From mtang at stanford.edu Sun Sep 29 00:11:17 2013
From: mtang at stanford.edu (Mary Tang)
Date: Sun, 29 Sep 2013 00:11:17 -0700
Subject: [wbsilicide] Wet Bench Upgrades beginning 10/14
Message-ID: <5247D295.2040709@stanford.edu>
Dear wet bench users:
Our wet benches will be upgraded over the next two years. The reason
for this projects is to make them fire-safe to current code standards.
We are also taking the opportunity to optimize the work flow to make
things easier to use. For more details on the new wet benches, see:
http://snf-wetbenches.blogspot.com (Comments and suggestions can also
be posted on the blog.)
Phase I begins with wbsilicide and wbgaas. These will be shutdown
starting October 14. Replacement and inspections are expected to take
about two weeks and should be complete by Oct. 28. We will
decontaminate and bring up the benches, and plan to have them available
again for labmember use by Oct. 30. This will affect operations at
these and other wet benches, as follows:
Wbsilicide: Shutdown from Oct 14-29.
- Gold-contaminated processing: use beakers at wbgeneral.
- LTO dummy cleaning: use HF tank at wbmetal.
- KOH decontamination: use quartz beakers at wbgeneral.
Wbgaas: Shutdown from Oct 14-29.
- Use the wbgeneral in the meantime. GaAs users will be allowed to use
their own GaAs contaminated labware at the wbgen too.
- HF vapor etch will be moved to the new Microetch tool adjacent.
Wbgeneral:
- wbgaas users will use the wbgeneral until the new station is brought
up. In the meantime,wbGaAs users may use wbgeneral using their own labware.
- KOH decon and piranha cleans normally done at wbsilicide can be done
here in the meantime. Quartzware for KOH decon will be provided.
Wbmetal:
- LTO dummies will be cleaned in the HF tank here.
We realize this work will be disruptive, but hope to minimize the impact
on everyone's work. We believe this will be worth the inconvenience -
the new benches will not only be up to current code, but also
safer, easier to use, and greener. Any questions, please contact us.
Thanks for your attention and patience --
Uli & Mary