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Abstract

Femtosecond laser fabrication of controlled three dimensional structures deep in the bulk of diamond is facilitated by a dual adaptive optics system. A deformable mirror is used in parallel with a liquid crystal spatial light modulator to compensate the extreme aberrations caused by the refractive index mismatch between the diamond and the objective immersion medium. It is shown that aberration compensation is essential for the generation of controlled micron-scale features at depths greater than 200 μm, and the dual adaptive optics approach demonstrates increased fabrication efficiency relative to experiments using a single adaptive element.

Figures (5)

Simulations of the focal spot intensity distribution at a depth of 40 μm (a) when aberrated (i) and with aberration correction (ii). Images of graphitic defects fabricated at a depth of 40 μm (b), 80 μm (c) and 130 μm (d), using no aberration correction (i), correction using the SLM alone (ii) and correction using a combination of the DM and SLM (iii). The laser propagation direction for both simulation and fabrication was parallel to the positive z axis. The scale bars are 5 μm. The pulse energy is shown below each image.

Graphs comparing the threshold fabrication pulse energy over a range of fabrication depths when using no aberration correction, single (SLM only) aberration correction and dual aberration correction (a) and showing the detail of the two correction options (b). The error bars show the expected range in fabrication threshold energy due to system fluctuations.

Top (xy) and side (xz) view of the date fabricated in diamond at a depth of 80 μm. (a) without aberration correction (b) employing the dual adaptive optics system. The laser beam was incident along the z direction. The scale bar represents 5 μm.

Top (xy) and side (xz) view of graphitic structure fabricated in diamond. The midpoint of the structure is at a depth of 80 μm. (a) without aberration correction (b) employing the dual adaptive optics system. The laser beam was incident along the z direction. The scale bar represents 5 μm.