Abstract

Transmission resonant filters in a waveguide with vertical gratings have been realized in silicon on insulator wafers. Experimental studies of fabricated devices show a broad stopband of ∼19nm in the center of which exists a narrow transmission band of ∼0.5nm with a quality factor of ∼3000. These resonant cavities are useful for laser cavities, switches, modulators, detectors, and tunable filters.

References

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