Hi Alvin,
I think I'm doing ~2 micron, so if that would work for you,
give me some wafers!
-Eric
On Thu, 26 Jul 2007, A. Alvin Barlian wrote:
> i have reservation at 8am tomorrow morning and i need to deposit
> about 1-1.2 um of LTO at LTO400... you can come and join me, maybe we
> can share the task of cleaning the wafers somehow..
>> also, how long does it take to do LTO400?
>>>>> On Jul 26, 2007, at 1:59 PM, solankak at whitman.edu wrote:
>> > Hi, I want to run LTO400 for an oxide deposition anywhere between
> > 1-2um thick in the tylanbpsg, but my reservation is not for awhile.
> > Does anywone have space during their time or does not need their
> > reservation anymore in the next couple of days? I have 8 wafers to
> > deposit, but can use either the metal or non-metal boat. Thanks in
> > advance,
> > Allison Solanki
> > solankak at whitman.edu>>