Deposition Solutions

As Moore’s Law continues and technology nodes shrink below 20nm, thermal performance becomes even more critical to control deposition processes and film quality. Watlow understands how to develop thermal system solutions in challenging ALD, CVD, PECVD and PVD applications to enhance tool performance. High temperature precision heaters integrated with state-of-the-art sensors and controllers will deliver breakthrough thermal uniformity and system responses for next-generation nodes.