photolithographically

We present a new method for creating patches of fluid lipid bilayers with conjugated biotin and other compounds down to 1 m resolution using a photolithographically patterned polymer lift-off technique.

In particular, we can define geometries by using reactive ion etching to photolithographically pattern a structural material such as silicon nitride deposited on the top of a silicon wafer.

To reduce lateral dimensions and reliance on critical photolithographically defined masking steps, the base electrode is formed to have a lateral base electrode extension that extends along a surface of the substrate.