H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials

H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices

H01L29/66825—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a floating gate

H—ELECTRICITY

H01—BASIC ELECTRIC ELEMENTS

H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR

H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate

H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier

H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body

H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration

H01L27/105—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration including field-effect components

H01L—SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR

H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate

H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier

H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body

H01L27/10—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration

H01L27/105—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being a semiconductor body including a plurality of individual components in a repetitive configuration including field-effect components

Abstract

Translated from Chinese

本发明公开一种半导体结构及其制造方法。 The present invention discloses a method of manufacturing a semiconductor structure.该制造方法包括提供具有晶胞区与周边区的基底。 The manufacturing method includes providing a substrate having a cell region and the peripheral region.在基底的晶胞区上形成堆叠结构以及在基底的周边区上形成电阻器，其中堆叠结构包含栅氧化层、浮置栅极以及第一间隙壁。 Is formed on the cell area of ​​the substrate and a stacked structure is formed on the periphery of the resistor region of the substrate, wherein the stacked structure comprising a gate oxide layer, a floating gate and first spacers.在堆叠结构的两侧的基底中形成至少两个掺杂区。 Forming at least two doped regions in the substrate on both sides of the stack structure.在基底上依序形成介电材料层与导体材料层。 Sequentially forming a dielectric material layer and a conductive material layer on the substrate.在基底上形成图案化光致抗蚀剂层，图案化光致抗蚀剂层覆盖堆叠结构及部分电阻器。 The patterned photoresist layer, the patterned photoresist layer covering the stacked structure and portions of the resistors formed on the substrate.移除未经图案化光致抗蚀剂层覆盖的介电材料层与导体材料层，以于堆叠结构上形成栅间介电层以及控制栅极，同时在电阻器上形成金属硅化物阻挡层。 Removing photo unpatterned dielectric material layer and the conductive material layer is covered with the resist layer, the inter-gate dielectric layer is formed on the stacked structure and a control gate, while the metal silicide blocking layer is formed on the resistor .

Description

Translated from Chinese

半导体结构及其制造方法 The semiconductor structure and manufacturing method

技术领域 FIELD

[0001] 本发明涉及一种半导体结构及其制造方法，且特别是涉及一种包含存储单元与电阻器的半导体结构及其制造方法。 [0001] The present invention relates to a semiconductor structure and a manufacturing method, and more particularly to a method of manufacturing a semiconductor structure comprising a storage unit and resistor.

背景技术 Background technique

[0002] 非挥发性存储体元件由于具有可多次数据的存入、读取、抹除等动作，且存入的数据在断电后也不会消失的优点，所以已成为个人电脑和电子设备所广泛采用的一种存储体元件。 [0002] Since the nonvolatile memory element having a plurality of times data can be stored, read, erase operation and the like, and advantages of the stored data after power failure will not disappear, it has become a personal computer and electronics a memory element device widely used.

[0003] 具有穿隧氧化物的可抹除且可程式只读存储体(EPROM with Tunnel Oxide,ET0X)为一种常见的存储单元结构，其以掺杂多晶硅制作浮置栅极与控制栅极，以进行抹除/写入的操作。 [0003] erasable and programmable read only memory having a tunnel oxide (EPROM with Tunnel Oxide, ET0X) as a common memory cell structure, which is made of doped polysilicon floating gate and the control gate , to operate erase / write.此外，为了避免ETOX因过度抹除/写入而导致数据误判的问题，可在存储单元的一侧串接一选择晶体管(select transistor)，而形成两晶体管(2T)结构。 Further, in order to avoid problems due to excessive ETOX erase / write of data caused by misjudgment, a select transistor can be connected in series (select transistor) on one side of the memory cell, to form two transistors (2T) structure.通过选择晶体管来控制存储单元的程式化和读取，来进行多次可程式化(Multiple-TimeProgramming ；MTP)操作。 Controlled by the memory cell selecting transistors and programmable read to multiple programmable (Multiple-TimeProgramming; MTP) operation.

[0004] 随着多功能芯片的发展，晶胞区的存储单元与周边区的分压器(如电阻器)常会制作在同一个芯片上。 [0004] With the development of multi-function chip, the memory cell region and the peripheral cell area divider (e.g., resistors) often formed on the same chip.然而，存储单元与电阻器的制作工艺通常是分开进行的，因此需要多个光掩模以及复杂的制作工艺步骤，会增加成本及减少竞争力。 However, the memory cell manufacturing process of the resistor is typically carried out separately, and therefore a plurality of photomasks and complex manufacturing process steps needed to reduce cost and increase competitiveness.

发明内容 SUMMARY

[0005] 有鉴于此，本发明提供一种半导体结构的制造方法，可以利用现有的制作工艺轻易地形成包含存储单元与电阻器的半导体结构，且此结构符合客户电性要求。 [0005] Accordingly, the present invention provides a method of manufacturing a semiconductor structure, it can be easily formed with a semiconductor structure including memory cells using a conventional resistor fabrication process, and this structure is electrically meet customer requirements.

