About Optics & Photonics TopicsOSA Publishing developed the Optics and Photonics Topics to help organize its diverse content more accurately by topic area. This topic browser contains over 2400 terms and is organized in a three-level hierarchy. Read more.

Topics can be refined further in the search results. The Topic facet will reveal the high-level topics associated with the articles returned in the search results.

Abstract

We design, fabricate and characterise a narrowband Fabry-Pérot multispectral filter set for the visible range (400–750nm) that is suitable for integration onto complementary-metal oxide-semiconductor image sensors. We reduce the fabrication steps by fixing the physical cavity length and altering the effective optical length instead. Using electron-beam lithography, a sub-wavelength hole array is patterned in a silicon nitride cavity layer, backfilled with poly(methyl methacrylate), and bounded by aluminium mirrors to create 23 filters with full-width half-maximums of 22–46nm. Additionally, for colourmetric reproduction applications, using as few as 10 filters gives a colour difference (CIEDE2000) of 0.072, better than trichromatic filters.

A. Vial and T. Laroche, “Description of the dispersion properties of metals by means of the critical points model and the application to the study of resonant structures using the FDTD method,” J. Phys. D: Appl. Phys 40, 7152–7158 (2007).
[Crossref]

A. Vial and T. Laroche, “Description of the dispersion properties of metals by means of the critical points model and the application to the study of resonant structures using the FDTD method,” J. Phys. D: Appl. Phys 40, 7152–7158 (2007).
[Crossref]

Laroche, T.

A. Vial and T. Laroche, “Description of the dispersion properties of metals by means of the critical points model and the application to the study of resonant structures using the FDTD method,” J. Phys. D: Appl. Phys 40, 7152–7158 (2007).
[Crossref]

Vial, A.

A. Vial and T. Laroche, “Description of the dispersion properties of metals by means of the critical points model and the application to the study of resonant structures using the FDTD method,” J. Phys. D: Appl. Phys 40, 7152–7158 (2007).
[Crossref]

J. Phys. D: Appl. Phys (1)

A. Vial and T. Laroche, “Description of the dispersion properties of metals by means of the critical points model and the application to the study of resonant structures using the FDTD method,” J. Phys. D: Appl. Phys 40, 7152–7158 (2007).
[Crossref]

The measured spectral response of the filters. Line colours indicate nominal hole diameter in mask before EB dosage adjustment. A montage of the white-light microscope images of the filters is shown (Insert).

Analysis of the fabricated structure (a) scanning electron micrograph of cross section, (b) measured (without additional filter) and simulated transmission for both PMMA-Si3N4 and PMMA-Si-rich(60%) SixNy (40%) cavities. The dimensions used are as measured from (a); Al 15nm, tSiN 200nm, overfill 90nm, d 140nm and ARL 85nm. Simulations at non-normal incidence also shown. (c) T-matrix simulations of all 23 measured filters using the Si-rich SixNy model. The effect of the additional filter used in Fig. 3 is included for clarity.