 1, wherein the ferromagnetic thin film
is made from nickel or nickel alloy containing 50% and more of nickel.

9. The electronic device of claim 8, wherein a thickness of the
ferromagnetic thin film is from 0.15 μm to 3 μm, a width of the
ferromagnetic thin film is from 0.3 μm to 0.4 μm, and a length of
the ferromagnetic thin film is 1 μm.

10. The electronic device of claim 1, wherein the ferromagnetic thin film
is made from dysprosium or dysprosium alloy containing 50% and more of
dysprosium.

11. The electronic device of claim 10, wherein a thickness of the
ferromagnetic thin film is from 0.025 μm to 1 μm, a width of the
ferromagnetic thin film is from 0.3 μm to 0.4 μm, and a length of
the ferromagnetic thin film is 1 μm.

12. The electronic device of claim 1, wherein the ferromagnetic thin film
is made from iron or iron alloy containing 50% and more of iron.

13. The electronic device of claim 12, wherein a thickness of the
ferromagnetic thin film is from 0.025 μm to 1 μm, a width of the
ferromagnetic thin film is from 0.3 μm to 0.4 μm, and a length of
the ferromagnetic thin film is 1 μm.

14. The electronic device of claim 1, wherein the ferromagnetic thin film
is made from chromium or chromium alloy containing 50% and more of
chromium.

15. The electronic device of claim 14, wherein a thickness of the
ferromagnetic thin film is from 0.025 μm to 1 μm, a width of the
ferromagnetic thin film is from 0.3 μm to 0.4 μm, and a length of
the ferromagnetic thin film is 1 μm.

16. The electronic device of claim 1, wherein a gradient magnetic field
and a parallel magnetic field with respect to the surface of the quantum
dots are generated due to a magnetic field generated by the ferromagnetic
thin film.

17. The electronic device of claim 16, wherein an energy state of electron
spin in each quantum dot is changed by applying a strong external
magnetic field under an ultra-low temperature, and each quantum dot has
an individual energy state by the action of the parallel magnetic field.

18. The electronic device of claim 16, wherein an electron disposed in the
vicinity of the quantum dots are electrically driven under the influence
of the gradient magnetic field, and electron spin resonance is realized.

19. The electronic device of claim 18, wherein an electron spin state can
be manipulated to be a spin-up state and a spin-down state by the
electron spin resonance, and the electron spin state is related to a bit,
thereby setting a quantum bit.

20. The electronic device of claim 1, wherein each quantum dot has a
different energy state by the action of the ferromagnetic magnet.

21. The electronic device of claim 1, wherein electron spin can be
manipulated independently by applying a high frequency electric field
with different frequency to each quantum dot, according to the electron
spin resonance principle.

22. The electronic device of claim 1, wherein electrons present in the
quantum dots mutually form an electronic coupling state.

23. The electronic device of claim 1, further comprising a control
electrode disposed halfway between the quantum dots, wherein a coupling
state of electrons is controlled by applying a voltage to the control
electrode to extend or contract a depletion layer under the control
electrode.

24. The electronic device of claim 23, wherein quantum calculation is
performed by manipulating the coupling state of electrons.

25. The electronic device of claim 1, wherein each quantum dot has a
horizontal quantum dot structure with a gate electrode for forming a
quantum dot, the gate electrode being disposed on a surface of a
semiconductor crystal substrate, the substrate having a two-dimensional
electron gas layer at a heterojunction interface between a gallium
arsenide and an aluminum gallium arsenide.

26. The electronic device of claim 1, wherein each quantum dot has a
horizontal quantum dot structure with a gate electrode for forming a
quantum dot, the gate electrode being disposed on a surface of a
semiconductor crystal substrate, the substrate having a two-dimensional
electron gas layer at a heterojunction interface between a silicon and a
silicon germanium.

27. The electronic device of claim 25, wherein each quantum dot has a
vertical quantum dot structure in which the two-dimensional electron gas
layer is geometrically cut out and a metallic electrode is disposed on
the periphery of the cut out layer.

28. The electronic device of claim 1, wherein the ferromagnetic magnet is
made from a ferromagnetic metal, an oxide ferromagnetic metal, a
superconductive metal, or an oxide superconductive metal.

29. The electronic device of claim 1, wherein a distance from the
ferromagnetic magnet to each semiconductor quantum dot is different.

30. The electronic device of claim 29, wherein the distance from the
ferromagnetic magnet to each semiconductor quantum dot varies from 0.15
μm to 0.5 μm, and a thickness of the ferromagnetic magnet is 0.1
μm.

31. The electronic device of claim 1, wherein a thickness of the
ferromagnetic magnet in the nearest neighborhood of each quantum dots is
varied.

32. The electronic device of claim 31, wherein a thickness of the
ferromagnetic magnet varies from 0.025 μm to 1 μm.

33. The electronic device of claim 23, wherein a dielectric film is
disposed between the ferromagnetic magnet and the electrodes or the gate
electrodes for forming a quantum dot.

34. The electronic device of claim 33, wherein the dielectric film is an
electron beam lithography resist, a photoresist or silicon dioxide, or
silicon nitride.

35. The electronic device of claim 23, wherein the dimensions of the
ferromagnetic magnet, the control electrode, and the gate electrodes for
forming a quantum dot are changed uniformly so as to provide the same
function only by changing a magnitude of applied voltage.

36. The electronic device of claim 1, further comprising a control
electrode, an electrode for forming a quantum dot, and a readout quantum
point contact gate electrode in the vicinity of the semiconductor quantum
dots, and further comprising a quantum point contact exhibiting one
dimensional quantized electron conduction phenomenon.

37. The electronic device of claim 1, further comprising a quantum point
contact which changes its conductivity depending on the number of
electric charges in the neighboring quantum dots.

38. The electronic device of claim 1, wherein readout of an electron spin
state is performed by means of detection of an electron coupling state
between the quantum dots and an electric charge.

