Equipment

The Nanofab provides up to 100 processing tools to the community, all of which are supported through user fees, with new acquisitions supplemented by internal university funds and research grants from faculty. Researchers using the Nanofab can rely on six technical staff members to guide them by providing hands-on experience, helping them choose the best tools and processes for their research. Staff members also assist with tool training, process development, tool maintenance, and tool repair, providing expertise in lithography, film deposition, etching, metrology, annealing, and more.Contact the lab for more details.