Home » Noninvasive probing of high frequency signal in integrated circuits using electrostatic force

TITLE

Noninvasive probing of high frequency signal in integrated circuits using electrostatic force

AUTHOR(S)

Hong, J.W.; Khim, Z.G.; Hou, A.S.; Park, Sang-il

PUB. DATE

December 1997

SOURCE

Review of Scientific Instruments;Dec1997, Vol. 68 Issue 12, p4506

SOURCE TYPE

Academic Journal

DOC. TYPE

Article

ABSTRACT

Reports on a noninvasive high speed voltage sampling technique by using atomic force microscope. Measurements of signals with frequencies far above the mechanical resonance frequency of the cantilever; Increase of the sensitivity and stability of the signal detection; Modulation of the probing pulse; Sensing of voltage signals through a passivation layer.

We have developed a wideband digital frequency detector for high-speed frequency modulation atomic force microscopy (FM-AFM). We used a subtraction-based phase comparator (PC) in a phase-locked loop circuit instead of a commonly used multiplication-based PC, which has enhanced the detection...

Contact interaction in an atomic force microscope is considered in terms of the thermodynamic approach. It is shown that hysteresis observed when a sample is probed in the vertical direction is due to the surface energy-work thermodynamic cycle. The force of sample-tip interaction is calculated...

Forces of interaction between the atomic force microscope (AFM) probe and the surface of a solid are calculated with an allowance for the induced cantilever oscillations. A continuous approximation used in this work does not take into account discreteness of the sample and probe structures....

Presents a detailed investigation of the deflection properties of the V-shaped atomic force microscope cantilever. Validity and accuracy of the parallel beam approximation provided the width and length of the parallel rectangular arms are chosen appropriately; Geometry of the V-shaped cantilever.

Abstract. Atomic force microscopy (AFM) in air is used to study the (110) cleaved surface of strained (100) In[sub x]Ga[sub 1-x]As/ InP heterostructures for different compositions and thicknesses of the ternary compound layers. We find that the elastic strain relaxation induces a surface...

Low-stiffness silicon cantilevers have been developed for proposed data storage devices based on the atomic force microscope, in particular thermomechanical recording. The cantilevers combine a sharp tip with an integrated piezoresistive sensor for data readback from a rotating polycarbonate...

A model for the formation of holographic surface relief gratings in azobenzene functionalized polymers is presented. Forces leading to migration of polymer chains upon exposure to light in the absorption band of the azo chromophore are attributed to dipoles interacting with the gradient of the...