39. The electronic device of claim 1, wherein an electron spin polarized
current utilizing electron spin alignment due to a leakage magnetic field
can be injected in the vicinity of the ferromagnetic thin film.

40. The electronic device of claim 1, wherein a flip-flop operation can be
performed by controlling an electron spin state of each quantum dot
uniquely.

41. The electronic device of claim 17, wherein quantum calculation can be
performed by controlling a coupling state between the electron spins.

Description:

TECHNICAL FIELD

[0001]The present invention relates to an electronic device having a
plurality of coupled quantum dots, which is a powerful candidate for
realizing quantum calculation and quantum information processing.

BACKGROUND ART

[0002]A method for performing quantum calculation, in which multiple
quantum bits are formed by using a semiconductor quantum dot structure
having a plurality of aligned semiconductor quantum dots, has
conventionally been proposed. As the method for forming multiple quantum
bits by using semiconductor quantum dots, a method that uses electron
spin has been proposed. Electron spin under a strong magnetic field
behaves basically as a two-level system, so that an electron spin-up
state and an electron spin-down state are related to a one bit state. A
method that uses electron spin resonance (ESR) to manipulate bits has
also been proposed. For example, it has been proposed to carry out
quantum calculation by irradiating quantum dots with a high-frequency
magnetic field under a strong magnetic field, determining an electron
spin state by ESR control, and then changing an interaction between the
quantum dots (see Non-Patent Documents 1, 2, and 3 below).

[0003]As a method for controlling ESR of electron spin in semiconductor
quantum dots, a method for applying microwaves to a micro coil formed
above quantum dots (see Non-Patent Document 3), and a method for directly
applying microwaves to a control electrode (see Non-Patent Documents 4
and 5) have been proposed.

[0004]A conventional method for controlling ESR of electron spin in
semiconductor quantum dots will be described below in accordance with
Non-Patent Document 3.

[0005]FIG. 1 shows a top view of a conventional electronic device using
quantum dots. FIG. 2 shows a schematic side view of the electronic
device.

[0006]As shown in FIGS. 1 and 2, when an aluminum gallium arsenide crystal
layer (AlGaAs) 12 is epitaxially grown on a gallium arsenide (GaAs)
crystal substrate 11, a two-dimensional electron gas layer (2DEG layer)
13 with a thickness of about 10 nm is formed at the heterojunction
interface between these two crystals. This 2DEG layer 13 is located
approximately 100 nm below the surface of the AlGaAs crystal layer 12
which is an epitaxial layer of AlGaAs. Gate electrodes 2, 3, 4, and 5,
i.e. a quantum dot coupling control electrode 2, a right electrode for
forming a quantum dot 3, a left electrode for forming a quantum dot 4, a
center gate electrode 5, are formed on the AlGaAs crystal layer 12. When
a negative voltage is applied to the gate electrodes 2, 3, 4, and 5, a
depletion layer extends from just beneath them. Each depletion layer
extends to the 2DEG layer 13, and as the magnitude of the negative
voltage applied to the gate electrodes 2, 3, 4, and 5 is increased, the
2DEG layer 13 loses electron carriers from the parts reached by the
depletion layer. When the negative applied voltage is further increased,
electron carriers remain only in an island-shaped (almost disc-shaped)
portions in the 2DEG layer 13, which are a quantum dot 8 and a quantum
dot 9. Then, a calixarene insulating film 14 is deposited on the upper
surface of a semiconductor crystal substrate 1. A pattern of a
high-frequency micro coil 34 is formed on the calixarene insulating film
14, by the electron beam vacuum evaporation method, so as to be 90 nm
away from the surfaces of the gate electrodes 2, 3, 4, and 5. Adjusting
the voltages applied to the gate electrodes 2, 3, 4, and 5 allows both
quantum dots 8 and 9 to have only a single electron. Then, an external
magnetic field 17 is applied to fix the energy state of electron spin.

[0007]In order to form a quantum bit by using this conventional electronic
device, electron spin information of all quantum dots is initialized, and
then the information is written into a first quantum dot by using ESR
control (N). A high-frequency magnetic field is induced by applying a
high-frequency current to the high-frequency micro coil 34 shown in FIGS.
1 and 2, then electron spin in the quantum dot 8 is manipulated by the
ESR control. The ESR control will be described with reference to energy
diagrams shown in FIG. 3. FIG. 3(a) to FIG. 3(c) show time-dependent
changes of electron spin states during the ESR control. 35 shows an
energy state of a drain electrode and 36 shows an energy state of a
source electrode. The shaded portion is filled with electrons, so that
electrons in the energy states below the uppermost plane do not flow. 37
shows a tunneling barrier, 38 shows a spin-up electron spin in the ground
state, and 39 shows a spin-down electron spin in the excited state.

[0008]Electrons are first injected into the quantum dot 8 on the left side
by electrode operation. After sufficiently long time (1 millisecond to 1
second), electron spins in both quantum dots 8 and 9 are aligned, and no
current flows according to the Pauli principle (see Non-Patent Document
6). That is, in FIG. 3 (a), 40 indicates that no current is flowing
between the quantum dots 8 and 9, showing that the electron spin
information is initialized. Then a high-frequency magnetic field is
applied to perform the ESR control. As shown in FIG. 3 (b), the ESR
control reverses the electron spin 39. If a tunneling probability between
the quantum dots is high enough, the fact that the ESR control has been
performed can be observed as a current flow 16 between the quantum dots,
as shown in FIG. 3 (c). In this way, it is confirmed that electron spin
states are changed by the ESR control.

