Question

You�ve just been hired as a process engineer at a major silicon chip manufacturer and your boss gives you a first task. You are to research the best option for measuring, monitoring and maintaining the temperature of a vertical oxidation furnace made of quartz which will handle 100, 450 mm diameter wafers spaced 0.25� apart. The central zone is to maintain a temperature of 1000 �C. The key priorities in reaching your goal are:
�Temperature accuracy: +/- 0.5 �C within the central zone
�Lifetime of system: > 5 years
�Minimize cost but still achieve the Temp/Lifetime goals
�Obtain three designs and specify which is your optimum choice and why, also listing all of your assumptions