Osram OEM*

HBO1000WG

in Lamps

Osram OEM*

HBO 3501 W/PIL SHP

in Lamps

1

Plano, TX

Osram HBO 3501 W/PIL SHP:Mercury Short Arc Lamp for Microlithography

A direct current i-line lamp for microlithography processes within the wafer fabrication for integrated circuits. This lamp type emits a very high radiant intensity in the ultraviolet and visible wavelength range and is developed and optimized for being used in ASML equipment (PAS 5500/400 B/C). Due to SHP-technology, the lamp is characterized by a very low intensity degradation over lifetime.