[0009]To fabricate multiple quantum bits by using the conventional
electronic device, it is necessary to precisely control a coupling state
of electron spin between quantum dots and to rapidly control the electron
spin in the quantum dot (B). FIG. 4 shows a method for controlling a
coupling state between electron spin in accordance with Non-Patent
Document 2. This device is nearly the same as that shown in FIGS. 1 and
2, so that it will be described in reference with these figures. As shown
in FIG. 4 (a), two electron spins 38 and 39 are assumed to be oppositely
directed in the initial state. Differing from the description (A) given
above, it is assumed that the energy states of the electron spins 38 and
39 are lower than the energy states 35 and 36 of the drain electrode and
the source electrode, respectively, and that no current is flowing. An
interaction 20 between the electron spins can be enhanced by increasing a
voltage applied to the left gate electrode 4 for forming a quantum dot by
a small amount without causing electric charge transfer, or by relatively
decreasing the influence of the depletion layer under the center gate
electrode 5, before the electron spins 38 and 39 are aligned due to
electron spin relaxation and electron spin block occurs, as shown in FIG.
4 (b). Then, the electron spins interact with each other and become in
the aligned state, as shown in FIG. 4 (c). In this way, the electrons
interact with each other and alternate between a spin aligned state and a
spin opposed state. The direction of the electron spin can always be
reversed by keeping the interaction time constant. This operation
indicates a logical NOT operation. It may seemingly easy to realize a
quantum bit and perform quantum calculation by combining (A) and (B)
described above.

[0017]However, in order to form multiple quantum bits comprising a
plurality of quantum dots, it is necessary to perform ESR control
rapidly, precisely and individually on electron spin in each quantum dot.

[0018]In the conventional ESR control methods, however, rapid electron
spin in all quantum dots are controlled only in uniform and simultaneous
way, having difficulties in realizing multiple bits.

[0019]In view of the situation described above, an object of the present
invention is to provide an electronic device using quantum dots, which
comprises a ferromagnetic magnet, and can carry out quantum calculation
by performing ESR control on each multiple quantum bit individually in a
power saving way.

[0020]To fulfill the above object, the present invention provides:

[0021][1] An electronic device using quantum dots, comprising a
ferromagnetic magnet disposed in the vicinity of each quantum dot of a
plurality of aligned semiconductor quantum dots and transforming a high
frequency electric field into a high frequency magnetic field, wherein
the ferromagnetic magnet is a ferromagnetic thin film that is disposed on
the quantum dots with a dielectric material therebetween.

[0022][2] The electronic device of [1], wherein a frequency of the high
frequency electric field is 1.6 GHz and more and 300 GHz or less.

[0023][3] The electronic device of [2], wherein a frequency of the high
frequency electric field is 1.6 GHz and more and 3 GHz or less.

[0024][4] The electronic device of [2], wherein a frequency of the high
frequency electric field is 3 GHz and more and 30 GHz or less.

[0025][5] The electronic device of [2], wherein a frequency of the high
frequency electric field is 30 GHz and more and 300 GHz or less.

[0026][6] The electronic device of [1], wherein the ferromagnetic thin
film is made from cobalt or cobalt alloy containing 50% and more of
cobalt.

[0027][7] The electronic device of [6], wherein a thickness of the
ferromagnetic thin film is from 0.05 μm to 1 μm, a width of the
ferromagnetic thin film is from 0.3 μm to 0.4 μm, and a length of
the ferromagnetic thin film is 1 μm.

[0028][8] The electronic device of [1], wherein the ferromagnetic thin
film is made from nickel or nickel alloy containing 50% and more of
nickel.

[0029][9] The electronic device of [8], wherein a thickness of the
ferromagnetic thin film is from 0.15 μm to 3 μm, a width of the
ferromagnetic thin film is from 0.3 μm to 0.4 μm, and a length of
the ferromagnetic thin film is 1 μm.

[0030][10] The electronic device of [1], wherein the ferromagnetic thin
film is made from dysprosium or dysprosium alloy containing 50% and more
of dysprosium.

[0031][11] The electronic device of [10], wherein a thickness of the
ferromagnetic thin film is from 0.025 μm to 1 μm, a width of the
ferromagnetic thin film is from 0.3 μm to 0.4 μm, and a length of
the ferromagnetic thin film is 1 μm.

[0032][12] The electronic device of [1], wherein the ferromagnetic thin
film is made from iron or iron alloy containing 50% and more of iron.

[0033][13] The electronic device of [12], wherein a thickness of the
ferromagnetic thin film is from 0.025 μm to 1 μm, a width of the
ferromagnetic thin film is from 0.3 μm to 0.4 μm, and a length of
the ferromagnetic thin film is 1 μm.

[0034][14] The electronic device of [1], wherein the ferromagnetic thin
film is made from chromium or chromium alloy containing 50% and more of
chromium.

[0035][15] The electronic device of [14], wherein a thickness of the
ferromagnetic thin film is from 0.025 μm to 1 μm, a width of the
ferromagnetic thin film is from 0.3 μm to 0.4 μm, and a length of
the ferromagnetic thin film is 1 μm.

[0036][16] The electronic device of [1], wherein a gradient magnetic field
and a parallel magnetic field with respect to the surface of the quantum
dots are generated due to a magnetic field generated by the ferromagnetic
thin film.

[0037][17] The electronic device of [1], wherein an energy state of
electron spin in each quantum dot is changed by applying a strong
external magnetic field under an ultra-low temperature, and each quantum
dot has an individual energy state by the action of the parallel magnetic
field.

[0038][18] The electronic device of [16], wherein an electron disposed in
the vicinity of the quantum dots are electrically driven under the
influence of the gradient magnetic field, and electron spin resonance is
realized.

[0039][19] The electronic device of [18], wherein an electron spin state
can be manipulated to be a spin-up state and a spin-down state by the
electron spin resonance, and the electron spin state is related to a bit,
thereby setting a quantum bit

[0040][20] The electronic device of [1], wherein each quantum dot has a
different energy state by the action of the ferromagnetic magnet.

[0041][21] The electronic device of [1], wherein electron spin can be
manipulated independently by applying a high frequency electric field
with different frequency to each quantum dot, according to the electron
spin resonance principle.

