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There has been growing demand for high performance micro sensors capable of detecting nuclear radiations being released from various industries, Nuclear reactors. Radiations emitted from the radioactive materials are invisible and not directly detectable by human senses. Thus it is highly essential to work on design of bolometers with absorptive elements providing optimum sensitivity.
The present work is aimed at design of MEMS based bolometer for detecting the nuclear radiation to provide high security. Specifically, the present work is concentrated on resistive bolometer detectors as they have high responsivity and also fabrication process is easy. The micro plate and micro thermal links are designed and simulated using the physical interfaces viz., Heat transfer and Structural Mechanics in COMSOL Multiphysics®.