Inhalt des Dokuments

FEI Helios Nanolab 600 FIB

The Focused Ion Beam (FIB) is the Nano-Workbench in our building. Finanzed by the EFRE-Project "Nano-Werkbank" by Prof. Eisebitt and ZELMI, the FIB/SEM allows both sputtering and deposition of material on the nanometer scale: