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Abstract:

In a substrate processing apparatus, a storage device, an indexer block,
a processing block and an interface block are arranged to line up in this
order. The storage device includes a plurality of openers on which a
carrier storing a plurality of substrates can be placed. The carrier is
carried in the storage device. In the storage device, the carrier is
transported among the plurality of openers by a transport device. The
transport device includes first and second hands configured to be able to
hold the carrier and move in a horizontal direction and a vertical
direction. The second hand is provided below the first hand.

Claims:

1. A substrate processing apparatus arranged to perform given processing
on a substrate, comprising: a storage device in and from which a
substrate storing container storing a plurality of substrates is carried;
and a main body arranged to take out the substrates from said substrate
storing container carried in said storage device, perform the given
processing on the taken out substrates, and store the substrates after
the processing in said substrate storing container, wherein said storage
device includes: a plurality of platforms on which said substrate storing
container is to be placed; and a transport device arranged to transport
said substrate storing container among said plurality of platforms, said
transport device includes first and second holders configured to be able
to hold said substrate storing container and move among said plurality of
platforms, and said second holder is provided below said first holder.

2. The substrate processing apparatus according to claim 1, wherein said
first and second holders are configured to be able to move independently
from each other.

3. The substrate processing apparatus according to claim 1, wherein said
plurality of platforms are arranged to line up in a horizontal direction,
and said transport device further includes: a horizontal moving mechanism
arranged to move said first and second holders along a direction in which
said plurality of platforms line up; and a vertical moving mechanism
arranged to move said first and second holders independently from each
other in a vertical direction.

4. The substrate processing apparatus according to claim 3, wherein said
vertical moving mechanism includes: a support body arranged to support
said first and second holders such that said first and second holders can
move in the vertical direction; a support body vertical moving mechanism
arranged to move said support body in the vertical direction; and first
and second holder moving mechanisms arranged to move said first and
second holders, respectively, relative to said support body in the
vertical direction, and said horizontal moving mechanism moves said
support body along the direction in which said plurality of platforms
line up.

5. The substrate processing apparatus according to claim 4, wherein said
support body includes first and second support members provided at a
distance from each other in the horizontal direction and provided to
extend in the vertical direction, said first holder moving mechanism
moves said first holder along said first support member, said second
holder moving mechanism moves said second holder along said second
support member, and said first and second holders are configured to be
able to advance/retreat between a position sandwiched by said first and
second support members and each of positions of said plurality of
platforms.

6. A storage device comprising: a plurality of platforms on which a
substrate storing container that can store a plurality of substrates is
to be placed; and a transport device arranged to transport said substrate
storing container among said plurality of platforms, wherein said
transport device includes first and second holders configured to be able
to hold said substrate storing container and move among said plurality of
platforms, and said second holder is provided below said first holder.

7. The storage device according to claim 6, wherein said first and second
holders are configured to be able to move independently from each other.

8. The storage device according to claim 6, wherein said plurality of
platforms are arranged to line up in a horizontal direction, and said
transport device further includes: a horizontal moving mechanism arranged
to move said first and second holders along a direction in which said
plurality of platforms line up; and a vertical moving mechanism arranged
to move said first and second holders independently from each other in a
vertical direction.

9. The storage device according to claim 8, wherein said vertical moving
mechanism includes: a support body arranged to support said first and
second holders such that said first and second holders can move in the
vertical direction; a support body vertical moving mechanism arranged to
move said support body in the vertical direction; and first and second
holder moving mechanisms arranged to move said first and second holders,
respectively, relative to said support body in the vertical direction,
and said horizontal moving mechanism moves said support body along the
direction in which said plurality of platforms line up.

10. The storage device according to claim 9, wherein said support body
includes first and second support members provided at a distance from
each other in the horizontal direction and provided to extend in the
vertical direction, said first holder moving mechanism moves said first
holder along said first support member, said second holder moving
mechanism moves said second holder along said second support member, and
said first and second holders are configured to be able to
advance/retreat between a position sandwiched by said first and second
support members and each of positions of said plurality of platforms.

11. A substrate processing apparatus arranged to perform given processing
on a substrate, comprising: a storage device in and from which a
substrate storing container storing a plurality of substrates is carried;
a main body arranged to take out the substrates from said substrate
storing container carried in said storage device, perform the given
processing on the taken out substrates, and store the substrates after
the processing in said substrate storing container; and a controller
arranged to control an operation of said storage device, wherein said
storage device includes: a plurality of platforms on which said substrate
storing container is to be placed; and a transport device arranged to
transport said substrate storing container among said plurality of
platforms, said transport device includes first and second holders
configured to be able to hold said substrate storing container and move
among said plurality of platforms, and said controller controls said
transport device, with one substrate storing container placed on any one
of said platforms, to hold another substrate storing container using one
of said first and second holders and cause said another substrate storing
container to wait in a position opposite to said one platform, and when
said one substrate storing container placed on said one platform is ready
to be transported, to hold and take out said one substrate storing
container from said one platform using the other one of said first and
second holders and place said another substrate storing container on said
one platform using said one holder.

12. The substrate processing apparatus according to claim 11, wherein
said controller determines whether or not an abnormality occurs in said
first or second holder, and controls said transport device, when the
abnormality occurs in one of said first and second holders, to stop an
operation of said one holder, and place said substrate storing container
on each of said platforms, take said substrate storing container out from
each of said platforms, and transport said substrate storing container
among said plurality of platforms using the other holder.

13. A storage device comprising: a plurality of platforms on which a
substrate storing container that can store a plurality of substrates is
to be placed; and a transport device arranged to transport said substrate
storing container among said plurality of platforms, wherein said
transport device includes: first and second holders configured to be able
to hold said substrate storing container and move among said plurality of
platforms; and a controller, and said controller controls said transport
device, with one substrate storing container placed on any one of said
platforms, to hold another substrate storing container using one of said
first and second holders and cause said another substrate storing
container to wait in a position opposite to said one platform, and when
said one substrate storing container placed on said one platform is ready
to be transported, to hold and take out said one substrate storing
container from said one platform using the other one of said first and
second holders and place said another substrate storing container on said
one platform using said one holder.

14. The storage device according to claim 13, wherein said controller
determines whether or not an abnormality occurs in said first or second
holder, and controls said transport device, when the abnormality occurs
in one of said first and second holders, to stop an operation of said one
holder, and place said substrate storing container on each of said
platforms, take said substrate storing container out from each of said
platforms, and transport said substrate storing container among said
plurality of platforms using the other holder.

15. A method of transporting a substrate storing container that can store
a plurality of substrates, comprising the step of transporting said
substrate storing container among a plurality of platforms on which said
substrate storing container is to be placed using first and second
holders, wherein said first and second holders are configured to be able
to hold said substrate storing container and move among said plurality of
platforms, said step of transporting said substrate storing container
includes the steps of: with one substrate storing container placed on any
one of said platforms, holding another substrate storing container using
one of said first and second holders and causing said another substrate
storing container to wait in a position opposite to said one platform;
and when said one substrate storing container placed on said one platform
is ready to be transported, holding and taking out said one substrate
storing container from said one platform using the other one of said
first and second holders, and placing said another substrate storing
container on said one platform using said one holder.

16. The method of transporting said substrate storing container according
to claim 15, wherein said step of transporting said substrate storing
container further includes the steps of: determining whether or not an
abnormality occurs in said first or second holder; and when the
abnormality occurs in one of said first and second holders, stopping an
operation of said one holder, and placing said substrate storing
container on each of said platforms, taking said substrate storing
container out from each of said platforms, and transporting said
substrate storing container among said plurality of platforms using the
other holder.

Description:

BACKGROUND OF THE INVENTION

[0001] 1. Field of the Invention

[0002] The present invention relates to a substrate processing apparatus
that performs processing on a substrate, a storage device and a method of
transporting a substrate storing container.

[0003] 2. Description of the Background Art

[0004] Substrate processing apparatuses are used to subject various
substrates such as semiconductor substrates, substrates for liquid
crystal displays, plasma displays, optical disks, magnetic disks,
magneto-optical disks, photomasks, and other substrates to various types
of processing.

[0005] A substrate storing container is used for carrying a plurality of
substrates in/out of the substrate processing apparatus from/to the
outside. Examples of such a substrate storing container include a FOUP
(Front Opening Unified Pod). The substrate storing container is provided
with an opening through which the substrates are taken out or stored, and
a cover for opening/closing the opening.

[0006] An opener places the substrate storing container thereon and
opens/closes the cover of the placed substrate storing container. In the
substrate processing apparatus including the opener, the substrate
storing container storing the substrates before processing is placed on
the opener of the substrate processing apparatus, for example. In this
state, the cover of the substrate storing container is opened, and the
substrates before processing in the substrate storing container are taken
out to the substrate processing apparatus. This causes the taken out
substrates to be subjected to given processing. Then, the substrates
after the processing by the substrate processing apparatus are stored in
the empty substrate storing container. With the cover closed, the
substrate storing container storing the substrates after the processing
is transported from the opener to the outside of the substrate processing
apparatus (JP 2003-257945 A, for example).

