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Abstract

Thermal effects accompanying the vacuum deposition of poly-para-xylene (Parylene N) at different temperatures have been studied by following the changes in the temperature of the substrate. Two distinct exothermic effects were observed; one discrete, resulting in sharp exothermic spikes and the other continuous, resulting in the shift of the baseline. the spike effect, attributed to the solid-state polymerization of para-xylylene, is observed at the low-temperature range, the upper limit of which moves higher for higher deposition rates. the shift of a baseline as a function of deposition temperature exhibits two maxima, one independent of deposition rate and the second moving toward higher temperatures (that is, toward the first maximum) for higher deposition rates.