RF MEMS: Theory, Design, and Technology

Ultrasmall Radio Frequency and Micro-wave Microelectromechanical systems (RF MEMs), such as switches, varactors, and phase shifters, exhibit nearly zero power consumption or loss. For this reason, they are being developed intensively by corporations worldwide for use in telecommunications equipment. This book acquaints readers with the basics of RF MEMs and describes how to design practical circuits and devices with them. The author, an acknowledged expert in the field, presents a range of real-world applications and shares many valuable tricks of the trade.

GABRIEL M. REBEIZ received his PhD from the California Institute of Technology. He was the recipient of the National Science Foundation Presidential Young Investigator Award, and in 2000 was the corecipient of the IEEE Microwave Prize. A Fellow of the IEEE and a consultant to Rockwell, Samsung, Intel, Standard MEMS, and Agilent, he has published extensively in the field of microwave technology and in the area of RF MEMS. He was at the University of Michigan, Ann Arbor, and is now a Professor of Electrical and Computer Engineering at the University of California, San Diego.

"...an excellent book for graduate students or practicing engineers
in the field of RF microwave technology who need to learn about the
latest developments in the RF MEMS world." (IEEE Electrical
Insulation Magazine, November/December 2004)

"It provides the most comprehensive survey of this new and
important technology.” (Microwave Journal, January
2004)

"...an invaluable addition to the research library, and highly
recommended to all interested in this fascinating technology."
(Microwaves & RF, June 2003)

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