AlOx thickness of ~1 nm analyzed by HRTEM, Z-contrast STEM, zero-loss image was in good agreement with that by X-ray Reflectometry. EELS-TEM and EDS-STEM gave a larger AlOx thickness mainly due to chromatic aberration for EELS, and both probe size and multiple scattering for EDS. X-ray reflectometry method is very useful for thickness calibration.

1. Non-destuctive 2. Good statistics average info over cm2 (irradiation area) 3. High resolution ~0.01 nm 4. Free from limitations in measurement environment 5. Easy to apply any type of samples Crystals/Non-Crystals Organic/Inorganic Constructing proper models for the analysis is crucial. The parameters obtained by fitting should be carefully examined.