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Abstract:

A multi-stepped boat assembly includes a stack boat having at least one
stack hole configured to receive a first semiconductor package and a
second semiconductor package vertically stacked on the first
semiconductor package in the stack hole. A guide boat has at least one
guide hole vertically aligned with the at least one stack hole. The guide
boat is removably attachable to the stack boat. An inner sidewall of the
stack hole includes a first step configured to receive the first
semiconductor package, and a second step provided on the first step and
configured to receive the second semiconductor package. The guide hole
extends toward the stack hole to guide movement of the first
semiconductor package to the first step.

Claims:

1. A multi-stepped boat assembly for receiving a semiconductor package,
the multi-stepped boat assembly comprising: a stack boat having at least
one stack hole configured to receive a first semiconductor package and a
second semiconductor package that is configured to be vertically stacked
on the first semiconductor package in the stack hole; and a guide boat
having at least one guide hole vertically aligned with the at least one
stack hole, the guide boat being removably attachable to the stack boat,
wherein an inner sidewall of the stack hole comprises: a first step
configured to receive the first semiconductor package; and a second step
provided on the first step and configured to receive the second
semiconductor package, wherein the guide hole extends toward the stack
hole to guide movement of the first semiconductor package to the first
step.

2. The multi-stepped boat assembly of claim 1, wherein the first step
comprises: a first support surface configured to support the first
semiconductor package; and a first inner sidewall extending from the
first support surface toward the second step, wherein the second step
comprises: a second support surface configured to support the second
semiconductor package; and a second inner surface extending from the
second support surface, and wherein the first support surface and the
second support surface are horizontal.

3. The multi-stepped boat assembly of claim 2, wherein the first inner
sidewall and the second inner sidewall extend vertically.

4. The multi-stepped boat assembly of claim 3, wherein the first inner
sidewall further comprises a top end portion inclined upward such that a
width of the stack hole increases as a distance from the first support
surface increases.

5. The multi-stepped boat assembly of claim 2, wherein the first inner
sidewall is inclined upward such that a width of the stack hole increases
as a distance from the first support surface increases, and wherein the
second inner sidewall is vertical.

6. The multi-stepped boat assembly of claim 2, wherein the inner sidewall
of the stack hole further comprises: an upper inner sidewall extending
from the second step, and wherein the upper inner sidewall is inclined
upward such that a width of the stack hole increases as a distance from
the second step increases.

7. The multi-stepped boat assembly of claim 1, wherein the first step
comprises: a first support surface supporting the first semiconductor
package; and a first inner sidewall extending from the first support
surface toward the second step, wherein the first support surface is
horizontal and the first sidewall is inclined, and wherein the second
step comprises: a second inner sidewall vertically extending from the
first inner sidewall.

8. The multi-stepped boat assembly of claim 1, wherein the guide boat
comprises: a vertical portion of the guide hole configured to be inserted
into the stack hole; and a horizontal portion connected to the vertical
portion and configured to be supported by a top end of the stack boat.

9. The multi-stepped boat assembly of claim 1, wherein the guide hole
includes a vertical lower inner sidewall and an inclined upper inner
sidewall, and wherein the upper inner sidewall of the guide hole is
inclined upward such that a width of the guide hole increases as a
distance from the vertical lower inner sidewall increases.

10. A multi-stepped boat assembly for receiving a semiconductor package,
the multi-stepped boat assembly comprising: a stack boat having a
plurality of stack holes, each of the stack holes configured to receive a
first semiconductor package and a second semiconductor package vertically
stacked on the first semiconductor package in the stack hole; and a guide
boat having a plurality of guide holes vertically aligned with the
plurality of stack holes, the guide boat being removably attachable to
the stack boat, wherein each of the stack holes has an inner sidewall
having a multi-step configuration, and wherein each of the guide holes
has a vertical lower inner sidewall and an inclined upper inner sidewall.

11. The multi-stepped boat assembly of claim 10, wherein the multi-step
configuration comprises: a first step comprising: a first support surface
supporting the first semiconductor package; and a first inner sidewall
vertically extending from the first support surface; and a second step
provided on the first step, the second step comprising: a second support
surface supporting the second semiconductor package; and a second inner
sidewall vertically extending from the second support surface, wherein
the first support surface and the second support surface are horizontal.

12. The multi-stepped boat assembly of claim 11, wherein the first inner
sidewall further comprises: an inclined top end portion extending in a
direction away from the first support surface so as to be connected to
the second support surface.

13. The multi-stepped boat assembly of claim 10, wherein the multi-step
configuration comprises: a first step comprising: a first support surface
supporting the first semiconductor package; and a first inner sidewall
extending from the first support surface; and a second step provided on
the first step, the second step comprising: a second support surface
supporting the second semiconductor package; and a second inner sidewall
vertically extending from the second support surface, wherein the first
support surface and the second support surface are horizontal, and
wherein the first inner sidewall is inclined.

