The influence of an OTS self-assembled monolayer on the wear-resistant properties of polysilicon based MEMS

Baker, MA and Li, J
(2006)
The influence of an OTS self-assembled monolayer on the wear-resistant properties of polysilicon based MEMS
In: 11th European Conference on Applications of Surface and Interface Anlaysis, 2005-09-25 - 2005-09-30, Vienna, AUSTRIA.

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