Semiconductor Wastewater Treatment

Committed to protecting the environment, conserving resources and to meeting new manufacturing challenges as they occur, Ovivo has developed a state of the art semiconductor wastewater treatment process designed to meet current and future reclaim and discharge requirements.

Semiconductor Waste Water Treatment Plant

Semiconductor Waste Water Treatment Plant

Semiconductor fabrication processes such as chemical mechanical planarization (CMP), lithography, and etching, stripping and cleaning, result in a variety of wastewater compositions (CMP, BG, acid and alkaline waste, metal-bearing waste and organic waste), which require specialized treatment to meet stringent global and local reclamation and discharge regulations.

Ovivo’s semiconductor wastewater treatment technology features:

Lowest chemical consumption

Lowest cost of ownership

Fluoride discharge limit >10 ppm.

Some examples of Ovivo semiconductor wastewater treatment solutions:

Treatment of CMP and Backgrind Water

CMP is an essential process in semiconductor fabrication. The resultant wastewater can be treated by flocculation and sedimentation to remove slurry particles.

Ovivo’s CMP and backgrind water treatment process guarantees:

Minimal chemical consumption and sludge generation

Control of sludge floatation using hydrogen peroxide

Treated water meets stringent discharge requirements

Treatment of Copper CMP Wastewater

Ovivo’s advanced oxidation process utilizes a meticulous, but advanced process to remove copper from copper CMP wastewater. This process adds a catalyst to copper waste using the oxidant already present to form a strong oxidizer. The strong oxidizer breaks down the complex copper and reduces the wastewater’s organic concentration. Copper can then be precipitated as copper hydroxide and removed with the slurry particles.

Ovivo’s cutting-edge oxidation process is notable for:

Lowest chemical consumption.

Achieving stringent wastewater discharge requirements.

Reducing not only copper, but also organics.

Simple, flexible and cost-effective operation.

Enhanced reliability

Ovivo offers tailored solutions for the treatment of all semiconductor wastewaters such as:

Yes, it is possible and state of the art nowadays. There are several process possibilities depending from which concentration you are starting.

Are there alternatives to the conventional Calcium Fluoride production treatment to treat the HF waste streams?

All in all, there is no real alternative. The fluoride need definitely to be removed out of the system and the only way is the chemical reaction with Fluoride and Calcium to form Calcium fluoride as amorphous precipitates or crystalline matter, except if you start from quite concentrated HF solutions (> 5% weight).

Can HF be recycled?

Yes, it is possible through evaporation, distillation processes if the starting concentration is high enough (> 5%).

Can CMP and BG waste streams be mixed and treated together?

Depending on CMP nature and composition which is mostly alkaline, it is not really recommended to mix it with BG streams for common treatment due to reaction of Silicon particles (BG) and alkalinity (CMP). As more segregation as more efficient are the treatment processes and their costs.

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