『Feature』

Coordinate measurement technology

The profilometer's coordinate system is configured with three reference flat surfaces (mirrors) independent of the stages. The length of each X, Y, and Z axis is measured to a resolving power of 0.3 nm with the laser interference method using a He-Ne frequency-stabilized laser as a light source. This suppresses the influence of squareness and straightness of the stages to achieve high-precision measurement.

Measuring probe

Top-surface measuring probe/AFP

High-precision scanning and measurement of a measured object is feasible due to the use of ultra-low measuring forces. The stylus is held by the micro-air slider, and the focus laser detects the movement of the stylus. The position of the AFP is tracked in line with the shape of the measured object to keep the measuring force constant.

Side-surface measuring probe/S-AFP

The inclination of a probe mirror detected at high precision is fed back to the XY stages to enable scanning measurement with low-contact force (0.3 mN). This enables measurement without deforming resin products, such as a lens barrel.

Design information input

Centering and measurement

The center of the measured object is found to scan and measure on its axis and plane.

Alignment

Numerically identifying a difference between the measurement data and design formula.

Top side surface evaluation technology

By synthesizing the top-surface data and side-surface data of a measured object, decentering and inclination of the optical axis of a lens or a mold can be evaluated with reference to the side surface.