[0042][22] The electronic device of [1], wherein electrons present in the
quantum dots mutually form an electronic coupling state.

[0043][23] The electronic device of [1], further comprising a control
electrode disposed halfway between the quantum dots, wherein a coupling
state of electrons is controlled by applying a voltage to the control
electrode to extend or contract a depletion layer under the control
electrode.

[0044][24] The electronic device of [23], wherein quantum calculation is
performed by manipulating the coupling state of electrons.

[0045][25] The electronic device of [1], wherein each quantum dot has a
horizontal quantum dot structure with a gate electrode for forming a
quantum dot, the gate electrode being disposed on a surface of a
semiconductor crystal substrate, the substrate having a two-dimensional
electron gas layer at a heterojunction interface between a gallium
arsenide and an aluminum gallium arsenide.

[0046][26] The electronic device of [1], wherein each quantum dot has a
horizontal quantum dot structure with a gate electrode for forming a
quantum dot, the gate electrode being disposed on a surface of a
semiconductor crystal substrate, the substrate having a two-dimensional
electron gas layer at a heterojunction interface between a silicon and a
silicon germanium.

[0047][27] The electronic device of [25] or [26], wherein each quantum dot
has a vertical quantum dot structure in which the two-dimensional
electron gas layer is geometrically cut out and a metallic electrode is
disposed on the periphery of the cut out layer.

[0048][28] The electronic device of [1], wherein the ferromagnetic magnet
is made from a ferromagnetic metal, an oxide ferromagnetic metal, a
superconductive metal, or an oxide superconductive metal.

[0049][29] The electronic device of [1], wherein a distance from the
ferromagnetic magnet to each semiconductor quantum dot is different.

[0050][30] The electronic device of [29], wherein the distance from the
ferromagnetic magnet to each semiconductor quantum dot varies from 0.15
μm to 0.5 μm, and a thickness of the ferromagnetic magnet is 0.1
μm.

[0051][31] The electronic device of [1], wherein a thickness of the
ferromagnetic magnet in the nearest neighborhood of each quantum dots is
varied.

[0052][32] The electronic device of [31], wherein a thickness of the
ferromagnetic magnet varies from 0.025 μm to 1 μm.

[0053][33] The electronic device of [23], [25], or [26], wherein a
dielectric film is disposed between the ferromagnetic magnet and the
electrodes or the gate electrodes for forming a quantum dot.

[0054][34] The electronic device of [33], wherein the dielectric film is
an electron beam lithography resist, a photoresist or silicon dioxide, or
silicon nitride.

[0055][35] The electronic device of [23], wherein the dimensions of the
ferromagnetic magnet, the control electrode, and the gate electrodes for
forming a quantum dot are changed uniformly so as to provide the same
function only by changing a magnitude of applied voltage.

[0056][36] The electronic device of [1], further comprising a control
electrode, an electrode for forming a quantum dot, and a readout quantum
point contact gate electrode in the vicinity of the semiconductor quantum
dots, and further comprising a quantum point contact exhibiting one
dimensional quantized electron conduction phenomenon.

[0057][37] The electronic device of [1], further comprising a quantum
point contact which changes its conductivity depending on the number of
electric charges in the neighboring quantum dots.

[0058][38] The electronic device of [1], wherein readout of an electron
spin state is performed by means of detection of an electron coupling
state between the quantum dots and an electric charge.

[0059][39] The electronic device of [1], wherein an electron spin
polarized current utilizing electron spin alignment due to a leakage
magnetic field can be injected in the vicinity of the ferromagnetic thin
film.

[0060][40] The electronic device of [1], wherein a flip-flop operation can
be performed by controlling an electron spin state of each quantum dot
uniquely.

[0061][41] The electronic device of [17], wherein quantum calculation can
be performed by controlling a coupling state between the electron spins.

[0062]In other words, the present invention provides:

[0063][A] A electric device using quantum dots, comprising a structure in
which a dielectric film such as an electron beam resist is deposited on
top surfaces of gate electrodes forming a plurality of quantum dots, and
a ferromagnetic magnet is disposed on the dielectric film. A component,
which is perpendicular to a surface of a two-dimensional electron gas
layer (2DEG), of a local magnetic field produced by the ferromagnetic
magnet, generates a gradient magnetic field. When a high-frequency
electric field is applied to electrons in the gradient magnetic field,
the electrons are electrically oscillated, and the oscillations produce a
high-frequency magnetic field that is necessary for performing ESR
control. The present invention achieves the same effect as the micro coil
method of Non-Patent Document 3 in which a magnetic field is induced by
current, in at least 10 times more power saving way.

[0064][B] The electronic device of [A], wherein a magnetic field
component, which is generated by the ferromagnetic magnet and parallel to
the 2DEG plane, changes the local magnetic field intensity to which an
electron spin is subject. The magnetic field component has a magnitude of
approximately 1 to 10% of an externally applied strong magnetic field.
The magnetic field component changes electron spin energy by
approximately 1 to 10% The changes in the local magnetic field intensity
and the modulation of the electron spin energy can be controlled by
changing a layout and a structure of the ferromagnetic magnet. Since the
electron spin energy corresponds to a frequency of the high-frequency
electric field described in [A], changing the frequency of the
high-frequency electric field allows selective manipulation of the
electron spin.

[0065][C] The electronic device of [A], wherein an electron in each
quantum dot mutually forms an electronic coupling state. In the
electronic coupling state between electrons, an exchange interaction
between electron spins (a coupling state between electron spins) can be
controlled freely, by applying a voltage to an electrode disposed between
the quantum dots, and by utilizing extension or contraction of a
depletion layer under the electrode. Changing the coupling state allows
quantum calculation.

[0066][D] The electronic device of [A], comprising a horizontal quantum
dot structure, or a vertical quantum dot structure. The horizontal
quantum dot structure utilizes a two-dimensional electron gas (2DEG)
generated at a heterojunction interface such as a double heterojunction
interface between a gallium arsenide and an aluminum gallium arsenide,
and a double heterojunction interface between a silicon and a silicon
germanium. In the vertical quantum dot structure, a double heterojunction
interface is geometrically cut out, and an electrode is disposed
therearound.

[0067][E] The electronic device of [A], [B], [C], and [D], wherein a
similar effect is achieved when a ferromagnetic metal (Co, Ni, Fe, Cr,
Py, Dy, Cd), an alloy of these metals, or an oxide ferromagnetic metal
[TiO2, SrO, MnO2, LaO, (La, Sr)O] is used as the ferromagnetic
magnet. When a perfect diamagnetic material such as a superconductor (Nb,
NbTi, NbN) and an oxide superconductor (SrCuO) is used, a magnetic field
direction is reversed, but a similar effect is also expected to be
achieved.

[0068][F] The electronic device of [A], [B], [C], and [D], wherein a
similar effect is expected to be achieved when a thickness and/or a
layout of the ferromagnetic magnet are changed.

[0069][G] The electronic device of [A], [B] [C], and [D], wherein a
similar effect is expected to achieved when the dielectric film is
disposed between the ferromagnetic magnet and the control electrode/the
gate electrodes for forming quantum dots, as long as the thickness of the
dielectric film is thin enough. The dielectric film can be selected
widely from an electron beam lithography resist, a photolithography
resist and the like.

[0070][H] The electronic device of [A], [B], [C], and [D], wherein when a
quantum dot is scalable, the dimension of the ferromagnetic magnet and
the thickness of the dielectric film are controllable, so the device
becomes scalable as a whole.

[0071][I] The electronic device of [A], [B], [C], and [D], further
comprising a quantum point contact disposed in the vicinity of the
quantum dots, the a quantum point contact having a feature of exhibiting
a one-dimensional quantized transmission phenomenon, wherein the quantum
point contact changes its conductivity by sensing changes in the number
of electrons in the quantum dots, so that small changes in a electron
state can be measured, and wherein, in combination with the ferromagnetic
magnet, electron spin in a polarized state can be injected into the
quantum dot, as the Stern-Gerlach experiment.

BRIEF DESCRIPTION OF THE DRAWINGS

[0072]FIG. 1 shows a top view of a conventional electronic device using
quantum dots.

[0073]FIG. 2 shows a side view of a conventional electronic device using
quantum dots.

[0076]FIG. 5 shows a schematic top view of a pattern of an electronic
device using a horizontal two-quantum dot structure in accordance with
the first embodiment of the present invention.

[0077]FIG. 6 shows a schematic cross-sectional view of an electronic
device using horizontal two-quantum-dot structure in accordance with the
first embodiment of the present invention.

[0078]FIG. 7 shows a spatial distribution of a gradient magnetic field
component and a parallel magnetic field component generated by a
ferromagnetic micro magnet in accordance with the present invention.

[0079]FIG. 8 shows a result of an ESR resonance experiment with a magnetic
field intensity changing from 0 to 5 T in accordance with the present
invention.

[0080]FIG. 9 shows a diagram illustrating a relationship between a
resonant frequency and a resonance magnetic field intensity in accordance
with the present invention.

[0082]FIG. 11 shows a diagram illustrating a transfer of a quantum dot
state in accordance with the present invention.

[0083]FIG. 12 shows a schematic cross-sectional view of a semiconductor
crystal substrate for fabricating a vertical two-quantum-dot structure in
accordance with the third embodiment of the present invention.

[0084]FIG. 13 shows a cross-sectional view of an electronic device using a
vertical two-quantum-dot structure in accordance with the third
embodiment of the present invention.

[0085]FIG. 14 shows a schematic top view of an electronic device using a
vertical two-quantum-dot structure in accordance with the third
embodiment of the present invention.

[0086]FIG. 15 shows a first conceptional schematic diagram of multiple
quantum bits having a micro magnet in accordance with the fourth
embodiment of the present invention.

[0087]FIG. 16 shows a second conceptional schematic diagram of multiple
quantum bits having a ferromagnetic micro magnet in accordance with the
fifth embodiment of the present invention.

BEST MODE FOR CARRYING OUT THE INVENTION

[0088]The electronic device using quantum dots in accordance with the
present invention comprises a ferromagnetic magnet disposed in the
vicinity of each quantum dot of a plurality of aligned semiconductor
quantum dots and transforming a high frequency electric field into a high
frequency magnetic field, wherein the ferromagnetic magnet is a
ferromagnetic thin film that is disposed on the quantum dots with a
dielectric material therebetween.

Embodiments

[0089]Embodiments of the present invention will be described in more
detail below.

[0090]An electronic device with two semiconductor quantum dots will be
used in the embodiments.

[0091]FIG. 5 shows a schematic top view of an electronic device using a
horizontal two-quantum-dot structure in accordance with the first
embodiment of the present invention. FIG. 6 shows a cross-sectional view
of the electronic device. In FIGS. 5 and 6, identical components are
given the same reference signs as in FIGS. 1 and 2, so the repetition of
the same description will be avoided here.

[0092]A calixarene insulating film 14 is deposited on a semiconductor
crystal substrate 1. A ferromagnetic micro magnet 10 that transforms a
high frequency electric field into a high frequency magnetic field is
formed on the calixarene insulating film 14 by the electron beam vacuum
evaporation method, so as to be 90 nm away from the surfaces of the gate
electrodes 2, 3, 4, and 5. Thus, a ferromagnetic thin film is formed as
the ferromagnetic micro magnet 10. Adjusting voltages applied to the gate
electrodes 2, 3, 4, and 5 allows both quantum dots 8 and 9 to have only a
single electron. 15 shows a quantum point contact current (QAC current).

[0093]The electronic device shown in FIG. 5 is mounted on a sample holder
of a dilution refrigerator, and the sample is cooled down to 100 mK
(millikelvin). An external magnetic field 17 of 25 T (tesla) is applied
in order to fix an energy state of electron spin. In this state, an
electron spin blocked state is realized as described in (A) in Background
Art, and no current flows unless electron spin resonance occurs.

[0094]FIG. 7 shows a magnetization state of the ferromagnetic micro magnet
10 under a strong magnetic field intensity along with a spatial
distribution of a parallel magnetic field component 43 and a gradient
magnetic field component 42 generated by this magnetization onto the
surfaces of the quantum dots 8 and 9. 41 shows magnetic lines of force
produced by the ferromagnetic micro magnet 10.

[0095]The electron spins in the quantum dots 8 and 9 are driven
electrically by applying a high frequency electric field with a frequency
from 1.6 GHz to 300 GHz as shown in FIG. 8 and FIG. 9, or more
specifically a frequency from 1.6 GHz to 3 GHz or from 3 GHz to 30 GHz as
shown in FIG. 8, or a frequency from 30 GHz to 300 GHz as shown in FIG. 9
to an electrode for applying an ESR signal (a high frequency electrode)
7. The direction of this electron oscillation is parallel to the external
magnetic field 17 and perpendicular to the gradient magnetic field
component 42. When the electrons in the quantum dots 8 and 9 are
perturbed under the gradient magnetic field component 42 generated by the
ferromagnetic micro magnet 10 disposed in the vicinity of the quantum
dots 8 and 9, the electrons feel an effective high-frequency magnetic
field which changes in the up and down directions of FIG. 7. Since the
direction of stationary electron spin is parallel to the external
magnetic field 17 and the oscillation direction, when the electrons
oscillate, the electron spins feel a couple (torque) in the direction
deviating from the parallel direction according to the electromagnetic
theory. The couple gives rise to a precession to the electron spins in
the ESR control, and periodically reverses the direction of the electron
spin. It is always possible to reverse the electron spins by 180 degrees
by controlling the oscillation period of the electrons.

[0096]FIG. 8 shows a result of a series of observations of ESR resonance
peaks in accordance with the present invention. The vertical axis shows a
current in pA, and the horizontal axis represents magnetic field
intensity in T. The inset of FIG. 8 shows an enlarged view illustrating a
resonance state under an applied magnetic field intensity of 1.7 T. In
order to show linear responsiveness of the resonance clearly, an offset
of the base line is adjusted. The height of the base line of each
resonance peak corresponds to the resonant frequency (GHz) given to the
right vertical axis. The ESR control method used in the present method is
performed with a power consumption more than 10 times lower than the
method using a micro coil described above in Background Art, and more
than 5 times lower than the conventional method in which microwaves are
introduced directly into a control electrode.

[0097]FIG. 9 shows a diagram illustrating a relationship between resonance
magnetic field intensities and resonant frequencies in accordance with
the present invention. The resonance point increases linearly with
magnetic field intensities at high magnetic field intensities, but at low
magnetic field intensities, it does not change linearly due to an
influence of the ferromagnetic micro magnet. When the resonance magnetic
field intensities shown in the vertical axis are calibrated by small
amounts and then divided by the resonant frequency (GHz) shown in the
horizontal axis, the resonance in high resonant frequency region clearly
shows a constant linear relationship. On the other hand, in the lower
magnetic field intensity region, a gradual decrease is observed. This
calibration amounts indicate a parallel magnetic field component 43
generated by the ferromagnetic micro magnet 10. That is, the calibration
amounts show a magnetization process of the ferromagnetic micro magnet 10
due to the external magnetic field. FIG. 9 indicates that the
ferromagnetic micro magnet 10 is perfectly magnetized at the external
magnetic field intensity of approximately 2 T and more.

[0098]The parallel magnetic field component 43 that is parallel to the
external magnetic field and is generated by the ferromagnetic micro
magnet 10 is added to or subtracted from the external magnetic field 17,
and slightly modulates electron spin energy by the amount of
approximately 1 to 10%. This means that the electron spin energy can be
changed by modifying the structure of the ferromagnetic micro magnet 10.

[0099]The magnitude of the parallel magnetic field component 43 changes
depending on the degree of the magnetization. In a case of a perfect
magnetization, the magnitude of the parallel magnetic field component 43
that is parallel to the external magnetic field 17 slightly changes
depending on its position, so that the resonance magnetic field intensity
can be changed by the positions of the quantum dots 8 and 9. FIG. 10
shows a graph indicating observation results of ESR resonance. Each peak
shows resonance of each of the quantum dots 8 and 9. A current flows when
electron spin in one of the quantum dots is resonant with ESR. That is,
an ESR signal for each quantum dot is measured at different frequencies,
and that individual ESR control can be performed by selecting a different
frequency for each quantum dot. In FIG. 8, the two-peak structure is not
observed (or the signal is too small) at the external magnetic field
intensity of 2 T or less. It seems this is due to imperfect magnetization
of the ferromagnetic micro magnet 10 in the lower magnetic field
intensity region, and a small magnitude of the parallel magnetic field
component 43, as shown in FIG. 9.

[0100]A quantum bit (QUBIT) which is necessary for quantum calculation can
be realized in combination with the swapping operation described in (B)
in Background Art, in accordance with the second embodiment of the
present invention.

[0101]A quantum calculation method will be shown more specifically below.

[0102]FIG. 11 shows a diagram illustrating a transfer of a quantum dot
state in accordance with the present invention.

