ZEISS AURIGA

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AURIGA, the CrossBeam System combines the 3D imaging and analysis performance of the GEMINI e-Beam column with the ability of a FIB for material processing and sample preparation on a nanoscopic scale. Available as AURIGA 40 and AURIGA 60 with different chamber designs you profit from maximum flexibility in industrial quality control and material science.

Your Crossbeam WorkstationAccommodate an optimum number of accessories / detectors only depending on the size of the vacuum chamber.

Unique Imaging•Imaging of non-conductive specimens using all standard detectors with local charge compensation •Simultaneous detection of topographical and compositional information with a unique detector scheme including EsB-technology •Investigation of magnetic samples with GEMINI objective lens design