Summary: Kinetic Lattice Monte Carlo Simulation ofKinetic Lattice Monte Carlo Simulation of
Polycrystalline Thin film growthPolycrystalline Thin film growth
Zhiyong Wang
James B. Adams
Arizona State University
AcknowledgementsAcknowledgements
National Science
Foundation
National Center for
Supercomputer
Applications
Motorola
National Science
Foundation
National Center for
Supercomputer
Applications
Motorola
MotivationMotivation
s One major use of KLMC is the study of epitaxial thin film