[0007] In recent years, processing capability of the substrate processing
apparatus has been improved with an increasing number of stacked
processing units that perform processing on substrates. This allows more
substrates to be processed by the substrate processing apparatus per unit
time, thus requiring more substrates to be taken out from the substrate
storing container to the substrate processing apparatus. The number of
substrates to be stored from the substrate processing apparatus to the
substrate storing container per unit time also needs to be increased.
Therefore, the number of openers on which the substrate storing container
is to be placed is preferably increased according to improved processing
capability of the substrate processing apparatus.

[0008] However, the limited number of openers can be mounted because of
footprint constraints. Therefore, the throughput of the substrate
processing apparatus may be limited due to exchange time of substrate
storing containers.

BRIEF SUMMARY OF THE INVENTION

[0009] An object of the present invention is to provide a substrate
processing apparatus, a storage device and a method of transporting a
substrate storing container capable of sufficiently improving throughput
of substrate processing while suppressing an increase in size.

[0010] (1) According to an aspect of the present invention, a substrate
processing apparatus arranged to perform given processing on a substrate
includes a storage device in and from which a substrate storing container
storing a plurality of substrates is carried, and a main body arranged to
take out the substrates from the substrate storing container carried in
the storage device, perform the given processing on the taken out
substrates, and store the substrates after the processing in the
substrate storing container, wherein the storage device includes a
plurality of platforms on which the substrate storing container is to be
placed, and a transport device arranged to transport the substrate
storing container among the plurality of platforms, the transport device
includes first and second holders configured to be able to hold the
substrate storing container and move among the plurality of platforms,
and the second holder is provided below the first holder.

[0011] In the substrate processing apparatus, the substrate storing
container storing the substrates before the processing is carried in the
storage device. When the substrate storing container is carried in the
storage device, the main body takes out the substrates stored in the
substrate storing container and performs the given processing on the
taken out substrates. The substrates after the processing are stored in
the substrate storing container by the main body. The substrate storing
container storing the substrates after the processing is carried out from
the storage device.

[0012] The substrate storing container is to be placed on the plurality of
platforms in the storage device. The substrate storing container is
transported by the transport device among the plurality of platforms.

[0013] The transport device includes the first and second holders. Thus,
with one substrate storing container placed on any one of the platforms,
one of the first and second holders can hold another substrate storing
container and cause the another substrate storing container to wait at a
position opposite to the one platform.

[0014] In this state, when the one substrate storing container placed on
the one platform is ready to be transported, the one substrate storing
container can be held and taken out from the one platform by the other
one of the first and second holders, and the another substrate storing
container can be quickly placed on the one platform by the one holder.

[0015] In this manner, time for exchanging the substrate storing
containers on each of the platforms is sufficiently shortened. Thus,
providing the minimum number of platforms improves throughput of
substrate processing.

[0016] The second holder is provided below the first holder in the
transport device. This causes the structure including the first and
second holders to be made compact.

[0017] Accordingly, the throughput of the substrate processing can be
sufficiently improved while an increase in size of the substrate
processing apparatus can be suppressed.

[0018] (2) The first and second holders may be configured to be able to
move independently from each other.

[0019] In this case, taking out the substrate storing container from the
platform, placing the substrate storing container on the platform and
transporting the substrate storing container can be concurrently
performed. This shortens time for transporting the substrate storing
containers in the storage device.

[0020] (3) The plurality of platforms may be arranged to line up in a
horizontal direction, and the transport device may further include a
horizontal moving mechanism arranged to move the first and second holders
along a direction in which the plurality of platforms line up, and a
vertical moving mechanism arranged to move the first and second holders
independently from each other in a vertical direction.

[0021] In this case, the horizontal moving mechanism moves the first and
second holders in the direction in which the plurality of platforms line
up. The vertical moving mechanism moves the first and second holders
independently from each other in the vertical direction.

[0022] Accordingly, the substrate storing container placed on one of the
platforms can be taken out from the platform by one of the first and
second holders, the taken out substrate storing container can be
transported to another platform, and the substrate storing container held
by the other one of the first and second holders can be placed on the one
of platforms with simple configuration.

[0023] The first and second holders can be moved relative to each other in
the vertical direction, so that the first and second holders can be
brought close to or separated from each other. Thus, a limited space in
the vertical direction in the substrate processing apparatus can be
efficiently utilized.

[0024] (4) The vertical moving mechanism may include a support body
arranged to support the first and second holders such that the first and
second holders can move in the vertical direction, a support body
vertical moving mechanism arranged to move the support body in the
vertical direction, and first and second holder moving mechanisms
arranged to move the first and second holders, respectively, relative to
the support body in the vertical direction, and the horizontal moving
mechanism may move the support body along the direction in which the
plurality of platforms line up.

[0025] In this case, the support body can be moved in the vertical
direction by the vertical moving mechanism, and the first and second
holders can be moved in the vertical direction by the first and second
holder moving mechanisms. This improves the moving speed of the first and
second holders in the vertical direction. As a result, the time for
transporting the substrate storing containers in the storage device can
be sufficiently shortened.

[0026] In addition, the horizontal moving mechanism moves the support body
along the direction in which the plurality of platforms line up. This
allows the first and second holders to simultaneously move along the
direction in which the plurality of platforms line up.

[0027] (5) The support body may include first and second support members
provided at a distance from each other in the horizontal direction and
provided to extend in the vertical direction, the first holder moving
mechanism may move the first holder along the first support member, the
second holder moving mechanism may move the second holder along the
second support member, and the first and second holders may be configured
to be able to advance/retreat between a position sandwiched by the first
and second support members and each of positions of the plurality of
platforms.

[0028] In this case, the first and second holder moving mechanisms move
the first and second holders in the vertical direction along the first
and second support members, respectively. This allows the first and
second holders to move in the vertical direction with simple
configuration.

[0029] The first and second holders advance/retreat between the position
sandwiched by the first and second support members and each of the
positions of the plurality of platforms. Thus, the substrate storing
container placed on any of the platforms can be taken out from the
platform by one of the first and second holders, and the substrate
storing container held by the other one of the first and second holders
can be placed on the platform with simple operation. Accordingly, the
configurations and operations of the first and second support members can
be simplified.

[0030] (6) According to another aspect of the present invention, a storage
device includes a plurality of platforms on which a substrate storing
container that can store a plurality of substrates is to be placed, and a
transport device arranged to transport the substrate storing container
among the plurality of platforms, wherein the transport device includes
first and second holders configured to be able to hold the substrate
storing container and move among the plurality of platforms, and the
second holder is provided below the first holder.

[0031] The substrate storing container is to be placed on the plurality of
platforms in the storage device. The substrate storing container is
transported by the transport device among the plurality of platforms.

[0032] The transport device includes the first and second holders. Thus,
with one substrate storing container placed on any one of the platforms,
one of the first and second holders can hold another substrate storing
container and cause the another substrate storing container to wait at a
position opposite to the one platform.

[0033] In this state, when the one substrate storing container placed on
the one platform is ready to be transported, the one substrate storing
container can be held and taken out from the one platform by the other
one of the first and second holders, and the another substrate storing
container can be quickly placed on the one platform by the one holder.

[0034] In this manner, the time for exchanging the substrate storing
containers on each of the platforms is sufficiently shortened. Thus,
providing the minimum number of platforms shortens the time for
transporting the substrate storing containers in the storage device.

[0035] The second holder is provided below the first holder in the
transport device. This causes the structure including the first and
second holders to be made compact.

[0036] Accordingly, the time for transporting the substrates can be
shortened while an increase in size of the storage device can be
suppressed. Thus, the throughput of the substrate processing can be
sufficiently improved by providing the storage device in the substrate
processing apparatus.

[0037] (7) The first and second holders may be configured to be able to
move independently from each other.

[0038] In this case, taking out the substrate storing container from the
platform, placing the substrate storing container on the platform and
transporting the substrate storing container can be concurrently
performed. This shortens the time for transporting the substrate storing
containers in the storage device.

[0039] (8) The plurality of platforms may be arranged to line up in a
horizontal direction, and the transport device may further include a
horizontal moving mechanism arranged to move the first and second holders
along a direction in which the plurality of platforms line up, and a
vertical moving mechanism arranged to move the first and second holders
independently from each other in a vertical direction.

[0040] In this case, the horizontal moving mechanism moves the first and
second holders in the direction in which the plurality of platforms line
up. The vertical moving mechanism moves the first and second holders
independently from each other in the vertical direction.

[0041] Accordingly, the substrate storing container placed on one of the
platforms can be taken out from the platform using one of the first and
second holders, the taken out substrate storing container can be
transported to another platform, and the substrate storing container held
by the other one of the first and second holders can be placed on the one
of the platforms with simple configuration.

[0042] The first and second holders can be moved relative to each other in
the vertical direction, so that the first and second holders can be
brought close to or separated from each other. Thus, a limited space in
the vertical direction in the storage device can be efficiently utilized.

[0043] (9) The vertical moving mechanism may include a support body
arranged to support the first and second holders such that the first and
second holders can move in the vertical direction, a support body
vertical moving mechanism arranged to move the support body in the
vertical direction, and first and second holder moving mechanisms
arranged to move the first and second holders, respectively, relative to
the support body in the vertical direction, and the horizontal moving
mechanism may move the support body along the direction in which the
plurality of platforms line up.