[0006] 本发明提供一种半导体结构的制造方法。 [0006] The present invention provides a method of manufacturing a semiconductor structure.首先，提供一基底。 First, a substrate is provided.基底具有晶胞区与周边区。 A substrate having a cell region and the peripheral region.然后，于基底的晶胞区上形成堆叠结构以及于基底的周边区上形成电阻器，其中堆叠结构包含栅氧化层、浮置栅极以及第一间隙壁。 Then, the cell area is formed on a substrate and forming a stacked structure on the peripheral region of the resistor substrate, wherein the stacked structure comprising a gate oxide layer, a floating gate and first spacers.之后，在堆叠结构的两侧的基底中形成至少两个掺杂区。 After forming at least two doped regions in the substrate on both sides of the stack structure.继之，在基底上依序形成介电材料层与导体材料层。 Followed by sequentially forming a dielectric material layer and a conductive material layer on the substrate.接下来，在基底上形成图案化光致抗蚀剂层，图案化光致抗蚀剂层覆盖堆叠结构以及部分电阻器。 Next, the patterned photoresist layer, the patterned photoresist layer covering the stack structure, and a resistor portion is formed on the substrate.然后，移除未经图案化光致抗蚀剂层覆盖的介电材料层与导体材料层，以在该堆叠结构上形成栅间介电层以及控制栅极，同时于电阻器上形成金属硅化物阻挡(SAB)层，其中堆叠结构、栅间介电层、以及控制栅极构成电荷存储结构。 Then, without removing the patterned photo-dielectric material layer and the conductive material layer is covered with the resist layer, inter-gate dielectric layer is formed on the stacked structure and a control gate, while the metal silicide is formed on the resistor barrier material (SAB) layer, wherein the stack structure, inter-gate dielectric layer, a control gate and a charge storage structure configured.

[0007] 在本发明的一实施例中，在形成电荷存储结构的步骤之后，上述半导体结构的制造方法还包括:在电荷存储结构的侧壁上形成第二间隙壁；以及在电荷存储结构的表面、掺杂区的表面与电阻器的部分表面上形成金属硅化物层。 [0007] In an embodiment of the present invention, after the step of forming a charge storage structure, manufacturing method of the semiconductor structure further comprises: forming a second spacer on a sidewall of the charge storage structure; and in the charge storage structure surface, the metal silicide layer is formed on the doped surface region of the resistor surface portion.

[0008] 在本发明的一实施例中，上述金属硅化物层的材料包括硅化钴。 [0008] In an embodiment of the present invention, the material of the metal silicide comprises a cobalt silicide layer.

[0009] 在本发明的一实施例中，在形成上述堆叠结构以及电阻器的步骤时，同时于基底的晶胞区的堆叠结构的一侧形成选择晶体管，且掺杂区还形成于选择晶体管两侧的基底中，电荷存储结构与选择晶体管共用一个掺杂区，以及介电材料层与导体层还覆盖选择晶体管。 [0009] In an embodiment of the present invention, when the step of forming the stacked structure and the resistor, while at one side of the stacked structure forming the cell area of ​​the substrate selection transistor, and the doped region is formed in the select transistor further both sides of the substrate, the charge storage structure and a common select transistor doped region, and a dielectric material layer and the conductive layer further covering a select transistor.

[0010] 在本发明的一实施例中，上述导体材料层的材料包括掺杂多晶硅。 [0010] In an embodiment of the present invention, the material of the conductive material layer comprises a doped polysilicon.

[0011] 本发明另提供一种半导体结构，包括基底、电荷存储结构、电阻器、介电层与第二导体层。 [0011] The present invention further provides a semiconductor structure comprising a substrate, a charge storage structure, a resistor, a dielectric layer and a second conductive layer.基底具有晶胞区与周边区。 A substrate having a cell region and the peripheral region.电荷存储结构配置于基底的晶胞区上。 Charge storage structure disposed on the substrate of the cell area.电荷存储结构包括依序配置于基底上的栅氧化层、浮置栅极、栅间介电层与控制栅极。 Charge storage structure comprises a gate oxide layer are sequentially disposed on a substrate, a floating gate, a control gate dielectric layer and inter-gate.电阻器配置于基底的周边区上。 A resistor arranged on the peripheral region of the substrate.电阻器包括依序配置于基底上的氧化层及第一导体层。 Resistor comprises sequentially disposed on the oxide layer and the first conductive layer on a substrate.介电层与第二导体层依序配置于电阻器上，其中介电层与第二导体层构成金属硅化物阻挡层。 The dielectric layer and the second conductive layer are sequentially disposed on the resistor, wherein the dielectric layer and the second conductive layer constituting the barrier layer is a metal silicide.

[0012] 在本发明的一实施例中，上述半导体结构还包括浅沟槽隔离结构、第一间隙壁、第二间隙壁、第三间隙壁及至少二掺杂区。 [0012] In an embodiment of the present invention, the semiconductor structure further comprises a shallow trench isolation structure, a first spacer, the second spacer, the third spacer and at least two doped regions.浅沟槽隔离结构配置于电阻器下方的基底中。 Shallow trench isolation structure disposed on the substrate under the resistors.第一间隙壁配置于电荷存储结构的侧壁上。 First spacers disposed on the sidewalls of the charge storage structure.第二间隙壁配置于电阻器的侧壁上。 A second spacer disposed on the sidewalls of the resistor.第三间隙壁配置于金属硅化物阻挡层的侧壁上。 A third sidewall spacer disposed on the metal silicide barrier layer.掺杂区配置于电荷存储结构两侧的基底中。 Doped region disposed in the substrate on both sides of the charge storage structure.

[0013] 在本发明的一实施例中，上述半导体结构还包括金属硅化物层，其配置于电荷存储结构的表面、掺杂区的表面、第二导体层的表面以及第一导体层未经第二导体层及第三间隙壁覆盖的表面上。 [0013] In an embodiment of the present invention, the semiconductor structure further comprises a metal silicide layer, which is disposed on the surface of the charge storage structure, the doped surface region, and a second conductive layer on the surface of the first conductive layer without a second conductive layer and the third spacer covered surface.

[0014] 在本发明的一实施例中，上述金属硅化物层的材料包括硅化钴。 [0014] In an embodiment of the present invention, the material of the metal silicide comprises a cobalt silicide layer.

