Micro manufacture

Manufacturing at the microscale is known as micromanufacturing. This involves scaled-up, reliable, and cost-effective manufacturing of nmicroscale materials, structures, devices, and systems. Micromanufacturing also includes research, development, and integration of top-down processes and increasingly complex bottom-up or self-assembly processes.

Ultrafast lasers have introduced new possibilities in engraving ultrafine structures, and scientists are now also investigating how to use them to etch microstructures into thin glass. There are possible applications in analytics (lab on a chip) and especially in electronics and the consumer sector, where great interest has been shown.

Frankfurt (Oder)/San Francisco. Scientist Dr. Bernd Heinemann of IHP – Innovations for High Performance Microelectronics will present results on silicon-germanium heterobipolar transistors (SiGe HBTs) developed in Frankfurt (Oder) on the “International Electron Devices Meeting” (IEDM) in San Francisco. His contribution titled “SiGe HBT with fT/fmax of 505 GHz/720 GHz “ presents speed parameters that set new standards for silicon transistors. “To present at IEDM is a valuable conclusion of the project ‘DOTSEVEN’, funded by the European Union. Together with Infineon and twelve other project partners from a total of six countries, the four-year project focused on developing SiGe HBTs with a maximum oscillation frequency, which is also referred to as fmax, of 0.7 THz,” says Dr. Bernd Heinemann, project manager at IHP.