Abstract

We have derived a new relation that can be used to index the superlattice satellite peaks in an x‐ray diffraction scan. At the same time accurate data on the strain in the superlattice and the periodicity of the superlattice are obtained. The new method has been applied to an InGaAs/InP superlattice and is compared with an existing method for the indexing of the superlattice peaks. For both methods, it is best to use only lattice planes that are parallel to the surface, because these rocking curves can be measured more easily, faster, more accurately and by fully automated means. In addition, only these rocking curves can be used for analysis of period variation or interface roughness.