Summary: Integrated Optical Sensors
S.V. Pham, M. Dijkstra, A. Hollink, L.J. Kauppinen, H.A.G.M. van Wolferen, R.G. Heideman,
M. Pollnau, G.J.M. Krijnen, R.M. de Ridder, P.V. Lambeck and H.J.W.M. Hoekstra
Since the start of the group IOMS in the mid-eighties of the last century its research had a strong focus on
integrated optical (IO) sensors. A large number of different sensor device concepts, based on for example
plasmonics [1] quenching of luminescence [1,2] and a large number of interferometric principles [3, 4]
have been proposed and tested; part of the work has led to commercial follow ups. Sensing devices have
been designed, fabricated and characterized for the bio-chemical domain and also for measuring
deflections of micro-mechanical objects.
Below we will discuss the commercialized IO sensor platform, based on a Mach-Zehnder interferometer
(MZI), which had an unprecedented sensitivity at the time of development [3]. Next we will show some
results of recent work on grating-based, IO label-free enzyme sensing and the IO read-out of stress-
induced micro-bridge deflection. As the stress was induced by H2 gas adsorption by a Pd layer on top of
the micro-bridge the device can be used as a H2 sensor.
The IO Mach-Zehnder interferometer
Sensing
Reference
Sensing
Reference
EO modulators