[0103]Each electron spin state is expressed by numerals "0" and "1", where
"0" is a state in which electron spin is parallel to the external
magnetic field 17 (a ground state), and "1" is a state in which the
electron spin is reversed (an excited state). Each electron spin state is
expressed, from left, as (D1, D2). Initialization is first performed by
waiting for a time approximately equal to the relaxation time under a
static magnetic field. In this state, each electron spin is in the
spin-up state, that is (0, 0) as shown in FIG. 1(a). Then, a high
frequency electric field is applied to the electrode for applying an ESR
signal (a high frequency electrode) 7 (see FIGS. 5 and 6) to reverse a
given electron spin by the ESR control. A resonance magnetic field
intensity and a resonance frequency are selectable as shown in the above
description. The electron spin in the left quantum dots is assumed to be
reversed for simplicity of description. In other words, the electron spin
state becomes (1, 0), as shown in FIG. 11 (b). Then, a pulse is applied
to the quantum dot coupling control electrode 2 or the center gate
electrode 5 to realize a correlation and interaction between the quantum
dots. More specifically, the voltage applied to the electrode is
decreased instantaneously, which makes the quantum dots to spatially
approach to each other and interact with each other. Information of the
electron spins is transferred, and the electron spins are reversed, this
state is (0, 1) shown in FIG. 11 (c). The electron spin in the right
quantum dot is reversed by the ESR control to create a (0, 0) state shown
in FIG. 11 (d). In this state, no current flows due to the electron spin
block. That is, no current flows when the ESR input signals are applied
to both quantum dots. Similarly, current flows when the input signal is
applied to one of the dots. When no input signal is applied and only an
interaction is performed, no current flows. These four states of the
quantum bits are shown to be equivalent to the CNOT or XOR operation.

[0104]The initial state (0, 0) is changed to (1, 0) by the ESR control,
and then changed to (0, 1) by the interaction. The latter operation
indicates that the information of the quantum bit is transferred from the
left dot to the right dot by one bit, which indicates a basic operation
of flip-flop calculation.

[0105]The invention can be applied not only to the horizontal quantum dot
structure described above but also to a vertical quantum dot structure in
accordance with the third embodiment of the present invention. FIG. 12
shows a schematic cross-sectional view of a semiconductor crystal
substrate for fabricating a vertical two-quantum-dot structure in
accordance with the third embodiment of the present invention. FIG. 13
shows a cross-sectional view of an electronic device using a vertical
two-quantum-dot structure in accordance with the third embodiment of the
present invention. FIG. 14 shows a schematic top view of an electronic
device using a vertical two-quantum dot structure in accordance with the
third embodiment of the present invention.

[0106]In the vertical quantum dot structure, an AlGaAs crystal layer 23
with a thickness of 10 nm, a GaAs crystal layer 24 with a thickness of 10
nm, an AlGaAs crystal layer 25 with a thickness of 10 nm, and a GaAs
(n.sup.+) crystal layer 26 with a thickness of 350 nm are sequentially
grown on an N--GaAs crystal substrate 22 by the epitaxial crystal growth
method as shown in FIG. 12. A 2DEG layer is formed within the GaAs
crystal layer 24. A pattern for a quantum dot with a size of 0.3 μm in
diameter is fabricated on the semiconductor crystal substrate, and then
etched down to the substrate by a suitable etching method to fabricate a
mesa as shown in FIG. 13. By evaporating gate electrodes (electrodes for
forming quantum dots) 29 such as Au, Al on the surfaces of the quantum
dots 31 and 32, Schottky barriers are fabricated on the side surfaces of
the quantum dots 31 and 32. A metal such as Au/Ge is evaporated and
alloyed on the top surfaces of the quantum dots and the rear surface of
the substrate to form, respectively, an upper ohmic electrode 27 for
quantum dots and a lower ohmic electrode 33 for quantum dots. In
addition, in the vicinity of each quantum dot 31 and 32, a ferromagnetic
metal such as Co and Ni or a ferromagnetic metal oxide film is deposited
as a ferromagnetic micro magnet 28. The distance between the
ferromagnetic micro magnet 28 and each semiconductor quantum dot 31 and
32 varies from 0.15 μm to 0.5 μm, and the thickness of the
ferromagnetic micro magnet 28 is 0.1 μm, for example. Controlling the
voltage applied to the gate electrode 29 allows each quantum dot 31 and
32 to have only a single electron. Controlling the voltage applied to the
quantum dot coupling control electrode 30 also allows control of an
interaction (coupling state) of the electron spins between the quantum
dots 31 and 32. Like the horizontal quantum dot structure described in
the first and second embodiments, a vertical quantum dot structure of
this type can also achieve the effect of the ESR control of each quantum
dot by the ferromagnetic micro magnet 28.

[0107]The above embodiments are described by using a device with two
quantum dots as examples, but the same theory can be applied to a device
with three or more quantum dots.

[0108]In accordance with the fourth and the fifth embodiments of the
present invention, changing a layout and a pattern geometry of a
ferromagnetic micro magnet with respect to each quantum dot allows ESR
control of each quantum dot to be controlled precisely by using different
frequencies.

[0109]FIG. 15 shows a first schematic conceptional diagram of multiple
quantum bits having a ferromagnetic micro magnet in accordance with the
fourth embodiment of the present invention. FIG. 16 shows a second
schematic conceptional diagram of multiple quantum bits having a
ferromagnetic micro magnet in accordance with the fifth embodiment of the
present invention.

[0110]As shown in FIG. 15, a stair-shaped micro magnet 18 that is a
ferromagnetic micro magnet is disposed to be symmetrical with respect to
a quantum dot array 19, such that each stair-step shaped surface of the
stair-shaped micro magnet 18 faces the quantum dot array 19. A distance
from the center line of the quantum dot array 19 to each of the
stair-step shaped surface varies from d1 to d4. Use of this
configuration has confirmed that a gradient magnetic field component with
a magnitude large enough for ESR to be observed can be obtained. For
example, in a case where Co is used as a metal of the stair-shaped micro
magnet 18, a preferable thickness of a Co film is from 0.05 μm to 1
μm, its preferable width is from 0.3 μm to 0.4 μm, and its
preferable length is 1 μm. In a case where Ni is used, a preferable
thickness of a Ni film is from 0.15 μm to 3 μm, its preferable
width is 0.3 μm to 0.4 μm, and its preferable length is 1 μm. In
a case where Dy (dysprosium) is used, a preferable thickness of a Dy film
is from 0.025 μm to 1 μm, its preferable width is from 0.3 μm to
0.4 μm, and its preferable length is 1 μm. In a case where Fe is
used, a preferable thickness of a Fe film is from 0.025 μm to 1 μm,
its preferable width is from 0.3 μm to 0.4 μm, and its preferable
length is 1 μm. In a case where Cr is used, a preferable thickness of
a Cr film is from 0.025 μm to 1 μm, its preferable width is 0.3
μm to 0.4 μm, and its preferable length is 1 μm.

