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Abstract:

Method of making a touch sensor including one or more multilayer
electrodes and an underlayer disposed on a substrate. The underlayer is
disposed between the multilayer electrodes and the substrate. The
multilayer electrodes including at least two transparent or
semitransparent conductive layers separated by a transparent or
semitransparent intervening layer. The intervening layer includes
electrically conductive pathways between the first and second conductive
layers to help reduce interfacial reflections occurring between
particular layers in devices incorporating the conducting film or
electrode.

Claims:

1. A method of making a sensor component for use in a contact-sensitive
device, the method comprising: patterning a substrate with a lift-off
mask to produce patterned substrate; applying an underlayer layer to the
patterned substrate; applying a multilayer electrode layer to the
underlayer layer, wherein the multilayer electrode layer comprises a
first transparent or semitransparent conductive layer, a second
transparent or semitransparent conductive layer, and a transparent or
semitransparent intervening layer located between the first and second
conductive layers, the intervening layer including electrically
conductive pathways between the first and second conductive layers; and
removing the liftoff mask.

8. The method of claim 1, wherein patterning comprises a negative of a
honeycomb pattern.

9. The method of claim 1, wherein patterning comprises a negative of a
diamond pattern.

10. The method of claim 1, wherein the first and second conductive layers
each comprise a transparent or semitransparent conductive oxide.

11. The method of claim 10, wherein the electrically conductive pathways
comprise conductive links extending through apertures between the first
and second conductive layers.

12. The method of claim 1, wherein applying an underlayer comprises
applying a first sub-layer, then applying a second sub-layer, the first
and second sub-layers having indexes of refraction different than one
another.

13. The method of claim 12, wherein applying an underlayer further
comprises applying a plurality of additional sub-layers.

Description:

CROSS REFERENCE TO RELATED APPLICATIONS

[0001] This application claims the benefit of U.S. Provisional Patent
Application No. 61/495,214, "Method of Making Touch Sensitive Device With
Multilayer Electrode And Underlayer", filed Jun. 9, 2011, the disclosure
of which is incorporated by reference herein in its entirety.

[0003] Touch screens offer a simple and intuitive way for users to
interact with computing devices, often by signaling a command by touching
a transparent touch sensor overlaid upon a display. Touch sensors are
typically constructed of single-layer electrodes formed of a transparent
conductive oxide.

SUMMARY

[0004] A touch sensor having one or more conducting multilayer electrodes,
consistent with the present invention, includes a substrate, a patterned
underlayer, and a plurality of multilayer electrodes, each multilayer
electrode comprising two transparent or semitransparent conductive layers
separated by a transparent or semitransparent intervening layer. The
underlayer can function as a vapor and/or diffusion barrier layer,
limiting outgassing or other contaminants from the substrate from
negatively affecting the first conductive layer. The underlayer can
function as a coupling layer promoting adhesion between the substrate
layer and the conductive layer. The underlayer can function as a
nucleating layer promoting the growth of the conductive layer, and
achieving an improved microstructure. By using an underlayer with lower
index of refraction than the substrate, the contrast between patterned
and unpatterned areas can be decreased.

[0005] The intervening layer, situated between two conductive layers,
includes electrically conductive pathways between the two conductive
layers. Such an electrode construction in some embodiments helps reduce
interfacial reflections occurring in a device incorporating the same. The
intervening layer also improves the durability of the conductive layers
under conditions of flexing and bending. Use of the intervening layer and
the conductive pathways between the conductive layers allows for thinner
individual conductive layers. The thinner individual conductive layers
are more flexible than a single conductive layer of the same combined
conductive layer thickness. Flexing a single thick conductive layer would
cause cracking under conditions where the two thinner conductive layers
would survive intact. The conductive pathways between the two conductive
layers also provide redundant electrical pathways such that cracking in
one conductive layer will not lead to overall loss of conductivity. In a
single thick conductive layer, cracking can lead to open circuits and
premature device failure. The intervening layers may be chosen to
optimize the overall flexibility of the conducting film.