[0044] In this case, the support body can be moved in the vertical
direction by the vertical moving mechanism, and the first and second
holders can be moved in the vertical direction by the first and second
holder moving mechanisms. This improves the moving speed of the first and
second holders in the vertical direction. As a result, the time for
transporting the substrate storing container in the storage device can be
sufficiently shortened.

[0045] In addition, the horizontal moving mechanism moves the support body
along the direction in which the plurality of platforms line up. This
allows the first and second holders to simultaneously move along the
direction in which the plurality of platforms line up.

[0046] (10) The support body may include first and second support members
provided at a distance from each other in the horizontal direction and
provided to extend in the vertical direction, the first holder moving
mechanism may move the first holder along the first support member, the
second holder moving mechanism may move the second holder along the
second support member, and the first and second holders may be configured
to be able to advance/retreat between a position sandwiched by the first
and second support members and each of positions of the plurality of
platforms.

[0047] In this case, the first and second holder moving mechanisms move
the first and second holders in the vertical direction along the first
and second support members, respectively. This allows the first and
second holders to move in the vertical direction with simple
configuration.

[0048] The first and second holders advance/retreat between the position
sandwiched by the first and second support members and each of the
positions of the plurality of platforms. Thus, the substrate storing
container placed on any of the platforms can be taken out from the
platform by one of the first and second holders, and the substrate
storing container held by the other one of the first and second holders
can be placed on the platform with simple operation. Accordingly, the
configurations and operations of the first and second support members can
be simplified.

[0049] (11) According to still another aspect of the present invention, a
substrate processing apparatus arranged to perform given processing on a
substrate includes a storage device in and from which a substrate storing
container storing a plurality of substrates is carried, a main body
arranged to take out the substrates from the substrate storing container
carried in the storage device, perform the given processing on the taken
out substrates, and store the substrates after the processing in the
substrate storing container, and a controller arranged to control an
operation of the storage device, wherein the storage device includes a
plurality of platforms on which the substrate storing container is to be
placed, and a transport device arranged to transport the substrate
storing container among the plurality of platforms, the transport device
includes first and second holders configured to be able to hold the
substrate storing container and move among the plurality of platforms,
and the controller controls the transport device, with one substrate
storing container placed on any one of the platforms, to hold another
substrate storing container using one of the first and second holders and
cause the another substrate storing container to wait in a position
opposite to the one platform, and when the one substrate storing
container placed on the one platform is ready to be transported, to hold
and take out the one substrate storing container from the one platform
using the other one of the first and second holders and place the another
substrate storing container on the one platform using the one holder.

[0050] In the substrate processing apparatus, the substrate storing
container storing the substrates before the processing is carried in the
storage device. When the substrate storing container is carried in the
storage device, the main body takes out the substrates stored in the
substrate storing container and performs the given processing on the
taken out substrates. The substrates after the processing are stored in
the substrate storing container by the main body. The substrate storing
container storing the substrates after the processing is carried out from
the storage device.

[0051] The substrate storing container is to be placed on the plurality of
platforms in the storage device. The substrate storing container is
transported by the transport device among the plurality of platforms.

[0052] With the one substrate storing container placed on any one of the
platforms, the one of the first and second holders holds the another
substrate storing container and causes the held another substrate storing
container to wait at the position opposite to the one platform.

[0053] When the one substrate storing container placed on the one platform
is ready to be transported, the one substrate storing container is held
and taken out from the one platform by the other one of the first and
second holders, and the another substrate storing container held by the
one holder is quickly placed on the one platform.

[0054] In this manner, the time for exchanging the substrate storing
containers on each of the platforms is sufficiently shortened.
Accordingly, providing the minimum number of platforms improves
throughput of substrate processing.

[0055] Accordingly, the throughput of the substrate processing can be
sufficiently improved while an increase in size of the substrate
processing apparatus can be suppressed.

[0056] (12) The controller may determine whether or not an abnormality
occurs in the first or second holder, and control the transport device,
when the abnormality occurs in one of the first and second holders, to
stop an operation of the one holder, and place the substrate storing
container on each of the platforms, take the substrate storing container
out from each of the platforms, and transport the substrate storing
container among the plurality of platforms using the other holder.

[0057] In this case, even though the abnormality occurs in any one of the
first and second holders, placing the substrate storing container on each
of the platforms, taking the substrate storing container out from each of
the platforms and transporting the substrate storing container among the
plurality of platforms can be continued using the other holder that is
normal. This prevents a significant decrease in production efficiency of
the substrate processing apparatus.

[0058] (13) According to yet another aspect of the present invention, a
storage device includes a plurality of platforms on which a substrate
storing container that can store a plurality of substrates is to be
placed, and a transport device arranged to transport the substrate
storing container among the plurality of platforms, wherein the transport
device includes first and second holders configured to be able to hold
the substrate storing container and move among the plurality of
platforms, and a controller, and the controller controls the transport
device, with one substrate storing container placed on any one of the
platforms, to hold another substrate storing container using one of the
first and second holders and cause the another substrate storing
container to wait in a position opposite to the one platform, and when
the one substrate storing container placed on the one platform is ready
to be transported, to hold and take out the one substrate storing
container from the one platform using the other one of the first and
second holders and place the another substrate storing container on the
one platform using the one holder.

[0059] The substrate storing container is to be placed on the plurality of
platforms in the storage device. The substrate storing container is
transported by the transport device among the plurality of platforms.

[0060] With the one substrate storing container placed on any one of the
platforms, the one of the first and second holders holds the another
substrate storing container and causes the held another substrate storing
container to wait at the position opposite to the one platform.

[0061] When the one substrate storing container placed on the one platform
is ready to be transported, the one substrate storing container is held
and taken out from the one platform by the other one of the first and
second holders, and the another substrate storing container held by the
one holder is quickly placed on the one platform.

[0062] In this manner, the time for exchanging the substrate storing
containers on each of the platforms is sufficiently shortened. Thus,
providing the minimum number of platforms shortens the time for
transporting the substrate storing containers in the storage device.

[0063] Accordingly, the time for transporting the substrates can be
shortened while an increase in size of the storage device can be
suppressed. Thus, the throughput of the substrate processing can be
sufficiently improved by providing the storage device in the substrate
processing apparatus.

[0064] (14) The controller may determine whether or not an abnormality
occurs in the first or second holder, and control the transport device,
when the abnormality occurs in one of the first and second holders, to
stop an operation of the one holder, and place the substrate storing
container on each of the platforms, take the substrate storing container
out from each of the platforms, and transport the substrate storing
container among the plurality of platforms using the other holder.

[0065] In this case, even though the abnormality occurs in any one of the
first and second holders, placing the substrate storing container on each
of the platforms, taking the substrate storing container out from each of
the platforms and transporting the substrate storing container among the
plurality of platforms can be continued using the other holder that is
normal. As a result, a significant decrease in production efficiency of
the substrate processing apparatus is prevented by providing the storage
device in the substrate processing apparatus.

[0066] (15) According to still another aspect of the present invention, a
method of transporting a substrate storing container that can store a
plurality of substrates includes the step of transporting the substrate
storing container among a plurality of platforms on which the substrate
storing container is to be placed using first and second holders, wherein
the first and second holders are configured to be able to hold the
substrate storing container and move among the plurality of platforms,
the step of transporting the substrate storing container includes the
steps of, with one substrate storing container placed on any one of the
platforms, holding another substrate storing container using one of the
first and second holders and causing the another substrate storing
container to wait in a position opposite to the one platform, and when
the one substrate storing container placed on the one platform is ready
to be transported, holding and taking out the one substrate storing
container from the one platform using the other one of the first and
second holders, and placing the another substrate storing container on
the one platform using the one holder.

[0067] In the method of transporting the substrate storing container, the
substrate storing container is to be placed on the plurality of
platforms. The substrate storing container is transported by the first
and second holders among the plurality of platforms.

[0068] With the one substrate storing container placed on any one of the
platforms, the one of the first and second holders holds the another
substrate storing container and causes the held another substrate storing
container to wait at the position opposite to the one platform.

[0069] When the one substrate storing container placed on the one platform
is ready to be transported, the one substrate storing container is held
and taken out from the one platform by the other one of the first and
second holders, and the another substrate storing container held by the
one holder is quickly placed on the one platform.

[0070] In this manner, the time for exchanging the substrate storing
containers on each of the platforms is sufficiently shortened. Thus,
providing the minimum number of platforms shortens the time for
transporting the substrate storing containers.

[0071] Accordingly, the time for transporting the substrates can be
shortened while an increase in size of the configuration for transporting
the substrate storing containers can be suppressed. Thus, applying the
transporting method to the substrate processing apparatus allows the
throughput of the substrate processing to be sufficiently improved.

[0072] (16) The step of transporting the substrate storing container may
further include the steps of determining whether or not an abnormality
occurs in the first or second holder, and when the abnormality occurs in
one of the first and second holders, stopping an operation of the one
holder, and placing the substrate storing container on each of the
platforms, taking the substrate storing container out from each of the
platforms, and transporting the substrate storing container among the
plurality of platforms using the other holder.

[0073] In this case, even though the abnormality occurs in any one of the
first and second holders, placing the substrate storing container on each
of the platforms, taking the substrate storing container out from each of
the platforms and transporting the substrate storing container among the
plurality of platforms can be continued using the other holder that is
normal. As a result, a significant decrease in production efficiency of
the substrate processing apparatus is prevented by applying the
transporting method to the substrate processing apparatus.