14. The multi-stepped boat assembly of claim 10, wherein the multi-step
configuration comprises: a first step comprising: a first support surface
supporting the first semiconductor package; and a first inner sidewall
extending from the first support surface; and a second step provided on
the first step, the second step comprising: a second inner sidewall
vertically extending from the first inner sidewall, wherein the first
support surface is horizontal, and wherein the first inner sidewall is
inclined.

15. The multi-stepped boat assembly of claim 10, wherein the inner
sidewall of the stack hole further comprises an inclined surface
extending in a direction away from a stepped surface of the multi-step
configuration such that a width of the stack hole increases as a distance
from the stepped surface of the multi-step increases.

16. The multi-stepped boat assembly of claim 10, wherein the guide boat
comprises: a vertical portion forming an outer wall of the guide hole and
configured to be inserted into the stack hole; and a horizontal portion
connected to the vertical portion and configured to be supported by a top
end of the stack boat, and wherein the vertical portion is supported by a
stepped surface of the multi-step configuration.

17-23. (canceled)

24. A multi-stepped boat assembly for receiving a semiconductor package,
the multi-stepped boat assembly comprising: a stack boat having a
plurality of stack holes configured to receive a first and a second
semiconductor package that is vertically stacked on the first
semiconductor package in the stack hole; and a guide boat having a
plurality of guide holes configured to be vertically aligned with the
plurality of stack holes of the stack boat when the guide boat is
connected to the stack boat, wherein an inner sidewall of the stack hole
comprises a first portion defining a first hole width that is configured
to receive the first semiconductor package and a second portion defining
a second hole width that is different from the first hole width and is
configured to receive the second semiconductor package on the first
semiconductor package.

25. The multi-stepped boat assembly of claim 24, wherein the guide holes
of the guide boat comprise vertical portions that are configured to
extend into the second portion of the stack holes of the stack boat when
the guide boat is attached to the stack boat.

26. The multi-stepped boat assembly of claim 25, wherein the vertical
portions of the guide holes are configured to guide the first
semiconductor package to the first portion of the stack hole.

27. The multi-stepped boat assembly of claim 26, wherein when the guide
boat is removed from the stack boat, the stack hole is configured to
guide the second semiconductor package to the second portion of the stack
hole such that the second semiconductor package rests on the first
semiconductor package.

Description:

CROSS-REFERENCE TO RELATED APPLICATION

[0001] This application claims priority under 35 U.S.C. §119 from
Korean Patent Application No. 10-2014-0125094, filed on Sep. 19, 2014,
the disclosure of which is hereby incorporated by reference in its
entirety.

BACKGROUND

[0002] The inventive concepts relate to a semiconductor apparatus. More
particularly, the inventive concepts relate to a multi-stepped boat
assembly for receiving semiconductor packages of which sizes are
different from each other.

[0003] A package-on-package (PoP) device has been developed to realize
small-sized and various performance semiconductor products. The PoP
device includes semiconductor packages which are sequentially stacked. A
boat capable of receiving semiconductor packages may be generally used to
stack the semiconductor packages. There is a need, however, for a boat
having an improved structure to stably stack semiconductor packages with
sizes that are different from each other.

SUMMARY

[0004] Embodiments of the inventive concepts may provide a multi-stepped
boat capable of receiving semiconductor packages of which sizes are
different from each other.

[0005] Embodiments of the inventive concepts may also provide a
multi-stepped boat assembly capable of stably receiving semiconductor
packages having different sizes without damage.

[0006] In some embodiments, a multi-stepped boat assembly may include: a
stack boat having at least one stack hole configured to receive a first
semiconductor package and a second semiconductor package that is
configured to be vertically stacked on the first semiconductor package in
the stack hole; and a guide boat having at least one guide hole
vertically aligned with the at least one stack hole, the guide boat being
removably attachable to the stack boat. An inner sidewall of the stack
hole may include: a first step configured to receive the first
semiconductor package; and a second step provided on the first step and
configured to receive the second semiconductor package. The guide hole
may extend toward the stack hole to guide movement of the first
semiconductor package to the first step.

[0007] In some embodiments, the first step may include: a first support
surface configured to support the first semiconductor package; and a
first inner sidewall extending from the first support surface toward the
second step. The second step may include: a second support surface
configured to support the second semiconductor package; and a second
inner surface extending from the second support surface. The first
support surface and the second support surface may be horizontal.

[0008] In some embodiments, the first inner sidewall and the second inner
sidewall may extend vertically.

[0009] In some embodiments, the first inner sidewall may further include a
top end portion inclined upward such that a width of the stack hole
increases as a distance from the first support surface increases.

