MetroChipMicroscope Calibration Target

For SEM, FIB, AFM and Light Microscopy
Note: Click on Micrographs below to See Area Enlargement

The MetroChip Microscope Calibration Standard for SEM, FIB, AFM, Light Microscopy and Metrology Systems
provides an extensive range of targets with periodic features for enhanced calibration down to the 100nm range.
The MetroChip standard is produced with today's nanotechnology demands in mind. It is designed for a long life
use and presents a stable calibration platform. The standard is produced on a 20x20mm chip with a thickness of
750µm. It delivers high contrast images for analytical SEM with minimal charging and combines a huge
calibration range from 4mm down to 100nm.
Calibration target for SEM features include alignment marks, linear microscale, distortion measurements,
par-axial calibration (image shift), resolution measurements, focus star, stigmator calibration, gratings,
concentric circles and squares. The combination of these targets on one standard makes the MetroChip ideal
as an all-in-one standard for setting up and regular calibration checks of the SEM, FIB or FESEM. It is also
employed for Light Microscopy and AFM; there are a number of targets to check linearity, distortion and scan length.