[0015] 在本发明的一实施例中，上述半导体结构还包括选择晶体管，其配置于基底的晶胞区上且位于电荷存储结构的一侧。 [0015] In an embodiment of the present invention, the semiconductor structure further comprises a selection transistor disposed on the substrate of the cell region and the charge storage structure on one side.

[0016] 在本发明的一实施例中，上述选择晶体管包括依序配置在基底上的选择栅氧化层及选择栅极。 [0016] In an embodiment of the present invention, said select transistor comprising a select gate oxide layer are sequentially disposed on the substrate and select gate.

[0017] 在本发明的一实施例中，上述半导体结构还包括浅沟槽隔离结构、第一间隙壁、第二间隙壁、第三间隙壁、第四间隙壁及多数个掺杂区。 [0017] In an embodiment of the present invention, the semiconductor structure further comprises a shallow trench isolation structure, a first spacer, the second spacer, the third spacer, spacer and a plurality of fourth doped regions.浅沟槽隔离结构配置于电阻器下方的基底中。 Shallow trench isolation structure disposed on the substrate under the resistors.第一间隙壁配置于电荷存储结构的侧壁上。 First spacers disposed on the sidewalls of the charge storage structure.第二间隙壁配置于电阻器的侧壁上。 A second spacer disposed on the sidewalls of the resistor.第三间隙壁配置于金属硅化物阻挡层的侧壁上。 A third sidewall spacer disposed on the metal silicide barrier layer.第四间隙壁配置于选择晶体管的侧壁上。 A fourth sidewall spacer disposed on the select transistor.掺杂区配置于电荷存储结构与选择晶体管两侧的基底中，且电荷存储结构与选择晶体管共用一个掺杂区。 Doped region disposed in the substrate on both sides of the charge storage structure and the selection transistor, and the charge storage structure and a select transistor share doped regions.

[0018] 在本发明的一实施例中，上述半导体结构还包括金属硅化物层，其配置于电荷存储结构的表面、选择晶体管的表面、掺杂区的表面、第二导体层的表面以及第一导体层未经第二导体层及第二间隙壁覆盖的表面上。 [0018] In an embodiment of the present invention, the semiconductor structure further comprises a metal silicide layer, which is disposed on the surface of the charge storage structure, selection of the surface of the transistor, the doped surface region, the surface of the second conductor layer and the second a non-conductive layer and the second surface of the second conductive layer covering the spacer.

[0019] 在本发明的一实施例中，上述金属硅化物层的材料包括硅化钴。 [0019] In an embodiment of the present invention, the material of the metal silicide comprises a cobalt silicide layer.

[0020] 在本发明的一实施例中，上述第一导体层与第二导体层的材料包括掺杂多晶硅。 [0020] In an embodiment of the present invention, the material of the first conductor layer and second conductor layer comprises a doped polysilicon.

[0021] 基于上述，本发明的制造方法可整合于现有的制作工艺(例如逻辑制作工艺)中，利用现有的制作工艺轻易地形成包括存储单元与电阻器的半导体结构，大幅降低成本，提升竞争力。 [0021] Based on the above, the manufacturing method of the present invention may be incorporated in an existing production process (e.g. logical production process), easily forming a semiconductor structure includes a storage unit with a resistor using conventional manufacturing process, significantly reduce costs, enhance competitiveness.此处的存储单元可为ETOX结构或包括电荷存储结构与选择晶体管的两晶体管(2T)结构，可依客户需求进行单次可程式化(OTP)或多次可程式化(MTP)操作。 Here the storage unit can be a single programmable (OTP) or multiple times programmable (MTP) operable to ETOX structure or charge storage structure comprises a selection transistor and two transistor (2T) structure, according to customer needs.

[0022] 为让本发明的上述特征和优点能更明显易懂，下文特举实施例，并配合所附附图作详细说明如下。 [0022] In order to make the above features and advantages of the invention more comprehensible, several embodiments, with detailed description and accompanying drawings as follows.

附图说明 BRIEF DESCRIPTION

[0023] 图1A至图1D为本发明第一实施例所绘示的半导体结构的制造方法的剖面示意图； The method of manufacturing a cross-sectional view of a semiconductor structure according to a first embodiment of a schematic view illustrating [0023] FIGS. 1A to 1D of the present invention;

[0024]图2为依据本发明一实施例所绘示的半导体结构的剖面示意图。 [0024] FIG. 2 is a schematic cross-sectional view of a semiconductor structure based on illustrated according to an embodiment of the present invention.

