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Making Josephson Tunnel Junctions

Publishing Venue

IBM

Related People

Broom, RF: AUTHOR

Abstract

Josephson tunnel junctions are conventionally made by sandwiching upon a substrate s metal electrode capable of superconductivity, a very thin insulating layer, and a second superconductive electrode. Photolithographic techniques are usually employed in the process.

Country

United States

Language

English (United States)

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Making Josephson Tunnel Junctions

Josephson tunnel junctions are conventionally made by sandwiching upon a
substrate s metal electrode capable of superconductivity, a very thin insulating
layer, and a second superconductive electrode. Photolithographic techniques
are usually employed in the process.

Contamination of the very sensitive insulation which normally is exposed
during photoresist developing and stripping steps can be avoided, by covering
the oxide which constitutes the insulation by a thin film of gold. Oxide deposition
is now carried out immediately after evaporation formation of the lower electrode,
and without stripping the resist or removing the wafer from the vacuum system.
Thereupon, the vacuum system is rapidly pumped down to low pressure and a
thin layer of gold is evaporated over the wafer. The oxide is now sandwiched
between the original metal and the gold film.

The wafer is now removed from the vacuum system and prepared for the
second superconductor evaporation in the usual way. The fragile oxide is
protected during this operation against any contamination by the passive and
oxidation resistant gold film. Since the gold film is thin enough, i.e., far below
1000 angstroms, it will diffuse into the second metal electrode and not affect the
superconductivity of the electrode. The second electrode, not shown in the
drawing, will finally be deposited on top of the structure.