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Abstract

When uniformly distributed circular load is applied on ultra thin circular mirror and the outer edge of the mirror is
clamped, completely theoretical derivations of response function are derived. Lots of simulations are also made. Results
show the size of the distributed load's area do not immediately decided the whole shape of the mirror when the intensity
of the distributed load remains constant. And the size of the distributed load's area only obviously changes the
deformation of the center point of load gravity. If the size of the area is bigger, the deformation of this point is bigger,
and vice versa. Meanwhile, the theoretical analysis method is also used to other shapes of the uniformly distributed load,
such as sector, rectangle or triangle.

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Journal of Applied Remote SensingJournal of Astronomical Telescopes Instruments and SystemsJournal of Biomedical OpticsJournal of Electronic ImagingJournal of Medical ImagingJournal of Micro/Nanolithography, MEMS, and MOEMSJournal of NanophotonicsJournal of Photonics for EnergyNeurophotonicsOptical EngineeringSPIE Reviews