RTH46/JD: MEMS Resonator Simulation

Project ID

RTH46/JD

Website

Start Date

Tue 2005-Feb-01 17:30:52

Last Updated

Sun 2006-Feb-05 15:31:55

Abstract

Electromechanical resonators and filters, such as quartz, ceramic, and
surface-acoustic wave devices, are important signal-processing elements in
communication systems. Over the past decade, there has been substantial
progress in developing new types of miniaturized electromechanical
resonators using microfabrication processes. For these micro-resonators
to be viable, they must have high and predictable quality factors (Q).
Depending on scale and geometry, the energy losses that lower Q may come
from material damping, thermoelastic damping, air damping, or radiation of
elastic waves from an anchor. Our goal is to understand these loss
sources quantitatively; and to provide a computational tool, HiQLab, to
predict and optimize resonator response before embarking on costly
manufacturing and re-design cycles.