D. Feng, Y. Yan, and G. Jin are with the State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments. D. Feng and S. Fan are with the Department of Physics.

Abstract

An optimization algorithm that combines a rigorous electromagnetic computation model with an effective iterative method is utilized to design diffractive micro-optical elements that exhibit fast convergence and better design quality. The design example is a two-dimensional 1-to-2 beam splitter that can symmetrically generate two focal lines separated by 80 μm at the observation plane with a small angle separation of ±16°. Experimental results are presented for an element with continuous profiles fabricated into a monocrystalline silicon substrate that has a width of 160 μm and a focal length of 140 μm at a free-space wavelength of 10.6 μm.

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