[0074] Other features, elements, characteristics, and advantages of the
present invention will become more apparent from the following
description of preferred embodiments of the present invention with
reference to the attached drawings.

BRIEF DESCRIPTION OF THE SEVERAL VIEWS OF THE DRAWINGS

[0075] FIG. 1 is a partially cutaway sectional view of a substrate
processing apparatus according to one embodiment of the present invention
that is seen from one side;

[0076] FIG. 2 is a vertical sectional view taken along the line A-A of
FIG. 1;

[0077] FIG. 3 is a transverse sectional view taken along the line B-B of
FIG. 1;

[0078] FIG. 4 is a partially enlarged vertical sectional view taken along
the line C-C of FIG. 1;

[0079] FIG. 5 is a transverse sectional view taken along the line D-D of
FIG. 4 showing an operation of a first hand;

[0080] FIG. 6 is a schematic vertical sectional view for use in
illustrating an exchange operation of carriers in a storage device;

[0081] FIG. 7 is a schematic vertical sectional view for use in
illustrating the exchange operation of the carriers in the storage
device;

[0082] FIG. 8 is a schematic vertical sectional view for use in
illustrating the exchange operation of the carriers in the storage
device;

[0083] FIG. 9 is a block diagram showing a control system of the substrate
processing apparatus according to the one embodiment of the present
invention;

[0084] FIG. 10 is a flowchart showing one example of abnormality
determination processing performed by a main controller;

[0085] FIG. 11 is a partially cutaway sectional view of the storage device
and an indexer block of a substrate processing apparatus according to
another embodiment;

[0086] FIG. 12 is a transverse sectional view taken along the line G-G of
FIG. 11; and

[0087] FIG. 13 is a diagram for use in illustrating a transport device
including three hands.

DETAILED DESCRIPTION OF THE INVENTION

[0088] Description will be made of a substrate processing apparatus, a
storage device and a method of transporting a substrate storing container
according to one embodiment of the present invention while referring to
the drawings. In the following description, substrates refer to
semiconductor substrates, substrates for liquid crystal displays, plasma
displays, optical disks, magnetic disks, magneto-optical disks,
photomasks, glass substrates for photomasks, and other substrates.

[0089] A carrier that stores a plurality of substrates in multiple stages
is carried from outside (another substrate processing apparatus, for
example) to the substrate processing apparatus according to the present
embodiment. In the substrate processing apparatus, substrates before
processing are taken out from the carrier that is carried in, and given
processing is performed on the taken-out substrates. Then, the substrates
after processing are stored in the carrier. The carrier storing the
substrates after processing is carried out of the substrate processing
apparatus. A FOUP (Front Opening Unified Pod) is used as the carrier in
the present embodiment. The FOUP is provided with an opening through
which the substrates are taken out or stored, and a cover for
opening/closing the opening. The plurality of substrates can be
transported while being held in an enclosed space by using the FOUP.

(1) Configuration of the Substrate Processing Apparatus

[0090] FIG. 1 is a partially cutaway sectional view of the substrate
processing apparatus according to one embodiment of the present invention
that is seen from one side, FIG. 2 is a vertical sectional view taken
along the line A-A of FIG. 1, and FIG. 3 is a transverse sectional view
taken along the line B-B of FIG. 1. FIGS. 1 to 3, and FIGS. 4 to 8 and 11
to 13 described below are accompanied by arrows indicating an
X-direction, a Y-direction and a Z-direction that are perpendicular to
one another. The X-direction and the Y-direction are perpendicular to
each other in a horizontal plane, and the Z-direction corresponds to a
vertical direction.

[0091] As shown in FIG. 1, the substrate processing apparatus 1 includes a
storage device 2, an indexer block 3, a processing block 4 and an
interface block 5. The storage device 2, the indexer block 3, the
processing block 4 and the interface block 5 are arranged to line up in
this order along the X-direction. An exposure device 6 is arranged
adjacent to the interface block 5.

[0092] The substrate processing apparatus 1 is installed in a clean room.
Above the substrate processing apparatus 1, a rail 8 is attached to a
ceiling 7 of the clean room. An external transport device 70 that
transports the carrier F between the substrate processing apparatus 1 and
the outside (another substrate processing apparatus, for example) is
provided on the rail 8.

[0093] As shown in FIG. 2, the external transport device 70 has an OHT
(Overhead Hoist Transport) mechanism. The external transport device 70
includes a transport vehicle 71 that transports the carrier F along the
rail 8. A grip portion 72, a rope 73 and a winch (not shown) are provided
in the transport vehicle 71. The grip portion 72 grips a projection FC
provided in an upper portion of the carrier F. The rope 73 is used for
suspending the grip portion 72 from the transport vehicle 71. The winch
reels out or winds up the rope 73.

[0094] As shown in FIG. 1, a partition wall 31 for shielding an atmosphere
is provided between the storage device 2 and the indexer block 3. Four
openings 31a for transferring the substrates W between the storage device
2 and the indexer block 3 are formed in the partition wall 31 as shown in
FIG. 2.

[0095] As shown in FIGS. 1 to 3, the storage device 2 includes a plurality
of openers 21a, 21b, 21c, 21d, a receiving shelf 22a, a passing shelf
22b, a plurality of keeping shelves 22c, 22d, 22e, 22f and a transport
device 200. The four openers 21a to 21d are provided on a floor surface
of the storage device 2 in contact with the partition wall 31. The four
openers 21a to 21d are arranged to line up at equal spacings in the
X-direction and each include a platform 21f on which the carrier F is
placed.

[0096] As shown in FIG. 2, the four openings 31a of the partition wall 31
are formed in respective regions higher than the platforms 21f of the
four openers 21a to 21d. Each of the openers 21a to 21d includes a
shutter and a shutter driving unit (not shown) that open/close the
opening 31a formed in the partition wall 31. The shutter driving unit
opens/closes the cover of the carrier F placed on the platform 21f as
well as the shutter.

[0097] The four keeping shelves 22c, 22d, 22e, 22f are provided above the
four openers 21a to 21d, respectively. The carrier F is to be placed on
each of the keeping shelves 22c, 22d, 22e, 22f. The receiving shelf 22a
and the passing shelf 22b are provided above the two keeping shelves 22c,
22f, respectively, at both ends in a direction in which the openers 21a
to 21d are arranged (X-direction). The carrier F is to be placed on each
of the receiving shelf 22a and the passing shelf 22b.

[0098] The transport device 200 (FIGS. 1 and 3) of the storage device 2 is
used for transporting the carrier F among the plurality of openers 21a to
21d, the receiving shelf 22a, the passing shelf 22b and the keeping
shelves 22c to 22f. Details will be described below.

[0099] As shown in FIGS. 1 and 3, the indexer block 3 includes a main
controller 39 and an indexer robot 34. The main controller 39 controls
operations of the storage device 2, the indexer block 3, the processing
block 4 and the interface block 5. The main controller 39 is composed of
a CPU (Central Processing Unit) and a memory or composed of a
microcomputer, for example, and controls operations of components in the
substrate processing apparatus. The indexer robot 34 is provided with a
hand 34a for transferring the substrate W.

[0100] As shown in FIGS. 2 and 3, the indexer block 3 includes an
operation panel 90. The operation panel 90 is provided on a side wall of
the indexer block 3. The operation panel 90 outputs a command signal to
the main controller 39 (FIG. 1) according to an operation by a worker.
The operation panel 90 includes an alarm device 91. The alarm device 91
is an output device such as a lamp or a speaker.

[0101] The processing block 4 of FIG. 1 includes a plurality of processing
units 4U and a transport robot (not shown) that transports the substrate
W among the plurality of processing units 4U. The plurality of processing
units 4U are stacked in a plurality of stages in the processing block 4.
In the example of FIG. 1, the four processing units 4U adjacent to the
indexer block 3 are stacked in four stages.

[0102] The plurality of processing units 4U of the processing block 4
include a coating processing unit for resist film that forms a resist
film on the substrate W, a thermal processing unit that heats or cools
the substrate W and a development processing unit that develops the
substrate W after exposure.

[0103] A partition wall 32 for shielding an atmosphere (FIGS. 1 and 3) is
provided between the indexer block 3 and the processing block 4. Openings
32a of the same number (four) as the number of stages of the processing
units 4U in the processing block 4 are formed in the partition wall 32. A
substrate platform 33 is provided in each of the openings 32a of the
partition wall 32. The openings 32a and the substrate platforms 33 are
used for transferring the substrates W between the indexer block 3 and
the processing block 4.

[0104] The interface block 5 includes a transport robot (not shown) that
transfers the substrates W between the substrate processing apparatus 1
and the exposure device 6.

[0106] Schematic description will be made of a series of operations in the
substrate processing apparatus 1 while mainly referring to FIG. 2. First,
the carrier F storing the substrates W before processing is placed on the
receiving shelf 22a of the storage device 2 (a carrier carrying-in step).

[0107] Next, the carrier F placed on the receiving shelf 22a is
transported in the storage device 2, and placed on any of the platforms
21f of the openers 21a, 21b (a first carrier transporting step). When the
carrier F cannot be placed on any of the platforms 21f of the openers
21a, 21b, the carrier F is placed on the keeping shelf 22c.

