Abstract

The fabrication of hexagonal barium titanate films by sputtering technique is reported. Compressed powders of hexagonal bariumtitanate were sputtered in argon/oxygen gas mixtures. The as‐grown films were amorphous and a post‐deposition annealing above 700 °C resulted in the crystallization of the films with hexagonal crystal structure. Transmission electron microscopy was used to study the crystallization of the amorphous films.