Micro-electromechanical devices and systems (MEMS) can greatly enhance the performance of RF integrated circuit as they can operate with much lower power in a smaller size compared to their integrated counterparts. This course covers the operation principle, design, fabrication, and technology trend of high-frequency micromechanical devices with focus on those most used for communication application. Devices and systems covered in this course include resonators, switches, filters, phase-shifters, tunable passives, and reconfigurable modules. The need for high-Q devices will be explained in detail and the physical phenomena that limit the performance and scaling of RF MEMS will be discussed. In addition, students will learn about accurate modeling of MEMS in electrical domain, transduction mechanism commonly used in MEMS, and design techniques used to achieve high performance (high power handling, high linearity, low-loss, etc).

Prerequisite: EECS 414 (introduction to MEMS), or permission of the instructor

Syllabi are available to current LSA students. IMPORTANT: These syllabi are provided to give students a general idea about the courses, as offered by LSA departments and programs in prior academic terms. The syllabi do not necessarily reflect the assignments, sequence of course materials, and/or course expectations that the faculty and departments/programs have for these same courses in the current and/or future terms.

No Syllabi are on file for EECS 598. Click the button below to search for a different syllabus (UM login required)