Reedholm

RI-35

in Test Systems

"this unit was working before we shut down the system some 2 to 3yrs ago.believed to have GPIB cards Believed not to have EG2001 drivers. May have EG4090 and TEL prober driversStandard Reedholm tester instrumentation."

Semilab

IR3100s

in Spectrometers

Complete IR3100 small spot Model-Based IR to Near-IRsemiconductor metrology tool configured with a uniqueall-optical method. The measurement is both non-contactand non-destructive with rapid analysis of deep trenchesand other high aspect ratio structures on product wafers.

Sumitomo Heavy Indus

SWA-90GD

in Semiconductor Manufacturing Equipment

1

Regensburg, BY

Sumitomo Laser Anneal:

The main function of this System is to rapidly anneal semiconductor substrates using laser beam energy in order to recover defect crystals generated by pre-process such as ion implantation.The System is composed of Solid-state laser units, processing station, control devices, transfer robot and other accessory facilities.

Although this system has been designed and manufactured so that it delivers the safety conforming to IEC 60825-1:2001, Safety of laser products-Part1: Equipment classification, requirements and user’s guide, the laser unit used in this system corresponds to a lass 4 laser product.