AbstractMetal Organic Frameworks (MOFs) are a new class of nanoporous materials which have a high surface area, thermal/chemical stability and a tailorable pore size. HKUST-1 MOF was selected due to large internal surface area, excellent stability and known properties. Mechanical strain is generated upon adsorption of analytes into the MOF; it is proportional to concentration and is a function of adsorbed species. Piezoresistive microcantilever sensors are microfabricated devices that are highly sensitive to surface strain due to doped single crystal silicon regions. A thin film of HKUST-1 was grown at room temperature using layer-by-layer techniques. Changes in resistance generated by surface strain can be measured with a high degree of accuracy using a Wheatstone bridge and simple instrumentation. Dry nitrogen was used as a carrier gas to expose devices to varying concentrations of twelve different VOCs. Results show that stress-induced piezoresistive microcantilever array sensors with MOF coatings can provide a highly sensitive and reversible sensing mechanism for water vapor and methanol. Characteristic response features allow discrimination based on shape, response time constants and magnitude of response for other VOCs. The microcantilever sensors were shown to be durable, reliable and stable in long term testing despite being exposed to many different analytes. This work shows a promising new technology for a next generation sensors for gas monitoring. The key advantages of this type of sensor are the higher sensitivity with a nano-porous MOFs, reversible response, single chip sensing system and low power operation.