BPN300: A Simple Process to Fabricate High-Performance Torsional Microscanners and Their Applications

Project ID

BPN300

Website

Start Date

Wed 2005-Aug-24 15:31:54

Last Updated

Tue 2005-Aug-30 16:33:20

Abstract

The first goal of this project is to demonstrate a high-yield, CMOS-compatible simple process to batch-fabricate self-aligned, high-performance torsional microscanners. The second goal is to demonstrate three different, commercially demanded applications for the fabricated torsional microscanners.