BPN541: High-Voltage MEMS Resonators

Project ID

BPN541

Website

Start Date

Thu 2010-Jan-28 22:51:07

Last Updated

Tue 2010-Aug-10 21:51:33

Abstract

The use of high voltages (>100 volts) in MEMS-based resonators presents a pathway towards
achieving low motional resistances while maintaining excellent linearity, as would be required, for
example, in a MEMS-based power amplifier. This research demonstrates the feasibility of creating MEMS
resonators which can withstand such voltages without succumbing to electrical pull-in, focusing on
careful device design informed by FEM simulation.