Abstract : At present, the researches on the surface functionalization are in full effervescence. In this manuscript, we propose an innovative approach to measure the efficiency of this functionalization. This approach is based on the use of an atomic force microscope, operating in a mode called -frequency modulation-. This tool coupled with the grafted tips with a carbon nanotube, which we will call -probe-, allows to obtain measurements which would be impossible to make with standard tips. However, in metrology, in order to ensure good reproducibility of the measurements, we need to have probes with characteristics that are as similar as possible. This required the implementation of a method to optimize the manufacture of the probes, as well as a definition of criteria to classify them in different grades of qualities. The uncertainty of repeatability and reproducibility of the measures made with probes of rank -A- were quantified. These measurements have demonstrated that these probes are compatible in terms of robustness and sensitivity for the characterization of functionalized surfaces, whose thickness is superior to the monolayer. Mapping measurements carried out on two types of functionalized surfaces enable to dissociate the topography measurement from the mechanical response of the nanotube in interaction with the surface.