ASML provides litho support to Globalfoundries

LONDON – Lithography technology supplier ASML is partnering with foundry Globalfoundries to help with computational lithograpy for 28- and 20-nm tape outs, and to accelerate the development of future chip manufacturing nodes, including those based on extreme ultraviolet (EUV) lithography.

The work is being done through Brion Technologies Inc. (Santa Clara, Calif.), a division of ASML Holding NV (Veldhoven, The Netherlands) specializing in computational lithography tools.

ASML said Globalfoundries (Milpitas, Calif.) is offering customers access to Brion's Tachyon Flex, which is a computing architecture that allows Tachyon applications to be distributed across thousands of CPU cores. ASML claimed that Tachyon Flex has a better scalability than competitor products resulting in a time and cost savings for large tape outs.

Jim Koonmen, general manager of Brion Technologies said, he looked forward to Globalfoundries using Tachyon at the 28-nm, 20-nm, 14-nm and other nodes.