From mtang at stanford.edu Mon Apr 2 11:27:52 2012
From: mtang at stanford.edu (Mary Tang)
Date: Mon, 02 Apr 2012 11:27:52 -0700
Subject: Fwd: TXRF repot
Message-ID: <4F79EFA8.506@stanford.edu>
Hi all --
I haven't been around so don't know the latest on this. I take it that
if he's checking in with me that he's still waiting for an answer?
I assume that this is for a tungsten source. Just looking at this, this
stuff does not look really "bad" -- but nor does it look "clean" because
of the Fe. I might be able to buy "semiclean." If this is in response
to his request to run on Teos2, I think there may be concerns from
others with really "clean" processes on this tube.
In my humble opinion, I would suggest that this would be OK to run on
TEOS2 -- provided they use their own dedicated quartz boats and wand
tips. Fe seems to be the only concern and it is not terribly volatile
at TEOS2 temperatures, so the main concern would be cross-contamination
from shared quartzware.
M
-------- Original Message --------
Subject: TXRF repot
Date: Mon, 2 Apr 2012 10:45:19 -0700
From: Vipin.Ayanoor-Vitikkate at hgst.com
To: mtang at snf.stanford.edu
CC: emyer at snf.stanford.edu, maurice at snf.stanford.edu
Sorry I forgot to attach this in the earlier email.
thanks
vipin
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From johnramunas at gmail.com Wed Apr 4 20:51:52 2012
From: johnramunas at gmail.com (John Ramunas)
Date: Wed, 4 Apr 2012 20:51:52 -0700
Subject: Question about photolithography with sub-10-micron features
Message-ID:
Dear SNF,
Do you (or a company you know of) provide a service which patterns
photoresist with feature sizes as small as 2 microns on silicone wafers?
The Stanford Microfluidics Foundry says their limit is 10 microns.
Thanks,
John
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From mtang at stanford.edu Thu Apr 5 09:42:43 2012
From: mtang at stanford.edu (Mary Tang)
Date: Thu, 05 Apr 2012 09:42:43 -0700
Subject: Question about photolithography with sub-10-micron features
In-Reply-To:
References:
Message-ID: <4F7DCB83.4050601@stanford.edu>
Hi John --
I don't know of a company that patterns on silicone elastomers and
suspect you may have a hard time finding one. The limit on contact
masking is just under one micron under ideal conditions. Elastomers are
far from ideal. It would also depend on the kind of mask being used
(transparency versus chrome and the resolution.)
For elastomers, it would depend on the substrate, the thickness of PDMS
and the dimensions of the features you need (both lateral and depth.)
Are you patterning on PDMS or making molds for casting PDMS? Are you
making valves like the Microfluidics Foundry process provides?
If you'd like to come by and talk with either Mahnaz (who is the litho
process lead) or me, we can go over your device needs and determine
whether or how this could be done at SNF. I don't know if you are
trained on the tools required, but we can certainly come up with a
process flow and training/experimental plan with you if this is what you
have in mind.
If you've got a description or sketch of your device, please send it over.
Mary
On 4/4/2012 8:51 PM, John Ramunas wrote:
> Dear SNF,
>
> Do you (or a company you know of) provide a service which patterns
> photoresist with feature sizes as small as 2 microns on silicone
> wafers? The Stanford Microfluidics Foundry says their limit is 10
> microns.
>
> Thanks,
> John
>
From Salowitz at stanford.edu Wed Apr 11 17:35:15 2012
From: Salowitz at stanford.edu (Nathan Salowitz)
Date: Wed, 11 Apr 2012 17:35:15 -0700
Subject: Apiezon Wax-W
Message-ID: <4F862343.6000501@stanford.edu>
Hello,
I am seeking Specmat approval to use "Apiezon Wax-W" as a back side
protector in long KOH etches.
Use (Application): there are 2 possibilities for application of the
material:
1) I can use a hotplate in the litho area, other lab members who I've
discussed this process with said "put aluminum foil everywhere"
2) alternatively I can use a hotplate in my lab, not as clean but an option.
Use (KOH etch):
Uli indicated that it is ok to put this in the gold contaminated KOH
labware.
Removal: I have found alternate facilities neighboring my lab to remove
the material using established methods (xylenes) and as this is the last
step in my process, my samples will not need to re-enter the clean
room. I am also still looking into alternate methods for removal.
Storage: I can store the wax in my lab, outside the SNF
an MSDS and datasheet are attached.
Cheers,
Nate
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From mtang at stanford.edu Wed Apr 11 17:43:11 2012
From: mtang at stanford.edu (Mary Tang)
Date: Wed, 11 Apr 2012 17:43:11 -0700
Subject: Apiezon Wax-W
In-Reply-To: <4F862343.6000501@stanford.edu>
References: <4F862343.6000501@stanford.edu>
Message-ID: <4F86251F.9010806@stanford.edu>
Hi Nathan --
This is the infamous "black wax" often used in the lab. It's fine to
use at wbgeneral as Uli describes. What we do have a problem with is
the mess it creates on the hotplates in litho. I'll defer to Mahnaz on
how she would like (or not) to do this. I can offer you a hotplate in
the wafersaw room as an alternative. I would suggest that cleanroom
level cleanliness is not so important for applying black wax if the next
step is gold-contaminated KOH labware. Xylenes is the preferred method
of removal at SNF (we don't allow TCA or borothene in the lab - these
the traditional methods.)
Mary
On 4/11/2012 5:35 PM, Nathan Salowitz wrote:
>
> Hello,
> I am seeking Specmat approval to use "Apiezon Wax-W" as a back
> side protector in long KOH etches.
>
> Use (Application): there are 2 possibilities for application of the
> material:
> 1) I can use a hotplate in the litho area, other lab members who I've
> discussed this process with said "put aluminum foil everywhere"
> 2) alternatively I can use a hotplate in my lab, not as clean but an
> option.
>
> Use (KOH etch):
> Uli indicated that it is ok to put this in the gold contaminated KOH
> labware.
>
> Removal: I have found alternate facilities neighboring my lab to
> remove the material using established methods (xylenes) and as this is
> the last step in my process, my samples will not need to re-enter the
> clean room. I am also still looking into alternate methods for removal.
>
> Storage: I can store the wax in my lab, outside the SNF
>
> an MSDS and datasheet are attached.
> Cheers,
> Nate
>
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