An apparatus and method of operation for a self-testable accelerometer having a housing, a diaphragm for detecting movement in response to an applied force, a mass on the diaphragm, at least one capacitive plate attached to the housing and disposed such that a potential difference between the capaci ...

A gas chromatography assembly has a substrate wafer with grooves and a valve seat etched therein. A plate cooperates with the wafer and the grooves to define gas channels: a carrier gas channel and a sample gas channel, each passing through the valve seat. A valve actuator is attached to the valve s ...

An apparatus and method of operation for a self-testable accelerometer having a housing, a diaphragm for detecting movement in response to an applied force, a mass on the diaphragm, at least one capacitive plate attached to the housing and disposed such that a potential difference between the capaci ...

An apparatus and method of operation for a self-testable accelerometer having a housing, a diaphragm for detecting movement in response to an applied force, a mass on the diaphragm, at least one capacitive plate attached to the housing and disposed such that a potential difference between the capaci ...

A transducer having a plurality of sensing elements disposed in a single diaphragm wherein each of the sensing elements is spaced from every other of the sensing elements a predetermined distance so as to control interference among the sensing elements. Each of the sensing elements preferably compri ...

A transducer having a plurality of sensing elements disposed in a single diaphragm wherein each of the sensing elements is spaced from every other of the sensing elements a predetermined distance so as to control interference among the sensing elements. Each of the sensing elements preferably compri ...

Methods and apparatus for an absolute or gauge pressure sensor having a backside cavity with a substantially vertical interior sidewall. The backside cavity is formed using a DRIE etch or other MEMS micro-machining technique. One embodiment provides for a diaphragm having a boss manufactured using a ...

A trimmable microminiature force-sensitive switching device for detecting the state of external conditions, such as pressure, acceleration and temperature, is disclosed. The device includes a silicon substrate having a reduced-thickness, deflectable member adapted to change its deflection in respons ...

Various voltage regulators and/or voltage regulation systems are disclosed. For example, a voltage regulation system that includes a source follower output is disclosed. The source follower output includes a transistor where the source of the transistor provides a baseline voltage to a regulated vol ...