BRIEF DESCRIPTION OF THE DRAWINGS

[0006] The accompanying drawings are incorporated in and constitute a part
of this specification and, together with the description, explain the
advantages and principles of the invention. In the drawings,

[0008] FIG. 2 shows a cross section of a portion of a touch panel used in
an exemplary touch sensitive device;

[0009] FIG. 3 shows a cross section of a portion of a touch panel used in
an exemplary touch sensitive device;

[0010] FIG. 4 is a diagram of a multilayer electrode having an intervening
layer with conductive paths and an underlayer;

[0011]FIG. 5 is a diagram of a multilayer electrode having an intervening
conductive layer and an underlayer;

[0012] FIG. 6 is a diagram of a multilayer electrode having an intervening
layer with conductive particles dispersed in a binder and an underlayer;

[0013] FIG. 7 is a diagram of a multilayer electrode having multiple
intervening layers and an underlayer;

[0014]FIG. 8A is a diagram of a multilayer electrode having multiple
intervening layers and an underlayer;

[0015]FIG. 8B is a diagram of a cross-section of a matrix-type touch
screen at a node, showing an X-axis multilayer electrode having multiple
intervening layers and an underlayer, and a Y-axis multilayer electrode
having multiple intervening layers and an underlayer;

[0016] FIG. 9A-C show various patterns the which the multilayer electrodes
and underlayer may be embodied; and,

[0017] FIG. 10 shows a plan view of a multilayer electrode and underlayer
pattern for a matrix-type touch screen prototype.

[0018] FIG. 11 is a diagram of an underlayer comprised of a plurality of
sub-layers.

DETAILED DESCRIPTION

[0019] Embodiments of the present invention relate to touch sensors having
multilayer electrodes and a patterned underlayer disposed between the
multilayer electrodes and a substrate.

[0020] The multilayer electrode / patterned underlayer combination can be
used within any sensor or display where, for example, reflections
resulting between layers are detrimental to device performance. The
substrate may be anything suitable, such as glass or PET. The multilayer
electrodes / patterned underlayer combination may also be incorporated
into non-transparent touch sensors. The multilayer electrode and
underlayer may be patterned to embody bars, triangles, honeycombs, or any
other suitable pattern. The pattern of the underlayer may be the same as,
similar to, or different than the pattern of the multilayer electrodes.
The sensors may be coupled to electronic components that detect changes
in inter-electrode, or electrode-to ground capacitance, and thereby
determine the coordinates of a touch or near touch.

[0021] The underlayer can function as a vapor and/or diffusion barrier
layer, limiting outgassing or other contaminants from the substrate or a
patterning material on the substrate from negatively affecting the first
conductive layer. The underlayer can function as a coupling layer
promoting adhesion to a transparent conductive oxide (TCO) layer, such as
indium tin oxide (ITO). The underlayer can function as a nucleating layer
promoting the growth of the ITO layer and achieving an improved
microstructure. By using an underlayer with lower index of refraction
than the substrate, the contrast between patterned and unpatterned areas
can be decreased.

[0022] The multilayer electrodes include two or more conductive layers
having a particular refractive index with intervening conductive or
insulating layers having a different refractive index and having
electrically conductive pathways. The conductive layers and intervening
layers are each transparent or semitransparent. The thicknesses of the
individual layers and the optical indexes of refraction of the individual
layers within the electrode stack are tuned to minimize unwanted Fresnel
reflections when these substrates are incorporated within touch sensor.
In one embodiment, the conductive layers of the multilayer electrode are
symmetric, meaning they have the same thickness. In other embodiments,
the conductive layers can have different thicknesses. Conductive layers
and intervening layers are described in U.S. patent application Ser. No.
12/639,363, "Touch Sensitive Device with Multilayer Electrode Having
Improved Optical and Electrical Performance," filed Dec. 16, 2009, the
contents of which are incorporated herein by reference.

[0023] In FIG. 1, an exemplary touch device 110 is shown. The device 110
includes a touch panel 112 connected to electronic circuitry, which for
simplicity is grouped together into a single schematic box labeled 114
and referred to collectively as a controller. The touch panel 112 is
shown for simplicity as having a 5×5 matrix of column electrodes
116a-e and row electrodes 118a-e, but other numbers of electrodes and
other matrix sizes can also be used, as well as other electrode patterns,
including non-matrix type patterns such as single, non-patterned layers
as are used in surface capacitive type touch sensors. The column and row
electrodes are multilayer electrodes, as will be further described below,
and are disposed upon a substrate (not shown in FIG. 1), with an
underlayer separating the electrodes from the substrate. The underlayer
is described later in this description. In the embodiment shown in FIG.
1, the underlayer has a pattern corresponding to column (lower)
electrodes.

