PPE will be showcasing its range of cost effective elastomer materials at SEMICON Southeast Asia, with each of our material familiesengineered to reduce the cost of consumables by whilst maintaining excellent levels of sealing performance.

Products

Perlast® Perfluoroelastomers

Precision Polymer Engineering has engineered a suite of high performance materials able to resist the challenges of thermal, plasma and wet chemical processes in critical semiconductor applications. One of these materials is Perlast®....
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Perfluoroelastomer (FFKM) is the most chemically resistant elastomer available and is effectively a rubber form of PTFE. Perlast® perfluoroelastomers grades provide other properties which prove most valuable in critical sealing applications where purity and retention of sealing force are paramount.

Features of Perlast® FFKM seals

High temperature stability up to 327°C

Almost universal chemical resistance

Outstanding mechanical properties

High purity for reduced process contamination

Benefits of using Perlast® FFKM seals

Increased in-service seal lifetime

Improved sealing performance

Reduced process contamination

Reduced equipment downtime

Kimura®

Kimura® is a unique range of fully organic elastomers ideally suited to thermal, dynamic and specific plasma processes where radical concentrations are generally lower, or where inorganic filler systems are undesirable....
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Kimura® is a unique range of fully organic elastomers ideally suited to thermal, dynamic and specific plasma processes where radical concentrations are generally lower, or where inorganic filler systems are undesirable.

The Kimura® range of high performance elastomer materials utilise a controlled molecular architecture which provides a unique self-reinforcing polymer structure, providing improved chemical resistance without the use of inorganic fillers of any kind. This high purity material breaks new ground in elastomer technology, developed specifically for aggressive chlorine and CxFy based semiconductor applications.

Kimura® elastomers span the range of fluoro and perfluoro (FKM and FFKM) materials and includes unique hybrid elastomers, specifically developed by PPE, for the semiconductor industry, to offer a step-change in sealing performance, suprassing what has previously been achievable for fully organic materials.

The high purity of the polymer combined with the absence of inorganic fillers makes Kimura® materials suitable for processes involving lower feature sizes.

Key material attributes

Exceptionally pure - does not contain any inorganic fillers which may lead to particle generation

Nanofluor® elastomers can be considered as hybrid materials, bridging a gap between the low cost of fluoroelastomer (FKM) and high cost of perfluoroelastomer (FFKM) polymer types....
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Nanofluor® elastomers can be considered as hybrid materials, bridging a gap between the low cost of fluoroelastomer (FKM) and high cost of perfluoroelastomer (FFKM) polymer types.

The range includes a fully organic ultra-low outgassing material and an inorganic filled grade with unique nano-filler to reduce erosion rates. The nano-filled material provides a chemical inertness only seen in much more costly FFKM grades and been developed for plasma ash or resist strip, chlorine and CxFy based etch processes.

Nanofluor® grades provide some of the lowest trace metal contamination levels available from elastomer seals and ultra-low permeation rates.

Utilising a range of high performance elastomers, PPE's slit valve doors are designed to provide the highest sealing integrity, delivering improved yields, increased time between PM cycles and minimised particle generation.

Features of PPE Slit Valve Doors

Fit a variety of OEM platforms

Available with Perlast, Kimura and Nanofluor, our unique semiconductor-grade elastomers - minimising the potential for partical formation in plasma environments

High purity Perlast materials are widely used in wafer handling applications as end effector pads because they provide optimised friction to maintain wafer positional accuracy, and prevent particulation due to their wholly organic nature....
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High purity Perlast materials are widely used in wafer handling applications as end effector pads because they provide optimised friction to maintain wafer positional accuracy, and prevent particulation due to their wholly organic nature.

PPE are experts in providing elastomeric solutions and can help you optimise your designs using our materials expertise and advanced design tools, such as non-linear finite element analysis.

The PPE range of materials includes elastomers with both low and high coefficients of friction, to allow tailoring of wafer retention force. In addition, PPE offers dissipative end effectors moulded from unique elastomer materials to reduce electrostatic discharge (ESD) damage.