Abstract

Frequency doubling is observed in an aluminum nitride waveguide deposited by dc reactive magnetron sputtering. Phase‐matching conditions are obtained by tuning the wavelength of an optical parametric oscillator pumped by a pulsed Nd:YAG laser. The maximum second harmonic generation efficiency is obtained for the TM0(ω)‐TM2(2ω) conversion process and is estimated to be around 4×10−8 W−1.