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Abstract

Disclosed is a method to realize localized super-clean zone in a down flow-type and tunnel-type clean room without changing the facilities of clean room, such as the ventilator. This device consists of a rectifying board with air guides and fixtures. It is widely applicable to any down flow-type clean room. Experiments and numerical simulations prove the effectiveness of this method to cheaply realize a localized super-clean zone.

Country

United States

Language

English (United States)

This text was extracted from an ASCII text file.

This is the abbreviated version, containing approximately
52% of the total text.

Method to Realize Effectively Localized Super Clean Zone

Disclosed is
a method to realize localized super-clean
zone in a down flow-type and tunnel-type clean room without changing
the facilities of clean room, such as the ventilator. This device
consists of a rectifying board with air guides and fixtures. It is
widely applicable to any down flow-type clean room. Experiments and
numerical simulations prove the effectiveness of this method to
cheaply realize a localized super-clean zone.

Contamination
control is a key factor to improve the yield of
products that are manufactured in a clean room.
To improve
cleanliness at some designated areas, facilities in a clean room are
usually changed. But it is expensive to change facilities such as
ventilators and filters. This method
controls contamination in a
designated area for higher cleanliness without changing facilities of
the clean room.

This method
will be best understood with reference to the
figure which schematically shows a rectifying board with air guides
and how it is installed in the working area. In this area, air goes
down from the ceiling and there are contamination sources such as
workers or manufacturing equipment. This device is installed in the
opposite side of a contamination source.

This method
is effective when installed in an area close to a
contamination source or requiring higher cleanliness. It positively
controls air flow in a clean room to forcedly isolate contaminants
near the contamination source. This device
has guides in addition to
a rectifying board to multiply the air control force and strength of
this board.

The most
effective slant angle, size of rectifying board and
distance between rectifying board to target area are determined by
the following methods considering the type of clean room, size of
clean room, size of target area, down flow speed, and so on.
-Experiment
Using a particle generator and
simultaneous multi-point particle
counter, the best values of th...