Silicon Capacitors

Murata high-density silicon capacitors are developed with a semiconductor MOS process and are using the third dimension to substantially increase the capacitor surface and thus its capacitance without increasing the capacitor footprint.

This technology provides a fully MOS compatible back-end technology for a full passive integration platform that can be further hetero-integrated Multiple-Chip-Module or flip-chip with other technologies (CMOS, MEMS, etc.) in a SIP.