[0024] The sensor stack (that is, the substrate layer, the underlayer, and
the multilayer electrodes) on panel 112 yields improved electrical and
optical properties in some embodiments, compared with some embodiments of
the prior art. Panel 112 is typically substantially transparent so that
the user is able to view an object, such as the pixilated display of a
computer, television, hand-held device, mobile phone, or other peripheral
device, through panel 112. Boundary 120 represents the viewing area of
panel 112 and also preferably the viewing area of such a display, if
used. The multilayer electrodes 116a-e, 118a-e are spatially distributed,
from a plan view perspective, over the viewing area 120. For ease of
illustration the multilayer electrodes are shown to be wide and
obtrusive, but in practice they may be relatively narrow and
inconspicuous to the user. Further, they may be designed to have variable
widths, for example, an increased width in the form of a diamond- or
other-shaped pad in the vicinity of the nodes of the matrix in order to
increase the inter-electrode fringe field and thereby increase the effect
of a touch on the electrode-to-electrode capacitive coupling. From a
depth perspective, the column electrodes may lie in a different plane
than the row electrodes (from the perspective of FIG. 1, the column
multilayer electrodes 116a-e lie underneath the row multilayer electrodes
118a-e) such that no significant ohmic contact is made between column and
row electrodes, and so that the only significant electrical coupling
between a given column electrode and a given row electrode is capacitive
coupling. The matrix of multilayer electrodes typically lies beneath a
cover glass, plastic film, hardcoat, or the like, so that the electrodes
are protected from direct physical contact with a user's finger or other
touch-related implement. An exposed surface of such a cover glass, film,
or the like may be referred to as a touch surface. Configurations of
touch sensitive devices other than matrix are also possible using the
multilayer electrodes described herein. For example, capacitive buttons
comprising two electrodes disposed on a surface to come sufficiently
close to one another within the area of the button to have capacitive
coupling. These two electrodes (one or both being multilayer electrodes)
may be on the same plane, formed in the same layer as one another. Also,
rather than the matrix (comprised of a plurality of electrodes), other
configurations such as a single sheet-type electrode are also possible.
Such sheet-type electrodes are sometimes used in surface capacitive type
sensors, and the electrode is an un-patterned coating that substantially
covers the entire touch surface. Generally speaking, most known electrode
configurations are possible using the multilayer electrodes described
herein.

[0025] The underlayer that separates the substrate from the
electrode-containing layers may be uniformly disposed across the entire
substrate layer, or it may be patterned to only be between the substrate
layer and either or both of the column electrodes or the row electrodes.
In other words, the underlayer may itself have a pattern related to,
based upon, or similar to the pattern of the electrode-containing layers.

[0026] In exemplary embodiments each of the multilayer electrodes (116a-e,
118a-e) may be composed of two or more conductive layers having a
particular refractive index and an intervening conductive layer having a
different refractive index and having electrically conductive pathways.
In an exemplary embodiments, a patterned underlayer having a pattern
corresponding to the pattern of the lower multilayer electrode array is
disposed between the lower multilayer electrode array and the substrate.

[0027] Other embodiments include a common substrate arrangement, where row
multilayer electrodes are disposed on a first side of a substrate, and
column multilayer electrodes are disposed on the second side of the
substrate. In such an embodiment, a patterned underlayer corresponding to
the pattern of, respectively, the row multilayer electrodes or the column
multilayer electrodes is disposed on both the first and second sides of
the substrate, thereby separating the electrodes on either side from the
substrate

[0028] The capacitive coupling between a given row and column electrode is
primarily a function of the geometry of the electrodes in the region
where the electrodes are closest together. Such regions correspond to the
"nodes" of the electrode matrix, some of which are labeled in FIG. 1. For
example, capacitive coupling between column multilayer electrode 116a and
row multilayer electrode 118d occurs primarily at node 122, and
capacitive coupling between column multilayer electrode 116b and row
multilayer electrode 118e occurs primarily at node 124. The 5×5
matrix of FIG. 1 has 25 such nodes, any one of which can be addressed by
controller 114 via appropriate selection of one of the control lines 126,
which individually couple the respective column multilayer electrodes
116a-e to the controller, and appropriate selection of one of the control
lines 128, which individually couple the respective row multilayer
electrodes 118a-e to the controller.

