GEN20 MBE System

Ultra-Flexible Tool with a Design Configurable for III-V and Emerging Materials

Veeco's GEN20™ MBE system is an ultra-flexible tool with a design configurable for III-V and emerging materials, including applications that require the integration of e-beam technology. The system incorporates production design technology that allows for an optional cluster tool wafer transfer system for an ideal lab-to-fab migration.