This unified wafer management system uses the minimum scale and complexity required to accomplish its core job – to move wafers as cleanly and as quickly as possible. Offers improved reliability and maximized efficiency, while delivering industry-leading cleanliness with the lowest particle levels.

The Vision load port module is the latest generation of load port modules from Brooks. It is an intelligent and flexible factory interface module for 300mm and 450mm tool automation. Unlike LPMs that require substantial lead time for set-up and integration, the Vision load port module is designed for maximum interoperability, seamless interchangeability, and ease of configuration.

Improves effectiveness of reticle inventories. Protects reticles from various sources of particulate contamination and airborne molecular contamination, while providing a standard interface to photolithography tools.

The industry’s most advanced 200mm standard mechanical interface (SMIF) I/O processing tool with its load port opener. While designed as a “bridge tool” for 200mm to 300mm transitions, the VersaPort 2200 also offers a solution for open cassette to SMIF I/O processing.

High-performance atmospheric Razor Aligner provides ultra-precise wafer positioning of 200mm, 300mm, or 450mm wafers. Designed for optimal manufacturability, the Razor Aligner and other Razor modules provide high quality out of the box and support fast product installation and reduced lead time.

Footprint optimal solution for small Equipment Front End Modules (EFEMs), especially when edge grip handling is required. The YEC SemiStar products are the benchmark for semiconductor industry EFEM solutions and are a key part of the Brooks Automation Atmospheric Robotics portfolio.

The MagnaTran® 7 Leapfrog® (MAG 7 X) robot retains all of the features and benefits of the MagnaTran Product Family while having the highest throughput available in demanding cluster tool applications.

The MagnaTran® 8 QuadraFly robot leverages proven SCARA arm technology and reliable direct drive robotics to provide the simultaneous exchange of four wafers in vacuum within a small containment swing diameter.

The InLigner coordinates with the MagnaTran robot to provide wafer centering and edge fiducial orientation for 100 to 200 mm SEMI-standard and Jeida-standard wafers with either notch or flat edge fiducials. Special configurations are also available for use with transparent and/or square substrates, including quartz masks up to 6 inches square.

The industry’s most flexible and complete automation control solution. Fusion Controls deliver maximum performance and uptime. They are fully customizable and remarkably easy to use, while accelerating time to market and tool profitability.

Jet, the core atmospheric automation subsystem for all Brooks wafer handling systems, is the first EFEM designed at the system level, enabling customers to build process tools around a common core. Jet features a flexible, modular architecture based on industry standards to enable fast set-up, reduced cycle times, and seamless integration with existing fab equipment and processes.

A unique, small footprint, low-cost system that allows original equipment manufacturers (OEMs) to reliably get wafers into and out of process chambers. This single FOUP EFEM accelerates OEMs 450mm development efforts by eliminating the need to spend engineering time on platform development.

The M300 semi-automatic machine is a universal centrifugal force cleaner for all types of carrier (SMIF, open cassettes, FOUP, FOSB, RSP and Clamshell). It achieves unsurpassed cleaning and drying results.

Improves effectiveness of reticle inventories. Protects reticles from various sources of particulate contamination and airborne molecular contamination, while providing a standard interface to photolithography tools.

Biostore II is designed for reliability, storage density and with a modular architecture to maximize adaptability. BioStore II offers you the expertise we’ve gained from 15 years of developing automated sample storage products for biobanking applications that range from DNA to blood serum storage.

SampleStore II is designed for reliability, storage density and with a modular architecture to maximize adaptability. SampleStore II offers you the expertise we’ve gained from 20 years of developing automated sample storage products for biobanking applications that range from compound storage for drug discovery to DNA and blood serum storage.

Using SampleStore II and BioStore II become completely intuitive with Brooks Strata store control software. The simplified user interface can be easily configured for day-to-day operation with more detail available via drill down and advanced screens for 'super users'.

Plate Auditor

Specifically designed for the detection and classification of features unique to HTS compound libraries. The Plate Auditor uses vision technology to identify empty wells / wells with insufficient volume of liquid compound sample, wells with colored compounds and wells with compound precipitation.

Tube Auditor

The Brooks Tube Auditor performs quick and easy Goods-In and Goods-Out QA checks to help ensure that your suppliers are providing what you ordered and that your customers are receiving what you promised.

High performance plate material as all Aurora microplates are made from cyclo-olefin polymer (COP). Assay miniaturization: 384, 1536 and 3456 formats. Aurora microplates are available with an evaporation barrier of sacrificial wells and a specially designed lid to minimize evaporation.

The Brooks Polycold® PFC Water Vapor Cryopump effectively captures water vapor, which typically comprises 65% to 95% of the gas load in high vacuum systems. It pumps vapor within minutes of “start,” defrosts in less than four minutes, and lowers water vapor partial pressure during processing for higher quality, better adhesion, and more reproducible deposition.

Provides a compact, easy-to-use alternative to liquid nitrogen in small vacuum systems. These cryogenerators effectively eliminate the cost, inconvenience, and hazards associated with using liquid nitrogen — while delivering comparable performance.