[0029] In a mutual capacitance-type system, when a finger 130 of a user or
other touch implement comes into contact or near-contact with the touch
surface of the device 110, as shown at touch location 131, the finger
capacitively couples to the electrode matrix. The finger draws charge
from the matrix, particularly from those electrodes lying closest to the
touch location, and in doing so it changes the coupling capacitance
between the electrodes corresponding to the nearest node(s). For example,
the touch at touch location 131 lies nearest the node corresponding to
multilayer electrodes 116c/118b. Preferably, the controller is configured
to rapidly detect the change in capacitance, if any, of all of the nodes
of the matrix, and is capable of analyzing the magnitudes of capacitance
changes for neighboring nodes so as to accurately determine a touch
location lying between nodes by interpolation. Furthermore, the
controller 114 advantageously is designed to detect multiple distinct
touches applied to different portions of the touch device at the same
time, or at overlapping times. Thus, for example, if another finger 132
touches the touch surface of the device 110 at touch location 133
simultaneously with the touch of finger 130, or if the respective touches
at least temporally overlap, the controller is preferably capable of
detecting the positions 131, 133 of both such touches and providing such
locations on a touch output 114a.

[0030] Many possible drive and detection routines are possible and known
in the art. A capacitance-to-ground type system measures changes in
capacitance to ground occurring near nodes of the electrode matrix,
rather than capacitance between electrodes.

[0031] Turning now to FIG. 2, we see there a schematic side view of a
portion of a multilayer touch sensor 210 for use in a touch device, such
as device 110 of FIG. 1. Touch sensor 210 includes upper layer 212 (which
would be the layer closest to the user, and the upper surface 212a of
which would define the touch area of a touch sensor), which could be
glass, PET, or a durable coating. Upper electrode layer 214 comprises a
first set of multilayer electrodes. Dielectric layer 216 separates upper
electrode layer from lower electrode layer 218, which also comprises a
set of multilayer electrodes 218a-e, which in one embodiment are
orthogonal to the first set of electrodes. Dielectric, such as an
optically clear adhesive, may fill in spaces between multilayer electrode
218a-e, depending on particulars of construction. In some embodiments,
the upper and lower electrodes are not orthogonal to one another.
Underlayer 51 is shown patterned in a manner corresponding to the pattern
of lower electrode layer 218. It separates the multilayer electrodes of
electrode layer 218 from lower layer 220. A similar "overlayer" may be
disposed between upper layer 212 and electrodes of upper electrode layer
214, but it is not shown in FIG. 2. Lower layer 220 in this FIG. 2 is the
substrate layer, and may, like the upper layer, be glass, PET, or other
material. The exposed surface 212a of upper layer 212, or the exposed
surface 220a of lower layer 220, may be or include the touch surface of
the touch sensor 210. This is a simplified view of the stack that makes
up the touch sensor; more or fewer layers and other intervening layers
are possible.

[0032] Turning now to FIG. 3, we see sensor stack 10, a schematic three
dimensional view of a portion of a multilayer touch sensor 210 for use in
a touch device, such as device 110 of FIG. 1. The cross section of FIG. 3
corresponds to that which would be seen at, for example, node 122 or 124
of FIG. 1, and includes upper layer 212, electrode layer 214, dielectric
layer 216, electrode layer 218, underlayer 51, and lower layer 220. The
light reflected by an electrode includes the planar reflection and
unwanted Fresnel reflections at each layer interface due to refractive
index mismatches, represented by reflections 24, 26, 27, 28, and 29.
Fresnel reflections are typically broadband and hence degrade the color
saturation of the display. Light reflected by an electrode includes
scattering and the interfacial Fresnel reflections. These reflections
degrade the black level of an underlying display and hence the contrast
ratio. They also make the electrodes within the sensor more noticeable to
a user especially when the display is off or set to a single color in a
region greater than an electrode.

