The output connections have been checked and the MFC has been replaced.
We are continuing to monitor this tube.
If you choose to use TylanBPSG before we have resolve this problem:
1. We strongly recommend that you watch your run.
2. Press "ALARM ACK" if the O2 alarm goes off (O2 should then return
to the recipe set point).
3. Make a comment on coral with the recipe name, step number, step time.
--
maurice at stanford.edu
Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA 94305
P. (650)725-3660
F. (650)725.6278