2" chuck for single-die, piece-parts and 2" wafers/substrates3" chuck for piece-parts, 2", and 3" wafers/substrates4" chuck for 2", 3", and 4" wafers/substrates6" chuck for 4", 5", and 6" wafers/substrates8" chuck for 6" and 8" wafers/substrates
Combination vacuum chucks have multiple vacuum lines which can be individually selected and closed off as required