KEINOS™ 2 MHz 5 kW, 11 kW & 13 kW RF Plasma Generators

KEINOS™ 2 MHz 5 kW, 11 kW & 13 kW RF Plasma Generators

Overview

The KEINOS™ 2MHz plasma generator builds on the solid, reliable attributes of the existing 2MHz design. KEINOS™ incorporates the latest technology from MKS to enable demanding applications of pulsing, fast impedance changes and shorter process steps. KEINOS™ can deliver up to 13kW of power, pulsing up to 50KHz, multiple set point pulsing, pulse shaping and MKS patented frequency tuning. KEINOS™ uses an integrated VI sensor for power accuracy and digital based control for fast response times.