[0108] Then, the substrates W before processing are taken out from the
carrier F placed on any of the platforms 21f of the openers 21a, 21b by
the indexer robot 34 of FIG. 3 (a substrate taking-out step).

[0109] In the foregoing substrate taking-out step, the substrates W are
taken out from the carrier F by repetitive taking-out operations, so that
the carrier F becomes empty. The empty carrier F is transported in the
storage device 2, and placed on any of the platforms 21f of the openers
21c, 21d (a second carrier transporting step). When the carrier F cannot
be placed on any of the platforms 21f of the openers 21c, 21d, the
carrier F is placed on any of the keeping shelves 22d, 22e.

[0110] The substrates W taken out from the carrier F in the substrate
taking-out step are transported to the processing block 4 and the
exposure device 6 of FIG. 1, and subjected to the given processing (a
substrate processing step).

[0111] The substrates W after processing are transported and stored in the
empty carrier F placed on any of the platforms 21f of the openers 21c,
21d by the indexer robot 34 of FIG. 3 (a substrate storing step).

[0112] When a given number of substrates W after processing is stored in
the empty carrier F placed on any of the platforms 21f (FIGS. 2 and 3) of
the openers 21c, 21d, the carrier F storing the substrates W after
processing is transported to be placed on the passing shelf 22b (a third
carrier transporting step). When the carrier F cannot be placed on the
passing shelf 22b, the carrier F is placed on the keeping shelf 22f.
Finally, the carrier F placed on the passing shelf 22b is carried out to
the outside (a carrier carrying-out step). Details of each of the
foregoing steps will be described below.

[0113] (2-b) The Carrier Carrying-in Step

[0114] As shown in FIGS. 1 and 2, an upper portion of the storage device 2
is opened. The carrier F is carried in the substrate processing apparatus
1 as follows. First, the carrier F storing the substrates W before
processing is transported by the external transport device 70, and
stopped at a position above the receiving shelf 22a.

[0115] Next, as shown in FIG. 2, the winch of the transport vehicle 71
operates to reel out the rope 73, and the carrier F gripped by the grip
portion 72 is lowered to be placed on the receiving shelf 22a of the
storage device 2 (see the arrow Q1 of FIG. 2). Then, a state where the
projection FC is gripped by the grip portion 72 is released, and the
winch operates to wind up the rope 73. Thus, the grip portion 72 is
raised to be stored in the transport vehicle 71.

[0116] (2-c) The First Carrier Transporting Step

[0117] In the first carrier transporting step, the carrier F placed on the
receiving shelf 22a in the storage device 2 is transported by the
transport device 200 (FIGS. 1 and 3), and placed on any of the platforms
21f (FIGS. 2 and 3) of the two openers 21a, 21b. When the carrier F
cannot be placed on any of the platforms 21f of the openers 21a, 21b, the
carrier F is placed on the keeping shelf 22c (FIG. 2).

[0118] (2-d) The Substrate Taking-Out Step

[0119] The covers of the carriers F placed on the platforms 21f and the
shutters of the openings 31a (FIGS. 2 and 3) are opened by the two
openers 21a, 21b (FIGS. 2 and 3).

[0120] The substrates W before processing are taken out from the carrier F
by the indexer robot 34 (FIGS. 1 and 3) of the indexer block 3, and
transported to any of the plurality of substrate platforms 33 provided in
the partition wall 32 (FIGS. 1 and 3). In this manner, the substrates W
before processing are taken out from the carrier F carried in the
substrate processing apparatus 1 to the processing block 4 (FIGS. 1 and
3).

[0121] (2-e) The Second Carrier Transporting Step

[0122] When the carrier F becomes empty after repetitive taking-out
operation, the empty carrier F is transported by the transport device 200
(FIGS. 1 and 3), and placed on any of the platforms 21f (FIGS. 2 and 3)
of the two openers 21c, 21d of FIG. 2. When the carrier F cannot be
placed on any of the openers 21c, 21d, the carrier F is placed on any of
the keeping shelves 22d, 22e (FIGS. 2 and 3).

[0123] (2-f) Substrate Processing Step

[0124] In the processing block 4 (FIGS. 1 and 3), the substrates W before
processing placed on the substrate platforms 33 (FIGS. 1 and 3) are
transported to any of the plurality of processing units 4U by the
transport robot. Thus, the substrates W before processing transported
from the indexer block 3 are subjected to coating processing of a photo
resist, thermal processing and so on.

[0125] The substrates W are transported to the exposure device 6 (FIG. 1)
via the interface block 5 (FIG. 1) by the transport robot. In the
exposure device 6, the substrates W transported from the interface block
5 are subjected to exposure processing. The substrates W subjected to the
exposure processing are again transported to the processing block 4 via
the interface block 5.

[0126] In the processing block 4, the substrates W after the exposure
processing are subjected to development processing, thermal processing
and so on. The substrates W subjected to the foregoing series of
processing (coating processing, exposure processing, development
processing, thermal processing and so on) are transported by the
transport robot, and again placed on the substrate platforms 33. Then,
the substrates W are received by the indexer robot 34 (FIGS. 1 and 3) of
the indexer block 3.

[0127] (2-g) The Substrate Storing Step

[0128] As described above, the empty carrier F after the substrates W
before processing are taken out is placed on at least one of the
platforms 21f (FIGS. 2 and 3) of the two openers 21c, 21d of the storage
device 2. In this state, the cover of the carrier F and the shutter of
the opening 31a (FIGS. 2 and 3) are opened. Thus, the substrates W after
processing are transported to the empty carrier F by the indexer robot
34. In this manner, the substrates W after processing by the processing
block 4 and the exposure device 6 are stored in the empty carrier F.

[0129] (2-h) The Third Carrier Transporting Step

[0130] When the given number of substrates W after processing is stored in
the empty carriers F placed on one of the platforms 21f (FIGS. 2 and 3)
of the openers 21c, 21d, the cover of the carriers F and the shutter of
the opening 31a (FIGS. 2 and 3) are closed.

[0131] Then, the carrier F storing the substrates W after processing is
transported by the transport device 200 of FIG. 3, and placed on the
passing shelf 22b (FIG. 2). When the carrier F cannot be placed on the
passing shelf 22b, the carrier F is placed on the keeping shelf 22f (FIG.
2).

[0132] (2-i) The Carrier Carrying-Out Step

[0133] The external transport device 70 (FIG. 2) waits at a position above
the passing shelf 22b (FIG. 2). As shown in FIG. 2, when the carrier F is
placed on the passing shelf 22b, the winch of the transport vehicle 71
operates to reel out the rope 73. Thus, when the grip portion 72 is
lowered to reach the upper portion of the carrier F, the projection FC of
the carrier F is gripped by the grip portion 72. In this state, the winch
operates to wind up the rope 73. Accordingly, the grip portion 72 is
raised to cause the carrier F to be stored in the transport vehicle 71
(see the arrow Q2 of FIG. 2). Then, the external transport device 70
moves, thereby transporting the carrier F storing the substrates W after
processing to the outside of the substrate processing apparatus 1.

(3) Details of the Transport Device Included in the Storage Device

[0134] FIG. 4 is a partially enlarged vertical sectional view taken along
the line C-C of FIG. 1. FIG. 4 is shows the transport device 200 in an
enlarged manner. As shown in FIGS. 3 and 4, the transport device 200
includes a first transport frame 210, a second transport frame 220, a
first hand 230, a second hand 240, a first moving mechanism M1, second
moving mechanisms M2, a third moving mechanism M3 and a fourth moving
mechanism M4 as main constituents.

[0135] As shown in FIG. 3, a rail 200R is mounted on the floor surface of
the storage device 2 in front of the plurality of openers 21a to 21d so
as to extend along the direction in which the openers 21a to 21d are
arranged (X-direction).

[0136] As shown in FIG. 4, the first moving mechanism M1 is provided on
the rail 200R. The first transport frame 210 is provided on the first
moving mechanism M1. The first transport frame 210 includes a top plate
211, a bottom plate 212 and a pair of side plates 213 that are opposite
to each other. The first moving mechanism M1 includes a motor, for
example. The motor operates to cause the first moving mechanism M1 to
move on the rail 200R. Thus, the first transport frame 210 as well as the
first moving mechanism M1 is movable in the direction in which the
openers 21a to 21d of FIG. 3 are arranged (X-direction).

[0137] A pair of rails 210R is mounted on the inside of the pair of side
plates 213 from the top plate 211 to the bottom plate 212 so as to extend
in the vertical direction (Z-direction). The two second moving mechanisms
M2 are provided on the inside of each of the rails 210R.

[0138] The second transport frame 220 is supported by the plurality of
second moving mechanisms M2 within the first transport frame 210. The
second transport frame 220 includes a top plate 221 and a pair of side
plates 222 that are opposite to each other. A bottom portion of the
second transport frame 220 is opened. Portions in the vicinity of upper
ends and lower ends of the side plates 222 are connected to the second
moving mechanisms M2, respectively. The second moving mechanisms M2
include motors, for example. The motor operates to cause the second
moving mechanism M2 to move on the rail 210R. Thus, the second transport
frame 220 as well as the second moving mechanisms M2 is movable in the
vertical direction (Z-direction) within the first transport frame 210.

