VCSEL WAFER PROBE SYSTEM

A system that measures the optical and electrical properties of VCSEL wafers has been designed by Labsphere Inc. and Karl Suss America Inc. Designed for high-speed characterization, this turnkey system uses a Spectralon integrating sphere that minimizes sensitivity to beam alignment and divergence and that eliminates reflections that damage the device under test. Measurements include L-I-V curves, optical power, peak wavelength, full width half maximum, kink voltage and current curves, and spectral analysis. The system accepts wafers and substrates up to 200 mm in diameter and provides NIST-traceable measurements for devices emitting at 850 and 980 nm.

Multitasking operating software provides graphical and remote interfaces that allow the user to set up test parameters, to record measurement information and to utilize color graphic wafer mapping to identify characteristic process gradients.