XLC-2, Aluminum High Vacuum Angle Valve, Double Acting, Bellows Seal

XLC-2 is a double acting high vacuum angle valve with a bellows seal for the shaft. The XL*-2 family shares common features with all series members. Bodies are made of aluminum for lightweight and excellent thermal conductivity, resulting in a uniform temperature for the entire valve body. The body offers excellent resistance to fluorine corrosion. A low sputtering yield and the absence of heavy metals avoid wafer contamination.