[0033] The magnitude of the Fresnel reflection depends on the ratio of
refractive indices at the layer interface. At normal incidence it is
determined by the following equation:

R = ( n - 1 n + 1 ) 2 ; ##EQU00001## n = n 2 n 1
##EQU00001.2##

where n is the relative index of the two media with refractive indices
n2, n1. Fresnel reflections are strongest at interfaces with the highest
relative index. For example, when approximate refractive indices of the
various layers of sensor stack 10 shown in FIG. 3 are n=2.0 for the
electrodes and n=1.65 for the substrate, the highest index step would
occur, in the absence of an underlayer, at the interfaces between the ITO
electrode layer and the polyethylene terephthalate (PET) substrate layer.
The underlayer thus separates these two layers which may improve optical
qualities associated with the sensor. Note that sensor stack 10 includes
an ITO/PET interface between upper layer 212 and electrode layer 214. The
underlayer, described herein, could also be used as an overlayer,
disposed between upper layer 212 and electrode layer 214.

[0034] The multilayer electrode design of embodiments of the present
invention yields both good optical and electrical performance. The
intervening dielectric layer in the multilayer electrode design is a
transparent or semitransparent layer having electrically conductive
pathways that enable electrical contact between the two conductive
layers. The pathways may form naturally by controlling the thickness and
deposition conditions of the intervening layer. The chemical and physical
properties of the first conductive layer nearest the substrate may also
be adjusted to enable formation of these pathways by changing the wetting
properties of the intervening layer such that the intervening layer is
discontinuous to allow electrical contact between the adjacent layers.
Alternatively, the pathways could be created using techniques such as
laser ablation, ion bombardment or wet/dry etching.

[0035] The intervening layer may be deposited using vapor deposition
techniques such as sputtering, e-beam, and thermal evaporation. The
intervening layer can include polymers, including copolymers, such as
polyacrylates, polymethacrylates, polyolefins, polyepoxides, polyethers,
and the like, and inorganic materials such as metal oxides, nitrides,
carbides, and mixtures thereof. Preferred non conductive intervening
layers include polyacrylates and silicon oxides. The intervening layer
may also be formed using solution coating. An ultrabarrier film process,
in which a monomer is evaporated onto the substrate and cured in-situ,
may also be used. Ultrabarrier films include multilayer films made, for
example, by vacuum deposition of two inorganic dielectric materials
sequentially in a multitude of layers on a glass or other suitable
substrate, or alternating layers of inorganic materials and organic
polymers, as described in U.S. Pat. Nos. 5,440,446; 5,877,895; and
6,010,751, all of which are incorporated herein by reference as if fully
set forth.

[0036] One embodiment is shown as a stack 40 of FIG. 4. The multilayer
electrode includes two high index conductive layers 42 and 50 of
transparent conductive oxide (TCO) or semitransparent conductive oxide
separated by a lower index transparent or semitransparent layer 46 having
electrically conductive pathways comprising conductive links 44 extending
through apertures 48 in transparent layer 46 to connect the electrodes 42
and 50. A substrate 52 provides support for the electrode. The layers are
drawn apart to illustrate the concept.

[0037] Underlayer 51 provides, in one embodiment, an optical matching
layer between neighboring layers of the sensor stack. Underlayer 51 may
be deposited using vapor deposition techniques such as sputtering,
e-beam, and thermal evaporation. The underlayer can include polymers,
including copolymers, such as polyacrylates, polymethacrylates,
polyolefins, polyepoxides, polyethers, and the like, and inorganic
materials such as metal oxides, nitrides, carbides, and mixtures thereof.
Preferred non conductive intervening layers include polyacrylates and
silicon oxides, and in particular SiAlOx or SiOx. The underlayer may also
be formed using solution coating. If the underlayer is patterned then it
may be conductive. The ideal index for the underlayer depends on the
index of the substrate end the effective index of neighboring layers.
Other suitable underlayers include barrier films and ultrabarrier films.
An example of a barrier film is described in U.S. Pat. No. 7,468,211,
which is incorporated herein by reference as if fully set forth. An
ultrabarrier film process, in which a monomer is evaporated onto the
substrate and cured in-situ, may also be used. Ultrabarrier films include
multilayer films made, for example, by vacuum deposition of two inorganic
dielectric materials sequentially in a multitude of layers on a glass or
other suitable substrate, or alternating layers of inorganic materials
and organic polymers, as described in U.S. Pat. Nos. 5,440,446;
5,877,895; and 6,010,751, all of which were earlier incorporated herein
by reference as if fully set forth.

