COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL

14

Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

06

characterised by the coating material

12

Organic material

B

PERFORMING OPERATIONS; TRANSPORTING

29

WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL

C

SHAPING OR JOINING OF PLASTICS; SHAPING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL; AFTER- TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING

71

After-treatment of articles without altering their shape; Apparatus therefor

COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL

14

Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL

14

Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

(EN)METHOD FOR STARTING SURFACE TREATMENT OF FILM AND SURFACE-TREATMENT DEVICE(FR)PROCÉDÉ DE DÉMARRAGE D'UN TRAITEMENT DE SURFACE DE FILM ET DISPOSITIF DE TRAITEMENT DE SURFACE(JA)フィルムの表面処理開始方法及び表面処理装置

Abstract:

(EN)In the present invention, loss of a film to be treated is minimized or prevented, when a surface treatment on a film to be treated is started using a reaction gas containing a polymerizable monomer. Delivery of the reaction gas from a supply source (31) is started, and the delivered reaction gas is discharged without being sent to a supply nozzle (33). After a required amount of time (T1) has elapsed following the start of delivery, transfer of a film (9) to be treated is started. Also started is the bringing of discharge gas that has been transformed into plasma into contact with the film (9) to be treated. The discharging of the reaction gas is stopped, and blowing out of the reaction gas from the supply nozzle (33) is started.(FR)Dans la présente invention, la perte d'un film à traiter est réduite ou empêchée, lorsqu'un traitement de surface sur un film est commencé au moyen d'un gaz de réaction contenant un monomère polymérisable. L'apport du gaz de réaction depuis une source d'alimentation (31) est commencé, et le gaz de réaction apporté est déchargé sans être envoyé dans une buse d'alimentation (33). Après qu'une durée requise (T1) s'est écoulée depuis le début de l'apport, le transfert d'un film (9) à traiter est commencé. Est également commencée la mise du gaz déchargé qui a été transformé en plasma en contact avec le film (9) à traiter. La décharge du gaz de réaction est arrêtée, et le soufflage du gaz de réaction par la buse d'alimentation (33) est commencé.(JA) 重合性モノマーを含有する反応ガスによって被処理フィルムの表面処理を開始する際、被処理フィルムのロスを抑制又は防止する。 供給源３１から反応ガスの送出を開始するとともに、送出した反応ガスを供給ノズル３３には送らずに排出する。上記送出の開始から所要時間Ｔ１の経過後、被処理フィルム９の搬送を開始し、更に、プラズマ化した放電ガスの被処理フィルム９への接触を開始し、更に、反応ガスの上記排出を停止して供給ノズル３３からの反応ガス吹出しを開始する。