A
stage capable of handling 300/200mmų wafers has been integrated
with a robust microscope frame with excellent rigidity and
high vibration resistance created through computer-aided structural
analysis to enable this microscope to perfectly meet the need
for inspection of wafers, which are being progressively increased
in size.
* CF Infinity Corrected optical system
* Excellent rigidity throughout the microscope
* Outstanding ease of operation
* Complete anti-contamination design