In order to produce high quality LCD and AMOLED displays, TERA has integrated an advanced non-laser LTPS (Low Temperature Poly Silicon) process in their equipment.
To crystallize amorphous silicon into polysilicon, a crystallization heat treatment process must take place after uniformly depositing sub-atomic layer levels of a catalyst on the glass with a large-scale of amorphous silicon. TERA was the first in the world to mass produce this process with a non-laser equipment. Our company applies optimum conditions for various heat treatment process equipment including dehydrogenation and hydrogenation processes.