SEMI C18 - Specification for Acetic Acid

This Standard was technically approved by the Chemicals Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on May 12, 2014. Available at www.semiviews.org and www.semi.org in July 2014; originally published in 1978; previously published July 2008.

The purpose of this Document is to standardize requirements for acetic acid used in the semiconductor industry and testing procedures to support those specifications. Test methods have been shown to give statistically valid results. Alternative methods may be used as long as they comply with SEMI C1 requirements for method validation.

The scope of this Document is one grade of acetic acid used in the semiconductor industry.