by C-V measurements, and it is found that addition of N into the oxide increases both the values of D it and Q f. After FGA, D it at midgap decreases from 2.3 × 1012 to 6.1 × 1011 cm−2 eV−1 with decreasing N2/O2 flow ratio from 1 to 0.01, Tipifarnib research buy while the decrease of Q f is insignificant from 1.5 × 1012 to 1.2 × 1012