Recipe change to eliminate the microwave generator overload problem

To all users,
The staff is recommending that a small recipe change be made to
your recipes in order to eliminate the occurrence of the microwave
generator overload fault. The recommendation is to insert a "microwave
turn on step" right before the main etch step of your recipe. Please do
the following : 1) Copy the stabilization step prior the main etch
step. 2) Insert the copied step between the stabilization step and the
main etch step. 3) In the inserted step, change the ECR power from 0 to
1 W and change the process time to 5 seconds