The Optical Metrology Facility at the Canadian Light Source (CLS) has recently purchased MountainsMap surface
analysis software from Digital Surf and we report here our experiences with this package and its usefulness as a tool for
examining metrology data of synchrotron x-ray mirrors. The package has a number of operators that are useful for
determining surface roughness and slope error including compliance with ISO standards (viz. ISO 4287 and ISO 25178).
The software is extensible with MATLAB scripts either by loading an m-file or by a user written script. This makes it
possible to apply a custom operator to measurement data sets. Using this feature we have applied the simple six-line
MATLAB code for the direct least square fitting of ellipses developed by Fitzgibbon et. al. to investigate the residual
slope error of elliptical mirrors upon the removal of the best-fit-ellipse. The software includes support for many
instruments (e.g. Zygo, MicroMap, etc...) and can import ASCII data (e.g. LTP data). The stitching module allows the
user to assemble overlapping images and we report on our experiences with this feature applied to MicroMap surface
roughness data. The power spectral density function was determined for the stitched and unstitched data and compared.