Japanese Sensor Maker Orders New Etch System From Tegal

Published on August 17, 2007 at 8:54 AM

Tegal
Corporation, a leading designer and manufacturer of plasma
etch and deposition systems used in the production of integrated
circuits, MEMS, and nanotechnology devices, today announced that it has
received an order for a Tegal 915 batch etch system from a leading
Japanese sensor and control system maker. The new Tegal 915 system will
be used for photoresist strip applications in the customer’s
200mm microswitch fabrication line.

“We are pleased that Noah Corporation, our
recently-appointed Japanese representative, has closed this new 900
Series system sale for us in Japan. Noah has been providing excellent
technical support to Tegal’s Japanese customers for several
months already, and we expect additional sales of both our plasma etch
and PVD tools in Japan soon,” said Vahan Tchakerian,
Tegal’s Vice President of Global Sales.

The Tegal 915 is one of a series of diode and batch plasma
etch systems produced by Tegal, the industry pioneer in commercial
single-wafer plasma etching. Over 1,500 systems in the 900 Series have
been shipped to date, providing reliable and cost-effective support for
a wide range of plasma etch processes. Tegal 915 and 900ACS Series
plasma etch tools are optimized for photoresist stripping, solar
“coin stack” etching, and pad, zero layer, descum,
non-selective nitride, backside, and planarization etching, for HB-LED,
MEMS, Power Device, and Optoelectronic device fabrication. The 915 and
900ACS Series platforms can accommodate 75mm to 200mm round, square or
rectangular substrates.

Tegal 900 Series customers should also take note that an
Advanced Control System (ACS) upgrade is available exclusively from
Tegal as a field or factory retrofit for the existing installed base of
900 and 980 series systems. The ACS features a fully integrated
graphical user interface, parametric data logging, full factory
automation support, and throughput enhancements for the wafer-handling
system.