Picosun’s core competence is cost-efficient, turn-key ALD production systems for the fast-growing More-than-Moore market, for which the P-300F is the flagship product. Specially designed to be run in cluster configuration under constant vacuum to enable fast and efficient high-throughput manufacturing, P-300F tools are connected together and operated in fully automatic mode with a central vacuum robot substrate handling and transfer system. The unique batch flipping mechanism in the P-300F is suitable for manufacturing lines where most of the process steps take place in a horizontal geometry. Cassette-to-cassette loading for up to 50-wafer batches of 200/150/100mm substrates, SEMI S2/S8 certification and a SECS/GEM option for factory host integration make the P-300F the optimal choice for demanding manufacturing needs for, for example, moisture barriers, capacitors and surface acoustic wave (SAW)/bulk acoustic wave (BAW) filters.

“The purity, uniformity and barrier properties of the ALD films deposited in these systems fulfil the strictest requirements of today’s semiconductor industries, making the Picosun P-300F the tool of choice for the forerunners of semiconductor manufacturing,” claims managing director Juhana Kostamo.

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