The Control and System Integration of Micro- and Nano-Scale Systems Workshop
was held at the National Science Foundation in Arlington, Va., on March 29-30, 2004. The workshop
identified research areas, fostered inter-disciplinary collaborations, and recommended future
research directions to NSF that will enable control and system integration on the micro- and
nano-length scales.

Attendees came from a broad spectrum of researchers with capabilities relevant to micro/nano
systems, control, and system integration, including: micro and nano scale fabrication, control
theory, systems integration, optimization, measurement and detection on small length scales,
modeling, bio-chemical systems, and other topics relevant to the micro/nano control and system integration theme.

Breakout sessions were loosely organized based on the following sub-topics:

Special emphasis was placed on identifying needs and bottlenecks on the path
towards control and system integration: what tools, techniques, collaborations, basic science
understanding, and educational resources are needed to enable integrated systems on the micro and
nano scales?