Microbeams

Abstract

Microbeams are perhaps the most commonly used structural component in MEMS. Microbeams form the backbone of a wide range of devices including resonators, resonant sensors, actuators, filters, atomic force microscope probes, and RF switches . They are also used as spring elements with other microstructures and MEMS components, such as comb-drive actuators. Because of their special place in MEMS, this chapter deals with the static and dynamic behavior and phenomena of microbeams in some depth.

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