Abstract

Two versions of micro‐scanning tunnelingmicroscopes (micro‐STMs) have been fabricated. The integrated micro‐STMs are fabricated from single crystalsilicon using the high‐aspect‐ratio SCREAM process. Each micro‐STM includes integrated xy comb drive actuators and a torsional z actuator with integrated cantilever and tip. One micro‐STM measures approximately 200 μm on‐a‐side and is an example of a STM element for a STM array architecture. Another, larger micro‐STM/atomic force microscope measures 2 mm on‐a‐side including a 1 mm long cantilever with a 20 nm diam tip. We demonstrate the operation of this larger STM by obtaining a STM image of a 200 nm metal conductor on a silicon chip.