Samsung " gate-all-around FET at 4nm in 2020 using EUV."...........................................................

"We believe around 1nm is possible"

Samsung also announced plans to introduce its first gate-all-around FET at 4nm in 2020 using EUV. This is the first time a foundry has publicly discussed a timetable for delivering GAA FETs, but roadmaps exist within a number of companies for several more nodes. That includes EUV lithography, GAA FETs using vertical and horizontal nanowires, and nanosheet FETs.

Kinam Kim, president of Samsung’s Semiconductor Business, said during a presentation at a recent event sponsored by Imec, a Belgium R&D organization, that the company sees a path to logic transistor scaling down to 1.5nm.

Then, using a 2D material called molybdenum disulfide (MoS2), Samsung believes it could scale logic technology even further. Samsung and others are exploring so-called MoS2 FETs. “We believe around 1nm is possible,” Kim said. Still in the R&D stage, MoS2 is a family of transition metal dichalcogenide (TMD) materials. The TMDs have remarkable electronic, optical and mechanical properties