Unique Platen Liftwith Probe Hover Control™

Measurement accuracy depends on the contact quality first!The highly repeatable (1µm) platen lift design with three discrete positions for contact, separation (300µm), and loading (3mm) with a safety lock utility are all examples of unparalleled functionality incorporated into MPI manual probe systems. These features prevent unexpected probe or wafer damage while providing intuitive control and accurate contact positioning. This capability is especially critical in both high frequency and high power applications in order to achieve the most accurate measurement results.

Height Adjustment Scale

The probe platen has 25 mm of fine height adjustment required to support various applications. The unique 1mm accurate scale gives direct feedback about the current position.

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Compact and Rigid Platen Design

The compact and rigid platen design accommodates up to ten DC or four RF MicroPositioners for various application requirements.

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Various Chuck Options

The manual systems are available with various chuck options to meet different budgets and application requirements. Chuck options include MPI’s coaxial or triaxialChucks or various ERS thermal chucksto support temperature measurement up to 300 °C – as example for seamless integration of the thermal touch controller for quick and convenient access and operation.

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Auxiliary Chucks

The RF chucks include two auxiliary chucks built in ceramic material for accurate RF calibration.

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Various Optic and Movement Choices

A wide range of Optics is available with a choice between stereo for all common DC/CV applications or single tube high magnification microscopes for RF or load-pull configurations.