Meeting the challenge of high aspect ratio deposition over a broad
range of substrates in a small package.
Economical systems engineered for heavyweight tasks and lightweight budgets

The product line deposits low temperature
conformal metal, semiconductor and insulating
films on planar and high aspect ratio (HAR)
structures. They are designed for uniform
conformal growth of films from precursors that
have a CVD growth component.

The uniformity of thin films can determine
whether a process or device works, the systems are
designed to provide the user with the most
uniform films possible, even in challenging HAR
through-hole applications.

The 150mm Ø system deposits low temperature
conformal metal, semiconductor and insulating
films on planar and high aspect ratio (HAR)
structures. It is designed for uniform
conformal growth of films from precursors that
have a CVD growth component.

The 200mm Ø system deposits low temperature
conformal metal, semiconductor and insulating
films on planar and high aspect ratio (HAR)
structures. It is designed for uniform
conformal growth of films from precursors that
have a CVD growth component.

“The Arradiance GEMStar-6 reactor has been in use in my laboratory for eight months continuously now and has performed consistently.
It has worked from day one, and we have had no downtime at all so far, not even pump oil changes (with the exhaust abatement system).
The chamber temperature is well controlled and the films are homogeneous.”

“The GEMStar-8 ALD system is critical to our nanomaterials for clean energy research.
In particular, the particle holder has been working perfectly for ALD coatings on nanostructured materials
for Li batteries and fuel cells …… even better than expected.”

“GEMStar-6 has everything our lab environment should need in an ALD tool.
It is small, flexible and can handle up to six inch wafers.
We also like the 1” height of the chamber that accommodates small, three dimensional objects and the port
we can use for in-situ metrology. The design appears to be rugged and easy to service.”

“We study the properties of biomolecules using various nanoscale systems.
This requires the fabrication of uniform ultrathin freestanding membranes, some of which are deposited using our GEMStar ALD system.
This system is small, easy to use, low-maintenance, and has been a workhorse for us –
it just runs!”