I am curious about this as well. Is there any chance I could use the
machine for 20 minutes (5500 A of high-frequency oxide) sometime in the
next two days? It is a very short deposition and it is holding up my
entire process. I tried to do my deposition last night but got the
now-infamous silane error. Zpatel, fungus?
Alex Neuhausen wrote:
> I'm genuinely curious. Fungus, jrjain and zpatel, what do you do
> during an 18-24 hour session on the STS? 4 microns of oxide each on a
> case full of 6 inch wafers?