High speed and accuracy in measurement is ensured by a redesign of the machine body that has improved rigidity of the structure,and by a remodeled guide mechanism

Newly developed, built-in, high-performance controller

Uses a digital servo system that processes all control loops for position, speed, and current as digital signals.

The digital servo system offers the following benefits:

(1) Little drift or deterioration with time

(2) Wide dynamic range

(3) Easy implementation of various types of control algorithm

I

Scanning measurement technology

High-performance scanning measurement has been achieved through the improved structural rigidity and incorporation of a newly developed compensation technology Maximum permissible scanning probe error: