From beinnmuir at stanford.edu Mon Aug 7 01:18:35 2006
From: beinnmuir at stanford.edu (Beinn Muir)
Date: Mon, 7 Aug 2006 01:18:35 -0700
Subject: Headway: Removed res Mon 8.30-9.30am
Message-ID: <1154938715.44d6f75b6b900@webmail.stanford.edu>
From jwc at snf.stanford.edu Mon Aug 7 11:40:59 2006
From: jwc at snf.stanford.edu (James Conway)
Date: Mon, 07 Aug 2006 11:40:59 -0700
Subject: ALL USERS READ ME!! -- Last bottle of 5 % 495 PMMA in Anisole stocked
in the lab
In-Reply-To: <1154828056.44d54718c8b8e@webmail.stanford.edu>
References: <1154828056.44d54718c8b8e@webmail.stanford.edu>
Message-ID: <44D7893B.2080905@snf.stanford.edu>
Greetings PMMA Users:
I am very disappointed that I must send out this notice again!
Previous message thread July 25, 06
Previous message thread March 15, 06
Every Friday before I leave for the weekend, I check the PMMA and Ebeam
resist supplies in the Cleanroom.
I checked the PMMA's supplies in the SNF Cleanroom at 5 PM last Friday
and there was ~ 30 ml or more of 5% 495K PMMA in anisole remaining in
that bottle. This is enough for 20 - 25 wafers! There was also a spare
75 - 100 ml of 5% 495K PMMA in anisole remaining in an additional
bottle with my name on it for emergency back up.
Saturday evening Hemanth came in the Lab to discover a empty 5% 495K
PMMA in anisole and that the spare bottle was also missing.
A search of the lab did not recover the missing bottle and I can only
now surmise that it was taken out of the SNF cleanroom.
We have also consumed nearly a liter of 5% 495K PMMA over the course of
the last month. A 250 ml bottle of 5% 495K PMMA in anisole would last
two to three months in normal usage as per our past PMMA inventory logs.
Recently this volume has been consumed in a week to ten days! There
have not been nearly enough exposures in the Ebeam lab to account for
this level of usage of PMMA! Clearly it is being handled
inappropriately by untrained users, being wasted as some users may be
not using syringes to dispense these materials, or simply be taken from
the SNF cleanroom.
I have just restocked the last remaining 250 ml bottle of 5% 495K PMMA
in anisole into the cleanroom. I ordered the last supply source bottle
7-25-06 and it shipped last Wednesday. We may run out of PMMA before it
arrives -- if users are not following proper dispense methods
established for the lab.
ALL Users are requested to review the Ebeam resist handling procedures
to review the proper methods to handle these materials.
ALL Users are instructed to be frugal in their usage of these
materials, make an effort at all times to minimize waste, and never are
any chemicals or engineering materials to be taken out of the SNF
cleanroom for any purpose whatsoever.
This will be the third and last warning I will make on this topic:
If usage of PMMA materials does not return to normal acceptable levels
-- I will change the method in which we supply and control the usage of
these expensive engineering materials and will require all users to
check out each volume of material individually and at greater expense to
all lab members.
Users as a Community are also requested to be vigilant observers and are
instructed to report any User who is taking material from the SNF
Cleanroom and/or not dispensing the material properly using syringes on
the spinners. You suggestions are welcomed.
Thank you for your support,
James Conway
Hemanth Jagannathan wrote:
>HI Everyone,
>
> Just wanted to send out and e-mail to everyone to inform you that we are
>out of 5% PMMA in the lab. I came in and search high and low (and at all the
>spinners) and only found a bottle with a few drops remaining.
>
>Best-
>
>Hemanth Jagannathan
>
>
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From auprabhu at yahoo.com Mon Aug 7 16:45:27 2006
From: auprabhu at yahoo.com (prabhu arumugam)
Date: Mon, 7 Aug 2006 16:45:27 -0700 (PDT)
Subject: tommorrow res 7.30-9.00 removed
Message-ID: <20060807234527.8597.qmail@web60813.mail.yahoo.com>
__________________________________________________
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Tired of spam? Yahoo! Mail has the best spam protection around
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From jwc at snf.stanford.edu Mon Aug 7 17:14:58 2006
From: jwc at snf.stanford.edu (James Conway)
Date: Mon, 07 Aug 2006 17:14:58 -0700
Subject: ANNOUNCEMENT: "TAKE A SPIN WITH ME" EBEAM RESIST HANDLING TRAINING
ON HEADWAY COATER. Aug. 22, 2006 0930 - 1130 hours FAB.
In-Reply-To: <20060807033654.20488.qmail@web60814.mail.yahoo.com>
References: <20060807033654.20488.qmail@web60814.mail.yahoo.com>
Message-ID: <44D7D782.6000604@snf.stanford.edu>
Hello,
I just scheduled the next "Take a Spin with Me " Class for Tuesday
August 22, 2006 from 09:30 - 11:30.
This quick class covers how to prepare your substrates for PMMA or other
Ebeam resists coating, showing you how to obtain quality spin coating
results on the Headway Spin Coater, and finally how to accurately
measure your polymer thin films' thickness.
Users may attend any, all, or part of this class as they desire.
This is an opportunity for you to prepare and coat your samples with
PMMA in preparation for Ebeam Lithography.
Please read the Ebeam Resist Handling Procedure
before attending this class for your benefit.
Schedule:
09:30 - 10:30 Substrate cleans for Ebeam Lithography. SNF Cleanroom wet
bench non-metal Silicon cleans
10:30 - 11:30 Spinning PMMA resist on the Headway wafer spinner coater.
SNF Cleanroom Headway 2.
Please sign up on the sheet that is in my office on my bulletin board.
CIS 31 white board right side...
NO NEED TO REPLY TO THIS MESSAGE.
i'm swamped with email...
James Conway
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From nmehenti at stanford.edu Tue Aug 8 08:08:39 2006
From: nmehenti at stanford.edu (Neville Mehenti)
Date: Tue, 08 Aug 2006 08:08:39 -0700
Subject: headway 9-10am reservation removed
Message-ID: <6.2.5.6.2.20060808080805.02fcb008@stanford.edu>
sorry for short notice, wafers not ready
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From beinnmuir at stanford.edu Wed Aug 16 11:50:11 2006
From: beinnmuir at stanford.edu (Beinn Muir)
Date: Wed, 16 Aug 2006 11:50:11 -0700
Subject: Headway res removed 12-1.30 today
Message-ID: <1155754211.44e368e31db78@webmail.stanford.edu>
Apologies for the late notice, co-polymer solution not ready.
From beinnmuir at stanford.edu Wed Aug 16 17:45:19 2006
From: beinnmuir at stanford.edu (Beinn Muir)
Date: Wed, 16 Aug 2006 17:45:19 -0700
Subject: Headway res removed 6-7.30pm today
In-Reply-To: <1155754211.44e368e31db78@webmail.stanford.edu>
References: <1155754211.44e368e31db78@webmail.stanford.edu>
Message-ID: <1155775519.44e3bc1f7f69e@webmail.stanford.edu>
Polymer solution still not ready...
From jwc at snf.stanford.edu Wed Aug 16 18:20:59 2006
From: jwc at snf.stanford.edu (James Conway)
Date: Wed, 16 Aug 2006 18:20:59 -0700
Subject: [Fwd: Resist]
Message-ID: <44E3C47B.1030908@snf.stanford.edu>
GREETINGS:
I WOULD JUST LIKE TO ADD THAT ALL USERS SHOULD BE PUTTING THE RESIST
THEY USE BACK INTO THE CHEMICAL STORAGE CABINETS WHEN THEY ARE FINISHED
SPINNING.
This last week, five times, users have come to me unable to find a
specific resist, or thought it was all used up, when in fact it was
either in the solvent carts abandoned in the lab or replaced into the
lab members chemical storage cabinet.
