From rostam at snf.stanford.edu Tue Sep 29 22:50:25 2009
From: rostam at snf.stanford.edu (rostam at snf.stanford.edu)
Date: Tue, 29 Sep 2009 22:50:25 -0700
Subject: Shutdown tylan5 SNF 2009-09-29 22:50:25: boat breaking wafers again
Message-ID:
The front boat broke 3 of my wafers. This problem happened a few months ago. Boats were responsible for breaking the wafers. Please replace the boats.
From seymour at snf.stanford.edu Wed Sep 30 11:10:51 2009
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Wed, 30 Sep 2009 11:10:51 -0700
Subject: Shutdown tylan5 SNF 2009-09-29 22:50:25: boat breaking wafers again
Message-ID:
Opened tube and removed boats. Did a visual inspection and found boats to not be degraded in the area of the wafer slots. I saw no deposition on the slots, they looked normal. I cleaned the boats in HF/DI H2O and placed back on the loader rails. I cannot see any reason the boats would be at fault for wafer breakage. The user might want to provide more information as to when the breakage occurs and if wafer handling is going on at that time.