Profile-Measuring Laser Microscopes

3D laser scanning microscope

A 3D laser scanning microscope is an observation/measuring equipment that enables both 3D measurements and deep focus depth observation at the same time. It has no restrictions on the size or material of a sample and allows for observations under normal environmental conditions. In addition, the 3D laser scanning microscope features user-friendly operability similar to that of an optical microscope; samples do not need pretreatment before measurement. Observations can be done in color, which helps accurate analysis of the conditions of the target object. A 3D laser scanning microscope can also be used for measuring the thickness of films, as well as for observing the surface, inside, and backside of a translucent object.

While the 3D laser scanning microscope is better than a scanning electron microscope or an atomic force microscope in terms of operability, it is inferior in observation magnification and measurement resolution. Bottom parts with high aspect ratios and slopes with large angles cannot be measured or observed because they do not reflect the laser beam.

Advantages

Disadvantages

- Deep depth of focus

- Target object can be observed in color

- Produces 3D profiles and displays 3D images in color

- Capable of measuring film thickness of translucent objects, such as resist for semiconductor fabrication

- Analysis in atmospheric conditions is possible, not needing pretreatment of sample

- No limitation on sample size and material, easy operation makes it excellent for general-purpose use