Hi all --
Apologies again, as the BCl3 will be delayed a day. The cylinder has
been changed, but not yet turned on. There are two ways to check for
connection integrity: one way is to use the helium sniffer, which is
quick; the other is a 24 hour static pressure check, which is much
longer but more complete/definitive. For various reasons, we elected to
choose the second. BCl3 should be turned back on and ready for
qualification tomorrow afternoon.
Thanks for your patience --
Team Etch