Use this form to find out some of the structural, physical and chemical
properties of major MEMS related materials. Material properties of silicon and
its oxide and nitride, polysilicon, silicon carbide, commonly used metals as
well as acids and bases used in MEMS fabrication are given.

Unless otherwise mentioned, the properties are given at room temperature.
Eventhough bulk properties of materials may not scale well in the microscopic
level, that is used in most cases due to the lack of better numbers. Crystal
defects in the thin film could give a much different value than that obtained
for a bulk material. The properties of acids and bases are given at commonly
used concentration levels, and is usually dependent on the temperature and
concentration.