About SMART

SMART (Simple Model for ALD Reaction and Transport) is a software developed
by the Atomic Layer Deposition group
at Argonne National Laboratory. Its aim is to provide a tool to understand
the interplay between surface reaction and precursor transport during
Atomic Layer Deposition, and how this translates into coverage profiles
both in reactors and nanostructures.

SMART comes in two flavors:

The basic interface comprises two uncoupled
models, one at the reactor and another at the feature scale.

The advanced interface
incorporates more features, including the possibility
to load experimental data,
the presence of an overimposed CVD component,
and a much faster model at the reactor scale in
the plug-flow approximation, which allows the fitting of
experimental profiles to extract effective reaction probabilities.