GX600N Dry Pump 380-450 V 50/60 Hz

A54731959

Overview

The GX Dry Vacuum Pump Series sets new standards for zero maintenance between major overhauls. Improved efficiency lowers the cost of ownership and provides continuous pumping duty throughout the pressure range.

GX drypumps include Ethernet connectivity allowing key data to be viewed via web pages, as well as a comprehensive set of networking options to assure continuous pump availability.

GX pumps are available in a wide range of peak speeds and variants to address applications from clean through to medium-duty processes. A modular design allows users to configure GX drypumps to suit individual fab requirements. An ultra-compact footprint allows installation options including on-tool, close proximity, or remote.

Technology

Lower Utilities CostsTypically a 40% saving can be made on utilities costs over an entire fab.

Based on a 300mm fab in the US, containing 200 tools, 537 pumps

70% GX pumps, 30% iH pumps

GX fitted with constant flow water valve

Designed for Energy Efficiency

High performance motors and inverter drives

Low operating power consumption

Lower power standby mode using Active Utility Control (AUC)

Nitrogen dilution can be tuned to the application requirement

Minimizes gas usage

Highly efficient cooling

High conductivity materials and good design enables low water flow

Precision ceramic bearings

Very high load capability for reliability

Low noise and vibration

Ethernet ConnectivityThe GX Series includes unique web serving functionality that allows viewing of key parameters through a simple Ethernet connection and browser. Any user can simply connect to the pump to view a range of information, such as: