Management Team

Allen Lu

Dr. Allen Lu is President and Chief Executive Officer of Mattson Technology. Dr. Lu joined Mattson Technology in June 2016 and in October 2016 was appointed as President and Chief Executive Officer.

Dr. Lu is an industry veteran with diverse experiences in technology, manufacturing, business and management. Prior to joining Mattson Technology, Dr. Lu was Vice President of SEMI and President of SEMI China, where he transformed SEMICON China into the largest global platform for connecting the semiconductor manufacturing supply chain. Prior to that, Dr. Lu served as the China Fab Program Manager for Intel’s (INTC) Technology Manufacturing and Engineering Group, Director of Intel China Public Affairs and in various management and technology roles in Intel’s California Technology and Manufacturing Group. Dr. Lu was a key member of Intel’s team driving expansion in China for manufacturing, R&D and business development. Prior to Intel, Dr. Lu was a technologist at Applied Materials (AMAT).

Dr. Lu has a Ph.D. in solid state physics from the University of Virginia, and a B.Sc. from the University of Science and Technology of China.

Dr. Yang is an industry veteran, with more than 20 years in the semiconductor equipment and adjacent industries. Prior to joining Mattson Technology, Dr. Yang was Vice President of Business Development at Varian Semiconductor Equipment Associates (VSEA) with the responsibility of the company’s growth strategy. Prior to Varian, he spent more than ten years and held numerous technical and managerial positions at Applied Materials (AMAT), where he was instrumental in many successful new product development programs.

Dr. Yang received his B.Sc. degree from Nanjing University, China, his Ph.D. in Surface Chemistry from Columbia University, and also conducted research in Lawrence Berkeley National Laboratory. Dr. Yang has been granted approximately 50 U.S. patents and 100 international patents, and has co-authored over 30 scientific publications.

Subhash Deshmukh

Chief Business Officer, Worldwide Business

Dr. Subhash Deshmukh is Chief Business Officer at Mattson Technology, responsible for worldwide sales, marketing and service. Dr. Deshmukh joined Mattson Technology in June 2017.

Prior to joining Mattson Technology, Dr. Deshmukh was Chief Operating Officer at Poet Technologies (V:PTK) and a member of the Board of Directors at DenseLight Semiconductors, Pte. Ltd. (Singapore). Dr. Deshmukh has more than 25 years of industry experience, including serving as Vice President of Emerging Technologies and Products at Applied Materials (AMAT), Vice President and General Manager of the Plasma Products Business Unit and Vice President of Business Development at Varian Semiconductor Equipment Associates (VSEA), General Manager of Dielectric Etch Products Division at Applied Materials, and other key management roles at Lam Research (LRCX) and AMI Semiconductors (AMIS). Dr. Deshmukh has been granted over 27 patents and has authored and co-authored more than 55 technical articles.

Dr. Deshmukh has a Ph.D., as well as a M.S. in Chemical Engineering from Wayne State University.

Michael Zhendong Shi

Chief Strategy Officer, Corporate Strategy and China Operations

Mr. Michael Zhendong Shi is Chief Strategy Officer of Mattson Technology. Mr. Shi joined Mattson Technology as an advisor to the leadership team in May 2016, with Beijing E-Town Capital’s acquisition of Mattson Technology, and in August 2017 became the Company’s Chief Strategy Officer, with focus on the Company’s strategic direction, investor relations, setting up China operations and eco-system development.

Mr. Shi brings more than 25 years of semiconductor industry experience, serving in a broad array of technology and management roles in engineering, product development, business development and strategic investing. Prior to joining Mattson Technology, Mr. Shi served as Vice President of Industrial Investment at Beijing E-Town Investment & Development, Vice President of the Assembly and Testing Business Unit of SinoChip Semiconductors, Department Manager of Product and Testing Engineering at Semiconductor Manufacturing International Corp. (SMI), and also held various process engineering and integration management roles at Shougang NEC Electronics.

Mr. Shi holds an International M.B.A. from Tsinghua SEM, and a B.Sc. in Electrical Engineering from Harbin Institute of Technology in China.

