Abstract

We report on the growth of self-assembled quantum dots(QDs) on silicon substrate by antimony-mediated metal organic chemical vapor deposition. We obtained arrays of QD chains along , with density as high as and low coalescence. These QDs yield emission in the band. The temperature dependence of the photoluminescence intensity indicates the good optical quality of the grownQDs. Together, these results are promising for the fabrication of QD laser on silicon substrate.