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Abstract:

A method and system for providing a magnetic junction residing on a
substrate and usable in a magnetic device are described. The magnetic
junction includes a first pinned layer, a first nonmagnetic spacer layer
having a first thickness, a free layer, a second nonmagnetic spacer layer
having a second thickness greater than the first thickness, and a second
pinned layer. The first nonmagnetic spacer layer resides between the
pinned layer and the free layer. The first pinned layer resides between
the free layer and the substrate. The second nonmagnetic spacer layer is
between the free layer and the second pinned layer. Further, the magnetic
junction is configured such that the free layer is switchable between a
plurality of stable magnetic states when a write current is passed
through the magnetic junction.

Claims:

1. A magnetic junction residing on a substrate and for use in a magnetic
device comprising: a first pinned layer; a first nonmagnetic spacer layer
having a first thickness; a free layer, the first nonmagnetic spacer
layer residing between the pinned layer and the free layer, the first
pinned layer residing between the free layer and the substrate; a second
nonmagnetic spacer layer having a second thickness greater than the first
thickness; and a second pinned layer, the second nonmagnetic spacer layer
residing between the free layer and the second pinned layer; wherein the
magnetic junction is configured such that the free layer is switchable
between a plurality of stable magnetic states when a write current is
passed through the magnetic junction.

2. The magnetic junction of claim 1 wherein the second thickness is at
least five percent greater than the first thickness.

3. The magnetic junction of claim 2 wherein the second thickness is not
more than forty percent greater than the first thickness.

4. The magnetic junction of claim 1 wherein the second thickness is 0.05
through 0.5 nanometer greater than the first thickness.

5. The magnetic junction of claim 1 wherein the magnetic junction is
characterized by a magnetoresistance ratio of greater than one hundred
percent.

6. The magnetic junction of claim 1 wherein at least one of the first
nonmagnetic spacer layer and the second nonmagnetic spacer layer is a
tunneling barrier layer.

7. The magnetic junction of claim 6 wherein the at least one of the first
nonmagnetic spacer layer and the second nonmagnetic spacer layer include
MgO.

8. The magnetic junction of claim 1 wherein the free layer has a free
layer magnetization substantially perpendicular to a plane of the free
layer.

9. The magnetic junction of claim 8 wherein at least one of the first
pinned layer and the second pinned layer includes a pinned layer
magnetization substantially perpendicular to a pinned layer plane.

10. The magnetic junction of claim 1 wherein at least one of the first
pinned layer, the second pinned layer, and the free layer is a synthetic
layer.

11. The magnetic junction of claim 1 further comprising: a first
antiferromagnetic layer adjoining the first pinned layer; and a second
antiferromagnetic layer adjoining the second pinned layer.

12. A magnetic memory residing on a substrate and comprising: a plurality
of magnetic storage cells, each of the plurality of magnetic storage
cells including at least one magnetic junction, the at least one magnetic
junction including a first pinned layer, a first nonmagnetic spacer
layer, a free layer, a second nonmagnetic spacer layer, and a second
pinned layer, the first nonmagnetic spacer layer residing between the
first pinned layer and the free layer, the second nonmagnetic spacer
layer residing between the second pinned layer and the free layer, the
first pinned layer residing between the free layer and the substrate, the
first nonmagnetic spacer layer having a first thickness, the second
nonmagnetic spacer having a second thickness greater than the first
thickness, the magnetic junction being configured such that the free
layer is switchable between a plurality of stable magnetic states when a
write current is passed through the magnetic junction; and a plurality of
bit lines.

13. The magnetic memory of claim 12 wherein the second thickness is at
least five percent greater than the first thickness and not more than
forty percent greater than the first thickness.

14. The magnetic memory of claim 12 wherein the magnetic junction is
characterized by a magnetoresistance ratio of greater than one hundred
percent.

15. The magnetic memory of claim 12 wherein at least one of the first
nonmagnetic spacer layer and the second nonmagnetic spacer layer is a
tunneling barrier layer.

16. The magnetic memory of claim 12 wherein the free layer has a free
layer magnetization substantially perpendicular to a plane of the free
layer.

17. The magnetic memory of claim 16 wherein at least one of the first
pinned layer and the second pinned layer includes a pinned layer
magnetization substantially perpendicular to a pinned layer plane.

18. The magnetic memory of claim 12 wherein at least one of the first
pinned layer, the second pinned layer, and the free layer is a
multilayer.

19. A method for providing a magnetic junction residing on a substrate
for use in a magnetic device comprising: providing a first pinned layer;
providing a first nonmagnetic spacer layer having a first thickness;
providing a free layer, the first nonmagnetic spacer layer residing
between the pinned layer and the free layer, the first pinned layer
residing between the free layer and the substrate; providing a second
nonmagnetic spacer layer having a second thickness greater than the first
thickness; and providing a second pinned layer, the second nonmagnetic
spacer layer residing between the free layer and the second pinned layer;
wherein the magnetic junction is configured such that the free layer is
switchable between a plurality of stable magnetic states when a write
current is passed through the magnetic junction.

