Corrosive version with mineral oil

These corrosive versions of our rotary vane pumps are designed to be operated with mineral oil. These are used in sophisticated applications with corrosive gases. The costs of operating fluid remain relatively low due to the use of mineral oil.

Applications

CVD coating

Semiconductor technology

Customer value

Space-saving and ideal for systems integration

High pumping speeds with small dimensions

Low ultimate pressure

Operational safety, uses special materials for contact with corrosive substances