Sonoscan, Inc., will demonstrate the functionality of its new AW300™ series robotic bonded wafer handler at Semicon West in San Francisco's Moscone Center from July 14 to July 16.

The new system extends the 10-year legacy of Sonoscan's Automated Wafer (AW) inspection systems, the first of which was made in 1999, based on C-SAM® proven technology.

The AW300 carries out robotic handling and acoustic imaging of bonded wafer pairs up to 300mm in diameter. Acoustic imaging is a critical step for finding tiny but lethal defects that can occur in bonded wafers. Robotic handling makes it unnecessary for operators to handle the wafer pairs.

In addition, the AW300 uses twin transducers to scan two wafer pairs simultaneously. At the same time, the two previously scanned wafers are being dried and returned to their carriers. Four wafer pairs are thus being processed at the same time.

The result is very high throughput for 300mm wafers. High operating speed, combined with very high resolution Sonoscan technology transducers, gives tremendous leverage in identifying defects that can harm both yield and reliability in wafer pairs that often contain thousands of devices.

The AW300 is integrated with an industry standard and proven EFEM (Equipment Front End Module) that is SECS/GEM ready, accommodates single or multiple load ports and utilizes either vacuum or edge grip end effectors. The scanner system utilizes linear motors and is inertially balanced for vibration free operation.

For more information, contact Steve Martell, Manager of Technical Support Services.

About Sonoscan®: Sonoscan is the leading developer and manufacturer of acoustic microscopes and sophisticated acoustic micro imaging systems, widely used for nondestructive analysis of defects in industrial products and semiconductor devices. For over 30 years, Sonoscan’s attention to customer needs and investment in R&D has created systems that set industry standards for speed and accuracy. Key products include C-SAM® systems for off-line and laboratory analysis and FACTS2™ for automated production inspection.

Through its SonoLab division Sonoscan applications engineers, with experience totaling more than two centuries in acoustic microscopy, assist hundreds of customers annually in solving materials problems and quality control issues. SonoLab operates applications testing laboratories in multiple global locations to serve the inspection needs of customers that do not have their own capability.