a method for forming a robust top-down silicon nanowire structure using a conformal nitride and such structure

formed thereon. the method comprises a titanium film forming step of forming a first titanium nitride film on a surface of the object including the inner surface of the concave in such a manner that a titanium film

() le procédé comprend une étape de formation de film de titane consistant à former un premier film de nitrure de titane sur une surface de l'objet incluant la surface intérieure de l'élément concave de manière à ce qu'un film de titane

brevets / patents
- wipo.int

conducting metal oxide and nitride nanoparticles that can be used in fuel cell applications