[0010] In some embodiments, the first inner sidewall may be inclined
upward such that a width of the stack hole increases as a distance from
the first support surface increases. The second inner sidewall may be
vertical.

[0011] In some embodiments, the inner sidewall of the stack hole may
further include: an upper inner sidewall extending from the second step.
The upper inner sidewall may be inclined upward such that a width of the
stack hole increases as a distance from the second step increases.

[0012] In some embodiments, the first step may include: a first support
surface supporting the first semiconductor package; and a first inner
sidewall extending from the first support surface toward the second step.
The first support surface may be horizontal and the first sidewall may be
inclined. The second step may include: a second inner sidewall vertically
extending from the first inner sidewall.

[0013] In some embodiments, the guide boat may include: a vertical portion
of the guide hole configured to be inserted into the stack hole; and a
horizontal portion connected to the vertical portion and configured to be
supported by a top end of the stack boat.

[0014] In some embodiments, the guide hole may include a vertical lower
inner sidewall and an inclined upper inner sidewall. The upper inner
sidewall of the guide hole may be inclined upward such that a width of
the guide hole increases as a distance from the vertical lower inner
sidewall increases.

[0015] In some embodiments, a multi-stepped boat assembly may include: a
stack boat having a plurality of stack holes, each of the stack holes
configured to receive a first semiconductor package and a second
semiconductor package vertically stacked on the first semiconductor
package in the stack hole; and a guide boat having a plurality of guide
holes vertically aligned with the plurality of stack holes, the guide
boat being removably attachable to the stack boat. Each of the stack
holes may have an inner sidewall having a multi-step configuration, and
each of the guide holes may have a vertical lower inner sidewall and an
inclined upper inner sidewall.

[0016] In some embodiments, the multi-step configuration may include: a
first step including a first support surface supporting the first
semiconductor package and a first inner sidewall vertically extending
from the first support surface; and a second step provided on the first
step and including a second support surface supporting the second
semiconductor package and a second inner sidewall vertically extending
from the second support surface. The first support surface and the second
support surface may be horizontal.

[0017] In some embodiments, the first inner sidewall may further include:
an inclined top end portion extending in a direction away from the first
support surface so as to be connected to the second support surface.

[0018] In some embodiments, the multi-step configuration may include: a
first step comprising: a first support surface supporting the first
semiconductor package and a first inner sidewall extending from the first
support surface; and a second step provided on the first step and
including a second support surface supporting the second semiconductor
package and a second inner sidewall vertically extending from the second
support surface. The first support surface and the second support surface
may be horizontal, and the first inner sidewall may be inclined.

[0019] In some embodiments, the multi-step configuration may include: a
first step including a first support surface supporting the first
semiconductor package and a first inner sidewall extending from the first
support surface; and a second step provided on the first step and
including a second inner sidewall vertically extending from the first
inner sidewall. The first support surface may be horizontal, and the
first inner sidewall may be inclined.

[0020] In some embodiments, the inner sidewall of the stack hole may
further include an inclined surface extending in a direction far away
from a stepped surface of the multi-step such that a width of the stack
hole increases as a distance from the multi-step increases.

[0021] In some embodiments, the guide boat may include: a vertical portion
forming an outer wall of the guide hole and configured to be inserted
into the stack hole; and a horizontal portion connected to the vertical
portion and configured to be supported by a top end of the stack boat.
The vertical portion may be supported by a stepped surface of the
multi-step configuration. In some embodiments, a multi-stepped boat may
include: a stack boat having a plurality of stack holes, each of the
stack holes configured to receive a first semiconductor package and a
second semiconductor package, and the second semiconductor package
vertically stacked on the first semiconductor package in the stack hole;
and a guide boat having a plurality of guide holes vertically aligned
with the plurality of stack holes, the guide boat being removably
attachable to the stack boat. Each of the stack holes may include: an
inner sidewall including first inner sidewalls facing each other and
second inner sidewalls facing each other. The first inner sidewalls and
the second inner sidewalls may comprise a step structure. A first
distance between the first inner sidewalls may be smaller than a second
distance between the second inner sidewalls. The guide boat may include:
a vertical portion configured to be inserted into the stack hole and
defining the guide hole having a non-uniform width; and a horizontal
portion extending from the vertical portion.

[0022] In some embodiments, the first semiconductor package may be
received between the first inner sidewalls which are spaced apart from
each other by the first distance, and the second semiconductor package
may be received between the second inner sidewalls which are spaced apart
from each other by the second distance.

[0023] In some embodiments, each of the stack holes may further include:
first support surfaces facing each other and supporting the first
semiconductor package; and second support surfaces facing each other and
supporting the second semiconductor package.

