[1]戴靖东.超大规模集成电路微细加工精密工作台系统的动态响应[J].东南大学学报(自然科学版),1987,17(1):96-105.[doi:10.3969/j.issn.1001-0505.1987.01.012] Dai Jingdong.Dynamic Response of an Accurate Positioning X-Y Stage System for Microfabrication in VLSI[J].Journal of Southeast University (Natural Science Edition),1987,17(1):96-105.[doi:10.3969/j.issn.1001-0505.1987.01.012]

In conformity with a practical distrubition of the mass and stiffness of an accurate positioning X-Y stage for the mierofabrieation in VLSI, the paper offers a dynamic model of a system with multi-dimension of freedom and uses the state space method to find the motion rule of an accurate positioning X-Y stage system and to seek the accurate solution with the help of a computer.