Hi all --
As you may know, a toxic gas alarm went off and caused evacuation of the
lab (though not the building.) It appears that it wasn't an actual
toxic that was detected, but rather that the burnbox which treats the
exhaust from the LP furnaces may have been overloaded. The LPCVD
furnaces have been shutdown on Coral until the burnbox can be
investigated. Otherwise, the lab is safe to occupy.
Mary
--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang at stanford.eduhttp://snf.stanford.edu