Ted is out this morning. Tylan1 has a problem with the monoblock N2 MFC.
I will address that first thing after this report. Mike replaced the
broken sheath on BPSG and it is up now. All else looking good.
Diffusion Date: 5/21/2004
Tube Name/Number Status
Comments THICKNESS-Change at
Tylan 1 Down
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-TEOS2 down MFC and trap installed
testing
Tylan 8-SiGe
Up
6.61/30
Tylan 9-Poly
Up
29.27/30
Tylan 10-Nitride yellow
Particles? 8.47/30
Tylan 11-BPSG-LTO Up loader sheath
replaced 32.4/30
Tylan 12-FGA Up
Tystar Up
Doped Poly
GONE
11.62/30
TEOS yellow running
Tylan 16 N/A
Burn Box Up Cleaned this
morning
ZYGO Up
GAAS 22 UP
GAAS 23 UP
SiH4 for furnaces Auto changeover
working well A on line 515 PSI
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