[0024] In some embodiments, each of the stack holes may further include:
inclined upper inner sidewalls facing each other and extending from the
second inner sidewalls. A third distance between the inclined upper inner
sidewalls may increase as a distance from the second inner sidewalls
increases.

[0025] In some embodiments, each of the guide holes may include: lower
inner sidewalls spaced apart from each other by the first distance; and
inclined upper inner sidewalls facing each other and extending from the
lower inner sidewalls.

[0026] In some embodiments, a distance between the inclined upper inner
sidewalls of each of the guide holes may increase as a distance from the
lower inner sidewalls increases.

[0027] In some embodiments, the first inner sidewall of the stack hole may
be coplanar with the lower inner sidewall of the guide hole.

[0028] In some embodiments, a multi-stepped boat assembly for receiving a
semiconductor package may include: a stack boat having a plurality of
stack holes configured to receive a first and a second semiconductor
package that is vertically stacked on the first semiconductor package in
the stack hole; and a guide boat having a plurality of guide holes
configured to be vertically aligned with the plurality of stack holes of
the stack boat when the guide boat is connected to the stack boat. An
inner sidewall of the stack hole may include a first portion defining a
first hole width that is configured to receive the first semiconductor
package and a second portion defining a second hole width that is
different from the first hole width and is configured to receive the
second semiconductor package on the first semiconductor package.

[0029] In some embodiments, the guide holes of the guide boat may include
vertical portions that are configured to extend into the second portion
of the stack holes of the stack boat when the guide boat is attached to
the stack boat.

[0030] In some embodiments, the vertical portions of the guide holes may
be configured to guide the first semiconductor package to the first
portion of the stack hole. In some embodiments, when the guide boat is
removed from the stack boat, the stack hole may be configured to guide
the second semiconductor package to the second portion of the stack hole
such that the second semiconductor package rests on the first
semiconductor package.

BRIEF DESCRIPTION OF THE DRAWINGS

[0031] The inventive concepts will become more apparent in view of the
attached drawings and accompanying detailed description.

[0032] FIG. 1A is a perspective view illustrating a assembly boat for
receiving semiconductor packages according to some embodiments of the
inventive concepts;

[0033] FIG. 1B is a perspective view illustrating a stack boat and a guide
boat, combined with each other, of a boat assembly according to some
embodiments of the inventive concepts;

[0042] FIG. 4C is a cross-sectional view illustrating operations for
receiving semiconductor packages with the boat assembly of FIG. 4A;

[0043] FIG. 5A is a cross-sectional view illustrating a boat assembly for
receiving semiconductor packages according to yet other embodiments of
the inventive concepts;

[0044] FIGS. 5B and 5C are cross-sectional views illustrating operations
for receiving semiconductor packages with the boat assembly of FIG. 5A;
and

[0045] FIG. 6 is a perspective view illustrating a modified embodiment of
the boat of FIG. 1A.

DETAILED DESCRIPTION OF THE EMBODIMENTS

[0046] The inventive concepts will now be described more fully hereinafter
with reference to the accompanying drawings, in which exemplary
embodiments of the inventive concepts are shown. The advantages and
features of the inventive concepts and methods of achieving them will be
apparent from the following exemplary embodiments that will be described
in more detail with reference to the accompanying drawings. It should be
noted, however, that the inventive concepts are not limited to the
following exemplary embodiments, and may be implemented in various forms.
Accordingly, the exemplary embodiments are provided only to disclose the
inventive concepts and let those skilled in the art know the category of
the inventive concepts. In the drawings, embodiments of the inventive
concepts are not limited to the specific examples provided herein and are
exaggerated for clarity.

[0047] The terminology used herein is for the purpose of describing
particular embodiments only and is not intended to limit the inventive
concepts. As used herein, the singular terms "a," "an" and "the" are
intended to include the plural forms as well, unless the context clearly
indicates otherwise. As used herein, the term "and/or" includes any and
all combinations of one or more of the associated listed items. It will
be understood that when an element is referred to as being "connected" or
"coupled" to another element, it may be directly connected or coupled to
the other element or intervening elements may be present.

[0048] Similarly, it will be understood that when an element such as a
layer, region or substrate is referred to as being "on" another element,
it can be directly on the other element or intervening elements may be
present. In contrast, the term "directly" means that there are no
intervening elements. It will be further understood that the terms
"comprises," "comprising," "includes," and/or "including," when used
herein, specify the presence of stated features, integers, steps,
operations, elements, and/or components, but do not preclude the presence
or addition of one or more other features, integers, steps, operations,
elements, components, and/or groups thereof.