The PCC Compact Cooler is a compact, high-performance cooling system that brings new levels of efficiency and reliability to demanding applications such as high-resolution digital imaging, analytical chemistry, life sciences, materials analysis, semiconductor inspection, scientific research and water vapor cryotrapping.

Polycold MaxCool Cryochillers are closed loop cryogenic refrigeration systems that provide up to 2,500 watts or 4,000 watts of cooling, respectively. These cryochillers can be used to capture water vapor and other condensable substances by freezing them onto a cold surface such as a cryocoil or chevron baffle. MaxCool cryochillers are also used to cool and heat objects such as electrostatic chucks used in semiconductor wafer processing.

Cryodyne Refrigeration Systems are a family of two-stage, closed-cycle helium refrigeration systems based on the Gifford-McMahon thermodynamic cycle. They offer usable heat lift from <10K to >80K, making them highly suitable for a variety of commercial and research applications.

The Brooks Auto ID System is the leading automated carrier ID system used in automated semiconductor fabs today. It combines the latest display, logic, and communication technologies and provides a versatile electronic run card. The system offers solutions to track, identify and manage Front-Opening-Unified-Pods (FOUPs), SMIF-Pods, cassettes, reticles, operators, and probe cards.

The Brooks Auto ID System is the leading automated carrier ID system used in automated semiconductor fabs today. It combines the latest display, logic, and communication technologies and provides a versatile electronic run card. The system offers solutions to track, identify and manage Front-Opening-Unified-Pods (FOUPs), SMIF-Pods, cassettes, reticles, operators, and probe cards.

Designed for quick and easy implementation, the Evaluation Kit includes a complete system for immediate launching RFID technology. Ideal for small, focused deployments, this RFID kit enables to effective and affordable demonstration with your current business processes while laying the groundwork for a cost-effective upgrade path.

Mid-Range RFID Reader - Differing plug & play antennas are also available, thus making it possible to find the optimal antenna configuration for every application. Transponders in conformity with ISO 15693 are identified (optional EEPC-transponder).

IAE RFID Reader - Transfers the identified data either through a serial RS232 or an Ethernet interface. Numerous plug and play antenna types enable the system to adjust to different reading distances and applications.

SAV RFID Reader - The device disposes of a PoE compatible (Power-over-Ethernet) connection and is also available as a wireless version.

Delivery includes one HF reader with serial interface, several antennas and a choice of RFID transponders. The RFID antennas may concurrently work with the reader which provides porting facilities for up to five antennas.

Offers a broad range of applications by combining modularity and high performance at low investment costs. It comes with configuration software that allows a wide range of parameter settings for an individual adaption.

The FG-3000 load port force gauge allows you to measure load port docking force and door closure force to insure load port and FOUP interoperability. This is particularly critical with older load ports designed under less demanding SEMI load port force requirements. Simply place the unit on the kinematic pins, dock and/or close, and take your reading to insure compliance with current manufacturer recommendations.

Matching the weight of a silicon wafer, this versatile tool’s design allows use on end effectors and wafer handling blades as well as in wafer cassettes and quartz boats. The simple-to-use display allows you to level to earth or to your own user-defined reference plane. Intuitive graphics and touch screen simplify operation, while the remote real-time display is convenient for remote adjustments.

Designed as a versatile electronic level, this “spot” level can easily check level at 0 degrees, 90 degrees, and 180 degrees. A mounting-hole pattern can be used to attach the EL-5003 to your reference surface or substrate. The simple-to-use display allows you to level to earth or to your own user-defined reference plane. Intuitive graphics and touch screens simplify operation, while the remote real-time display is convenient for making equipment adjustments.

Designed to match a 150 mm reticle, this “reticle” level can easily measure robots and reticle positions for level or co-planarity. The simple-to-use display allows you to level to earth or to your own user-defined reference plane. Intuitive graphics and touch screens simplify operation, while the remote real-time display is convenient for making equipment adjustments.

Designed to rest on SEMI standard kinematic pins, this specialized level can accurately measure your load port’s level or co-planarity (or that of many other interfaces). A remote touch-screen display with real-time graphic and numeric data provides simplicity, accuracy, and flexibility.

Set up and cycle test your equipment without breaking silicon wafers. This high-tech carbon fiber composite wafer is virtually indestructible and is manufactured to SEMI-standard diameter, flatness and notch specifications. Carbon fiber dummy wafers are also designed to mimic the weight and structural characteristics of silicon wafers.

Available in 125, 150, 200, 300 and 450 mm sizes. Manufactured from clear, precision ground glass. Precision markings placed on the wafer at every 2.5mm. Opaque perimeter allows the edge to be detected by wafer handling equipment. “Virtual” notch allows for compatibility with tools that require a notch.

The 200mm MC-2000 and 150mm MC-1512 Cassette Checkers offer a quick answer to the question, “Is it the tool or the cassette?” Quit throwing good cassettes away. Quit finding bad cassettes by wasting good production wafers. Start checking your cassettes the sensible way — with the MC-1512 150mm or MC-2000 200mm Cassette Checkers!