[0038] Patterning the underlayer in one embodiment may be accomplished in
several ways. For example, a photoresist may be patterned on an
underlayer continuously disposed upon a substrate, and the underlayer
subsequently etched, and the photoresist then stripped, revealing a
pattern of underlayer in areas where the etchant has not bade contact due
to the presence of the photoresist. In another embodiment, a water
soluble ink, such as that described in U.S. Pat. No. 4,714,631, "Rapidly
Removable Undercoating for Vacuum Deposition of Patterned Layers onto
Substrates," the contents of which are incorporated by reference in its
entirety, may be used as a liftoff mask. In such a method, the liftoff
mask is applied before the underlayer, in areas of the substrate where
there is eventually to be devoid of underlayer. The underlayer may then
be uniformily applied across the substrate using techniques mentioned
above or those known in the art. Water may then be used to remove areas
of the stack that include the liftoff mask, leaving patterned underlayer
in the areas not so removed. It is also possible to pattern both the
conductive multilayer electrode layers and the underlayer using the same
liftoff mask, thereby achieving the same pattern for both layers. In such
a process, the underlayer is applied to the liftoff mask as mentioned
earlier, then a continuous layer of multilayer electrode material is
applied to the underlayer, then the stack washed in a water bath.

[0039] Similar techniques may be applied to embodiments where multilayer
electrodes exist on different sides of a common substrate.

[0040] In embodiments referred to earlier having both an underlayer and an
overlayer, the overlayer may have a construction the same as set forth
herein for the underlayer. In some embodiments, the underlayer and the
overlayer are of differing constructions.

[0041] In another embodiment, the intervening layer is a transparent or
semitransparent conductor with a lower refractive index than the
conductive layers on either side, as shown in stack 54 of FIG. 5. The
same underlayer 51 is seen in FIG. 5, as described with respect to FIG.
4. In the multilayer electrode included in stack 54, the intervening
conductive layer 58 may provide continuous electrically conductive
pathways between the two adjacent conductive layers 56 and 60 of TCO or
semitransparent conductive oxide. A substrate 62 provides support for the
multilayer electrode. The intervening layer 58 may comprise a solution
coated or electro-deposited conductive polymer. It can also be a vapor
deposited transparent conductor. Conducting polymers include the
following exemplary materials: polyaniline; polypyrrole; polythiophene;
and PEDOT/PSS (poly(3,4-ethylenedioxythiophene)/polystyrenesulfonic
acid). The combined thickness of the conductive layers is constrained by
the sheet resistance requirements while the thicknesses of the individual
layers are optimized for the desired optical properties.

[0042] In yet another embodiment, the intervening layer comprises
conductive particles dispersed in a binder, as shown in stack 64 of FIG.
6. The conductive particles 70 in binder 68 provide conductive pathways
between the conductive layers 66 and 72 of TCO or semitransparent
conductive oxide, thus forming the multilayer electrode. The same
underlayer 51 as described earlier is present in this embodiment. A
substrate 74 provides support for the stack. The binder can be conductive
or insulating. The conductive particles can be organic, inorganic, or
metallic. Conductive particles also include metal coated particles. The
refractive index of the intervening layer can be adjusted by varying the
volume fractions of the binder and conductive particles.

