Using standard positive resist up to 40 microns thick so far. As
precise as 0.08 microns dimension, ammonia reversal. Side wall angles
+/- 22 degrees from vertical. Bill Moffat
-----Original Message-----
From: mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org
[mailto:mems-talk-bounces+bmoffat=yieldengineering.com@memsnet.org] On
Behalf Of Xiaohui Lin
Sent: Wednesday, February 23, 2011 1:52 PM
To: General MEMS discussion
Subject: [mems-talk] Image Reversal resist
We are currently looking for a kind of resist that can form 6-8um THICK
NEGATIVE angle on substrate.
AZ9260 is able to provide thick resist but the developed shape is of
positive angle.
AZ5214 if using image reversal, is able to provide negative angle but
its thickness is always less than 2um.
I am just wondering if AZ9260 able to process with image reversal
process?
Any other choice?