[0025] 主要元件符号说明 [0025] Main reference numerals DESCRIPTION

[0026] 10、20:半导体结构 [0026] 10, 20: semiconductor structure

[0027] 100:基底 [0027] 100: substrate

[0028] 100a:晶胞区 [0028] 100a: cell area

[0029] 10b:周边区 [0029] 10b: surrounding area

[0030] 101:浅沟槽隔离结构 [0030] 101: shallow trench isolation structure

[0031] 102:阱区 [0031] 102: well region

[0032] 104:栅氧化层 [0032] 104: gate oxide layer

[0033] 106:选择栅氧化层 [0033] 106: a select gate oxide layer

[0034] 108:氧化层 [0034] 108: oxide layer

[0035] 110:浮置栅极 [0035] 110: a floating gate

[0036] 112:选择栅极 [0036] 112: select gate

[0037] 114、132:导体层 [0037] 114,132: a conductor layer

[0038] 116:淡掺杂区 [0038] 116: lightly doped region

[0039] 118、134:间隙壁 [0039] 118, 134: spacer

[0040] 120:掺杂区 [0040] 120: doped region

[0041] 122:介电材料层 [0041] 122: dielectric material

[0042] 125:光掩模 [0042] 125: The photomask

[0043] 124:导体材料层 [0043] 124: conductive material layer

[0044] 126:栅间介电层 [0044] 126: inter-gate dielectric layer

[0045] 128:介电层 [0045] 128: a dielectric layer

[0046] 129:图案化光致抗蚀剂层 [0046] 129: The patterned photoresist layer

[0047] 129a、129b:图案 [0047] 129a, 129b: pattern

[0048] 130:控制栅极 [0048] 130: control gate

[0049] 136:金属硅化物层 [0049] 136: metal silicide layer

[0050] 200:堆叠结构 [0050] 200: a stack structure

[0051] 200r:电荷存储结构 [0051] 200r: charge storage structure

[0052] 300:选择晶体管 [0052] 300: selection transistor

[0053] 400:电阻器 [0053] 400: Resistor

具体实施方式 detailed description

[0054] 第一实施例 [0054] First embodiment

[0055] 图1A至图1D为依据本发明第一实施例所绘示的半导体结构的制造方法的剖面示意图。 [0055] FIGS. 1A to 1D are cross-sectional schematic view of fabricating a semiconductor structure according to a first embodiment of the present invention is depicted.

[0056] 请参照图1A，提供一基底100。 [0056] Referring to FIG. 1A, a substrate 100.基底100例如是P型硅基底。 The substrate 100 is a P-type silicon substrate.基底100具有晶胞区10a与周边区100b。 Substrate 100 having a cell region 10a and the peripheral region 100b.阱区102形成于基底100中。 Well region 102 is formed in the substrate 100.阱区102例如是P型阱区。 Well region 102 is a P-type well region.在一实施例中，深阱区(未绘示)可选择性地形成在基底100中且位于阱区102的下方。 In one embodiment, the deep well region (not shown) below the substrate 100 and located in the well region 102 may be selectively formed.此外，基底100中还形成有多个浅沟槽隔离结构101，其中至少一浅沟槽隔离结构101位于周边区10b的基底100中。 In addition, the substrate 100 is further formed with a plurality of shallow trench isolation structures 101, wherein at least one shallow trench isolation structure 101 is located in the peripheral region 10b of the base 100.

[0057] 接着，在基底100上依序形成氧化材料层及导体材料层(未绘示)。 [0057] Next, sequentially forming an oxide layer and a material layer of conductive material (not shown) on the substrate 100.氧化材料层的材料例如是氧化硅，且其形成方法例如是进行热氧化法或化学气相沉积制作工艺。 The material of oxide layer such as silicon oxide, and is, for example, a method of forming a thermal oxidation process or a chemical vapor deposition process.导体材料层的材料例如是掺杂多晶硅，且其形成方法例如是进行化学气相沉积制作工艺。 Conductive material layer material, for example, doped polysilicon, and is, for example, a method of forming a chemical vapor deposition process.然后，将氧化材料层及导体材料层图案化，以于基底100的晶胞区10a上形成堆叠结构200及选择晶体管300，以及于基底100的周边区10b上形成电阻器400。 Then, the oxide layer of material and the conductive material layer is patterned to form a stacked structure 200 and the selection transistor 300 in the cell region 10a of the substrate 100, and resistor 400 is formed on the peripheral region 10b of the substrate 100.堆叠结构200包括依序配置在基底100上的栅氧化层104及浮置栅极110。 Sequentially stacked structure 200 includes a substrate 100 disposed on the gate oxide layer 104 and the floating gate 110.选择晶体管300包括依序配置在基底100上的选择栅氧化层106及选择栅极112。 Select transistor 300 includes a substrate 100 are sequentially arranged on the select gate 106 and select gate oxide layer 112.电阻器400包括依序配置在基底100上的氧化层108及导体层114。 Resistor 400 comprises a substrate 100 are sequentially disposed on the oxide layer 108 and the conductive layer 114.注意，栅氧化层104、选择栅氧化层106、及氧化层108的材料、厚度均相同，浮置栅极110、选择栅极112及导体层114的材料、厚度均相同，且上述层可以在同一图案化步骤中完成。 Note that the gate oxide layer 104, the material selection gate oxide layer 106 and oxide layer 108 are the same thickness, the floating gate 110, a selector 112 and the conductive material of the gate layer 114, are the same thickness, and said layer may the same patterning step is completed.

[0058] 之后，在堆叠结构200及选择晶体管300两侧的基底100中形成淡掺杂区116。 After [0058], lightly doped region 116 is formed in the stacked structure 200 and the selection transistor 300 of the substrate 100 on both sides.淡掺杂区116例如是N型淡掺杂区。 For example, a lightly doped N-type regions 116 lightly doped region.继之，在堆叠结构200、选择晶体管300及电阻器400的侧壁上形成间隙壁118。 Followed, in the stacked structure 200, a spacer 118 is formed on the select transistor 300 and a sidewall 400 of the resistor.间隙壁118的材料例如是氧化硅、氮化硅或氮氧化硅，且其形成方法例如是先进行化学气相沉积制作工艺再进行各向异性蚀刻制作工艺。 Spacer material 118 such as silicon oxide, silicon nitride or silicon oxynitride, for example, and to a method of forming a chemical vapor deposition process and then performing an anisotropic etching process.接着，在堆叠结构200及选择晶体管300的两侧的基底100中形成多个掺杂区120。 Next, a plurality of doped regions 120 are formed in a stacked structure 200 and the selection transistor 300 on both sides of the substrate 100.掺杂区120例如是N型掺杂区。 Doped region 120, for example, N-type doped region.此外，堆叠结构200(或后续形成的电荷存储结构200')及选择晶体管300共用一个掺杂区120。 In addition, the stacked structure 200 (or the subsequent formation of charge storage structure 200 ') and the selection transistor 300 share a doped region 120.

