Journal of Micro/Nanolithography, MEMS, and MOEMS
• Open Access

Technologies for fabrication of MEMS, optics and photonics at the micro- and nanoscale continue to advance and diversify due to rising demands for miniaturization, cost reduction, functional integration, and increased performance. Examples include diffractive optics, sub-wavelength optics, microrefractive optics, optical waveguides, photonic crystals, plasmonic devices, and heterogeneously integrated active and passive micro- and nano-optical devices. These devices are playing increasing roles in a wide range of applications, including sensors and actuators, communications, imaging, biomedical, data storage, and other areas. Both conventional and unconventional micro- and nanofabrication techniques serve as fundamental enablers for wide ranges of MEMS and passive and active optical components and devices.