Abstract

A well designed frequency tunable phase shifter using patterned Py with different thickness has been demonstrated. Phase shifter is implemented with a slow wave coplanar wave guide (CPW) transmission line, where the signal line has alternate short narrow and wide sections. Py is patterned on the top of narrow section for high inductance density, and inter-digital capacitor is implemented in wide section for high capacitance density. Compared with phase shifter using regular CPW, the dimension of the developed phase shifter has been reduced from 14.86 mm to 4.70 mm at 2 GHz. Phase shifter based on 100 nm and 200 nm thick patterned Py with the same dimensions (14 μm × 10 μm) are implemented and investigated comprehensively. FMR frequency of 3.2 GHz and 3.6 GHz without any external magnetic field has been achieved for 100 nm and 200 nm thick Py film, respectively. Thicker Py has increased inductance density from 1067.2 nH/m to 1193.2 nH/m while the center frequency of the phase shifter has been shifted to 1.80 GHz. Frequency tunability of the phase shifter has been also demonstrated with DC current. The phase shifter can provide 90° phase shift continuously from 2 GHz to 1.80 GHz with DC current from 0 mA to 150 mA. The design concept has great potential in design arbitrary tunable RF components such as filters and couplers.

The work was supported, in part, by NSF under Award 1253929. Fabrication of device using Center for Nanoscale Materials, Argonne National Laboratory was supported by the U.S. Department of Energy, Office of Science, Office of Basic Energy Sciences, under Contract No. DE-AC02-06CH11357. The authors thank ANSYS for software support.