Abstract

In this work, MEMS based parallel plate variable capacitor, micromachined-inductor and LC filter that is formed by combining these two are presented. Parallel plate variable capacitor is designed as tuned with 8V, yet its tuning voltage increased around 50 V due to high tensile stress. However its
tuning range increased to %300 related to the tensile stress resulting bended beam structure. The capacitance changes from 87fF to 260fF with the voltages from 0V to 55V. Additionally, inductors are designed, fabricated using same process steps. They achieve 1.5 to 2 nH inductance values and quality factors from 5 to 10. These designed inductor and variable capacitor are combined to form an LC filter whose center frequency changes form 8.194 GHz to 6.192 GHz with applied voltages from 0V to 30V.