Limitations and innovations in scanning white light interferometry

Abstract

Scanning white light interferometry (SWLI) provides a fast, non-contacting method to measure surface topography and is now widely used in industry. In this paper we illustrate some of the limitations of current SWLI instrumentation. We explain that these limitations can be considered to be a consequence of multiple scattering and show how errors of this kind can be identified. Finally, we show that if multiple scattering is properly accounted for in the analysis it can reveal surface features that cannot be revealed with current methods.

Language

English

Title of host publication

Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008

title = "Limitations and innovations in scanning white light interferometry",

abstract = "Scanning white light interferometry (SWLI) provides a fast, non-contacting method to measure surface topography and is now widely used in industry. In this paper we illustrate some of the limitations of current SWLI instrumentation. We explain that these limitations can be considered to be a consequence of multiple scattering and show how errors of this kind can be identified. Finally, we show that if multiple scattering is properly accounted for in the analysis it can reveal surface features that cannot be revealed with current methods.",

N2 - Scanning white light interferometry (SWLI) provides a fast, non-contacting method to measure surface topography and is now widely used in industry. In this paper we illustrate some of the limitations of current SWLI instrumentation. We explain that these limitations can be considered to be a consequence of multiple scattering and show how errors of this kind can be identified. Finally, we show that if multiple scattering is properly accounted for in the analysis it can reveal surface features that cannot be revealed with current methods.

AB - Scanning white light interferometry (SWLI) provides a fast, non-contacting method to measure surface topography and is now widely used in industry. In this paper we illustrate some of the limitations of current SWLI instrumentation. We explain that these limitations can be considered to be a consequence of multiple scattering and show how errors of this kind can be identified. Finally, we show that if multiple scattering is properly accounted for in the analysis it can reveal surface features that cannot be revealed with current methods.