[0043] The matrix and embedded conducting nanoparticles for the multilayer
electrodes can include the following. The matrix can include any
transparent or semitransparent (conductive or insulating) polymer (e.g.,
acrylates, methacrylates, or the conducting polymers listed above), or a
transparent or semitransparent inorganic material either conductive (such
as the TCOs listed above) or insulating (SiO2, silicon nitride
(SixNy), Zinc Oxide (ZnO), aluminum oxide
(Al2O3), or magnesium fluoride (MgF2)). The conducting
nanoparticles can include conducting polymers such as those listed above,
metals (e.g., silver, gold, nickel, chrome), or metal coated particles.
If the matrix is conductive then the nanoparticles can be insulating, in
particular they can be nanoparticles of the insulating materials listed
above (e.g., SiO2, silicon nitride, zinc oxide, or other insulating
materials.)

[0044] Substrates layers for devices using the multilayer electrodes can
include any type of substrate material for use in making a display or
electronic device. The substrate can be rigid, for example by using glass
or other materials. The substrate can also be curved or flexible, for
example by using plastics or other materials. Substrates can be made
using the following exemplary materials: glass; polyethylene
terephthalate (PET); polyethylene napthalate (PEN); polycarbonate (PC);
polyetheretherketone (PEEK); polyethersulphone (PES); polyarylate (PAR);
polyimide (PI); poly(methyl methacrylate) (PMMA); polycyclic olefin
(PCO); cellulose triacetate (TAC); and polyurethane (PU).

[0047] While the embodiments described above include two transparent or
semitransparent conductive layers separated by an intervening layer,
additional transparent or semitransparent conductive and intervening
layers may be added depending on the desired optical and electrical
properties, as shown in FIGS. 7 and 8A. Stacks 76 and 90 shown in FIGS. 7
and 8A include a substrate 88 and underlayer 51 and the following layers
functioning as a single electrode: multiple transparent or
semitransparent conductive layers 78, 82, and 86; intervening transparent
or semitransparent layers 80 and 84 between the conductive layers.
Additional layers of conductive layers and intervening layers can be
added as well such that the electrode has any number of layers optimized
or tuned for a particular device. It is also possible to incorporate the
sensor onto the display stack, wherein the layer in contact with the
display stack could be conductive or insulating as needed, as shown with
respect to conductive layer 78 shown in FIG. 7 or an insulating layer 92
(such as an optically clear adhesive) shown in FIG. 8A. Furthermore, the
multilayer electrode can be "tuned" to different optical properties for
desired end uses. For example, the materials for the intervening layer,
and the thicknesses of the layers, can be varied for a desired use or
property, such as reducing reflection when a display is in the off state.

[0048] Whereas FIGS. 7 and 8A show a sensor stack with underlayer 51 and a
multilayer electrode having 3 conductive layers (and 2 intervening
layers), FIG. 8B shows stack 91 from a cross section of a node on a
matrix-type touch screen having X- and Y-electrodes, each electrode
having a 3 conductive layer stack. Conductive layers 78, 82, and 86, in
conjunction with intervening layers 80 and 84 comprise, for example, an
X-axis electrode. Insulating layer 92, which could be a suitable
optically clear adhesive, or a layer of PET, separates the X-axis
electrode from the Y-axis electrode, which is comprised of conducting
layers 78b, 82b, and 86b in conjunction with intervening layers 80b and
84b. While this construction is a 3 conductive layer per electrode, other
arrangements are possible, such as 3 conductive layers for a given
electrode, and greater than or less than 3 conductive layers for another
electrode. Though not shown in FIG. 8B, an underlayer, or more accurately
an overlayer, could also exist between insulating layer 92B and
conductive layer 78B.

[0049] FIGS. 9a through 9c show various configurations of a multilayer
electrode in combination with underlayers. FIG. 9a shows a sheet-type,
un-patterned multilayer electrode 901, with wiring leads 900 connected to
each corner. FIG. 9b shows a multilayer electrode 902 configured as a
bar; FIG. 9c shows multilayer electrode 903 configured as repeating
diamond shapes. Underlayers 51 for each of these embodiments may be
patterned in the shapes shown in FIGS. 9a and 9b, or they may be
patterned differently. FIG. 10 is a diagram of a sensor having row
multi-layer electrodes 906 and column multi-layer electrodes 905.
Underlayer may be disposed only in areas between electrodes 906 and 905
and a substrate (not shown in FIG. 10), or the underlayer may be
continuous. Additionally, underlayer may be patterned similarly to both
or either of the electrodes 906 and 905.

