lb1 length of first leg of
the folded beam in µmlb2 length of second leg of
the folded beam in µm
lb3 length of third leg of
the folded beam in µm wb width of the
beam in µm tb thickness of the
beam in µm lm length of the mass in µm
wm
width of the mass in µm tm
thickness of the mass in µm ymod Young's modulus in GPapois Poisson's ratiosel number denoting the
selected result.
Use 1 for resonant frequency in X axis, 2 for resonant frequency in Y axis and
3 for resonant frequency in Z axis

Notes

The folded beam is composed of three short beam segments folded around in the
shape of a 'U' and attached to the corner of the central mass. Four such beams
are attached to the central mass. All the four beams are assumed to be
identical in design. This suspension is
designed to enable a translatory motion in the X axis or in an in-plane axis.
There is however a movement in the Z axis perpendicular to the plane of the
mass.

This design interface can be used to determine the natural
vibration frequency of the folded beam suspension along the three axes. The
order of resonance along these three axes will be determined by the beam
design. There are other modes like the torsional mode along X axis, but it is
not discussed here.

The plot shows how the resonant frequency in all the three
axes vary with the length of the mid-section (lb2) of the folded beam while all other design
parameters are as given in the design form. The X axis of the plot is lb2 as
a percentage of lb1. Using the cross hair the resonance frequency in any of
the three axes can be found out. It can be used to design the beam such that the
resonant frequency for a particular axis is lesser or greater than the other axis.

Assumptions

-The default material is Silicon with density of 2330 kg/m3.
-The beam has uniform rectangular cross section.-The mass is supported from
four identical folded beams.-The mass has uniform distribution of weight.
-For determining stiffness of the beam only bending effects are considered.