Abstract

Abstract A simple apertureless dielectric microprobe in the form of a section of the tapered optical fiber was proposed for surface laser nanomodification. This probe enables surface λ/2-localization of laser beam, as shown both numerically and experimentally. Single nanoholes with the minimum size down to 90nm (∼λ/6) were fabricated in the 25-nm Au/Pd film, using this probe and a 532-nm pump nanosecond laser.

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