The customer is using the Summit systems for all annealing processes in the 130nm technology node, as well as for development of next-generation advanced silicide anneal applications beginning in the 90nm technology node.

Hollands continued, "Specifically, the AST 3000's ability to offer superior temperature measurement and control capabilities, along with excellent temperature uniformity for fast-ramp spike anneals -- all backed by STEAG's strong service and support presence in Taiwan -- were critical factors in these two purchasing decisions.

All content on this website, including dictionary, thesaurus, literature, geography, and other reference data is for informational purposes only. This information should not be considered complete, up to date, and is not intended to be used in place of a visit, consultation, or advice of a legal, medical, or any other professional.