Cantilevers are really promising sensitive sensors despite their small surface. In order to increase this surface and consequently their sensitivity, we nanostructured them with zinc oxide (ZnO) nanorods or nanotubes having a diameter of approximately 100 nm and a length of 1 µm. The nanostructure growth was first optimized on a silicon wafer and then transferred to the cantilevers. The ZnO nanorods were grown in an autoclave. The centre of the nanorods was dissolved in order to obtain nanotubes. The dissolution conditions were optimized in order to have the longest etching depth. After 1.25 h in a dissolution solution containing 0.75 wt% of NH3(aq) and 0.75 wt% of cetyltrimethyl ammonium bromide, the longest etching depth was obtained. After the transfer of the syntheses to the cantilevers, nanorods/nanotubes grew on both sides of the cantilever, which prevents the reflection of the laser allowing the resonance frequency measurement. A masking procedure was developed in order to avoid the growth on one face of the cantilever of zinc oxide nanostructures. As far as the authors are concerned, for the first time, zinc oxide nanotubes were synthesized on only one face of cantilevers with optical readout.

Self-controlled active oscillating microcantilevers with a piezoresistive readout are very promising sensitive sensors, despite their small surface. In order to increase this surface and consequently their sensitivity, we nanostructured them with copper hydroxide (Cu(OH)2) or with copper oxide (CuO) nanorods. The Cu(OH)2 rods were grown, on a homogeneous copper layer previously evaporated on the top of the cantilever. The CuO nanorods were further obtained by the annealing of the copper hydroxide nanostructures. Then, these copper based nanorods were used to detect several molecules vapors. The results showed no chemical affinity (no formation of a chemical bond) between the CuO cantilevers and the tested molecules. The cantilever with Cu(OH)2 nanorods is selective to nitrogen dioxide (NO2) in presence of humidity. Indeed, among all the tested analytes, copper hydroxide has only an affinity with NO2. Despite the absence of affinity, the cantilevers could even so condensate explosives (1,3,5-trinitro-1,3,5-triazinane (RDX) and pentaerythritol tetranitrate (PETN) on their surface when the cantilever temperature was lower than the explosives source, allowing their detection. We proved that in condensation conditions, the cantilever surface material has no importance and that the nanostructuration is useless because a raw silicon cantilever detects as well as the nanostructured ones.