From chen0622 at yahoo.com Mon Jul 7 09:29:56 2003
From: chen0622 at yahoo.com (chih-chang)
Date: Mon, 7 Jul 2003 09:29:56 -0700 (PDT)
Subject: reservation cancelled from 17:30 to 21:30 of July 8th
Message-ID: <20030707162956.5195.qmail@web12705.mail.yahoo.com>
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From wangqian at stanford.edu Mon Jul 7 12:47:15 2003
From: wangqian at stanford.edu (Qian Wang)
Date: Mon, 7 Jul 2003 12:47:15 -0700 (PDT)
Subject: tlylan nitride
Message-ID:
Hi
I canceled my reservation on Tylannitride from 2 pm to 7 pm.
Sorry to notify later.
qian
From cm_richter at att.net Fri Jul 11 14:22:57 2003
From: cm_richter at att.net (cm_richter at att.net)
Date: Fri, 11 Jul 2003 21:22:57 +0000
Subject: Cancelled Reservation Monday (7-14-2003) 9am to 1:30pm
Message-ID:
From tkato at stanford.edu Mon Jul 14 12:46:27 2003
From: tkato at stanford.edu (Takahisa Kato)
Date: Mon, 14 Jul 2003 12:46:27 -0700
Subject: canceled the reservation Jul 15 from 8:30 to 12:30
Message-ID: <006301c34a40$9e10f660$355640ab@TKATO>
wafers are not going to be ready by then.
I'm sorry so much for late notice.
Takahisa
From gladys at snf.stanford.edu Tue Jul 15 18:24:34 2003
From: gladys at snf.stanford.edu (Gladys Sarmiento)
Date: Tue, 15 Jul 2003 18:24:34 -0700
Subject: LONH378 recipe
Message-ID: <3F14A952.6060205@snf.stanford.edu>
Tylannitride users:
On the LONH378 recipe, a 15 minute extended NH3 flow had been added
after the deposition. We hope that this will help reduce the amount of
"bubbles"
in the film.
Please add the extra 15 minutes to the total process time.
Gladys
--
Gladys Sarmiento
Stanford Nanofabrication Facility
420 Via Mall, CIS 145
Stanford, CA 94305-4070
(650) 725-6199
gladys at snf.stanford.edu
From c.richter at lgrinc.com Wed Jul 16 11:52:26 2003
From: c.richter at lgrinc.com (Claudia Richter)
Date: Wed, 16 Jul 2003 11:52:26 -0700
Subject: reservation cancelled For Thursday 1pm to 6:30pm (7-17-2003)
Message-ID: <000001c34bcb$69c8afb0$580aa8c0@Claudia>
I will not be able to make it to this reservation time.
Claudia
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From cm_richter at att.net Thu Jul 17 15:32:10 2003
From: cm_richter at att.net (cm_richter at att.net)
Date: Thu, 17 Jul 2003 22:32:10 +0000
Subject: Cancelled Reservation For This Friday 1:30pm - 6:30pm
Message-ID:
will not be able to make it in at this reservation time.
From mtang at snf.stanford.edu Mon Jul 21 08:19:01 2003
From: mtang at snf.stanford.edu (Mary Tang)
Date: Mon, 21 Jul 2003 08:19:01 -0700
Subject: Note for tylannitride users?
Message-ID: <3F1C0465.47FD9EB1@snf.stanford.edu>
Tylannitride users:
There have been an increasing number of reports in recent weeks of
"particles" and "bubbles" in tylannitride films. It seems that the
recent rash first began with a report of gross particles and flakes all
over by Claudia Richter on June 24. A small leak was found in the
system; the tube was pulled and cleaned as part of the repair.
Subsequent users have not seen the gross particles/flakes since then;
however, reports of bubbles and small film particles have increased.
It's not clear as to whether we're all just more sensitized or if we are
experiencing an excursion.
Bubbles have been noted in the low stress LONH3 process for quite some
time. The problem is intermittent but common. The data has suggested
that it was the high DCS to NH3 ratio (much higher than recommended or
run anywhere else) was the cause (either residual unreacted DCS causing
nucleation or formation of H2 gas leading to pores in the film.) The
850 low stress process (with lower DCS ratio) was developed, in part, to
address the bubble problem (although this has turned out not to be the
case.)
Discussions with Tylan, the Berkeley Microlab, and Sandia, have been
interesting. They all say that bubbles are a chronic problem with DCS
processes, particularly for high DCS/NH3 ratios and that residual DCS
will react with air to create very small particles, which then appear as
bubbles when film is deposited. One suggested solution was to simply
add 15 minutes of NH3 flow, following deposition, to react any remaining
DCS. (This rationale, by the way, should address potential bubbles in
the following run, not the one with the extended NH3.) Gladys has done
this to the LONH3 run and will be adding it to all other recipes as soon
as possible. If you observe bubbles in your films, please let one of us
know.
The longer term solution involves an equipment modification (used by
Berkeley and Sandia) which allows a constant N2 flow in the tube. The
furnace guys are working on this right now.
Finally, we don't know if what we are experiencing is the same
persistent bubble problem we've always had or if this is an excursion.
The extended NH3 flow should take care of it if it is the persistent
problem, but probably not if it is the excursion problem. Again, please
let us know what you observe!
Mary
--
Mary X. Tang, Ph.D.
National Nanofabrication Users' Network
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu
From tberg at snf.stanford.edu Tue Jul 29 12:10:18 2003
From: tberg at snf.stanford.edu (Ted Berg)
Date: Tue, 29 Jul 2003 12:10:18 -0700
Subject: Tube available
Message-ID: <3F26C69A.DB0C963C@snf.stanford.edu>
I have removed my reservations. my test is completed.ted
From maurice at snf.stanford.edu Thu Jul 31 15:58:46 2003
From: maurice at snf.stanford.edu (Maurice Stevens)
Date: Thu, 31 Jul 2003 15:58:46 -0700
Subject: Nitride free ...now...training cancelled
Message-ID: <3F299F26.6050204@snf.stanford.edu>
--
maurice at stanford.edu
Maurice Stevens
Stanford Nanofabrication Facility
CIS Room 142, Mail Code 4070
Stanford, CA 94305
P. (650)725-3660
F. (650)725.6278