WS-650-23B Spin Coater

Station Mounted WS-650-23B

The
Laurell
WS-650-23
Bspin coater
is compact and packed with advanced features.
This 650-series coater system
will
accommodate up to ø150mm wafers and
5" × 5"
(127mm × 127mm) substrates,
and features a maximum rotational speed of 12,000 RPM
(based on a ø100mm silicon wafer).

WS-650-23B
Spin Coater Specifications

Process Controller: The 650-series process controller utilizes a
robust microprocessor and, with the use of its accompanying PC software (written
in an object-oriented programming language), it achieves nearly unheard of flexibility both in process
definition and use. This controller allows operator interaction in real-time during the process execution including pausing time,
stopping and continuing on from that point. The system can and will be continually updated easily and quickly
in the field with downloadable firmware revisions. (We plan ahead at Laurell!)

Researchers worldwide have developed unique processes which will ONLY run with the level of control
sophistication we offer. The 650-series controller can also be used in conjunction with a PC with Spin 3000,
Laurell's exclusive process management software. However, this is NOT required to program or run the equipment. The use of a PC adds the ability to record a process as it's run, operate remotely, program or communicate across a LAN or the Internet. The software, which is supplied at no additional cost, allows the operator to create virtual process simulations even beyond the hardware actually installed spin processor, in effect, letting them try it before they commit to a process. All 650 systems can be upgraded or re-purposed without return to the factory with simple plug-in modules, either actually or virtually, and can contain a virtually unlimited number of processes and steps.

A Brief Description: The housing for this system is typically made from a solid co-polymer blend exclusive to Laurell Technologies. Unlike pure Natural Polypropylene, this material is able to resist solvents and strong acids and bases. Samples are available for testing and verification upon request. A solid PTFE Hostaflon® TFM-1600 / Teflon® AF housing is available (popular for high temperature chemistry and sub-micron particle studies).

The closed bowl design, coupled with the precision of the process controller, allows most coating materials to dry in a quiescent state, increasing uniformity and minimizing particle contamination. The upper plenum closes inside the base to provide an overlapping seal, and the inside of the lid has a special gutter to channel fluid to the rear of the system to discourage chemicals from accidentally dripping onto the substrate.

A proprietary labyrinth seal protects the motor and control electronics from chemical contamination. This seal provides the process chamber with Nitrogen purge and has been proven to be particle-free on a sub-micron level during field testing. The system's clear top is made from ECTFE (unless otherwise stated), and only ECTFE-coated 316 stainless steel screws are used in some non-wetted areas throughout the system.

Operator and System Safety

Safety

Complete electrical isolation from the operator, fool-proof door interlock, and ETL certification, UL, and CSA approval
of components assure many years of safe, trouble-free performance. Interlocks prevent rotation when the vacuum switch
has not been engaged and when the lid is open. All Laurell systems are CE
and RoHS compliant, and all certificates are sent with each system.
For more information, please visit the Safety page.

Process Safeguard

The "process safeguard" feature of all Laurell process controllers ensures that the same process cannot inadvertently
be run on the same substrate. This feature can easily be bypassed to run the same process again without opening the system
or a sequence can be run over and over (looping).

Processes supported

The WS-650 series is typically employed for Solvent, Base or
Acid-based processing: Coating, Etching, Developing, Rinsing-Drying and
Cleaning. While all of these process are supported, Laurell recommends
single-use only, due to known material
conflicts. For example, Photoresist and Developer (cross-contamination),
and SC-1 &
SC-2 (HCl
+ NH4OH),
creating NH4Cl,
a hazardous inhalation risk. Many dispense options, both manual and
automatic, are available.

Continued Process Development:

A spray coating technique is currently in the prototype
stage, focusing on our MEMS Customers. We believe there is a more
straightforward and affordable approach for uniformly coating high-aspect-ratio
features found in MEMS work. We are currently looking for a few
partners to help with beta-testing the system. If you have such an interest,
please contact us with your specific needs.

"Always enthusiastic and extremely helpful. If he [Laurell Support Technician] didn't have the answer, he found it and got right back to us. He did a terrific job, and I know that I will return to Laurell Technologies if I need anything in the future. Kudos to you and your team!"

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Bio

With tens of thousands of systems installed worldwide since 1985,
Laurell Technologies is the world's leading manufacturer of spin coaters and spin processors
for the Semiconductor, Biotechnology, and Nanotechnology industries. Learn More »