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TESCAN offers a wide range of proprietary and third-party detectors that can be integrated into our SEM and FIB-SEM systems to satisfy particular analytical needs in your research and applications. For this purpose, all microscopes are equipped with a large number of ports to support multi-detector configurations.

Electrons in SEMs (as well as ions in dual beam FIB-SEMs) are accelerated at voltages in the range of a few eV to 30 keV. These charged particles impinge on the surface of the material interacting with uppermost surface layers and, as a result, a cascade of collisions (elastic and inelastic) takes place generating a variety of signals such as secondary electrons (SEs), backscattered electrons (BSEs), and photoemission in the form of X-rays and Cathodoluminescence (CL). In dual beam systems, the secondary ion (SI) signal can also be collected. Each of these signals is emitted as a result of diverse physical processes and from different penetration depths carrying valuable information of the sample.

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