Metrology Systems and Products

Inspectrology carries a complete line of Metrology Systems. IVS Metrology systems have been providing reliable, robust measurements to fabs world wide for 30 years.

IVS Metrology Systems feature unsurpassed wafer measurement capability on the toughest layers, CD & overlay measurements in the same recipe and a host of other features.

Inspectrology’s Clear Wafer Aligner is an innovative imaging source used to facilitate the alignment of transparent wafers such as Silicon Carbide, Gallium Nitride and Saphire.

Replacement Parts for IVS Metrology Systems

Inspectrology carries a complete line of replacement parts for the entire line of IVS Metrology Systems. We can provide you with many new parts for your IVS System. We also have a complete line of IVS System parts have been expertly refurbished in house by our own IVS system engineers.

IVS Metrology System Support Services

Inspectrology offers comprehensive support services for all IVS Metrology systems, including Service Contracts, Preventative Maintenance Services and Emergency Service. In addition we offer a wide range of educational services, including System Training for IVS Metrology Systems. The people who know these systems best, the original designers and developers of the IVS Metrology systems, also provide this outstanding IVS System Training.

Metrology Industry Resources

As dedicated metrology professionals, Inspectrology engineers have contributed metrology technical papers and other important research material regularly. We also partner with leading metrology and wafer inspection companies to ensure total support and service to all of our customers worldwide.