BEOL Issues At 10nm And 7nm

Semiconductor Engineering sat down to discuss problems with the back end of line at leading-edge nodes with Craig Child, senior manager and deputy director for GlobalFoundries’ advanced technology development integration unit; Paul Besser, senior technology director at Lam Research; David Fried, CTO at Coventor; Chih Chien Liu, deputy division director for UMC’s advanced technology development Module Division; and Anton deVilliers, director of patterning technology and senior member of the technical staff at Tokyo Electron. What follows are excerpts of that conversation.