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A Low-Magnification Microscope Objective Compatible with Spray Cooling for the Infrared Probing of Integrated Circuits

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for a standard low-magnification microscope objective designed with a long working distance for imaging the sample through air. Benefits include enabling a large field-of-view imaging with spray cooling.

Country

United States

Language

English (United States)

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A Low-Magnification Microscope Objective
Compatible with Spray Cooling for the Infrared Probing of Integrated Circuits

Disclosed is a method for a standard low-magnification
microscope objective designed with a long working distance for imaging the
sample through air. Benefits include enabling a large field-of-view imaging
with spray cooling.

Background

It is important to achieve a large field of view during
silicon scanning for both the IREM and the LADA, when done in a system with a
solid immersion lens and spray cooling. This large-format scanning must be done
with a low-magnification objective that has a lower resolution than the solid
immersion lens. The solid immersion lens must be used subsequently with the
low-magnification scanning, in order to achieve the best defect localization
resolution

Currently, a low-magnification lens (1 mm x 1 mm field of
view) with a diamond window cooling solution is used, or a solid immersion lens
(SIL; with 40 x 40 micron maximum field of view) with spray cooling (see Figure
1). Currently, it is impossible to achieve a large field-of-view with the spray
cooling, and it is not possible (or at least very difficult) to switch between
the diamond window and spray cooling in a single system. Switching between the
diamond window and spray cooling requires very fine automated mechanical
adjustments that may be impractical for a system with a reasonably low cost and
acceptable development times.