Nanopositioners

Rotary stages provide unlimited angle of rotation, and two goniometers have an adjustment range of 0.11 rad. By assembling them into multiaxis combinations, complex motion sequences are possible. Equipped with a piezo drive, the nanopositioners's low-friction components give excellent repeatable accuracy and high resolution. The smallest increment is about 40 rad. Also available is a specially developed integrated opticalmeasuring-system that uses a laser diode with 100-nm resolution.