Waveguide Fabrication MethodKippenbergTobiasPfeifferMartin Hubert PeterKordtsArne2016A waveguide fabrication method including the steps of providing a substrate including at least one waveguide recess structure and a stress release recess structure for receiving a waveguide material, and depositing the waveguide material onto the substrate and into both the waveguide recess structure and the stress release recess structure.PATENT