Abstract

We demonstrate multichannel optical bandpass filters utilizing alternating dielectric multilayers stacked on a patterned substrate. A microstructured Si/SiO2 multilayer was formed by rf biased magnetron sputtering process on a fused silica substrate with surface gratings. The bandwidths of each filter channel were measured to be 50∼175nm in the near infrared region. Control of center wavelength and bandwidth by the grating pitch was verified.

Cited By

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.