[0111]In a case where an applied magnetic field intensity is 2 T, a
resonant frequency can be changed by about 0.6 GHz when the distance
d1 is 0.035 μm or 35 nm. The resonant frequency can be changed by
about 0.64 GHz when the distance d2 is 45 nm.

[0112]In accordance with the fifth embodiment of the present invention, as
shown in FIG. 16, when a micro ferromagnetic body 21 with a thickness of
t1, t2, or t3, . . . is disposed instead, and a distance
from the quantum dot array 19 to the micro ferromagnetic body 21 is
equal, the same effect can be obtained. For example, in a case where an
applied ESR magnetic field intensity is 2 T and a distance between the
surface the ferromagnetic thin film and the quantum dot array 19 is 35
nm, magnetic field intensity can be varied a film thickness, for example,
a film thickness of 150 nm gives a displacement magnetic field intensity
of 100 mT, and a film thickness of 170 nm gives a displacement magnetic
field intensity of 110 mT. Thus, making the film thickness of the
ferromagnetic micro magnet in the vicinity of the quantum dot array 19
changeable allows each quantum dot to be resonant at a desired frequency.
Although the ferromagnetic body is disposed symmetrically with respect to
the quantum dot array 19 in FIG. 16, similar effects can be obtained by a
non-symmetrical configuration or when a micro ferromagnetic body is
disposed on one side.

[0113]In accordance with the sixth embodiment of the present invention,
the device described in the first to fifth embodiments can be also
applied when a dielectric film of different type is used. In other words,
the same effects can be expected when a dielectric film such as an
electron beam lithography resist (PMMA, OEBR, ZEP), a photoresist (S1800,
AZ5200), silicon dioxide, silicon nitride and the like are used.

[0114]In accordance with the seventh embodiment of the present invention,
exactly the same effect can be expected just by increasing or decreasing
the operating voltage, even when the size of the quantum dots in the
device described in the first to fifth embodiments is increased or
decreased. The electronic device is scalable since substantially the same
effect can be expected only by changing a thickness and shape of a micro
ferromagnetic body (a ferromagnetic micro magnet).

[0115]In accordance with the eighth embodiment of the present invention,
providing the input and output ends of the semiconductor quantum dot
array with the readout quantum point contact electrode 6 (see FIGS. 5,
15, and 16) that measures a quantum point contact current (QPC current
15: IQPC) allows readout of a respective electric charge state
without changing the electron spin state.

[0116]When moving an electron after quantum calculation as shown in the
second embodiment, for example, when transferring the electrons in the
electron spin state of (1, 0) to another state of different electron
numbers, the QPC current 15 is changed. The result of the quantum
calculation can be indirectly observed by measuring the QPC current 15.

[0117]Writing into the quantum dots becomes feasible at the input end by
providing a quantum point contact structure and a ferromagnetic micro
magnet in the close vicinity of the input end of the quantum dots. That
is, a QPC current is disposed in the close vicinity of the input end of
the quantum dot and a ferromagnetic micro magnet is disposed in between.
A current passing through the quantum point contact changes its
trajectory due to the ferromagnetic micro magnet, but the amount of the
change depends on the electron spin state as demonstrated by the result
of the Stern-Gerlach experiment. In this way, the electron spin state at
the input end becomes selectable. Of course, when it is not necessary to
fix the electron spin state, the quantum point contact may be removed. In
such a case, an electron can be injected into the quantum dot
irrespective of its trajectory and the electron spin state.

[0118]The same effect can be expected when, in addition to GaAs and AlGaAs
described above, InP, InAs, GaSb, Si and the like, or mixed crystal of
thereof is used for a semiconductor crystal substrate.

[0119]An interaction 20 (see FIGS. 15 and 16) between electron spins is
changd freely by high speed operation of the gate voltage in order to
enable quantum calculation.

[0120]The present invention is not limited to the above embodiments.
Various variations and modifications can be made based on the spirit of
the present invention, and these are not excluded from the scope of the
present invention.

[0121]The present invention provides the following advantages.

[0122]The present invention provides an electronic device using quantum
dots, which comprises a ferromagnetic magnet, and enables quantum
calculation by performing ESR control, in more power saving way than
conventional ways, individually on each multiple-quantum bit having a
quantum bit array, which can not be achieved by the prior art.

[0123]Specifically demonstrated cases shows that the Zeeman level in
quantum dots can be modulated precisely and with a identifiable magnitude
by a ferromagnetic magnet disposed in the vicinity of the quantum dots,
and that ESR control of the electron spins in the quantum dots can be
performed precisely since a gradient magnetic field transforms a high
frequency electric field into a high frequency magnetic field. It is also
demonstrated that each quantum dot can be controlled with different
resonant frequencies since the magnitude of modulation of the Zeeman
energy as described above can be controlled by changing the intensity of
the ferromagnetic magnet. As a result, an electric power required for the
ESR control becomes about ten times lower than that of conventional ways.
Thus, the present invention enhances the possibility of quantum
calculation by individual ERS control, which has been deemed impossible
by the conventional techniques.

INDUSTRIAL APPLICABILITY

[0124]The electronic device using quantum dots, which comprises a
ferromagnetic micro magnet, in accordance with the present invention, can
be used as an electronic device that realizes quantum calculation by
performing ESR control on each multiple-quantum bit individually in a
power saving way.