[0049] Additionally, the embodiment in the detailed description will be
described with sectional views as ideal exemplary views of the inventive
concepts. Accordingly, shapes of the exemplary views may be modified
according to manufacturing techniques and/or allowable errors. Therefore,
the embodiments of the inventive concepts are not limited to the specific
shape illustrated in the exemplary views, but may include other shapes
that may be created according to manufacturing processes. Areas
exemplified in the drawings have general properties, and are used to
illustrate specific shapes of elements. Thus, this should not be
construed as limited to the scope of the inventive concepts.

[0050] It will be also understood that although the terms first, second,
third etc. may be used herein to describe various elements, these
elements should not be limited by these terms. These terms are only used
to distinguish one element from another element. Thus, a first element in
some embodiments could be termed a second element in other embodiments
without departing from the teachings of the present inventive concepts.
Exemplary embodiments of aspects of the present inventive concepts
explained and illustrated herein include their complementary
counterparts. The same reference numerals or the same reference
designators denote the same elements throughout the specification.

[0051] Moreover, exemplary embodiments are described herein with reference
to cross-sectional illustrations and/or plane illustrations that are
idealized exemplary illustrations. Accordingly, variations from the
shapes of the illustrations as a result, for example, of manufacturing
techniques and/or tolerances, are to be expected. Thus, exemplary
embodiments should not be construed as limited to the shapes of regions
illustrated herein but are to include deviations in shapes that result,
for example, from manufacturing. For example, an etching region
illustrated as a rectangle will, typically, have rounded or curved
features. Thus, the regions illustrated in the figures are schematic in
nature and their shapes are not intended to illustrate the actual shape
of a region of a device and are not intended to limit the scope of
example embodiments.

[0052] FIG. 1A is a perspective view illustrating a boat assembly having a
stack boat and a guide boat for receiving semiconductor packages
according to some embodiments of the inventive concepts. FIG. 1B is a
perspective view illustrating a stack boat and a guide boat, combined
with each other, of a boat assembly according to some embodiments of the
inventive concepts. FIG. 1C is an enlarged cross-sectional view
illustrating a portion of FIG. 1A.

[0053] Referring to FIGS. 1A and 1B, a boat assembly 1 may be a
semiconductor fabrication apparatus that vertically aligns at least two
semiconductor packages 10 and 20 with each other to stack the
semiconductor packages 10 and 20. In some embodiments, the semiconductor
packages 10 and 20 may be ball grid array (BGA) type semiconductor
packages having sizes that are different from each other. For example,
the size of the first semiconductor package 10 may be smaller than that
of the second semiconductor package 20.

[0054] The boat assembly 1 may include a stack boat 100 and a guide boat
200. The stack boat 100 may receive and vertically stack the
semiconductor packages 10 and 20 having the different sizes from each
other, and the guide boat 200 may guide the first semiconductor package
10 having the smaller size to the stack boat 100. The second
semiconductor package 20 having the large size may be received in the
stack boat 100 so as to be stacked on the first semiconductor package 10
when the guide boat 200 is separated from the stack boat 100. Each of the
stack boat 100 and the guide boat 200 may be formed of any suitable
material, including aluminum, steel, or steel use stainless (SUS).

[0055] In some embodiments, as illustrated in FIG. 2E, the boat 1 may be
used to receive and stack first and second semiconductor packages 10 and
20a of which sizes are equal or similar to each other. For example, the
second semiconductor package 20a may be received in the stack boat 100
when the guide boat 200 is combined with or attached to the stack boat
100.

[0056] Referring to FIGS. 1A and 1C, the stack boat 100 may include a
plurality of stack holes 150 arranged in an array form. As illustrated in
FIG. 2D, one stack hole 150 may receive the first and second
semiconductor packages 10 and 20 so the first and second semiconductor
packages 10 and 20 may be vertically stacked in a single stack hole 150.
The stack hole 150 may have a step configuration including a first step
110 and a second step 120. The first semiconductor package 10 may be
received on the first step 110, and the second semiconductor package 20
may be received on the second step 120.

[0057] In some embodiments, the first step 110 may include a first support
surface 110b supporting the first semiconductor package 10 and a first
inner sidewall 110s vertically extending from the first support surface
110b. The first support surface 110b may be horizontal, and the first
inner sidewall 110s may be vertical. The first inner sidewall 110s, which
is vertical, may suppress unnecessary shake or movement of the first
semiconductor package 10 received on the first step 110.

[0058] A first width W1 between the first inner sidewalls 110s facing each
other may be equal to or greater than a width of the first semiconductor
package 10. If the first semiconductor package 10 is the BGA type as
illustrated in FIG. 2D, an edge of the first semiconductor package 10 may
be supported by the first support surface 110b. In addition, first solder
balls 12 of the first semiconductor package 10 may be disposed between
the first support surfaces 110b.

