DCM-40/60

Double View Microscope (applicable to wafers up to 4 and 6 inches in diameter)

DCM-40/60 are unique microscope systems superimposing top and bottom patterns of specimen (wafer) in the view field of microscope, then comparing shift to measure the shift length by measuring system. Since the objective lenses installed at top and bottom are 5 types, ranging from 50X to 1000X in total magnification, various specimens can be observed.

DCM-60

DCM-40

Objectives(To be selectedby customer)

(Total Magnification)

(50X)

(100X)

(200X)

(400X)

Top

PLM5X

PLM10X

PLLWDM20X

PLLWDM40X

Bottom

PLM5X

PLM10X

PLLWDM20X

PLLWDM40X

Eyepiece

A pair of SUW10X(including Micrometer Reticle)

A pair of UW10X(including Micrometer Reticle)

Total Magnification

50X to 400X (Larger Magnifications are available on custom-order basis.)