Semiconductor

Downsizing equipment used inside clean rooms

As clean rooms cannot be easily expanded, the demand for downsizing of equipment is high to utilize limited space. However, even if downsizing is mechanically possible, the size of each part becomes a bottleneck and equipment cannot be made smaller in many cases.For example, when using parts that comply with SEMI standards, by considering safety, it is difficult to find the appropriate size for parts and end up wasting space. Many of the semiconductor manufacturing equipment manufacturers most likely want to use small parts.