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Design of a Miniaturized RF MEMS Based Single-Bit Phase Shifter

This paper presents a novel design of single-bit RF MEMS phase shifter. The basic novelty introduced for phase shifter design in this case, is by scaling down of the lateral dimensions of the conventional RF MEMS shunt switch by 10 times.

The Mechanical and Electromechanical analysis of the designed miniature RF MEMS fixed-fixed beam is performed using COMSOL Multiphysics v.3.5a as an FEM (Finite Element Method) based tool. An actuation voltage as low as 12V and a switching time of 180 nsec have been obtained on performing simulations using COMSOL Multiphysics v.3.5a. On the other hand, RF MEMS based switches having conventional dimensions, normally exhibit actuation voltages in the range 25-35V and switching speeds of 2-20?sec respectively. Hence, the proposed design offers distinct advantages over the conventional ones.