EFEM Soft

EFEM Software, the Windows-based platform was independently developed in C# and C++ and currently built and operated in EFEM. This supports a TMC field driving facilities and user-friendly GUI (operable only with a TMC without GUI)

A control method is largely categorized into the “Communication Control Type” handling Job and Schedule and the “EFEM Main Control Type” operated by commands from the process equipment. The Communication Control Type reports the EFEM status to FA Host while performing Interface Communication between EFEM Software and Process Module Controller.