Although double patterning is certainly a signficant barrier, a more aggressive shrinking (<0.7x) could bring back some more returns. Actually, the greater concern for me is the self-heating that could be aggravated in these thin silicon devices (FDSOI and FinFET). It's harder for heat to move away from hot spots in thin silicon. Even in the Intel trigate case, it has to move down from the narrowest point (the apex).