Use of high-purity quartz or corundum control as a furnace inside, removable-way sealed on three sides, has a good clean and vacuum; Fire-resistant, thermal insulation material used all the advanced light-weight fiber materials, the whole light quality and low energy consumption; Heating elements used U Mo-Si ( Si-C) rods or imported resistance wire. Temperature control system uses imported multi-intelligent temperature controller, it has a good stability and repeatability.

CVD series atmosphere vacuum tube furnace applicable to a wide range of high-, medium-and low-temperature CVD process, such as: the development of Carbon nanotube (CNT), crystalline silicon coated board, the controlled growth of nano-zinc oxide structure, and so on; Also be applied to metal materials diffusion welding, as well as the heat treatment in a vacuum or protective atmosphere.

Number of temperature region The total length of the heating district The outside diameter of furnace tube high temperature / Medium temperature / low temperature Series code