[0050] From the viewpoint of optical properties, there are two main
objectives of an underlayer. The first objective is to make the
reflectance from the interfaces as low as possible, in a practical way.
The second objective is to match the reflectances from the patterned
multi-layer electrodes, for example 905 and 906 in FIG. 10, and the
substrate areas (not shown in FIG. 10), to minimize the visibility of the
electrodes to a user or viewer.

[0051] For the embodiments discussed previously where the underlayer is a
single layer, a low index undercoat is preferred for the first objective.
Ideally, if the medium adjacent to the undercoat is air, the index of the
underlayer 51 is equal to the square root of the substrate index of
refraction so as to best antireflect the areas where the multilayer
electrode is removed when patterned. When this low index cannot be
obtained with a suitable material, a higher index which is lower than the
substrate index can be used, often at reduced optical performance. If the
medium adjacent to the underlayer is not air, such as a suitable
optically clear adhesive, or a layer of PET, the ideal underlayer index
is intermediate between the index of this medium and the index of the
substrate. The thickness of the underlayer may be quite thin, less than
an optimal quarter wave optical thickness or massive, i.e., much thicker
than a quarter wave, and still provide an optical benefit. In areas where
the underlayer is under the multilayer electrode the thicknesses in the
stack could be adjusted to accommodate for the undercoat, as is known to
those skilled in the arts.

[0052] For the second objective, to minimize the optical contrast, i.e.,
the difference in reflectances, between the areas with and without the
multi-layer electrodes, the index of the underlayer should ideally equal
the effective index of the stack. For this objective, the underlayer
index could be as high as the substrate index. The index (and thickness)
of the underlayer, therefore, may be chosen as a compromise between the
two objectives.

[0053] FIG. 11 is a diagram of an underlayer layer comprised of a
plurality of sub-layers. When two or more sub-layers (FIG. 11) are used
for the underlayer, the compromise between the two objectives can
sometimes be better met than with a single layer. For example, if a two
sub-layer underlayer includes a high index sub-layer, greater than the
index of refraction of the substrate, followed by a low index sub-layer,
less than or at most equal to the index of refraction of the substrate,
then this two sub-layer underlayer can achieve, in some embodiments, a
lower reflectance over a wider wavelength range, than with a practical
low index single underlayer of, for example, SiO2 or SiAlOx .
This then allows a lower reflectance also to be used in areas with the
multilayer electrode stack, without causing an undesirable higher
contrast between these areas with and without the multilayer electrode.
The high index layer can be a TCO or can be a dielectric such as
SixNy , AlNz or many of the high index dielectrics used
for transparent optical coatings, such as metal oxides titanium oxide,
zirconium oxide, niobium oxide, or metal oxynitrides, as known to one
skilled in the arts.

[0054] Unless otherwise indicated, all numbers expressing quantities,
measurement of properties, and so forth used in the specification and
claims are to be understood as being modified by the term "about".
Accordingly, unless indicated to the contrary, the numerical parameters
set forth in the specification and claims are approximations that can
vary depending on the desired properties sought to be obtained by those
skilled in the art utilizing the teachings of the present application.
Not as an attempt to limit the application of the doctrine of equivalents
to the scope of the claims, each numerical parameter should at least be
construed in light of the number of reported significant digits and by
applying ordinary rounding techniques. Notwithstanding that the numerical
ranges and parameters setting forth the broad scope of the invention are
approximations, to the extent any numerical values are set forth in
specific examples described herein, they are reported as precisely as
reasonably possible. Any numerical value, however, may well contain
errors associated with testing or measurement limitations.

[0055] Various modifications and alterations of this invention will be
apparent to those skilled in the art without departing from the spirit
and scope of this invention, and it should be understood that this
invention is not limited to the illustrative embodiments set forth
herein. For example, the reader should assume that features of one
disclosed embodiment can also be applied to all other disclosed
embodiments unless otherwise indicated. It should also be understood that
all U.S. patents, patent application publications, and other patent and
non-patent documents referred to herein are incorporated by reference, to
the extent they do not contradict the foregoing disclosure.