Semiconductor

Solutions for the Semiconductor industry

A leader in innovation

For over 40 years, Conax has been the leader in the design and manufacture of temperature sensors and vacuum seal fittings and feedthroughs for a broad range of applications across the semiconductor industry. Our expertise has helped us develop custom solutions for our customers, as well as ground-breaking technology like our exclusive EtchDefender™.

Longer TC life and lower annual spend with EtchDefender™ Technology

Our patent-pending EtchDefender™ coating extends the life of quartz thermocouple sheaths in ASM® EPSILON® epitaxial reactors up to 3X longer and reduces your annual spend by over 30%.

This leading-edge technology was tested extensively both in a laboratory setting and in a production environment at a major wafer manufacturing facility. Using TCs coated with EtchDefender™ allows a tool to run continuously and reduces maintenance cycles, consistently resulting in:

Increased process uptime

Reduced process variation, so more wafers can be produced per tool with higher
consistency

Reduced labor and increased safety

Decreased risk of technicians igniting pyrophoric deposits as a result of reduced
maintenance requirements

Decreased exposure of the chamber to oxygen, resulting in less time needed to purge the oxygen from all surfaces in SiGe applications

Profile and Spike Thermocouples for all the leading furnaces

Conax also offers standard or custom designed Profile and Spike Thermocouples for vertical and horizontal furnaces. Our high-precision temperature sensors are engineered to address the critical process of temperature measurement and control required for the semiconductor, photovoltaic and LED industries.

Standard and custom designed Pressure/Vacuum Feedthroughs

Conax Technologies designs and manufactures Pressure/Vacuum Feedthroughs for any application or equipment, including:

Your indispensable partner

We know that innovative ideas come from collaboration. By taking the time to understand your unique challenges, we develop the ideal solutions that help you—and your customers—succeed. Our commitment to providing quality, innovative products on time and at a competitive cost continue to make us an indispensable partner for every customer we serve.

Customer loyalty

Customer satisfaction and loyalty fuels everything we do. Conax is proud to maintain a Net Promoter Score that is consistently in the 99th percentile, an achievement that less than 5% of other companies in the industry can match.