We work with customers across four major industries to develop solutions to their toughest Process and production challenges. All of our customers use sophisticated advanced technology in their processes. They rely on MKS Instruments' broad portfolio of innovative instruments, components, subsystems and software to solve their problems.

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MKS Instruments applies leading edge science, engineering and technology to solve critical challenges across a number of major markets. We will work with you to develop the right solution from our broad portfolio of innovative instruments, components, subsystems and software.

Select a market below to learn more about how we can help you succeed:

We work with customers across four major industries to develop solutions to their toughest process and production challenges. All of our customers use sophisticated advanced technology in their processes. They rely on MKS Instruments' broad portfolio of innovative instruments, components, subsystems and software to solve their problems.

Select an industry below to learn more about how we can help you succeed:

MKS Instruments applies leading edge science, engineering and technology to solve critical challenges across 15 major markets. We will work with you to develop the right solution drawing from and combining our broad portfolio of innovative instruments, components, subsystems and software.

Select a market below to learn more about how we can help you succeed:

At MKS, our technology enables the future and our innovations have helped shape the direction of industries. Our people are experienced and creative problem solvers who collaborate with customers to find solutions.

At MKS, our technology enables the future and our innovations have helped shape the direction of industries. Our people are experienced and creative problem solvers who collaborate with customers to find solutions.

The LIQUOZON® Smart ozonated water delivery system is a self-contained unit that provides DIO3 water (ultra pure ozonated water) with exceptionally high, accurate and stable ozone concentration utilizing constant pressure. The basic LIQUOZON Smart configuration is for flows up to 25 liters per minute, the High Flow option is able to handle flow up to 50 liters per minute - for multiple outlets, flow rates up to 80 liters per minute are available. Maximum dissolved ozone concentration is 80ppm.

The ozone gas generator is the highly reliable SEMOZON® which produces ozone from oxygen by silent discharge. A minute amount of carbon dioxide (CO2) is used as a dopant gas. The CO2 considerably increases the lifetime of ozone in the DI water and is ultra-clean. With CO2 there is no possibility of formation of NOx compounds or resultant metal contamination. High-quality, ozone resistant materials and the unique doping technique ensure ultra-clean ozonated water delivery for high-purity semiconductor and flat panel applications.

Configurations:

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