An operational amplifier-based micro eddy current sensor circuit is developed for improvement of
sensitivity, reduction of power consumption and application in small mounting space. An eddy current
sensor is designed on the optimized parameters in this circuit. Meanwhile, an eddy current sensor static
calibration system is built by comparing to the measurement unit of Switzerland TESA Inductance
Sensor TT80 of high resolution. Simulation and experimental results show that the eddy current sensor
has a high sensitivity, low power consumption and is capable of measuring a limited space. Also, the
eddy current sensors are mounted in the honing head, and the feasibility of in-process inspection of
parts being honed on the inner diameter have been verified in the Abrasive Machining (Honing).