The second wave, which has only just started, comes from the more aggressive DRAM manufacturers pushing 50x nm migration, which is about a year behind that of NAND on a mass-market ramp basis. This will kick-in in 2008, we are told.
The most interesting aspect noted by Meurice was that logic manufacturers would be 12 to 18 months behind DRAM, putting the mass ramp at 45nm somewhere in 2009!
Considering that Intel is using dry double patterning 193nm ArF for its 45nm ramp now underway, immersion volume production ramp for the major foundries and the likes of AMD could well be a 2009 affair!