HERO®Rail

This rail guided robot by Fabmatics is able to load and unload process tools and enables a fast carrier transportation from process tools to the transport system in the cleanroom.

Source: Infineon

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The HERO®Rail combines a new robot system with an innovative drive unit. It is designed to fully automatically load and unload process tools, and enable fast transportation between process tools and the transport system in the cleanroom. The main focus and challenge lie in the interactive co-operation between human and machine – operator and robot.