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Abstract

We demonstrate amorphous and polycrystalline anatase TiO2 thin films and submicrometer-wide waveguides with promising optical properties for microphotonic devices. We deposit both amorphous and polycrystalline anatase TiO2 using reactive sputtering and define waveguides using electron-beam lithography and reactive ion etching. For the amorphous TiO2, we obtain propagation losses of 0.12 ± 0.02 dB/mm at 633 nm and 0.04 ± 0.01 dB/mm at 1550 nm in thin films and 2.6 ± 0.5 dB/mm at 633 nm and 0.4 ± 0.2 dB/mm at 1550 nm in waveguides. Using single-mode amorphous TiO2 waveguides, we characterize microphotonic features including microbends and optical couplers. We show transmission of 780-nm light through microbends having radii down to 2 μm and variable signal splitting in microphotonic couplers with coupling lengths of 10 μm.

Figures (7)

Fig. 1 Raman spectra of TiO2 thin-films deposited by reactive RF magnetron sputtering at 290 K (top) and 625 K (bottom). The film deposited at 290 K has no measurable Raman peaks, indicating an amorphous structure, while the film deposited at 625 K shows peaks at 144, 194, 399, 514, and 639 cm–1, which correspond to the anatase crystalline phase of TiO2.