Thickness map

You can produce a relative thickness map relatively easily in the EFTEM technique by acquiring an unfiltered and a zero-loss image from the same region under identical conditions. Once acquired, you can compute the relative thickness map when you utilize the Poisson statistics of inelastic scattering:

\(t/\lambda = -ln (\frac{I_{o}}{I_{t}})\)

where

\(I_{t}\) = total intensity (unfiltered)

\(I_o\) = zero-loss intensity (elastic or ZLP filtered)

To acquire a thickness map, specify the slit width for the zero-loss acquisition and the camera parameters to be used

The same camera parameters will be applied for both the zero-loss and unfiltered image acquisition

Access the Configure Thickness Map dialog will vary based on the mode you choose

SingleMap mode – Press the Select Thickness Map button

MultiMap mode – Specify via the MultiMap Configuration dialog

Window Settings – Set the energy loss (0 eV) and slit width for the filter