We present a novel bonding technique developed for the fabrication of a cantilever-based biosensing system with integrated optical read-out. The read-out mechanism is based on single-mode waveguides fabricated monolithically in SU-8. For optimal operation of the read-out mode, the cantilever waveguides should be homogenous and this bonding technique ensures free-hanging cantilevers that are surrounded by the same material for bottom and top claddings. The bonding step is necessary because SU-8 is a negative resist where free-hanging structures cannot be fabricated directly. This paper gives details on the processing aspects and the parameters of the fabrication steps.

We present a novel bonding technique developed for the fabrication of a cantilever-based biosensing system with integrated optical read-out. The read-out mechanism is based on single-mode waveguides fabricated monolithically in SU-8. For optimal operation of the read-out mode, the cantilever waveguides should be homogenous and this bonding technique ensures free-hanging cantilevers that are surrounded by the same material for bottom and top claddings. The bonding step is necessary because SU-8 is a negative resist where free-hanging structures cannot be fabricated directly. This paper gives details on the processing aspects and the parameters of the fabrication steps.

@misc{d47e8aa0-5991-4175-ab1c-30247f20c7d3,
abstract = {We present a novel bonding technique developed for the fabrication of a cantilever-based biosensing system with integrated optical read-out. The read-out mechanism is based on single-mode waveguides fabricated monolithically in SU-8. For optimal operation of the read-out mode, the cantilever waveguides should be homogenous and this bonding technique ensures free-hanging cantilevers that are surrounded by the same material for bottom and top claddings. The bonding step is necessary because SU-8 is a negative resist where free-hanging structures cannot be fabricated directly. This paper gives details on the processing aspects and the parameters of the fabrication steps.<br/><br>
Novel fabrication technique for free-hanging homogeneous polymeric cantilever waveguides},
author = {Tenje, Maria and Calleja, Montserrat and Hübner, Jörg and Boisen, Anja},
issn = {0960-1317},
language = {eng},
number = {1},
publisher = {ARRAY(0xa2bba38)},
series = {Journal of Micromechanics and Microengineering},
title = {A novel fabrication technique for free-hanging homogeneous polymeric cantilever waveguides},
url = {http://dx.doi.org/10.1088/0960-1317/18/1/015017},
volume = {18},
year = {2008},
}