Please remember to also clean up after yourselves after working on the
coater and hot plate benches.
Users continuing this behavior will be conscripted into COMMUNITY SERVICE!
Last week Two users were 'volunteered' for Two Hours each for leaving
resist chemicals out overnight on the headway bench.
Users wishing to perform 'community service' for the benefit of the lab
only need to ask Mahnaz or James for task to be completed.
Thank you for your support!
James Conway
NO I am not here to spend my day cleaning up after you! Next time I
might call your Mother!
-------- Original Message --------
Subject: Resist
Date: Fri, 11 Aug 2006 15:50:31 -0700
From: Mahnaz Mansourpour
Organization: SNF
To: Lab
Hello all,
In order to work in a lab the size of our lab, one has to be
vigilant, patient, and extremely careful so things can work for majority
of the lab rmemeber....so here is what I am trying to get across...
When you change a resist bottle on the track make sure that you are
putting the correct bottle in and has to be a brand new bottle. Left
over bottles should not be used at all. If is late in the evening, or
middle of the night and new bottles of what ever resist is not
available then either shut down the track or yellow light it and put a
big sign on the track ( I like this one better) .
We have been getting a lot of inconsistency on 3612 front track and the
bottle was questionable with regards of the look of the bottle, most of
the lettering on the bottle was gone , Hand written 3612 was on
it.....please pay attention when you change the bottle and follow the
rule , you owe that to yourself and every one that uses the track
after you.
Secondly , when you are using a resist that needs refrigeration and some
how the resist disappear from the cart or some one takes it back ( as a
good will) , it is your responsibility to make sure that the resist end
up in the refrigerator.
Materials are much more expensive than every one thinks so please use
your judgment and if some one is doing something wrong take a few
minutes and explain things and if not sure ask your friendly staff.
Thanks
mahnaz
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From nmehenti at stanford.edu Fri Aug 18 11:25:23 2006
From: nmehenti at stanford.edu (Neville Mehenti)
Date: Fri, 18 Aug 2006 11:25:23 -0700
Subject: 12-1pm reservation cancelled
Message-ID: <6.2.1.2.2.20060818112327.078962b8@nmehenti.pobox.stanford.edu>
sorry for late notice, wafers not ready
From dwlee at stanford.edu Sun Aug 20 09:52:11 2006
From: dwlee at stanford.edu (Dok Won Lee)
Date: Sun, 20 Aug 2006 09:52:11 -0700
Subject: 2:30-4pm reservation cancelled
Message-ID: <1156092731.44e8933ba655f@webmail.stanford.edu>
Wafers are not ready.
Sorry~.
From dwlee at stanford.edu Tue Aug 22 09:47:35 2006
From: dwlee at stanford.edu (Dok Won Lee)
Date: Tue, 22 Aug 2006 09:47:35 -0700
Subject: Headway 1:00-2:30pm reservation removed
Message-ID: <1156265255.44eb352708ad9@webmail.stanford.edu>
Wafers are not ready.
From dwlee at stanford.edu Wed Aug 23 20:20:11 2006
From: dwlee at stanford.edu (Dok Won Lee)
Date: Wed, 23 Aug 2006 20:20:11 -0700
Subject: Headway 9:30am - 11am (tomorrow) reservation removed
Message-ID: <1156389611.44ed1aeb0dc94@webmail.stanford.edu>
Wafers are not ready.
From mahnaz at stanford.edu Thu Aug 24 15:16:05 2006
From: mahnaz at stanford.edu (Mahnaz Mansourpour)
Date: Thu, 24 Aug 2006 15:16:05 -0700
Subject: Resist
Message-ID: <44EE2525.8020709@stanford.edu>
Hello all
This morning we found resist all over the Di water rinse sink at
webmis ( head way bench).
This is totally unacceptable. The left over resist in your beaker
should get transferred in the solvent cart to
solvent bench and get dispose in the carboy. Please ...please if you
have doubt ask staff .
mahnaz