Vacuum technologies are the core fundamental covering extensive industrial areas such as the space engineering, the biotechnology, the material engineering and the chemical engineering. To respond various demands for such fundamentals, we are producing/supplying various products from small devices and large scaled equipment including vacuum devices for researches, semiconductor testing devices, display process equipment, furnaces for semiconductors and valves for chemical applications.

TDS (Thermal Desorption Spectroscopy):

Thermal Desorption Spectroscopy (TDS) is mostly used to acquire information on the biding energies of molecules and atoms. The quantity and substance of a gas occurring in the vacuum process are analyzed by using the vacuum gage and the mass spectrometer. This technology enables the detection of the quantity change and the composition of a gas even in a minimal amount and the measurements of temporal change of the gas in each temperature in a vacuum device.

WCS (Wafer Contamination Scanner):

Powerful, fully automated wafer metal-contaminant detection System. Developed in collaboration with a major semiconductor Company.