years ago I worked for PE which became svgl now it is ASML...I remember microscan twinscan etc etc....but most of all our little company BBE was ahead of ASML and it is now 20 years....Charlie K of PE, Frank Reidel of PE both dead now...and I am the only one left...we were and are ahead of our times.....BBE, xray stepper just google....

I just don't see it happening anytime soon for EUV litho. There are so many issues that still need to be addressed. I see only more delays ahead. A 2015 insertion point for "real manufacturing" seems optimistic to me.