Good Morning All,
Looking fair this morning. Epi has a water leak and a vacuum leak
and a dirty tube-checking it out. Nitride looks like it may have a bad pump-
investigating. Poly is getting close to pull and clean-probably early
next week. SiGe in leak test for Germane.Everything else looks OK for now.
Date: 11/16/2005 THICKNESS-Change at
Tube Name/Number Status Comments
Tylan 1 Up
Tylan 2 Up
Tylan 3 Up
Tylan 4 Up
Tylan 5-BBr3 Up
Tylan 6-POCl3 Up
Tylan 7-TEOS2 Up
Tylan 8-SiGe yellow
germane in leak test
10.42/30
Tylan 9-Poly Up 27.86/30
Tylan 10-Nitride Up 5.74/30
Tylan 11-BPSG-LTO Up 11.22/30
Tylan 12-FGA Up
Thermco 1 yellow problem with front zone temp
Thermco 2 Up
Thermco Poly Up
Thermco Nitride Down Testing
Burn Box Up
ZYGO up .
GAAS 22 UP
GAAS 23 UP
SiH4 for furnaces B on line 390 changeover working well
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