Scope

surface physics and chemistry (i.e. understanding
the chemical and physical nature of MEMS/NEMS surfaces,
interfaces, the role of surfaces and materials interfaces
during processing, device operation, and long-term
reliability);

device and reliability physics (i.e. understanding
the physical basis for operation and failure in all
types of MEMS/NEMS as well as life-time projections,
scientific studies of fatigue of materials and interfaces
at micro- and nano-scales);