Wideband millimeter-wave branch-line couplers have been demonstrated using micromachined air-filled rectangular-coaxial lines supported by quarter-wavelength stubs. The coaxial lines are constructed by bonding five layers of gold-plated silicon or SU8 slices. The measured coupler shows an insertion loss of 3.2–4.0 dB in the coupled and thru ports between the frequencies 31.3–47.6 GHz. The isolation is better than 12.8 dB, and the return loss less than 10 dB. In addition to providing support, the stubs enhance bandwidth when properly placed.

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