Multitube Helicon Source with Permanent Magnets

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In this research work, the use of permanent magnets not only to provide the background magnetic field but also to inject the plasma downstream has shown excellent results. Furthermore, optimization of single helicon sources has been achieved using the HELIC code [24]. Finally, these single helicon sources have been arranged in certain configurations to achieve densities above 1011 cm-3 at seven inches below them with a ripple in uniformity of less than 3% over an arbitrary large area.40 Figure 4.12: Loading curves of a 3aquot; diameter tube at two frequencies at
various B- fields for KTe = 2 eV and 1 0 mTorr. ... Conditions are: KTe = 3 eV, p =1
mTorr, n = 6 xlO12 cmaquot;3 uniform, 13.56 MHz, 100 G. 45 Figure 5.1: (a) Schematic
ofanbsp;...

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Multitube Helicon Source with Permanent Magnets

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ProQuest - 2008

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