Abstract

(PZT)/BPO heterostructures were fabricated by combining the sol-gel and rf-magnetron sputtering techniques. Experimental results indicate that the BPO bottom electrodes effectively prevent the formation of the rosette structure of PZT, producing smooth surfaces. Additionally, ferroelectric, fatigue, and leakage currentproperties were markedly improved when both the top and the bottom electrodes were changed from Pt to BPO. These improvements are due to a superior electrode/ferroelectric interface. BPO is better than Pt and other oxide electrodes for use in PZT ferroelectric capacitors due to its remarkably improved properties and quite low growth temperature.