DescriptionThe MEMS/NEMS labs conduct fundamental and applied research using state-of-the-art
micro and nano scale experimental characterization techniques to study MEMS and NEMS
properties and interactions. This includes designing, modeling, simulating, characterizing,
and testing a vast variety of MEMS and NEMS devices and applications.

We seek to solve industry-related problems, such as investigating the failure and
collapse of microstructures due to mechanical shock, capillary forces, and electrostatic
forces. Fundamental research is aimed at understanding the basic phenomena and concepts
related to the dynamics of micro and nano structures, such as investigating the nonlinear
vibration response of carbon nanotubes (CNTs).

Other research activities include designing novel MEMS/NEMS sensors and switches,
such as developing a threshold switch triggered by mechanical shock, a capacitive
switch that operates at reduced voltage, and smart bio- and chemo–mechanical sensors.