MEMS actuator

Ratcheting micro-motor allows for movement in two directions

Microelectromechanical Systems (MEMS) are miniaturized devices (micron dimensions) that consist of actuators, sensors, and other mechanical structures. Actuators account for more than 50 percent of the rapidly growing MEMS market and are used in a variety of optical, RF, and industrial applications. Examples include variable capacitors, micro-relays for low-power VLSI, optical phase-shifters, next generation displays, micro-grippers for robotic surgery, and focusing mechanisms for cameras in mobile devices. Typical MEMS actuators may be electrostatic, magnetic, or thermal. Thermal actuators are classified as v-beam, u-beam, or bimorph types. They are typically fabricated by etching or lithographic processes similar to the production process for integrated circuits. All three types of thermal actuators are traditionally designed to displace in only one direction and, if multidirectional displacement is required, a single actuator for each displacement direction is required, increasing complexity and area.

Navy researchers have developed a v-beam MEMS bidirectional thermal actuator. This device has high force, excellent displacement, draws limited power, and is simple to fabricate.

Benefits

Enables linear actuation as opposed to the arc motion of a u-beam type actuator

Easily fabricated via etching or lithography

The Opportunity

US patent 9,531,302 available for license

Potential for collaboration with Navy researchers

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Brian Metzger, PhD, CLP

Brian Metzger, PhD, CLP

Brian joined TechLink in 2014, bringing over 18 years of Silicon Valley industry experience in new product development with tech companies, LSI Logic and Applied Materials. He has a doctorate in physical chemistry, and specializes in licensing technologies involving advanced materials, photonics and sensors, and electronics. He is an integral member of the Innovation Discovery Process, helping to host events at DoD labs across the country. Brian is a renaissance man with wide-ranging interests in seemingly unconnected things: ecommerce, sports, psychology, entrepreneurship, creativity, spirituality, fitness, and philanthropy.