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Abstract

The purpose of this invention is extension of the life of chromium etchant solution (aqueous potassium permanganate and sodium phosphate buffer). It achieves this by removing manganese dioxide (MnO2) particles from the solution. The benefits are: (1) longer etchant life with corresponding savings of the cost of the chemicals and their disposal, (2) improved product quality due to less particulate contamination, (3) less etch station downtime because of less frequent cleaning and maintenance work, and (4) safer operation due to less chemical handling and cleaning by operators.

Country

United States

Language

English (United States)

This text was extracted from an ASCII text file.

This is the abbreviated version, containing approximately
52% of the total text.

Hydrocyclone Particle Removal System for a Chromium
Etching Station

The purpose
of this invention is extension of the life of
chromium etchant solution (aqueous potassium permanganate and sodium
phosphate buffer). It achieves this by
removing manganese dioxide
(MnO2) particles from the solution. The
benefits are: (1) longer
etchant life with corresponding savings of the cost of the chemicals
and their disposal, (2) improved product quality due to less
particulate contamination, (3) less etch station downtime because of
less frequent cleaning and maintenance work, and (4) safer operation
due to less chemical handling and cleaning by operators.

Ordinary
filtration of potassium permanganate solution retains
the MnO2 from etching and KMnO4 decomposition.
The continuous
filtration system force-feeds the etchant through the MnO2 . The
MnO2 further catalyzes KMnO4 decomposition, and formation of
additional MnO2 . Preservation of the
etchant requires removal of
the MnO2 from the etchant requires removal of the MnO2 from the
etchant stream. MnO2 formation may also
promote recrystallization of
the sodium phosphate buffer. This
reduces the pH. Both pH and
permanganate reductions lower the etch rate unacceptably.

A
hydrocyclone system is the key feature of this invention. It
consists of one or more small (0.5" nominal inside diameter)
cyclones. This sedimentation system
removes particles down to 4-6
microns in diameter. (The current
filtration method removes
particles down to 10 microns.) The
cyclone deposits the MnO2 and
other insolubles in an accumulator tank.
This takes them out of
contact with the chemical stream. Thus,
the MnO2 can no longer
catalyze decomposition of the etchant.
The design of th...