[0059] 然后，请参照图1B，于基底100上依序形成介电材料层122与导体材料层124，以覆盖堆叠结构200、选择晶体管300及电阻器400。 [0059] Then, referring to Figure 1B, the substrate 100 are sequentially formed on the dielectric material layer 122 and the conductive material layer 124 to cover the stacked structure 200, select transistor 300 and resistors 400.介电材料层122可为单层的氧化硅层或氧化硅-氮化硅-氧化硅(ONO)的复合层，在图1B中是以单层结构为例来说明之。 The dielectric material layer 122 may be a single layer of a silicon oxide layer or a silicon oxide - silicon nitride - silicon oxide (ONO) composite layer, it is a single-layer structure as an example in FIG. 1B illustration.导体材料层124的材料例如是掺杂多晶硅，且其形成方法例如是进行化学气相沉积制作工艺。 Material conductive material layer 124, for example, doped polysilicon, and is, for example, a method of forming a chemical vapor deposition process.

[0060] 接着，在基底100上形成图案化光致抗蚀剂层129，图案化光致抗蚀剂层129至少覆盖堆叠结构200。 [0060] Next, the patterned photoresist layer 129, the patterned photoresist layer 129 covers at least the stacked structure 200 formed on the substrate 100.在此实施例中，利用光掩模125形成图案化光致抗蚀剂层129，且图案化光致抗蚀剂层129覆盖堆叠结构200及部分电阻器400，但未覆盖选择晶体管300。 In this embodiment, 125 using a photomask to form a patterned photoresist layer 129, and patterned photoresist layer 129 covers the portion of the stacked structure 200 and the resistor 400, but does not cover the select transistor 300.

[0061] 之后，请参照图1C，移除未经图案化光致抗蚀剂层129覆盖的介电材料层122与导体材料层124，以于基底100的晶胞区10a上形成电荷存储结构200'，以及于电阻器400上形成介电层128与导体层132。 After [0061], Referring to Figure 1C, remove the dielectric material layer 122 and the conductive material layer 124 covers the unpatterned photoresist layer 129, to form a charge storage structure on the substrate 100 of the cell region 10a 200 ', and forming a dielectric layer 128 and the conductive layer 132 on the resistor 400.电荷存储结构200'包括依序配置在基底100上的栅氧化层104、浮置栅极110、栅间介电层126与控制栅极130。 Charge storage structure 200 'includes a substrate 100 are sequentially disposed on the gate oxide layer 104, floating gate 110, inter-gate dielectric layer 126 and the control gate 130.注意，栅间介电层126与介电层128的材料、厚度均相同，控制栅极130与导体层132的材料、厚度均相同，且上述层可以在同一图案化步骤中完成。 Note that the inter-gate dielectric layer 126 and dielectric material layer 128, are the same thickness, the control gate 130 and the conductive material layer 132, are the same thickness, and said layer may be formed in the same patterning step.

[0062] 特别要说明的是，本案的介电材料层122与导体材料层124取代现有的金属硅化物阻挡(SAB)材料层，且通过将定义控制栅极130的图案嵌入(embedded)定义金属硅化物阻挡(SAB)层的光掩模中，来达到使用单一光掩模125以减少成本的目的。 [0062] particularly noted that the case of dielectric material layer 122 and the conductive material layer 124 to replace the existing metal silicide block (SAB) material layer, and is defined by the pattern of the control gate electrode 130 is embedded (Embedded) defined metal silicide block (SAB) in the mask layer, to achieve the purpose of using a single photo mask 125 in order to reduce costs.具体言之，图案化光致抗蚀剂层129的图案129a是用来定义控制栅极130，而其图案129b是用来定义SAB层，如图1B所示。 Specifically words, the patterned photoresist layer 129 is patterned to define the control gate 129a is 130, and which is used to define a pattern SAB layer 129b, shown in Figure 1B.如此一来，虽然在周边区10b的电阻器400上会留下介电层128与导体层132，但此两层并未改变原先客户要求的电阻器400的电阻值，并不影响其电性，却能达到使用单一光掩模125同时定义控制栅极130及金属硅化物阻挡(SAB)层的功效。 Thus, although the resistors will leave the peripheral region 10b of the dielectric layer 400 on the conductor 128 and the layer 132, but the two layers did not change the resistance value of the resistor 400 to the original customer requirements, it does not affect its electrical , able to achieve at the same time using a single photo mask 125 defines the control gate 130 and the metal silicide blocking effect (SAB) layer.

[0063] 然后，请参照图1D，在电荷存储结构20(V、选择栅极300及介电层128与导体层132的侧壁上形成间隙壁134。间隙壁134的材料例如是氧化硅、氮化硅或氮氧化硅，且其形成方法例如是先进行化学气相沉积制作工艺再进行各向异性蚀刻制作工艺。 [0063] Then, 1D, the charge storage structure 20 (V, select gates 300 and 134. The spacer material 134 of the dielectric spacer layer 128 is formed on the sidewalls of the conductive layer 132 such as silicon oxide, silicon nitride or silicon oxide, and which method is to be formed, for example, a chemical vapor deposition process and then performing an anisotropic etching process.

