IPACS Electronic library

Impact dynamics of MEMS gear teeth

MIRCEA TEODORESCU, HOMER RAHNEJAT

The paper provides a dynamic analysis of micro-gear pairs, typically used in an assortment of MEMS devices. Impact dynamics of meshing teeth, including the effect of asperity tip adhesion for relatively rough surface interactions are included in the analysis. The effect of long chain molecule SAM in impact behaviour of meshing pairs has also been investigated.