Shyh-Chiang Shen, Ph.D. // Lab

Bunger-Henry 256 laboratory

Introduction

The Bunger-Henry 256 lab is a class-1,000 clean room with a class-100 soft wall modular clean room in one corner. The room adjoining the clean room serves as a measurement room. This area is currently a home to several semiconductor characterization systems for optoelectronic research. Fully functional as of April 2006, the BH 256 lab is equipped with a contact photolithography system, a high-vacuum electron-gun and thermal evaporator, a rapid thermal annealing system, wet chemical benches, etc. While this lab serves as an interim for our group until the completion of the NanoTech Research Center in 2008, it nevertheless supports many of our fabrication needs. We still must make use of other tools in the more sophisticated microelectronics research center (MiRC) to complete fabrication, however.