[0003] Magnetic memories, particularly magnetic random access memories
(MRAMs), have drawn increasing interest due to their potential for high
read/write speed, excellent endurance, non-volatility and low power
consumption during operation. An MRAM can store information utilizing
magnetic materials as an information recording medium. One type of MRAM
is a spin transfer torque random access memory (STT-RAM). STT-RAM
utilizes magnetic junctions written at least in part by a current driven
through the magnetic junction. A spin polarized current driven through
the magnetic junction exerts a spin torque on the magnetic moments in the
magnetic junction. As a result, layer(s) having magnetic moments that are
responsive to the spin torque may be switched to a desired state.

[0004] For example, FIG. 1 depicts a conventional magnetic tunneling
junction (MTJ) 10 as it may be used in a conventional STT-RAM. The
conventional MTJ 10 typically resides on a bottom contact 11, uses
conventional seed layer(s) 12 and includes a conventional
antiferromagnetic (AFM) layer 14, a conventional pinned layer 16, a
conventional tunneling barrier layer 18, a conventional free layer 20,
and a conventional capping layer 22. Also shown is top contact 24.

[0005] Conventional contacts 11 and 24 are used in driving the current in
a current-perpendicular-to-plane (CPP) direction, or along the z-axis as
shown in FIG. 1. The conventional seed layer(s) 12 are typically utilized
to aid in the growth of subsequent layers, such as the AFM layer 14,
having a desired crystal structure. The conventional tunneling barrier
layer 18 is nonmagnetic and is, for example, a thin insulator such as
MgO.

[0006] The conventional pinned layer 16 and the conventional free layer 20
are magnetic. The magnetization 17 of the conventional pinned layer 16 is
fixed, or pinned, in a particular direction, typically by an
exchange-bias interaction with the AFM layer 14. Although depicted as a
simple (single) layer, the conventional pinned layer 16 may include
multiple layers. For example, the conventional pinned layer 16 may be a
synthetic antiferromagnetic (SAF) layer including magnetic layers
antiferromagnetically coupled through thin conductive layers, such as Ru.
In such a SAF, multiple magnetic layers interleaved with a thin layer of
Ru may be used. In another embodiment, the coupling across the Ru layers
can be ferromagnetic. Further, other versions of the conventional MTJ 10
might include an additional pinned layer (not shown) separated from the
free layer 20 by an additional nonmagnetic barrier or conductive layer
(not shown).

[0007] The conventional free layer 20 has a changeable magnetization 21.
Although depicted as a simple layer, the conventional free layer 20 may
also include multiple layers. For example, the conventional free layer 20
may be a synthetic layer including magnetic layers antiferromagnetically
or ferromagnetically coupled through thin conductive layers, such as Ru.
Although shown as in-plane, the magnetization 21 of the conventional free
layer 20 may have a perpendicular anisotropy. Thus, the pinned layer 16
and free layer 20 may have their magnetizations 17 and 21, respectively
oriented perpendicular to the plane of the layers.

[0008] To switch the magnetization 21 of the conventional free layer 20, a
current is driven perpendicular to plane (in the z-direction). When a
sufficient current is driven from the top contact 24 to the bottom
contact 11, the magnetization 21 of the conventional free layer 20 may
switch to be parallel to the magnetization 17 of the conventional pinned
layer 16. When a sufficient current is driven from the bottom contact 11
to the top contact 24, the magnetization 21 of the free layer may switch
to be antiparallel to that of the pinned layer 16. The differences in
magnetic configurations correspond to different magnetoresistances and
thus different logical states (e.g. a logical "0" and a logical "1") of
the conventional MTJ 10.

[0009] When used in STT-RAM applications, the free layer 21 of the
conventional MTJ 10 is desired to be switched at a relatively low
current. The critical switching current (Ic0) is the lowest current
at which the infinitesimal precession of free layer magnetization 21
around the equilibrium orientation becomes unstable. For example,
Ic0 may be desired to be on the order of a few mA or less. In
addition, a short current pulse is desired to be used in programming the
conventional magnetic element 10 at higher data rates. For example,
current pulses on the order of 20-30 ns or less are desired.

[0010] Although not shown, the conventional MTJ 10 could be a dual MTJ. In
such a case, the conventional MTJ 10 would include an additional
conventional barrier layer and an additional conventional pinned layer.
The conventional free layer 20 would reside between the barrier layers.
The additional barrier layer would be between the additional conventional
pinned layer and the conventional free layer 20. In such a conventional
dual MTJ, the conventional barrier layer 18 would typically be the same
thickness as or thicker than the additional conventional barrier layer
(not shown). Conventional dual MTJs generally have an improved switching
current and symmetry, a smaller process margin, lower tunneling
magnetoresistance (TMR), high resistance area product (RA), and a
magnetic tunneling junction switching asymmetry that does not match the
transistor supply current. In addition, a read disturbance for a normal
layout may also occur.

[0011] Although the conventional MTJ 10 and a conventional dual MTJ may be
written using spin transfer and used in an STT-RAM, there are drawbacks.
For example, for conventional MTJs 10 having the magnetizations 17 and 21
oriented perpendicular, the magnetoresistance may be lower than a
conventional MTJ 10 having its magnetization in-plane. Further, as
discussed above, conventional dual MTJs may have a lower
magnetoresistance than a single MTJ. As a result, the signal from the
conventional MTJ 10 may be lower than desired. Such perpendicular
conventional MTJs 10 also exhibit high damping. As such, switching
performance is adversely affected. Thus, performance of a memory using
the conventional MTJ 10 is still desired to be improved.

[0012] Accordingly, what is needed is a method and system that may improve
the performance of the spin transfer torque based memories. The method
and system described herein address such a need.

BRIEF SUMMARY OF THE INVENTION

[0013] A method and system for providing a magnetic junction residing on a
substrate and usable in a magnetic device are described. The magnetic
junction includes a first pinned layer, a first nonmagnetic spacer layer
having a first thickness, a free layer, a second nonmagnetic spacer layer
having a second thickness greater than the first thickness, and a second
pinned layer. The first nonmagnetic spacer layer resides between the
pinned layer and the free layer. The first pinned layer resides between
the free layer and the substrate. The second nonmagnetic spacer layer is
between the free layer and the second pinned layer. Further, the magnetic
junction is configured such that the free layer is switchable between a
plurality of stable magnetic states when a write current is passed
through the magnetic junction.

[0026] The exemplary embodiments relate to magnetic elements usable in
magnetic devices, such as magnetic memories, and the devices using such
magnetic elements. The following description is presented to enable one
of ordinary skill in the art to make and use the invention and is
provided in the context of a patent application and its requirements.
Various modifications to the exemplary embodiments and the generic
principles and features described herein will be readily apparent. The
exemplary embodiments are mainly described in terms of particular methods
and systems provided in particular implementations. However, the methods
and systems will operate effectively in other implementations. Phrases
such as "exemplary embodiment", "one embodiment" and "another embodiment"
may refer to the same or different embodiments as well as to multiple
embodiments. The embodiments will be described with respect to systems
and/or devices having certain components. However, the systems and/or
devices may include more or less components than those shown, and
variations in the arrangement and type of the components may be made
without departing from the scope of the invention. The exemplary
embodiments will also be described in the context of particular methods
having certain steps. However, the method and system operate effectively
for other methods having different and/or additional steps and steps in
different orders that are not inconsistent with the exemplary
embodiments. Thus, the present invention is not intended to be limited to
the embodiments shown, but is to be accorded the widest scope consistent
with the principles and features described herein.

[0027] The exemplary embodiments are described in the context of
particular magnetic elements having certain components. One of ordinary
skill in the art will readily recognize that the present invention is
consistent with the use of magnetic elements having other and/or
additional components and/or other features not inconsistent with the
present invention. The method and system are also described in the
context of current understanding of the spin transfer phenomenon.
Consequently, one of ordinary skill in the art will readily recognize
that theoretical explanations of the behavior of the method and system
are made based upon this current understanding of spin transfer. In
addition, the method and system are described in the context of certain
layers being synthetic and/or simple. However, one of ordinary skill in
the art will readily recognize that the layers could have another
structure. Furthermore, the method and system are described in the
context of magnetic elements having particular layers. However, one of
ordinary skill in the art will readily recognize that magnetic elements
having additional and/or different layers not inconsistent with the
method and system could also be used. Moreover, certain components are
described as being magnetic, ferromagnetic, and ferrimagnetic. As used
herein, the term magnetic could include ferromagnetic, ferrimagnetic or
like structures. Thus, as used herein, the term "magnetic" or
"ferromagnetic" includes, but is not limited to ferromagnets and
ferrimagnets. The method and system are also described in the context of
single elements. However, one of ordinary skill in the art will readily
recognize that the method and system are consistent with the use of
magnetic memories having multiple elements. Further, as used herein,
"in-plane" is substantially within or parallel to the plane of one or
more of the layers of a magnetic element. Conversely, "perpendicular"
corresponds to a direction that is substantially perpendicular to one or
more of the layers of the magnetic element.

[0028] A method and system for providing a magnetic junction residing on a
substrate and usable in a magnetic device are described. The magnetic
junction includes a first pinned layer, a first nonmagnetic spacer layer
having a first thickness, a free layer, a second nonmagnetic spacer layer
having a second thickness greater than the first thickness, and a second
pinned layer. The first nonmagnetic spacer layer resides between the
pinned layer and the free layer. The first pinned layer resides between
the free layer and the substrate. The second nonmagnetic spacer layer is
between the free layer and the second pinned layer. Further, the magnetic
junction is configured such that the free layer is switchable between a
plurality of stable magnetic states when a write current is passed
through the magnetic junction.

[0029]FIG. 2 depicts an exemplary embodiment of an inverted dual magnetic
junction 100. The inverted dual magnetic junction 100 includes a first
pinned layer 111 closest to the substrate 101, a first nonmagnetic spacer
layer 120, a free layer 130, a second nonmagnetic spacer layer 140, and a
second pinned layer 140. The pinned layers 110 and 150 have
magnetizations 111 and 151, respectively. The free layer 130 is shown
with magnetization 131. However, in other embodiments, the layers 110,
130, and/or 150 may have other magnetizations. The inverted dual magnetic
junction 100 includes as the nonmagnetic spacer layers 120 and 140
tunneling barrier layers. However, in other embodiments, other
nonmagnetic spacer layers 120 and 140 may be used. For example,
conductive layers or granular layers having conductive channels or
islands in an insulating matrix might be used in lieu of the barrier
layers 120 and 140. This may be true of all embodiments described herein.
However, for simplicity, only the magnetic junctions described herein are
described in the context of inverted dual magnetic tunneling junctions
(inverted dual MTJs) are described. The free layer 130 and the pinned
layers 110 and 150 are generally ferromagnetic. However, one or more of
the free layers 130 and pinned layers 110 and/or 150 may be multilayers
including but not limited to synthetic antiferromagnets. In the
embodiment shown, optional seed layer(s) 102 and/or optional capping
layer(s) 170 may also be used. In some embodiments, for example, a Ta
seed is provided. In the embodiment shown, optional AFM layers 104 and
160 are used. Such AFM layers 104 and 160 are used for each of the pinned
layers 110 and 150, respectively. In some embodiments, the AFM layers 104
and/or 160 may use PtMn. In other embodiments, other mechanisms for
pinning, or fixing in place, the magnetizations 111 and 151 of the pinned
layers 110 and 150, respectively, may be used. The each of the pinned
layers 110 and/or 150 may include materials such as CoFe, CoFeB, or a
CoFeB/CoFe bilayer. The barrier layers/nonmagnetic spacer layers 120 and
140 may include materials such as MgO. The free layer 130 may include
CoFeB or a doped CoFeB/CoFeB bilayer, CoFeB/CoFeB/CoFeB trilayer or
CoFeB/nonmagnetic/CoFeB trilayer, or multilayers. For example, CoFeB may
be doped with Cu, Ta, Cr, V and/or other elements and used for forming
the free layer 130. However, other materials may be used for the layers
of the inverted dual MTJ 100.

[0030] The inverted dual MTJ 100 is so termed because the top barrier
layer 140 is the thicker barrier layer. The top/second barrier layer 140
is thicker than the bottom/first barrier layer 120. In some embodiments,
the second nonmagnetic spacer/barrier layer 150 is at least 5% thicker
than the first nonmagnetic spacer/barrier layer 120. In some such
embodiments, the second nonmagnetic spacer/barrier layer 140 is not more
than 40% thicker than the first nonmagnetic spacer/barrier layer 120. For
example, the second nonmagnetic spacer/barrier layer 140 might be 0.05
through 0.5 nanometer thicker than the thin nonmagnetic spacer/barrier
layer 120. In other embodiments, the second nonmagnetic spacer/barrier
layer 140 is not more than 30% thicker than the first nonmagnetic
spacer/barrier layer 120. For example, the second nonmagnetic
spacer/barrier layer 140 might be 0.05 through 0.3 nanometer thicker than
the thin nonmagnetic spacer/barrier layer 120. Further, as seen in FIG.
1, the thicker nonmagnetic spacer/barrier layer 140 is further from the
substrate than the thin nonmagnetic spacer/barrier layer 120.

[0031] It had been expected that the use of a thicker nonmagnetic
spacer/barrier layer 140 further from the substrate would not alter
performance of the inverted dual MTJ. However, the inverted dual magnetic
junction 100 may have a higher magnetoresistance than an analogous
conventional dual MTJ. For example, in some embodiments, the inverted
dual MTJ 100 might have a TMR on the order of 50%-200% at room
temperature (e.g. 23° Celsius). In other embodiments, the inverted
dual MTJ 100 may have TMR of greater than 100% or perhaps higher at room
temperature (e.g. 23° Celsius). In comparison, analogous
conventional dual MTJs would have a TMR on the order of 50%-100%. Thus,
the TMR may at least double in some embodiments. As a result, the
inverted dual MTJ 100 may have many of the benefits of a conventional
dual MTJ, while producing a higher signal.

[0032]FIG. 3 depicts another exemplary embodiment of an inverted dual MTJ
100' having a thin nonmagnetic spacer/barrier layer 120' and a thicker
nonmagnetic spacer/barrier layer 150' further from the substrate 101'
than the thin nonmagnetic spacer/barrier layer 120. Portions of the
inverted dual magnetic junction 100' are analogous to those in the
inverted dual magnetic junction 100 depicted in FIG. 2. Analogous
portions are labeled similarly. Thus, the magnetic junction 100' includes
a first pinned layer 110' having magnetization 111', a first nonmagnetic
spacer layer 120', a free layer 130', a second nonmagnetic spacer layer
140', and second pinned layer 150' having magnetization 151' that are
analogous to the first pinned layer 110 having magnetization 111, the
first nonmagnetic spacer layer 120, the free layer 130, the second
nonmagnetic spacer layer 140, and the second pinned layer 150',
respectively. Also shown are optional AFM layers 104' and 160' as well as
optional seed layer 102' and optional capping layer 170' that are
analogous to layers 104, 160, 102, and 170, respectively. The structure
and function of the layers 102', 104', 110', 120', 130', 140', 150', 160'
and 170' are analogous to layers 102, 104, 110, 120, 130, 140, 150, 160,
and 170, respectively. In the embodiment shown, the free layer 130' is
multilayer including multiple sublayers. In the embodiment depicted, only
two sublayers 132 and 134 are shown. However, another number of sublayers
may be used. Sublayer B 132 may include CoFeB doped with Cu, Ta, Cr, V
and other elements, while sublayer A 134 may include CoFeB. In another
embodiment, the free layer 130' may include additional layers that may or
may not be magnetic. For example, the free layer 130' may be a synthetic
layer including at magnetic layers interleaved with one or more
nonmagnetic layers.

[0033]FIG. 4 depicts another embodiment of an inverted dual magnetic
junction 100'' having a thin nonmagnetic spacer/barrier layer 120'' and a
thicker nonmagnetic spacer/barrier layer 140'' further from the substrate
101'' than the thin nonmagnetic spacer/barrier layer 120''. Portions of
the inverted dual magnetic junction 100'' are analogous to those in the
inverted dual magnetic junctions 100 and 100'. Analogous portions are
labeled similarly. Thus, the magnetic junction 100'' includes a first
pinned layer 110'', a first nonmagnetic spacer layer 120'', a free layer
130'', a second nonmagnetic spacer layer 140'', and second pinned layer
150'' having magnetization 151'' that are analogous to the first pinned
layer 110/110', the first nonmagnetic spacer layer 120/120', the free
layer 130/130', the second nonmagnetic spacer layer 140/140', and the
second pinned layer 150/150' having magnetization 151/151', respectively.
Also shown are optional AFM layers 104'' and 160'' as well as optional
seed layer 102'' and optional capping layer 170'' that are analogous to
layers 104/104', 160/160', 102/102', and 170/170', respectively. The
structure and function of the layers 102'', 104'', 110'', 120'', 130'',
140'', 150'', 160'' and 170'' are analogous to layers 102/102', 104/104',
110/110', 120/120', 130/130', 140/140', 150/150', 160/160', and 170/170',
respectively. In the embodiment shown in FIG. 4, the first pinned layer
110'' includes a pinned, or reference, layer 116 having magnetization 115
and a pinning layer 112 having magnetization 113, each of which is
ferromagnetic. The pinned layer 112 and reference layer 116 are separated
by nonmagnetic layer 114. For example, pinning layer 112 may include
CoFe, while the reference layer 116 may include CoFeB or a CoFe/CoFeB
bilayer. Note that although only the first pinned layer 110'' is depicted
as including multiple layers, the second pinned layer 150'' or both the
first pinned layer 110'' and the second pinned layer 150'' may include
multiple layers such as the reference layer 116 and pinning layer 112.

[0034]FIG. 5 depicts another embodiment of an inverted dual magnetic
junction 100''' having a thin nonmagnetic spacer/barrier layer 120''' and
a thicker nonmagnetic spacer/barrier layer 140''' further from the
substrate 101''' than the thin nonmagnetic spacer/barrier layer 140'''.
Portions of the inverted dual magnetic junction 100''' are analogous to
those in the inverted dual magnetic junctions 100, 100', and 100''.
Analogous portions are labeled similarly. Thus, the magnetic junction
100''' includes a first pinned layer 110''', a first nonmagnetic spacer
layer 120''', a free layer 130''', a second nonmagnetic spacer layer
140''', and second pinned layer 150''' that are analogous to the first
pinned layer 110/110'/110'', the first nonmagnetic spacer layer
120/120'/120'', the free layer 130/130'/130'', the second nonmagnetic
spacer layer 140/140'/140'', and the second pinned layer 150/150'/150'',
respectively. Also shown are optional AFM layers 104''' and 160''' as
well as optional seed layer 102''' and optional capping layer 170''' that
are analogous to layers 104/104'/104'', 160/160'/160'', 102/102'/102'',
and 170/170'/170'', respectively. The structure and function of the
layers 102''', 104''', 110''', 120''', 130''', 140''', 150''', 160''' and
170''' are analogous to layers 102/102'/102'', 104/104'/104'',
110/110'/110'', 120/120'/120'', 130/130'/130'', 140/140'/140'',
150/150'/150'', 160/160'/160'', and 170/170'/170'', respectively. In the
embodiment shown, the first pinned layer 110''' and the second pinned
layer 150''' both include multiple layers. The second pinned layer 150''
is a synthetic layer including pinning layer 156 having magnetization
155, nonmagnetic layer 154, and reference layer 152 having magnetization
153. Further, the first pinned layer 110''' includes two pinning layers
112' and 118 having magnetizations 113' and 117, respectively, as well as
reference layer 116' with magnetization 115'.

[0035]FIG. 6 depicts another embodiment of an inverted dual magnetic
junction 200 having a thin nonmagnetic spacer/barrier layer 220 and a
thicker nonmagnetic spacer/barrier layer 240 further from the substrate
than the thin nonmagnetic spacer/barrier layer 220. Portions of the
inverted dual magnetic junction 200 are analogous to those in the
inverted dual magnetic junctions 100, 100', 100'', and 100'''. Analogous
portions are labeled similarly. Thus, the magnetic junction 200 includes
a first pinned layer 210, a first nonmagnetic spacer layer 220, a free
layer 230, a second nonmagnetic spacer layer 240, and second pinned layer
250 that are analogous to the first pinned layer 110/110'/110''/110''',
the first nonmagnetic spacer layer 120/120'/120''/120''', the free layer
130/130'/130''/130''', the second nonmagnetic spacer layer
140/140'/140''/140''', and the second pinned layer 150/150'/150''/150''',
respectively. Although not shown, optional AFM layers adjoining one or
more of the pinned layer 210 and 250 may be provided. Also shown are
optional seed layer 202 on substrate 201 and optional capping layer 270
that are analogous to layers 102/102'/102''/102''' and 170/170'/170'',
respectively. The structure and function of the layers 202, 204, 210,
220, 230, 240, 250, 260 and 270 are analogous to layers
102/102'/102''/102''', 104/104'/104''/104''', 110/110'/110''/110''',
120/120'/120''/120''', 130/130'/130''/130''', 140/140'/140''/140''',
150/150'/150''/150''', 160/160'/160''/160''', and 170/170'/170''/170''',
respectively. In the embodiment shown, the magnetizations 211, 231, and
251 are perpendicular-to-plane. Although the magnetizations 211, 231, and
251 are shown as having components only perpendicular-to-plane in FIG. 6,
and only in plane in FIGS. 1-5, a mixture of perpendicular-to-plane and
in-plane may be used. Further, although layers 210, 220, and 230 are
shown as simple layers, multilayers including synthetic antiferromagnets
may be used.

[0036]FIG. 7 depicts another embodiment of inverted dual magnetic
junctions 200' having a thin nonmagnetic spacer/barrier layer 220' and a
thicker nonmagnetic spacer/barrier layer 240' further from the substrate
than the thin nonmagnetic spacer/barrier layer 220'. Portions of the
inverted dual magnetic junction 200' are analogous to those in the
inverted dual magnetic junction 200. Analogous portions are labeled
similarly. Thus, the magnetic junction 200' includes a first pinned layer
210', a first nonmagnetic spacer layer 220', a free layer 230', a second
nonmagnetic spacer layer 240', and second pinned layer 250' that are
analogous to the first pinned layer 210, the first nonmagnetic spacer
layer 220, the free layer 230, the second nonmagnetic spacer layer 240,
and the second pinned layer 250, respectively. Although not shown,
optional AFM layers adjoining one or more of the pinned layer 210' and
250' may be provided. Also shown are optional seed layer 202' on
substrate 201' and optional capping layer 270' that are analogous to
layers 202 and 270, respectively. The structure and function of the
layers 202', 204', 210', 220', 230', 240', 250', 260' and 270' are
analogous to layers 202, 204, 210, 220, 230, 240, 250, 260, and 270,
respectively. In the embodiment shown, the magnetizations of some layers
are perpendicular-to-plane, while others are in plane. The magnetizations
211' and 251' of the pinned layers 210' and 250' are also perpendicular
to each other. In particular, in FIG. 7, the second pinned layer 250' has
a magnetization that is perpendicular-to-plane, while the first pinned
layer 210' has a magnetization that is in-plane. In another embodiment,
the free layer 230' may have a magnetization 231' perpendicular-to-plane
instead of in-plane as is shown. Although the magnetizations are shown as
having components only perpendicular-to-plane or only in-plane in FIG. 7,
a mixture of perpendicular-to-plane and in-plane may be used for a
particular layer. Further, although layers 210', 220', and 230' are shown
as simple layers, multilayers including synthetic antiferromagnets may be
used.

[0037]FIG. 8 depicts another embodiment of inverted dual magnetic
junctions 200'' having a thin nonmagnetic spacer/barrier layer 220'' and
a thicker nonmagnetic spacer/barrier layer 240'' further from the
substrate than the thin nonmagnetic spacer/barrier layer 220''. Portions
of the inverted dual magnetic junction 200'' are analogous to those in
the inverted dual magnetic junctions 200 and 200'. Analogous portions are
labeled similarly. Thus, the magnetic junction 200'' includes a first
pinned layer 210'', a first nonmagnetic spacer layer 220'', a free layer
230'', a second nonmagnetic spacer layer 240'', and second pinned layer
250'' that are analogous to the first pinned layer 210/210', the first
nonmagnetic spacer layer 220/220', the free layer 230/230', the second
nonmagnetic spacer layer 240/240', and the second pinned layer 250/250',
respectively. Although not shown, optional AFM layers adjoining one or
more of the pinned layer 210'' and 250'' may be provided. Also shown are
optional seed layer 202'' on substrate 201'' and optional capping layer
270'' that are analogous to layers 202/202' and 270/270', respectively.
The structure and function of the layers 202'', 204'', 210'', 220'',
230'', 240'', 250'', 260'' and 270'' are analogous to layers 202/202',
204/204', 210/210', 220/220', 230/230', 240/240', 250/250', 260/260', and
270/270', respectively. In the embodiment shown, the magnetizations of
some layers are perpendicular-to-plane, while others are in plane. The
magnetizations 211'' and 251'' of the pinned layers 210'' and 250'' are
also perpendicular to each other. In particular, in FIG. 8, the second
pinned layer 250'' has a magnetization that is in-plane, while the first
pinned layer 210'' has a magnetization that is perpendicular-to-plane. In
another embodiment, the free layer 230'' may have a magnetization 231''
perpendicular-to-plane instead of in-plane as is shown. Although the
magnetizations are shown as having components only perpendicular-to-plane
or only in-plane in FIG. 8, a mixture of perpendicular-to-plane and
in-plane may be used for a particular layer. Further, although layers
210'', 220'', and 230'' are shown as simple layers, multilayers including
synthetic antiferromagnets may be used.

[0038]FIG. 9 depicts another embodiment of an inverted dual magnetic
junction 200''' having a thin nonmagnetic spacer/barrier layer 220''' and
a thicker nonmagnetic spacer/barrier layer 240''' further from the
substrate 201'' than the thin nonmagnetic spacer/barrier layer 220''.
Portions of the inverted dual magnetic junction 200''' are analogous to
those in the inverted dual magnetic junctions 200, 200', and 200''.
Analogous portions are labeled similarly. Thus, the magnetic junction
200''' includes a first pinned layer 210''', a first nonmagnetic spacer
layer 220''', a free layer 230''', a second nonmagnetic spacer layer
240''', and second pinned layer 250''' that are analogous to the first
pinned layer 210/210'/210'', the first nonmagnetic spacer layer
220/220'/220'', the free layer 230/230'/230'', the second nonmagnetic
spacer layer 240/240'/240'', and the second pinned layer 250/250'/250'',
respectively. Although not shown, optional AFM layers adjoining one or
more of the pinned layer 210''' and 250''' may be provided. Also shown
are optional seed layer 202''' on substrate 201''' and optional capping
layer 270''' that are analogous to layers 202/202'/202'' and
270/270'/270'', respectively. The structure and function of the layers
202''', 204''', 210''', 220''', 230''', 240''', 250''', 260''' and 270'''
are analogous to layers 202/202'/202'', 204/204'/204'', 210/210'/210'',
220/220'/220'', 230/230'/230'', 240/240'/240'', 250/250'/250'',
260/260'/260'', and 270/270'/270'', respectively. In the embodiment
shown, the magnetizations 211''' and 251''' of the pinned layers 210'''
and 250''' also perpendicular to each other. However, both magnetizations
211''' and 251''' are in plane. The magnetization 251''', which may be
either into our out of the plane of the page in FIG. 9, is also
perpendicular to the easy axis of the free layer 230'''. Although layers
210''', 220''', and 230''' are shown as simple layers, multilayers
including synthetic antiferromagnets may be used.

[0039] FIG. 10 depicts another embodiment of an inverted dual magnetic
junction 200'''' having a thin nonmagnetic spacer/barrier layer 220''''
and a thicker nonmagnetic spacer/barrier layer 240'''' further from the
substrate 201'' than the thin nonmagnetic spacer/barrier layer 220'''.
Portions of the inverted dual magnetic junction 200'''' are analogous to
those in the inverted dual magnetic junctions 200, 200', 200'' and
200'''. Analogous portions are labeled similarly. Thus, the magnetic
junction 200'''' includes a first pinned layer 210''', a first
nonmagnetic spacer layer 220'''', a free layer 230'''', a second
nonmagnetic spacer layer 240'''', and second pinned layer 250'''' that
are analogous to the first pinned layer 210/210'/210''/210''', the first
nonmagnetic spacer layer 220/220'/220''/220''', the free layer
230/230'/230''/230''', the second nonmagnetic spacer layer
240/240'/240''/240''', and the second pinned layer 250/250'/250''/250''',
respectively. Although not shown, optional AFM layers adjoining one or
more of the pinned layer 210'''' and 250'''' may be provided. Also shown
are optional seed layer 202'''' on substrate 201'''' and optional capping
layer 270'''' that are analogous to layers 202/202'/202''/202''' and
270/270'/270''/270''', respectively. The structure and function of the
layers 202''', 204'''', 210'''', 220'''', 230'''', 240'''', 250'''',
260'''' and 270''' are analogous to layers 202/202'/202''/202''',
204/204'/204''/204''', 210/210'/210''/210''', 220/220'/220''/220''',
230/230'/230''/230''', 240/240'/240''/240''', 250/250'/250''/250''',
260/260'/260''/260''', and 270/270'/270''/270''', respectively. In the
embodiment shown, the magnetizations 211'''' and 251'''' of the pinned
layers 210'''' and 250'''' also perpendicular to each other. However,
both magnetizations 211'''' and 251'''' are in plane. The magnetization
211''', which may be either into our out of the plane of the page in FIG.
10, is also perpendicular to the easy axis of the free layer 230''''.
Although layers 210'''', 220'''', and 230'''' are shown as simple layers,
multilayers including synthetic antiferromagnetics may be used.

