Piezoelectric Active Vibration Cancellation

SEM-Base® VI

Overview
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SEM-Base®VI, the next generation in STACIS active piezoelectric vibration cancellation. SEM-Base VI is designed to support all commercial Scanning Electron Microscopes (SEMs), as well as many Focused Ion Beam (FIB) and Small Dual Beam instruments. SEM-Base VI provides improved vibration isolation performance, a faster more robust controller, and an advanced graphical user interface (GUI). SEM-Base VI will enable more labs and facilities to achieve the level of floor vibration required to satisfy the specifications of the tool manufacturer.

SEM-Base® VI provides, on average, 6 dB more vibration isolation than previous models. In addition, TMC's next generation controller, the DC-2020, features a new dual-core processor and provides tool owners and researchers with a very simple and easy-to-use graphical interface for fast system assessment and operational peace-of-mind. When connecting over Ethernet, the DC-2020 creates the SEM-Base GUI in the user's browser with no additional software or application program to install. Alternatively, the user can interface with the controller via an on-board menu-driven Liquid Crystal Display (LCD).