Abstract

AlN films, thick, were sputtered on -cut substrates and four electroacoustic coupling configurations were realized and characterized for and surface acoustic wave(SAW) propagation directions. The temperature-coefficient of delay dispersion curves of the four configurations was experimentally evaluated and eight temperature-compensated points were estimated. The velocity anisotropy of the multilayers was investigated for different AlN film thicknesses, electric excitation conditions, and temperature values. The design trade-offs required for temperature-compensated, matched, gigahertz-range, enhanced-coupling, low loss SAWdevices are provided for the four dispersive coupling configurations.