The Dektak 150 is a highly sensitive stylus profilometer. A diamond-tipped stylus is moved laterally across the surface while in contact and measures deflections of the tip. It can be used to measure step heights (film thickness), surface roughness, waviness and stress. The vertical measuring range is 1mm and can perform a line scan as long as 55mm. Vertical resolution is 1A max, using the 6.55um range and the stylus force can be varied from 0.03mg to 15mg. The Dektak can accommodate wafers up to 150mm and features a motorized X-Y stage.

The Dektak 150 is a highly sensitive stylus profilometer. A diamond-tipped stylus is moved laterally across the surface while in contact and measures deflections of the tip. It can be used to measure step heights (film thickness), surface roughness, waviness and stress. The vertical measuring range is 1mm and can perform a line scan as long as 55mm. Vertical resolution is 1A max, using the 6.55um range and the stylus force can be varied from 0.03mg to 15mg. The Dektak can accommodate wafers up to 150mm and features a motorized X-Y stage.