Further information

The MicroWriter 3 Pro works with a 385 nm photo diode which can be used for g-, h- and i-line resists (positive and negative and SU-8). The system provides four different resolutions which easily can be switched via the software (0.6 µm, 1 µm, 2 µm and 5 µm). As an option you can add 0.4 µm resolution. MicroWriter 3 Pro includes an optical profilometer and a wafer inspection tool.

Additionally one can add a 405 nm or 365 nm photo diode or the backside alignment option to the system.

The baby, the baby plus and the Mesa system are using a 405 nm diode as standard which can be change with a 385 nm or 365 nm.

Each system can be upgraded to the next level at any later stage which makes the MicroWriter family the most flexible direct write lithography platform in the market.