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Abstract

We present a wavelength-tunable, compact, high speed and low power silicon microring modulator. With a ring radius of 5 µm, we demonstrate a modulator with a high speed of 12.5 Gbps and a driving voltage of 3 V to achieve ~6 dB extinction ratio in high speed measurement. More importantly, tunability of the resonant wavelength is accomplished by means of a microheater on top of the ring, with an efficiency of 2.4 mW/nm (2.4 mW is needed to tune the resonant wavelength by 1 nm). This device aims to solve the narrow bandwidth problem of silicon microcavity modulators and increase the data bandwidth in optical interconnect systems.

(a) 12.5 Gbps modulation of the device without any heating power at a wavelength of 1550.70 nm. (b) 12.5 Gbps modulation of the device with 18 mW heating power at a wavelength of 1558.00 nm. The temperature increase is expected to be ~93 °C.