Award Charts

Award Listing

This Small Business Innovation Research (SBIR) Phase II project aims to develop a single wafer processing clean tool for semiconductor wafer cleaning at all stages of wafer processing. The method reli ...

This SBIR Phase-I project is to develop an acoustic CMP (Chemical Mechanical Polishing) slurry monitor?a fully in-line, real-time, point of use instrument that will detect and disperse any and all lar ...

This Small Business Innovation Research (SBIR) Phase I project, will develop a new kind of wafer cleaning tool that will be useful at every cleaning step in semiconductor processing. It will use an e ...

This SBIR Phase I project is to develop a Chemical Mechanical Polishing (CMP) Slurry Monitor as a fully in-line, real-time, point of use instrument that will detect and disperse large agglomerates in ...

The Small Business Innovation Research (SBIR) Phase II project seeks to develop an innovative, environment friendly method for removing resist from semiconductor wafers. After every lithography step, ...

This Small Business Innovation Research (SBIR) Phase II Project concerns Ultrapure Water (UPW), the life blood of the semiconductor industry. The proposed instrument seeks to satisfy the ITRS requirem ...

This Small Business Innovation Research (SBIR) Phase I Project seeks to develop an innovative method for removing resist from semiconductor wafers. The Microcavitation Resist Remover will help enable ...

This Small Business Innovation Research (SBIR) Phase I project concerns Ultrapure Water (UPW), the lifeblood of the semiconductor industry. The proposed instrument seeks to satisfy the International T ...

This Small Business Innovation Research (SBIR) Phase II project will develop a new method of determining how strong a thin film anchors to a substrate. The ACIM deBonder(trade mark)uses controlled mic ...

This Small Business Innovation Research (SBIR) Phase I project will develop a new method of measuring how strongly a thin film anchors to its substrate. To date no method exists that can truly measure ...