Title (fr)

Publication

Application

Priority

JP 28624694 A 19941121

Abstract (en)

[origin: EP0712945A1] The invention provides an improvement in a recharger system consisting of a feeder and a feed conduit for recharging polycrystalline silicon granules into the crucible after a run of growing a single crystal silicon rod by the Czochralski method so as to prepare for the next run of crystal growing. The improvement comprises controlling the amount of holdup of the silicon granules in the feed conduit by means of a sensor provided on the feed conduit so as to ensure smooth and high-rate feed of the silicon granules in such a way that the feed rate of the silicon granules from the feeder to the feed conduit and/or the descending velocity of the crucible can be controlled by the signals generated in the sensor corresponding to the amount of the holdup in the feed conduit. <IMAGE>