Received 15 January 2010Accepted 24 March 2010Published online 14 April 2010

Acknowledgments:

The authors would like to thank Mr. Katsuya Tanitsu of Tokyo Ohka Kogyo Co., Ltd. (TOK) for providing SOD source materials and valuable discussion and Dr. Hiroyuki Ohtsuka of Shinetsu for providing Si wafers. This work was supported in part by the New Energy and Industrial Technology Development Organization (NEDO).