[0059] Likewise, the second step 120 may include a second support surface
120b supporting the second semiconductor package 20 and a second inner
sidewall 120s vertically extending from the second support surface 120b.
The second support surface 120b may be horizontal, and the second inner
sidewall 120s may be vertical. The second inner sidewall 120s, which is
vertical, may suppress unnecessary shake or movement of the second
semiconductor package 20 received on the second step 120.

[0060] A second width W2 between the second inner sidewalls 120s facing
each other may be equal to or greater than a width of the second
semiconductor package 20. If the second semiconductor package 20 is the
BGA type as illustrated in FIG. 2D, an edge of the second semiconductor
package 20 may be supported by the second support surface 120b. In
addition, second solder balls 22 of the second semiconductor package 20
may be received between the second support surfaces 120b.

[0061] An upper inner sidewall 130s of the stack hole 150 may be inclined.
When the second semiconductor package 20 is guided into the stack hole
150 so as to be received on the second step 120 as illustrated in FIG.
2C, the second semiconductor package 20 may slide on the upper inner
sidewall 130s to reach the second step 120 safely. In other words, the
second semiconductor package 20 may be smoothly received by the inclined
upper inner sidewalls 130s.

[0062] The upper inner sidewall 130s may have an upward slope such that a
width of the stack hole 150 increases as a distance from the second step
120 increases. In other words, the width of the stack hole 150 may become
progressively greater from a bottom end of the upper inner sidewall 130s
to a top end of the upper inner sidewall 130s. In some embodiments, the
upper inner sidewall 130s may have an angle A with respect to the second
inner surface 120s. The angle A of the upper inner sidewall 130s may be
greater than 0 degree and equal to or less than about 30 degrees. In
other embodiments, the upper inner sidewall 130s may be vertical and
coplanar with the second inner sidewall 120s.

[0063] The guide boat 200 may include a plurality of guide holes 250
arranged in an array form. Positions of the guide holes 250 may
correspond to those of the stack holes 150, respectively. Thus, if the
guide boat 200 is combined with the stack boat 100, the guide holes 250
may be vertically aligned with the stack holes 150, respectively.

[0064] The guide boat 200 may include a vertical portion 210 inserted into
the stack hole 150 so as to be supported by the second support surface
120b and a horizontal portion 220 supported by a top surface of the stack
boat 100. The guide hole 250 may be surrounded and defined by the
vertical portion 210. The guide hole 250 may have a lower inner sidewall
210s and an upper inner sidewall 220s. The lower inner sidewalls 210s may
have a third width W3 that is equal or similar to the first width W1.

[0065] The upper inner sidewall 220s of the guide hole 250 may be
inclined. When the first semiconductor package 10 is guided by the guide
boat 200 so as to be received on the first step 110 as illustrated in
FIG. 2A, the first semiconductor package 10 may slide on the upper inner
sidewalls 220s so as to reach the first step 110 safely. In other words,
the first semiconductor package 10 may be smoothly received by the upper
inner sidewall 220s of the guide hole 250.

[0066] The lower inner sidewall 210s of the guide hole 250 may be
vertical. The vertical lower inner sidewall 210s may maintain
horizontality the first semiconductor package 10 in the guide hole 250.
Since the first semiconductor chip 10 descends along the lower inner
sidewall 210s while maintaining its horizontal orientation, the first
semiconductor chip 10 may be easily and safely received on the first step
110 as shown in FIGS. 2A-2B.

[0067] The upper inner sidewall 220s of the guide hole 250 may have an
upward slope such that a width of the guide hole 250 increases as a
distance from the lower inner sidewall 210s increases. In some
embodiments, the upper inner sidewall 220s of the guide hole 250 may have
an angle B that is greater than 0 degree and equal to or less than about
30 degrees. In some embodiments, however, the upper inner sidewall 220s
of the guide hole 250 may be vertical and coplanar with the lower inner
sidewall 210s.

[0068] FIGS. 2A to 2D are cross-sectional views illustrating operations
for receiving semiconductor packages by the boat assembly of FIG. 1A.
FIG. 2E is a cross-sectional view illustrating another embodiment of a
boat assembly.

[0069] Referring to FIG. 2A, the stack boat 100 may be combined with or
releasably connected to the guide boat 200. Thus, the lower inner
sidewall 210s of the guide hole 250 may be coplanar with the first inner
sidewall 110s of the stack hole 150 to provide a vertical descent path of
the first semiconductor package 10. The first semiconductor package 10
may be the BGA type semiconductor package including a plurality of first
solder balls 12. In other words, the first solder balls 12 may be
arranged in an array formed on one surface of the first semiconductor
package 10. When the guide boat 200 is attached to the stack boat 100,
the first semiconductor package 10 may descend according to the guidance
of the guide boat 200 so as to be received on the first step 110 of the
stack boat 100.

