UV Imaging

Navitar
developed the NanoVue 248nm 4X Deep UV Zoom lens to respond to the need for extended resolution limits for optical inspection. The
NanoVue optical system works in deep ultraviolet (DUV) light, enabling
detection and characterization of yield critical defects while effectively
doubling the resolution limit of conventional visible light microscopes.

• Inspection sensitivity for 90 nm.

• Zoom range of 75X - 300X when coupled with 100X objective.

• 0.15 - 0.037 mm FOV with 2/3" format sensor and 100X objective.

• Optical inspection to under 0.1 um using Deep UV objectives.

• Industry's only Deep UV Zoom solution.

The NanoVue Zoom lens is ideal for new OEM product development and
integration into DUV instruments that require higher throughput, allowing
customers to quickly develop new, flexible automated instruments that are
feature rich, lower in cost and have smaller footprints.