Abstract

Global models (GMs) have proven a key modeling tool for the plasma processing field due to simplicity and speed. However, a GM requires specification of the electron energy distribution function(EEDF). The assumption of a MaxwellianEEDF leads to inaccurate reaction rate coefficients and results in error in plasma parameter prediction in high power microwave (HPM) driven discharges. Recently, a GM was developed with a pressure-independent enhanced EEDF to improve fidelity for modeling HPM breakdown. In this work, the GM is extended to 2 decades in frequency, and the frequency effect on HPM breakdown and the EEDF is investigated.

Received 19 August 2008Accepted 30 September 2008Published online 16 October 2008

Acknowledgments:

The authors are grateful for fruitful discussions with Y. Y. Lau, A. Neuber, and R. Vidmar. The authors also thank Y. Hidaka and R. J. Temkin for helpful discussions. This research was supported by AFOSR Cathodes and Breakdown MURI04 under Grant No. FA9550-04-1-0369 and AFOSR STTR Phase II under Contract No. FA9550-05-C-0069.