Abstract:The design of PZT actuated valveless membrane micropumps is a very complex process as it involves the knowledge of electro mechanics, solid mechanics and fluid mechanics. So far, there is no accurate, flexible and broadly applicable analytical model available for micropump design and analysis. With certain assumptions, some progresses have been achieved on low-order lumped-parameter models which can provide certain insights on key aspects of micropump operation, but it cannot provide an accurate prediction. To prevent such a drawback, it is ideal to carry out 3-D CFD simulations to investigate the micropumps in details. In the present work, full 3-D numerical simulations for a valvless membrane micropump with diameter 6 mm are carried out using the CFD-ACE+, the commercial package from CFDRC, with the consideration of electro mechanics, solid mechanics and fluid mechanics. A series of transient simulations are carried out under the excitation of Sine-wave voltage 75 V and frequencies 8, 50, 100, 200 and 500 Hz respectively. We obtained the deflections of PZT disc and membrane and the detailed fluid fields. The flow rate, as functions of the pressure heads and frequencies, are also plotted and analyzed. The 3-D numerical simulations of the micropump are significant for micropump design, performance analysis and evaluation of other system simulation methods such as lumped-parameter models.

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