*1 The value when the measurement target is a mirrored surface object measured in displacement mode, scan width/interval 120 µm/2 µm, and 8-times average*2 Sampling cycle differs according to the manufacturing variation of individual measuring units. The value when the FINE mode is set to OFF.*3 Display changes every ±0.3 µm.*4 Varies depending on the setting*5 Dedicated power supply for the monitor specified by KEYENCE.*6 Select either the Limits mode or the Binary mode.*7 Select either the Distance mode or the Profile mode. （Only distance mode is available with the LT-9501HSO (5654) and LT-9001HSO (5655).）The rating of the NPN open-collector output is 30 mA (30 V or lower) maximum, and residual voltage is 0.5 V.The rating of the Non-voltage input is ON voltage 1 V or lower, and OFF current 0.6 mA or lower.