[0040] The inverted dual magnetic junctions 100', 100'', 100''', 200,
200', 200'', 200''', and 200'''' of FIGS. 3-10 share at least some of the
benefits of the inverted dual magnetic junction 100 of FIG. 2. In
particular, the magnetoresistance ration, or TMR for barrier layers, may
be increased significantly. It may also be noted that the free layer may
be engineered such that the top side (thicker barrier layer further from
the substrate) has a higher TMR than the bottom side (thinner barrier
layer closer to the substrate). In addition, the second pinned layer and
thicker barrier are desired to be engineered to have a higher TMR than
the first pinned layer and the thinner barrier layer closer to the
substrate. For example, the use of a CoFeB(doped)/CoFeB bilayer free
layer, MgO barrier layers having the thicknesses described above, and a
CoFeB or CoFeB/CoFe bilayer as the second pinned layer may be desired.

[0041] FIG. 11 depicts an exemplary embodiment of a method 300 for
fabricating an inverted dual magnetic junction. For simplicity, some
steps may be omitted, combined, or interleaved. The method 300 is
described in the context of the magnetic junction 100. However, the
method 310 may be used on other magnetic junctions such as the junctions
100, 100', 100'', 100''', 200, 200', 200'', 200''', and/or 200''''.
Further, the method 300 may be incorporated into fabrication of magnetic
memories. Thus the method 300 may be used in manufacturing a STT-RAM or
other magnetic memory. The method 300 may commence after the seed
layer(s) 102 and optional AFM layer 104 are provided.

[0042] The pinned layer 110 is provided, via step 302. Step 302 may
include depositing the desired materials at the desired thickness of the
pinned layer 110. Further, step 302 may include providing a SAF.

[0043] The nonmagnetic spacer/barrier layer 120 is provided, via step 304.
Step 304 may include depositing the desired nonmagnetic materials,
including but not limited to crystalline MgO. In addition, the desired
thickness of material may be deposited in step 304.

[0044] The free layer 130 is provided, via step 306. An additional
nonmagnetic spacer/barrier layer, such as layer 140 may be provided, via
step 308. Step 308 includes providing a sufficient thickness for the
nonmagnetic spacer/barrier layer 140 such that the layer 140 is thicker
than the layer 120. In some embodiments, step 308 includes depositing a
layer of crystalline MgO that is thicker than the layer 120.

[0045] An additional pinned layer, such as the layer 150 is provided, via
step 310. Fabrication may then be completed, via step 312. For example,
the antiferromagnetic layer 160 and/or the capping layer 170 may be
provided. In some embodiments, in which the layers of the magnetic
junction are deposited as a stack, then defined, step 312 may include
defining the magnetic junction 100, performing anneals, or otherwise
completing fabrication of the magnetic junction 100. Further, if the
magnetic junction 100 is incorporated into a memory, such as an STT-RAM,
step 312 may include providing contacts, bias structures, and other
portions of the memory. Consequently, the benefits of the magnetic
junction may be achieved.

[0046] Further, the magnetic junctions 100, 100', 100'', 100''', 200,
200', 200'', 200''' and/or 200'''' may be used in a magnetic memory. FIG.
12 depicts an exemplary embodiment of one such memory 400. The magnetic
memory 400 includes reading/writing column select drivers 402 and 406 as
well as word line select driver 404. Note that other and/or different
components may be provided. The storage region of the memory 400 includes
magnetic storage cells 410. Each magnetic storage cell includes at least
one magnetic junction 412 and at least one selection device 414. In some
embodiments, the selection device 414 is a transistor. The magnetic
junctions 412 may be one of the magnetic junctions 100, 100', 100'',
100''', 200, 200', 200'', 200''' and/or 200''''. Although one magnetic
junction 412 is shown per cell 410, in other embodiments, another number
of magnetic junctions 412 may be provided per cell. As such, the magnetic
memory 400 may enjoy the benefits described above, such as a higher
signal.

[0047] Various dual inverted magnetic junctions 100, 100', 100'', 100''',
200, 200', 200'', 200''' and 200'''' have been disclosed. Note that
various features of the dual inverted junctions 100, 100', 100'', 100''',
200, 200', 200'', 200''' and 200'''' may be combined. Thus, one or more
of the benefits of the magnetic junctions 100, 100', 100'', 100''', 200,
200', 200'', 200''' and 200'''' such as improved signal, may be achieved.

[0048] A method and system for providing an inverted dual magnetic
junction that might be used magnetic memory element, for example, in spin
transfer torque based memories, and memory fabricated using the magnetic
memory element has been described. The method and system have been
described in accordance with the exemplary embodiments shown, and one of
ordinary skill in the art will readily recognize that there could be
variations to the embodiments, and any variations would be within the
spirit and scope of the method and system. For example, various
combinations including features of one or more of the dual inverted MTJs
shown in FIGS. 2-10 may be used. Further, although barrier layers are
described, other nonmagnetic spacer layers might be used. Accordingly,
many modifications may be made by one of ordinary skill in the art
without departing from the spirit and scope of the appended claims.