Oblique Angle Deposition of Germanium Film on Silicon Substrate

Abstract

The effect of flux angle, substrate temperature and deposition rate on obliquely deposited germanium (Ge) films has been investigated. By carrying out deposition with the vapor flux inclined at 87 to the substrate normal at substrate temperatures of 250C or 300C, it may be possible to obtain isolated Ge nanowires. The Ge nanowires are crystalline as shown by Raman Spectroscopy.