Abstract

A sinusoidal-shaped fused-silica grating as a highly efficient polarizing beam
splitter (PBS) is investigated based on the simplified modal method. The grating
structure depends mainly on the ratio of groove depth to grating period and the
ratio of incident wavelength to grating period. These ratios can be used as a
guideline for the grating design at different wavelengths. A sinusoidal-groove PBS
grating is designed at a wavelength of 1310nm under Littrow mounting, and the transmitted TM and TE polarized waves are
mainly diffracted into the zeroth order and the −1st order, respectively. The grating profile is optimized by using rigorous
coupled-wave analysis. The designed PBS grating is highly efficient (>95.98%) over the O-band wavelength range (1260–1360nm) for both TE and TM polarizations. The sinusoidal grating can exhibit
higher diffraction efficiency, larger extinction ratio, and less reflection loss
than the rectangular-groove PBS grating. By applying wet etching technology on the
rectangular grating, which was manufactured by holographic recording and inductively
coupled plasma etching technology, the sinusoidal grating can be approximately
fabricated. Experimental results are in agreement with
theoretical values.

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