For the research and development of new materials it is important to know their chemical structure and composition. There are processes in cells, bacteria and other microsystems which are not known or couldnt be studied with common analytics. Nanoanalytics play a key role in pushing nanotechnology and studying microsystems. In the field of nanoanalytics using infrared microspectroscopy isnt possible because of the diffraction limit. Now with a new technology which is called AFM-IR it is possible to use infrared spectroscopy for measuring nanoscale objects. The spatial limit of the instrument isn`t diffraction limited. AFM-IR combines the high spatial resolution of the atomic force microscopy (AFM) with the high chemical information of the infrared spectroscopy (IR). In this research a homemade AFM-IR setup at the vienna university of technology (TU WIEN) was tested and characterized. The primary goal was to determine the spatial resolution of the setup. This was done by measuring reference samples which were made by microphase separation of polystyrene and polymethyl methacrylate blends and measure them with the AFM-IR setup and with an atomic force microscope using the phase imaging method. The results of these measurements were analysed by image processing and statistics and were compared together. For now the spatial resolution which the AFM-IR setup can achieve is 80 nm. Furthermore the AFM-IR setup was tested for using it in the semiconductor industry by measuring silicon samples. It was shown that the homemade AFM-IR setup can be used for measuring successfully nanoscale objects.