NANOPOSITIONING

The NMM-1 nanopositioning and measuring machine from Sios Messtechnik GmbH is used for three-dimensional coordinate measurement over a 25 × 25 × 5-mm range with a resolution of 0.1 nm. Its sensor arrangement provides Abbe error-free measurements on the three coordinate axes, according to the company. The machine may be operated as a dynamic positioning system or as a measuring system in either continuous-scan or single-step mode. Applications include the manipulation and processing of objects in the fields of micromechanics and electronics.