Beam quality: the oxygen 5+ or 6+ beam of the required energy with an intensity of about 100 nA, energy resolution of the beam was around 0.3%, the diameter of the beam spot about 2*3 mm^2Target: The target were self-supporting carbon foils of 0.24 mg/cm2 thicknessData obtained: author graph (digitized with GSYS 2.4)The experiment was carried out at Jyvaskyla University Cyclotron. The recent data at 132 MeV for this system have been remeasured with much better statistics.