Plasma Emission Control

The superb feedback control of the reactive gas flow in a reactive sputtering process helps enhance product quality and achieve greater productivity. This is achieved by monitoring the plasma generated by sputtering or the voltage of the power supply for the sputtering process.

The superb feedback control of the reactive gas flow in a reactive sputtering process helps you enhance product quality and achieve greater productivity by monitoring the plasma generated by sputtering or the voltage of the power supply for the sputtering process.