News & Events

KOBUS is proud to be a partner of the RAFALD network since its foundation.

The RAFALD network, i.e. Réseau des Acteurs Français de l’ALD, is a network promoting the development of ALD technology in France.
It is regrouping both ALD end-users and ALD processes developpers to improve the exchanges in the french community.

More information about the RAFALD network and its activities can be found on the rafald.org website.

The talk, entitled “Fast pulsing of precursor and reactant to merge ALD and CVD processes: example of thick Al2O3 deposition”, will be given Tuesday 31st of October, in the session Advanced CVD and ALD processing session of the conference.

The f.A.S.T.® technology from kobus has been selected by leti to answer next-generation demands in semiconductor for conformal thin film depositionKOBUS is proud to announce that the last generation of FAST tool is now installed at the LETI.