Coating analytics

Spectroscopic ellipsometer VASE (J. A. Woollam)

Optical properties (refractive index n, extinction coefficient k) and film thicknesses of thin films can be laterally resolved with the spectroscopic ellipsometry method (350 nm - 1700 nm). The measuring technique can be applied to a variety of materials (metals, semi-conductors, glasses, plastic material) in any combinations (gradient surfaces, multilayer, and composites). The evaluation reveals information about sample set-ups and about solid state physical parameters such as band gaps, electron mobility and defects. Even for very complex multilayer systems, information about the optical material function, the film thickness, about the surface structure and interfaces can be determined.

Service offer

characterization of structures and of optical properties of SiO2, TiO2, SiN, DLC and further layers, dependent on fabrication conditions