[0064] 之后，在基底100上形成金属层(未绘示)ο金属层的材料例如是钴，且其形成方法例如是进行化学气相沈积制作工艺。 After [0064] forming a metal layer (not shown), for example, o material of the metal layer is cobalt on the substrate 100, and is, for example, a method of forming a chemical vapor deposition process.继之，进行一退火处理，使得部分金属层与硅反应形成金属硅化物层136。 Followed, performing an annealing process, such that the portion of the metal layer to react with silicon to form a metal silicide layer 136.金属硅化物层136形成于选择晶体管300的表面、电荷存储结构20(V的表面、掺杂区的表面、导体层132的表面与电阻器400的部分表面上。金属硅化物层136的材料包括硅化钴。之后，移除未反应的金属层。至此，完成本发明的半导体结构10的制造。 Metal silicide layer 136 is formed on the surface of the selection transistor 300, a charge storage structure on the part of the surface 20 (the surface of the V, the surface of the doped region, the surface of the conductor layer 132 and the resistor 400. The material of the metal silicide layer 136 comprising after the cobalt silicide., removing the unreacted metal layer. Thus, the semiconductor structure 10 of the present invention manufactured.

[0065] 请参照图1D，半导体结构10包括基底100、电荷存储结构20(V、选择晶体管300、电阻器400、介电层128与导体层132。基底100具有晶胞区10a与周边区100b。电荷存储结构20(V与选择晶体管300配置于基底100的晶胞区10a上。电荷存储结构20(V包括依序配置于基底100上的栅氧化层104、浮置栅极110、栅间介电层126与控制栅极130。选择晶体管300包括依序配置在基底100上的选择栅氧化层106及选择栅极112。电阻器400配置于基底100的周边区10b上。电阻器400包括依序配置于基底100上的氧化层108及导体层114。介电层128与导体层132依序配置于电阻器400上，其中介电层128与导体层132的面积小于导体层114的面积。 [0065] Referring to 1D, the semiconductor structure 10 comprises a substrate 100, a charge storage structure 20 (V, selecting transistor 300, a resistor 400, a dielectric layer 128 having a cell region and the peripheral region 100b 10a and the conductor layer 132. The substrate 100 the charge storage structure 20 (V 300 and the selection transistor cell region 10a disposed on the substrate 100. the charge storage structure 20 (V comprises a substrate 100 are sequentially disposed on the gate oxide layer 104, floating gate 110, inter-gate dielectric layer 126 and the control gate 130. the selection transistor 300 includes a substrate 100 are sequentially arranged on the select gate 106 and select gate oxide layer 112. the resistor 400 is disposed on the peripheral region 10b of the substrate 100. the resistor 400 includes 100 are sequentially disposed on the substrate 108 and the oxide layer 114. the conductive layer 128 area of ​​the dielectric layer and the conductor layer 132 are sequentially disposed on the resistor 400, the dielectric layer 128 and the conductive layer 132 is smaller than the area of ​​the conductor layer 114 .

[0066] 此外，浅沟槽隔离结构101配置于电阻器400下方的基底100中。 [0066] In addition, the shallow trench isolation structure 101 is disposed on the substrate 100 below the resistor 400.间隙壁118、134配置于电荷存储结构200'的侧壁上。 Spacers 118, 134 disposed on a sidewall of the charge storage structure 200 '.间隙壁118配置于电阻器400的侧壁上。 Spacer 118 is disposed on the side wall 400 of the resistor.间隙壁134配置于介电层128与导体层132的侧壁上，其中介电层128与导体层132构成金属硅化物阻挡层。 Spacer 134 is disposed on the sidewall of the dielectric layer 128 and the conductive layer 132, dielectric layer 128 and the conductor layer 132 constituting the barrier layer is a metal silicide.间隙壁118、134配置于选择晶体管300的侧壁上。 Spacers 118, 134 disposed on a sidewall of the selection transistor 300.掺杂区120配置于电荷存储结构20(V与选择晶体管300两侧的基底100中，且电荷存储结构20(V与选择晶体管300共用一个掺杂区120。金属硅化物层136配置于电荷存储结构20(V的表面、选择晶体管300的表面、掺杂区120的表面、导体层132的表面以及导体层114未经导体层132覆盖的表面上。金属硅化物层136的材料包括硅化钴。导体层114与导体层132的材料包括掺杂多晶娃。 Doped region 120 is disposed in the charge storage structure 20 (on both sides of the substrate 300 and the selection transistor 100 V, and the charge storage structure 20 (V and 300 share one selection transistor region 120. The metal silicide layer 136 disposed on the doped charge storage 20 (V surface structure, the surface selection transistor 300, a doped surface region 120, a surface of the conductor layer 132 and the conductive layer 114 not covered with the upper surface of the conductive layer 132 material of the metal silicide comprises cobalt silicide layer 136. the conductor layer 114 and the conductive material layer 132 comprises doped polycrystalline baby.

[0067] 第二实施例 [0067] Second Embodiment

[0068] 在上述的实施例中，是以在晶胞区10a形成包括电荷存储结构20(V及选择晶体管300的两晶体管(2T)结构为例来说明之，但本发明并不以此为限。在另一实施例中，也可以仅形成电荷存储结构20(V于晶胞区10a上，而形成如图2所示的半导体结构20。 [0068] In the above embodiment, the cell region 10a is formed in the two transistor (2T) structure as an example to illustrate the charge storage structure comprises 20 (V and the selection transistor 300, but the present invention is not limit. in another embodiment, 20 (V on the cell area 10a, while forming a semiconductor structure 20 shown in FIG. 2 may be formed only charge storage structure.

