Sensing and Actuation in MEMS

Abstract

There are number of common transduction methods in MEMS. Some transform a change of a physical quantity, such as pressure and temperature, into an electric signal that can be measured. These are called sensing or detection methods. They include piezoelectric, piezoresistive, and electrostatic methods. Also, comes under this category the so-called resonant sensors, which detect the change in the resonance frequencies of microstructures upon sensing. Other transduction methods convert an input energy into a motion of a microstructure. These are called actuation methods, which include electrothermal, electromagnetic, piezoelectric, and electrostatic. Among the transduction methods, electrostatic actuation and detection are considered the most common in MEMS. Hence, electrostatic transduction will be under extensive investigations in the upcoming chapters. Next, basic knowledge on the most common transduction methods in MEMS is introduced.

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