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Abstract

The overcoat consists of a fluoropolymer, has pores and is wetted with perfluorinated lubricants. It is formed by plasma polymerization and subsequent plasma etching. In a plasma generator, magnetic disk 1 is cleaned by cautious plasma etching. On the cleaned surface, a fluorinated material is plasma deposited in a CF4/H2 atmosphere and polymerized. By appropriately tuning the process parameters, the properties of the deposited fluoropolymer 2 are adjusted such that its wear resistance is high and pores 3 are formed (Fig. 1). Then, fluoropolymer 2 is plasma etched in a CF4 atmosphere, decreasing the layer thickness and enlarging the pores (Fig. 2). The enlarged pores are used as reservoirs for lubricant 4 (Fig. 3).

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United States

Language

English (United States)

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Overcoat on Metallic Magnetic Disks

The overcoat consists of a fluoropolymer, has pores and is wetted with
perfluorinated lubricants. It is formed by plasma polymerization and subsequent
plasma etching. In a plasma generator, magnetic disk 1 is cleaned by cautious
plasma etching. On the cleaned surface, a fluorinated material is plasma
deposited in a CF4/H2 atmosphere and polymerized. By appropriately tuning the
process parameters, the properties of the deposited fluoropolymer 2 are adjusted
such that its wear resistance is high and pores 3 are formed (Fig. 1). Then,
fluoropolymer 2 is plasma etched in a CF4 atmosphere, decreasing the layer
thickness and enlarging the pores (Fig. 2). The enlarged pores are used as
reservoirs for lubricant 4 (Fig. 3).