The FDM and VM series are used for n-type diffusion layers as a dopant in manufacturing crystal silicon-based solar cell.The system can also be used in the BBr3 diffusion process, improving process stability, increasing uptime, reducing logistics and labour costs and higher safety.

Features

Higher productivity The VM Series (Vapor Delivery Module) achieves higher productivity due to minimizing downtime as it does not require a traditional quartz bubbler exchange

Reduced running costsThe FDM Series reduces consumption of POCl3: up to 30% lower price per kgMore than 99.8% uptime due to continuous production Decrease the cost of POCl3 wasteLonger tool lifetime and lower maintenance costs due to the process line never being exposed to the atmosphereDelivered by 20L canister reduces logistics, storage and handling costs Fewer POCl3 exchanges and bottle returns result in lower labor costs

Improved process stabilityThe VM Series keeps the liquid level ”High” resulting in the pick-up rate being more stable than a traditional quartz bubbler There is no affect by liquid level due to the bubbler being continually refilledNo bubbler exchanges are needed resulting in no exchange mistakesThere is no affect from ambient temperature fluctuactionsSheet resistance is more stable than traditional bubblers resulting in improved sheet resistance repeatability and reproducibility.

Improved safetyNo more quartz. The VM Series is made from PFA vessel which is much more robust than quartz, no handling, exchanges or refilling of quartz bubblers are needed as it does not require periodical exchanges resulting in less opportunities for human error. POCl3 is delivered in 20L ETFE lined stainless steel containers and contained in fixed and robust PFA vessel. Robust, leak tight bubbler housing with N2 blanket and connected to facility exhaustIntegrated liquid leak and gas leak detectionWetted lines fully purged and leak checked automatically.

Improved reliabilityPOCl3 is hydrophilic and produces phosphoric acid which can cause corrosion or crystallization. A normal bubbler requires periodical exchanges and when a bubbler is exchanged the possibility of contact with air increases. The HORIBA POCl3 Auto Refill System does not require exchanges of the bubbler resulting in a very low chance that POCl3 tubing makes contacts with the air.