Handling 300mm wafers is expensive! The Brooks AM-3006 wafer adapter allows 200mm wafers to be handled on a 300mm load port — saving you money! Simply place the unit on the kinematic pins and place a 200mm open cassette on the adapter. Remove the adapter at any time to return to 300mm capability.

The Brooks cassette adapter allows a cassette with 200mm wafers to be handled inside a 300mm FOUP. Simply slide the unit in and start reducing your wafer costs. Remove the adapter at any time to return to 300mm capability.

The AM-3010 wafer adapter allows 300mm, 200mm, 150mm, and 100mm cassettes to be processed inside a 300mm FOUP style microenvironment, all with standard 300mm equipment. Using the same system for all wafer sizes expands the capability of 300mm equipment and saves time and money. Simply place the unit on your load port to handle the various wafer sizes and cassettes. 300mm can also be handled inside the adapter in an open cassette, or remove the adapter at any time to return to 300mm FOUPs.

This simple adapter allows you to quickly change from 300mm FOUPs to a 300mm process or shipping cassette without re-teaching your equipment. Simply place the adapter between the cassette and kinematic pins and run wafers. Then remove the adapter to immediately return to using a FOUP.

The CA-3000 is a 300mm metal cassette designed to support manual and automated handling and withstand high temperature applications. The exceedingly open design facilitates convective flow in thermal applications, yet the form factor is designed in accordance with SEMI FOUP specifications. This allows the cassette to support the full array of manual and automated handling without requiring changes to equipment settings.

The CA-Series reticle cassettes are designed to allow handling of reticles in a wafer cassette form factor compatible with pods and general cassette platforms. The CA-2004 is one such cassette which accommodates 152mm reticles in a 200mm cassette form factor. This allows reticle handling to be done with standard semiconductor automation components including 200mm SMIF robots. It is compatible with all 200mm SMIF pods as well as open cassette platforms.

Looking for a way to get your inventory to back-end facilities after thinning operations have been completed? The 300 mm Film Frame Shipper uses engineering plastics to transport 25 frames in an ergonomic container. The SEMI standard carrier follows the E1.9 and E47 specifications by using kinematic coupling registration to repeatably align your process carrier.

The KP-3000 Kinematic Coupling Pins, one of the Brooks INTERFACE series of products, have been designed to reduce your interface problems. Manufactured to strict SEMI standards, our kinematic coupling pins provide you peace of mind. Neatly packaged sets of three matched pins are available in either press-fit or threaded configurations.

The KP-4500 Kinematic Coupling Pins, one of the Brooks INTERFACE series of products, have been designed to reduce your interface problems. Manufactured to strict SEMI standards, our kinematic coupling pins provide tight tolerances and peace of mind. The 450mm kinematic pins are available in two designs – a fixed 25mm height and an adjustable height version with a unique mounting and locking mechanism. Both versions are offered in neatly packaged sets of three matched pins.

The MPO-1501 150mm SMIF Reticle Pod Opener provides precision manual opening and closing of 150mm wafer and reticle SMIF pods. Place it on, or mount to, work benches, WIP racks, or carts. Ergonomic in design and use, the MPO-1501 is a perfect addition to your fab.

The MPO-2000 200mm SMIF Pod Opener provides precision manual opening and closing of 200mm SMIF pods. Place it on, or mount to, work benches, WIP racks, or carts. Ergonomic in design and use, the MPO-2000 is a perfect addition to your fab.

The MPO-3002 300mm FOUP Opener is an ergonomically designed manual 300mm door opener for 25- and 13-capacity FOUPs and FOSBs. A short turn of the handle simultaneously opens both FOUP door locks. Positive stops hold the MPO-3002 in its fully open or fully closed position.

The MagnaTran® 7 (MAG 7) robot is the most advanced and reliable robot for operation in vacuum and isolation environments such as cluster tools. Reliability is proven at > 11.5 MCBF. With the MagnaTran 7 lengthy repair cycle times can lead to increased costs and unscheduled downtime. This is why Brooks created a Fixed Price Repair program to support the MagnaTran 7 robot.

The AcuLigner™ atmospheric robot is an integral part of the Brooks Automation high performance atmospheric wafer handling solutions. Utilizing direct drive technology and on-board controls, these systems play a key role in your performance and productivity. Extensive downtime due to repair is not an option. That’s why Brooks has created a Fixed Price Repair program to support the AcuLigner product.

The VTR 5 M model VacuTran™ 5 robot is a high reliability wafer-handling robot with a SEMI/MESC compatible arm and end effectors. The VTR 5 M is a top mounting robot with a single arm configuration for application in large transport chamber modules such as those in cluster tools.

Razor’s modular design allows customers to customize their field-replaceable unit (FRU) package to align with their mean-time-to-repair (MTTR) strategy and keep unscheduled downtime to a minimum. Brooks offers a Fixed Price Repair program to support the Razor robot.

Brooks offers a tiered Fixed Price Repair Services program to enhance the operational longevity and productivity of the robot controllers, to work with the AXM, DBM, AquaTran™/AcuTran® and Reliance™ ATR™ robot families.