[0070] When the first semiconductor package 10 is provided to the guide
hole 250, the first semiconductor package 10 may not be vertically
aligned with the guide hole 250 or may be non-horizontal. In this case,
the first semiconductor package 10 may slide on the inclined upper inner
sidewalls 220s of the guide hole 250 so as to be self-aligned, so that
the first semiconductor package 10 may be stably positioned adjacent the
lower inner sidewall 210s of the guide hole 250. Thereafter, the first
semiconductor package 10 may descend along the lower inner sidewall 210s
while maintaining its horizontality. Thus, the first semiconductor
package 10 may be received safely on the first step 110.

[0071] Referring to FIG. 2B, if the first semiconductor package 10 is
received on the first step 110 of the stack boat 100, the guide boat 200
may be taken away or released from the stack boat 100. Thus, the second
step 120 of the stack hole 150 may be exposed.

[0072] Referring to FIG. 2C, the second semiconductor package 20 may be
provided into the stack hole 250 so as to be received on the second step
120. The second semiconductor package 20 may be the BGA type
semiconductor package. In other words, the second semiconductor package
20 may include a plurality of second solder balls 22. The second
semiconductor package 20 may descend along the second inner sidewall 120s
so as to be received on the second step 120.

[0073] When the second semiconductor package 20 is provided to the stack
hole 150, the second semiconductor package 20 may not be vertically
aligned with the stack hole 150 or may be non-horizontal. In this case,
the second semiconductor package 20 may slide on the inclined upper inner
sidewalls 130s of the stack hole 150 so as to be self-aligned, so that
the second semiconductor package 20 may be stably provided to the second
inner sidewall 120s of the stack hole 150. Thereafter, the second
semiconductor package 20 may descend along the second inner sidewall 120s
while maintaining its horizontality. Thus, the second semiconductor
package 20 may be received safely on the second step 120.

[0074] Referring to FIG. 2D, a package-on-package (PoP) device 30
including the large-sized second semiconductor package 20 stacked on the
small-sized first semiconductor package 10 may be fabricated by the
reception of the first semiconductor chip 10 to the first step 10 and the
reception of the second semiconductor chip 20 to the second step 20. A
reflow process may be performed on the second and first semiconductor
packages 10 and 20, which are stacked.

[0075] Although embodiments are described above with respect to
semiconductor packages having different sizes, it should be understood
that the semiconductor packages 10 and 20 may have the same or similar
sizes. For example, in some embodiments, as illustrated in FIG. 2E, after
the first semiconductor package 10 is received on the first step 110 of
the stack boat 100, the second semiconductor package 20a having a size
equal or similar to that of the first semiconductor package 10 may be
provided into the guide and stack holes 250 and 150 when the guide boat
200 is connected to the stack boat 100. A PoP device 30a fabricated
according to the present embodiment may include the first and second
semiconductor packages 10 and 20a of which the sizes are equal or similar
to each other.

[0076] FIG. 3A is a cross-sectional view illustrating a boat for receiving
semiconductor packages according to other embodiments of the inventive
concepts. FIG. 3B is an enlarged cross-sectional view illustrating a
portion of FIG. 3A. FIG. 3C is a cross-sectional view illustrating
operations for receiving semiconductor packages by the boat of FIG. 3A.

[0077] Referring to FIG. 3A, a boat assembly 2 may include a stack boat
100 of which a portion of a first inner sidewalls 110s is inclined. For
example, as illustrated in FIG. 3B, a top end portion 110sa of the first
inner sidewall 110s may be inclined upward toward the second support
surface 120b. The top end portion 110sa of the first inner sidewall 110s
may have an angle C that is greater than 0 degree and equal to or less
than about 30 degrees. Other elements of the boat 2 may be the same as or
similar to corresponding elements of the boat 1 described with reference
to FIGS. 1A, 1B, and 1C.

[0078] Referring to FIG. 3C, when the first semiconductor package 10
descends toward the first step 110 through the guide boat 200, the first
semiconductor package 10 may not come in contact with a top edge of the
first step 110 (i.e., the inclined top end portion 110sa of the first
inner sidewall 110s). Thus, it is possible to reduce or prevent damage of
the first semiconductor package 10 which may be caused by contact or
friction between the first semiconductor package 10 and the top end
portion 110as of the first inner sidewall 110s.

[0079] FIG. 4A is a cross-sectional view illustrating a boat assembly for
receiving semiconductor packages according to still other embodiments of
the inventive concepts. FIG. 4B is an enlarged cross-sectional view
illustrating a portion of FIG. 4A. FIG. 4C is a cross-sectional view
illustrating operations for receiving semiconductor packages by the boat
assembly of FIG. 4A.

