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Abstract

Ultraprecise imaging optics, which consists of two sets of elliptical mirrors and hyperbolic mirrors aligned perpendicular to each other (i.e., advanced Kirkpatrick–Baez mirrrors), is developed to realize high-resolution and achromatic full-field hard-X-ray microscopy. Experiments to form a demagnified image (with horizontal and vertical demagnification factors of 385 and 210, respectively) are conducted to evaluate the optical system at an X-ray energy of 11.5 keV at SPring-8. Results show that the imaging system can form a demagnified image with nearly diffraction-limited resolutions of ~50 nm in the horizontal and vertical directions. The field of view is also experimentally estimated to be ~12 × ~14 μm2 when used as a magnification imaging system.

Line profiles of images formed in the image plane. They were measured several times (vertical: three times, horizontal: four times) with different scanning intervals. All the experimental results obtained are plotted. The calculations correspond to the cross-sectional profiles at the center on the intensity maps shown in Fig. 2(a). The solid black curve was obtained by fitting Gaussian functions to the measured points.

Relationship between the angular distance from the field center and the FWHM in (a) horizontal and (b) vertical directions. The top horizontal axes indicate the FOV equivalent to the angular distance. The calculations were conducted only for the one-dimensional case.

Line profiles (upper) and 2D profiles (lower) of the image formed for the off-axis condition. The 2D profiles (area: 800 × 800 nm2; mesh size: 2 nm) were calculated using the simulator. The calculation results in the upper graphs correspond to the line profiles along the dashed white lines in the 2D profiles below the graphs. The angular values shown in the graph represent angles corresponding to the angular distance in Fig. 6. The color bars have a linear scale.