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Abstract

We study the effect of 30 keV gallium ion implantation on the optical properties
of diamond, as determined using spectroscopic ellipsometry. We find that the
refractive index of the implanted layer can be either lower, or higher, than
that of pristine diamond, depending on the implantation dose. This observation
provides a new route to optical device fabrication in diamond using focused ion
beam methods. In particular, in the low dose regime, lowering of the refractive
index would allow for core-cladding type structures to be defined where the core
has not interacted with the beam, and is hence undamaged by the
implantation.

Figures (3)

A micrograph of white light reflectance measurement of the sample
qualitatively indicates the changes of the optical properties of diamond
induced by the implantation. Darker regions correspond to reductions in the
refractive index compared with the bulk, and brighter regions indicate that
the refractive index is increased. The numbers inside each square are the
implanted Ga fluences in ions/cm2. Note: the almost vertical
black lines on the surface of the sample are polishing marks.

Energy dependence of the refractive index of diamond from our SE measurements
(line), and as found in the literature [10–12] (squares). The inset describes the layer model that was
used in our SE. It consisted of four layers: (air / surface roughness layer
(L2) / implanted layer (L1) / diamond): three layers only were used for
diamond (see text).

(a) The optical constants n (squares) and
κ (circles) of the implanted diamond as a
function of fluence at λ = 637 nm. The
horizontal line shows the value of n for pristine diamond,
and its extinction coefficient value was κ
∼ 5 × 10−4 at this wavelength. (b) The
optical resistivity, derived from the ellipsometry measurements of the
implanted samples at λ = 637 nm (where the
conductivity, σ, is proportional to
nκω), compared with DC resistance
measured on the same samples, and the resistance of diamond implanted with
C, and Xe from Ref. [17,
18]. Note the qualitative
agreement between the heavy ion results.