[0139] A pair of rails 220R is mounted on the inside of the pair of side
plates 222 so as to extend in the vertical direction (Z-direction). The
third moving mechanism M3 and the fourth moving mechanism M4 are provided
on the inside of the pair of rails 220R, respectively.

[0140] The first hand 230 is supported by the third moving mechanism M3
within the second transport frame 220. The first hand 230 includes a
support plate 231, a multi-joint arm 232 and a grip portion 233. The
support plate 231 is connected to the third moving mechanism M3. The
third moving mechanism M3 includes a motor, for example. The motor
operates to cause the third moving mechanism M3 to move on the rail 220R.
Thus, the first hand 230 as well as the third moving mechanism M3 is
movable in the vertical direction (Z-direction) within the second
transport frame 220.

[0141] Similarly, the second hand 240 is supported by the fourth moving
mechanism M4 within the second transport frame 220. The second hand 240
is positioned below the first hand 230, and includes a support plate 241,
a multi-joint arm 242 and a grip portion 243. The support plate 241 is
connected to the fourth moving mechanism M4. Thus, the second hand 240 as
well as the fourth moving mechanism M4 is movable in the vertical
direction (Z-direction) within the second transport frame 220.

[0142] The first and second hands 230, 240 are supported within the second
transport frame 220 via the third and fourth moving mechanisms M3, M4,
respectively. Therefore, the first and second hands 230, 240 are movable
relative to each other in the vertical direction (Z-direction) within the
second transport frame 220.

[0143] In this manner, in the storage device 2, the first, second and
third moving mechanisms M1, M2, M3 cause the first hand 230 to move in
the vertical direction (Z-direction) and the direction in which the
openers 21a to 21d (FIG. 3) are arranged (X-direction). The first, second
and fourth moving mechanisms M1, M2, M4 cause the second hand 240 to move
in the vertical direction (Z-direction) and the direction in which the
openers 21a to 21d (FIG. 3) are arranged (X-direction).

[0144] Description will be made of the first hand 230. FIG. 5 is a
transverse sectional view taken along the line D-D of FIG. 4 showing an
operation of the first hand 230. In the following description, before the
operation of the first hand 230 is started, the carrier F is placed on
the platform 21f of the opener 21a, and the first hand 230 is supported
slightly above a position opposite to the opener 21a.

[0145] As shown in FIG. 5, in the first hand 230, one end of the
multi-joint arm 232 is attached to a lower surface of the support plate
231 extending from the third moving mechanism M3. The grip portion 233 is
attached to the other end of the multi-joint arm 232.

[0146] The multi-joint arm 232 extends/contracts in a front-to-rear
direction (Y-direction) of the opener 21a. Thus, the grip portion 233
advances/retreats in the front-to-rear direction (Y-direction) of the
opener 21a while being maintained in a horizontal attitude.

[0147] As shown in FIG. 5 (a), the multi-joint arm 232 extends with the
carrier F placed on the platform 21f of the opener 21a, so that the grip
portion 233 moves from the inside of the second transport frame 220 to a
position of the projection FC of the carrier F. This causes the
projection FC of the carrier F to be gripped by the grip portion 233.

[0148] In this state, the multi-joint arm 232 contracts to cause the grip
portion 233 that grips the carrier F to move from the position above the
opener 21a toward the second transport frame 220 as shown in FIG. 5 (b).

[0149] As shown in FIG. 5 (c), the multi-joint arm 232 contracts to the
inside of the second transport frame 220 to cause the grip portion 233
that grips the carrier F to move into the second transport frame 220.
This causes the carrier F to be held within the second transport frame
220.

[0150] While description is made of the operation of the first hand 230
when holding the carrier F that has been placed on the opener 21a in the
second transport frame 220 in the foregoing paragraphs, the first hand
230 can move the carrier F held in the second transport frame 220 toward
the opener 21a and place the carrier F on the platform 21f.

[0151] In this manner, the carrier F placed on the platforms 21f of the
plurality of openers 21a, 21b, 21c, 21d, the receiving shelf 22a, the
passing shelf 22b and the plurality of keeping shelves 22c, 22d, 22e, 22f
of FIG. 2 can be held in the second transport frame 220 by using the
first hand 230.

[0152] The carrier F held in the second transport frame 220 can be placed
on the platforms 21f of the plurality of openers 21a, 21b, 21c, 21d, the
receiving shelf 22a, the passing shelf 22b and the plurality of keeping
shelves 22c, 22d, 22e, 22f of FIG. 2.

[0153] The configuration and operation of the second hand 240 are the same
as those of the first hand 230.

(4) Exchange Operation of the Carriers by the Transport Device Included in
the Storage Device

[0154] As described above, in the storage device 2, when the carrier F
placed on the platform 21f (FIGS. 2 and 3) of one of the openers 21a, 21b
for taking out the substrates becomes empty, the carrier F is taken out
from the platform 21f by the transport device 200 of FIG. 4, and another
carrier F (carrier F storing the substrates W before processing) is
placed on the platform 21f (the first carrier transporting step).

[0155] When the given number of substrates W after processing is stored in
the carrier F placed on the platform 21f (FIGS. 2 and 3) of one of the
openers 21c, 21d for storing the substrates, the carrier F is taken out
from the platform 21f by the transport device 200 of FIG. 4, and another
carrier F (empty carrier F) is placed on the platform 21f (the second
carrier transporting step).

[0156] In this manner, the exchange operation of the carriers F is
performed by the transport device 200 of FIG. 4 on the openers 21a to
21d. Description will be made of the exchange operation of the carriers F
by the transport device 200 by referring to FIGS. 4 and 6 to 8.

[0157] FIGS. 6 to 8 are schematic vertical sectional views for use in
illustrating the exchange operation of the carriers F in the storage
device 2. In the following paragraphs, description will be made of the
operation of the transport device 200 when exchanging the empty carrier
F2 for another carrier F1 storing the substrates W before processing on
the platform 21f of the opener 21a in the first carrier transporting
step.

[0158] As shown in FIG. 6 (a), the carrier F1 is placed on the receiving
shelf 22a before the start of the first carrier transporting step. The
first transport frame 210 moves to the direction in which the openers 21a
to 21d are arranged (X-direction) and the second transport frame 220
moves in the vertical direction (Z-direction), so that the first and
second hands 230, 240 are supported slightly above a position opposite to
the receiving shelf 22a. At this time, the first and second hands 230,
240 are in close proximity to each other within the second transport
frame 220.

[0159] As indicated by the arrow in FIG. 6 (b), when the first carrier
transporting step is started, the multi-joint arm 242 of the second hand
240 extends to move the grip portion 243 to a position above the carrier
F1 placed on the receiving shelf 22a. In this state, the second hand 240
is slightly lowered, so that the projection FC of the carrier F1 is
gripped by the grip portion 243.

[0160] Next, as indicated by the arrow in FIG. 6 (c), the multi-joint arm
242 contracts to move the grip portion 243 that grips the carrier F1 into
the second transport frame 220. This causes the carrier F1 to be held by
the second hand 240 within the second transport frame 220.

[0161] The second hand 240 subsequently moves downward within the second
transport frame 220 as indicated by the arrow in FIG. 6 (d). Thus, the
first and second hands 230, 240 are separated a given distance from each
other in the vertical direction (Z-direction) within the second transport
frame 220. The given distance is larger than the height of the carrier F.

[0162] The second transport frame 220 then moves downward as indicated by
the arrow in FIG. 7 (a). This causes the first hand 230 to be supported
slightly above the position opposite to the opener 21a.

[0163] Next, the multi-joint arm 232 of the first hand 230 extends to
cause the grip portion 233 to move to a position above the carrier F
placed on the opener 21a as indicated by the arrow in FIG. 7 (b). In this
state, the first hand 230 is slightly lowered, so that the projection FC
of the carrier F2 is gripped by the grip portion 233.

[0164] The multi-joint arm 232 subsequently contracts to cause the grip
portion 233 that grips the carrier F2 to move into the second transport
frame 220 as indicated by the arrow in FIG. 7 (c). Thus, the carrier F2
is held by the first hand 230 within the second transport frame 220.

[0165] The second transport frame 220 then moves upward as indicated by
the arrow in FIG. 7 (d). Thus, the second hand 240 that holds the carrier
F1 is supported slightly above the position opposite to the opener 21a.

[0166] The multi-joint arm 242 of the second hand 240 extends to cause the
grip portion 243 that grips the carrier F1 to move to the position above
the opener 21a as indicated by the arrow in FIG. 8 (a). In this state,
the first hand 230 is slightly lowered, so that the carrier F1 is placed
on the platform 21f of the opener 21a. Then, a state where the projection
FC is gripped by the grip portion 243 is released.

[0167] Next, the multi-joint arm 242 contracts to cause the grip portion
243 to move into the second transport frame 220 as indicated by the arrow
in FIG. 8 (b). In this manner, the exchange operation of the carriers F1,
F2 is performed on the platform 21f of the opener 21a. The empty carrier
F2 held by the first hand 230 is transported to any of the other openers
21c, 21d (FIG. 2) and the keeping shelves 22d, 22e (FIG. 2) by the
transport device 200. Accordingly, the first carrier transporting step is
finished.

[0168] A series of operations shown in FIG. 6 (a) to (d) and FIG. 7 (a) is
performed before the carrier F2 placed on the opener 21a becomes empty in
the present embodiment. That is, the transport device 200 waits in the
vicinity of the opener 21a while holding another carrier F1 before a time
point where the carrier F2 placed on the opener 21a becomes ready to be
exchanged (FIG. 7 (a)).

[0169] While description is made of the exchange operation of the carriers
F on the opener 21a in the foregoing paragraphs, the exchange operation
of the carriers F is performed in the same manner on the other openers
21b, 21c, 21d (FIG. 2) and the keeping shelves 22c to 22f (FIG. 2).

[0170] Therefore, when exchanging the carriers F on the opener 21b for
taking out the substrates (FIG. 2), the transport device 200 waits in the
vicinity of the opener 21b while holding another carrier F (a carrier F
storing the substrates before processing) before the carrier F placed on
the opener 21b becomes empty (before the time point where the carrier F
becomes ready to be exchanged).

[0171] In addition, when exchanging the carriers F on the openers 21c, 21d
for storing the substrates (FIG. 2), the transport device 200 waits in
the vicinity of the openers 21c, 21d while holding another carrier F (an
empty carrier F) before the given number of substrates W is stored in the
carrier F placed on the openers 21c, 21d (before the time point where the
carrier F becomes ready to be exchanged).

(5) Control System

[0172] FIG. 9 is a block diagram showing a control system of the substrate
processing apparatus 1 according to the one embodiment of the present
invention. As shown in FIG. 9, the main controller 39 of FIG. 1 controls
the operations of the components in the storage device 2, the indexer
block 3, the processing block 4 and the interface block 5.

[0173] Thus, the operations of the openers 21a to 21d, the first to fourth
moving mechanisms M1 to M4, the first and second hands 230, 240 of the
storage device 2 are controlled by the main controller 39. The operation
of the indexer robot 34 of the indexer block 3 is also controlled by the
main controller 39. Furthermore, the alarm device 91 of the operation
panel 90 in the indexer block 3 is controlled by the main controller 39.
The operations of the processing units 4U of the processing block 4 are
also controlled by the main controller 39.

[0174] Here, the first and second hands 230, 240 include encoders for
operating the multi-joint arms 232, 242 of FIG. 4, respectively, as well
as motors. Also, each of the first to fourth moving mechanisms M1 to M4
includes an encoder as well as a motor. A signal indicating an operation
state of the motor (a rotation angle of the motor, for example) is output
from the encoder to the main controller 39 in each of the first and
second hands 230, 240 and the first to fourth moving mechanisms M1 to M4.

[0175] This allows the main controller 39 to determine whether or not an
abnormality occurs in the first hand 230 based on the signals output from
the encoders of the first hand 230 and the third moving mechanism M3.

[0176] For example, the main controller 39 can determine whether or not
the first hand 230 is normal based on the signal output from the first
hand 230 in response to a command to the first hand 230 and the signal
output from the third moving mechanism M3 in response to a command to the
third moving mechanism M3.

[0177] Similarly, the main controller 39 can determine whether or not the
second hand 240 is normal based on the signals output from the encoders
of the second hand 240 and the fourth moving mechanism M4.

[0178] Accordingly, when an abnormality occurs in any one of the first and
second hands 230, 240, the main controller 39 can perform an exchange
operation of the carriers F using only the other hand that is normal
instead of performing the exchange operation of the carriers F shown in
FIGS. 6 to 8.

[0179] In the following description, the way of operating the storage
device 2 in which the exchange operation of the carriers F is performed
using the first and second hands 230, 240 as shown in FIGS. 6 to 8 is
referred to as a first operation mode. The way of operating the storage
device 2 in which the exchange operation of the carriers F is performed
using only one of the first and second hands 230, 240 is referred to as a
second operation mode.

[0180] The exchange operation of the carriers F on the opener 21a in the
second operation mode is performed as follows, for example. Suppose that
the first hand 230 is normal and an abnormality occurs in the second hand
240.

[0181] When the carrier F on the opener 21a(FIG. 2) becomes empty, the
first hand 230 holds the empty carrier F, and transports and places the
carrier F on any of the other openers 21c, 21d (FIG. 2).

[0182] Next, the first hand 230 moves to the position of the receiving
shelf 22a (FIG. 2), and holds the carrier F placed in advance on the
receiving shelf 22a (the carrier F storing the substrates W before
processing). The first hand 230 then transports and places the held
carrier F on the opener 21a as the carrier F for exchange.

[0183] In this manner, the one hand that is normal transports the carrier
F, which is to be exchanged, from an arbitrary opener to another opener,
and moves to the shelf on which another carrier F for exchange is placed
(the receiving shelf 22a, for example), and then transports the another
carrier F placed on the shelf to the arbitrary opener, so that the
exchange operation of the carriers F is performed in the second operation
mode.

[0184] FIG. 10 is a flowchart showing one example of abnormality
determination processing by the main controller 39. As shown in FIG. 10,
the main controller 39 first determines whether or not the first and
second hands 230, 240 are normal (Step S11).

[0185] When the first and second hands 230, 240 are normal, the main
controller 39 controls the components of the storage device 2 to perform
the exchange operation of the carriers F in the first operation mode
using the first and second hands 230, 240 (Step S12).

[0186] When at least one of the first and second hands 230, 240 is not
normal, the main controller 39 determines whether or not any one of the
first and second hands 230, 240 is normal (Step S13).

[0187] When any one of the first and second hands 230, 240 is normal, the
main controller 39 controls the components of the storage device 2 to
perform the exchange operation of the carriers F in the second operation
mode using the normal hand (Step S14), and causes the alarm device 91 of
FIG. 1 to output an alarm indicating an occurrence of an abnormality in
one hand (Step S15).

[0188] When both the first and second hands 230, 240 are not normal, the
main controller 39 stops the operations of the first and second hands
230, 240, and causes the alarm device 91 of FIG. 1 to output an alarm
indicating an occurrence of abnormalities in both hands (Step S16).

[0189] The above-described abnormality determination processing is
repeated in a given cycle during operation of the substrate processing
apparatus 1. Thus, when an abnormality occurs in any one of the first and
second hands 230, 240, the substrates W can be continued to be carried in
and out using the normal hand. This prevents a significant drop in
production efficiency of the substrate processing apparatus 1.

[0190] In Step S13, when any one of the first and second hands 230, 240 is
normal, the main controller 39 may stop the operations of the first and
second hands 230, 240 and cause the alarm device 91 of FIG. 1 to output
the alarm indicating the occurrence of the abnormality in one hand
instead of performing the processes of Steps S14, S15.

[0191] In this case, an operation unit (a switch or the like) for
directing the operation in the second operation mode is provided in the
operation panel 90 of FIGS. 2 and 3, for example. A worker operates the
foregoing operation unit in the case of an output of the alarm, so that
the storage device 2 can perform the exchange operation of the carriers F
in the second operation mode using the normal hand.

(6) Effects

[0192] (6-a) As described above, the transport device 200 includes the
first and second hands 230, 240 in the storage device 2. In this case,
when exchanging the carriers F on the openers 21a to 21d, the transport
device 200 can hold the carrier F for exchange in advance using one hand
before the time point where the placed carrier F becomes ready to be
exchanged. Accordingly, when exchanging the carriers F, the transport
device 200 can take out the carrier F from the opener using the other
hand, and then quickly places the carrier F held by the one hand on the
opener.

[0193] The second hand 240 is provided below the first hand 230 in the
transport device 200. Thus, the transport device 200 can be made compact.
This suppresses an increase in size of the substrate processing apparatus
1.

[0194] Providing the minimum number of openers improves throughput of
substrate processing while suppressing an increase in size of the
substrate processing apparatus 1.

[0195] (6-b) The first and second hands 230, 240 of the transport device
200 are provided in the second transport frame 220 via the third and
fourth moving mechanisms M3, M4, respectively. The second transport frame
220 is provided in the first transport frame 210 via the second moving
mechanisms M2.

[0196] Thus, the first and second hands 230, 240 can be moved in the
vertical direction by the third and fourth moving mechanisms M3, M4 while
the second transport frame 220 is moved in the vertical direction by the
second moving mechanisms M2. This improves the moving speed of the first
and second hands 230, 240 in the vertical direction. As a result, time
for transporting the carriers F in the storage device 2 can be
sufficiently shortened.

[0197] (6-c) The first and second hands 230, 240 of the transport device
200 can be independently moved in the vertical direction by the third and
fourth moving mechanisms M3, M4, respectively. Since the first and second
hands 230, 240 can move relative to each other, the first and second
hands 230, 240 can be brought close to or separated from each other.
Accordingly, the limited space in the vertical direction in the storage
device 2 can be efficiently utilized.

(7) Other Embodiments

[0198] (7-a) FIG. 11 is a partially cutaway sectional view of the storage
device 2 and the indexer block 3 of the substrate processing apparatus 1
according to another embodiment. FIG. 12 is a transverse sectional view
taken along the line G-G of FIG. 11. Description will be made of the
substrate processing apparatus 1 of FIG. 11 by referring to differences
from the substrate processing apparatus 1 of FIG. 1.

[0199] As shown in FIGS. 11 and 12, the upper portion of the storage
device 2 is not opened, and an opening 29h is formed in a side wall 29 of
the storage device 2 that is opposite to the partition wall 31 in the
substrate processing apparatus 1.

