Hybrid System (AIP® + UBMS®)

High-end with High-performance system

KOBELCO's Hybrid System has both AIP® cathodes and UBMS® cathodes in one chamber and can operate these two types of cathodes alternately or together. Depositing more complex and high-end coatings is now possible.
The HYBRID system can expand possibilities of R&D and/or Production for more sophisticated films in various industrial fields.