TYFB-1300Z Grease Lubrication Molecular Pump

TY series compound molecular pump consists of a turbo-molecular pump and a plate drag pump. The turbo-molecular pump features high speed of degassing quantity and high compressive ratio while in molecular flow. Drag pump features high speed and high compressive ratio while in high...

TY series compound molecular pump consists of a turbo-molecular pump and a plate drag pump. The turbo-molecular pump features high speed of degassing quantity and high compressive ratio while in molecular flow. Drag pump features high speed and high compressive ratio while in high compressive strength. It has the advantages of the both pumps. Thereafter these expand the application range of the compound molecular pump.

The compound molecular pump has no special requirement for the gas it pumped, and has no memory trace. Because of high compressive ratio for the gas of high molecular weight, the pump can create very clean high vacuum and extra high vacuum without equipping cold trap and oil baffle. The compound molecular pump can be used in the field of electronics, metallurgy, chemicals, science technological research and vacuum technology, etc.

Specification

High vacuum flange

200 CF

200 ISO-K

Backing pipe flange

40 KF

Protection gas charge flange (anticorrosion)

16 KF

Pumping speed L/S

1300

Compressive ratio

N2

>109

H2

>1X104

Ultimate pressure (Pa)

<8×10-8

<5×10-7

Rotational speed (rpm)

24000

Bearing used

Grease lubrication ceramic bearing

Vibration value

≤0.1μm

Running up time (min)

5

(Recommended) Backing pump (L/S)

8-15

Cooling mode

Water cooling (air cooling)

Cooling water temperature (℃)

≤20℃

Cooling water flow quantity (L/min)

1

Installation position

Any angle°

Pump weight (kg)

≈27

Structure Feature

TYFB-Z grease lubrication molecular pumps uses the precision bearings as its sustainer, with water cooling or air cooling as its cooling method. The rotor operation is stable after the machine‘s dynamic equilibrium. The tri phase mouse cage type motor is used as pump driver. The grease lubrication is used to lubricate the bearings, this method is easy and reliable, so it can meet the requirement of any kind of angular space for installation.

Advantage

◆ Lower libration and noise.

◆ Easy to acquire the high or ultra-high vacuum.

◆ Special design on the rotor for high safety and stability.

◆ Have the ability of high resist pressure for the backing.

Application

TYFB-1300Z grease lubrication molecular pumps can be widely used in the field of vacuum including electronics, metallurgy, chemical industry and scientific research such as high-energy accelerator, controlled thermonuclear reactor, research of plasma physics, surface physics and analytical instrument, semiconductor and optical components manufacturing, flat panel display, solar battery, vacuum coating, vacuum smelting and so on.

The size of TYFB-1300Z compound molecular pump high vacuum connecting with flange

Pump Type

TYFB-1300Z

High Vacuum Flange Type

200 CF

200 ISO-K

D1

φ253

φ240

D2

φ267

φ267

D3

□167.6

□167.6

L1

142

142

L2

152

152

H1

393

393

H2

108

108

H3

135.5

135.5

H4

104

104

Screw Hole For Standing Pole

4-M8

4-M8

The size schematic of TY series compound molecular pump backing connecting with flange