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Abstract

A laser homodyne straightness interferometer with simultaneous measurement of six degrees of freedom motion errors is proposed for precision linear stage metrology. In this interferometer, the vertical straightness error and its position are measured by interference fringe counting, the yaw and pitch errors are obtained by measuring the spacing changes of interference fringe and the horizontal straightness and roll errors are determined by laser collimation. The merit of this interferometer is that four degrees of freedom motion errors are obtained by using laser interferometry with high accuracy. The optical configuration of the proposed interferometer is designed. The principle of the simultaneous measurement of six degrees of freedom errors including yaw, pitch, roll, two straightness errors and straightness error’s position of measured linear stage is depicted in detail, and the compensation of crosstalk effects on straightness error and its position measurements is presented. At last, an experimental setup is constructed and several experiments are performed to demonstrate the feasibility of the proposed interferometer and the compensation method.

Fig. 2 Schematic of the yaw and pitch errors measurement. (a) The variation of propagating direction of the measuring beam according to the yaw and pitch errors; (b) The spacing of interference fringe at the initial position; (c) The spacing of interference fringe with the yaw and pitch errors.

Fig. 4 Schematic of the horizontal straightness and roll errors measurement. (a) The shift of RR in the y direction; (b) The rotation of RR around the z direction; (c) The analytical model of emergent points corresponding to upper and down right-angle prisms of RR.