Description:

9 hotplates are available for baking SU-8-coated substrates in the SU-8 lithography area (clean room 106).

Processes Available:

Hot plates have been grouped and labeled to accommodate both users with long and short bake processes-3 Fairweather hotplates can be reserved for extended (more than 2 hrs) bake processes.-3 EMI hotplates are available without reservations for shorted bake processes.-2 EMI hotplates are available without reservations for bake processes with intermediate times (less than 2 hours).

This material is based upon work supported by the National Science Foundation under Grant No. ECCS-1542081. Any opinions, findings, conclusions or recommendations expressed in this material are those of the author(s) and do not necessarily reflect the views of the National Science Foundation.