The EasyTube® 6000 series multi-tube horizontal furnace systems are automatically controlled research units for batch processing of up to 100 wafers per run per tube, with up to four separately configured process tubes.

CVD Equipment Corporation offers collaboration services for your research grants, funding proposals, or startup funding. We provide industry resources with the aim to support commercialization and job creation. Contact us for a letter of collaboration.

Do you need to take your research to the next level?

Our high-performance FirstNano® R&D chemical vapor deposition systems and process solutions are used to develop materials and coatings for innovative research worldwide.

Process Equipment

FirstNano®, the R&D product line of CVD Equipment Corporation, enables tomorrow's technologies by designing and building safe, robust, and high-performance turnkey R&D CVD Process Equipment for university research groups and industrial R&D labs.

Process Types

Do you know what process and/or materials you are working with on your next rechearch project? Here you will find what you need to process graphene, CNTs, TMDs, thin films, MOCVD, LPCVD, APCVD, selenization/sufurization, crystal growth, and the equipment that processes it.

Gas Delivery

Our gas delivery solutions include gas panels and gas cabinets that can safely deliver flammable, corrosive, toxic, or pyrophoric gasses/vapors to the point of use. They can be purchased as standalone units or integrated with our CVD systems as a turnkey processing platform.

What Researchers are Saying About Our Systems

I built two CVD systems when setting up my lab. They were basically clones of a system I had used previously, so the design was already in my mind and mostly down on paper. However, I severely underestimated the time involved in selecting all the proper pieces and parts. By the time things finally came together and the first system came on-line, I found myself wishing I had simply purchased complete solutions from a company that had already invested the time to engineer a reliable system. As a new faculty member, funds are a limited resource, but time is even more so. Quickly getting the ball rolling on research is worth more than what one might save with a home-built approach.

- Erik Einarsson, Ph.D, Assistant Professor

"I am glad to share with you the good news that ever since the very first batch of samples we continued to produce long and uniform silicon nanowires. Suffice to say that members of our research group are all impressed with the turn-key reliability as well as extensive safety features of this LPCVD system which greatly satisfy the needs of our fundamental research program in nanomaterials. We also appreciate the custom system design effort to cater to our needs from your expert team and your ability to deliver and install in a timely manner."

"The FN/CVD Application & Research Lab provides our company with one-stop CNT process capabilities and technical staff support that we simply cannot get anywhere else and that help us accelerate the commercialization of our proprietary thin film technologies"

- Vincent Stenger, Ph.D, Principal Research Engineer

"EasyTube® provides a very versatile platform for synthesizing various semiconductor nanowires. The configuration allows for consistent nanowire growths."

- Yi Gu, Ph.D, Assistant Professor of Physics | Gu Research Group

"The researchers at the University of Cincinnati partnered with FirstNano®, a division of CVD Equipment Corp. of Ronkonkoma, N.Y., to use their laboratory and a specialized furnace called EasyTube® 3000. With this equipment, the research team succeeded to produce 18 millimeter long CNT array which is considered the longest aligned CNTs reported ever."

"It has been a pleasurable interaction with the FirstNano® process and development team. Collectively, collaborations between the Cornell Nanoscale Facility and FirstNano® have yielded single wall carbon nanotube growth from lithographically defined catalyst pads on full four inch wafers. Incorporating wafer scale nanoscale fabrication processes with predefined carbon based systems represents a major step forward in creating complex carbon based nanostructures. This enhanced functionality raises intriguing possibilities in modern scientific research of widely disparate endeavors."

- B. Rob Ilic, Ph.D, Research Associate | User Program Manager

"The purchase of the EasyTube® 3000 will enlarge the spectrum of our research with the growth of heterostructured nanowires, their doping, and with the possibility to extend the growth to a wide variety of other materials thanks to the liquid precursor kits. Our projects cover fundamental aspects (growth, carrier transport …) as well as potential applications (Nanoelectronics, Solar Energy, Nanophotonics, MEMS, and Sensors)."