[0069] 综上所述，可利用将定义控制栅极的图案嵌入SAB光掩模中，使用现有的逻辑(logic)制作工艺来制作包括存储单元与电阻器的半导体结构。 [0069] As described above, can be used to define a pattern of embedded control gate SAB photomask, using conventional logic (Logic) the production process to produce a semiconductor structure comprising a memory unit and resistor.本发明所形成的包括存储单元与电阻器的半导体结构均符合客户的电性要求。 The semiconductor structure includes a memory unit formed with a resistor of the present invention are electrically meet customer requirements.此处的存储单元可为ETOX结构或包括电荷存储结构与选择晶体管的两晶体管(2T)结构，可依客户需求进行单次可程式化(OTP)或多次可程式化(MTP)操作。 Here the storage unit can be a single programmable (OTP) or multiple times programmable (MTP) operable to ETOX structure or charge storage structure comprises a selection transistor and two transistor (2T) structure, according to customer needs.此外，与现有的复杂制作工艺相比，本发明的方法可利用现有制作工艺同时制造存储单元与电阻器，因此能大幅降低成本，提升竞争力。 In addition, compared with the conventional complicated production process, the method of the present invention can be manufactured simultaneously using the existing manufacturing process of the resistor memory cell, it is possible to significantly reduce costs and enhance competitiveness.

[0070] 虽然结合以上实施例揭露了本发明，然而其并非用以限定本发明，任何所属技术领域中具有通常知识者，在不脱离本发明的精神和范围内，可作些许的更动与润饰，故本发明的保护范围应以附上的权利要求所界定的为准。 [0070] While the embodiments disclosed above in connection with the embodiments of the present invention is, however, not intended to limit the present invention, any skilled in the art having ordinary knowledge in the present invention without departing from the spirit and scope of the various omissions, substitutions may be made retouch, so the scope of the present invention should be defined by the appended claims and their equivalents.

Claims (15)

Translated from Chinese

1.一种半导体结构的制造方法，包括: 提供一基底，该基底具有晶胞区与周边区； 在该基底的该晶胞区上形成一堆叠结构以及于该基底的该周边区上形成一电阻器，其中该堆叠结构包含栅氧化层、浮置栅极以及第一间隙壁，该电阻器包括依序配置于该基底上的一氧化层及一导体层，该电阻器的氧化层及导体层分别与该堆叠结构的栅氧化层及浮置栅极具有相同的厚度、材料，并且通过同一图案化步骤形成； 在该堆叠结构的两侧的该基底中形成至少两个掺杂区； 在该基底上依序形成一介电材料层与一导体材料层； 在该基底上形成一图案化光致抗蚀剂层，该图案化光致抗蚀剂层覆盖该堆叠结构以及部分该电阻器；以及移除未经该图案化光致抗蚀剂层覆盖的该介电材料层与该导体材料层，以在该堆叠结构上形成一栅间介电层以及一控制栅极，同时于该电 A method of manufacturing a semiconductor structure, comprising: providing a substrate, the substrate having a cell region and the peripheral region; forming a stacked structure on the cell area of ​​the substrate and forming a region on the periphery of the substrate resistor, wherein the stacked structure comprising a gate oxide layer, a floating gate and first spacers, which are sequentially disposed on the resistor comprises a conductor layer and an oxide layer on the substrate, and a conductive oxide layer of the resistor each layer having the gate oxide layer and the floating gate of the stacked structure the same thickness, material, and is formed by the same patterning step; forming at least two doped regions in the substrate on both sides of the stack structure; the sequentially forming a dielectric material layer and a conductive material layer on the substrate; a patterned photoresist layer, the patterned photoresist layer covering the stacked structure and portions of the resistors formed on the substrate ; and without removing the dielectric material layer and the conductive material layer the patterned photoresist layer covering to form an inter-gate dielectric layer on the stacked structure and a control gate, while in the Electricity器上形成一金属硅化物阻挡(SAB)层，其中该堆叠结构、该栅间介电层、以及该控制栅极构成一电荷存储结构。 Forming a metal silicide block (SAB) layer, wherein the stack structure, inter-gate dielectric layer, a control gate and a charge storage structure configuration.

2.如权利要求1所述的半导体结构的制造方法，其中在形成该电荷存储结构的步骤之后，还包括: 在该电荷存储结构以及该金属硅化物阻挡层的侧壁上形成一第二间隙壁；以及在该电荷存储结构的表面、该些掺杂区的表面与该电阻器的部分表面上形成一金属硅化物层。 2. The method of manufacturing a semiconductor structure according to claim 1, wherein after the step of forming a charge storage structure, further comprising: forming a second gap in the sidewall of the charge storage structure and the metal silicide blocking layer walls; and forming a metal silicide layer on a surface portion of the surface of the charge storage structure, the surface of the plurality of doped regions of the resistor.

3.如权利要求2所述的半导体结构的制造方法，其中该金属硅化物层的材料包括硅化钴。 The method of manufacturing a semiconductor structure according to claim 2, wherein a material of the metal silicide comprises cobalt silicide layer.

4.如权利要求1所述的半导体结构的制造方法，其中在形成该堆叠结构以及该电阻器的步骤时，同时在该基底的该晶胞区的该堆叠结构的一侧形成一选择晶体管， 且该些掺杂区还形成在该选择晶体管两侧的该基底中，该电荷存储结构与该选择晶体管共用一个掺杂区，以及该介电材料层与该导体材料层还覆盖该选择晶体管。 4. The method of manufacturing a semiconductor structure according to claim 1, wherein at the step of the stacked structure and forming a resistor, while a select transistor formed on one side of the stacked structure of the cell area of ​​the substrate, and further the plurality of doped regions formed in both sides of the selection transistors in the substrate, the charge storage structure and the selection transistor share a doped region, and the dielectric material layer and the conductive material layer also covers the selection transistor.

