Regress Pro

Regress Pro is scientific and industrial software that can be used to study experimental data coming from spectroscopic ellipsometers or reflectometers. The program has been developed mainly looking to the application of thin film measurement in semiconductor industry. The software is suitable both to determine the thickness of the layers and to determine the optical properties of dielectric materials.

Recent releases

Release Notes: This is mainly a maintenance release that fixes some bugs present in version 1.4.0 and improves some minor usability aspects. This is a recommended upgrade for all the users of Regress Pro.

Release Notes: This release introduces many improvements. The most important is the addition of an interactive fit session, which allows users to experiment with experimental spectra and models. A new dispersion optimizer has been implemented to interactively adapt a model to a reference dispersion. The graphical engine was completely rewritten to use the antigrain library (AGG). The user's manual was also updated to reflect the new features and to add some missing parts.