developed in this paper can guide the design of RF MEMS components with .....
increasing the transmission-line thickness is the most practical design approach
Â ...
Source: http://katsuokurabayashi.com/wp-content/uploads/2010/06/Skin-Effect-JMEMS-2006.pdf

We examine how MEMS reliability is handled in commercial MEMS devices used ...
Source: http://infoscience.epfl.ch/record/125178/files/Phot%2520West%25202006%2520-%2520MEMS%2520rel%2520for%2520space.pdf

20% of the dielectric material as compared to a full capacitive switch, ... cycles at the advanced MEMS testing facility at the Air Force Research Laboratory ... Over the past five years, RF MEMS device developers have been honing their ...
Source: http://www.tektonllc.com/index_files/Update%20on%20RF%20MEMS%20Switch%20Reliability.pdf

In the absence of standardized testing, more extensive knowledge of failure modes, and the associated reliability of MEMS-based devices, many OEMs have ...
Source: http://www.dfrsolutions.com/uploads/publications/2008_01_A%20perspective%20on%20MEMS%20reliability%20for%20telecom%20applicationsMWS.pdf

... device, some perforated microstructures are often designed to avoid the
stiction ... different shapes in MEMS devices have been widely analyzed by many
researchers ..... [8] M. Bao. Analysis and Design Principles of MEMS Devices.
Elsevier.
Source: http://www.researchgate.net/publication/251982779_Modeling_and_characterization_of_a_MEMS_G-sensor_with_anti-stiction_raised_strips_for_vibration_monitoring_systems/file/5046351f9abd1757c3.pdf