Plasma Enhanced Atomic Layer Deposition

Personnel:

Kevin Kellogg

Current focus of this study include nanometer precision thin film depositions of both dielectrics and conducting materials, including reducing nucleation times often plaguing typical metal depositions by using plasma gases as co-reactants. Additionally, Kevin is very active with Modelithics, a premier provider of high precision measurements and models for microwave/RF design simulation. At Modelithics, Kevin has had hands on training with advanced measurement techniques, including nonlinear device measurements and modeling.