[0200] A loading port 80 is provided in the opening 29h of the side wall
29 in the storage device 2. Four loading port platforms 80a, 80b, 80c,
80d are provided on an upper surface of the loading port 80.

[0201] The loading port platforms 80a, 80b, 80c, 80d (FIG. 12) are
arranged to be opposite to the openers 21a, 21b, 21c, 21d (FIG. 12) with
the transport device 200 therebetween. The height of each of the loading
port platforms 80a to 80d is substantially equal to the height of each of
the platforms 21f (FIG. 12) of the openers 21a to 21d.

[0202] Here, the multi-joint arms 232, 242 of the first and second hands
230, 240 of FIGS. 4 and 5 can extend/contract with respect to the openers
21a to 21d and the loading port platforms 80a to 80d through the inside
of the second transport frame 220 as indicated by the thick solid arrow
and the thick dotted arrow in FIG. 12.

[0203] The multi-joint arm 232 extends/contracts with respect to the
openers 21a to 21d and the loading port platforms 80a to 80d, so that the
carrier F can be moved in the front-to-rear direction (Y-direction) of
the second transport frame 220 through the inside of the second transport
frame 220.

[0204] At the time of carrying the carrier F in the substrate processing
apparatus 1, the carrier F transported from the outside of the substrate
processing apparatus 1 by the external transport device (not shown) is
placed on one of the loading port platforms 80a, 80b. In this state, the
first hand 230 or the second hand 240 of the transport device 200
advances/retreats to/from the loading port 80 (see the thick dotted arrow
of FIG. 12). Accordingly, the carrier F placed on the one of the loading
port platforms 80a, 80b is held by the first hand 230 or the second hand
240, and carried in the substrate processing apparatus 1.

[0205] At the time of carrying the carrier F from the substrate processing
apparatus 1 to the outside, the given number of substrates W after
processing is stored in the carrier F placed on one of the openers 21c,
21d, so that the first transport frame 210 of the transport device 200
moves to a position opposite to the one of the openers 21c, 21d. In this
state, the first hand 230 or the second hand 240 of the transport device
200 advances/retreats to/from the one of the openers 21c, 21d (see the
thick solid arrow of FIG. 12). Accordingly, the carrier F placed on the
one of the openers 21c, 21d is held by the first hand 230 or the second
hand 240.

[0206] The held carrier F is transported to the loading port 80 through
the inside of the transport device 200 (the inside of the second
transport frame 220 of FIG. 4) by the first hand 230 or the second hand
240, and placed on any of the loading port platforms 80c, 80d. The
carrier F placed on the one of the loading port platforms 80c, 80d is
carried out to the outside of the substrate processing apparatus 1 by the
external transporting device.

[0207] As described above, the height of each of the loading port
platforms 80a to 80d is substantially equal to the height of each of the
platforms 21f of openers 21a to 21d. This eliminates the need to move the
carrier F in the vertical direction (Z-direction) when the carrier F is
transported between the loading port platforms 80a to 80d and the openers
21a to 21d. As a result, the transport path of the carrier F by the
transport device 200 is shortened, and the time for transporting the
carrier F in the storage device 2 is shortened.

[0208] (7-b) While the transport device 200 of the storage device 2
includes the first and second hands 230, 240 in the foregoing
embodiments, the present invention is not limited to this. The transport
device 200 may include a larger number of hands.

[0209] FIG. 13 is a diagram for use in illustrating a transport device 200
including three hands. In FIG. 13, a third hand 250 in addition to the
first and second hands 230, 240 is provided in the second transport frame
220 of the transport device 200.

[0210] In this case, another carrier F can be held by the other hand even
during the exchange operation of the carriers F using the two hands.
Accordingly, when the carrier F cannot be placed on any of the plurality
of openers 21a to 21d, the receiving shelf 22a, the passing shelf 22b and
the keeping shelves 22c to 22f, for example, at least one carrier F can
be held by the other hand in the second transport frame 220.

[0211] When the exchange operation of the carriers F is sequentially
performed in two adjacent openers, for example, carriers F for exchange
(other carriers F) for the respective openers are held in advance by the
two hands.

[0212] In this case, the exchange operation of the carriers F is performed
using the hand not holding the carrier F and one hand holding the carrier
F on one opener, and the transport device 200 then moves to a position of
the other opener. Then, the exchange operation of the carriers F using
the hand not holding the carrier F and the other hand holding the carrier
F can be performed on the other opener. As a result, the transport paths
of the plurality of carriers F by the transport device 200 are shortened,
and the time for transporting the carriers F in the storage device 2 is
further shortened.

[0213] (7-c) While the first and second hands 230, 240 of the transport
device 200 are provided in the second transport frame 220 via the third
and fourth moving mechanisms M3, M4, respectively, in the above-described
embodiment, the present invention is not limited to this. The first and
second hands 230, 240 may be provided in the first transport frame 210
via the third and fourth moving mechanisms M3, M4, respectively.

[0214] In this case, the second transport frame 220 is not required,
resulting in a simplified configuration of the transport device 200.

[0215] While the first hand 230 and the second hand 240 are configured to
move on the different rails 220R in the above-described embodiment, the
first hand 230 and the second hand 240 may be configured to move on a
common rail.

[0216] (7-d) While the substrates W are taken out from the carriers F on
the openers 21a, 21b, and the substrates W are stored in the carriers F
on the openers 21c, 21d in the foregoing embodiments, the present
invention is not limited to this. The substrates W may be taken out from
the carriers F and stored in the carriers F on all the openers 21a to
21d.

[0217] In this case, the carriers F storing the substrates W before
processing are placed on the openers 21a to 21d, and the substrates W
before processing are taken out from the placed carriers F by the indexer
robot 34 of FIGS. 1 and 3. After all the substrates W before processing
are taken out from the carriers F and the carriers F become empty, the
substrates W after processing are stored in the empty carriers F by the
indexer robot 34. Then, the carriers F storing the given number of
substrates W after processing are taken out from the openers 21a to 21d.

[0218] (7-e) While description is made of the example in which the main
controller 39 that controls the components of the storage device 2 is
provided in the indexer block 3 in the above-described embodiment, the
present invention is not limited to this. The main controller 39 may be
provided in the storage device 2.

[0219] A slave controller that controls the components of the storage
device 2 may be provided in the storage device 2. Accordingly, the
storage device 2 can be easily applied to the existing substrate
processing apparatus 1. In this case, the slave controller of the storage
device 2 is controlled by the main controller 39.

[0220] (7-f) While description is made of the example in which the coating
processing unit for resist film, the thermal processing unit and the
development processing unit are included in the processing units 4U in
the above-described embodiment, the present invention is not limited to
this.

[0221] The processing units 4U may include a washing processing unit that
washes the surface of the substrate W. The processing unit 4U may include
a coating processing unit for anti-reflection film that forms an
anti-reflection film on the surface of the substrate W, and may include a
coating processing unit for protection film that forms various protection
films for protecting the surface of the substrate W.

[0222] (7-g) While description is made of the example in which the FOUP is
used as the carrier F in the above-described embodiments, the present
invention is not limited to this. SMIF (Standard Mechanical Interface)
pods and OCs (Open Cassettes) that hold and expose the stored substrate
to outside air can be also used.

(8) Correspondences Between Elements in the Claims and Parts in
Embodiments

[0223] In the following paragraphs, non-limiting examples of
correspondences between various elements recited in the claims below and
those described above with respect to various preferred embodiments of
the present invention are explained.

[0224] In the foregoing embodiments, the carrier F is an example of a
substrate storing container, the indexer block 3, the processing block 4
and the interface block 5 are an example of a main body, the platforms
21f of the openers 21a to 21d, the receiving shelf 22a, the passing shelf
22b, and the plurality of keeping shelves 22c to 22f are examples of a
plurality of platforms.

[0225] The first hand 230 is an example of a first holder, the second hand
240 is an example of a second holder, the first transport frame 210, the
rail 200R and the first moving mechanism M1 are an example of a
horizontal moving mechanism.

[0226] The first transport frame 210, the second transport frame 220, the
pair of rails 210R, the pair of rails 220R and the second to fourth
moving mechanisms M2 to M4 are an example of a vertical moving mechanism.

[0227] The second transport frame 220 is an example of a support body, the
second moving mechanisms M2 are an example of a support body vertical
moving mechanism, one of the pair of rails 220R and the third moving
mechanism M3 are an example of a first holder moving mechanism, the other
one of the pair of rails 220R and the fourth moving mechanism M4 are an
example of a second holder moving mechanism, the side plates 222 used in
a pair are examples of first and second support members, respectively,
and the main controller 39 is an example of a controller.

[0228] As each of various elements recited in the claims, various other
elements having configurations or functions described in the claims can
be also used.

[0229] While preferred embodiments of the present invention have been
described above, it is to be understood that variations and modifications
will be apparent to those skilled in the art without departing the scope
and spirit of the present invention. The scope of the present invention,
therefore, is to be determined solely by the following claims.

Patent applications by Jun Yamamoto, Kyoto-Shi JP

Patent applications by Kensaku Onishi, Kyoto-Shi JP

Patent applications by Yukihiko Inagaki, Kyoto-Shi JP

Patent applications in class Means to convey load back and forth between initial location and station

Patent applications in all subclasses Means to convey load back and forth between initial location and station