Research on High-Precision Measurement Platform for Optical Aspheric Surface and Corresponding Error Compensation

Abstract:

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With a hardware and software control scheme which including high-precision linear motors, contacting and non-contacting measurement sensor and a new developed of measuring software, this paper designs and establishes a high-precision measurement platform. This paper not only implements the hardware build, measuring software development, but also discusses corresponding error compensation, for example, probe radius compensation, rough error canceling and so on. The experimental results indicate that the measurement platform is suitable for high-precision measurement for optical aspheric surface.