5.如权利要求1所述的半导体结构的制造方法，其中该导体材料层的材料包括掺杂多S 7:+曰曰性O 5. The method of manufacturing a semiconductor structure according to claim 1, wherein the conductive material layer comprises a material doped poly-S 7: + said of said O

6.—种半导体结构，包括: 基底，该基底具有晶胞区与周边区； 电荷存储结构，配置于该基底的该晶胞区上，该电荷存储结构包括依序配置于该基底上的栅氧化层、浮置栅极、栅间介电层与控制栅极； 电阻器，配置于该基底的该周边区上，该电阻器包括依序配置于该基底上的氧化层及第一导体层；以及介电层与第二导体层，依序配置于该电阻器上，其中该介电层与该第二导体层构成一金属硅化物阻挡层； 其中该电阻器的氧化层及第一导体层分别与该电荷存储结构的栅氧化层及浮置栅极具有相同的厚度、材料，并且通过同一图案化步骤形成。 6.- semiconductor structure, comprising: a substrate, the substrate having a cell region and the peripheral region; charge storage structure disposed on the substrate region of the cell, the charge storage structure comprises a substrate are sequentially disposed on the gate oxide layer, a floating gate, an inter-gate dielectric layer and a control gate; resistor, disposed on the peripheral region of the substrate, the resistor comprises sequentially disposed on the substrate layer and the first oxide conductive layer ; and a dielectric layer and the second conductive layer are sequentially disposed on the resistor, wherein the dielectric layer and the second conductive layer comprises a metal silicide blocking layer; wherein the oxide layer of the resistor and the first conductor each layer has the same thickness, the material of the gate oxide layer and the floating gate and the charge storage structure, and is formed by the same patterning step.

7.如权利要求6所述的半导体结构，还包括: 浅沟槽隔离结构，配置于该电阻器下方的该基底中； 第一间隙壁，配置于该电荷存储结构的侧壁上； 第二间隙壁，配置于该电阻器的侧壁上； 第三间隙壁，配置于该金属硅化物阻挡层的侧壁上；以及至少二个掺杂区，配置于该电荷存储结构两侧的该基底中。 7. The semiconductor structure according to claim 6, further comprising: a shallow trench isolation structure of the substrate disposed below the resistor; a first spacer disposed on a sidewall of the charge storage structure; a second spacers disposed on sidewalls of the resistor; third spacer disposed on sidewalls of the silicide blocking layer; and at least two doped regions disposed on the charge storage structure on both sides of the substrate in.

8.如权利要求7所述的半导体结构，还包括金属硅化物层，配置于该电荷存储结构的表面、该些掺杂区的表面、该第二导体层的表面以及该第一导体层未经该第二导体层及该第三间隙壁覆盖的表面上。 8. The semiconductor structure of claim 7, the plurality of doped surface region, further comprising a metal silicide layer disposed on a surface of the charge storage structure, the surface of the second conductor layer and first conductor layer is not by the upper surface of the second conductive layer and the third spacer cover.

9.如权利要求8所述的半导体结构，其中该金属硅化物层的材料包括硅化钴。 9. The semiconductor structure according to claim 8, wherein the material of the metal silicide comprises cobalt silicide layer.

10.如权利要求6所述的半导体结构，还包括选择晶体管，配置于该基底的该晶胞区上且位于该电荷存储结构的一侧。 10. The semiconductor structure according to claim 6, further comprising a select transistor and disposed on a side of the charge storage structure on the cell area of ​​the substrate.

11.如权利要求10所述的半导体结构，其中该选择晶体管包括依序配置在该基底上的选择栅氧化层及选择栅极。 11. The semiconductor structure according to claim 10, wherein the select transistor comprises a select gate oxide layer are sequentially disposed on the substrate and select gate.

12.如权利要求10所述的半导体结构，还包括: 浅沟槽隔离结构，配置于该电阻器下方的该基底中； 第一间隙壁，配置于该电荷存储结构的侧壁上； 第二间隙壁，配置于该电阻器的侧壁上； 第三间隙壁，配置于该金属硅化物阻挡层的侧壁上； 第四间隙壁，配置于该选择晶体管的侧壁上；以及多个掺杂区，配置于该电荷存储结构与该选择晶体管两侧的该基底中，且该电荷存储结构与该选择晶体管共用一个掺杂区。 12. The semiconductor structure according to claim 10, further comprising: a shallow trench isolation structure of the substrate disposed below the resistor; a first spacer disposed on a sidewall of the charge storage structure; a second spacers disposed on sidewalls of the resistor; third spacer disposed on sidewalls of the silicide blocking layer; a fourth spacer, disposed on the sidewall of the select transistor; and a plurality of doped heteroaryl region disposed on the charge storage structure on both sides of the selection transistors in the substrate, the charge storage structure and the selection transistor and a common doped region.

13.如权利要求12所述的半导体结构，还包括金属硅化物层，配置于该电荷存储结构的表面、该选择晶体管的表面、该些掺杂区的表面、该第二导体层的表面以及该第一导体层未经该第二导体层及该第二间隙壁覆盖的表面上。 13. The semiconductor structure of claim 12, wherein the surface of the surface of the plurality of select transistor doped surface region and the second conductive layer, further comprising a metal silicide layer disposed on a surface of the charge storage structure,,, the first conductive layer without a conductive layer on the second surface of the second spacer and a cover.

14.如权利要求13所述的半导体结构，其中该金属硅化物层的材料包括硅化钴。 14. The semiconductor structure according to claim 13, wherein the material of the metal silicide comprises cobalt silicide layer.

15.如权利要求6所述的半导体结构，其中该第一导体层与该第二导体层的材料包括掺杂多晶硅。 15. The semiconductor structure according to claim 6, wherein the conductive material of the first layer and the second conductor layer comprises a doped polysilicon.

CN 2012100229122011-08-162012-02-02Semiconductor structure and method of forming the same
CN102956560B
(en)