From jprovine at stanford.edu Wed Dec 7 16:21:12 2011
From: jprovine at stanford.edu (J Provine)
Date: Wed, 7 Dec 2011 16:21:12 -0800
Subject: alumina and AlON only
Message-ID:
today during a precursor swap i was unable to get the hafnium precursor to
seal on line 4 properly. changing the manual valve did not fix the issue.
i will not have a chance to look at this more closely this week. thus the
savannah is alumina and aluminum oxy-nitride only until shutdown. if you
have self-clean ald to do, with other chemistries than these, please
contact me to arrange running your samples on fiji1.
j
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From cursive at ee.ucla.edu Thu Dec 8 00:00:18 2011
From: cursive at ee.ucla.edu (cursive at ee.ucla.edu)
Date: Thu, 8 Dec 2011 00:00:18 -0800 (PST)
Subject: savannah free from 10:30 to 13:30, Dec. 8
Message-ID: <45210.171.64.100.112.1323331218.squirrel@webmail-ee.seas.ucla.edu>
savannah reservation release.
From jprovine at stanford.edu Thu Dec 8 14:54:16 2011
From: jprovine at stanford.edu (J Provine)
Date: Thu, 8 Dec 2011 14:54:16 -0800
Subject: shutdown reminder
Message-ID:
hi ald users,
reminder that the systems will all go offline at 6pm on monday december
12th. the ammonia for savannah will be offline earlier on the 12th (at
6am).
savannah is running alumina and aluminum-oxy-nitride currently.
fiji1 currently has TMA and TDMA-Ti installed. this afternoon i'll switch
out TDMA-Ti and install 3dmas for SiO2. and a short hafnia run is
scheduled for this evening.
fiji2 is about to switched over to tdma-hf and tma. other than a short
specialty run tonight with DEZ, there are currently no plans to change
those precursors prior to shutdown.
over shutdown, the savannah and fiji2 lines that are suffering various
afflictions currently will be changed/repaired. a more detailed email
about shutdown and immediately post-shutdown ald activities will be sent
out after december 15th.
thank you,
j
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From pradeep.nataraj at gmail.com Thu Dec 8 15:03:04 2011
From: pradeep.nataraj at gmail.com (Pradeep Nataraj)
Date: Thu, 8 Dec 2011 15:03:04 -0800
Subject: long reservations
Message-ID:
Dear Savannah users,
I have reserved lot of savannah time.
If you any one needs to use the tool,please let me know I will release it.
Pnataraj
On Thu, Dec 8, 2011 at 2:54 PM, J Provine wrote:
> hi ald users,
> reminder that the systems will all go offline at 6pm on monday december
> 12th. the ammonia for savannah will be offline earlier on the 12th (at
> 6am).
>
> savannah is running alumina and aluminum-oxy-nitride currently.
>
> fiji1 currently has TMA and TDMA-Ti installed. this afternoon i'll switch
> out TDMA-Ti and install 3dmas for SiO2. and a short hafnia run is
> scheduled for this evening.
>
> fiji2 is about to switched over to tdma-hf and tma. other than a short
> specialty run tonight with DEZ, there are currently no plans to change
> those precursors prior to shutdown.
>
> over shutdown, the savannah and fiji2 lines that are suffering various
> afflictions currently will be changed/repaired. a more detailed email
> about shutdown and immediately post-shutdown ald activities will be sent
> out after december 15th.
>
> thank you,
> j
>
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