Two types of calibration ranges for the Em-Tec MCS calibration standards are offered, both standard with certificates traceability or optionally with an individual certificate of calibration:

EM-Tec MCS-1 with a scale ranging from 2.5mm to 1µm; ideal for table top and compact SEMs, covers 10x to 20,000x magnifications.We offer a traceable and a certified version

EM-Tec MCS-0.1 with a scale ranging from 2.5mm down to 100nm; ideal for SEM, FESEM and FIB systems, covers 10x to 200,000 magnifications.We offer a traceable and a certified version

The features on the EM-Tec MCS series are made using state of the art MEMS manufacturing techniques with high contrast chromium deposited lines for for the larger features and gold over chromium for the smaller features below 2.5µm The gold deposited ensure optimum signal to noise ratio for calibration purposes. Advantages of the EM-Tec MCS series are:

unprecedented precision over the full calibration range

all features in one single ultraflat plane

metal on silicon with excellent signal to noise ratio

wider range of features to accurately calibrate low, medium and high magnification ranges

compatible with both SE and BSE imaging

fully conductive materials

easy to convert feature sizes

can be cleaned with plasma cleaning

all NIST traceable or optionally certified

The EM-Tec MCS-0.1 calibration standard is an excellent replacement for the discontinued SIRA calibration standard (which was using only 0.51 and 0.463µm features) with added advantages. Compatible feature sizes for the SIRA standard are 50µm (5x10µm) and 0.5µm (500nm).

The EM-Tec MCS-1 calibration standard has been developed to accurately calibrate table top SEM, reflected licht microscopes, compact SEMs and the low to medium magnification range of standard SEMs. Suitable for magnifications from 10x to 20,000x. Brigth chromium deposited features on ultra-flat conductive silicon. The feature sizes for the MCS-1 are:

2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm and 1µm.

The AU-31-T31000 EM-Tec MCS-1TR is traceable on the wafer level against a NIST measured calibration standard. Offered unmounted or mounted on the most popular SEM stubs. Example of wafer level certificate of traceability for the EM-Tec MCS-1TR magnification calibration standard, 2.5mm to 1µm.We also offer a individually certified version.

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Full list of available specimen mounts for calibration standard and test specimens

The EM-Tec MCS-0.1 calibration standard has been developed to accurately calibrate SEM, FESEM, FIB, Auger, SIMS and reflected light microscope systems. Suitable for magnifications from 10x to 200,000x. Bright chromium deposited features on ultra-flat conductive silicon for features to 2.5µm and gold over chromium for 1µm to 100nm features. The metal lines on silicon exhibit excellent signal with high contrast. The feature sizes for the MCS-0.1 are:2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm, 1µm, 500nm, 250nm and 100nm. The EM-Tec MCS-0.1 is NIST traceable on the wafer level against a NIST calibrated standard. Offered unmounted or mounted on the most popular SEM stubs. Good alternative for the discontinued SIRA calibration standard. Example of wafer level certificate of traceability for the EM-Tec MCS-0.1TR magnification calibration standard, 2.5mm to 100nm.

(More images)

Full list of available specimen mounts for calibration standard and test specimens

The EM-Tec MCS-0.1 calibration standard has been developed to most accurately calibrate SEM, FESEM, FIB, Auger, SIMS and reflected light microscope systems. Suitable for magnifications from 10x to 200,000x. Brigth chromium deposited features on ultra-flat conductive silicon for features to 2.5µm and gold over chromium for 1µm to 100nm features. The metal lines on silicon exhibit excellent signal with high contrast. The feature sizes for the MCS-0.1 are:2.5mm, 1.0mm, 0.5mm, 250µm, 100µm, 10µm, 5µm, 2.5µm, 1µm, 500nm, 250nm and 100nm. The AU-31-C32000 EM-Tec MCS-0.1CF is individually NIST certified utilizing a NIST calibrated standard. Offered unmounted or mounted on the most popular SEM stubs. Excellent alternative for the discontinued SIRA calibration standard with easier to use compatible feature sizes. Example of individual certificate of calibration for the EM-Tec MCS-0.1CF certified magnification calibration standard, 2.5mm to 100nm