The aim of this research project was to develop the coarse and fine mechanism system with a long working range on the order of 10 millimeters and high positioning resolution for realize more than sub-nanometers for realize sub-nanometer machining and measuring on the order of 10 millimeters. In the project, first, the experimental sub-nanomechanism which consists of the coarse and the fine mechaisms was made and modeled for the aim and then the best fit control methods for the mechanism were discussed. PID,Fuzzy, Neural network and Linear quadratic control method were selected for the discussion of the best fit one. In order to evaluate these control method, the specification of basic control design was determined and the robustness of the positioning systems with their controller were examined theoretically and experimentally. The results were the following ;(1) The controller based on PID algorithm for the sub-nanometer mechanism was satisfied the specification of the control design
… Moreand had the good robustness to the change of the step height.(2) The controller based on Fuzzy algorithm for the mechanism was satisfied the specification and the good robustness to the change of the weight of the movable table and the addition of the constant load.(3) In case of the controller based on Neural network algorithm, the number and the kind of the weight of the neuron changed by the back propagation algorithm influenced on the performance of the system. In the experiments, the limit of the number of the weight changed is necessary for high precision positioning.(4) Though the linear quadratic controller designed for the fine positioning mechanism can control the table precisely, the controller for the coarse and fine positioning mechanism causes the vibration of its table near the reference position.(B)ファジィ制御法に関し,粗動機構用に比例,積分特性を,微動機構用に積分特性を有するコントローラを設計した.その結果,PID制御法に比べ,質量変化にロバストなコントローラが実現できた.(C)ニューラルネットワーク制御に関し,偏差のみを入力とする三層構造のコントローラを設計した.この時全ての要素を学習させると,目標位置近傍で粗動機構が動作し,安定した位置決めができず,学習する要素を制限して,比較的安定した位置決め結果を得た.(D)最適制御法に関し,コントローラの形式等を変えて数種類のシミュレーションと実験を行った.その中にはシミュレーションでは,比較的適切に動作するものもあったが,実験では発振してしまった.今後はこの原因を究明していく必要がある. Less