Stress Optimization of a Micromechanical Torsional Spring

Abstract:In this paper we present a method for the design of a stress-optimized, micromechanical torsional spring, used in MEMS. Our optimization approach is based on a software tool for simulator-based optimization MOSCITO, cooperating with the FEM tool ANSYS. For a specific spring geometry we are able to increase maximally possible deflection by approximately 30 percent.