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Citation and License

Nanoscale Research Letters 2013, 8:275
doi:10.1186/1556-276X-8-275

Published: 7 June 2013

Abstract

Absolute flatness of three silicon plane mirrors have been measured by a three-intersection
method based on the three-flat method using a near-infrared interferometer. The interferometer
was constructed using a near-infrared laser diode with a 1,310-nm wavelength light
where the silicon plane mirror is transparent. The height differences at the coordinate
values between the absolute line profiles by the three-intersection method have been
evaluated. The height differences of the three flats were 4.5 nm or less. The three-intersection
method using the near-infrared interferometer was useful for measuring the absolute
flatness of the silicon plane mirrors.