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the system is equipment with a centralized control device plc,a computer automatic gear-shifting vacuum gauge, a three-flow controller, a pidtemperature control device, four side-installed heating tube, a suit of bias power supply,15 set contra-variant arc power supply.2 it is special equipments for

sputtering coating machine(zz-) adopts the resistance heating in the vacuum chamber, to melt and vaporize the metal wire (aluminum wire) cling to the resistance wire.2 the vaporized metal molecule deposit on the subst`rates, to gain the smooth film as well as high reflectivity. thus the surface of