Frank Moreman

Chief Operating Officer, Worldwide Manufacturing

Mr. Frank Moreman is Chief Operating Officer of Mattson Technology with responsibility for worldwide manufacturing, quality, supply chain and facility operations. Mr. Moreman joined Mattson Technology in February 2018 with an extensive track record of building operational excellence in various manufacturing settings.

Prior to joining Mattson Technology, Mr. Moreman served as Chief Operating Officer at three companies in the robotic exoskeleton and prosthetics industries – suitX, LIM Innovations and Ekso Bionics (EKSO). Prior to that, Mr. Moreman served in various management roles within the semiconductor industry, including as Vice President, Industrial and Semiconductor Division of Sanmina – SCI (SANM), responsible for the management of manufacturing facilities in the U.S. and China, Vice President, Materials, Quality and Information Technology at Ultra Clean Technology (UCTT), and Chief Operating Officer of Sieger Engineering.

Mr. Moreman has a B.Sc. in Mechanical Engineering from the U.S. Naval Academy.

Tyler Purvis

Chief Accounting Officer and Corporate Controller

Mr. Tyler Purvis is Chief Accounting Officer and Corporate Controller of Mattson Technology. Since joining Mattson Technology in March 2012, Mr. Purvis has had responsibility over worldwide finance, tax and treasury operations. In August 2017, Mr. Purvis also assumed responsibility for the Company’s information technology operations.

Prior to joining Mattson Technology, Mr. Purvis held various financial management roles at Blue Coat Systems (BCSI) and Novellus Systems (NVLS), which was subsequently acquired by Lam Research. Mr. Purvis began his career with Ernst & Young, LLP, a public accounting firm, serving as an Audit Manager at the time of his departure.

Mr. Purvis holds a B.A. in Business Economics from the University of California, Santa Barbara. Mr. Purvis is a certified public accountant licensed in the State of California.

Shannon Hart

Senior Vice President, Global Manufacturing Operations

Mr. Shannon Hart is Senior Vice President of Global Manufacturing Operations of Mattson Technology. Mr. Hart joined Mattson Technology in July 2014.

Prior to joining Mattson Technology, Mr. Hart held various roles over nearly 25 years in business development, customer service, supply chain, manufacturing and engineering at Lam Research (LRCX), Novellus Systems (NVLS) and Applied Materials (AMAT). Mr. Hart has been granted U.S. patents in metal joining and surface coatings.

Mr. Hart has a M.Sc. in Applied Physics from Texas State University, and a B.Sc. in Applied Physics and Mathematics from Angelo State University.

Ryan Pakulski

Vice President and General Manager, Plasma Products Group

Mr. Ryan Pakulski is Vice President and General Manager of the Plasma Products Group of Mattson Technology. Mr. Pakulski began his tenure with Mattson Technology in 1999, and has held various management and engineering-related roles with increasing responsibility.

Prior to joining Mattson Technology, Mr. Pakulski held positions at Intevac (IVAC). Mr. Pakulski has a B.Sc. in Mechanical Engineering from California Polytechnic State University – San Luis Obispo.

Jon Myers

Vice President, Mattson Service Product Group

Mr. Jon Myers is Vice President of the Mattson Service Product Group (MSPG), responsible for global customer support services, including field service operations, after-sales support and spare parts fulfillment. Mr. Myers joined Mattson Technology in July 2017.

Mr. Myers has over 30 years of experience in the semiconductor equipment and materials industry, serving in a variety of senior executive roles. Prior to joining Mattson Technology, Mr. Myers served as Vice President, Sales and Marketing at both Vacuum Engineering & Materials and Silicon Valley Technology Center Technologies. Prior to that, Mr. Myers served as General Manager, Customer Support Business Group at Lam Research (LCRX), where he managed their global service organization, and also as General Manager, North America Regional Operations, responsible for the division’s sales, service, process and technology. Prior to Lam Research, Mr. Myers held various management roles at Teradyne (TER) and General Electric (GE).

Mr. Myers has a B.Sc. in Mechanical Engineering from Cornell University and a M.B.A. from Harvard University.