Advancing Pulsed Plasma Characterization

The performance of the Hiden family of plasma diagnostic tools is further advanced by integration of on-board timers for real-time pulsed plasma measurement, the fast gating fully controllable within the MASsoft operating program.

Enabled instruments include the Hiden ESPion Langmuir-style probe for measurement of plasma ion and electron densities and energies, and the Hiden PSM and EQP quadrupole mass spectrometers for characterization of both positive and negative plasma ion species together with their abundance and their ion energies.

All are supported by a comprehensive range of accessories, with differential pumping options for processes operating up to 5 bar.

The ESPion probe is available in versions for operation in both RF and DC plasma, at elevated temperatures and in diverse lengths in excess of 1000 mm. Compatible bellows-sealed ‘Z’-drives have up to 900 mm translation.

This unique instrument is designed to have a high performance refractometer as an integral part of the viscometer, therefore both concentration and viscosity are measured at exactly the same time on the very same sample segment.