鑽石具有極佳的物理特性與化學特性如：高硬度、低摩擦係數、高熱傳導係數、良好的機械強度、高光學穿透性。這些特性具有潛力應用於電子元件、光學元件及抗腐蝕鍍膜上。近年來以化學氣相沉積法製作多晶鑽石膜已成為成熟且廣泛的合成技術。由於本計劃原規劃為兩年期之計畫，因僅通過第一年，故僅就反應離子蝕刻之複合製程快速加工鑽石膜進行研究。本計劃採用常壓空氣電漿(APAP)及反應離子蝕刻(RIE)方法來製作鑽石微結構，並且將鑽石微結構分別應用在熱化學拋光及奈米壓印上。並分別以穿隧式電子顯微鏡(TEM)、微拉曼頻譜儀(micro-Raman spectroscopy)、表面粗度儀(α-step)來檢測表面形貌與分析組成物。藉由分析結果發現鑽石微結構可成功應用於熱化學拋光，並且鑽石微結構具有應用於奈米壓印之潛力。Diamond has many outstanding physical and chemical properties such as extreme hardness, low friction coefficient, high thermal conductivity, high mechanical strength, and high optical transparency. Therefore, several potential applications can be anticipated in electronics, optics, protective corrosion resistant coatings. In recent years, using chemical vapor deposition (CVD) methods to synthesize polycrystalline diamond is a mature and popular technology. This study not only indicated the producing mechanism of these microstructures on CVD diamond grains by atmospheric pressure air plasma (APAP) and reactive ion etching, but also used these microstructures applying to the thermal-chemical polishing and nano-imprint process. Scanning electron microscope, micro-Raman spectroscopy and alpha-step were used to study the surface morphology and component analysis, respectively. From the results showed that the microstructures could be successfully combined the thermal-chemical polishing method and these microstructures had a potential to apply in nano-imprint process.