[0080] Referring to FIG. 4A, a boat assembly 3 may include a stack boat
100 having a first inner sidewall 110s that is inclined. For example, as
illustrated in FIG. 4B, the first inner sidewall 110s may be inclined
upward toward the second support surface 120b. The first inner sidewall
110s may have an angle D that is greater than 0 degree and equal to or
less than about 30 degrees. Other elements of the boat 3 may be the same
as or similar to corresponding elements of the boat 1 described with
reference to FIGS. 1A, 1B, and 1C.

[0081] Referring to FIG. 4C, when the first semiconductor package 10
descends toward the first step 110 through the guide boat 200, the first
semiconductor package 10 may not come in contact with the first inner
sidewall 110s. Thus, it is possible to reduce or prevent damage of the
first semiconductor package 10 which may be caused by contact or friction
between the first semiconductor package 10 and the first inner sidewall
110s.

[0082] FIG. 5A is a cross-sectional view illustrating a boat assembly for
receiving semiconductor packages according to yet other embodiments of
the inventive concepts. FIGS. 5B and 5C are cross-sectional views
illustrating an operation for receiving semiconductor packages by the
boat of FIG. 5A.

[0083] Referring to FIG. 5A, a boat 4 may include a stack boat 100 having
a first inner sidewall 110s and a second inner sidewall 120s and a guide
boat 200 having a wedge-shaped vertical portion 210. The first inner
sidewall 110s may be inclined, and the second inner sidewall 120s may be
vertical. In other words, the stack boat 100 may not include the second
support surface 120b illustrated in FIG. 1C. The first inner sidewall
110s may be inclined upward toward the second inner sidewall 120s. The
first inner sidewall 110s may have an angle E that is greater than 0
degree and equal to or less than about 30 degrees. The vertical portion
210 of the guide boat 200 may have a wedge-shaped bottom end portion 215
that corresponds to a structure of the first step 110 of the stack boat
100. Other elements of the boat 4 may be the same as or similar to
corresponding elements of the boat 1 described with reference to FIGS. 1A
to 1C.

[0084] Referring to FIG. 5B, when the guide boat 200 is combined with the
stack boat 100, the wedge-shaped bottom end portion 215 may be located on
the first inner sidewall 110s. The first semiconductor package 10 may
vertically descend along the lower inner sidewall 210s of the guide boat
200 so as to be received safely on the first step 110.

[0085] Referring to FIG. 5C, when the first semiconductor package 10 is
recessed on the first step 110 of the stack boat 100, the guide boat 200
may be moved upward, for example, to be removed from the stack boat 100.
Thus, the first inner sidewall 110s and the second inner sidewall 120s
may be exposed. The second semiconductor package 20 may be provided into
the stack hole 150 and descend along the second inner sidewall 120s so as
to be stacked on the first semiconductor package 10.

[0086] FIG. 6 is a perspective view illustrating a modified embodiment of
the boat of FIG. 1A. In FIG. 6, cutting views of corner portions of a
stack boat and a guide boat are illustrated to help understanding of the
present embodiment.

[0087] Referring to FIG. 6, a boat assembly 1a may include a stack boat
100a having a plurality of stack holes 150a arranged in an array form and
a guide boat 200a having a plurality of guide holes 250a arranged in an
array form. Each of the stack holes 150a may receive first and second
semiconductor packages 10 and 20 such that the first semiconductor
package 10 having a small size may be stacked on the second semiconductor
package 20 having a large size in each of the stack holes 150a. Each of
the guide holes 250a may guide the first semiconductor package 10. Planar
shapes of the stack hole 150a and the guide hole 250a of the boat 1a may
be different from those of the stack hole 150 and the guide hole 250 of
FIG. 1A. For example, the planar shapes of the stack hole 150a and the
guide hole 250a may be quadrilateral shapes. Other elements and other
features of the boat 1a may be the same as or similar to corresponding
elements and features of the boats 1, 2, 3, and 4.

[0088] According to embodiments of the inventive concepts, the stack boat
assembly may receive the semiconductor packages having different sizes
from each other. Thus, it is possible to easily fabricate the PoP device
including the semiconductor packages which have the different sizes from
each other and are stacked. The attachable and detachable guide boat may
stably provide the semiconductor package to the stack boat by a
self-alignment method, so a fabricating yield of PoP devices may be
improved.

[0089] While the inventive concepts have been described with reference to
example embodiments, it will be apparent to those skilled in the art that
various changes and modifications may be made without departing from the
spirits and scopes of the inventive concepts. Therefore, it should be
understood that the above embodiments are not limiting, but illustrative.
Thus, the scopes of the inventive concepts are to be determined by the
broadest permissible interpretation of the following claims and their
equivalents, and shall not be restricted or limited by the foregoing
description.